JPH0672301B2 - Differential pressure seal device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) Elongated thin strips such as cold-rolled or hot-rolled steel strips are continuously fed while vacuum vapor deposition, ion plating, sputtering. When applying a surface coating by a so-called dry plating method such as, a plurality of space regions having a pressure difference between each other (hereinafter referred to as a differential pressure chamber) sequentially increase the degree of vacuum until reaching the dry plating region,
Then, the air-to-air method is used, which lowers the pressure difference between the differential pressure chambers while maintaining the pressure difference between the differential pressure chambers. An object of the present invention is to propose a differential pressure seal device which requires a pressure seal and can appropriately realize an appropriate differential pressure seal.

(Prior Art) A number of proposals can be seen regarding the air-to-air method, for example, US Pat. Nos. 2384500 and 2972330.
No., 2996410 specification, Mitsubishi Heavy Industries Technical Report Vol.21
(1984) No. 6, p1 to 7, etc., are being put to practical use in combination with recent advances in precision machining technology. Among these sealing methods, in the last cited reference, the long material is placed between a pair of rolls with their axes slightly offset in the direction of the strip, and the long material is placed along the circumference of each roll. Increasing the area has also been recently implemented in JP-A-62-62.
In Japanese Patent No. 13572, there is proposed an attempt to maintain a differential pressure inside the enclosure by combining a pair of threading rolls with a seal bar and an adapter that enclose the long material. In addition, since the long material is sandwiched between the pair of rolls and is passed through the plate, the object to be processed is subjected to bending stress and compressive stress on its front and back surfaces, and is also subjected to a large tension.

It has been found that such a tension or local action of surface pressure adversely affects the quality of the product and causes deterioration of magnetic properties when the air-to-air method is applied to, for example, a grain-oriented silicon steel sheet. .

In addition to such a problem, it was pointed out that plate cracking due to vibration during passing of the plate is likely to occur.

(Problems to be solved by the invention) Achieving an effective differential pressure seal without complacent that causes deterioration of product quality and plate cracking, etc. by adapting to treatment of long thin strips by air-to-air method. It is an object of the present invention to propose a differential pressure sealing device which can be.

(Means for Solving the Problems) The present invention provides a differential pressure seal for inducing continuous passage of a long ribbon while maintaining the pressure difference between the space regions having the pressure difference. Equipped with a single guide roll that controls the winding of long strips at the boundary between them,
This guide roll has a concave arc-shaped sealing surface that surrounds the outer periphery of the guide roll for almost half the circumference and forms a very small gap only on the outer peripheral surface of the guide roll except for the winding area of the long strip and the long length. A sealing attachment having a second concave arc-shaped sealing surface that directly forms extremely small gaps on the back surface and both side edges of the long thin strip in the winding area of the thin strip, and the sealing is provided. The attachment is opened on the second concave arc-shaped sealing surface with a width slightly larger than the cross-sectional dimension of the long ribbon but narrower than the roll width of the guide roll, and the long ribbon wound around the guide roll. An elongate passage that guides the space to a space area with a pressure difference,
A differential pressure sealing device characterized in that the single guide roll comprises a hollow roll having a large number of small holes on the outer peripheral surface of the roll, and the inside of the hollow roll has an inner periphery of the hollow roll. It is desirable to have a cylindrical member that has a suction port facing to and that suctions and adheres the long thin strip in the winding area to the outer peripheral surface of the roll.

FIG. 1 shows an example in which the differential pressure sealing device according to the present invention is applied, in which 1 is a long thin strip, 2 is a guide roll, and 3 is a guide roll.
Is a sealing attachment, 4 is a first differential pressure chamber, 5 is a second differential pressure chamber, and 6 is a third differential pressure chamber, while maintaining the pressure difference between the space regions having the pressure difference. The vacuum degree of the long thin strip 1 is increased from the atmospheric pressure p ₀ to the pressure p in the order of the subscripts. Here, between the spatial regions of p ₀ −p ₁ where the differential pressure value is the highest, The case of using the differential pressure seal device will be described first.

The guide roll 2 is supported by the inlet side of the differential pressure chamber casing 7 corresponding to the boundary between the regions, and the long thin strip 1 is provided on the outer circumference of the guide roll 2 at a preset winding contact angle θ. Then, I roll it up.

