JP5604902B2 - External terminal open / short circuit inspection method in integrated circuit and external terminal open / short circuit inspection apparatus in integrated circuit - Google Patents

Description

  The present invention relates to an external terminal open / short inspection method in an integrated circuit and an external terminal open / short inspection device in an integrated circuit.

  Patent Document 1 describes a method of detecting a short circuit of a wiring formed on a printed circuit board. In the technique described in Patent Document 1, first, a voltage distribution of two printed circuit boards facing each other is measured using a probe for measuring a voltage. And the location which becomes the same electric potential among these printed circuit boards is detected as a short circuit location.

JP-A-4-178571

  However, in order to reduce the size of products, the distance between wirings formed on a printed circuit board and the distance between external terminals of an integrated circuit are shortened. And with the miniaturization of a product, the pad which contacts a probe may not be provided in a printed circuit board.

  As a method of avoiding the inspection using the probe, there is a visual inspection. However, for example, in a BGA (Ball Grid Array) type integrated circuit, since an external terminal is located between the integrated circuit and the substrate in a direction perpendicular to the substrate, it is difficult to visually inspect.

  Therefore, the present invention provides an external terminal open / short circuit inspection method and an inspection apparatus for an external circuit in an integrated circuit that specify a short circuit location of the external terminal of the integrated circuit without using a visual check or a probe.

The first aspect of the external terminal open / short circuit inspection method in the integrated circuit according to the present invention is a power supply terminal (11, P11) to which power is supplied from the outside, and a first circuit (101) operating based on the power supply. ) And the first circuit, arranged side by side in a predetermined direction, and can arbitrarily output a first potential (H) and a second potential (L) different from the first potential by external control a N (N is a natural number of 4 or larger) a open / inspection method of the external terminals in the number of external terminals (P10, P1 to P5) integrated circuit (1, 10) and a, the N (a) of external terminals, wherein the first potential M from one side of the direction (M is natural number) to the external terminal of the up-th to (H), the external terminal to the N-th from (M + 1) th Outputting the second potential (L) (ST2); and (b) the After the execution of step (a), the M-th and (M + 1) -th external terminals are short-circuited because the value of the current flowing through the power supply terminal exceeds a predetermined reference value. Steps (ST3, ST4, ST5) for determining that the image is present and the M are varied in the range of 1 to (N-2), and are executed a plurality of times .

A second aspect of the external terminal open / short-circuit inspection method in the integrated circuit according to the present invention is the external terminal open / short-circuit inspection method in the integrated circuit according to the first aspect. ) Includes a second circuit (102) that operates based on the power source, and the step is performed when a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal. In (a) , the current flowing through the Mth external terminal and the (M + 1) th external terminal is the power supply in a state where the first potential (H) is output to the N external terminals. It is larger than the maximum value of the normal current flowing through the terminal (11).

A third aspect of the external terminal open / short circuit inspection method in the integrated circuit according to the present invention is an external terminal open / short circuit inspection method in the integrated circuit according to the first aspect, wherein the integrated circuit (1, 10 ) Includes a second circuit (102) that operates based on the power source, and the step is performed when a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal. In (a) , the current flowing through the Mth external terminal and the (M + 1) th external terminal normally flows through the power supply terminal (11) with all the N external terminals open. It is larger than the maximum value of the current.

  A fourth aspect of the external terminal open / short circuit inspection method in the integrated circuit according to the present invention is an external terminal open / short circuit inspection method in the integrated circuit according to the first aspect, wherein the integrated circuit (1, 10 ) Includes a clock input terminal to which a clock is input, the integrated circuit operates based on the clock, and depends on a frequency of the clock among currents flowing through the integrated circuit through the power supply terminal (11). The component is smaller as the frequency of the clock is lower, and further includes the step of (c) being executed prior to the step (a), and lowering the frequency of the clock to be applied to the integrated circuit.

A fifth aspect of the external terminal open / short inspection method in the integrated circuit according to the present invention is an external terminal open / short inspection method in the integrated circuit according to any one of the second and third aspects, The second circuit (102) has a CMOS circuit not connected to the external terminal, and the step (a) includes a step of detecting the value of the current through a low-pass filter (25).

A first aspect of an external terminal open / short circuit inspection device in an integrated circuit according to the present invention includes a power supply terminal (11) to which power is supplied from the outside, and a first circuit (101) that operates based on the power supply. N connected to the first circuit, arranged in a predetermined direction, and capable of arbitrarily outputting the first potential (H) and the second potential (L) different from the first potential by external control (N is a natural number of 3 or more) An external terminal open / short-circuit inspection device in an integrated circuit (1, 10) having external terminals (P10, P1 to P5), and a value of a current flowing through the power supply terminal a current detector for detecting (21, 22), among the N external terminal, the first potential to the external terminal from one side of the direction M (M is natural number) to th, ( M + 1) The second potential is applied to the Nth to Nth external terminals. A command unit (23) for outputting signals (S1 to S4) to be output to the integrated circuit, and the M-th and (M + 1) -th signals in response to the current value exceeding a predetermined reference value. A determination unit (24) for determining that the external terminals of the eyes are short-circuited, and the command unit (23) varies the M in a range of 1 to (N-2) to change the signal (S1). to S4) you output to the integrated circuit (1, 10).

A second aspect of the external terminal open / short circuit inspection device in the integrated circuit according to the present invention is an external terminal open / short circuit inspection device in the integrated circuit according to the first aspect, wherein the integrated circuit (1, 10 ) Has a second circuit (102) that operates based on the power source, and when a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal, the M circuit The current flowing through the first external terminal and the (M + 1) th external terminal is the maximum value of the current flowing through the power supply terminal (11) in a state where the first potential is output to the N external terminals. Bigger than.

A third aspect of the external terminal open / short circuit inspection device in the integrated circuit according to the present invention is an external terminal open / short circuit inspection device in the integrated circuit according to the first aspect, wherein the integrated circuit (1, 10 ) Has a second circuit (102) that operates based on the power source, and when a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal, the M circuit The current flowing through the first external terminal and the (M + 1) th external terminal is greater than the maximum value of normal current flowing through the power supply terminal (11) in a state where all the N external terminals are open. large.

  A fourth aspect of the external terminal open / short-circuit inspection apparatus in the integrated circuit according to the present invention is an external terminal open / short-circuit inspection apparatus in the integrated circuit according to the first aspect. ) Includes a clock input terminal (12, P12) to which a clock is input, the integrated circuit operates based on the clock, and the integrated circuit has the power supply terminal (11) as the frequency of the clock decreases. And a clock supply unit (26) that has a characteristic that a component depending on the frequency of the clock is small in the current flowing through the integrated circuit, and supplies the clock to the clock input terminal.

