JP5594328B2 - Exposure apparatus, exposure method, and device manufacturing method. - Google Patents

Description

  The present invention relates to a mask, an exposure apparatus and exposure method for exposing a substrate, and a device manufacturing method.

  As an exposure apparatus used in a photolithography process, an exposure apparatus that exposes a substrate using a cylindrical or columnar mask as disclosed in the following patent document is known.

JP-A-7-153672 JP-A-8-213305 JP 2006-093318 A

  In order not only to use a plate-shaped mask but also to expose a substrate using a cylindrical or columnar mask, positional information of the mask pattern is used to satisfactorily expose the substrate with an image of the mask pattern. Need to get accurate. Therefore, it is desired to devise a technique that can accurately acquire positional information of a cylindrical or columnar mask and can accurately adjust the positional relationship between the mask and the substrate.

  The present invention has been made in view of such circumstances, and can accurately acquire position information of a cylindrical or columnar mask pattern and can satisfactorily form a pattern image on a substrate. The purpose is to provide. The present invention also provides an exposure apparatus and exposure method that can accurately acquire positional information of a cylindrical or columnar mask pattern, and that can satisfactorily expose a substrate with the image of the mask pattern, as well as the exposure apparatus and It is an object to provide a device manufacturing method using an exposure method.

  In order to solve the above-described problems, the present invention employs the following configurations corresponding to the respective drawings shown in the embodiments. However, the reference numerals with parentheses attached to each element are merely examples of the element and do not limit each element.

  According to the first aspect of the present invention, there is provided a mask for forming an image of a pattern (MP) on a substrate (P) while rotating around a predetermined axis (J), wherein the pattern (MP) is formed. The position information formed in a predetermined positional relationship with respect to the pattern (MP) in the pattern formation surface (MF) arranged around the predetermined axis (J) and the predetermined region (MB) of the pattern formation surface (MF) is acquired. And a mask (M) provided with marks (EM, RM, EMS).

  According to the first aspect of the present invention, a pattern image can be favorably formed on a substrate.

  According to the second aspect of the present invention, in the exposure apparatus that exposes the substrate (P) with an image of the pattern (MP), the pattern (MP) is formed and the pattern forming surface arranged around the predetermined axis (J) The mask (M) having (MF) is detected by detecting light through the mask (M) and the mask driving device (2) that can rotate about the predetermined axis (J) as a rotation axis, and based on the detection result, An exposure apparatus (EX) provided with a detection system (5) for acquiring position information regarding (MP) is provided.

  According to the second aspect of the present invention, a pattern image can be satisfactorily formed on the substrate.

  According to the third aspect of the present invention, a device manufacturing method using the exposure apparatus (EX) of the above aspect is provided.

  According to the 3rd aspect of this invention, a device can be manufactured using the exposure apparatus which can expose a board | substrate favorably with the image of a pattern.

  According to the fourth aspect of the present invention, in the exposure method for exposing the substrate (P) with the image of the pattern (MP), the pattern (MP) is formed and the pattern forming surface arranged around the predetermined axis (J) An operation of illuminating the pattern (MP) with the exposure light (EL) while rotating the mask (M) having (MF) with the predetermined axis (J) as the rotation axis, and detecting light through the mask (M) Then, based on the detection result, the operation of acquiring the position information regarding the pattern (MP) and the position of the substrate (P) while adjusting the position of at least one of the mask (M) and the substrate (P) based on the acquired position information. P) and an operation of irradiating exposure light (EL) through a mask (M) on the mask.

  According to the fourth aspect of the present invention, it is possible to satisfactorily form a pattern image on the substrate.

  According to a fifth aspect of the present invention, there is provided a device manufacturing method using the exposure method of the above aspect.

  According to the fifth aspect of the present invention, a device can be manufactured using an exposure method capable of satisfactorily exposing a substrate with a pattern image.

  According to the present invention, the substrate can be satisfactorily exposed with the image of the pattern. Therefore, a device having a desired performance can be manufactured.

It is a schematic block diagram which shows the exposure apparatus which concerns on 1st Embodiment. It is a schematic diagram which shows the exposure apparatus EX of 1st Embodiment. It is a perspective view which shows the mask which concerns on 1st Embodiment. 4A and 4B are diagrams for explaining the mask according to the first embodiment, in which FIG. 4A is a schematic diagram of a side surface of the mask, and FIG. 4B is a developed pattern forming surface of the mask on an XY plane. FIG. It is a top view which shows the board | substrate holding member holding the board | substrate which concerns on 1st Embodiment. It is a sectional side view which shows the vicinity of the mask holding member and mask drive device which concern on 1st Embodiment. 7A and 7B are diagrams illustrating a mask holding member according to the first embodiment, in which FIG. 7A is a cross-sectional view parallel to the XZ plane of the mask holding member, and FIG. 7B is a view of the mask holding member from the + X side. It is a figure. It is a figure for demonstrating the exchange system which replaces | exchanges the mask which concerns on 1st Embodiment, Comprising: FIG. 8 (A) is a figure which shows the state which the conveying apparatus is conveying the mask, FIG.8 (B) is It is a figure which shows the state by which the mask was hold | maintained at the mask holding member. It is a schematic diagram for demonstrating the 1st detection system which can acquire the positional information on the mask which concerns on 1st Embodiment. FIG. 10A is a schematic diagram for explaining a mark formation region of the mask according to the first embodiment, and FIG. 10A is a diagram in which a part of the pattern formation surface of the mask is developed on the XY plane, and FIG. ) Is an enlarged view of a part of the mark formation region of FIG. It is a schematic diagram which shows an example of the encoder system which concerns on 1st Embodiment. It is the figure which expand | deployed the vicinity of the mask pattern formation surface in which the rotation start position mark which concerns on 1st Embodiment is formed on XY plane. It is a schematic diagram for demonstrating the 2nd detection system which can acquire the positional information on the board | substrate which concerns on 1st Embodiment. It is a flowchart for demonstrating an example of the exposure method which concerns on 1st Embodiment. It is a schematic diagram for demonstrating an example of operation | movement of the exposure apparatus which concerns on 1st Embodiment. It is a schematic diagram for demonstrating an example of operation | movement of the exposure apparatus which concerns on 1st Embodiment. It is a schematic diagram for demonstrating an example of operation | movement of the exposure apparatus which concerns on 1st Embodiment. It is the figure which expanded a part of pattern formation surface of the mask which concerns on 2nd Embodiment on XY plane. It is the figure which expanded a part of pattern formation surface of the mask which concerns on 3rd Embodiment on XY plane. It is a schematic diagram which shows the exposure apparatus EX of 3rd Embodiment. It is a schematic diagram for demonstrating the mask holding member and detection system which concern on 4th Embodiment. It is a schematic diagram for demonstrating the mask and detection system which concern on 5th Embodiment. It is a schematic diagram for demonstrating the modification of an encoder system. It is a flowchart which shows an example of the manufacturing process of a microdevice.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. The predetermined direction in the horizontal plane is the X-axis direction, the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and the direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, the vertical direction) is the Z-axis direction. To do. Further, the rotation (inclination) directions around the X axis, the Y axis, and the Z axis are the θX, θY, and θZ directions, respectively.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a schematic block diagram that shows an exposure apparatus EX according to the first embodiment. In FIG. 1, an exposure apparatus EX includes a mask holding member 1 that holds a mask M having a pattern MP, a mask driving device 2 that can move the mask holding member 1 that holds the mask M, and a substrate holding that holds a substrate P. Expose the member 3, the substrate driving device 4 that can move the substrate holding member 3 that holds the substrate P, the detection system 5 that can acquire the position information of the mask M and the position information of the substrate P, and the pattern MP of the mask M. An illumination system IL that illuminates with the light EL, a projection optical system PL that projects an image of the pattern MP of the mask M illuminated with the exposure light EL onto the substrate P, and a control device 6 that controls the operation of the entire exposure apparatus EX It has.

