JPS6228869U - - Google Patents
Info
- Publication number
- JPS6228869U JPS6228869U JP11898485U JP11898485U JPS6228869U JP S6228869 U JPS6228869 U JP S6228869U JP 11898485 U JP11898485 U JP 11898485U JP 11898485 U JP11898485 U JP 11898485U JP S6228869 U JPS6228869 U JP S6228869U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- sealing
- opposing parts
- side edges
- processing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第1図ないし第3図はこの考案の一実施例を表
し、第1図に要部の断面図、第2図は第1図の
―線に沿う断面図、第3図は第2図の―線
に沿う断面図、第4図はこの考案のシール装置に
備わるシール板の他の構成例の端面図、第5図は
真空蒸着設備の概略構成図、第6図は従来のシー
ル装置の要部の断面図である。
101……鋼帯(板帯)、104,104′…
…シールロール、106,106′……シール板
、107,107′……移動装置(調整手段)。
Figures 1 to 3 show one embodiment of this invention, with Figure 1 being a sectional view of the main parts, Figure 2 being a sectional view taken along line - in Figure 1, and Figure 3 being a sectional view of Figure 2. 4 is an end view of another configuration example of the seal plate provided in the sealing device of this invention, FIG. 5 is a schematic configuration diagram of the vacuum evaporation equipment, and FIG. 6 is a diagram of the conventional sealing device. FIG. 3 is a cross-sectional view of main parts. 101... Steel strip (plate strip), 104, 104'...
... Seal roll, 106, 106'... Seal plate, 107, 107'... Moving device (adjusting means).
Claims (1)
の真空室と、その真空室の外部との間を連続的に
移動する板帯の移動路中に備えられて、板帯の連
続的な移動を許容しつつその移動路をシールする
連続真空処理設備のシール装置において、板帯の
移動路中に備えられて上下の対向部間に板帯を通
す上下一対のシールロールと、このシールロール
の対向部間において板帯の両側縁と対向する位置
に備えられ、シールロールの対向部間の間隙より
も小さな厚みを有しかつシールロールの軸方向に
移動調整可能なシール板と、シールロールの対向
部間における板帯の両側縁とシール板の先端との
対向間隔を一定とするように板帯の両側縁の位置
に応じてシール板の位置を調整する調整手段とを
具備してなることを特徴とする連続真空処理設備
のシール装置。 Continuous movement of the plate provided in the movement path of the plate that continuously moves between the vacuum chamber of continuous vacuum processing equipment that continuously vacuum-processes the plate and the outside of the vacuum chamber A sealing device for continuous vacuum processing equipment that seals the movement path while allowing the movement of the plate strip includes a pair of upper and lower seal rolls that are provided in the movement path of the plate strip and pass the plate strip between the upper and lower opposing parts, and A sealing plate is provided at a position facing both side edges of the plate band between the opposing parts, has a thickness smaller than the gap between the opposing parts of the sealing roll, and is movable and adjustable in the axial direction of the sealing roll. and an adjusting means for adjusting the position of the sealing plate according to the position of both side edges of the plate band so as to maintain a constant facing interval between both side edges of the plate band and the tip of the sealing plate between the opposing parts. A sealing device for continuous vacuum processing equipment featuring:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11898485U JPS6228869U (en) | 1985-08-02 | 1985-08-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11898485U JPS6228869U (en) | 1985-08-02 | 1985-08-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6228869U true JPS6228869U (en) | 1987-02-21 |
Family
ID=31005944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11898485U Pending JPS6228869U (en) | 1985-08-02 | 1985-08-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6228869U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013515596A (en) * | 2009-12-24 | 2013-05-09 | ポスコ | Steel plate passing device, steel plate surface treatment apparatus including the same, and steel plate surface treatment method |
-
1985
- 1985-08-02 JP JP11898485U patent/JPS6228869U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013515596A (en) * | 2009-12-24 | 2013-05-09 | ポスコ | Steel plate passing device, steel plate surface treatment apparatus including the same, and steel plate surface treatment method |
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