JP5597722B2 - Steel plate passing device, steel plate surface treatment apparatus including the same, and steel plate surface treatment method - Google Patents

Description

  The present invention relates to a steel plate passage device, a steel plate surface treatment apparatus including the same, and a surface treatment method of a steel plate. More specifically, the present invention embodies a tight seal around a traveling steel plate, and the atmospheric pressure and differential pressure space. The steel sheet is sealed or masked by the flow pressure of air particles between the pressure space and the differential pressure space and the vacuum space to enable proper steel plate sealing, so that the surface treatment of the steel plate in a vacuum atmosphere can be performed stably. The present invention relates to a steel plate passing device, a steel plate surface treatment device including the same, and a steel plate surface treatment method.

  Surface treatment and coating using vacuum deposition in the recent semiconductor industry, display industry, information electronics industry, solar industry or IT component industry is one way to produce high-quality products and special-purpose products. It is used as.

  In particular, such vacuum deposition can be applied regardless of the object to be coated, such as metal, plastic, and glass. However, since most of the deposition process is performed in a high vacuum atmosphere, a long process time and There has been a problem such as excessive depletion of the evaporated substance by the vapor deposition process.

  In addition, when a vacuum process (evaporation) is performed during the surface treatment of a plastic film or a steel sheet coil, it is difficult to perform intermittently due to the production speed and the characteristics of the continuous coated body. For this purpose, a vacuum-to-vacuum system in which the entire plastic film or steel plate coil is inserted into a vacuum chamber and the process is performed under vacuum is used, but the preparation for the process and the surface coating process have been completed. Since the productivity is lowered due to the replacement of the steel coil (Stripping Coil), it is not a true continuous process, and there is a problem that the unit price of the surface-treated product is high.

  Therefore, the steel sheet wound up in the external atmosphere is usually passed through the inside of the chamber that maintains the vacuum atmosphere continuously using a sealing (sealing) device without damaging the vacuum pressure, and continuous vacuum deposition. After that, research on the rewinding process in the atmosphere has been conducted.

  For example, the steel plate is continuously passed in a vacuum atmosphere so that the vacuum pressure in the vacuum chamber is not lost at the same time, although it is a plate passing device that guides the continuous plate of the steel plate. Is an important technical part in the process of processing.

  In addition, a part of a sealing device or a device for realizing vacuum maintenance while continuously (high-speed) passing a steel plate in a vacuum atmosphere (space) at such an atmospheric pressure is known.

  However, most of the known conventional sealing devices and equipments are designed to maintain a vacuum atmosphere by sealing the steel sheet by arranging the seal rolls and casing structure or the multi-staged seal rolls and casings. Since it cannot respond appropriately to the sheath width change, there has been a difficult problem to apply to the surface treatment of continuously progressing steel sheets having various standards (widths).

  In addition, since the sealing performance of the steel plate is not perfect, the vacuum pumping capability in the chamber must be increased or at least maintained in order to maintain the vacuum. In most cases, it becomes uneconomical.

  An air flow resistance (flow resist) type sealing device that gradually increases the resistance force of the air flow by using a multi-part structure is also known, but it is actually used between the atmospheric pressure and the differential pressure space. In this case, since the sealing efficiency is low, there is a problem that a continuous vacuum pumping must be maintained.

  Furthermore, as another conventional method (form), a plurality of seal rolls can be arranged (arranged) in multiple stages in a zigzag manner to maintain the sealing performance of the steel plate to be passed. It is difficult to appropriately respond to changes in the width of the machine, and in order to maintain the sealing performance, it is considerably difficult to construct and manufacture a precision structure of a device or a tool for realizing a very narrow gap between sealing machines. As a result, it is expensive to apply to an actual line, and maintenance and repair are difficult.

  Therefore, as described above, most of the various conventional sealing devices and equipment have a structure that is difficult to cope with a change in the thickness and width of the steel plate in most cases, and in particular, maintain a lot of vacuum pumping for maintaining the vacuum. As a result, there is a problem that non-economic energy consumption is considerable, and that the actual line is less effective.

  The present invention has been proposed in order to solve the above-described conventional problems. One aspect of the object is to realize a tight seal around a moving steel sheet, and to achieve atmospheric pressure and differential pressure. The steel sheet is sealed or masked by the flow pressure of air particles between the space and between the differential pressure space and the vacuum space to enable proper steel sheet sealing, enabling stable steel sheet surface treatment in a vacuum atmosphere. An object of the present invention is to provide a steel plate passing device, a steel plate surface treatment device including the same, and a steel plate surface treatment method.

