JP5683063B2 - 窒化アルミニウム又は酸化ベリリウムのセラミックカバーウェハ - Google Patents

窒化アルミニウム又は酸化ベリリウムのセラミックカバーウェハ Download PDF

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JP5683063B2
JP5683063B2 JP2008227210A JP2008227210A JP5683063B2 JP 5683063 B2 JP5683063 B2 JP 5683063B2 JP 2008227210 A JP2008227210 A JP 2008227210A JP 2008227210 A JP2008227210 A JP 2008227210A JP 5683063 B2 JP5683063 B2 JP 5683063B2
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aluminum nitride
nitride ceramic
ceramic wafer
oxide
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JP2009132991A5 (enExample
JP2009132991A (ja
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エム ラシード ムハマド
エム ラシード ムハマド
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Applied Materials Inc
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Applied Materials Inc
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
JP2008227210A 2007-09-05 2008-09-04 窒化アルミニウム又は酸化ベリリウムのセラミックカバーウェハ Active JP5683063B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US97025007P 2007-09-05 2007-09-05
US60/970,250 2007-09-05
US97075707P 2007-09-07 2007-09-07
US60/970,757 2007-09-07

Publications (3)

Publication Number Publication Date
JP2009132991A JP2009132991A (ja) 2009-06-18
JP2009132991A5 JP2009132991A5 (enExample) 2012-12-20
JP5683063B2 true JP5683063B2 (ja) 2015-03-11

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JP2008227210A Active JP5683063B2 (ja) 2007-09-05 2008-09-04 窒化アルミニウム又は酸化ベリリウムのセラミックカバーウェハ

Country Status (6)

Country Link
US (1) US8252410B2 (enExample)
JP (1) JP5683063B2 (enExample)
KR (1) KR101099892B1 (enExample)
CN (1) CN104674183A (enExample)
SG (1) SG150492A1 (enExample)
TW (1) TWI447791B (enExample)

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US10975469B2 (en) 2017-03-17 2021-04-13 Applied Materials, Inc. Plasma resistant coating of porous body by atomic layer deposition
JP6914170B2 (ja) * 2017-11-07 2021-08-04 日本特殊陶業株式会社 セラミックス基材の保護方法
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JP7654636B2 (ja) * 2019-08-15 2025-04-01 マテリオン コーポレイション 酸化ベリリウムペデスタル

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KR20090025178A (ko) 2009-03-10
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JP2009132991A (ja) 2009-06-18
SG150492A1 (en) 2009-03-30
US8252410B2 (en) 2012-08-28
US20090068433A1 (en) 2009-03-12

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