JP5595066B2 - Imaging device and imaging module - Google Patents

Imaging device and imaging module Download PDF

Info

Publication number
JP5595066B2
JP5595066B2 JP2010038950A JP2010038950A JP5595066B2 JP 5595066 B2 JP5595066 B2 JP 5595066B2 JP 2010038950 A JP2010038950 A JP 2010038950A JP 2010038950 A JP2010038950 A JP 2010038950A JP 5595066 B2 JP5595066 B2 JP 5595066B2
Authority
JP
Japan
Prior art keywords
wiring board
opening
imaging
recess
imaging device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010038950A
Other languages
Japanese (ja)
Other versions
JP2010252307A (en
Inventor
浩 山田
執蔵 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2010038950A priority Critical patent/JP5595066B2/en
Publication of JP2010252307A publication Critical patent/JP2010252307A/en
Application granted granted Critical
Publication of JP5595066B2 publication Critical patent/JP5595066B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Description

本発明は、CCD(Charge Coupled Device:電荷結合素子)型あるいはCMOS(Complementary Metal Oxide Semiconductor:相補型金属酸化膜半導体)型等の撮像素子を用いた撮像装置およびこの撮像装置を用いた撮像モジュールに関するものである。   The present invention relates to an imaging apparatus using an imaging element such as a CCD (Charge Coupled Device) type or a CMOS (Complementary Metal Oxide Semiconductor) type and an imaging module using the imaging apparatus. Is.

従来、CCD型、CMOS型等の撮像素子を配線基板に搭載した、デジタルカメラや光学センサ等に適用される撮像装置が知られている。このような撮像装置は、例えば、図5に断面図で示す例のような、配線基板11の凹部12の底面に搭載された撮像素子13の受光部13aに入力された光(画像)を撮像素子13によって電気信号に変換し、ボンディングワイヤ等の接続部材15および配線基板11の配線導体11cを介してデジタルカメラ内の外部回路等に出力するものである。そして、撮像装置は配線基板11上に取着されたガラス等の透明板材16によって撮像素子13が封止され、レンズ固定部材18によって撮像素子13の上にレンズ17が配置されることで撮像モジュールとなる。   2. Description of the Related Art Conventionally, an imaging apparatus that is applied to a digital camera, an optical sensor, or the like, in which an imaging element such as a CCD type or a CMOS type is mounted on a wiring board is known. Such an image pickup device picks up light (image) input to the light receiving portion 13a of the image pickup device 13 mounted on the bottom surface of the recess 12 of the wiring board 11 as shown in the cross-sectional view of FIG. It is converted into an electric signal by the element 13 and output to an external circuit or the like in the digital camera via the connection member 15 such as a bonding wire and the wiring conductor 11c of the wiring board 11. The imaging device is configured such that the imaging element 13 is sealed by a transparent plate material 16 such as glass attached on the wiring board 11, and the lens 17 is disposed on the imaging element 13 by the lens fixing member 18, whereby the imaging module It becomes.

このような撮像装置および撮像モジュールにおいては、撮像素子以外にも撮像素子からの電気信号を処理するICやコンデンサ、コイル、抵抗等の電子部品が複数搭載される場合がある。電子部品が搭載された撮像モジュールとしては、例えば、図6(a)に図5と同じく断面図で示す例のような、配線基板11の凹部12内の、撮像素子13が搭載された領域の周囲の底面に電子部品14を搭載したものや、図6(b)に同じく断面図で示す例のような、配線基板11の凹部12の周囲の上面に複数の電子部品14を搭載したものが知られている(例えば、特許文献1を参照。)。あるいは、図6(c)に同じく断面図で示す例のような、配線基板11の上面に撮像素子13を搭載し、配線基板11の下面に設けた凹部に複数の電子部品14を搭載したものが知られている(例えば、特許文献2を参照。)。   In such an imaging apparatus and imaging module, there are cases where a plurality of electronic components such as an IC, a capacitor, a coil, and a resistor for processing an electrical signal from the imaging element are mounted in addition to the imaging element. As an imaging module on which electronic components are mounted, for example, an area in which the imaging element 13 is mounted in the recess 12 of the wiring board 11 as shown in the cross-sectional view of FIG. There are those in which the electronic component 14 is mounted on the surrounding bottom surface, and those in which a plurality of electronic components 14 are mounted on the upper surface around the recess 12 of the wiring board 11 as in the example shown in the sectional view in FIG. It is known (see, for example, Patent Document 1). Alternatively, as in the example shown in the sectional view of FIG. 6C, the imaging element 13 is mounted on the upper surface of the wiring board 11, and a plurality of electronic components 14 are mounted in the recesses provided on the lower surface of the wiring board 11. Is known (see, for example, Patent Document 2).

特開平11−103039号公報JP 11-103039 A 特開平5−183135号公報JP-A-5-183135

しかしながら、携帯性が重視される携帯電話やデジタルカメラ等の電子機器に用いられる撮像装置では、より一層の小型化や薄型化が要求されている。これに対して、従来の、凹部の底面の撮像素子が搭載された領域の周囲や配線基板の凹部の周囲の上面に電子部品を搭載する撮像装置は、凹部内や凹部の周囲に電子部品を搭載する領域を設けるために配線基板の上面視での大きさが大きくなってしまうものであった。また、配線基板の下面に設けた凹部に電子部品を搭載する撮像装置は、電子部品の厚み分または電子部品を収納するための凹部を形成するために増加する配線基板の厚み分だけ撮像装置の厚みが厚くなってしまうものであった。また、撮像素子の下方に電子部品を搭載する場合は、撮像素子の下方の配線基板の厚みが厚くなるとともに外部回路基板との間に空間ができるので、撮像素子に発生する熱を配線基板を介して外部回路基板へ放熱しにくくなるため、熱ノイズによって出力される画像の画質が劣化してしまう場合があった。撮像装置の薄型化に伴い、撮像素子と電子部品との間における配線基板の厚みが薄くなると、電子部品に発生する熱による熱ノイズの影響もより発生しやすくなることが懸念される。このため、従来の撮像装置では小型・薄型で高画質とすることは困難であった。   However, an imaging apparatus used in an electronic device such as a mobile phone or a digital camera where portability is important is required to be further reduced in size and thickness. On the other hand, the conventional imaging device in which electronic components are mounted around the area where the imaging device on the bottom surface of the recess is mounted or on the top surface around the recess of the wiring board, In order to provide a mounting area, the size of the wiring board in a top view is increased. In addition, an image pickup apparatus in which an electronic component is mounted in a concave portion provided on the lower surface of the wiring board has an amount of the image pickup apparatus corresponding to the thickness of the wiring board that is increased to form the thickness of the electronic component or the concave portion for storing the electronic component. The thickness would be increased. In addition, when electronic components are mounted below the image sensor, the wiring board below the image sensor becomes thicker and a space is formed between the circuit board and the external circuit board. Therefore, it is difficult to dissipate heat to the external circuit board, and the image quality of the image output due to thermal noise may be deteriorated. When the thickness of the wiring board between the imaging element and the electronic component becomes thin as the imaging device becomes thinner, there is a concern that the influence of thermal noise due to heat generated in the electronic component is more likely to occur. For this reason, it has been difficult for a conventional imaging device to be small and thin and to have high image quality.

本発明は上記従来技術の問題点に鑑みて案出されたものであり、その目的は、撮像装置の小型化および薄型化の両立を図ることができるとともに、高画質の画像信号を出力することができる撮像装置および撮像モジュールを提供することにある。   The present invention has been devised in view of the above-described problems of the prior art, and an object of the present invention is to achieve both miniaturization and thinning of the imaging device and to output a high-quality image signal. It is an object to provide an imaging device and an imaging module that can perform the above.

本発明の撮像装置は、配線基板の上面に形成された凹部の底面に受光部を上にして撮像素子が搭載された撮像装置であって、前記凹部は、上面視で前記撮像素子の前記受光部を露出させる大きさで前記凹部の底面よりも小さい開口を有し、前記配線基板は、前記開口を有する上側配線基板の下面と前記凹部の前記底面を有する下側配線基板の上面とが接合
されてなり、前記上側配線基板の上面における前記開口の周辺であってレンズ固定部材を搭載する領域の外側に電子部品が搭載されており、前記電子部品は、上面透視において、前記上側配線基板と前記下側配線基板との接合領域と重なっていることを特徴とするものである。
The imaging device of the present invention is an imaging device in which an imaging device is mounted on a bottom surface of a concave portion formed on an upper surface of a wiring board with a light receiving portion facing upward, and the concave portion is configured to receive the light reception of the imaging device in a top view. The wiring board has a lower opening than the bottom surface of the recess, and the lower surface of the upper wiring board having the opening and the upper surface of the lower wiring substrate having the bottom surface of the recess are bonded to the wiring board.
Is made by the provided electronic part is mounted to a periphery of the opening in the upper surface of the upper wiring board outside the region for mounting the lens fixing member, wherein the electronic component is in top perspective, and the upper wiring board It overlaps with a joining area | region with the said lower side wiring board, It is characterized by the above-mentioned.

また、本発明の撮像装置は、上記構成において、前記凹部の前記開口を塞ぐように透明板材が取り付けられていることを特徴とするものである。   Moreover, the imaging device of the present invention is characterized in that, in the above configuration, a transparent plate material is attached so as to close the opening of the recess.

