JP5623007B2 - 多重ビーム−レーザダイオードとしての構造を有するモノリシック集積型レーザダイオードチップ - Google Patents

多重ビーム−レーザダイオードとしての構造を有するモノリシック集積型レーザダイオードチップ Download PDF

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JP5623007B2
JP5623007B2 JP2008167248A JP2008167248A JP5623007B2 JP 5623007 B2 JP5623007 B2 JP 5623007B2 JP 2008167248 A JP2008167248 A JP 2008167248A JP 2008167248 A JP2008167248 A JP 2008167248A JP 5623007 B2 JP5623007 B2 JP 5623007B2
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Prior art keywords
laser diode
diode chip
layer
laser
additional element
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JP2008167248A
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Japanese (ja)
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JP2009016825A (ja
JP2009016825A5 (https=
Inventor
ミュラー マルティン
ミュラー マルティン
グレニンガー ギュンター
グレニンガー ギュンター
ベーレス アレクサンダー
ベーレス アレクサンダー
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Ams Osram International GmbH
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Osram Opto Semiconductors GmbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H01S5/4043—Edge-emitting structures with vertically stacked active layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3095—Tunnel junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3201—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
    • H01S5/3215—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities graded composition cladding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4018—Lasers electrically in series

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
JP2008167248A 2007-06-29 2008-06-26 多重ビーム−レーザダイオードとしての構造を有するモノリシック集積型レーザダイオードチップ Active JP5623007B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007030062.1 2007-06-29
DE102007030062A DE102007030062A1 (de) 2007-06-29 2007-06-29 Monolithisch integrierter Laserdiodenchip mit einem Aufbau als Mehrfachstrahl-Laserdiode

Publications (3)

Publication Number Publication Date
JP2009016825A JP2009016825A (ja) 2009-01-22
JP2009016825A5 JP2009016825A5 (https=) 2011-07-07
JP5623007B2 true JP5623007B2 (ja) 2014-11-12

Family

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Family Applications (1)

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JP2008167248A Active JP5623007B2 (ja) 2007-06-29 2008-06-26 多重ビーム−レーザダイオードとしての構造を有するモノリシック集積型レーザダイオードチップ

Country Status (4)

Country Link
US (1) US8194712B2 (https=)
EP (1) EP2009753A1 (https=)
JP (1) JP5623007B2 (https=)
DE (1) DE102007030062A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100244099A1 (en) * 2009-03-31 2010-09-30 Agilent Technolgies, Inc. Double heterojunction bipolar transistor having graded base region
US10203399B2 (en) 2013-11-12 2019-02-12 Big Sky Financial Corporation Methods and apparatus for array based LiDAR systems with reduced interference
US9360554B2 (en) 2014-04-11 2016-06-07 Facet Technology Corp. Methods and apparatus for object detection and identification in a multiple detector lidar array
US10036801B2 (en) 2015-03-05 2018-07-31 Big Sky Financial Corporation Methods and apparatus for increased precision and improved range in a multiple detector LiDAR array
DE102015011635B4 (de) 2015-09-11 2020-10-08 Azur Space Solar Power Gmbh lnfrarot-LED
US9866816B2 (en) 2016-03-03 2018-01-09 4D Intellectual Properties, Llc Methods and apparatus for an active pulsed 4D camera for image acquisition and analysis
US20210194216A1 (en) 2019-12-24 2021-06-24 Array Photonics, Inc. Stacked semiconductor lasers with controlled spectral emission
US11532924B2 (en) * 2020-07-27 2022-12-20 National Taiwan University Distributed feedback laser array
JP7633815B2 (ja) * 2021-01-29 2025-02-20 浜松ホトニクス株式会社 半導体レーザ素子及びレーザモジュール

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3958263A (en) * 1973-11-12 1976-05-18 Bell Telephone Laboratories, Incorporated Stress reduction in algaas-algaasp multilayer structures
US4984242A (en) * 1989-09-18 1991-01-08 Spectra Diode Laboratories, Inc. GaAs/AlGaAs heterostructure laser containing indium
US5212706A (en) 1991-12-03 1993-05-18 University Of Connecticut Laser diode assembly with tunnel junctions and providing multiple beams
JPH07263791A (ja) * 1994-03-18 1995-10-13 Fujitsu Ltd 半導体レーザ
US5617437A (en) * 1994-11-24 1997-04-01 Fuji Photo Film Co., Ltd. Semiconductor laser
US5729566A (en) * 1996-06-07 1998-03-17 Picolight Incorporated Light emitting device having an electrical contact through a layer containing oxidized material
EP1051783B1 (de) 1998-01-30 2002-01-09 Osram Opto Semiconductors GmbH & Co. OHG Halbleiterlaser-chip
DE19935998B4 (de) * 1999-07-30 2007-10-18 Osram Opto Semiconductors Gmbh Mehrfach-Halbleiterlaserstruktur mit schmaler Wellenlängenverteilung
JP2001185810A (ja) * 1999-12-24 2001-07-06 Mitsubishi Chemicals Corp 半導体光デバイス装置及びその製造方法
DE10057698A1 (de) * 2000-11-21 2002-06-06 Osram Opto Semiconductors Gmbh Übereinander gestapelte Halbleiter-Diodenlaser
US6628694B2 (en) * 2001-04-23 2003-09-30 Agilent Technologies, Inc. Reliability-enhancing layers for vertical cavity surface emitting lasers
JP2003078205A (ja) * 2001-09-05 2003-03-14 Fuji Photo Film Co Ltd 半導体レーザ素子
US6711195B2 (en) * 2002-02-28 2004-03-23 Agilent Technologies, Inc. Long-wavelength photonic device with GaAsSb quantum-well layer
US20070053396A1 (en) * 2005-08-24 2007-03-08 Nlight Photonics Corporation Semiconductor lasers utilizing AlGaAsP
DE102006010728A1 (de) * 2005-12-05 2007-06-06 Osram Opto Semiconductors Gmbh Halbleiterbauelement und Laservorrichtung
JP4155997B2 (ja) * 2006-03-30 2008-09-24 株式会社日立製作所 半導体レーザ装置

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Publication number Publication date
US20090122823A1 (en) 2009-05-14
JP2009016825A (ja) 2009-01-22
EP2009753A1 (de) 2008-12-31
US8194712B2 (en) 2012-06-05
DE102007030062A1 (de) 2009-01-02

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