JP5668988B2 - 昇華性物質の精製装置 - Google Patents

昇華性物質の精製装置 Download PDF

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JP5668988B2
JP5668988B2 JP2011201395A JP2011201395A JP5668988B2 JP 5668988 B2 JP5668988 B2 JP 5668988B2 JP 2011201395 A JP2011201395 A JP 2011201395A JP 2011201395 A JP2011201395 A JP 2011201395A JP 5668988 B2 JP5668988 B2 JP 5668988B2
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precipitation
sublimation
tank
crystal
pipe
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JP2013059750A (ja
JP2013059750A5 (https=
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弥太郎 桐山
弥太郎 桐山
時男 桐山
時男 桐山
啓祐 板倉
啓祐 板倉
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有限会社桐山製作所
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  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP2011201395A 2011-09-15 2011-09-15 昇華性物質の精製装置 Active JP5668988B2 (ja)

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JP2011201395A JP5668988B2 (ja) 2011-09-15 2011-09-15 昇華性物質の精製装置

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JP2013059750A JP2013059750A (ja) 2013-04-04
JP2013059750A5 JP2013059750A5 (https=) 2013-05-16
JP5668988B2 true JP5668988B2 (ja) 2015-02-12

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Publication number Priority date Publication date Assignee Title
CN109022052B (zh) * 2018-08-16 2020-11-27 江苏永大化工机械有限公司 自热式净化炉
KR102252302B1 (ko) * 2018-11-09 2021-05-17 주식회사 레이크머티리얼즈 고순도 반도체용 승화장치
JP7390703B2 (ja) * 2019-10-07 2023-12-04 国立研究開発法人産業技術総合研究所 昇華装置及び昇華方法

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JPS563855B2 (https=) * 1972-09-14 1981-01-27
JP2003144907A (ja) * 2001-11-16 2003-05-20 Ishikawajima Harima Heavy Ind Co Ltd 粒子製造装置及び方法
JP2009106917A (ja) * 2007-10-29 2009-05-21 Kiriyama Seisakusho:Kk 昇華性物質の分離・精製装置
JP5275213B2 (ja) * 2009-12-25 2013-08-28 コスモ石油株式会社 分離回収装置及び分離回収方法

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