  As an embodiment of the technical aspect for achieving the above object, the present invention provides an upper and lower seal roll provided to allow a steel plate to pass while responding to the progress of the thickness change of the steel plate. And a steel plate sealing unit provided to seal the progressing steel plate passing through the chamber in cooperation with the sealing roll while enclosing the width change of the progressing steel plate, Provided is a steel sheet passing device.

  Further, as another embodiment of the technical aspect of the present invention, the present invention is a seal casing in which a steel plate passes through the chamber and is installed through the chamber, and a change in the width of the steel plate on at least one side of the seal casing. There is provided a steel plate passage device constituted by a steel plate masking mold, including a steel plate masking unit provided to mask a gap between a steel plate and a casing.

  As another technical aspect, the present invention relates to the above-described steel plate sealing type steel plate passing device disposed in the viscous flow region between the external atmospheric pressure and the differential pressure space, and between the differential pressure space and the vacuum space. A steel plate passage device comprising a steel plate masking type steel plate passage device disposed in at least the molecular transition region of the molecular transition region and the vacuum region, and a steel sheet surface treatment unit disposed in the vacuum region. A steel sheet surface treatment apparatus is provided.

  Furthermore, as still another technical aspect, the present invention is configured to pass a steel plate while being sealed in a viscous flow region between the external atmospheric pressure and the differential pressure space, and between the differential pressure space and the vacuum space. A steel plate surface treatment method comprising: passing a steel plate through the steel plate while masking the steel plate in the molecular transition region; and surface treatment step of the steel plate surface treating the steel plate to be passed through in a vacuum region. I will provide a.

  According to such a steel plate passing device of the present invention, it is possible to continuously pass the steel plate, and in particular, it is possible to maintain a tight seal around the steel plate when the steel plate enters into a vacuum atmosphere. .

  Further, according to the present invention, there is almost no loss of vacuum pressure when the steel sheet enters the vacuum atmosphere, and continuous or excessive vacuum pumping for maintaining a stable vacuum is not required, so that the cost can be reduced.

  In particular, according to the present invention, the steel plate is divided into a viscous flow region between the atmospheric pressure and the differential pressure space, and a molecular transition region between the differential pressure space and the vacuum space (intermediate-molecular flow region). Therefore, an appropriate steel plate seal can be realized while simplifying the device structure.

  Therefore, the present invention enables the steel plate to be continuously passed in a tight seal state, and the vacuum atmosphere for the surface treatment (surface etching, vapor deposition coating, etc.) of the steel plate is stably maintained and continuously at high speed. A method for producing high-quality steel sheet products that are economically superior by improving the surface treatment quality of steel sheet products by enabling vacuum deposition surface treatment and reducing the manufacturing price by improving productivity. About.

It is a schematic diagram which shows the whole structure of the steel plate surface treatment apparatus by this invention containing the steel plate sealing type | mold of this invention shown in FIGS. It is a perspective view which shows the continuous plate apparatus of the steel plate seal type | mold by this invention which maintains a seal | sticker while guiding the plate of a steel plate between atmospheric pressure and differential pressure space. FIG. 3 is a side view of the apparatus according to the present invention in FIG. 2. FIG. 3 is a front view of the apparatus according to the present invention in FIG. 2. FIG. 3 is a perspective view showing the device according to the invention of FIG. 2. It is a perspective view which shows the steel plate masking type continuous plate apparatus of this invention arrange | positioned between differential pressure space and vacuum space.

  Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

  First, FIG. 1 shows a steel plate surface treatment apparatus 300 including a steel plate sealing type steel plate passing device 1 and a steel plate masking type steel plate passing device 100 according to the present invention, and FIGS. 1 shows a steel plate passing plate device 1 of a steel plate seal type of the invention. FIG. 6 shows a steel plate masking type steel plate passing device 100 according to the present invention.

  As shown in FIG. 1, the steel sheet surface treatment apparatus 300 of the present invention includes a chamber (structure, 210, 230, 250) and guide rolls 270, 290 included in the chamber. Accordingly, the steel plate that travels at high speed is etched in the vacuum region (“C” region) where at least the vacuum is stably maintained while passing through the chamber in the order of region A-> B-> C-> B-> A. In addition, at least the surface treatment of the steel plate coating is performed among the vapor deposition coating and the cooling.

  At this time, as shown in FIG. 1 and as described in detail in FIGS. 2 to 5, the steel plate seal-type steel plate passing device 1 according to the present invention has a flow pressure of air particles, respectively. A steel plate masking type steel plate passing device according to the present invention, which is arranged in a viscous flow region (region "A" in FIG. 1) known as being distinguished by FIG. 100 may be disposed in at least a molecular transition region among a molecular flow region (intermediate region) (“B” region in FIG. 1) and a vacuum region (“C” region in FIG. 1).

  Of course, as shown in FIG. 1, the steel plate sealing type and masking type steel plate passing device 1100 are installed in multiple stages (for example, three stages) in terms of sealing surfaces.