The sealing attachment 3 surrounds the outer circumference of the guide roll 2 for almost half the circumference, and forms a very small gap δ ₁ only on the outer peripheral surface of the guide roll 2 except for the winding area of the long thin strip 1. The arcuate sealing surface s ₁ and the second concave circle that directly forms very small gaps δ ₂ and δ ₃ , δ ₃ ′ on the back surface and both side edges of the long thin strip 1 in the winding area. Arc-shaped sealing surface s ₂ and second concave arc-shaped sealing surface s ₂
At a width slightly larger than the cross-sectional dimension of the long thin strip 1 but narrower than the roll width of the guide roll 2, the long thin strip 1 wound around the guide roll 2 is moved to a space region having a pressure difference. It has an elongated passage t for guiding. The appearance is second
The concave arc-shaped sealing surfaces s ₁ and s ₂ facing the guide roll 2 are illustrated in FIG. 2 (a) for easy understanding, respectively.

2 (a) and 2 (b) above show an example of the sealing attachment 3 having an integral structure, but it may have a divided structure as long as it can reliably seal the joint portion of each component. I don't care.

In the example shown in FIG. 1, the differential pressure between the differential pressure chambers 4,5 and 5 and 6 (p _{1
-P 2), (p 2 -p} 3) is partly much smaller that than the above-mentioned (p ₀ -p _1), the roll by the roll pair 8,9 which has shifted the axis in the sheet passing direction The case where a seal is used is shown.

Further, in FIG. 3, a single guide roll 2 of the differential pressure seal device according to the present invention is shown in FIG.
As a hollow roll having the above, a preferred example is shown in which a fixed columnar member 10 having a plurality of suction ports 10a is incorporated inside the hollow roll. The suction port 10a of the columnar member 10 communicates with the suction port 11a provided in the fixed support shaft 11 that holds the member 10, and the passage of the long thin strip 1 by the operation of a vacuum pump (not shown). In the structure, the ribbon 1 is sucked and adhered to the outer surface of the roll 2 in the winding area.

(Operation) The long thin strip 1 is advanced under a particularly high differential pressure from the atmospheric pressure p ₀ to the pressure p ₁ in the first differential pressure chamber 4, and at this time, the concave arc-shaped sealing surfaces s ₁ and s ₂ Very small gaps δ ₁ , δ at
Not only is an effective differential pressure seal fulfilled because only ₂ δ ₃ and δ ₃ ′ are bent, the long ribbon 1 is wound on a single guide roll 2. Therefore, it does not receive strong surface pressure.

Here, when the long thin strip 1 is wound around the guide roll 2 and passed through, the product quality may vary depending on the winding contact angle θ and the tension of the thin strip 1 simply by rolling. Therefore, it is desirable to set the wrapping contact angle θ in the range of 15 ° to 120 ° and the tension in the range of 0.1 to 2.0 kg / mm ² .

Hereinafter, the reason will be described based on an experimental example in which a TiN film (thickness 0.8 μm) is formed on a silicon steel sheet manufactured under the following conditions by ion plating treatment using the above apparatus. .

The silicon steel sheet used in the experiment is a silicon steel slab having the composition shown in Table-1, heated at 1340 ° C for 4 hours, hot-rolled to a hot rolled sheet with a thickness of 2.0 mm, and then at 950 ° C. The final cold-rolled sheet with a thickness of 0.23 mm is cold-rolled twice with intermediate annealing for 3 minutes, and then decarburized primary recrystallization annealing is performed in wet hydrogen at 830 ° C. MgO (35%), Al ₂ O on top
Annealing agent consisting of ₃ (60%), TiO ₂ (4%) and SrSO ₄ (1%) was applied as a slurry, followed by secondary recrystallization annealing at 850 ° C for 5 hours and then drying at 1180 ° C for 8 hours. The alloy was annealed in hydrogen, then the oxides on the surface of the steel sheet were removed by pickling, and then electrolytic polishing was performed to finish the center line average roughness Ra: 0.1 μm.

FIG. 4 is a graph in which the influence on the magnetic characteristics when the winding contact angle θ and the tension are variously changed is investigated.
Good magnetic properties are obtained when the winding contact angle θ of the guide roll 2 is 15 ° or more, preferably 60 ° or more and the tension is 0.1 to 2.0 kg / mm ² , preferably 0.2 to 0.5 kg / mm ^2. It is clear to show. On the contrary, when the winding contact angle θ is small and the tension of the steel sheet is less than 0.1 kg / mm ² , the vibration of the steel sheet when it is introduced into the differential pressure chamber deteriorates the magnetic properties and causes the cracking of the sheet. Also, the magnetic properties deteriorated when the tension exceeded 2.0 kg / mm ² .

When the wrapping contact angle θ exceeds 120 °, for example, as apparent from FIG. 1, the sealing lengths of the upper and lower sealing attachments 3 and the rolls are different, and the magnitude of the air flow through the gap is asymmetric. Therefore, it is desirable to set it within 120 ° because plate cracking due to the fluttering of the steel plate becomes more severe.