  The mask M includes a reticle on which a device pattern to be projected onto the substrate P is formed. In the present embodiment, the mask M is cylindrical. The cylindrical mask M has a central axis J, an outer peripheral surface MF disposed around the central axis J, and side surfaces MS disposed on both sides of the outer peripheral surface MF. In the present embodiment, the pattern MP is formed on the outer peripheral surface MF of the mask M. In the present embodiment, a plurality of patterns MP are formed along the circumferential direction of the outer peripheral surface MF of the mask M. On the outer peripheral surface MF of the mask M, a pattern formation region MA in which a pattern MP is formed is set along the circumferential direction of the outer peripheral surface MF. In the following description, at least a part of the outer peripheral surface MF disposed around the central axis J of the mask M is appropriately referred to as a pattern formation surface MF. In the present embodiment, a reflective mask is used as the mask M.

  The substrate P includes a substrate in which a photosensitive material (photoresist) film is formed on a base material such as a semiconductor wafer. In the present embodiment, the substrate P has a substantially disk shape. The substrate P is held by the substrate holding member 3 so that the surface (exposure surface) and the XY plane are substantially parallel. The substrate P held by the substrate holding member 3 is substantially circular in the XY plane. On the substrate P, a plurality of shot regions S (S1 to S26), which are exposure target regions on which an image of the pattern MP is formed, are provided in a matrix.

  In this embodiment, the mask driving device 2 includes an actuator that can be driven by Lorentz force, such as a voice coil motor and a linear motor, and the mask holding member 1 holding the mask M is connected to the X axis, the Y axis, and the Z axis. , ΘX, θY, and θZ directions are movable in directions of six degrees of freedom.

  Further, in the present embodiment, the substrate driving device 4 includes an actuator that can be driven by Lorentz force, such as a voice coil motor and a linear motor, and the substrate holding member 3 holding the substrate P is connected to the X axis, the Y axis, It is movable in directions of six degrees of freedom in the Z axis, θX, θY, and θZ directions.

  In the present embodiment, the detection system 5 includes the first detection system 5A that can acquire the position information of the mask M, and thus the position information related to the pattern MP (pattern formation area MA), the position information of the substrate P, and the shot area S. And a second detection system 5B capable of acquiring the position information. The first detection system 5 </ b> A includes an encoder system 51 and a focus / leveling detection system 52. The second detection system 5B includes a laser interferometer system 53, a focus / leveling detection system 54, and an alignment system 55.

  In the present embodiment, the first detection system 5A including the encoder system 51 and the focus / leveling detection system 52 includes 6 in the X axis, Y axis, Z axis, θX, θY, and θZ directions of the mask M (pattern MP). Position information in the direction of the degree of freedom can be acquired.

  In the present embodiment, the second detection system 5B including the laser interferometer system 53, the focus / leveling detection system 54, and the alignment system 55 includes the X axis, the Y axis, and the Z axis of the substrate P (shot region S). , ΘX, θY, and θZ directions can be obtained.

  The exposure apparatus EX includes, for example, a body BD including a first column CL1 provided on the floor surface FL in the clean room and a second column CL2 provided on the first column CL1. The first column CL1 includes a plurality of first support columns 11 and a first surface plate 7 supported by the first support columns 11 via a vibration isolator 10. The second column CL2 includes a plurality of second support columns 12 provided on the first surface plate 7, and a second surface plate 8 supported by the second support columns 12 via a vibration isolator 13. .

The illumination system IL illuminates the pattern formation surface MF of the mask M on which the pattern MP is formed with the exposure light EL. The illumination system IL can set a predetermined illumination area IA on the pattern formation surface MF of the mask M, and can irradiate the exposure light EL with a uniform illuminance distribution on the illumination area IA. Illumination system IL includes an optical integrator that equalizes the illuminance of exposure light EL emitted from the light source device, a condenser lens that collects exposure light EL from the optical integrator, a relay lens system, and a field stop that sets illumination area IA. (Blind mechanism). As the exposure light EL emitted from the illumination system IL, for example, far ultraviolet light (DUV light) such as bright lines (g-line, h-line, i-line) and KrF excimer laser light (wavelength 248 nm) emitted from a mercury lamp, Vacuum ultraviolet light (VUV light) such as ArF excimer laser light (wavelength 193 nm) and F ₂ laser light (wavelength 157 nm) is used. In this embodiment, ArF excimer laser light is used.

  The mask holding member 1 holds a cylindrical mask M on which a pattern MP is formed and which has a pattern forming surface MF arranged around the central axis J. The mask driving device 2 is capable of moving the mask holding member 1 holding the mask M in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. The mask holding member 1 and at least a part of the mask driving device 2 that can move the mask holding member 1 are supported on the upper surface of the second surface plate 8. The mask holding member 1 is movable in the direction of 6 degrees of freedom on the second surface plate 8 while holding the mask M.

  The second surface plate 8 has an opening 8K for allowing the exposure light EL to pass therethrough. The exposure light EL emitted from the illumination system IL and illuminating the pattern formation surface MF of the mask M is reflected by the pattern formation surface MF of the mask M, passes through the opening 8K of the second surface plate 2, and then the projection optical system PL. Is incident on.

  In the present embodiment, the mask holding member 1 holds the mask M so that the central axis J of the mask M and the X axis are substantially parallel. Therefore, in a state where the mask M is held by the mask holding member 1, the pattern formation surface MF of the mask M is arranged around an axis substantially parallel to the X axis. The mask driving device 2 can rotate the mask holding member 1 holding the mask M in the θX direction with the central axis J as the rotation axis, and the mask holding member 1 holding the mask M in the direction of 6 degrees of freedom. It is movable. The mask M held by the mask holding member 1 can be rotated at least in the θX direction with the central axis J as the rotation axis by the mask driving device 2.

  The first detection system 5A of the detection system 5 includes positional information of the pattern MP of the mask M in the circumferential direction (θX direction) of the pattern formation surface MF and the position of the pattern MP of the mask M in the central axis J direction (X axis direction). It includes an encoder system 51 that can acquire at least one of information, and a focus / leveling detection system 52 that can acquire position information of the pattern formation surface MF of the mask M in a direction perpendicular to the central axis J (Z-axis direction). The control device 6 drives the mask drive device 2 based on the detection results of the first detection system 5A including the encoder system 51 and the focus / leveling detection system 52, and the position of the mask M held by the mask holding member 1 To control.