  According to a fifth aspect of the open / short-circuit inspection apparatus for external terminals in the integrated circuit according to the present invention, there is provided an open / short-circuit inspection apparatus for external terminals in the integrated circuit according to the first aspect. ) Includes a clock input terminal (12) to which a clock is input and a second circuit (15 to 17) for changing the frequency of the clock input from the clock input terminal, and the integrated circuit includes the second circuit The integrated circuit operates based on the clock after the change by the circuit. The lower the frequency of the clock after the change, the lower the frequency of the clock, the frequency of the clock among the current flowing through the integrated circuit via the power supply terminal (11). And a frequency control section (27) for supplying a control signal to the second circuit for controlling a change in the frequency in the second circuit.

  A sixth aspect of the external terminal open / short circuit inspection apparatus in the integrated circuit according to the present invention is an external terminal open / short inspection apparatus in the integrated circuit according to the first aspect, wherein the integrated circuit has a clock. An input clock input terminal (12), and a pair of switching elements connected in series between the high potential and the low potential of the power supply and conducting in a complementary manner according to the clock; Further including a clock supply unit (26) that supplies the clock input terminal and an average unit (25) that averages the values detected by the current detection unit, and the determination unit (24) is averaged by the average unit When the value of the current exceeds a predetermined reference value, it is determined that the M-th and (M + 1) -th external terminals are short-circuited.

  A seventh aspect of the external terminal open / short circuit inspection apparatus in the integrated circuit according to the present invention is an external terminal open / short inspection apparatus in the integrated circuit according to the first aspect, wherein the integrated circuit has a clock. Between the input clock input terminal (12), the second circuit (15-17) for changing the frequency of the clock input from the clock input terminal, and the high potential and the low potential of the power supply And a pair of switching elements connected in series and complementarily conducting according to the changed clock, and a frequency control for supplying a control signal for controlling the change of the frequency in the second circuit to the second circuit And an average unit (25) that averages the values detected by the current detector, and the determination unit (24) has a predetermined reference value for the current value averaged by the average unit. Beyond Drives out that determines that between the M-th and the (M + 1) th external terminal is short-circuited.

  An eighth aspect of the external terminal open / short circuit inspection device in the integrated circuit according to the present invention is an open / short circuit inspection device of the external terminal in the integrated circuit according to any one of the first to seventh aspects, The command unit (23) sequentially updates the M from 1 to N-1, and outputs the signals (S1 to S4) to the integrated circuit (1, 10).

A ninth aspect of the external terminal open / short circuit inspection apparatus in the integrated circuit according to the present invention is an external terminal open / short inspection apparatus in the integrated circuit according to any one of the second, third, and fifth aspects. The second circuit (102) has a CMOS type circuit, and the current detector (21, 22) detects the value of the current through a low-pass filter (25).

  According to the first aspect of the external terminal open / short-circuit inspection method in the integrated circuit and the first aspect of the external terminal open / short-circuit inspection apparatus in the integrated circuit according to the present invention, M pieces from one side in a predetermined direction. A potential difference can be generated only between the external terminal of the eye and the (M + 1) th external terminal. Therefore, it is possible to detect a short circuit between the Mth external terminal and the (M + 1) th external terminal from one side in a predetermined direction. Further, it is possible to detect a short circuit without depending on visual inspection or a probe.

  According to the second and third aspects of the external terminal open / short circuit inspection method in the integrated circuit and the second or third aspect of the external terminal open / short circuit inspection apparatus in the integrated circuit according to the present invention, Even when the current flowing through the power supply terminal fluctuates (hereinafter, this current is referred to as a normal current), a short circuit occurs between two adjacent ones of the N external terminals. When the current flows through the two, the value of the current flowing through the power supply terminal exceeds the normal current range. Therefore, even in such a case, it can be detected that a short circuit has occurred in the two external terminals.

  According to the fourth aspect of the external terminal open / short inspection method in the integrated circuit and the fourth to sixth aspects of the external terminal open / short inspection device in the integrated circuit, the current flowing through the power supply terminal The current flowing between the external terminals is easily discriminated from the fluctuation of the current in the second circuit. Moreover, according to the 5th aspect of the open / short test | inspection apparatus of the external terminal concerning this invention, this content is realizable by control from the short-circuit / open test apparatus side.

According to the seventh aspect of the external terminal open / short circuit inspection apparatus in the integrated circuit according to the present invention, the external terminals among the N external terminals are identified and the short circuit is generated. It can be detected.

According to the fifth aspect of the external terminal open / short circuit inspection method in the integrated circuit and the eighth aspect of the external terminal open / short circuit inspection apparatus in the integrated circuit according to the present invention, the current flowing through the power supply terminal by the low-pass filter The high frequency of is removed. The current resulting from short-circuiting between the external terminals has a low frequency (almost constant value), and the through current due to the CMOS type circuit includes a lot of high frequency components. Therefore, by passing through the low-pass filter, it is possible to reduce the return current while leaving the current due to the short circuit. Thereby, the precision which detects the short circuit of an external terminal can be improved.

It is a figure which shows an example of a notional structure of a test | inspection system. It is a figure which shows another example of a notional structure of a test | inspection system. It is a figure which shows an example of the output pattern of the external terminal group P10. It is a schematic diagram showing a current flowing through the power supply terminal 11 in normal operation. 3 is a schematic diagram showing a current flowing through a power supply terminal 11. FIG. It is a figure which shows another example of the output pattern of the external terminal group P10. It is a figure which shows another example of the output pattern of the external terminal group P10. It is a figure which shows another example of the output pattern of the external terminal group P10. It is a schematic diagram which shows the electric current which flows through the power supply terminal 11, when an inspection method is performed. It is a flowchart which shows an example of operation | movement of a test | inspection apparatus. 4 is a schematic diagram illustrating an example of a current flowing through a power supply terminal 11. FIG. It is a notional block diagram which shows another example of a test | inspection system. 4 is a schematic diagram illustrating an example of a current flowing through a power supply terminal 11. FIG. It is a schematic diagram which shows an example of an operating current. It is a schematic diagram which shows an example of a short circuit current. 4 is a schematic diagram illustrating an example of a current flowing through a power supply terminal 11. FIG. It is a schematic diagram which shows an example of an operating current. It is a notional block diagram which shows another example of a test | inspection system. It is a notional block diagram which shows another example of a test | inspection system.