また、本発明の撮像装置は、上記構成において、前記上側配線基板および前記下側配線基板の接合面の少なくとも一方に平面視で前記開口を取り囲むように互いにかみ合う環状の段差または環状の凹凸が形成されていることを特徴とするものである。 The imaging apparatus of the present invention having the above structure, the previous SL upper wiring board and annular step or annular uneven interdigitated so as to surround the opening at least one in a plan view of the joint surface of the lower wiring board It is characterized by being formed.

本発明の撮像モジュールは、上記各構成の本発明の撮像装置の前記配線基板の前記開口の上方にレンズが配置されており、該レンズを固定している前記レンズ固定部材が前記配線基板の上面における前記開口と前記電子部品との間の領域に搭載されていることを特徴とするものである。 In the imaging module of the present invention, a lens is disposed above the opening of the wiring board of the imaging device of the present invention having the above-described configuration , and the lens fixing member that fixes the lens is an upper surface of the wiring board. It is mounted in a region between the opening and the electronic component .

本発明の撮像装置によれば、凹部は、上面視で撮像素子の受光部を露出させるとともに凹部の底面よりも小さい開口を有し、開口の周辺に電子部品が搭載されていることから、配線基板の外寸を大きくすることなく上面に設けられた搭載領域に電子部品が搭載されているので、小型・薄型の撮像装置となるとともに配線基板の下面から撮像素子の熱を放熱することができ、高画質の画像信号を出力することのできる撮像装置となる。   According to the imaging device of the present invention, the concave portion exposes the light receiving portion of the imaging element in a top view and has an opening smaller than the bottom surface of the concave portion, and the electronic component is mounted around the opening. Since electronic components are mounted in the mounting area provided on the upper surface without increasing the outer dimensions of the board, it is possible to dissipate heat from the image sensor from the lower surface of the wiring board as well as a small and thin imaging device. Therefore, the imaging apparatus can output a high-quality image signal.

また、本発明の撮像装置によれば、上記構成において、凹部の開口を塞ぐように透明板材が取り付けられているときには、凹部内に水分や塵が入り込んで撮像素子の受光部に付着することがないので、撮像素子を保護することができるとともに、受光を妨げることがなく高画質な画像信号を出力することが可能となる。   Further, according to the imaging apparatus of the present invention, in the above configuration, when a transparent plate is attached so as to close the opening of the recess, moisture or dust may enter the recess and adhere to the light receiving unit of the imaging element. Therefore, it is possible to protect the image sensor and to output a high-quality image signal without preventing light reception.

また、本発明の撮像装置によれば、上記構成において、配線基板が、開口を有する上側配線基板の下面と凹部の底面を有する下側配線基板の上面とが接合されてなり、上側配線基板および下側配線基板の接合面の少なくとも一方に平面視で開口を取り囲むように互いにかみ合う環状の段差または環状の凹凸が形成されているときには、互いにかみ合う環状の段差または環状の凹凸によって、上側配線基板と下側配線基板とが接合された接合部から凹部内へ光が侵入することを防ぐことができるので、不要な光が受光部に届くことを低減して、高画質な画像信号を出力することが可能となる。   According to the imaging device of the present invention, in the above configuration, the wiring board is formed by joining the lower surface of the upper wiring board having the opening and the upper surface of the lower wiring board having the bottom surface of the recess, When an annular step or an annular concavo-convex meshing with each other so as to surround the opening in a plan view is formed on at least one of the joint surfaces of the lower wiring substrate, Since light can be prevented from entering the recess from the joint where the lower wiring board is joined, unnecessary light can be prevented from reaching the light receiving part, and high-quality image signals can be output. Is possible.

本発明の撮像モジュールは、上記構成の撮像装置の配線基板の開口の上方にレンズが配置されていることから、小型・薄型で高画質な画像信号を出力することが可能な撮像モジュールとなる。   The imaging module of the present invention is an imaging module capable of outputting a small, thin and high-quality image signal because the lens is disposed above the opening of the wiring board of the imaging apparatus having the above configuration.

(a)は本発明の撮像装置の実施の形態の一例を示す平面図であり、(b)は(a)のA−A線における断面図である。(A) is a top view which shows an example of embodiment of the imaging device of this invention, (b) is sectional drawing in the AA of (a). (a)〜(c)は、それぞれ本発明の撮像モジュールの実施の形態の一例を示す断面図である。(A)-(c) is sectional drawing which shows an example of embodiment of the imaging module of this invention, respectively. (a)〜(c)は、それぞれ本発明の撮像装置の実施の形態の他の例を示す断面図である。(A)-(c) is sectional drawing which shows the other example of embodiment of the imaging device of this invention, respectively. (a)は図3(c)における上側配線基板の下面図であり、(b)は図3(c)における下側配線基板の上面図である。(A) is a bottom view of the upper wiring board in FIG. 3 (c), and (b) is a top view of the lower wiring board in FIG. 3 (c). 従来の撮像モジュールの一例を示す断面図である。It is sectional drawing which shows an example of the conventional imaging module. (a)〜(c)は、それぞれ従来の撮像モジュールの他の例を示す断面図である。(A)-(c) is sectional drawing which shows the other example of the conventional imaging module, respectively.

本発明の撮像装置について、添付の図面を参照しつつ説明する。図1(a)は本発明の撮像装置の実施の形態の一例を示す平面図であり、図1(b)は図1(a)のA−A線における断面図である。図2(a)〜図2(c)はそれぞれ本発明の撮像モジュールの実施の形態の一例を示す断面図である。これらの図において、1は配線基板、1aは上側配線基板、1bは下側配線基板、1cは配線導体、1dは凸部、1eは第2の凹部、2は凹部、2aは開口、3は撮像素子、3aは受光部、4は電子部品、5は接続部材、6は透明板材、7はレンズ、8はレンズ固定部材である。   The imaging apparatus of the present invention will be described with reference to the accompanying drawings. FIG. 1A is a plan view showing an example of an embodiment of an imaging apparatus of the present invention, and FIG. 1B is a cross-sectional view taken along the line AA in FIG. FIG. 2A to FIG. 2C are cross-sectional views showing examples of embodiments of the imaging module of the present invention. In these drawings, 1 is a wiring board, 1a is an upper wiring board, 1b is a lower wiring board, 1c is a wiring conductor, 1d is a convex part, 1e is a second concave part, 2 is a concave part, 2a is an opening, 3 is An imaging element, 3a is a light receiving portion, 4 is an electronic component, 5 is a connection member, 6 is a transparent plate, 7 is a lens, and 8 is a lens fixing member.

本発明の撮像装置は、図1に示す例のように、配線基板1の上面に形成された凹部2の底面に受光部3aを上にして撮像素子3が搭載された撮像装置であって、凹部2は、上面視で撮像素子3の受光部3aを露出させる大きさで凹部2の底面よりも小さい開口2aを有し、開口2aの周辺に電子部品4が搭載されている。   The image pickup apparatus of the present invention is an image pickup apparatus in which the image pickup element 3 is mounted on the bottom surface of the recess 2 formed on the upper surface of the wiring board 1 with the light receiving portion 3a facing up, as in the example shown in FIG. The concave portion 2 has an opening 2a that is large enough to expose the light receiving portion 3a of the image pickup device 3 in a top view and smaller than the bottom surface of the concave portion 2, and the electronic component 4 is mounted around the opening 2a.

図1に示す例では、撮像素子3は配線基板1の凹部2の底面に搭載され、凹部2の底面の配線導体1cと撮像素子3とはボンディングワイヤを接続部材5として電気的に接続されている。凹部2の開口2aが上面視で撮像素子3の受光部3aを露出させる大きさで凹部2の底面よりも小さいことから、配線基板1の上面で、上面視で凹部2の底面と重なる位置、すなわち、撮像素子3の周縁部や撮像素子3と配線基板1との接続領域と上面視で重なる位置に電子部品4を搭載することができる。このことから、従来の、凹部2内の接続領域の外側あるいは凹部2よりも外側に電子部品4を搭載する場合に比べて、配線基板1が電子部品4の搭載領域の分だけ大きくなることがないので、小型の撮像装置となる。図1に示す例では、電子部品4は、その全体が上面視で撮像素子3の周縁部や接続領域と重なる位置に搭載されているが、電子部品4の一部が上面視で凹部2の底面と重なるように搭載すれば、凹部2よりも外側に設ける電子部品4の搭載領域を小さくすることができる。撮像装置の大きさをより小さくするには、電子部品4をより内側に搭載するようにすればよい。   In the example shown in FIG. 1, the image sensor 3 is mounted on the bottom surface of the recess 2 of the wiring substrate 1, and the wiring conductor 1 c on the bottom surface of the recess 2 and the image sensor 3 are electrically connected using a bonding wire as a connection member 5. Yes. Since the opening 2a of the concave portion 2 is smaller than the bottom surface of the concave portion 2 so as to expose the light receiving portion 3a of the image pickup device 3 when viewed from above, the upper surface of the wiring substrate 1 overlaps the bottom surface of the concave portion 2 when viewed from above. That is, the electronic component 4 can be mounted at a position overlapping the peripheral edge of the image sensor 3 or the connection region between the image sensor 3 and the wiring board 1 in a top view. Therefore, compared to the conventional case where the electronic component 4 is mounted outside the connection region in the recess 2 or outside the recess 2, the wiring board 1 may be enlarged by the mounting region of the electronic component 4. Therefore, it becomes a small imaging device. In the example shown in FIG. 1, the electronic component 4 is entirely mounted at a position overlapping the peripheral edge and the connection region of the image pickup device 3 in a top view, but a part of the electronic component 4 is in the concave portion 2 in a top view. If it is mounted so as to overlap with the bottom surface, the mounting area of the electronic component 4 provided outside the recess 2 can be reduced. In order to further reduce the size of the imaging device, the electronic component 4 may be mounted on the inner side.