  The projection optical system PL projects the image of the pattern MP of the mask M onto the substrate P at a predetermined projection magnification β. The projection optical system PL has a plurality of optical elements, and these optical elements are held by a lens barrel 15. The lens barrel 15 has a flange 15F, and the projection optical system PL is supported by the first surface plate 7 via the flange 15F. Further, a vibration isolator can be provided between the first surface plate 7 and the lens barrel 15. The projection optical system PL of the present embodiment is a reduction system whose projection magnification is, for example, 1/4, 1/5, 1/8 or the like. Further, the projection optical system PL of the present embodiment projects an inverted image of the pattern MP of the mask M onto the substrate P.

  Note that the projection optical system PL may be any of a reduction system, an equal magnification system, and an enlargement system. Further, the projection optical system PL may form either an inverted image or an erect image. The projection optical system PL may be any of a refractive system that does not include a reflective optical element, a reflective system that does not include a refractive optical element, and a catadioptric system that includes a reflective optical element and a refractive optical element.

  The substrate holding member 3 holds a disk-shaped substrate P having a photosensitive material film. The substrate holding member 3 has an adsorption mechanism that adsorbs and holds the substrate P. In the present embodiment, the substrate holding member 3 has a recess 3C, and at least a part of the suction mechanism that sucks and holds the substrate P and the holding surface that holds the back surface of the substrate P are the recess 3C. Is arranged. Further, the upper surface 3F of the substrate holding member 3 other than the recess 3C is a flat surface that is substantially the same height (level) as the surface of the substrate P held by the holding surface (suction mechanism).

  The substrate driving device 4 is capable of moving the substrate holding member 3 holding the substrate P in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. The substrate holding member 3 and at least a part of the substrate driving device 4 capable of moving the substrate holding member 3 are supported on the upper surface of the third surface plate 9. The third surface plate 9 is supported on the floor surface FL via a vibration isolator 14. The substrate holding member 3 is movable in the direction of 6 degrees of freedom on the third surface plate 8 while holding the substrate P.

  In the present embodiment, the substrate holding member 3 holds the substrate P so that the surface (exposure surface) of the substrate P and the XY plane are substantially parallel. The substrate driving device 4 can move the substrate holding member 3 holding the substrate P in at least a predetermined one-dimensional direction. The substrate P held by the substrate holding member 3 can be moved at least in a predetermined one-dimensional direction by the substrate driving device 4.

  The second detection system 5B of the detection system 5 includes a laser interferometer system 53 that can acquire position information of the substrate holding member 3 (and thus the substrate P) that holds the substrate P in the X-axis, Y-axis, and θZ directions, and Z And a focus / leveling detection system 54 capable of acquiring surface position information of the surface of the substrate P held by the substrate holding member 3 in the directions of the axis, θX, and θY. The control device 6 drives the substrate driving device 4 based on the detection results of the second detection system 5B including the laser interferometer system 53 and the focus / leveling detection system 54, and the substrate P held by the substrate holding member 3 is used. Control the position of the.

  In the present embodiment, the exposure apparatus EX includes an off-axis alignment system 55 that detects alignment marks AM and the like formed on the substrate P. At least a part of the alignment system 55 is disposed in the vicinity of the tip of the projection optical system PL. The alignment system 55 of the present embodiment uses broadband detection light that does not expose the photosensitive material on the substrate P as disclosed in, for example, Japanese Patent Laid-Open No. 4-65603 (corresponding US Pat. No. 5,493,403). A target mark (an alignment mark AM or the like formed on the substrate P) is irradiated and an image of the target mark formed on the light receiving surface by reflected light from the target mark and an index (an index provided in the alignment system 55) An FIA (Field Image Alignment) type alignment system is employed in which an image of an index mark on the plate is imaged using an image sensor such as a CCD, and the position of the mark is measured by image processing of these image signals. .

  FIG. 2 is a schematic view showing the exposure apparatus EX of the present embodiment. The exposure apparatus EX of the present embodiment is a scanning exposure apparatus (so-called scanning stepper) that projects an image of the pattern MP of the mask M onto the substrate P while moving the mask M and the substrate P in synchronization with each other in a predetermined scanning direction. It is. In the present embodiment, the scanning direction (synchronous movement direction) of the substrate P is the Y-axis direction, and the scanning direction (synchronous movement direction) of the mask M is the θX direction.

  The exposure apparatus EX uses each of the mask driving device 2 and the substrate driving device 4 to synchronize with the movement (rotation) of the mask M in the θX direction, while moving the substrate P in the Y-axis direction. An image of the pattern MP is projected onto the substrate P via the projection optical system PL. The exposure apparatus EX moves the shot area S of the substrate P in the Y-axis direction with respect to the projection area AR of the projection optical system PL, and in synchronization with the movement of the substrate P in the Y-axis direction, While moving (rotating) the pattern formation surface MF of the mask M with respect to the illumination area IA in the θX direction with the central axis J as the rotation axis, the illumination area IA is illuminated with the exposure light EL and projected through the projection optical system PL. By irradiating the area AR with the exposure light EL, the shot area S on the substrate P is exposed with the image of the pattern MP formed in the projection area AR.

  As described above, in the present embodiment, the projection optical system PL projects an inverted image of the pattern MP of the mask M onto the substrate P. When the image of the pattern MP of the mask M is projected onto the shot region S of the substrate P, the control device 6 synchronizes with the movement of the substrate P in the −Y direction, for example, as indicated by the arrows in FIG. Is rotated in the direction from the Y axis to the Z axis (counterclockwise when the mask M is viewed from the + X direction). In the following description, the direction of rotation in the direction from the Y axis to the Z axis (counterclockwise when the mask M is viewed from the + X direction) is appropriately referred to as a + θX direction, and the opposite direction is appropriately set to a −θX direction. .

  As shown in FIG. 2, in the present embodiment, the illumination system IL includes a reflective optical element 18 disposed between the mask M and the projection optical system PL. In the present embodiment, the illumination system IL is disposed on the light source device side with respect to the reflective optical element 18, and includes a first cylindrical lens 17 that guides the exposure light EL to the reflective optical element 18, and the first cylindrical lens 17. An exposure light EL that is guided to the reflection optical element 18 and reflected by the reflection optical element 18 is incident, and a second cylindrical lens 19 that guides the exposure light EL to the pattern formation surface MF of the mask M is provided.

  The first cylindrical lens 17 corrects the cross-sectional shape of the exposure light EL set by the field stop of the illumination system IL. The reflective optical element 18 reflects the exposure light EL from the first cylindrical lens 17 and changes the direction of the optical path of the exposure light EL. The second cylindrical lens 19 corrects the cross-sectional shape of the exposure light EL from the reflective optical element 18.

  In the present embodiment, the illumination system IL including the first cylindrical lens 17 and the second cylindrical lens 19 has a slit shape (rectangular shape) in which the illumination area IA on the pattern formation surface MF of the mask M is a longitudinal direction in the X-axis direction. Shape). In the present embodiment, the illumination system IL illuminates the lowermost part BT of the pattern formation surface MF of the cylindrical mask M with the exposure light EL.

