JPH02301563A - Sealing roll device - Google Patents

Abstract

PURPOSE:To hold the negative pressure in a vacuum chamber with high precision by forming the housings which can be moved to the directions for pinching or releasing a plate and forming the bearings of the end parts of the respective sealing rolls to the insides of the housings and connecting the housings via the expansion cylinders with each other. CONSTITUTION:The axes 9a1, 9b1, of the sealing rolls 9a, 9b are supported to the housings 21a, 21b via a bearing 12 and freely slidingly engaged with a housing presser 26. Furthermore the housings 21a, 21b are formed so that these can be moved to the approaching or separating directions by expansion of a cylinder 27. On the other hand, the housing 21b is supported to a casing 11 via the supporting bolts 25 and the roll 9b can be moved to the directions y1-y2 shown in the arrows by the bolts 25. The roll 9a can be moved to the directions x1-x2 shown in the arrows by expansion of the cylinder 27. The interval between the rolls 9a, 9b can be arbitrarily regulated by conforming it with the thickness of a plate 1. Therefore the gap between the rolls 9a, 9b can be regulated to the necessary lower limit. The degree of vacuum of a vacuum chamber and a preliminary vacuum chamber are highly held.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a sealing roll device used when feeding plate-shaped materials such as steel plates and plastic sheets into a vacuum chamber to perform vacuum deposition, plasma treatment, etc. In particular, it is possible to prevent the airtightness of the vacuum chamber, etc. from deteriorating as much as possible when feeding the plate-shaped material into the vacuum chamber or pre-vacuum chamber, and when sending it out from the vacuum chamber or pre-vacuum chamber. This invention relates to a sealing roll device.

In the following description, a case in which a steel plate is subjected to vacuum deposition plating treatment will be described as an example, but the scope of application of the sealing roll device according to the present invention should not be interpreted as being limited to this.

[Prior Art] FIG. 4 is a schematic explanatory diagram showing the main parts of a typical vacuum evaporation plating processing apparatus. Steel plate 1 uncoiled from uncoiler 2
are introduced into the vacuum chamber 4 through five fixedly installed preliminary vacuum chambers 5, and Zn, A1. Cu
, or a mixed vapor thereof is formed into an alloy plated metal, which passes through a preliminary vacuum chamber 5 on the downstream side and is wound around the recoiler 3. The inside of the vacuum chamber 4 is 10" by the vacuum pump 6a.
The plurality of preliminary vacuum chambers 5 are provided to maintain a high vacuum by insulating the inside of the vacuum chamber 4 from the outside air.

Each preliminary vacuum chamber 5 and vacuum chamber 4 are configured to maintain airtightness between them by a sealing roll device 9 provided along the transfer path of the steel plate 1. Each sealing roll device 9 has a pair of opposing sealing rolls 9a and 9b.
The steel plate 1 is designed to pass between the seal rolls 9a and 9b in an airtight manner, that is, while preventing gas leakage as much as possible.

FIG. 5 is a sectional view showing a typical example of the sealing roll device 9, showing a sealing roll 9a.

Each shaft 9a, 9b of 9b is supported by the casing 11 via a bearing 12, and the shafts 9a, 9b and the casing 1
For the purpose of maintaining airtightness, seal members 13 and 13 around the shaft are respectively disposed between the shafts 1 and 1.

Further, a seal ripple 14.14 is provided between the circumferential surface of the seal rolls 9a, 9b and the casing 11, and the seal ripple 14.14 is fixed to the casing 11, and -i contacts the seal rolls 9a, 9b. The line is configured such that no gap is formed between the casing 11 and the seal rolls 9a, 9b.

[Problems to be Solved by the Invention] The seal rolls 9a and 9b shown in FIG.
Since the seal rolls 9a and 9b are only rotatably supported, the gap between the seal rolls 9a and 9b is always constant, and the gap is generally determined by assuming the maximum thickness of the steel plate 1 to be plated. ing. However, there are few opportunities to use the steel plate 1 with the maximum thickness, and therefore, in many cases, a gap C1 remains formed between the upper surface of the steel plate 1 and the circumferential surface of the seal roll 98, and furthermore, the gap C1 remains between the upper surface of the steel plate 1 and the circumferential surface of the seal roll 98. The gap C4 formed at the side of the steel plate 1, the gap 02 formed at the side of the steel plate 1, etc. are also left in a large open state.

Further, the seal ripple 14 is the seal roll 9a.

9b will wear out in a short period of time due to sliding friction, and a gap C between the seal ripple 14 and each seal roll 9a, 9b.
5 may occur.

If these gaps C1 to C4 become too large, a large amount of gas leaks from the sealing roll device 9, and the vacuum pumps 6a, 6b communicating with the vacuum chamber 4 and the preliminary vacuum chamber 5
In addition, the vacuum pumps 6a and 6b had to be operated almost continuously, which resulted in the inconvenience of increasing both equipment costs and operating costs.

Therefore, the present inventor has completed the present invention as a result of repeated research aimed at reducing the above-mentioned gaps in the sealing roll device as much as possible.

[Means for Solving the Problems] The present invention has achieved the above-mentioned object, and the bearing of each seal roll end is formed in a housing movable in the direction of pinching or releasing the plate material, and The gist of this is that housings located on the same side as viewed in the longitudinal direction of the seal roll are connected to each other via a telescopic cylinder.゛[Operations and Examples] Fig. 1 is a partially cutaway front view showing a typical embodiment of the present invention, and Fig. 2 is a side view seen from the direction of arrow 1r in Fig. 1. The sealing roll device has a casing 11 as its main component, and sealing rolls 9a and 9b are housed inside the casing 11.
The seal roll 9a.