また、図2(b)に示す例のように、撮像装置の上にレンズ7を配置して撮像モジュールとする場合には、レンズ7を固定するレンズ固定部材8を配線基板1の上面の上面視で凹部2の底面と重なる位置に搭載し、電子部品4は配線基板1の上面の外縁部に搭載してもよい。この場合は、図1に示す撮像装置の配線基板1の上面の外縁部にレンズ固定部材8を搭載した、図2(a)に示す撮像モジュールの例とは、電子部品4を搭載する位置とレンズ固定部材8を搭載する位置とが入れ替わっただけであり、撮像装置および撮像モジュールは同様に小型である。すなわち、上面視で凹部2の底面と重ならない位置にも電子部品4を搭載してもよい。開口2aの周囲の上面視で凹部2の底面と重なる位置、すなわち、凹部2の上方に周囲から突出した部分は、厚みが薄く強度も低いので、図2(a)に示す例のように、配線基板1の上面の外縁部にレンズ固定部材8を搭載する方がこの部分に外部からの力が加わり難く、またレンズ固定部材8によって電子部品4を保護することができるので好ましい。   Further, as in the example shown in FIG. 2B, when the lens 7 is arranged on the imaging device to form an imaging module, the lens fixing member 8 that fixes the lens 7 is provided on the upper surface of the upper surface of the wiring board 1. The electronic component 4 may be mounted on the outer edge portion of the upper surface of the wiring board 1 by being mounted at a position overlapping the bottom surface of the concave portion 2 as viewed. In this case, the example of the imaging module shown in FIG. 2A in which the lens fixing member 8 is mounted on the outer edge portion of the upper surface of the wiring board 1 of the imaging device shown in FIG. 1 is the position where the electronic component 4 is mounted. Only the position where the lens fixing member 8 is mounted is changed, and the imaging device and the imaging module are similarly small. That is, you may mount the electronic component 4 also in the position which does not overlap with the bottom face of the recessed part 2 in top view. The position that overlaps the bottom surface of the recess 2 in the top view around the opening 2a, that is, the portion protruding from the periphery above the recess 2 is thin and low in strength, as in the example shown in FIG. It is preferable to mount the lens fixing member 8 on the outer edge of the upper surface of the wiring board 1 because it is difficult for external force to be applied to this portion and the electronic component 4 can be protected by the lens fixing member 8.

図2(c)に示す例のように、撮像素子3をフリップチップ接続する場合は、撮像素子3の周囲に接続領域を設けなくてよいので、さらに小型化できる。上記のような電子部品4の搭載位置による撮像装置の小型化は、撮像素子3と配線基板1とがワイヤボンディングによって接続される場合に、より効果的である。撮像素子3をフリップチップ接続する場合であっても、撮像素子3の上面にDSP(Digital Signal Processor:デジタル・シグナル・プロセッサ)のような受光部3a以外のものが形成されている場合には、開口2aの周囲の上面視で撮像素子3と重なる領域を大きくすることができるので、配線基板1の外寸を大きくすることなく電子部品4を搭載することができる領域が大きくなり、撮像装置をより小型化しやすくなる。なお、凹部2の上方に周囲から突出した部分の長さは、凹部2、撮像素子3および受光部3aの大きさによって設定するものであるが、例えばこの長さが1〜2mm程度あれば、配線基板1の外寸を変えることなしに0.6mm×0.3mm程度の大きさの電子部品4を多数搭載することができる。   When the image pickup device 3 is flip-chip connected as in the example shown in FIG. 2C, it is not necessary to provide a connection region around the image pickup device 3, so that the size can be further reduced. The downsizing of the imaging device depending on the mounting position of the electronic component 4 as described above is more effective when the imaging device 3 and the wiring board 1 are connected by wire bonding. Even when the image pickup device 3 is flip-chip connected, if a light receiving unit 3a such as a DSP (Digital Signal Processor) is formed on the upper surface of the image pickup device 3, Since the area overlapping the image pickup element 3 in the top view around the opening 2a can be increased, the area in which the electronic component 4 can be mounted without increasing the outer dimension of the wiring board 1 is increased. It becomes easier to miniaturize. The length of the portion protruding from the periphery above the concave portion 2 is set according to the size of the concave portion 2, the image sensor 3 and the light receiving portion 3a. For example, if this length is about 1 to 2 mm, Many electronic components 4 having a size of about 0.6 mm × 0.3 mm can be mounted without changing the outer dimensions of the wiring board 1.

また、従来の配線基板1の下面に電子部品4を搭載する場合に比べて、電子部品4を収納するための凹部2を形成するために増加する配線基板1の厚み分だけ撮像装置の厚みを薄くすることができる。配線基板1の上面に電子部品4を搭載する分だけ凹部2内に搭載するよりも撮像装置の厚みは厚くなるが、撮像装置が組み込まれるデジタルカメラのレンズあるいは、図2に示す例のような撮像モジュールのレンズ7と撮像素子3との間には、通常レンズの焦点距離等に応じた高さの空間が存在し、この空間内に電子部品4が収まることで厚みの増加の影響はなくなり、撮像モジュールの厚みが増加することもない。また、撮像装置と外部回路基板との間に電子部品4を搭載するための空間を設ける必要がなく、撮像素子3の下方の配線基板1の厚みを薄くできるので、配線基板1の下面から撮像素子3の熱を放熱することができ、熱ノイズの影響が小さい、高画質の画像信号を出力することのできる撮像装置となる。   Further, the thickness of the imaging device is increased by the thickness of the wiring board 1 which is increased to form the recess 2 for housing the electronic component 4 as compared with the case where the electronic component 4 is mounted on the lower surface of the conventional wiring board 1. Can be thinned. Although the thickness of the imaging device is thicker than that of mounting in the recess 2 by mounting the electronic component 4 on the upper surface of the wiring board 1, the lens of the digital camera in which the imaging device is incorporated or the example shown in FIG. A space having a height corresponding to the focal length of the normal lens exists between the lens 7 and the image sensor 3 of the imaging module, and the influence of the increase in thickness is eliminated by the electronic component 4 being accommodated in this space. The thickness of the imaging module is not increased. Further, it is not necessary to provide a space for mounting the electronic component 4 between the imaging device and the external circuit board, and the thickness of the wiring board 1 below the imaging element 3 can be reduced. It becomes an imaging device that can radiate the heat of the element 3 and can output a high-quality image signal that is less affected by thermal noise.

配線基板1は、セラミックスや樹脂等の絶縁体から成る絶縁基板の表面や内部に配線導体1cが形成されたものであり、凹部2の開口2aとなる貫通孔および電子部品4を搭載するための配線導体1cを有する上側配線基板1aと、撮像素子3の電極と電気的に接続するための配線導体1cを有する下側配線基板1bとが接合されて構成される。下側配線基板1bに撮像素子3を搭載してから上側配線基板1aを接合することによって、開口2aよりも大きい撮像素子3を凹部2の底面に搭載することができる。図1および図2(a)に示す例では、配線基板1は、開口2aとなる貫通孔を有する平板状の上側配線基板1aと凹部2の底面側となる凹部を有する下側配線基板1bとを接合して構成されている。図2(b)に示す例では、配線基板1は、開口2aおよび凹部2の上側となる、下側の開口よりも上側の開口の方が小さい貫通孔を有する平板状の上側配線基板1aと凹部2の底面側となる凹部を有する下側配線基板1bとを接合して構成されている。図2(c)に示す例では、配線基板1は、凹部2となる、下側の開口よりも上側の開口の方が小さい貫通孔を有する平板状の上側配線基板1aと平板状の下側配線基板1bとを接合して構成されている。   The wiring substrate 1 has a wiring conductor 1c formed on the surface or inside of an insulating substrate made of an insulator such as ceramics or resin, and is used for mounting a through hole and an electronic component 4 serving as the opening 2a of the recess 2. The upper wiring board 1a having the wiring conductor 1c and the lower wiring board 1b having the wiring conductor 1c for electrically connecting to the electrode of the image sensor 3 are joined to each other. By mounting the imaging device 3 on the lower wiring substrate 1b and then bonding the upper wiring substrate 1a, the imaging device 3 larger than the opening 2a can be mounted on the bottom surface of the recess 2. In the example shown in FIG. 1 and FIG. 2 (a), the wiring board 1 includes a flat upper wiring board 1a having a through-hole serving as an opening 2a and a lower wiring board 1b having a concave part on the bottom side of the concave part 2. It is constituted by joining. In the example shown in FIG. 2B, the wiring board 1 includes a flat upper wiring board 1 a having a through-hole that is above the opening 2 a and the recess 2 and whose upper opening is smaller than the lower opening. The lower wiring board 1b having a concave portion that is the bottom surface side of the concave portion 2 is joined and configured. In the example shown in FIG. 2 (c), the wiring board 1 is a flat plate-like upper wiring board 1a having a through hole whose upper opening is smaller than the lower opening. The wiring board 1b is joined to the wiring board 1b.

