JP5671436B2 - ガラス基板の製造方法 - Google Patents

ガラス基板の製造方法 Download PDF

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Publication number
JP5671436B2
JP5671436B2 JP2011234972A JP2011234972A JP5671436B2 JP 5671436 B2 JP5671436 B2 JP 5671436B2 JP 2011234972 A JP2011234972 A JP 2011234972A JP 2011234972 A JP2011234972 A JP 2011234972A JP 5671436 B2 JP5671436 B2 JP 5671436B2
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Japan
Prior art keywords
glass substrate
resin layer
glass
etching
hole
Prior art date
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Expired - Fee Related
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JP2011234972A
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English (en)
Japanese (ja)
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JP2013091582A (ja
JP2013091582A5 (ru
Inventor
寛彦 後閑
寛彦 後閑
宗利 入澤
宗利 入澤
邦人 梶谷
邦人 梶谷
中川　邦弘
邦弘 中川
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Mitsubishi Paper Mills Ltd
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Mitsubishi Paper Mills Ltd
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Publication date
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Priority to JP2011234972A priority Critical patent/JP5671436B2/ja
Publication of JP2013091582A publication Critical patent/JP2013091582A/ja
Publication of JP2013091582A5 publication Critical patent/JP2013091582A5/ja
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Publication of JP5671436B2 publication Critical patent/JP5671436B2/ja
Expired - Fee Related legal-status Critical Current
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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)
  • Position Input By Displaying (AREA)
JP2011234972A 2011-10-26 2011-10-26 ガラス基板の製造方法 Expired - Fee Related JP5671436B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011234972A JP5671436B2 (ja) 2011-10-26 2011-10-26 ガラス基板の製造方法

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Application Number Priority Date Filing Date Title
JP2011234972A JP5671436B2 (ja) 2011-10-26 2011-10-26 ガラス基板の製造方法

Publications (3)

Publication Number Publication Date
JP2013091582A JP2013091582A (ja) 2013-05-16
JP2013091582A5 JP2013091582A5 (ru) 2014-06-05
JP5671436B2 true JP5671436B2 (ja) 2015-02-18

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ID=48615020

Family Applications (1)

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JP2011234972A Expired - Fee Related JP5671436B2 (ja) 2011-10-26 2011-10-26 ガラス基板の製造方法

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JP (1) JP5671436B2 (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6262039B2 (ja) 2014-03-17 2018-01-17 株式会社ディスコ 板状物の加工方法
JP6301203B2 (ja) 2014-06-02 2018-03-28 株式会社ディスコ チップの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007145656A (ja) * 2005-11-29 2007-06-14 Nippon Electric Glass Co Ltd 縦穴を有するガラス基板およびその製造方法
JP2010070415A (ja) * 2008-09-18 2010-04-02 Tokyo Ohka Kogyo Co Ltd 加工ガラス基板の製造方法

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Publication number Publication date
JP2013091582A (ja) 2013-05-16

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