JP2013091582A5 - - Google Patents
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- Publication number
- JP2013091582A5 JP2013091582A5 JP2011234972A JP2011234972A JP2013091582A5 JP 2013091582 A5 JP2013091582 A5 JP 2013091582A5 JP 2011234972 A JP2011234972 A JP 2011234972A JP 2011234972 A JP2011234972 A JP 2011234972A JP 2013091582 A5 JP2013091582 A5 JP 2013091582A5
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- hole
- wall
- fine cracks
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011234972A JP5671436B2 (ja) | 2011-10-26 | 2011-10-26 | ガラス基板の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011234972A JP5671436B2 (ja) | 2011-10-26 | 2011-10-26 | ガラス基板の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013091582A JP2013091582A (ja) | 2013-05-16 |
JP2013091582A5 true JP2013091582A5 (ru) | 2014-06-05 |
JP5671436B2 JP5671436B2 (ja) | 2015-02-18 |
Family
ID=48615020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011234972A Expired - Fee Related JP5671436B2 (ja) | 2011-10-26 | 2011-10-26 | ガラス基板の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5671436B2 (ru) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6262039B2 (ja) | 2014-03-17 | 2018-01-17 | 株式会社ディスコ | 板状物の加工方法 |
JP6301203B2 (ja) | 2014-06-02 | 2018-03-28 | 株式会社ディスコ | チップの製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007145656A (ja) * | 2005-11-29 | 2007-06-14 | Nippon Electric Glass Co Ltd | 縦穴を有するガラス基板およびその製造方法 |
JP2010070415A (ja) * | 2008-09-18 | 2010-04-02 | Tokyo Ohka Kogyo Co Ltd | 加工ガラス基板の製造方法 |
-
2011
- 2011-10-26 JP JP2011234972A patent/JP5671436B2/ja not_active Expired - Fee Related
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