JP5603728B2 - 圧電振動子 - Google Patents
圧電振動子 Download PDFInfo
- Publication number
- JP5603728B2 JP5603728B2 JP2010220621A JP2010220621A JP5603728B2 JP 5603728 B2 JP5603728 B2 JP 5603728B2 JP 2010220621 A JP2010220621 A JP 2010220621A JP 2010220621 A JP2010220621 A JP 2010220621A JP 5603728 B2 JP5603728 B2 JP 5603728B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrode
- piezoelectric diaphragm
- support arm
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005284 excitation Effects 0.000 claims description 82
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 24
- 239000010453 quartz Substances 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 19
- 239000013078 crystal Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010220621A JP5603728B2 (ja) | 2010-09-30 | 2010-09-30 | 圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010220621A JP5603728B2 (ja) | 2010-09-30 | 2010-09-30 | 圧電振動子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012080166A JP2012080166A (ja) | 2012-04-19 |
| JP2012080166A5 JP2012080166A5 (enrdf_load_stackoverflow) | 2013-11-14 |
| JP5603728B2 true JP5603728B2 (ja) | 2014-10-08 |
Family
ID=46239954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010220621A Active JP5603728B2 (ja) | 2010-09-30 | 2010-09-30 | 圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5603728B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014165573A (ja) * | 2013-02-22 | 2014-09-08 | Seiko Epson Corp | 振動片、振動子、電子デバイス、電子機器、および移動体 |
| US10778182B2 (en) | 2015-03-31 | 2020-09-15 | Murata Manufacturing Co., Ltd. | Resonator |
| WO2016158045A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振子 |
| WO2016158048A1 (ja) | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振子 |
| US10938375B2 (en) | 2015-03-31 | 2021-03-02 | Murata Manufacturing Co, Ltd. | Resonator |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931889B2 (ja) * | 1976-10-18 | 1984-08-04 | セイコーインスツルメンツ株式会社 | 圧電振動子 |
| JPS55130416U (enrdf_load_stackoverflow) * | 1979-03-12 | 1980-09-16 | ||
| JPH03130620U (enrdf_load_stackoverflow) * | 1990-04-13 | 1991-12-27 |
-
2010
- 2010-09-30 JP JP2010220621A patent/JP5603728B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012080166A (ja) | 2012-04-19 |
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