Further, the region of 1 × 10 ³ mbar to 1 × 10 ⁰ mbar is a viscous flow region, and the flow velocity and flow rate of air in such a viscous flow region are affected by the influence of the overall mass flow (mass flow). Therefore, in order to achieve a stable seal (sealing), it is important to reduce the volume (area) through which air can pass.

  Therefore, the steel plate sealing type steel plate passing device 1 according to the present invention, which will be described in detail with reference to FIGS. 2 to 5, surrounds the steel plate and maintains a tight seal, so that the sealing performance must be high. It is preferable to arrange in such a viscous flow area ("A" area in FIG. 1).

In addition, at a pressure of 1 × 10 ⁻³ mbar or less, air molecules become very dilute. Therefore, instead of the above-described mass flow of air flow, a molecular flow region in which each air molecule flows is used. In this region, it is possible to seal only with a channel structure having a long distance capable of separating the pressure from the area obstructing the air flow.

In addition, the region of 1 × 10 ⁰ mbar to 1 × 10 ⁻³ mbar is an intermediate region (transition region, intermediate flow region) that simultaneously shows the characteristics of viscosity and molecules, and in this region, the passage area of air molecules is reduced. It is preferable to use the method and the method of lengthening the resistance path at the same time.

  Accordingly, as shown in FIG. 1, the steel plate masking type steel plate passing device 100 according to the present invention has a chamber structure in which the interval is extended long while a plurality of them are arranged in the molecular transition (intermediate) region B. Let it form.

  As shown in FIG. 1, the steel plate masking type threading device 100 according to the present invention is not provided with a seal roll. Therefore, guide rolls 270 for adjusting the tension of the steel plate are provided on the front side and the rear side. It is preferable to install. In FIG. 1, reference numeral 290 may be a “deflector roll” that is larger than a guide roll that adjusts the traveling direction of the steel sheet.

  Most preferably, as shown in FIG. 1, the steel sheet seal according to the present invention is provided in the viscous flow region A, which is the entry and withdrawal section of the steel sheet in the atmosphere, so that the steel sheet seal can be maintained tightly. The steel plate passing plate device 100 of the present invention is long in the vacuum region C where the surface transition of the molecular transition region B and the steel plate is implemented. Arrange (multiple) along the channel structure.

  Therefore, as shown in FIG. 1, a steel plate surface treatment apparatus 300 according to the present invention includes a steel plate sealing type steel plate passing device 1 disposed in a viscous flow region A between an external atmospheric pressure and a differential pressure atmosphere. A steel plate masking type steel plate passing device 100 disposed in the molecular transition region B or the vacuum region C between the differential pressure atmosphere and the vacuum atmosphere, and a steel plate surface treatment unit 310 disposed in the vacuum atmosphere C. Can be configured with.

  At this time, the steel plate surface treatment unit 310 in the steel plate surface treatment apparatus 300 according to the present invention, as shown in FIG. 1, in order to stably perform (evaporation) coating on the steel plate surface in advance. A steel plate etching part 310a that etches the surface of the steel sheet with plasma, a steel sheet coating part 310b that coats the surface of the steel sheet by vacuum deposition (PVD, CVD), and a steel sheet coated with the surface are cooled to stabilize the coating part. The steel plate cooling part 310c can be included, but it is also possible to include only the steel sheet coating part 310b.

  At this time, in the steel plate surface treatment apparatus 300 shown in FIG. 1, at least in the molecular transition region B and the vacuum region C, a vacuum pump that maintains a vacuum through vacuum pumping is disposed for each chamber and is interlocked with the device control unit C. The pumping unit (PP) can be controlled and operated.

  Further, in FIG. 1, a steel plate etching part 310a using plasma, a steel plate coating part 310b through vapor deposition, and the like are known. For example, the steel plate etching unit activates by removing an oxide film on the surface of the steel plate using ion impact energy of plasma, or preheats the steel plate using a preheater to improve the deposition coating property.

  Below, the steel plate sealing type | mold and masking type steel plate passing apparatus 1 and 100 by this invention are demonstrated in detail.

  First, FIGS. 2 to 5 show a steel plate sealing type steel plate passing device 1 according to the present invention.

  As shown in FIG. 2 to FIG. 4, the steel plate sealing type steel plate passing device 1 according to the present invention basically includes upper and lower portions that let the steel plate pass while corresponding to the progress of the thickness change of the steel plate S. Seal rolls 10 and 20, and a steel plate seal unit 50 provided to surround and seal the steel plate passing through the wall of the chamber 210 in cooperation with the seal roll while corresponding to the width change of the steel plate S; Can be provided including.