  As described above, in the present embodiment, a reflective mask is used as the mask M. The exposure light EL irradiated to the pattern formation surface MF by the illumination system IL and reflected by the pattern formation surface MF is irradiated onto the substrate P through the projection optical system PL. An image of the pattern MP of the mask M is formed on the substrate P through the projection optical system PL. The control device 6 uses the mask driving device 2 to rotate the mask M about the central axis J as a rotation axis in order to project the image of the pattern MP of the mask M onto the substrate P and expose the substrate P. The pattern forming surface MF of the mask M is irradiated with the exposure light EL using the illumination system IL.

  Next, the mask M will be described. 3 is a perspective view showing the mask M, FIG. 4A is a schematic view of the pattern formation surface MF of the mask M, and FIG. 4B is a development of the pattern formation surface MF of the mask M on the XY plane. FIG.

  As shown in FIG. 3, the mask M is cylindrical. The mask M has a pattern formation surface MF on which a pattern MP is formed and is arranged around the central axis J. In FIG. 3, the central axis J is parallel to the X axis. The mask M can be rotated in the θX direction with the central axis J as a rotation axis by driving the mask driving device 2.

  The cylindrical mask M includes an internal space MK and openings MKa formed on both sides (+ X side and −X side) of the internal space MK so as to connect the internal space MK and the external space. The cylindrical mask M has side surfaces MS on both sides of the pattern formation surface MF. The side surface MS of the mask M is substantially annular in the YZ plane, and is arranged so as to surround the opening MKa. In FIG. 3, the side surface MS of the mask M is substantially parallel to the YZ plane. In the present embodiment, since the mask M has a hollow structure having the internal space MK, the weight of the mask M can be reduced.

  A plurality of patterns MP are formed along the circumferential direction of the pattern formation surface MF. The pattern formation surface MF of the mask M is provided with a plurality of pattern formation regions MA where the pattern MP is formed along the circumferential direction of the pattern formation surface MF. A pattern MP to be projected onto the substrate P is formed in each of the plurality of pattern formation areas MA.

  When the pattern formation surface MF is developed on the XY plane, the shape of the pattern MP formed on the pattern formation surface MF is the shape of the image of the pattern MP formed on the substrate P via the projection optical system PL. Is similar. In the present embodiment, as an example, the pattern MP having the shape of the letter “F” is formed in the pattern formation region MA.

  Further, as shown in FIG. 4B, in the present embodiment, the illumination area IA of the illumination system IL is set in a slit shape with the X-axis direction as the longitudinal direction.

  For the mask M, a predetermined pattern MP is formed on a cylindrical substrate made of a glass material such as quartz or ceramics (low expansion ceramics) using a metal film made of, for example, chromium (Cr). Is.

  In the present embodiment, the outside of the pattern formation region MA on one end side (+ X side) and the other end side (−X side) in the central axis J direction (X-axis direction) of the pattern formation surface MF of the mask M. The mark forming area MB in which marks detected by the detection system 5 are formed is arranged. Note that the marks are not shown in FIGS. 3 and 4 for easy viewing of the drawings.

  As shown in FIG. 3, the mask M includes a pellicle 100 formed in a cylindrical shape so as to cover the pattern formation surface MF, and a support member (pellicle frame) 101 that supports the pellicle 100. The support member 101 has a central axis J in a predetermined region outside the mark formation region MB on one end side and the other end side in the central axis J direction (X-axis direction) of the pattern formation surface (outer peripheral surface) MF of the mask M. Is formed along the circumferential direction of the pattern forming surface (outer peripheral surface) MF. The pellicle 100 supported by the support member 101 is separated from the pattern formation surface MF of the mask M.

  In the present embodiment, the support member 101 is an annular member. The support member 101 is formed of a material having flexibility (flexibility) such as polytetrafluoroethylene, and can be favorably connected to the pattern forming surface MF that is a curved surface. The support member 101 has a pattern formation surface MF of the mask M in a predetermined region outside the mark formation region MB on one end side and the other end side in the central axis J direction (X-axis direction) of the pattern formation surface MF of the mask M. It is connected to the.

  In the present embodiment, since the pellicle 100 is provided so as to cover the pattern formation surface MF, adhesion of foreign matters to the pattern formation surface MF can be suppressed and the pattern formation surface MF can be protected.

  FIG. 5 is a plan view of the substrate holding member 3. As shown in FIG. 5, on the substrate P, a plurality of shot areas S (S1 to S26) that are exposure target areas are provided in a matrix and correspond to each of the shot areas S1 to S26. A plurality of alignment marks AM are provided. As shown in FIG. 5, in the present embodiment, the projection area AR of the projection optical system PL is set in a slit shape with the X-axis direction as the longitudinal direction. The substrate P has a substantially circular shape in the XY plane.

  When exposing each of the shot areas S1 to S26 of the substrate P, the control device 6 relatively moves the projection area AR of the projection optical system PL and the substrate P as shown by an arrow y1 in FIG. Meanwhile, the exposure light EL is irradiated onto the substrate P by irradiating the projection area AR with the exposure light EL. The control device 6 controls the operation of the substrate holding member 3 by using the substrate driving device 4 so that the projection area AR moves along the arrow y1 with respect to the substrate P.

  A reference mark FM detected by the alignment system 55 is formed at a predetermined position on the upper surface of the substrate holding member 3. An opening 56K is formed at a predetermined position with respect to the reference mark FM on the upper surface of the substrate holding member 3 that can be disposed on the image plane side (light emission surface side) of the projection optical system PL. At least a part of the light receiving device 56 capable of receiving light through the projection optical system PL and the opening 56K is disposed below the opening 56K (−Z direction). In the present embodiment, the light receiving device 56 includes an aerial image measuring device as disclosed in, for example, Japanese Patent Application Laid-Open No. 2002-14005 (corresponding US Patent Application Publication No. 2002/0041377).

In the present embodiment, the diameter of the mask M on the pattern formation surface MF is D, the maximum length of the substrate P in the scanning direction of the substrate P (the Y-axis direction in the present embodiment) is L, and the projection of the projection optical system PL When the magnification is β and the circumference is π,
D ≧ (β × L) / π (1)
The conditions are satisfied. In the present embodiment, the diameter D of the mask M on the pattern formation surface MF is set according to the maximum length L of the substrate P and the projection magnification β of the projection optical system PL so as to satisfy the condition of the expression (1). It has been established.

  Here, as described above, in the present embodiment, the substrate P has a substantially circular shape in the XY plane. In the present embodiment, the maximum length L of the substrate P in the scanning direction (Y-axis direction) of the substrate P is the diameter of the substrate P.

  As shown in FIG. 5, a plurality of shot regions S on which an image of the pattern MP of the mask M is projected are provided on the substrate P at least along the scanning direction (Y-axis direction) of the substrate P. Yes. The pattern MP of the mask M is formed by the maximum number of the shot regions S in at least the scanning direction (Y-axis direction) of the substrate P along the circumferential direction of the pattern forming surface MF.

