JP2013091582A5 - - Google Patents

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Publication number
JP2013091582A5
JP2013091582A5 JP2011234972A JP2011234972A JP2013091582A5 JP 2013091582 A5 JP2013091582 A5 JP 2013091582A5 JP 2011234972 A JP2011234972 A JP 2011234972A JP 2011234972 A JP2011234972 A JP 2011234972A JP 2013091582 A5 JP2013091582 A5 JP 2013091582A5
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JP
Japan
Prior art keywords
glass substrate
hole
wall
fine cracks
etching
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JP2011234972A
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Japanese (ja)
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JP2013091582A (en
JP5671436B2 (en
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Priority to JP2011234972A priority Critical patent/JP5671436B2/en
Priority claimed from JP2011234972A external-priority patent/JP5671436B2/en
Publication of JP2013091582A publication Critical patent/JP2013091582A/en
Publication of JP2013091582A5 publication Critical patent/JP2013091582A5/ja
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Publication of JP5671436B2 publication Critical patent/JP5671436B2/en
Expired - Fee Related legal-status Critical Current
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Description

これらの問題を解決するためのガラス基板の製造方法として、特許文献３では、サンドブラスト処理した後にエッチング処理を行うことにより、サンドブラスト処理によって穴の内壁に生じた微細なクラックをエッチング処理によって平滑にすることにより、穴の内壁の微細なクラックが極めて少ないガラス基板を製造することが可能であるとするガラス基板の製造方法が開示されている。しかしながら、この方法ではガラス基材表面に耐フッ酸性の酸化物皮膜を形成しなくてはならず、工程が複雑であり、生産性が悪化するという問題があった。
Smooth as glass substrate manufacturing method to solve these problems, Patent Document 3, by performing an etching process after the sandblasting, fine cracks occurred on the inner wall of the hole by the sandblast treatment by etching Thus, a method for producing a glass substrate is disclosed in which it is possible to produce a glass substrate with very few fine cracks on the inner wall of the hole. However, this method has a problem that a hydrofluoric acid-resistant oxide film must be formed on the surface of the glass substrate, the process is complicated, and productivity is deteriorated.

JP2011234972A 2011-10-26 2011-10-26 Manufacturing method of glass substrate Expired - Fee Related JP5671436B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011234972A JP5671436B2 (en) 2011-10-26 2011-10-26 Manufacturing method of glass substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011234972A JP5671436B2 (en) 2011-10-26 2011-10-26 Manufacturing method of glass substrate

Publications (3)

Publication Number Publication Date
JP2013091582A JP2013091582A (en) 2013-05-16
JP2013091582A5 true JP2013091582A5 (en) 2014-06-05
JP5671436B2 JP5671436B2 (en) 2015-02-18

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ID=48615020

Family Applications (1)

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JP2011234972A Expired - Fee Related JP5671436B2 (en) 2011-10-26 2011-10-26 Manufacturing method of glass substrate

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JP (1) JP5671436B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6262039B2 (en) 2014-03-17 2018-01-17 株式会社ディスコ Processing method of plate
JP6301203B2 (en) 2014-06-02 2018-03-28 株式会社ディスコ Chip manufacturing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007145656A (en) * 2005-11-29 2007-06-14 Nippon Electric Glass Co Ltd Glass substrate with longitudinal pore and its producing method
JP2010070415A (en) * 2008-09-18 2010-04-02 Tokyo Ohka Kogyo Co Ltd Method for manufacturing processed glass substrate

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