  In the steel plate sealing type steel plate passing device 1 according to the present invention, the steel plate passes between the upper and lower seal rolls 10 and 20 to realize continuous passage (advance), and the steel plate sealing unit 50 includes: In close cooperation with the upper and lower seal rolls, a tight seal is realized while surrounding the steel plate from all sides.

  Accordingly, the steel plate sealing type steel plate passing device 1 according to the present invention is preferably disposed in the “A” region which is a viscous flow region between the atmospheric pressure close to the external atmospheric pressure and the differential pressure space.

  Moreover, the steel plate sealing type steel plate passage device 1 according to the present invention enables continuous passage of steel plates, in particular, high-speed passage. At the same time, as shown in FIG. 3 and FIG. 4, in response to changes in the thickness of the steel plates by the upper and lower seal rolls 10, 20 and in real time to the changes in the width of the steel plates through the steel plate seal unit 50, Maintain seal. Thereby, although the conventional seal | sticker was possible to some extent, the problem that it was difficult to maintain a stable seal | sticker corresponding to the thickness and width | variety of a steel plate can be eliminated.

  At this time, as shown in FIGS. 2 and 3, the upper and lower seal rolls 10 and 20 according to the apparatus of the present invention rotate on the traveling path P of the steel plate in which surface treatment such as etching or vapor deposition coating is implemented. Each of the roll housings 30 is arranged so as to be rotationally driven, whereby the steel plate can be continuously passed while being sandwiched between the rolls.

  Preferably, when at least the upper seal roll 10 of the upper and lower seal rolls 10 and 20 is installed on the rotated roll housing 30 so as to be movable up and down, the rotation of the roll housing 30 and the elevation of the upper seal roll 10 are combined. become.

  Therefore, as shown in FIG. 3, when the thickness of the steel sheet is increased from “t1” to “t2”, the upper seal roll 10 is moved to “d” around the roll axis by raising and lowering the upper seal roll. When the roll housing is rotated by “θ” by the rotation of the roll housing, it moves corresponding to the thickness change of the steel sheet.

  Further, as shown in FIG. 3, the roll housing 30 is seated on the base 32 as a curved structure. For example, the first curved surface 31a formed at the lower stage of the roll housing 30 and the second curved surface 31b formed at the upper part of the base are in contact with each other, preferably on one side of the roll housing (preferably around the center line of the roll axis). A first driving source 34 connected to the base 32, that is, a vertical driving cylinder is connected.

  Accordingly, the roll housing is rotated at the base by the forward or downward operation of the first drive source 34 in the vertical drive cylinder. At this time, the rotation angle can be adjusted sufficiently.

  The roll shaft neck 12 of the bearing block in which the roll shaft of the upper seal roll 10 is assembled is supported by guides 13 on both sides of the roll housing, and is connected to a second drive source 36 provided to the roll housing.

  Therefore, by the operation of the second drive source 36, the upper seal roll 10 enables the passage of the steel plate in cooperation with the lower seal roll 20 corresponding to the thickness change of the steel plate.

  At this time, the second drive source 36 preferably includes a screw bar 36c vertically passing through a gear box 36b connected to a drive motor 36a disposed on the upper side of the roll housing, as shown in FIG. By being connected to the roll shaft neck 12, the upper seal roll 10 is raised or lowered in the roll housing together with the roll shaft neck by the operation of the drive motor.

  Further, as the second drive source 36, although not shown separately, a vertical drive cylinder or an electric actuator may be used.

  At this time, as shown in FIG. 3, the drive motor or the cylinder cooperates with the apparatus control unit C provided in the apparatus according to the present invention and the hydraulic / pneumatic supply unit (PP) associated with the apparatus control unit. As a result, the movement of the upper seal roll can be controlled virtually automatically in accordance with the thickness of the steel sheet.

  Alternatively, preferably, a sensor for sensing the thickness of the steel plate is disposed adjacent to the apparatus according to the present invention, and this is linked to the apparatus control unit C of the apparatus according to the present invention to implement the movement control of the upper seal roll. You can also

  FIGS. 2 to 5 show a steel plate sealing unit 50 according to the apparatus of the present invention, which is provided to stably implement a steel sheet seal substantially stably in the apparatus according to the present invention.

  The steel plate seal unit 50 according to the present invention basically surrounds the steel plate S passed through between the upper and lower seal rolls 10 and 20 from four directions, but is in close contact with the upper and lower seal rolls 10 and 20. The first and second seal plates 52 and 54 on the upper and lower sides of the steel plate to be maintained, and the third and fourth seal plates 56 and 58 on the upper and lower portions on both sides of the steel plate assembled in a pair can be configured.

