JP2013091582A5 - - Google Patents

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Publication number
JP2013091582A5
JP2013091582A5 JP2011234972A JP2011234972A JP2013091582A5 JP 2013091582 A5 JP2013091582 A5 JP 2013091582A5 JP 2011234972 A JP2011234972 A JP 2011234972A JP 2011234972 A JP2011234972 A JP 2011234972A JP 2013091582 A5 JP2013091582 A5 JP 2013091582A5
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JP
Japan
Prior art keywords
glass substrate
hole
wall
fine cracks
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011234972A
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English (en)
Japanese (ja)
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JP5671436B2 (ja
JP2013091582A (ja
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Priority to JP2011234972A priority Critical patent/JP5671436B2/ja
Priority claimed from JP2011234972A external-priority patent/JP5671436B2/ja
Publication of JP2013091582A publication Critical patent/JP2013091582A/ja
Publication of JP2013091582A5 publication Critical patent/JP2013091582A5/ja
Application granted granted Critical
Publication of JP5671436B2 publication Critical patent/JP5671436B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011234972A 2011-10-26 2011-10-26 ガラス基板の製造方法 Expired - Fee Related JP5671436B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011234972A JP5671436B2 (ja) 2011-10-26 2011-10-26 ガラス基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011234972A JP5671436B2 (ja) 2011-10-26 2011-10-26 ガラス基板の製造方法

Publications (3)

Publication Number Publication Date
JP2013091582A JP2013091582A (ja) 2013-05-16
JP2013091582A5 true JP2013091582A5 (ru) 2014-06-05
JP5671436B2 JP5671436B2 (ja) 2015-02-18

Family

ID=48615020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011234972A Expired - Fee Related JP5671436B2 (ja) 2011-10-26 2011-10-26 ガラス基板の製造方法

Country Status (1)

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JP (1) JP5671436B2 (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6262039B2 (ja) 2014-03-17 2018-01-17 株式会社ディスコ 板状物の加工方法
JP6301203B2 (ja) 2014-06-02 2018-03-28 株式会社ディスコ チップの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007145656A (ja) * 2005-11-29 2007-06-14 Nippon Electric Glass Co Ltd 縦穴を有するガラス基板およびその製造方法
JP2010070415A (ja) * 2008-09-18 2010-04-02 Tokyo Ohka Kogyo Co Ltd 加工ガラス基板の製造方法

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