First embodiment.
<Configuration of inspection system>
As shown in FIG. 1, the inspection system includes an electric circuit 1 and an inspection device 2.

  The electric circuit 1 is, for example, a hybrid integrated circuit (hybrid integrated circuit). Hereinafter, the electric circuit 1 is referred to as a hybrid integrated circuit 1. The hybrid integrated circuit 1 includes an integrated circuit 10, a substrate 12, and a power supply terminal 11. Note that although the hybrid integrated circuit 1 actually includes a plurality of electronic components, it is not essential in the technique according to the present embodiment, and therefore, these electronic components are not shown.

  The substrate 12 is an insulating substrate (for example, glass epoxy or ceramic, or a metal substrate having an insulating film formed on the surface). A plurality of wires (not shown except for the wires 121) are formed on the substrate 12. Such wiring connects a plurality of electronic components (not shown except for the integrated circuit 10) provided on the substrate 12, or input / output terminals (not shown except for the power supply terminal 11) provided on the substrate 12 and these electrons. Connect the parts.

  The power supply terminal 11 is connected to the wiring 121 formed on the substrate 12 and attached on the substrate 12.

  The integrated circuit 10 is, for example, a packaged electronic component and has a plurality of external terminals. At least a part of the plurality of external terminals is electrically connected to the wiring formed on the substrate 12, and the integrated circuit 10 is mounted on the substrate 12. The integrated circuit 10 may be a surface mounting type or an insertion mounting type. Further, the mounting method on the substrate 12 is not particularly limited. For example, the integrated circuit 10 is mounted on the substrate 12 by soldering or the like.

  The plurality of external terminals include a power supply terminal P11. The power terminal P <b> 11 is connected to the power terminal 11 via a wiring 121 formed on the substrate 12.

  The plurality of external terminals include an external terminal group P10. The external terminal group P10 includes three or more external terminals. The external terminals are arranged side by side in a predetermined direction (here, the vertical direction in the drawing). Each external terminal of the external terminal group P10 can arbitrarily output a first potential H and a second potential L different from the first potential H by external control. This will be specifically described below.

  The external terminal group P10 is connected to a circuit 101 formed inside the integrated circuit 10. The circuit 101 is connected to the power supply terminal P11 and operates by being supplied with power from the power supply terminal P11. The circuit 101 receives a command via an external terminal other than the power supply terminal P11 and the external terminal group P10, and outputs the first potential H or the second potential L to each of the external terminals of the external terminal group P10 according to the command.

  The integrated circuit 10 includes a circuit 102 therein. The circuit 102 is connected to the power supply terminal P11 and operates by being supplied with power from the power supply terminal P11. The circuit 102 receives a command via a predetermined external terminal other than the power supply terminal P11 and the external terminal group P10, executes a predetermined process (for example, an arithmetic process), and outputs a processing result from another predetermined external terminal.

  The integrated circuit 10 performs a plurality of functions by the circuits 101 and 102 or by a plurality of circuits (not shown). However, some of these functions may not be used in the normal operation of the hybrid integrated circuit 1. Here, for example, the function realized by the circuit 101 is not required in the normal operation as the hybrid integrated circuit 1.

  However, in the normal operation of the integrated circuit 10, the circuit 101 operates while being connected to the power supply terminal P <b> 11, whereby a signal is output from the external terminal group P <b> 10 that is the output terminal of the circuit 101. In other words, a potential difference is generated between the external terminals of the external terminal group P10. Therefore, in the normal operation of the hybrid integrated circuit 1, the external terminal group P10 which is the output terminal of the circuit 101 is not electrically connected to other electronic components or external devices (for example, external devices connected to the hybrid integrated circuit 1). In short, the external terminal group P10 is not used in the normal operation of the hybrid integrated circuit 1. In other words, the signal output from the external terminal group P10 is not substantially referred to by other electronic components or external devices.

  Another specific example is also shown as the external terminal group P10 not used in the normal operation of the hybrid integrated circuit 1. For example, the external terminal group P10 is an external terminal for debugging. The external terminal for debugging is an external terminal for an operator to check the operation result (or the intermediate result of the operation) of the integrated circuit 10 separately from the normal operation.

  In this case, for example, as shown in FIG. 2, the circuit 101 is also connected to an external terminal group P20 different from the external terminal group P10, and a signal is output through the external terminal group P20. The external terminal group P20 is connected to another electronic component 13 provided on the substrate 12 or an external device (not shown) via a wiring 122 formed on the substrate 12. A signal output from the external terminal group P20 is referred to by another electronic component 13 or an external device. Thus, the function of the circuit 101 is used by another electronic component 13 or an external device via the external terminal group P20 different from the external terminal group P10 in the normal operation of the hybrid integrated circuit 1. On the other hand, a debugging signal is output from the external terminals of the external terminal group P10 (in other words, a potential difference is generated between the external terminals of the external terminal group P10). It is not electrically connected to electronic components or external devices. In other words, the signal output from the external terminal group P10 is not substantially referred to by other electronic components or external devices.

  The inspection device 2 for detecting a short circuit of each external terminal of the external terminal group P10 includes a shunt resistor 21, a voltage detection circuit 22, a command unit 23, and a determination unit 24.

  The shunt resistor 21 is connected between the power supply terminal 11 and the DC power supply 3. In other words, the shunt resistor 21 is connected in series with the DC power supply 3 and the power supply terminal 11.

  The voltage detection circuit 22 detects a voltage drop caused by the current flowing through the shunt resistor 21. The current flowing through the shunt resistor 21 is grasped from the voltage drop of the shunt resistor 21 and the resistance value of the shunt resistor 21. Since the shunt resistor 21 is connected in series with the DC power supply 3 and the power supply terminal 11, the current flowing through the shunt resistor 21 is equal to the current flowing through the power supply terminal 11. Therefore, one set of the shunt resistor 21 and the voltage detection circuit 22 can be grasped as a current detection unit that detects a current flowing through the power supply terminal 11. In the illustration of FIG. 1, the voltage detection circuit 22 includes a low-pass filter 25. However, this is not an essential requirement. The low pass filter 25 will be described later.

  The command unit 23 has x (x is a natural number from 1 to N) from one side in the arrangement direction (the vertical direction in the drawing) among N external terminals (N is a natural number of 3 or more) in the external terminal group P10. A signal Sx for outputting the first potential to the first external terminals and the second potential to the (x + 1) th to Nth external terminals is output to the integrated circuit 10.