  Therefore, in the present invention, the first to fourth seal plates are maintained in close contact with the upper and lower seal rolls, and even if the thickness and width of the steel plate change, the steel plate is surrounded from all sides to form a stable seal. Let

  At this time, it is preferable that the third and fourth seal plates 56 and 58 are not in contact with the edge of the steel plate to be passed through at a high speed and maintain an appropriate interval of about 5 to 20 mm. This is because, when in direct contact with the edge of a steel plate to be threaded at high speed, the seal plate may rapidly be partially worn or damaged due to minute left and right movement of the steel plate in the threading plate, and the seal characteristics may be destroyed. Because. However, since the seal plate and the seal roll are brought into contact with the circumference of the guide roll (curved) by a constant pressure, there is no problem of rapid wear even if the close contact is maintained, and the sealability can be maintained for a long time. it can.

  Hereinafter, the first to fourth seal plates 52, 54, 56, and 58 will be described.

  First, as shown in FIGS. 2 to 5, the first seal plate 52 is maintained in close contact with the upper seal roll 10 that moves correspondingly when the thickness of the steel plate changes. The guide 53 is supported by a third driving source 60 provided on the chamber 210 and moves back and forth while maintaining a constant angle with respect to the central axis of the guide roll. The second seal plate 54 is fixedly installed horizontally in the chamber 210 so as to maintain close contact with the lower seal roll 20 in the chamber 210.

  At this time, the drawing shows that the first seal plate moves almost horizontally. However, as shown in FIG. 3, the upper seal roll actually moves up and down and rotates. It is more preferable that the seal plate is in close contact with the upper seal roll with the tip portion inclined.

  In fact, since only the upper seal roll 10 rotates and moves up and down when the thickness of the steel sheet changes, the lower second seal plate 54 in close contact with the lower seal roll 20 may be fixedly disposed.

  At this time, in the present embodiment, the third drive source 60 is illustrated and described as a horizontal drive cylinder disposed on the chamber 210 side, but this is not necessarily limited to this, and the actual steel plate thickness is not limited thereto. Since the change width of the height is hardly large, a screw bar or an electric actuator driven as a motor can be used instead of the cylinder.

  Next, as shown in FIGS. 2 to 5, the upper third seal plate 56 and the lower fourth seal plate 58 combined in a pair on the left and right sides on both sides of the steel plate are in close contact but separated. In particular, the distance between the edge of the steel plate to be passed through while approaching or approaching the center of the steel plate to be passed through corresponding to the width of the steel plate, and a distance of about 5 to 20 mm, for example. Provided to maintain.

  The third and fourth seal plates 56 and 58 are provided so as to move to the left and right in response to a change in the width of the steel plate via a fourth drive source 64 in cooperation with a seal plate housing 62 assembled outside. .

  At this time, as described above, the third seal plate 56 is inclined to the third drive source so that the third seal plate 56 can be moved back and forth. It is preferable to cooperate so that movement is possible.

  For example, as shown in FIGS. 3 to 5, the guide unit 66 includes a guide 66 a that is extended and fixed (stepped) along the bottom surface of the upper first seal plate 52, and the third unit. And a guide rail groove 66b formed in the seal plate.

  Accordingly, when the first seal plate 52 moves back and forth when the upper seal roll is raised and rotated through the third drive source 60, the third seal plate 56 is also moved forward and backward by the guide unit 66.

  Further, the guide 66a and the guide rail groove 66b of the guide unit 66 may be provided on the third seal plate 56 and the first seal plate 52, respectively, different from those shown in the drawing.

  In this case, the guide of the third seal plate can move along the guide rail groove of the first seal plate when the third seal plate moves left and right. In addition, the guide may be provided in the form of a protrusion on the upper stage of the third seal plate.

  At this time, as shown in FIGS. 2 and 5, the third seal plate 56 is fastened to the seal plate housing 62 while compensating for back-and-forth movement, but a fastening bolt 67 b that penetrates the seal plate housing 62. Passes through a long groove 67a formed in the third seal plate 56 and is fastened by a nut 67c.

  Accordingly, the third seal plate 56 on both sides of the steel plate also moves left and right together with the seal plate housing 62 that moves left and right to the fourth drive source 64. At this time, the guide rail groove 66b of the guide unit 66 moves along the guide 66a, and the third seal plate 56 moves forward and backward along the guide unit 66 when the first seal plate moves forward and backward.

  At this time, as shown in FIG. 5, the fastening bolt 67 b that passes through the long groove 67 a of the third seal plate 56 through the seal plate housing 62 and is fastened by the nut 67 c is coupled to the third seal plate 56 together with the seal plate housing. Can be moved left and right. As described above, the third seal plate 56 can be moved back and forth through the guide unit 66. In order to reconsider the ease of control and the efficiency of the seal, in addition to the form of moving back and forth in conjunction with the upper first seal plate, a drive unit is installed to move forward and backward separately from the first seal plate. It can also be formed into a possible structure.