上側配線基板1aと下側配線基板1bとの接合部は、図3(a)〜図3(c)に示す例のように、上側配線基板1aおよび下側配線基板1bの少なくとも一方に、互いにかみ合う、開口2aを取り囲む環状の段差または環状の凹凸を設けるとよい。これによれば、接合面積が増えることによって接合強度が高まり、さらに、互いに嵌合するような凹凸を設けると、上側配線基板1aと下側配線基板1bとの位置合わせも容易になる。また、接合部において上側配線基板1aの配線導体1cと下側配線基板1bの配線導体1cとをはんだで接合する場合などは、クリームはんだに含まれるフラックスやはんだ粒子が飛散して撮像素子3の受光部3a等に付着してしまうことを防ぐこともできる。導電性樹脂によって接合する場合も、凹部2内に導電性樹脂が流れ込んで、凹部2内の配線導体1c同士が短絡してしまうことなどを防止することができる。   As shown in FIGS. 3A to 3C, the joint between the upper wiring board 1a and the lower wiring board 1b is connected to at least one of the upper wiring board 1a and the lower wiring board 1b. A ring-shaped step or ring-shaped unevenness surrounding the opening 2a may be provided. According to this, the bonding strength is increased by increasing the bonding area, and if the unevenness to be fitted to each other is provided, the alignment between the upper wiring board 1a and the lower wiring board 1b is facilitated. Further, when the wiring conductor 1c of the upper wiring board 1a and the wiring conductor 1c of the lower wiring board 1b are joined by solder at the joint, the flux and solder particles contained in the cream solder are scattered and the imaging element 3 It is possible to prevent the light from adhering to the light receiving portion 3a and the like. Also in the case of joining with a conductive resin, it is possible to prevent the conductive resin from flowing into the recess 2 and short-circuiting the wiring conductors 1c in the recess 2.

また、配線基板1が、開口2aを有する上側配線基板1aの下面と凹部2の底面を有する下側配線基板1bの上面とが接合されてなり、上側配線基板1aおよび下側配線基板1bの接合面の少なくとも一方に平面視で開口2aを取り囲むように互いにかみ合う環状の段差または環状の凹凸が形成されているものであるとよい。このような構成とすることによって、接合面に互いにかみ合う環状の段差または環状の凹凸があるので、上側配線基板1aと下側配線基板1bとが接合された接合部から凹部2内へ光が侵入することを防ぐことができる。   Further, the wiring substrate 1 is formed by bonding the lower surface of the upper wiring substrate 1a having the opening 2a and the upper surface of the lower wiring substrate 1b having the bottom surface of the recess 2 to join the upper wiring substrate 1a and the lower wiring substrate 1b. It is preferable that at least one of the surfaces is formed with an annular step or an annular concavo-convex meshing with each other so as to surround the opening 2a in plan view. By adopting such a configuration, there is an annular step or an annular concavo-convex meshing with each other on the joint surface, so that light enters the recess 2 from the joint where the upper wiring board 1a and the lower wiring board 1b are joined. Can be prevented.

このような構造の撮像装置は、特に、赤外線領域や紫外線領域の光を含む、可視光よりも広い波長領域の光を捉える撮像素子を用いた場合や、わずかな光を検出することのできる高感度の撮像素子を用いた場合に、より効果的である。また、接合材として例えば異方性導電膜(Anisotropic Conductive Film:ACF)や異方性導電ペースト(Anisotropic
Conductive Paste:ACP)のように、使用できるバインダーに制限があり、接合材の
みで十分な遮光ができない場合に用いると、より効果的である。
An imaging device having such a structure is particularly useful when using an imaging device that captures light in a wavelength region wider than visible light, including light in the infrared region and ultraviolet region, and is capable of detecting a small amount of light. This is more effective when a sensitive image sensor is used. Further, for example, an anisotropic conductive film (ACF) or an anisotropic conductive paste (Anisotropic conductive paste) is used as a bonding material.
As in the case of Conductive Paste (ACP), there is a limit to the binder that can be used, and it is more effective when it is used when sufficient light shielding cannot be achieved with only the bonding material.

図3(a)に示す例では、配線基板1は、開口2aとなる貫通孔を有するとともに、貫通孔を取り囲むように、外周側の厚みが小さくなるような環状の段差を下面に有する平板状の上側配線基板1aと、凹部2となる凹部を上面に有する下側配線基板1bとが、上側配線基板1aの段差よりも外周側の下面と下側配線基板1bの側壁部の上面とを互いにかみ合わせるように接合して構成されている。また、図3(b)に示す例では、配線基板1は、開口2aとなる貫通孔を有するとともに、凹部2の上側となる凹部を下面に有する上側配線基板1aと、凹部2の底面側となる凹部を上面に有するとともに、凹部の側壁部の上面の外周側が低くなるような環状の段差を有する下側配線基板1bとが、上側配線基板1aの側壁部の下面と下側配線基板1bの側壁部の上面の外周側とを互いにかみ合わせるように接合して構成されている。また、図3(c)に示す例では、配線基板1は、開口2aとなる貫通孔を有するとともに、貫通孔を取り囲むように環状の凸部1dを下面に有する平板状の上側配線基板1aと、凹部2となる凹部を上面に有するとともに、凹部の側壁部の上面に凹部を取り囲むように環状の第2の凹部1eを有する下側配線基板1bとが、上側配線基板1aの側壁部の下面と下側配線基板1bの側壁部の上面とを、凸部1dと第2の凹部1eとがかみ合うように接合して構成されている。   In the example shown in FIG. 3 (a), the wiring board 1 has a through hole serving as an opening 2a and a flat plate shape having an annular step on the lower surface so as to reduce the outer peripheral thickness so as to surround the through hole. The upper wiring board 1a and the lower wiring board 1b having a concave portion to be the concave portion 2 on the upper surface are arranged such that the lower surface on the outer peripheral side with respect to the step of the upper wiring substrate 1a and the upper surface of the side wall portion of the lower wiring substrate 1b It is configured to be joined so as to be engaged. In the example shown in FIG. 3B, the wiring board 1 has a through-hole that becomes the opening 2a, and has an upper wiring board 1a that has a concave portion that is an upper side of the concave portion 2 on the lower surface, and a bottom surface side of the concave portion 2. And the lower wiring board 1b having an annular step which lowers the outer peripheral side of the upper surface of the side wall portion of the concave portion, and the lower surface of the side wall portion of the upper wiring board 1a and the lower wiring board 1b. The outer peripheral side of the upper surface of the side wall portion is joined to be engaged with each other. In the example shown in FIG. 3C, the wiring board 1 includes a flat upper wiring board 1a having a through hole serving as an opening 2a and an annular protrusion 1d on the lower surface so as to surround the through hole. The lower wiring substrate 1b having the concave portion to be the concave portion 2 on the upper surface and the annular second concave portion 1e so as to surround the concave portion on the upper surface of the side wall portion of the concave portion is the lower surface of the side wall portion of the upper wiring substrate 1a. And the upper surface of the side wall portion of the lower wiring substrate 1b are joined so that the convex portion 1d and the second concave portion 1e are engaged with each other.

また、例えば、接合面に環状の凹凸を形成する場合は、図3(c)ならびに図4(a)および図4(b)に示す例のように、上側配線基板1aの下面に開口2aを取り囲んで、下側配線基板1bの凹部の開口よりも大きい環状の凸部1dを形成するとともに、下側配線基板1bの側壁部の上面に、下側配線基板1bの凹部の開口を取り囲んだ環状の第2の凹部1eを形成すればよい。ここで、図4(a)は上側配線基板1aの下面図であり、図4(b)は下側配線基板1bの上面図である。なお、接合面に環状の段差を形成する場合も、上述した環状の凹凸の場合と同様に形成すればよい。   Further, for example, when forming an annular unevenness on the joint surface, an opening 2a is formed on the lower surface of the upper wiring substrate 1a as shown in FIGS. 3C, 4A, and 4B. An annular convex portion 1d that is larger than the opening of the concave portion of the lower wiring substrate 1b is formed so as to surround it, and an annular shape that surrounds the opening of the concave portion of the lower wiring substrate 1b on the upper surface of the side wall portion of the lower wiring substrate 1b. The second recess 1e may be formed. 4A is a bottom view of the upper wiring board 1a, and FIG. 4B is a top view of the lower wiring board 1b. In addition, what is necessary is just to form similarly to the case of the cyclic | annular unevenness | corrugation mentioned above also when forming a cyclic | annular level | step difference in a joint surface.

図3および図4に示す例のような構造の撮像装置は、例えば配線基板1の絶縁基板がセラミックスから成る場合には、互いにかみ合う環状の段差または環状の凹凸は、絶縁基板用のセラミックグリーンシートを金型やパンチングによる打ち抜き方法またはレーザ加工方法等によって加工して、それらを積層することによって形成することができる。図4に示した例のような、環状の凸部を打ち抜き加工した後にセラミックグリーンシートを単独で保持することが難しい場合には、焼成後に飛散する有機物等からなるシートでこのセラミックグリーンシートを保持して積層したり、打ち抜き加工と同時に積層したりすればよい。また、絶縁基板1と実質的に同等の材質からなるセラミックペーストを塗布することによって環状の段差または環状の凹凸を形成してもよい。このような場合には、環状の段差または環状の凹凸の高さを大きくするために、セラミックペーストを複数回塗布しても
よい。さらに、環状の段差または環状の凹凸を、その断面が階段状になるようにセラミックペーストを塗布して形成してもよい。このような場合には、セラミックペーストを重ねた際に段差または凹凸の側壁が自重により変形することを低減することができる。また、焼成後に切削加工によって、互いにかみ合う環状の段差または環状の凹凸を形成しても構わない。また、絶縁基板が樹脂から成る場合には、適当な金型を用いて互いにかみ合う環状の段差または環状の凹凸を形成するか、切削加工によって形成すればよい。
3 and FIG. 4, for example, when the insulating substrate of the wiring board 1 is made of ceramics, the annular step or the annular unevenness that meshes with each other is a ceramic green sheet for the insulating substrate. Can be formed by laminating them with a die or punching method by punching or laser processing method. When it is difficult to hold the ceramic green sheet alone after punching the annular convex portion as in the example shown in FIG. 4, the ceramic green sheet is held with a sheet made of organic matter or the like that scatters after firing. And may be laminated at the same time as the punching process. Alternatively, an annular step or an annular unevenness may be formed by applying a ceramic paste made of substantially the same material as that of the insulating substrate 1. In such a case, the ceramic paste may be applied a plurality of times in order to increase the height of the annular step or the annular unevenness. Further, an annular step or an annular unevenness may be formed by applying a ceramic paste so that the cross section thereof is stepped. In such a case, it is possible to reduce the deformation of the stepped or uneven sidewall due to its own weight when the ceramic paste is stacked. Moreover, you may form the cyclic | annular level | step difference or cyclic | annular unevenness | corrugation which mutually meshes by cutting after baking. In the case where the insulating substrate is made of a resin, an annular step or an annular concavo-convex meshing with each other using an appropriate mold may be formed or formed by cutting.