  In the present embodiment, as shown in FIG. 5, four shot regions S1 to S4 are provided along the Y-axis direction, six shot regions S5 to S10 are provided along the Y-axis direction, The shot areas S11 to S16 are provided along the Y-axis direction, the six shot areas S17 to S22 are provided along the Y-axis direction, and the four shot areas S23 to S26 are provided along the Y-axis direction. . Therefore, in the present embodiment, the maximum number of shot areas S in the Y-axis direction is 6. Then, six pattern formation areas MA on which the pattern MP of the mask M is formed are formed along the circumferential direction of the pattern formation surface MF.

  Next, the mask holding member 1 and the mask driving device 2 will be described. FIG. 6 is a side sectional view of the vicinity of the mask holding member 1 and the mask driving device 2. In FIG. 6, the exposure apparatus EX includes a mask holding member 1 that holds a mask M, and a mask driving device 2 that can move the mask holding member 1 that holds the mask M. At least a part of the mask holding member 1 and the mask driving device 2 is provided on the second surface plate 8.

  In addition, the exposure apparatus EX includes a shaft member 20 that rotatably supports the mask holding member 1 that holds the mask M about the central axis J as a rotation axis, and a support member 21 that rotatably supports the shaft member 20. ing. The support member 21 is a substantially cylindrical member.

  The mask holding member 1 has a hole 16 for arranging at least a part of the shaft member 20. The hole 16 has an opening 16Ka on at least the −X side. In the present embodiment, the hole 16 is formed so as to penetrate a part of the mask holding member 1 in the X-axis direction, and openings 16Ka and 16Kb are formed on both sides (+ X side and −X side) of the hole 16, respectively. Has been.

The mask holding member 1 is disposed on one end side (+ X side) of the shaft member 20. Further, the exposure apparatus EX has a weight member 22 disposed on the other end side (−X side) of the shaft member 20. The weight member 22 is connected to the other end of the shaft member 20. The shaft member 20 and the weight member 22 are integral.
A support member 21 that rotatably supports the shaft member 20 is disposed between the mask holding member 1 and the weight member 22. The support member 21 is supported on the upper surface of the base member 23. The support member 21 is connected to the upper surface of the base member 23. The support member 21 and the base member 23 are integral. The base member 23 that supports the support member 21 is supported on the upper surface of the second surface plate 8 via the vibration isolator 24. The vibration isolator 24 can suppress vibration associated with the movement of the mask holding member 1. The vibration isolator 24 includes an actuator that can be driven by a Lorentz force and a damper mechanism such as an air mount.

  The mask holding member 1 detachably holds a side surface MS of a cylindrical mask M on which a pattern MP is formed and has a pattern forming surface MF arranged around the central axis J. The mask holding member 1 has a suction mechanism 25 that can suck the side surface MS of the mask M.

  The mask holding member 1 is disposed so as to face the side surface MS of the −X side mask M, and includes a holding surface 26 that detachably holds the −X side side surface MS of the mask M. The suction mechanism 25 can suck the side surface MS of the mask M to the holding surface 26. The holding surface 26 of the mask holding member 1 includes a first surface 27 </ b> A of a base material 27 to be described later, an end surface of the pin member 29, an end surface of the first peripheral wall member 30, and an end surface of the second peripheral wall member 31.

  7A and 7B are diagrams showing the mask holding member 1. FIG. 7A is a cross-sectional view parallel to the XZ plane of the mask holding member 1, and FIG. 7B shows the mask holding member 1 from the + X side. FIG. The mask holding member 1 is formed on the base material 27, the pin member 29 that is formed on the base material 27 and can support the side surface MS of the mask M, and the outer edge region of the side surface MS of the mask M that is formed on the base material 27. On the base material 27, a first peripheral wall member 30 that can be opposed, a second circumferential wall member 31 that is formed on the base material 27 and can face the inner edge region (region in the vicinity of the opening MKa) of the side surface MS of the mask M. A suction port 32 formed and capable of sucking gas is provided.

  The base material 27 of the mask holding member 1 has a shape corresponding to the mask M. As described above, in the present embodiment, the side surface MS of the mask M is substantially annular in the YZ plane. The first surface 27A of the base material 27 that can face the side surface MS of the mask M is formed in a substantially annular shape in the YZ plane so as to correspond to the side surface MS of the mask M. In the present embodiment, the first surface 27A of the base material 27 faces the + X side. The holding surface 26 is disposed on the first surface 27 </ b> A side of the base material 27.

  Further, in the present embodiment, the mask holding member 1 has a protruding portion 28 formed so as to protrude to the + X side from the holding surface 26. The protruding portion 28 is connected to the central portion of the base material 27 in the YZ plane. The hole 16 for arranging the shaft member 20 is formed so as to penetrate the base material 27 and the protrusion 28 in the X-axis direction. At least a part of the protruding portion 28 can be disposed in the internal space MK of the mask M held on the holding surface 26.

  The first peripheral wall member 30 is formed in the outer edge region of the first surface 27 </ b> A of the base material 27. The first peripheral wall member 30 is formed in a substantially annular shape according to the outer shape of the side surface MS of the mask M. The first peripheral wall member 30 has an outer diameter slightly smaller than the outer diameter of the side surface MS of the mask M. The first peripheral wall member 30 has an end surface that can face the outer edge region of the side surface MS of the mask M held by the mask holding member 1. The end surface of the first peripheral wall member 30 is flat and has a predetermined width.

  The second peripheral wall member 31 is formed in the inner edge region of the first surface 27 </ b> A of the base material 27. The second peripheral wall member 31 is formed in a substantially annular shape according to the opening MKa on the side surface MS of the mask M. The second peripheral wall member 31 has an outer diameter that is slightly larger than the outer diameter of the opening MKa surrounded by the side surface MS of the mask M. The second peripheral wall member 31 has an end surface that can face the inner edge region of the side surface MS of the mask M held by the mask holding member 1. The end surface of the second peripheral wall member 31 is flat and has a predetermined width.

  A plurality of pin members 29 are formed on the first surface 27 </ b> A of the base material 27. The first peripheral wall member 30 is disposed so as to surround the second peripheral wall member 31, and the pin member 29 is on the first surface 27 </ b> A of the base material 27 between the first peripheral wall member 30 and the second peripheral wall member 31. A plurality of them are arranged uniformly. Each of the pin members 29 has an end surface that can face the side surface MS of the mask M. The end surface of the pin member 29 is flat. Each of the end surfaces of the plurality of pin members 29 is provided at substantially the same position in the X-axis direction.

  In the present embodiment, the end face of the pin member 29, the end face of the first peripheral wall member 30, and the end face of the second peripheral wall member 31 are provided at substantially the same position in the X-axis direction. That is, the end surfaces of the plurality of pin members 29, the end surfaces of the first peripheral wall member 30, and the end surfaces of the second peripheral wall member 31 are located on substantially the same plane (on the YZ plane) and are flush with each other. The end surface of the pin member 29, the end surface of the first peripheral wall member 30, and the end surface of the second peripheral wall member 31 can contact the side surface MS of the mask M. As shown in FIG. 6, the end face of the pin member 29, the end face of the first peripheral wall member 30, and the end face of the second peripheral wall member 31 are in contact with the side surface MS of the mask M, so that the −X side of the mask M A space 33 surrounded by the side surface MS of the mask M, the first peripheral wall member 30, the second peripheral wall member 31, and the base material 27 is formed.