  At this time, as shown in FIGS. 3 and 5, the third seal plate 56 is preferably formed with a chamfered portion (incision portion, 62a) through which the guide 66a of the guide unit 66 passes. However, the chamfered portion 62a is formed only from the upper stage of the seal plate housing 62 to the portion through which the guide unit passes.

  That is, when the third seal plate 56 advances together through the first seal plate 52 and the guide unit 66, a gap is formed between the third seal plate 56 and the chamber wall 210. The upper part prevents the seal from being maintained.

  Further, as shown in FIG. 3, since the advance width of the third seal plate 56 is not substantially large, a chamfer through which a guide unit 66 passes by cutting a part from the upper center of the seal plate housing 62 to the left side. The portion 62a may be formed.

  Subsequently, as shown in FIGS. 2, 4 and 5, the fourth drive source 64 includes a pair of fourth seal plates 58 at the lower portions on both sides of the steel plate and a seal disposed in close contact with the outside thereof. The plate housing 62 is provided with a fastening block 70 in which a screw is formed, and is connected to a motor 72 fixed to the chamber (wall 210) to form a screw in the opposite direction with the center as a base point. 64b can be provided.

  At this time, as shown in FIG. 4, at the center of the two-stage screw bar (corresponding to the center of the steel plate) that is the fourth drive source 64 is a portion where screws are formed in different directions. A coupling 65 to be coupled is coupled.

  Accordingly, the fourth seal plate 58, the seal plate housing 62, and the third seal plate 56 fastened to the seal plate housing with a bolt and a long groove structure along the direction in which the drive motor 72 operates are all changed in the width of the steel plate. It is possible to move closer to or away from each other.

  As described above, the guide 66a of the guide unit 66 fixed to the upper first seal plate 52 at the time of the right and left movement corresponding to the width of the steel plates of the third and fourth seal plates and the seal plate housing is the third as described above. Although it passes through the guide rail groove 66b of the seal plate and the chamfered portion 62a of the seal plate housing 62, the first seal plate does not move, and only the third seal plate and the seal plate housing can move left and right.

  Further, as the fourth drive source, a horizontal drive cylinder connected to the seal plate housing and horizontally mounted in the chamber 210 can be used instead of the illustrated screw bar, but the third and fourth seal plates can be moved left and right. It is most preferable to use a two-stage screw bar because it is necessary to move the same length in the opposite direction. However, in the case of a horizontal drive cylinder, the fourth seal plate 64 needs to be connected and fixed to the seal plate housing 62.

  In particular, as shown in FIG. 3, the seal plate housing is adjusted to a size that is in close contact with the first seal plate and the chamber so as to seal at least a gap between the chambers when the third seal plate 56 is advanced. It is necessary to Moreover, the front-end | tip part of a seal plate housing can be adjusted with the size which is not closely_contact | adhered directly to an up-and-down part seal roll.

  Subsequently, as shown in FIGS. 4 and 5, one end is connected to the seal plate housing 62 and the other end is connected to the chamber 210, thereby forming a steel plate passage opening formed in the chamber 210. It is preferable to provide a multi-stage seal cover, for example, a telescope seal unit 68, which seals 212 while responding to changes in the width of the steel plate.

  That is, as shown in FIG. 4, when the width of the steel plate is changed from L1 (minimum width of the steel plate) to L2 (maximum width of the steel plate), the size of the steel plate passage port 212 of the chamber 210 is thereby adjusted. When the third and fourth seal plates move so as to become narrower corresponding to the width of the steel plate, the steel plate passage port 212 of the chamber forms a gap outside the third and fourth seal plates. At this time, the telescope seal unit 68 having a structure in which a large number of seal plates are folded, while expanding and overlapping, seals the steel plate passage opening of the chamber due to the width change of the steel plate and maintains the seal.

  Further, as shown in FIG. 5, the first to fourth seal plates 52, 54, 56, and 58 are in contact with the upper and lower seal rolls at the roll contact end having wear resistance and lubricity. 52a, 54a, 56a, 58a are provided separately, or although not separately shown as drawings, a close contact end that is elastically contacted by a spring or the like is installed at the contact portion of the seal plate with the roll More preferably.

  That is, the roll contact end of the seal plate is formed of a material having at least wear resistance, and more preferably has lubricity at the same time in order to maintain the state of being in close contact with the seal roll when passing the steel plate. Made of material.

  For example, the roll contact ends 52a, 54a, 56a, 58a of the first to fourth seal plates are made of organic polymers such as polyethylene, polypropylene, MC nylon, PTFE (teflon, polytetrafluoroethylene), and the like. By adding graphite to the material, it can be formed of a material that provides wear resistance and enhanced lubricity.