  In the illustration of FIG. 1, the external terminal group P10 includes five external terminals. The five external terminals are arranged side by side in the vertical direction in the figure. As shown in FIG. 3, the command unit 23 outputs, for example, a first potential H to the first external terminal from the top, and a second potential L to the fifth external terminal from the second external terminal from the top. The signal S1 to be output is output to the integrated circuit 10. For example, when the circuit 101 executes a predetermined calculation process and outputs the result to the external terminal group P10, the command unit 23 inputs the input data as the signal S1 so that the calculation result becomes the above-described potential pattern. Specifically, it is given to the circuit 101). In the following, in accordance with FIG. 3, the external terminals of the external terminal group P10 are referred to as external terminals P1 to P5 in order from the top. In the illustration of FIG. 3, the external terminals P1 to P5 are connected to the outputs of the logic inversion circuits 111 to 115, respectively. Such logic inversion circuits 111 to 115 are exemplified as components of the circuit 101.

  The determination unit 24 determines whether the voltage value detected by the voltage detection circuit 22 exceeds a predetermined reference value. This can be grasped when the determination unit 24 discriminates the value of the current detected by the current detection unit based on the reference value. If the value of the current exceeds the reference value, the determination unit 24 determines that a short circuit has occurred between the xth external terminal and the (x + 1) th external terminal based on the signal Sx. The determination unit 24 may determine that the xth external terminal and the (x + 1) th external terminal are open based on the signal Sx when the value of the current is below the reference value. .

  Note that the functions of the instruction unit 23 and the determination unit 24 may be realized by, for example, a microcomputer and a storage device. The microcomputer executes each processing step (in other words, a procedure) described in the program. The storage device is composed of one or more of various storage devices such as a ROM (Read Only Memory), a RAM (Random Access Memory), a rewritable nonvolatile memory (EPROM (Erasable Programmable ROM), etc.), and a hard disk device, for example. Is possible. The storage device stores various information, data, and the like, stores a program executed by the microcomputer, and provides a work area for executing the program. It can be understood that the microcomputer functions as various means corresponding to each processing step described in the program, or can realize that various functions corresponding to each processing step are realized. In addition, the instruction unit 23 and the determination unit 24 are not limited to this, and various procedures to be executed or various means or various functions to be realized may be realized by hardware or part of them.

<Inspection method>
An inspection method in such an inspection system will be described.

  First, the hybrid integrated circuit 1 and the DC power source 3 are connected via the shunt resistor 21. The hybrid integrated circuit 1 operates by receiving power from a DC power source 3. A current flows through the power supply terminal 11 by the operation of the hybrid integrated circuit 1.

  Next, the command unit 23 gives the signal Sx to the integrated circuit 10. Here, as an example, the signal S1 is given to the integrated circuit 10. The integrated circuit 10, more specifically, the circuit 101 receives the signal S1 and outputs the first potential H to the external terminal P1 and the second potential L to the external terminals P2 to P5 (see also FIG. 3). As a result, a potential difference is generated between the external terminals P1 and P2, and no potential difference is generated between the external terminals P2 to P5. When the external terminals P1 and P2 are short-circuited, a short-circuit current flows through the external terminals P1 and P2 due to a potential difference between the external terminals P1 and P2. In this case, the current flowing through the power supply terminal 11 increases by the amount of the short-circuit current flowing through the external terminals P1 and P2. Note that even if a short circuit occurs between the external terminals P2 to P5, since the potentials of the external terminals P2 to P5 are all the same second potential L, no short circuit current flows between them.

  Next, the current detection unit detects the value of the current flowing through the power supply terminal 11. More specifically, the voltage detection circuit 22 detects the value of the voltage drop caused by the current flowing through the shunt resistor 21 and outputs it to the determination unit 24.

  The determination unit 24 determines whether or not the detected current value exceeds a predetermined reference value. Then, it is determined that the external terminals P1 and P2 are short-circuited based on the signal S1 because the current value exceeds the reference value.

  As described above, according to the present inspection method, among the adjacent external terminals of the external terminal group P10, the x (first in the above example) external terminal and the (x + 1) external terminal. A potential difference can be generated only between the two. Therefore, it can be detected that a short circuit has occurred between them. In addition, since the detection is performed without using the probe, it is not necessary to provide the hybrid integrated circuit 1 with a pad connected to the probe. Further, the external terminal of the integrated circuit 10 is positioned between the integrated circuit 10 and the substrate 12 in a direction perpendicular to the substrate 12 (for example, the integrated circuit 10 is BGA), and it is difficult to visually recognize the external terminal from the outside. Even if it exists, a short circuit can be detected. Even if the external terminal group P10 is a terminal that is not used in the normal operation of the hybrid integrated circuit 1, a short circuit can be detected. It should be noted that the terminals used in normal operation can be inspected for the presence of a short circuit during verification of normal operation.

  When the external terminal group P10 includes one external terminal and the power supply terminal P11 is disposed adjacent to the external terminal, the external terminal outputs a potential different from the potential applied to the power supply terminal P11. Thus, the presence or absence of a short circuit between the external terminal and the power supply terminal P11 can be inspected. Similarly, when a grounded ground terminal is disposed adjacent to the external terminal, a short circuit between the external terminal and the ground terminal can be achieved by causing the external terminal to output a potential different from the ground potential. Existence can be checked.

  However, when power is supplied to the hybrid integrated circuit 1, the power supply terminal 11 can be used in the normal operation of the hybrid integrated circuit 1 as shown in FIG. 4 even when the external terminal group P 10 is not short-circuited. In some cases, the current flowing through the capacitor fluctuates. In FIG. 4, the current value Imax indicates the maximum value of the normal current flowing through the power supply terminal 11 in normal operation, and the current value Imin indicates the minimum value of the normal current flowing through the power supply terminal 11 in normal operation. Such a fluctuation in current is caused in a normal operation of the hybrid integrated circuit 1 because, for example, a plurality of functions provided in the hybrid integrated circuit 1 repeatedly execute / stop. In this case, it is conceivable that the increase in current due to the short-circuit current flowing in the external terminal group P10 is buried in the change in current due to the normal operation of the hybrid integrated circuit 1.

  Therefore, a current that flows between the two external terminals of the external terminal group P10 when a potential difference is generated between the two external terminals and the two terminals are short-circuited (that is, a short-circuit current that flows through the external terminal group P10) is It is desirable to be larger than the maximum value of the current flowing through the power supply terminal 11 in the state where the external terminal group P10 is open (that is, the normal current in the normal operation of the hybrid integrated circuit 1). Such a request is realized, for example, by setting the current capacity of the circuit 101 connected to the external terminal group P10 to be larger than the current capacity of the circuit 102. For example, in the illustration of FIG. 3, when the logic inversion circuits 111 to 115 are formed of transistors, the current capacities of these transistors are adjusted. Note that the normal current of the hybrid integrated circuit 1 can also be grasped as a current flowing through the power supply terminal 11 in a state where the first potential H (or the second potential L) is output to all the external terminals of the external terminal group P10.