  The suction port 32 is for sucking and holding the mask M. The suction port 32 is formed at each of a plurality of predetermined positions on the first surface 27 </ b> A of the base material 27 between the first peripheral wall member 30 and the second peripheral wall member 31. The suction ports 32 are respectively provided at a plurality of predetermined positions other than the pin member 29 on the first surface 27 </ b> A of the base material 27.

The suction mechanism 25 capable of sucking the side surface MS of the mask M includes a suction port 32 formed on the first surface 27A of the base material 27, and a suction device including a vacuum system capable of sucking gas through the suction port 32. 34. As shown in FIG. 7A, the suction device 34 is provided outside the mask holding member 1, and each of the suction ports 32 is connected to the suction device 34 via a flow path 35.
At least a part of the flow path 35 connecting each of the suction ports 32 and the suction device 34 is formed inside the base material 27.

  The suction device 34 can generate a negative pressure in the space 33 surrounded by the side surface MS of the mask M, the first peripheral wall member 30, the second peripheral wall member 31, and the base material 27. That is, the suction device 34 can reduce the pressure in the space 33 to be lower than the pressure in the space outside the space 33 (for example, atmospheric pressure) by sucking the gas in the space 33 through the suction port 32. In the present embodiment, the mask holding member 1 has a pin member 29 and has a so-called pin chuck mechanism.

  The control device 6 drives the suction device 34 of the suction mechanism 25, sucks the gas in the space 33, and makes the space 33 have a negative pressure, whereby the mask M is placed on the end surface of the pin member 29, the first peripheral wall member. It adsorbs | sucks and hold | maintains at the holding surface 26 including the end surface of 30 and the end surface of the 2nd surrounding wall member 31.

  In addition, the control device 6 can release the mask M from the holding surface 26 by controlling the suction mechanism 25 including the suction device 34 to release the suction of the mask M by the suction mechanism 25.

  As described above, in the present embodiment, the control device 6 controls the suction mechanism 25 provided on the mask holding member 1 to attach the mask M to the holding surface 26 of the mask holding member 1 or attach the mask M to the mask M. It can be removed from the holding surface 26 of the mask holding member 1.

  In the present embodiment, the suction mechanism 25 includes a vacuum suction mechanism that vacuum-sucks the mask M, but may include an electrostatic suction mechanism that uses electrostatic force. The mask holding member 1 can hold the mask M so as to be detachable also by the electrostatic adsorption mechanism.

  As shown in FIG. 6, at least a part of the shaft member 20 can be disposed in the hole (internal space) 16 of the mask holding member 1. The + X side end of the shaft member 20 is disposed on the + X side with respect to the holding surface 26 of the mask holding member 1. Further, the outer surface of the shaft member 20 and the inner surface of the hole 16 of the mask holding member 1 (projecting portion 28) face each other. In the mask holding member 1, at least a part of the shaft member 20 and the mask holding member 1 (projecting portion 28) disposed on the + X side of the holding surface 26 is inside the mask M held on the holding surface 26. It can be arranged in the space MK.

  In the present embodiment, the mask M held on the holding surface 26 of the mask holding member 1 and the mask holding member 1 (projecting portion 28) and the shaft member 20 arranged in the internal space MK of the mask M are as follows. is seperated.

  As shown in FIG. 6, the exposure apparatus EX includes a first gas bearing 36 formed between the mask holding member 1 and the shaft member 20, and a second gas formed between the shaft member 20 and the support member 21. A gas bearing 37 and a third gas bearing 38 are provided.

  As described above, the mask holding member 1 including the protruding portion 28 has an inner surface facing the outer surface of the shaft member 20. The hole 16 is circular in the XY plane, and at least a portion of the shaft member 20 disposed inside the hole 16 is also circular in the XY plane. Of the shaft member 20, the outer diameter of the portion disposed inside the hole 16 is slightly smaller than the inner diameter of the hole 16. A predetermined gap (first gap) G <b> 1 is formed between the inner surface of the mask holding member 1 and the outer surface of the shaft member 20.

  The first gas bearing 36 is formed between the inner surface of the mask holding member 1 and the outer surface of the shaft member 20. The mask holding member 1 is supported in a non-contact manner with respect to the shaft member 20 by the first gas bearing 36. By the first gas bearing 36, the distance (first gap) G1 between the inner surface of the mask holding member 1 and the outer surface of the shaft member 20 is maintained substantially constant. The shaft member 20 supports the mask holding member 1 so as to be rotatable about the central axis J as a rotation axis.

  In the present embodiment, the first gap G1 is maintained substantially constant by the first gas bearing 36, and the movement of the mask holding member 1 relative to the shaft member 20 in the Y axis, Z axis, θY, and θZ directions is restricted. Is done. The mask holding member 1 can move only in the X-axis and θX directions with respect to the shaft member 20.

  The support member 21 is a substantially cylindrical member. The support member 21 has a hole (internal space) 39 in which at least a part of the shaft member 20 can be disposed. The hole 39 is formed so as to penetrate the support member 21 in the X-axis direction. At least a part of the shaft member 20 is disposed inside the hole 39 of the cylindrical support member 21.

  The support member 21 has an inner surface that faces the outer surface of the shaft member 20. The hole 39 is circular in the XY plane, and at least a portion of the shaft member 20 disposed inside the hole 39 is also circular in the XY plane. The outer diameter of the portion of the shaft member 20 disposed inside the hole 39 is slightly smaller than the inner diameter of the hole 39. A predetermined gap (second gap) G <b> 2 is formed between the inner surface of the support member 21 and the outer surface of the shaft member 20.

  The second gas bearing 37 is formed between the inner surface of the support member 21 and the outer surface of the shaft member 20. The shaft member 20 is supported in a non-contact manner with respect to the support member 21 by the second gas bearing 37. By the second gas bearing 37, the distance (second gap) G2 between the inner surface of the support member 21 and the outer surface of the shaft member 20 is maintained substantially constant. The support member 21 supports the shaft member 20 to be rotatable about the central axis J as a rotation axis.

  The support member 21 has a first side surface 21A facing the + X side and a second side surface 21B facing the −X side. Each of the first side surface 21A and the second side surface 21B is flat. The shaft member 20 has a first flange 41 having a facing surface 41A facing the first side surface 21A on the + X side of the support member 21, and a facing surface 42A facing the second side surface 21B on the −X side of the support member 21. And a second flange 42. Each of the first side surface 21A, the second side surface 21B, the facing surface 41A, and the facing surface 42A is substantially parallel to the YZ plane. The distance between the first side surface 21A and the second side surface 21B in the X-axis direction is slightly smaller than the distance between the facing surface 41A of the first flange 41 and the facing surface 42A of the second flange 42 in the X-axis direction. A predetermined gap (third gap) G3 is formed between the first side surface 21A and the opposed surface 41A, and a predetermined gap (fourth gap) G4 is formed between the second side surface 21B and the opposed surface 42A. Is formed.