配線導体1cには、上側配線基板1aの上面に形成され、電子部品4を搭載するための搭載電極となるもの、下側配線基板1bの凹部2の底面に形成され、接続部材5を介して撮像素子3の電極に接続される接続電極となるもの、下側配線基板1bの外面に形成され、外部回路基板の配線導体に接続するための外部端子電極となるもの、上側配線基板1aおよび下側配線基板1bの内部に形成され、搭載電極,接続電極,外部電極を互いに接続する内部配線導体となるもの(図示せず)がある。   The wiring conductor 1c is formed on the upper surface of the upper wiring substrate 1a and serves as a mounting electrode for mounting the electronic component 4, and is formed on the bottom surface of the concave portion 2 of the lower wiring substrate 1b. What is to be a connection electrode connected to the electrode of the image pickup device 3, what is formed on the outer surface of the lower wiring board 1b and becomes an external terminal electrode for connecting to the wiring conductor of the external circuit board, the upper wiring board 1a and the lower wiring board 1a Some (not shown) are formed inside the side wiring board 1b and serve as internal wiring conductors that connect the mounting electrode, the connection electrode, and the external electrode to each other.

図2(b)に示す例のように、凹部2の底面の外側に一段高い段差部を設け、その上に接続電極を配置してもよい。内部配線導体は、上側配線基板1aと下側配線基板1bとを接合する際に電気的に接続されるので、その一部がそれぞれの接合面に露出して形成される。内部配線導体の接合面に露出する部分は、上側配線基板1aおよび下側配線基板1bのそれぞれの絶縁基板を貫通する貫通導体が露出する部分となるが、貫通導体の横断面は小さいので、上側配線基板1aおよび下側配線基板1bそれぞれの接合面に幅広の接続パッドを形成しておくと、上側配線基板1aの配線導体1cと下側配線基板1bの配線導体1cとを良好に接合しやすくなるので好ましい。   As in the example shown in FIG. 2B, a stepped portion that is one step higher may be provided outside the bottom surface of the recess 2, and the connection electrode may be disposed thereon. Since the internal wiring conductor is electrically connected when the upper wiring board 1a and the lower wiring board 1b are bonded together, a part of the internal wiring conductor is exposed at each bonding surface. The portion exposed to the joint surface of the internal wiring conductor is a portion where the penetrating conductor penetrating each of the insulating substrates of the upper wiring substrate 1a and the lower wiring substrate 1b is exposed. If wide connection pads are formed on the joint surfaces of the wiring board 1a and the lower wiring board 1b, the wiring conductor 1c of the upper wiring board 1a and the wiring conductor 1c of the lower wiring board 1b can be easily joined well. This is preferable.

また、図2(a)に示す例では外部端子電極となる配線導体1cは配線基板1の下面に配置しているが、図2(b)に示す例のように、配線基板1の側面に配置してもよく、側面に形成した凹部(切欠き部)の内面に形成したり、凹部(切欠き部)を導体で充填したりした、いわゆるキャスタレーション導体としても構わない。   Further, in the example shown in FIG. 2A, the wiring conductor 1c serving as the external terminal electrode is disposed on the lower surface of the wiring board 1, but on the side surface of the wiring board 1 as in the example shown in FIG. It may be arranged, and may be formed as a so-called castellation conductor formed on the inner surface of a recess (notch) formed on the side surface or filled with a conductor in the recess (notch).

撮像装置は以下のようにして作製される。まず、上記のような上側配線基板1aおよび下側配線基板1bを準備する。   The imaging device is manufactured as follows. First, the upper wiring board 1a and the lower wiring board 1b as described above are prepared.

配線基板1(上側配線基板1a,下側配線基板1b)の絶縁基板は、セラミックスや樹脂等の絶縁体から成るものである。セラミックスから成る場合は、例えば、酸化アルミニウム質焼結体(アルミナセラミックス),窒化アルミニウム質焼結体,ムライト質焼結体,ガラスセラミックス質焼結体等が挙げられ、樹脂からなる場合は、例えば、エポキシ樹脂,ポリイミド樹脂,アクリル樹脂,フェノール樹脂,ポリエステル樹脂または四フッ化エチレン樹脂を始めとするフッ素系樹脂等が挙げられる。また、ガラスエポキシ樹脂のように、ガラス繊維から成る基材に樹脂を含浸させたものも挙げられる。   The insulating substrate of the wiring board 1 (upper wiring board 1a, lower wiring board 1b) is made of an insulator such as ceramics or resin. When made of ceramics, for example, aluminum oxide sintered bodies (alumina ceramics), aluminum nitride sintered bodies, mullite sintered bodies, glass ceramic sintered bodies, etc. can be mentioned. And fluorine resins such as epoxy resin, polyimide resin, acrylic resin, phenol resin, polyester resin or ethylene tetrafluoride resin. Moreover, what impregnated resin to the base material which consists of glass fibers like glass epoxy resin is also mentioned.

絶縁基板が、例えば酸化アルミニウム質焼結体からなる場合には、アルミナ(Al),シリカ(SiO),カルシア(CaO)およびマグネシア(MgO)等の原料粉末に適当な有機溶剤,溶媒を添加混合して泥漿状にするとともに、これを従来周知のドクターブレード法やカレンダーロール法等を採用してシート状に成形することによってセラミックグリーンシートを得て、次に、セラミックグリーンシートに適当な打ち抜き加工を施すとともに必要に応じて複数枚積層し、高温(約1500〜1800℃)で焼成することによって製作される。配線基板1の凹部2は、絶縁基板用のセラミックグリーンシートのいくつかに、凹部2用の貫通孔を、金型やパンチングによる打ち抜き方法またはレーザ加工方法等によって形成しておくことにより、形成することができる。このとき、開口2aとなる貫通孔は他の貫通孔よりも小さくしておけばよい。図2(b)に示す例のように凹部2内に段差部を有する場合は、セラミックグリーンシートに大きさの異なる貫通孔を形成して
積層することによって形成することができる。
When the insulating substrate is made of, for example, an aluminum oxide sintered body, an organic solvent suitable for raw material powders such as alumina (Al 2 O 3 ), silica (SiO 2 ), calcia (CaO), and magnesia (MgO), A ceramic green sheet is obtained by forming a sheet by adding a solvent and mixing it into a slurry, and forming this into a sheet using a conventionally known doctor blade method, calendar roll method, etc. It is manufactured by performing appropriate stamping and laminating a plurality of sheets as necessary and firing at a high temperature (about 1500 to 1800 ° C.). The recesses 2 of the wiring board 1 are formed by forming through holes for the recesses 2 in some ceramic green sheets for the insulating substrate by a punching method using a die or punching, a laser processing method, or the like. be able to. At this time, the through hole to be the opening 2a may be made smaller than the other through holes. When the step portion is provided in the recess 2 as in the example shown in FIG. 2B, it can be formed by forming and stacking through holes having different sizes in the ceramic green sheet.

また、絶縁基板が例えば樹脂から成る場合は、所定の絶縁基板の形状に成形できるような金型を用いて、トランスファーモールド法やインジェクションモールド法等によって成形することにより形成することができる。また、絶縁基板は、例えばガラスエポキシ樹脂のように、ガラス繊維から成る基材に樹脂を含浸させたものであってもよい。この場合は、ガラス繊維から成る基材にエポキシ樹脂の前駆体を含浸させ、このエポキシ樹脂前駆体を所定の温度で熱硬化させることによって形成することができる。   Further, when the insulating substrate is made of, for example, a resin, it can be formed by molding by a transfer molding method, an injection molding method, or the like using a mold that can be molded into a predetermined shape of the insulating substrate. The insulating substrate may be a substrate made of glass fiber impregnated with resin, such as glass epoxy resin. In this case, it can be formed by impregnating a substrate made of glass fiber with an epoxy resin precursor and thermally curing the epoxy resin precursor at a predetermined temperature.