  As a result, as shown in FIG. 5, due to the short-circuit current flowing through the external terminal group P10, the current flowing through the power supply terminal 11 increases beyond the current value Imax. Then, the determination unit 24 determines that the value of the current flowing through the power supply terminal 11 exceeds a predetermined reference value (≧ current value Imax), and the x-th external terminal and the (x + 1) -th item based on the signal Sx. It is determined that a short circuit has occurred between the external terminals.

  As described above, even in the hybrid integrated circuit 1 in which the normal current flowing through the power supply terminal 11 fluctuates during normal operation, a short circuit of the external terminal group P10 can be detected.

  Subsequently, an inspection method for detecting a short circuit by sequentially changing potentials output from the external terminals of the external terminal group P10 and a further function of the command unit 23 will be described.

  The command unit 23 outputs a first potential to the xth external terminals of the N external terminal group P10 and a signal Sx to output the second potential to the (x + 1) th to Nth external terminals. , X are sequentially updated from 1 to (N−1) and output to the integrated circuit 10.

  First, as described with reference to FIG. 3, the potential pattern of FIG. 3 is output to the external terminals P1 to P5, and a short circuit between the external terminals P1 and P2 is inspected. Next, the command unit 23 gives the signal S2 to the integrated circuit 10 (and thus the circuit 101). Upon receiving the signal S2, the circuit 101 outputs the first potential H to the external terminals P1 and P2 and the second potential L to the external terminals P3 to P5 as shown in FIG. Thus, a potential difference can be generated only between the external terminals P2 and P3 among the adjacent external terminals P1 to P5.

  Next, the determination unit 24 determines whether or not the voltage value detected by the voltage detection circuit 22 exceeds a predetermined reference value. This can be regarded as a determination as to whether or not the current flowing through the power supply terminal 11 exceeds the reference value as described above. When the current exceeds the reference value, it is determined that a short circuit has occurred in the external terminals P2 and P3 based on the signal S2. Alternatively, it may be determined that the external terminals P2 and P3 are open because the current value is lower than the reference value.

  Next, the command unit 23 sequentially provides signals S3 and S4 to the integrated circuit 10 (and thus the circuit 101). The circuits 101 that have received the signals S3 and S4 generate potential differences only between the external terminals P3 and P4 and only between the external terminals P4 and P5, respectively, as shown in FIGS. . In each of them, the determination unit 24 determines whether or not the current flowing through the power supply terminal 11 exceeds the reference value, and when it exceeds, a short circuit occurs in the external terminals P3 and P4 and in the external terminals P4 and P5, respectively. It is determined that In each of them, the external terminals P3 and P4 may determine that the external terminals P4 and P5 are open because the current value is below the reference value.

  As a more specific example, for example, when this inspection method is executed when a short circuit occurs between the external terminals P3 and P4, the current flowing through the power supply terminal 11 is given a signal S3 as shown in FIG. It changes beyond the maximum value of normal current (that is, current value Imax) only in the state. As a result, it is possible to detect that a short circuit has occurred in the external terminals P3 and P4.

  As described above, according to this inspection method, a potential difference can be generated only between two predetermined external terminals among adjacent external terminals, and the locations where such potential differences are generated are sequentially changed. Can do. In each of them, the current flowing through the power supply terminal 11 is detected to determine the presence or absence of a short circuit. Therefore, it is possible to detect a short circuit by specifying which external terminal among the external terminals of the external terminal group P10 is short-circuited.

  Next, an example of a flowchart of an inspection apparatus that executes the inspection method described with reference to FIGS. 3 and 6 to 8 will be described with reference to FIG.

  First, in step ST1, the instruction unit 23 sets the value x to 1 which is an initial value. The value x coincides with the sign x of the signal Sx, and here the value x takes a value from 1 to 5.

  Next, in step ST2, the command unit 23 gives the signal Sx to the integrated circuit 10. The integrated circuit 10 that has received the signal Sx outputs a potential to the external terminal group P10 in accordance with the signal Sx. The integrated circuit 10 that has received the signal Sx has the first potential H for the x-th external terminals from among the five external terminals P1 to P5, and the second for the (x + 1) -th to the fifth external terminals. The potential L is output.

  Next, in step ST <b> 3, the current detection unit (a pair of the shunt resistor 21 and the voltage detection circuit 22, hereinafter the same) detects the current flowing through the power supply terminal 11 and outputs the value to the determination unit 24. Next, in step ST4, the determination unit 24 compares the current value from the current detection unit with a predetermined reference value. If the current value exceeds the reference value, it is determined in step ST5 that the xth external terminal from the top and the (x + 1) th external terminal from the top are short-circuited. The determination unit 24 may display or notify the outside that a short circuit has occurred between the xth external terminal and the (x + 1) th external terminal.

  If the current value is lower than the reference value in step ST4, it is determined in step ST6 that the xth external terminal from the top and the (x + 1) th external terminal from the top are open. The determination unit 24 may display or notify the outside that the xth external terminal and the (x + 1) th external terminal are open. Note that when it is not necessary for an external person to know the open external terminals, step ST6 is unnecessary.

  In either step ST5 or ST6, in step ST7, the command unit 23 determines whether the value x is 5 or more. If the value x is less than 5, the command unit 23 increments the value x in step ST8 and returns to step ST2. If the value x is 5 or more, the process is terminated.

  Next, for example, a case where the integrated circuit 10 has a complementary metal oxide semiconductor (CMOS) type circuit will be described. The CMOS type circuit is a circuit having a configuration in which an n-channel MOS (Metal Oxide Semiconductor) field effect transistor and a p-channel MOS field effect transistor are connected in a complementary manner. For example, the above configuration is provided in the logic inversion circuits 111 to 115 illustrated in FIGS. A common signal is input to the gate electrodes of these MOS field effect transistors. When the potential of the gate electrode is an intermediate potential applied during the rise or fall of the signal, a relatively large through current flows through these MOS field effect transistors.