  The third gas bearing 38 is between the first side surface 21A of the support member 21 and the facing surface 41A of the first flange 41, and between the second side surface 21B of the support member 21 and the facing surface 42A of the second flange 42. Each is formed. The third gas bearing 38 maintains a substantially constant distance (third gap) G3 between the first side surface 21A of the support member 21 and the facing surface 41A of the first flange 41, and the second side surface 21B of the support member 21. And a distance (fourth gap) G4 between the second flange 42 and the facing surface 42A of the second flange 42 are maintained substantially constant.

  In the present embodiment, each of the second gap G2, the third gap G3, and the fourth gap G4 is maintained substantially constant by the second gas bearing 37 and the third gas bearing 38. In the present embodiment, the second gas bearing 37 and the third gas bearing 38 restrict the movement of the shaft member 20 with respect to the support member 21 in the X axis, Y axis, Z axis, θY, and θZ directions. The shaft member 20 is movable (rotatable) only in the θX direction with respect to the support member 21.

  As described above, in the present embodiment, the exposure apparatus EX is capable of rotating in the θX direction with the mask holding member 1 holding the mask M about the central axis J as the rotation axis, and holding the mask M. 1 is provided with a mask driving device 2 capable of moving 1 in the direction of 6 degrees of freedom. The mask drive device 2 includes a first drive mechanism 61 that can move the mask holding member 1 at least in the rotational direction (θX direction), and a second drive mechanism 62 that can move the shaft member 20 in a predetermined direction.

  The first drive mechanism 61 includes a mover 61A attached to the mask holding member 1 side and a stator 61B attached to the shaft member 20 side, and the mask holding member 1 is at least in the rotational direction (θX direction). Moving. The first drive mechanism 61 includes a rotary motor that is driven by Lorentz force. In the present embodiment, the mover 61A of the first drive mechanism 61 has a magnet unit, and the stator 61B has a coil unit.

  In the present embodiment, the mover 61 </ b> A is attached to the second surface 27 </ b> B of the base material 27 of the mask holding member 1. The second surface 27B of the base material 27 is a surface opposite to the first surface 27A and faces the −X side. In the present embodiment, the shaft member 20 has a third flange 43 having a facing surface 43 </ b> A that faces the second surface 27 </ b> B of the base material 27, and the stator 61 </ b> B faces the third flange 43. It is attached to the surface 43A. Each of the second surface 27B and the facing surface 43A is substantially parallel to the YZ plane. A predetermined gap (fifth gap) G5 is formed between the second surface 27B and the facing surface 43A.

  The stator 61B includes a plurality of coils (coil arrays) arranged on the facing surface 43A so as to surround the central axis J. The mover 61A includes a plurality of magnets (magnet rows) arranged on the second surface 27B so as to surround the central axis L so that the polarity alternately changes in the same direction as the coil arrangement direction.

  The control device 6 supplies sinusoidal three-phase alternating current to the plurality of coils of the stator 61B. Thereby, a thrust is generated in the coil arrangement direction, that is, in the rotation direction (θX direction) around the central axis J. The control device 6 continuously changes the relative position between the coil array and the magnet array along the coil arrangement direction by switching the coil that supplies the three-phase alternating current according to the relative position between the coil array and the magnet array. Can be made. The magnetic field formed by the magnet array of the mover 61B changes in a sinusoidal shape with the coil array period along the coil array direction, so that when a three-phase alternating current is applied to the coil array, a constant thrust is generated in the coil array direction. Occur.

  The control device 6 can rotate the mask holding member 1 in the rotation direction (θX direction) around the central axis J by controlling the first drive mechanism 61 including the mover 61A and the stator 61B. Further, the control device 6 can adjust the distance between the mover 61A and the stator 61B in the X-axis direction by controlling the first drive mechanism 61. The control device 6 adjusts the power supplied to the coil of the stator 61B, for example, thereby adjusting the X between the facing surface 43A of the third flange 43 of the shaft member 20 and the second surface 27B of the base material 27 of the mask holding member 1. An interval (fifth gap) G5 in the axial direction can be adjusted.

  That is, the control device 6 can move the mask holding member 1 (base material 27) in the X-axis direction with respect to the shaft member 20 (third flange 43) by controlling the first drive mechanism 61. The position of the mask holding member 1 with respect to the shaft member 20 in the X-axis direction can be adjusted.

  As described above, in the present embodiment, the first drive mechanism 61 of the mask drive device 2 can move the mask holding member 1 that holds the mask M in the rotational direction (θX direction) around the central axis J. It can move in the central axis J direction (X-axis direction).

  The second drive mechanism 62 includes a mover 62A attached to the base member 23 (support member 21) side and a stator 62B attached to the second surface plate 8 side. The base member 23 and the base member thereof. The support member 21 integrated with the head 23 can be moved in a predetermined direction. The second drive mechanism 62 includes a voice coil motor that is driven by Lorentz force. In the present embodiment, the mover 62A of the second drive mechanism 62 has a magnet unit, and the stator 62B has a coil unit.

  In the present embodiment, the mover 62 </ b> A is attached to each of a plurality of predetermined positions of the base member 23. The stator 62B is attached to each of a plurality of predetermined positions of the second surface plate 8 so as to correspond to the mover 62A. In the present embodiment, the mover 62A is attached to each of at least six locations of the base member 23, and the stator 62B is each of the six locations of the second surface plate 8 so as to correspond to each of the movers 62A. Is attached. In FIG. 6, two movers 62A and two stators 62B corresponding to the movers 62A are shown, and the remaining movers 62A and stators 62B are not shown.

  The control device 6 controls the second drive mechanism 62 including the plurality of movers 62A and the stator 62B, thereby causing the base member 23 and the support member 21 integrated with the base member 23 to move along the X axis, the Y axis, and the Z axis. It can move in directions of six degrees of freedom in the axis, θX, θY, and θZ directions.

  Further, as described above, the shaft member 20 is movable (rotatable) only in the θZ direction with respect to the support member 21, and the shaft with respect to the support member 21 is supported by the second gas bearing 37 and the third gas bearing 38. Movement of the member 20 in the X axis, Y axis, Z axis, θY, and θZ directions is restricted. Therefore, as the base member 23 and the support member 21 move in the X axis, Y axis, Z axis, θY, and θZ directions, the shaft member 20 also moves in the X axis, Y axis, Z axis, θY, and θZ directions. Move to. In other words, the shaft member 20 and the support member 21 (base member 23) move together in the X axis, Y axis, Z axis, θY, and θZ directions.

  The second drive mechanism 62 can move the support member 21 in the predetermined direction together with the shaft member 20 by moving the support member 21 in the predetermined direction. Therefore, the control device 6 controls the second drive mechanism 62 to move the support member 21, thereby moving the shaft member 20 together with the support member 21 in a direction other than the θX direction, that is, the X axis, the Y axis, It can move in the Z-axis, θY, and θZ directions.