  Further, in the present invention, the material and surface illuminance of the top and bottom seal rolls 10 and 20 to which the end portions of the first to fourth seal plates, that is, the close contact ends are closely attached, are also adjusted to provide a close contact (seal) effect. For example, the seal roll is preferably made of steel and has an average surface illuminance of 5 microns or less.

  However, it is most preferable to control the surface illuminance of the seal roll to 1 micron or less and maintain the surface hardness at HV 700 to 1000 or more. For this reason, it is preferable that heat treatment and hard chrome plating are applied to the seal roll during manufacture. That is, since the surface illuminance and hardness of the seal roll affect the plate passing property of the steel plate that is in close contact between them and the plate plate or the adhesion maintaining property of the seal plate, it is preferably formed in the above range.

  As described above, the steel plate sealing type steel plate passing device 1 according to the present invention shown in FIG. 1 to FIG. 5 completely surrounds the steel plate from all sides between the atmospheric pressure and the differential pressure space. Since it is operated in response to changes in thickness and width at the same time, it is very excellent in steel plate sealing (interruption with the atmosphere) and can accommodate all thickness and width changes of a steel plate as one device.

  Further, FIG. 6 shows a steel sheet masking die according to the present invention installed in at least the molecular transition region of the molecular transition region (“B” region) and the vacuum region (“C” region) as illustrated in FIG. The steel plate threading apparatus 100 is shown.

  Further, the steel plate masking type steel plate passing device 100 according to the present invention basically includes a seal casing 110 in which the steel plate S passes through the chamber and is installed through the chamber, and at least one of the seal casing 110. A steel plate masking unit 130 provided to seal a gap between the steel plate and the casing while accommodating a change in the width of the steel plate on the side can be configured.

  At this time, the seal casing 110 of the present invention is formed with a steel plate passage port 112 having an interval of about 0.5 to 1 mm between the steel plate through which the maximum thickness steel plate passes, and a differential pressure space and a vacuum space. In other words, it can be provided as a long and elongated box structure fixed through the molecular transition chamber 230.

  Further, the steel plate masking unit 130 is installed inside the steel plate passage port 112 of the seal casing so as to be rotatable (longer extended) while responding to changes in the width of the steel plate via the fifth drive source 132. It can be provided with a masking plate.

  Preferably, four masking plates 130 of the masking plate are arranged inside the seal casing 110 penetrating through the chamber 230 in the front and rear and left and right sides toward the inlet and outlet of the steel plate, and the front side and the rear side of the steel plate. Seal between the steel plate and casing on the side.

  At this time, the distance between the edge of the steel plate and the masking plate as the steel plate masking unit 130 is preferably maintained at about 3 to 20 mm. That is, when the edge of the steel plate traveling at high speed is in direct contact with (the end portion of) the masking plate, wear of the masking plate is severe, and the minimum interval is maintained.

  The fifth drive source 132 includes a motor 134 installed vertically on the outer upper portion of the seal casing, and a rotating shaft 136 connected to the motor 134 and inserted through the upper surface of the seal casing. The masking plate, which is the steel plate masking unit 130, is connected to the lower portion of the rotating shaft 136 and rotates at a predetermined angle according to the width change of the steel plate.

  At this time, as shown in FIG. 6, in the steel plate masking unit 130 of the masking plate, a fixing ring 138a into which the lower stage of the rotating shaft 136 is inserted is partially cut at an end thereof, and the inside of the casing The masking plate can be fixedly rotated by being seated inside the support port 138b assembled on the bottom surface.

  Although schematically shown in the drawings, the seal casing 110 is provided with a cover for assembling the rotating shaft, the fixing ring and the support port, or is divided and assembled in the form of flange assembly. Can be provided in structure.

  Although illustrated and described above in connection with specific embodiments of the present invention, the present invention can be modified and varied in various ways without departing from the spirit and scope of the present invention provided by the following claims. This is obvious to those with ordinary knowledge in the industry.

DESCRIPTION OF SYMBOLS 1 Steel plate sealing type steel plate passage apparatus 10 and 20 Upper and lower seal roll 30 Rotation type roll housing 32 Base 34 1st drive source 36 2nd drive source 50 Steel plate seal units 52, 54, 56, 58 1st-4th Seal plate 60 Third drive source 62 Seal plate housing 64 Fourth drive source 66 Guide unit 68 Telescope seal unit 70 Fastening block 100 Steel plate masking type steel plate passage device 110 Seal casing 112 Steel plate passage port 130 Steel plate masking unit 132 Drive source 136 Rotating shaft 210, 230 Chamber 300 Steel plate surface treatment device 310 Steel plate surface treatment unit 310a Steel plate etching unit 310b Steel plate coating unit 310c Steel plate cooling unit