The preferable ranges of the contact angle θ and the tension of the long thin strip 1 are as described above. However, when the set values are near the lower limit of the above range, the thin strip 1 also vibrates when it is threaded. I'm happy. In such a case, as shown in FIG. 3 above, it can be advantageously prevented by suction-adhering the long thin strip 1 to the outer peripheral surface of the roll in the winding area of the guide roll 2.

The size of the small holes 10a provided on the outer peripheral surface of the guide roll 2 is preferably about 0.1φ to 2.0φmm, and the columnar member 10 is provided with a suction force for suction-adhering the long thin strip 1 to the outer surface of the roll. It depends on the difference between the diameter (a) of the suction port 10a and the gap (b) (see FIG. 3) formed between the inner peripheral surface of the guide roll 2 and the columnar member 10, but (a)>>
If set as in (b), the air sucked from the holes other than the winding area can be ignored. Further, it is more preferable to provide the seal member 12 on the surface of the columnar member 10 in order to surely suck the long thin strip 1 in the winding region of the guide roll 2.

Regarding δ ₂ and δ ₁ shown in FIG. ₁ , even if it becomes excessive when the length of the long thin ribbon changes, there is some allowance, but in such a case, airtightness is obtained. However, it is also possible to install an auxiliary plate that is movable in the roll axis direction so that even if there is a change in the width of the ribbon, a minute gap can always be created.

A case of quality deterioration of a long thin strip, which was narrowed by a roll seal with a pair of rolls, was taken as a center line average by electrolytic polishing after finishing annealing of a unidirectional silicon steel sheet and removing its surface oxide. Roughness Ra: Deterioration of iron loss depending on surface pressure due to roll seal when mirror finished to 0.1 μm No. 5
As shown in the figure, the increase in surface pressure, especially 100kg / cm
^When it exceeds ² , on the contrary to the remarkable deterioration of the iron loss, according to the present invention, the single guide roll without the joy that generates such a surface pressure, by devising the sealing attachment as described above, A reliable differential pressure seal is achieved.

The differential pressure seal device of the present invention is, as described above, subjected to oxide removal after finish annealing applied to a unidirectional silicon steel sheet, or further, to a mirror finish of Ra ≦ 0.4 μm, by dry plating to obtain Ti, Zr. , V, Nb, Ta, Cr, Mo, Co, Ni, Mn, Al, B
And Si nitrides and / or carbides and Al, Ni, Cu, W, S
Advantageous iron loss reduction of unidirectional silicon steel sheet by forming a tension film by mixing at least one of oxides of i and Zn with the mixed phase with base iron (JP-A-62-1820). 62-18
22), it is extremely useful when
In particular, by applying this dry plating at a high temperature of 1000 ° C to 1100 ° C, it is possible to effectively use the elastic tension on both sides of the steel sheet to make the ultra-iron loss advantageous (see JP-A-62-30302). Of course, it can also be applied.

(Example) In FIG. 6, by repeating the differential pressure seal described in FIG. 1 twice, a high differential pressure from p ₀ to p ₁ and from p ₁ to p ₂ can be achieved more advantageously. Figure 7 shows an example of how to obtain
By arranging the two sets of the differential pressure seal device according to the present invention so that the guide rolls 2 and 2 ″ closely face each other (however, the pressure is not narrowed by both rolls), the sealing effect can be obtained by repeating the differential pressure seal described above twice. Here is an example in which

Furthermore, referring to FIG. 8, two sets of differential pressure seal devices are
The case where the guide rolls 2 and 2 ″ are spaced apart from each other and a slit 15 is inserted between them to repeat the differential pressure seal twice to enhance the sealing effect is shown.

In any of the above cases, by setting the minute gap to about 0.01 to 0.5 mm, the differential pressure sealing device of the present invention has, for example, a width 300 to 1200 mm of a long thin strip and a thickness of 0.1 to 1.2 mm,
At the magnification to the pressure of the lower differential pressure chamber adjacent to it, 1.
It was possible to maintain a differential pressure of about 5 to 20 times.

In order to finely adjust the minute gap in the above range, for example, the sealing attachment 3 may be moved in whole or a part thereof, in particular, a portion facing the winding area of the long thin strip may be moved up and down. Displace appropriately,
The guide roll 2 may be displaced so as to approach or separate from the sealing surface of the sealing attachment 3.

Further, in FIG. 9, an end face adjacent to the journal of the guide roll 2 is covered and a differential pressure seal is additionally provided there as well.
An example of improving the differential pressure seal on the side of the device,
Further, in FIG. 10 and FIG. 11, a step or a recess is provided on the end surface adjacent to the journal of the guide roll 2, and a sealing attachment 3 having a shape along the step or the recess is incorporated, and also there is a difference. Additional pressure sealing,
An example in which the differential pressure seal on the side surface of the device is further improved is shown below. In the example shown in FIG. 10, the differential pressure chamber 4,
The differential pressure (P ₂ −P ₃ ) between 5 and 5 and 6 is much smaller than (P ₀ −P ₁ ), so that the axis is the same as that shown in FIG. The figure shows the case where a roll seal composed of offset roll pairs 8 and 9 is used (however, the pressure is not narrowed by each roll).