また、絶縁基板を構成する上側配線基板1aと下側配線基板1bとは、異なる材質であっても構わない。上側配線基板1aをその上に接合される透明板材6あるいはレンズ固定部材8の熱膨張係数と下側配線基板1bの熱膨張係数との間の熱膨張係数を有するものにすると、配線基板1と透明板材6あるいはレンズ固定部材8との熱膨張の差による撮像装置の歪みを抑制することができるので好ましい。例えば、下側配線基板1bがアルミナセラミックス(熱膨張係数:約7×10−6/℃)から成り、水晶(熱膨張係数:約11×10−6/℃)から成る透明板材6が上側配線基板1aの開口2aを塞ぐように接合されている場合であれば、上側配線基板1aをステアタイトセラミックス(熱膨張係数:約9×10−6/℃)から成るものとするとよい。 Further, the upper wiring substrate 1a and the lower wiring substrate 1b constituting the insulating substrate may be made of different materials. When the upper wiring board 1a has a thermal expansion coefficient between the thermal expansion coefficient of the transparent plate member 6 or the lens fixing member 8 bonded thereon and the thermal expansion coefficient of the lower wiring board 1b, the wiring board 1 and This is preferable because distortion of the imaging device due to a difference in thermal expansion from the transparent plate 6 or the lens fixing member 8 can be suppressed. For example, the lower wiring substrate 1b is made of alumina ceramics (thermal expansion coefficient: about 7 × 10 −6 / ° C.), and the transparent plate 6 made of quartz (thermal expansion coefficient: about 11 × 10 −6 / ° C.) is the upper wiring. If the bonding is performed so as to close the opening 2a of the substrate 1a, the upper wiring substrate 1a may be made of steatite ceramics (thermal expansion coefficient: about 9 × 10 −6 / ° C.).

配線導体1cは、絶縁基板がセラミックスから成る場合は、タングステン(W),モリブデン(Mo),マンガン(Mn),銀(Ag)または銅(Cu)等の金属粉末メタライズから成り、絶縁基板用のセラミックグリーンシートに配線導体1c用の導体ペーストをスクリーン印刷法等によって所定形状で印刷して、絶縁基板用のセラミックグリーンシートと同時に焼成することによって、絶縁基板の所定位置に形成される。内部導体のうち、セラミックグリーンシートを厚み方向に貫通する貫通導体は、導体ペーストを印刷することによって、セラミックグリーンシートに形成した貫通孔を充填しておけば形成することができる。このような導体ペーストは、上記金属粉末に適当な溶剤およびバインダーを加えて混練することによって、適度な粘度に調整して作製される。なお、この導体ペーストには、絶縁基板との接合強度を高めるために、ガラスやセラミックスを含んでいても構わない。   When the insulating substrate is made of ceramic, the wiring conductor 1c is made of metal powder metallization such as tungsten (W), molybdenum (Mo), manganese (Mn), silver (Ag), or copper (Cu), and is used for the insulating substrate. A conductive paste for the wiring conductor 1c is printed in a predetermined shape on the ceramic green sheet by a screen printing method or the like, and is fired simultaneously with the ceramic green sheet for the insulating substrate, thereby being formed at a predetermined position on the insulating substrate. Among the internal conductors, a through conductor that penetrates the ceramic green sheet in the thickness direction can be formed by filling a through hole formed in the ceramic green sheet by printing a conductor paste. Such a conductive paste is prepared by adding an appropriate solvent and a binder to the metal powder and kneading to adjust to an appropriate viscosity. The conductor paste may contain glass or ceramics in order to increase the bonding strength with the insulating substrate.

絶縁基板が樹脂から成る場合には、配線導体1cは、銅,金,アルミニウム,ニッケル,クロム,モリブデン,チタンまたはそれらの合金等の金属材料から成る。例えば、ガラスエポキシ樹脂から成る樹脂シート上に配線導体1cの形状に加工した銅箔を転写し、銅箔が転写された樹脂シートを積層して接着剤で接着することによって形成する。内部導体のうち、樹脂シートを厚み方向に貫通する貫通導体は、導体ペーストの印刷やめっき法によって樹脂シートに形成した貫通孔の内面に被着形成するか、貫通孔を充填して形成すればよい。また、金属箔や金属柱を樹脂成形によって一体化させたり、絶縁基板にスパッタリング法,蒸着法等あるいはめっき法等を用いて被着させたりして形成される。   When the insulating substrate is made of resin, the wiring conductor 1c is made of a metal material such as copper, gold, aluminum, nickel, chromium, molybdenum, titanium, or an alloy thereof. For example, the copper foil processed into the shape of the wiring conductor 1c is transferred onto a resin sheet made of glass epoxy resin, and the resin sheet to which the copper foil is transferred is laminated and bonded with an adhesive. Of the internal conductors, the through conductors that penetrate the resin sheet in the thickness direction can be deposited on the inner surface of the through holes formed in the resin sheet by conductor paste printing or plating, or by filling the through holes. Good. Further, it is formed by integrating a metal foil or a metal column by resin molding, or by depositing it on an insulating substrate using a sputtering method, a vapor deposition method or a plating method.

配線導体1cの露出する表面には、電解めっき法や無電解めっき法等のめっき法によってめっき層が被着される。めっき層は、ニッケルまたは金等の耐蝕性や接続部材5の接続性に優れる金属からなるものであり、例えば、厚さ1〜10μm程度のニッケルめっき層と厚さ0.1〜3μm程度の金めっき層とが順次被着される。これにより、配線導体1cが腐
食することを効果的に抑制することができるとともに、撮像素子3と配線導体1cとの固着、配線導体1cとボンディングワイヤ等の接続部材5との接合、配線導体1cと電子部品4との接合および配線導体1cと外部電気回路基板の配線導体との接続を強固にすることができる。
A plating layer is deposited on the exposed surface of the wiring conductor 1c by a plating method such as an electrolytic plating method or an electroless plating method. The plating layer is made of a metal having excellent corrosion resistance such as nickel or gold and the connectivity of the connecting member 5. For example, a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm. Are sequentially deposited. Thus, corrosion of the wiring conductor 1c can be effectively suppressed, the imaging element 3 and the wiring conductor 1c are fixed, the wiring conductor 1c is bonded to the connection member 5 such as a bonding wire, and the wiring conductor 1c. And the connection between the wiring component 1c and the wiring conductor of the external electric circuit board can be strengthened.

次に、CCD型あるいはCMOS型の撮像素子3を、受光部3aを上面側に向けて下側
配線基板1bの上に搭載する。撮像素子3の搭載は、図1,図2(a)および図2(b)に示す例では、凹部2の底面に例えば銀粉末を含むエポキシ樹脂等から成る導電性接着剤やはんだ等の接合材にて固定し、撮像素子3の電極と配線導体1cとを接続部材5として金等から成るボンディングワイヤで電気的に接続して行なっている。この場合は、下側配線基板1bが凹部を有さない平板状であると、ボンディングツールが移動する際に凹部2の内壁に当たることがなく、凹部2の底面の配線導体1cの外側にボンディングツールが当たらないようにするための空間を設ける必要がないので、撮像装置をより小型にすることができる。また、下側配線基板1bに凹部を形成している場合と比較して、その製作過程において、下側配線基板1bに発生する反りが小さく、撮像素子3の搭載部を平坦に形成しやすい。平坦な面に撮像素子3を搭載することができるので、より高画質の画像信号を出力することのできる撮像装置とすることができる。また、図2(c)に示す例のように、凹部2の底面に配設された配線導体1cに、はんだによる接合やAuバンプの超音波接合、あるいは異方性導電性樹脂による接着によってフリップチップ接合して搭載しても構わない。なお、はんだやAuバンプによるフリップチップ接合を行なう場合には、撮像素子3の下の空間にアンダーフィル材(図示せず)を充填する。
Next, the CCD type or CMOS type imaging device 3 is mounted on the lower wiring substrate 1b with the light receiving portion 3a facing the upper surface side. In the example shown in FIGS. 1, 2 (a) and 2 (b), the image pickup device 3 is mounted on the bottom surface of the recess 2 by bonding with a conductive adhesive made of, for example, epoxy resin containing silver powder or solder. It is fixed by a material, and the electrode of the image pickup device 3 and the wiring conductor 1c are electrically connected as a connecting member 5 with a bonding wire made of gold or the like. In this case, when the lower wiring board 1b is a flat plate having no recess, the bonding tool does not hit the inner wall of the recess 2 when the bonding tool moves, and the bonding tool is placed outside the wiring conductor 1c on the bottom surface of the recess 2. Since it is not necessary to provide a space for preventing the image from being hit, the image pickup apparatus can be made smaller. Further, compared to the case where the concave portion is formed in the lower wiring substrate 1b, the warp generated in the lower wiring substrate 1b is small in the manufacturing process, and the mounting portion of the imaging element 3 is easily formed flat. Since the imaging element 3 can be mounted on a flat surface, an imaging apparatus capable of outputting a higher quality image signal can be obtained. Further, as in the example shown in FIG. 2C, the wiring conductor 1c disposed on the bottom surface of the recess 2 is flipped by bonding with solder, ultrasonic bonding of Au bumps, or adhesion with anisotropic conductive resin. It may be mounted by chip bonding. When performing flip chip bonding using solder or Au bumps, an underfill material (not shown) is filled in the space below the image sensor 3.

次に、上側配線基板1aと下側配線基板1bとを、それぞれの接合面に露出した配線導体1c同士を電気的に接続しつつ接合する。例えば、上下の配線導体1cをはんだ等の導電性の接合材によって電気的に接続し、その周囲にエポキシ系樹脂等の接合材を塗布することによって、上側配線基板1aと下側配線基板1bとの接合を補強するとともに、上側配線基板1aと下側配線基板1bとの間を封止する。あるいは、ACFやACPを用いて、上側配線基板1aと下側配線基板1bとの接合と、上下の配線導体1cの電気的接続とを同時に行なっても構わない。   Next, the upper wiring board 1a and the lower wiring board 1b are bonded together while electrically connecting the wiring conductors 1c exposed on the respective bonding surfaces. For example, by electrically connecting the upper and lower wiring conductors 1c with a conductive bonding material such as solder and applying a bonding material such as epoxy resin around the upper and lower wiring conductors 1c and 1b, And the space between the upper wiring board 1a and the lower wiring board 1b is sealed. Alternatively, the bonding of the upper wiring board 1a and the lower wiring board 1b and the electrical connection of the upper and lower wiring conductors 1c may be performed simultaneously using ACF or ACP.