  When, for example, a predetermined clock signal is input to the integrated circuit 10 and this clock signal is input to the gate electrode of the MOS field effect transistor, the rising and falling edges of the clock signal (in FIG. A through current flows through the integrated circuit 10 due to the edge. In other words, the current flowing through the power supply terminal 11 includes a through current that flows at a constant period. Since such a through current is a current that flows during a short period when the signal rises or falls during a short period, it includes many harmonic components.

  In this case, it is desirable that the voltage detection circuit 22 includes a low-pass filter 25 as shown in FIG. The voltage detection circuit 22 detects a voltage drop caused by the current flowing through the shunt resistor 21 via the low-pass filter 25. Thereby, the harmonic component of the current flowing through the shunt resistor 21 is removed, and the current flowing through the shunt resistor 21 can be detected. The low pass filter 25 may be connected in series with the shunt resistor 21 between the power supply terminal 11 and the DC power supply 3.

  The short-circuit current that flows through the external terminal group P10 when a short circuit occurs in the external terminal group P10 is at least a period in which the clock signal is kept in a rising state (period in which the clock signal is activated) or a period in which the clock signal is in a falling state ( It continues to flow over the period when the clock signal is deactivated. Therefore, the short-circuit current flowing through the external terminal group P10 includes many low-frequency components compared to the through current that flows only during the rising or falling period of the clock signal.

  Therefore, according to the current detection unit (a set of the shunt resistor 21, the voltage detection circuit 22, and the low-pass filter 25), the high-frequency component is removed from the current flowing through the power supply terminal P11, in other words, the through current is removed. Can be detected. Therefore, since the current in which the influence of the through current is suppressed can be detected, the short circuit detection accuracy can be improved. Note that it is desirable to output a potential to the external terminal group P10 based on the signal Sx regardless of the clock signal. In this case, since the short circuit current is substantially DC, the short circuit current can be separated from the through current with higher accuracy.

Second embodiment.
The inspection system illustrated in FIG. 12 is different from the inspection system illustrated in FIG. 1 in the configuration of the inspection apparatus 2. The inspection apparatus 2 in FIG. 12 further includes a clock supply unit 26 as compared with the inspection apparatus 2 in FIG. The clock supply unit 26 supplies a clock to the hybrid integrated circuit 1 (a more detailed example is the integrated circuit 10, which will be described below using the integrated circuit 10 as an example).

  The hybrid integrated circuit 1 includes a clock input terminal 13 to which a clock is input from the clock supply unit 26. The integrated circuit 10 includes a clock input terminal P12 to which a clock from the clock input terminal 13 is input.

  The integrated circuit 10 operates in synchronization with the input clock. The operating current flowing through the integrated circuit 10 via the power supply terminal 11 is smaller as the clock frequency is lower. The operating current here is a concept that is distinguished from the short-circuit current described in the first embodiment in that it depends on the frequency of the clock.

  The short-circuit current flows when two adjacent external terminals belonging to the external terminal group P10 are short-circuited and a potential difference is generated between the two external terminals based on the signal Sx. Therefore, the short-circuit current continues to flow through the power supply terminal 11 as a constant DC component as long as the potential difference is generated. Therefore, the short-circuit current does not depend on the clock frequency. In other words, the component that does not depend on the clock frequency in the current flowing through the power supply terminal 11 is the short-circuit current.

  On the other hand, the operating current that flows when the integrated circuit 10 operates based on the clock regardless of the signal Sx depends on the frequency of the clock. In other words, the component that depends on the frequency of the clock among the current flowing through the power supply terminal 11 is the operating current. An example of this point will be described. The integrated circuit 10 has a plurality of configurations in which, for example, two switching elements are complementarily connected. The configuration in which two switching elements are connected in a complementary manner is a configuration in which the two switching elements are connected in series between a high potential end and a low potential end. These two switching elements are complementarily conducted. An example of such a configuration is the above-described CMOS type circuit.

  In such a configuration, there is a period in which the two switching elements are simultaneously conducted when the conduction / non-conduction of the two switching elements is switched. In such a period, a current (through current) can flow from the high potential end to the low potential end via the two switching elements. Since the switching cycle of switching / non-conduction of the switching element depends on the frequency of the clock, the lower the clock frequency, the lower the number of times the through current flows in the same period. Therefore, the operating current (including the through current) flowing through the integrated circuit 10 becomes small when averaged over a unit time. Such averaging is realized by, for example, the bypass capacitor 18 provided in the integrated circuit 1. The bypass capacitor 18 is provided between the wiring 121 and the ground, and suppresses fluctuations in the DC voltage applied to the wiring 121.

  In such an inspection system, the clock supply unit 26 supplies a predetermined clock to the integrated circuit 10. Then, by any of the methods described in the first embodiment, a potential is applied to the external terminal group P10 based on the signal Sx. Here, it is assumed that a short circuit has occurred in the external terminal group P10, and that a short circuit current flows through the power supply terminal 11 when the predetermined signal Sx is given to the integrated circuit 10.

  First, the case where the clock frequency is relatively high will be described. FIG. 13 shows an example of the current flowing through the power supply terminal 11. FIG. 14 shows an example of the operating current among the currents flowing through the power supply terminal 11. FIG. 15 shows an example of a short circuit current among the currents flowing through the power supply terminal P11.

  As illustrated in FIG. 15, a short-circuit current flows over a period from time t1 to time t2. This is because a predetermined signal Sx is input to the integrated circuit 10 at time t1, and a potential difference is generated between the external terminals belonging to the external terminal group P10 and causing a short circuit due to the input. At time t2, the input of the predetermined signal Sx is stopped (or switched to a signal that causes a potential difference between other external terminals), so that the short-circuit current becomes zero.

  As illustrated in FIG. 14, an operating current flows through the integrated circuit 10. As the frequency of the clock input to the clock input terminal P12 increases, the operating current of the integrated circuit 10 also increases. In the examples of FIGS. 14 and 15, the maximum value of the operating current is larger than the absolute value of the short-circuit current.

  When a clock having such a frequency is input to the integrated circuit 10, as illustrated in FIG. 13, it is difficult to detect the presence of the short-circuit current in the current flowing through the power supply terminal 11 due to the operating current.

  Therefore, the clock supply unit 26 may supply a clock having a relatively low frequency to the clock input terminal 13. Hereinafter, a case where the clock frequency is relatively high will be described. FIG. 16 shows an example of the current flowing through the power supply terminal 11. FIG. 17 shows an example of the operating current among the currents flowing through the power supply terminal 11. As described above, since the short-circuit current is constant without depending on the clock frequency, an example thereof is the same as the short-circuit current shown in FIG.