Further, FIG. 12 shows an example in which a high differential pressure from P ₀ to P ₅ can be more advantageously achieved by repeating the differential pressure seal shown in FIG. 10 above 6 times.

Next, applying PVD equipment incorporating the differential pressure sealing device shown in Fig. 1, ion plating treatment was applied to the silicon steel sheet to form a TiN (0.8 µm) coating, and the magnetic properties of the obtained product The characteristics were investigated.

The results are shown in Table 2 together with the respective conditions during striping.

In addition, the silicon steel sheet has a thickness obtained by heating a silicon steel slab having the composition shown in Table 3 at 1440 ° C. for 3 hours and hot rolling.
1.8mm hot rolled sheet, then cold rolled twice with 1050 ° C intermediate annealing sandwiched to give a final cold rolled sheet with a thickness of 0.23mm, and then decarburized and annealed in 850 ° C wet hydrogen. After applying, an annealing separating agent of MgO (35%) and Al ₂ O ₃ (65%) is applied to the surface of the steel sheet by slurry, and then the temperature is raised from 850 to 1050 ° C at 15 ° C / hr to perform secondary recrystallization. After that, it was subjected to a blunting treatment in dry hydrogen at 1200 ° C. for 8 hours. After removing the oxide on the surface of the steel sheet by pickling, the center line average roughness _Ra : 0.1 by electrolytic polishing.
The one finished to μm was used.

(Effects of the Invention) The differential pressure seal device of the present invention achieves a high differential pressure seal without using a single guide roll together with an attachment and producing a local surface pressure on a long strip. It is possible to eliminate the discomfort that the quality of the steel deteriorates due to the effect of surface pressure, and it is possible to advantageously prevent the vibration of the object to be processed during the passing of the plate. It is needless to say that not only is it suitable for use when forming a film, but it can also be applied to mild steel, etc., where local surface pressure tends to affect product quality.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing the structure of a differential pressure sealing device according to the present invention, FIGS. 2 (a) and 2 (b) are external views of the main parts, and FIGS. b) and (c) are views showing the cross section and appearance of the main part, FIG. 4 is a graph showing the relationship between the winding contact angle θ of the roll and the tension, and FIG. 5 is the surface pressure and the iron of the unidirectional silicon steel sheet. FIG. 6 is a correlation graph of the degree of loss and deterioration, FIG. 6 to FIG. 8 are schematic diagrams showing an embodiment of the present invention, FIG. 9 is an exploded perspective view of a main part of another example, and FIG. 10 to FIG. It is a schematic diagram which shows the other Example of invention. 1 ... Long ribbon, 2 ... Guide roll 2a ... Small hole, 3 ... Attachment 4,5,6 ... Differential pressure chamber, 7 ... Differential pressure casing 8,9 ... Roll, 10 ... Suction roll 10a ... Suction port, 11 ... stationary support shaft 11a ... suction port, 12 ... sealing member 13 ... bearing, 14 ... pulley s ₁ ... concave arcuate sealing surface s ₂ ... second recessed circular sealing surface t ... passage

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP 61-12867 (JP, A) JP 60-234964 (JP, A)

Claims (2)

[Claims] 1. A differential pressure seal device for inducing continuous passage of a long ribbon while maintaining the pressure difference between the space regions having a pressure difference. It is equipped with a single guide roll for guiding the winding of the thin ribbon, and the guide roll is surrounded by the outer circumference for almost half the circumference, and only the outer peripheral surface of the guide roll is excluded except for the winding region of the long ribbon. A concave arc-shaped sealing surface that forms a minute gap and a second concave that directly forms a very minute gap on the back surface of the long ribbon and both side edges thereof in the winding area of the long ribbon. A sealing attachment having an arc-shaped sealing surface is arranged, and the sealing attachment has a width on the second concave arc-shaped sealing surface that is slightly larger than the cross-sectional dimension of the long ribbon but narrower than the roll width of the guide roll. Open at Speak
A differential pressure sealing device comprising an elongated passage for guiding a long strip wound around a guide roll to a space region having a pressure difference. 2. A single guide roll comprises a hollow roll having a large number of small holes on the outer peripheral surface of the roll, and the hollow roll has a suction port facing the inner periphery of the hollow roll and is wound. The differential pressure sealing device according to claim 1, further comprising a columnar member for suction-adhering the long thin strip in the cliff region to the outer peripheral surface of the roll.