電子部品4は、電気信号を処理するIC,コンデンサ,コイルまたは抵抗等であり、はんだ等の導電性の接合材によって配線導体1cに接続して搭載される。電子部品4の配線基板1への搭載は、上側配線基板1aと下側配線基板1bとを接合して配線基板1とした後でもよいし、これらを接合する前の上側配線基板1aへ搭載してもよい。ただ、上側配線基板1aと下側配線基板1bとを接合した後に電子部品4を搭載する場合は、開口2aの周囲の絶縁基板は厚みが薄く、その下方が凹部2による空間となっていることから、電子部品4を搭載する際の衝撃によって配線基板1の開口2aの周囲にクラックが発生する場合があるので、上側配線基板1aに電子部品4を搭載し、下側配線基板1bに撮像素子3を搭載した後、上側配線基板1aと下側配線基板1bとを接合することが好ましい。上側配線基板1aに電子部品4を搭載する場合であっても、図2(b)および図2(c)に示す例のように上側配線基板1aに電子部品4を搭載する場合には、同様の破損等が発生することを抑制するために、上側配線基板1aの貫通孔の形状に対応した形状の凸部を備えた支持板上に上側配線基板1aを載置して行なうのが好ましい。   The electronic component 4 is an IC, a capacitor, a coil, a resistor, or the like that processes an electrical signal, and is mounted by being connected to the wiring conductor 1c by a conductive bonding material such as solder. The electronic component 4 may be mounted on the wiring board 1 after the upper wiring board 1a and the lower wiring board 1b are joined to form the wiring board 1, or on the upper wiring board 1a before joining them. May be. However, when the electronic component 4 is mounted after the upper wiring substrate 1a and the lower wiring substrate 1b are joined, the insulating substrate around the opening 2a is thin, and the space below the recess 2 is provided below the insulating substrate. Therefore, a crack may occur around the opening 2a of the wiring board 1 due to an impact when the electronic component 4 is mounted. Therefore, the electronic component 4 is mounted on the upper wiring board 1a and the imaging element is mounted on the lower wiring board 1b. After mounting 3, it is preferable to join the upper wiring board 1a and the lower wiring board 1b. Even when the electronic component 4 is mounted on the upper wiring board 1a, the same applies when the electronic component 4 is mounted on the upper wiring board 1a as in the examples shown in FIGS. 2 (b) and 2 (c). In order to suppress the occurrence of damage or the like, it is preferable that the upper wiring substrate 1a is placed on a support plate having a convex portion corresponding to the shape of the through hole of the upper wiring substrate 1a.

また、図2(a),図2(b)および図3(a)〜図3(c)に示す例のように、上述したような撮像装置において、配線基板1の上面に、凹部2の開口2aを塞ぐように透明板材6が取り付けられていることが好ましい。このような構成にすると、凹部2内に水分や塵芥が入り込んで撮像素子3の受光部3aに付着することがないので、撮像素子3を保護することができるとともに受光を妨げることがなく、高画質な画像信号を出力することが可能となる。例えば、レンズ7が固定された固定部材8を配線基板1の上面に接合する際に発生する屑が開口2aから凹部2内に入り込むのを防ぐことができる。また、上側配線基板1aと下側配線基板1bとを接合した後に、はんだで電子部品4を搭載する場合は、透明板材6を取り付けた後に電子部品4を搭載すると、クリームはんだに含まれるフラックスやはんだ粒子が飛散して開口2aから凹部2内に侵入して、撮像素子3の受光部3a等に付着してしまうことを防ぐことができる。   Further, in the imaging apparatus as described above, as shown in FIGS. 2A, 2B, and 3A to 3C, the recess 2 is formed on the upper surface of the wiring board 1. It is preferable that the transparent plate 6 is attached so as to close the opening 2a. With such a configuration, moisture or dust does not enter the concave portion 2 and adhere to the light receiving portion 3a of the image pickup device 3, so that the image pickup device 3 can be protected and light reception is not hindered. It is possible to output an image signal with high image quality. For example, it is possible to prevent dust generated when the fixing member 8 to which the lens 7 is fixed is bonded to the upper surface of the wiring board 1 from entering the recess 2 from the opening 2a. In addition, when the electronic component 4 is mounted with solder after the upper wiring substrate 1a and the lower wiring substrate 1b are joined, if the electronic component 4 is mounted after the transparent plate 6 is mounted, the flux contained in the cream solder It is possible to prevent the solder particles from scattering and entering the concave portion 2 from the opening 2a and adhering to the light receiving portion 3a and the like of the image sensor 3.

透明板材6は、水晶やガラスあるいはエポキシ樹脂等の樹脂等から成り、熱硬化型や紫外線硬化型等のエポキシ樹脂やガラス等の接着剤によって配線基板1に接合される。例えば配線基板1の上面の開口2aの周囲あるいは透明板材6の外縁部に、紫外線硬化型のエポキシ樹脂をディスペンス法によって塗布し、配線基板1の上に透明板材6を載置して紫外線を照射することで、接着剤が硬化して透明板材6が取り付けられて、凹部2が封止される。   The transparent plate 6 is made of a resin such as crystal, glass or epoxy resin, and is bonded to the wiring substrate 1 with an adhesive such as a thermosetting type or ultraviolet curing type epoxy resin or glass. For example, an ultraviolet curable epoxy resin is applied to the periphery of the opening 2a on the upper surface of the wiring substrate 1 or the outer edge of the transparent plate 6 by a dispensing method, and the transparent plate 6 is placed on the wiring substrate 1 and irradiated with ultraviolet rays. By doing so, an adhesive agent hardens | cures, the transparent board | plate material 6 is attached, and the recessed part 2 is sealed.

透明板材6の上には、フィルタを形成してもよい。透明板材6の上に直接にフィルタを形成することは、透明板材6の上に別に作製したフィルタを配置する場合に比較して、撮像装置の厚みを低減できるので好ましい。このフィルタとしては、結晶方位角が異なる2〜3枚の水晶板を重ね、水晶板の複屈折の特性を利用して撮像素子3がとらえた映像に発生するモアレ現象を防止するローパスフィルタがある。透明板材6として水晶板を用いた場合には、透明板材6をこのローパスフィルタの水晶板の一枚として兼用できる。また、一般的に赤色から赤外領域での感度が人間の視覚に比べて高い感度傾向を持つ撮像素子3を人間の目の色合い感度と合わせるために、赤色から赤外領域の波長の光をカットするためのIR(InfraRed:赤外線)カットフィルタもある。IRカットフィルタは、透明板材6の表面に誘電体多層膜を数十層交互に形成することによって作製することができる。誘電体多層膜は、通常は屈折率が1.7以上の誘電体材料から成る高屈折率誘電体層と、屈折
率が1.6以下の誘電体材料から成る低屈折率誘電体層とを、蒸着法やスパッタリング法等
を用いて交互に数十層積層することによって形成される。屈折率が1.7以上の誘電体材料
としては、例えば五酸化タンタル,酸化チタン,五酸化ニオブ,酸化ランタンまたは酸化ジルコニウム等が用いられ、屈折率が1.6以下の誘電体材料としては、例えば酸化珪素,
酸化アルミニウム,フッ化ランタンまたはフッ化マグネシウム等が用いられる。
A filter may be formed on the transparent plate 6. It is preferable to form the filter directly on the transparent plate 6 because the thickness of the imaging device can be reduced as compared with the case where a separately prepared filter is arranged on the transparent plate 6. As this filter, there is a low-pass filter that overlaps two or three quartz plates having different crystal orientation angles and prevents the moire phenomenon that occurs in the image captured by the imaging device 3 by utilizing the birefringence characteristics of the quartz plate. . When a crystal plate is used as the transparent plate material 6, the transparent plate material 6 can be used as one crystal plate of the low-pass filter. Also, in order to match the image pickup device 3 whose sensitivity in the red to infrared region is generally higher than that of human vision with the hue sensitivity of the human eye, light having a wavelength in the red to infrared region is used. There is also an IR (InfraRed) cut filter for cutting. The IR cut filter can be manufactured by alternately forming several tens of dielectric multilayer films on the surface of the transparent plate 6. The dielectric multilayer film is generally formed by a high refractive index dielectric layer made of a dielectric material having a refractive index of 1.7 or more and a low refractive index dielectric layer made of a dielectric material having a refractive index of 1.6 or less by an evaporation method or the like. It is formed by alternately laminating several tens of layers using a sputtering method or the like. As the dielectric material having a refractive index of 1.7 or more, for example, tantalum pentoxide, titanium oxide, niobium pentoxide, lanthanum oxide, zirconium oxide or the like is used, and as the dielectric material having a refractive index of 1.6 or less, for example, silicon oxide,
Aluminum oxide, lanthanum fluoride, magnesium fluoride or the like is used.