Claims (12)

The upper and lower seal rolls provided to let the steel plate pass through while responding to the thickness change of the steel plate,
Depending on the width of the progressive steel sheet is changed, the seal roll cooperating with to seal in surrounding conditions progress steel sheet passing through the chamber that is provided outside of the seal rolls, to surround the steel plate A steel plate seal unit provided with a large number of seal plates that are positioned so as to separate or approach in the width direction of the steel plate;
A steel plate threading device composed of a steel plate seal type.   The upper and lower seal rolls are provided so as to pass the steel plate through a roll housing that is rotatably arranged on the steel plate traveling path, and at least the upper seal roll of the upper and lower seal rolls can be raised and lowered to the roll housing. The steel plate threading device according to claim 1, which is installed. The roll housing is seated a curved structure on a base that is provided is fixed to the ground, first driving source installed in the base is provided rotatably in the base on coupled, said upper seal The steel plate passing plate device according to claim 2, wherein a second drive source provided to the housing is connected to the shaft neck portion where the roll shaft of the roll is assembled so that the upper seal roll can be moved up and down. The steel plate seal unit includes first and second seal plates disposed on the upper and lower sides of the steel plate,
Third and fourth seal plates that are arranged on both sides of the steel plate and combined in pairs,
The steel plate passage device according to claim 1, wherein the steel plate is configured to be sealed while surrounding the steel plate from all sides. Wherein the first seal plate is provided a third driving source provided on said chamber so as to maintain the close contact between the upper seal roll movably in mediating the lift by thickness variation of the steel plate, the second seal The steel plate passage device according to claim 4, wherein the plate is linked to the chamber so as to maintain close contact with the lower seal roll. Which cooperate with the third seal plate and the fourth seal plate, the seal plate housing is provided to seal the gap formed between the third seal plate and the chamber during forward movement of the third seal plate In addition,
The third and fourth seal plates and the seal plate housing are provided to be movable left and right so as to correspond to a change in the width of the steel plate through a fourth driving source, and the third seal plate is interposed between the first seal plates. The steel plate threading device according to claim 4, wherein the steel plate passing device is provided so as to be movable back and forth and left and right through a guide unit to be connected. While being cooperative to said sealing plate housing, wherein to seal correspondingly the formed steel sheet passage opening into the chamber width change of the steel sheet, tele a number of sealing plates are provided to be in inflated or superimposed folded The steel plate threading device according to claim 6, further comprising a scope seal unit. The fourth drive source is fastened to the fastening blocks provided in the fourth seal plate and the seal plate housing, is connected to the motor fixed to the chamber side, opposite direction of the screw the center base is formed The steel plate passing plate device according to claim 6, wherein the third and fourth seal plates provided in a two-stage screw bar and combined in a pair are configured to be separated or approached in response to a change in the width of the steel plate. The steel plate threading plate apparatus of the steel plate seal type according to any one of the first to eighth items, which is disposed in a viscous flow region between the external atmospheric pressure and the differential pressure space,
A steel plate masking type steel plate passage device disposed in at least the molecular transition region of the molecular transition region and the vacuum region between the differential pressure space and the vacuum space;
A steel sheet surface treatment unit disposed in a vacuum region;
Including
The steel sheet masking type steel sheet passing device is:
A seal casing steel plate passes through the inside, placed through said chamber,
A steel plate masking unit provided to mask the gap between the steel plate and the casing while accommodating the width change of the steel plate on at least one side of the seal casing,
The including, steel surface treatment apparatus. Said seal casing, a steel sheet passage opening is formed on the inside, through said chamber is provided as a box body to be attached,
The steel plate surface according to claim 9, wherein the steel plate masking unit is provided as a masking plate that is rotatably installed between the steel plate and the seal casing through a fifth drive source in response to a change in the width of the steel plate. Processing equipment. The steel plate surface treatment apparatus according to claim 9 , wherein the steel plate surface treatment unit includes at least a steel plate coating portion among a steel plate etching portion, a steel plate coating portion, and a steel plate cooling portion. The steel plate is passed while being sealed in the viscous flow region between the external atmospheric pressure and the differential pressure space, and the steel plate is passed through while masking the steel plate in the molecular transition region between the differential pressure space and the vacuum space. A steel plate passing stage,
A surface treatment stage of a steel plate for surface-treating the steel plate to be passed in a vacuum region;
Including
In the step of passing the steel plate while being sealed in an enclosed state, the steel plate is used to seal the steel plate while using the steel plate sealing type steel plate passing device according to any one of the first to eighth aspects. A steel plate surface treatment method using the steel plate masking type steel plate passing device according to the ninth or eleventh item in the stage of performing.

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