  As can be easily understood from the comparison between FIG. 14 and FIG. 17, the absolute value of the operating current of the integrated circuit 10 can be reduced by inputting a relatively low frequency clock to the clock input terminal P12. In such an example, the maximum value of the operating current is smaller than the absolute value of the short-circuit current, as can be easily understood from the comparison between FIG. 16 and FIG.

  This is due to the following reason. That is, since the frequency of through current is low when the clock frequency is low, the horizontal axis interval between the peak and valley of the operating current (see FIG. 16) is the peak of the operating current when the clock frequency is high. It is wider than the interval (see FIG. 14) on the horizontal axis between the valley and the valley. When the operating current fluctuation interval increases, the operating current fluctuation width decreases due to the integral (average) effect of the bypass capacitor 18. This is because the vertical interval between the peaks and valleys of the operating current when the clock frequency is low (see FIG. 16) is the vertical interval between the peaks and valleys of the operating current when the clock frequency is high. It means that it is narrower than the distance between the shafts (see FIG. 14).

  On the other hand, since the short-circuit current has only a substantially constant DC component, it does not change depending on the bypass capacitor 18.

  Therefore, if the clock frequency is lower than the predetermined value, the absolute value of the short-circuit current can exceed the maximum value of the operating current as illustrated in FIGS.

  If a clock having such a frequency is input to the integrated circuit 10, a short-circuit current flows exceeding the maximum value of the operating current. Therefore, in the current flowing through the power supply terminal 11, as shown in FIG. Easy to detect existence. For example, the determination unit 24 may compare the current flowing through the power supply terminal 11 with a reference value that is higher than the maximum value of the operating current, and determine that a short circuit has occurred if the current exceeds the reference value Iref. .

  As described above, since the inspection apparatus 2 includes the clock supply unit 26, the frequency at which the short circuit current can be easily distinguished from the current flowing through the power supply terminal 11 that is distinguished from the component (so-called operating current) that depends on the clock frequency. The clock can be adopted.

  The inspection system shown in FIG. 18 is different from the inspection system illustrated in FIG. 12 in the configuration of the hybrid integrated circuit 1 and the inspection device 2.

  The hybrid integrated circuit 1 has a circuit for changing the frequency. As an example of such a circuit, frequency dividing circuits 15 and 16 and a switch 17 are shown in FIG. For example, the frequency divider 16 reduces the frequency of the clock input from the clock input terminal P12 and outputs it to the frequency divider 15 and the switch 17. The frequency divider 15 lowers the frequency of the clock input from the frequency divider 16 and outputs it to the switch 17. Since the frequency dividing circuit 15 further reduces the clock reduced by the frequency dividing circuit 16, the frequency of the clock output from the frequency dividing circuit 15 is lower than the frequency of the clock output from the frequency dividing circuit 16.

  The switch 17 selectively connects one of the outputs of the frequency dividing circuits 15 and 16 to the clock input terminal P12 and outputs one of the outputs of the frequency dividing circuits 15 and 16 to the integrated circuit 10. . The selection operation of the switch 17 is controlled by the integrated circuit 10, for example.

  The inspection device 2 includes a frequency control unit 27. The frequency control unit 27 outputs a control signal S for changing the frequency of the clock input to the integrated circuit 10 to the hybrid integrated circuit 1. Note that the function of the frequency control unit 27 may be realized by a microcomputer or by hardware, similarly to the instruction unit 23 and the determination unit 24.

  The switch 17 is controlled by the control signal S applied to the hybrid integrated circuit 1. As a more detailed example, for example, the control signal S applied to the integrated circuit 10 is input, and the integrated circuit 10 controls the selection operation of the switch 17 based on the control signal S. More specifically, the switch 17 is controlled to input the output of the frequency dividing circuit 15 to the integrated circuit 10. Note that the switch 17 is not necessarily controlled by the integrated circuit 10, and the frequency controller 27 may directly control the switch 17.

  In the example of FIG. 18, the inspection apparatus 2 includes the clock supply unit 26, but the configuration is not limited thereto, and the hybrid integrated circuit 1 includes a clock generation unit that generates a clock, and the output thereof changes the frequency. What is necessary is just to input into a circuit (The frequency dividing circuits 15 and 16 and the switch 17 in the illustration of FIG. 18).

  According to such an inspection system, the clock frequency can be changed by control from the inspection apparatus 2 side. Therefore, the frequency of the clock can be appropriately reduced, and as described with reference to FIGS. 13 to 17, the current flowing through the power supply terminal 11 is distinguished from the operating current to make the short-circuit current easy to distinguish. Can do. More specifically, for example, even if the frequency of the clock required as a product of the integrated circuit 10 is relatively high, a frequency that can be easily inspected can be employed.

  The contents described above can also be grasped as an invention of a method in which the clock frequency is reduced and given to the integrated circuit 10 prior to executing the inspection method described in the first embodiment.

  As illustrated in FIG. 19, the function of the bypass capacitor 18 may be substituted by the averaging unit 25. The averaging unit 25 is an integration circuit or a low-pass filter, for example, and is provided in the inspection apparatus 2. The averaging unit 25 averages (integrates) the current detected by the current detection unit (the shunt resistor 21 and the voltage detection circuit 22). This reduces the fluctuation range of the operating current in the current flowing through the power supply terminal 11. And the determination part 24 compares the value which the average part 25 averaged with the reference value, and determines the presence or absence of a short circuit. Thereby, a short circuit can be easily determined.

  In FIG. 18, the average unit 25 may be provided in the inspection apparatus 2 instead of the bypass capacitor. These contents can also be grasped as an invention of a method of averaging the current flowing through the power supply terminal 11 and comparing the averaged value with a reference value to determine the presence or absence of a short circuit.