また、本発明の撮像モジュールは、図2(a)〜図2(c)にそれぞれ断面図で示す例のように、上記各構成の本発明の撮像装置の配線基板1の開口の上方にレンズ7が配置されている。このような構成により、小型・薄型で高画質な画像信号を出力することが可能な撮像モジュールとなる。レンズ7は、ガラスあるいはエポキシ樹脂,アクリル樹脂等の樹脂等から成り、レンズ固定部材8に取り付けられることによって、レンズ固定部材8の開口部を介してレンズ7を透過した光を受光部3aに効率的に入射させることができる。レンズ固定部材8は、樹脂または金属等から成り、図2(a)〜図2(c)に示す例のように、エポキシ樹脂または半田等の接着剤によって配線基板1の上面に固定される。あるいはレンズ固定部材8に予め設けられた鉤部等によって配線基板1に固定される。   In addition, the imaging module of the present invention has a lens above the opening of the wiring board 1 of the imaging device of the present invention having the above-described configuration, as shown in the cross-sectional views of FIGS. 2 (a) to 2 (c). 7 is arranged. With such a configuration, an imaging module capable of outputting a small, thin and high-quality image signal is obtained. The lens 7 is made of glass, resin such as epoxy resin, acrylic resin, or the like, and is attached to the lens fixing member 8 so that light transmitted through the lens 7 through the opening of the lens fixing member 8 is efficiently transmitted to the light receiving unit 3a. Can be incident. The lens fixing member 8 is made of resin, metal, or the like, and is fixed to the upper surface of the wiring board 1 with an adhesive such as epoxy resin or solder, as in the example shown in FIGS. 2 (a) to 2 (c). Alternatively, the lens fixing member 8 is fixed to the wiring board 1 by a flange provided in advance.

なお、本発明は上述の実施の形態の例に限定されるものではなく、本発明の要旨を逸脱しない範囲であれば種々の変更は可能である。例えば、図3(c)に断面図で示す例のように、開口2aは、上側が小さくなるように側面が傾斜したものであっても構わない。このような開口2aであれば、外部の光を撮像素子3の受光部3aへと良好に入射させやすくなる。また、互いにかみ合う環状の段差または環状の凹凸は、平面視で開口2aを取り囲んで複数(二重または三重に)形成されていてもよい。この場合には、接合部からの光の侵入をより確実に防ぐことができる。   Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. For example, as in the example shown in the cross-sectional view of FIG. 3C, the opening 2a may have an inclined side surface so that the upper side becomes smaller. With such an opening 2a, it becomes easy to allow external light to enter the light receiving portion 3a of the image sensor 3 satisfactorily. A plurality of (double or triple) annular steps or annular irregularities that mesh with each other may surround the opening 2a in plan view. In this case, intrusion of light from the joint can be prevented more reliably.

1・・・配線基板
1a・・・上側配線基板
1b・・・下側配線基板
1c・・・配線導体
1d・・・凸部
1e・・・第2の凹部
2・・・凹部
2a・・・開口
3・・・撮像素子
3a・・・受光部
4・・・電子部品
5・・・接続部材
6・・・透明板材
7・・・レンズ
8・・・レンズ固定部材
DESCRIPTION OF SYMBOLS 1 ... Wiring board 1a ... Upper wiring board 1b ... Lower wiring board 1c ... Wiring conductor 1d ... Convex part 1e ... Second recessed part 2 ... Concave part 2a ... Opening 3 ... Image sensor 3a ... Light receiving part 4 ... Electronic component 5 ... Connection member 6 ... Transparent plate 7 ... Lens 8 ... Lens fixing member

Claims (4)

配線基板の上面に形成された凹部の底面に受光部を上にして撮像素子が搭載された撮像装置であって、
前記凹部は、上面視で前記撮像素子の前記受光部を露出させる大きさで前記凹部の底面よりも小さい開口を有し、
前記配線基板は、前記開口を有する上側配線基板の下面と前記凹部の前記底面を有する下側配線基板の上面とが接合されてなり、
前記上側配線基板の上面における前記開口の周辺であってレンズ固定部材を搭載する領域の外側に電子部品が搭載されており、
前記電子部品は、上面透視において、前記上側配線基板と前記下側配線基板との接合領域と重なっていることを特徴とする撮像装置。
An imaging device in which an imaging element is mounted with a light receiving portion facing up on a bottom surface of a recess formed on an upper surface of a wiring board,
The concave portion has an opening smaller than the bottom surface of the concave portion in a size that exposes the light receiving portion of the imaging element in a top view.
The wiring substrate is formed by bonding the lower surface of the upper wiring substrate having the opening and the upper surface of the lower wiring substrate having the bottom surface of the recess,
Electronic components are mounted on the outer surface of the upper surface of the upper wiring board and outside the area around which the lens fixing member is mounted ,
The imaging apparatus according to claim 1, wherein the electronic component overlaps a bonding region between the upper wiring board and the lower wiring board in a top perspective view .
前記凹部の前記開口を塞ぐように透明板材が取り付けられていることを特徴とする請求項1記載の撮像装置。   The imaging apparatus according to claim 1, wherein a transparent plate is attached so as to close the opening of the recess. 記上側配線基板および前記下側配線基板の接合面の少なくとも一方に平面視で前記開口を取り囲むように互いにかみ合う環状の段差または環状の凹凸が形成されていることを特徴とする請求項1または請求項2に記載の撮像装置。 Claim 1 or, characterized in that the previous SL upper wiring board and annular step or annular uneven interdigitated so as to surround the opening in plan view in at least one of the bonding surfaces of the lower wiring board is formed The imaging device according to claim 2. 請求項1乃至請求項3のいずれかに記載の撮像装置の、前記配線基板の前記開口の上方にレンズが配置されており、該レンズを固定している前記レンズ固定部材が前記配線基板の上面における前記開口と前記電子部品との間の領域に搭載されていることを特徴とする撮像モジュール。   4. The imaging device according to claim 1, wherein a lens is disposed above the opening of the wiring board, and the lens fixing member that fixes the lens is an upper surface of the wiring board. The imaging module is mounted in a region between the opening and the electronic component.
JP2010038950A 2009-03-25 2010-02-24 Imaging device and imaging module Active JP5595066B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010038950A JP5595066B2 (en) 2009-03-25 2010-02-24 Imaging device and imaging module

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009073177 2009-03-25
JP2009073177 2009-03-25
JP2010038950A JP5595066B2 (en) 2009-03-25 2010-02-24 Imaging device and imaging module

Publications (2)

Publication Number Publication Date
JP2010252307A JP2010252307A (en) 2010-11-04
JP5595066B2 true JP5595066B2 (en) 2014-09-24

Family

ID=43314079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010038950A Active JP5595066B2 (en) 2009-03-25 2010-02-24 Imaging device and imaging module

Country Status (1)

Country Link
JP (1) JP5595066B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6192312B2 (en) 2013-02-28 2017-09-06 キヤノン株式会社 A mounting member manufacturing method and an electronic component manufacturing method.
JP6357784B2 (en) * 2014-02-03 2018-07-18 株式会社ニコン Imaging unit and imaging apparatus
US20180376041A1 (en) * 2015-12-24 2018-12-27 Kyocera Corporation Image sensor mounting board and imaging device
WO2017157015A1 (en) * 2016-03-12 2017-09-21 宁波舜宇光电信息有限公司 Array camera module, moulded photosensitive assembly and manufacturing method therefor, and electronic device
JP7032103B2 (en) * 2017-10-27 2022-03-08 日本電産コパル株式会社 Imaging device
JP6777118B2 (en) * 2018-06-15 2020-10-28 株式会社ニコン Imaging unit and imaging device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002223378A (en) * 2000-11-14 2002-08-09 Toshiba Corp Image pickup unit, its producing method and electric apparatus
JP2002252797A (en) * 2001-02-26 2002-09-06 Sony Corp Solid-state image pickup device
JP3821718B2 (en) * 2002-01-28 2006-09-13 セイコープレシジョン株式会社 Solid-state imaging device
JP5218058B2 (en) * 2006-09-15 2013-06-26 富士通セミコンダクター株式会社 Semiconductor device and manufacturing method thereof
US7825985B2 (en) * 2007-07-19 2010-11-02 Flextronics Ap, Llc Camera module back-focal length adjustment method and ultra compact components packaging

Also Published As

Publication number Publication date
JP2010252307A (en) 2010-11-04

Similar Documents

Publication Publication Date Title
JP5289582B2 (en) Imaging device and imaging device module
JP5491628B2 (en) WIRING BOARD, IMAGING DEVICE, AND IMAGING DEVICE MODULE
JP5324667B2 (en) Imaging device
JP6732932B2 (en) Base for mounting image pickup element, image pickup device, and image pickup module
KR101814546B1 (en) Substrate for mounting electronic element, and electronic device
WO2014115766A1 (en) Package for electronic element mounting, electronic device, and imaging module
JP5595066B2 (en) Imaging device and imaging module
JP5988412B2 (en) Imaging device mounting substrate and imaging apparatus
CN111466028A (en) Substrate for mounting imaging element, imaging device, and imaging module
TWI434570B (en) Solid-state photography device and electronic device
JP5460356B2 (en) Imaging device
JP6951134B2 (en) Capsule for image pickup device and image pickup device
JP2004254037A (en) Imaging apparatus
JP6560096B2 (en) Mounting structure and camera module
JP6940373B2 (en) Receiver
JP2005278092A (en) Imaging apparatus
JP2006332506A (en) Package for housing electronic component, electronic device and its packaging structure

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20121115

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130529

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130604

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130724

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20131126

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140127

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140708

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140805

R150 Certificate of patent or registration of utility model

Ref document number: 5595066

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150