The shafts 9a, 9b of 9b are configured to protrude from the casing 11. That is, in the casing 11, the above @9a
Plate 24 with a rectangular hole penetrating through 1 and 9bl
are fixed, and a housing presser 26 is attached to the side of the hole to face each other, and the other shafts 9al and 9b+ are rotatably supported by the housings 21a and 21b via bearings 12 and 12, respectively. Moreover, the housings 21a, 21
A retaining groove 21A is formed on both sides of b, and is slidably engaged with the housing presser 26. Furthermore, a cylinder 27 (hydraulic type or pneumatic type) is installed between the housings 21a and 21b so as to span the frame, and the housing 21a is expanded and contracted by the cylinder 27.

21b moves toward or away from [! It is configured so that it can be used. On the other hand, the housing 21b is connected to the casing via the support bolt 25! 1, and depending on the screwing amount of the support bolt 25, the arrow '/ry2 of the housing 21b
It is configured so that the directional position can be adjusted.

The seal roll 9b connected to the housing 21b with the above configuration is connected to the arrow y+Y2 by the support bolt 25.
A seal roll 9a that can move in the direction (direction perpendicular to the front and back surfaces of the plate material 1) and is connected to the housing 21a.
The seal roll 9a can be moved in the directions of arrows X and -x2 by the expansion and contraction of the cylinder 27, and the seal roll 9a can be moved in the directions of arrows X and -x2 according to the thickness of the plate material 1.

The interval between 9b can be adjusted arbitrarily. It goes without saying that the above-mentioned interval can be set according to the traveling center of the sharpening plate material 1. As a result, the gap between the seal rolls 9a and 9b can be kept to the minimum necessary, so the vacuum in the vacuum chamber 4 or the preliminary vacuum chamber 5 can be maintained at a high level.

Note that the side surfaces of the seal rolls 9a and 9b and the housing 21a
, 21b is provided with a thrust bearing 40° sealing member 13, and a side plate 22 that can freely move toward and away from the shaft 9a, 21b in the axial direction via an expansion spring 23, 23 is provided.
, 9b, and the seal roll 9a.

It is configured to prevent gas leakage at the side surface of 9b. Furthermore, the seal from the atmosphere side is an O
Two O-rings 38 attached to the ring 38 and the spring retainer 39. This is done by the seal members 13 of the seal rolls 9a, 9b.

Moreover, FIG. 3 is a cross-sectional view taken along the line m-III in FIG. 1, and shows the structure of the seal ripple 14 portion. Casing 1
A guide 32 is fixedly installed on the inside (upper part of the figure) of the holder 1, and a holder 37 is provided protrudingly provided on the outside. The guide 32 is provided along the longitudinal direction of the seal roll 9b, and inside thereof is a ripple retaining ring 31 that is slidable in the arrow Zl-Z-2 direction (direction toward/against the seal roll 9b). A seal ripple 14 is attached to the ripple retaining ring 31. Further, an adjustment bolt 34 is screwed into the holder 37, and at its tip! A spring receiver 35 is attached to the shaft 33, and an expansion spring 36 is disposed between the spring receiver 35 and the ripple retaining ring 31. The shaft 33 and other members are provided at two or more locations in the longitudinal direction of the ripple retaining ring 31, and by urging the seal ripple 14 toward the seal roll 9b by the expansion spring 36, the seal ripple 14 is prevented from being worn out. can continue to be in contact with the circumferential surface of the seal roll 9b at all times, and gas leakage from between the seal roll 9b and the seal ripple 14 can be completely prevented. The adjustment bolt 34 is used to adjust the contact pressure of the seal ripple 14 against the seal roll 9b when the seal roll 9b is moved upward or downward or when the seal ripple 14 is worn out.

The seal ripple 14 having the above structure can be similarly provided to the seal roll 9a.

[Effects of the Invention] Since the present invention is configured as described above, the gap in the sealing roll device can be made as small as possible, and the negative pressure in the vacuum chamber and the preliminary vacuum chamber can be maintained with high precision. This has made it possible to downsize vacuum pumps and reduce equipment and operating costs.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway front view showing a typical embodiment of the present invention, FIG. 2 is a side view seen from direction 11 in FIG. 1, and FIG. 3 is a cross-sectional view taken along the line III--III in FIG. 4 is a schematic explanatory diagram showing an example of a vacuum evaporation plating processing apparatus, and FIG. 5 is a cross-sectional explanatory diagram showing an example of a conventional seal roll apparatus. 1... Plate material 2... Uncoiler 3...
Recoiler 4...Vacuum chamber 5...Preliminary vacuum chamber
6a, fib...Vacuum pump 8...Crucible 9...Sealing roll device

Claims (1)

[Scope of Claims] A sealing roll device configured to feed a plate material between facing seal rolls and pass the plate material while keeping the front and rear sides of the plate material airtight in the traveling direction, the sealing roll device comprising: both ends of each of the seal rolls; Each pair of bearings are formed in each pair of housings movable in the direction of compressing or releasing the plate material, and the housings located on the same side when viewed in the longitudinal direction of the seal roll are telescopic cylinders. A sealing roll device characterized by being connected via.