DESCRIPTION OF SYMBOLS 1 Hybrid integrated circuit 10 Integrated circuit 15,16 Frequency dividing circuit 17 Switch 21 Shunt resistor 22 Current detection circuit 23 Command part 24 Judgment part 26 Clock supply part 27 Frequency control part 101,102 Circuit H 1st electric potential L 2nd electric potential P10 External Terminal group P1-P5 External terminal ST2-ST5, ST7, ST8 Step

Claims (14)

Power supply terminals (11, P11) to which power is supplied from the outside;
A first circuit (101) operating based on the power source;
N (connected to the first circuit, arranged side by side in a predetermined direction, and capable of arbitrarily outputting a first potential (H) and a second potential (L) different from the first potential by external control. N is a natural number greater than or equal to 4) external terminals (P10, P1 to P5) and an external terminal open / short circuit inspection method in the integrated circuit (1, 10),
(A) Of the N external terminals, the first potential (H) is applied to M (M is a natural number) external terminals from one side in the direction, and (M + 1) th to Nth terminals. A step (ST2) of outputting the second potential (L) to an external terminal of
(B) After the execution of step (a), the value of the current flowing through the power supply terminal exceeds a predetermined reference value, so that the Mth and (M + 1) th external terminals are connected. The step (ST3, ST4, ST5) for determining that the circuit is short-circuited is executed a plurality of times by varying the M in the range of 1 to (N-2). Method. The integrated circuit (1, 10) has a second circuit (102) that operates based on the power source,
When a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal, in step (a), the Mth external terminal and the (M + 1) th external terminal The current flowing through the external terminal is larger than the maximum value of normal current flowing through the power supply terminal (11) in a state where the first potential (H) is output to the N external terminals. An open / short circuit inspection method for external terminals in the integrated circuit as described. The integrated circuit (1, 10) has a second circuit (102) that operates based on the power source,
When a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal, in step (a), the Mth external terminal and the (M + 1) th external terminal The external terminal in the integrated circuit according to claim 1, wherein a current flowing through the external terminal is larger than a maximum value of a normal current flowing through the power supply terminal (11) in a state where all the N external terminals are open. Open / short circuit inspection method. The integrated circuit (1, 10) includes a clock input terminal to which a clock is input, the integrated circuit operates based on the clock, and among the currents flowing to the integrated circuit via the power supply terminal (11), The component depending on the clock frequency is smaller as the clock frequency is lower,
2. The open / short-circuit inspection method for external terminals in an integrated circuit according to claim 1, further comprising the step of (c) executing the step prior to said step (a), and lowering the frequency of said clock and applying it to said integrated circuit. . The second circuit (102) has a CMOS circuit that is not connected to the external terminal,
The method for inspecting open / short-circuit of an external terminal in an integrated circuit according to claim 2 , wherein the step (a) includes a step of detecting the value of the current through a low-pass filter (25). . A power supply terminal (11) to which power is supplied from the outside;
A first circuit (101) operating based on the power source;
N (connected to the first circuit, arranged side by side in a predetermined direction, and capable of arbitrarily outputting a first potential (H) and a second potential (L) different from the first potential by external control. N is a natural number of 4 or more) external terminals (P10, P1 to P5) and
An open / short circuit inspection device for external terminals in an integrated circuit (1, 10) comprising:
A current detector (21, 22) for detecting a value of a current flowing through the power supply terminal;
Of the N external terminals, the first potential is applied to M (M is a natural number) external terminals from one side in the direction, and the first potential is applied to (M + 1) th to Nth external terminals. A command section (23) for outputting signals (S1 to S4) for outputting two potentials to the integrated circuit;
A determination unit (24) for determining that the M-th and (M + 1) -th external terminals are short-circuited when the value of the current exceeds a predetermined reference value;
Including
The command unit (23) outputs the signals (S1 to S4) to the integrated circuit (1, 10) by varying the M in the range of 1 to (N-2). Open / short inspection device . The integrated circuit (1, 10) has a second circuit (102) that operates based on the power source,
When a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal, the current flowing through the Mth external terminal and the (M + 1) th external terminal is The external terminal of the integrated circuit according to claim 6, which is larger than a maximum value of a current flowing through the power supply terminal (11) in a state where the first potential (H) is output to the N external terminals. Open / short inspection device. The integrated circuit (1, 10) has a second circuit (102) that operates based on the power source,
When a short circuit occurs between the Mth external terminal and the (M + 1) th external terminal, the current flowing through the Mth external terminal and the (M + 1) th external terminal is The open / short-circuit inspection apparatus for external terminals in an integrated circuit according to claim 6, wherein a maximum value of a normal current flowing through the power supply terminal in a state where all the N external terminals are open is larger . The integrated circuit (1, 10) includes a clock input terminal (12, P12) to which a clock is input, the integrated circuit operates based on the clock, and the integrated circuit has a lower frequency of the clock, Of the current flowing through the integrated circuit via the power supply terminal (11), the component depending on the frequency of the clock has a small characteristic,
Clock supply unit (26) for supplying the clock to the clock input terminal
The open / short circuit inspection apparatus of the external terminal in the integrated circuit according to claim 6, further comprising: The integrated circuit (1, 10)
A clock input terminal (12) to which a clock is input;
A second circuit (15-17) for changing the frequency of the clock input from the clock input end;
And the integrated circuit operates based on the clock after the change by the second circuit, and the integrated circuit has the integrated circuit via the power supply terminal (11) as the frequency of the clock after the change is lower. Of the current flowing through the circuit, the component depending on the frequency of the clock has a small characteristic,
A frequency control unit (27) for supplying a control signal for controlling the change of the frequency in the second circuit to the second circuit.
The open / short circuit inspection device for an external terminal in the integrated circuit according to claim 6, further comprising: The integrated circuit is connected in series between a clock input terminal (12) to which a clock is input and a high potential and a low potential of the power supply, and a pair of switchings that are complementarily conducted according to the clock. With elements,
A clock supply unit (26) for supplying the clock to the clock input terminal;
An average unit (25) for averaging the values detected by the current detection unit;
Further including
The determination unit (24) short-circuits between the Mth and (M + 1) th external terminals because the current value averaged by the averaging unit exceeds a predetermined reference value. The open / short circuit inspection device for an external terminal in an integrated circuit according to claim 6, wherein the device is determined to be open. The integrated circuit includes a clock input terminal (12) to which a clock is input, a second circuit (15 to 17) for changing the frequency of the clock input from the clock input terminal, and a high potential and a low potential of the power supply. A pair of switching elements that are connected in series with each other and that are complementarily conducted according to the changed clock;
With
A frequency control unit (27) for supplying a control signal for controlling the change of the frequency in the second circuit to the second circuit;
An average unit (25) for averaging the values detected by the current detection unit;
Further including
The determination unit (24) short-circuits between the Mth and (M + 1) th external terminals because the current value averaged by the averaging unit exceeds a predetermined reference value. The open / short circuit inspection device for an external terminal in an integrated circuit according to claim 6, wherein the device is determined to be open. The command unit (23) sequentially updates the M from 1 to N-1 and outputs the signals (S1 to S4) to the integrated circuit (1, 10). open / inspection apparatus of the external terminals of the integrated circuit according to One. The second circuit (102) has a CMOS type circuit,
The open / closed external terminal in the integrated circuit according to claim 7 , wherein the current detection unit (21, 22) detects the value of the current through a low-pass filter (25). Short circuit inspection device.

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