  Further, as described above, the mask holding member 1 can move only in the X-axis and θX directions with respect to the shaft member 20, and the first gas bearing 36 allows the Y of the mask holding member 1 relative to the shaft member 20. Movement in the direction of the axis, Z axis, θY, and θZ is restricted. Accordingly, as the shaft member 20 moves in the Y axis, Z axis, θY, and θZ directions, the mask holding member 1 also moves in the Y axis, Z axis, θY, and θZ directions. In other words, the mask holding member 1 and the shaft member 20 move together with respect to the Y-axis, Z-axis, θY, and θZ directions.

  Therefore, the second drive mechanism 62 moves the support member 21 together with the shaft member 20 in the Y-axis, Z-axis, θY, and θZ directions, thereby moving the mask holding member 1 together with the shaft member 20 to the Y-axis, It can move in the Z-axis, θY, and θZ directions. Further, the control device 6 adjusts the fifth gap G5 using the first drive mechanism 61 (for example, while maintaining it at a constant value), and uses the second drive mechanism 62 to move the support member 21 together with the shaft member 20. The mask holding member 1 and the shaft member 20 can be moved together in the X axis, Y axis, Z axis, θY, and θZ directions.

  Then, the control device 6 controls the mask drive device 2 including the first drive mechanism 61 and the second drive mechanism 62, so that the mask holding member 1 that holds the mask M is moved to the X axis, Y axis, Z axis, and θX. , ΘY, and θZ directions are movable in directions of six degrees of freedom. The control device 6 can adjust the position of the mask holding member 1 in the direction of six degrees of freedom by controlling the mask driving device 2, and the mask M held by the mask holding member 1 and eventually the pattern MP 6. The position in the direction of freedom can be adjusted.

  In this embodiment, the mask drive device 2 has a coil unit and a magnet unit that are driven by Lorentz force, and the coil unit and the magnet unit are driven in a non-contact state. Thereby, generation | occurrence | production of the vibration by the mask drive device 2 which moves the mask holding member 1 is suppressed.

  In the present embodiment, the exposure apparatus EX includes a vibration isolator 24 that suppresses vibrations associated with movement of the mask holding member 1, and vibrations associated with movement of the mask holding member 1 are suppressed by the vibration isolator 24. Is done. In the present embodiment, the vibration isolator 24 includes at least a part of the second drive mechanism 62 having an actuator that can be driven by Lorentz force, and a damper mechanism such as an air mount. As described above, the second drive mechanism 62 includes a plurality of actuators that can adjust the position of the base member 23 (support member 21) in the direction of six degrees of freedom, and an acceleration sensor (or displacement sensor) (not shown). By driving the actuator based on this detection result, it is possible to suppress vibration associated with movement of the mask holding member 1 in a predetermined direction (direction of 6 degrees of freedom). For example, the control device 6 detects the acceleration (or displacement) of the second surface plate 8 with an acceleration sensor (or displacement sensor), and the second surface plate 8 accompanying the movement of the mask holding member 1 based on the detection result. The vibration isolator 24 is controlled so as to suppress the vibration. Thereby, the control apparatus 6 can suppress excitation of the natural frequency of the body BD, the projection optical system PL, etc., and can suppress vibration.

  In the present embodiment, the vibration isolator 24 includes a counter mass 46 that absorbs the reaction force of the inertial force accompanying the rotation of the mask holding member 1 in the θX direction. In the present embodiment, the counter mass 46 includes the shaft member 20 and the weight member 22 connected to the shaft member 20.

  The counter mass 46 including the shaft member 20 rotates in the opposite direction to the mask M according to the momentum storage side by the reaction force of the inertial force accompanying the rotation of the mask M. For example, when the mask holding member 1 holding the mask M is rotated in the + θX direction by driving by the first driving mechanism 61 of the mask driving device 2, the shaft member 20 in a non-contact state with respect to the mask holding member 1 is moved. The included counter mass 46 rotates in the −θX direction. Thereby, the vibration excited at the time of rotation of the mask holding member 1 and the mask M can be suppressed.

  For example, when the first driving mechanism 61 is driven in order to rotate the mask holding member 1 holding the mask M, the counter mass 46 is masked by the amount obtained by dividing the applied impulse by the mass of the counter mass 46. M and the mask holding member 1 rotate in the direction opposite to the rotation direction. By the movement (rotation) of the counter mass 46, the posture for moving (rotating) the mask holding member 1 holding the mask M or after moving (after rotation) of the mask holding member 1 holding the mask M is maintained. Therefore, the reaction force accompanying the drive for canceling out is canceled. Due to the action of the counter mass 46, the vibration generated by rotating the mask holding member 1 holding the mask M is absorbed, and it is possible to suppress the vibration from being transmitted to the second surface plate 8.

  In the present embodiment, a driving force is generated by the physical interaction (electromagnetic interaction) between the mover 61A and the stator 61B of the first drive mechanism 61, and the mover 61A and the stator 61B cooperate with each other. To generate driving force. In the present embodiment, the stator 61B slightly moves in the opposite direction to the mover 61A by Lorentz force (electromagnetic force). In the present embodiment, a member having a larger relative movement amount is referred to as a mover, and a member having a smaller relative movement amount is referred to as a stator.

  In the present embodiment, the exposure apparatus EX includes a holding mechanism 47 that holds the counter mass 46 so as to be displaceable by a predetermined amount. The holding mechanism 47 holds the counter mass 46 so as to be displaceable (rotatable) by a predetermined amount, and suppresses the rotation of the counter mass 46 by a predetermined amount or more. In addition, the holding mechanism 47 including the actuator can adjust the position of the counter mass 47.

  In the present embodiment, the holding mechanism 47 includes an actuator such as a voice coil motor that is driven by a Lorentz force. Specifically, the holding mechanism 47 includes a mover 47A including a magnet unit attached to the shaft member 20 side, and a stator 47B including a coil unit attached to the second surface plate 8 side. The holding mechanism 47 includes a so-called trim motor.

  In the present embodiment, the shaft member 20 has a fourth flange 44 formed between the second flange 42 and the weight member 22, and the mover 47 </ b> A faces the upper surface of the second surface plate 8. Attached to the lower surface of the fourth flange 44. The stator 47B is attached to a predetermined position on the upper surface of the second surface plate 8 so as to correspond to the mover 47A. A holding mechanism 47 including a voice coil motor having a mover 47A and a stator 47B is capable of moving (rotatable) the counter mass 46 including the shaft member 20 in the θX direction. That is, when electric power is supplied to the coil unit of the stator 47B, a driving force in the θX direction acts on the mover 47A attached to the fourth flange 44.

  As described above, the counter mass 46 moves (rotates) in the opposite direction with respect to the θX direction by the reaction force accompanying the rotation of the mask holding member 1 holding the mask M. Here, for example, depending on the scanning exposure conditions, there is a possibility that the mask holding member 1 continues to move only in the + θX direction. In this case, the counter mass 46 is greatly increased in the −θX direction from the reference position (initial position, neutral position). It may rotate and its position may shift greatly.

  When the position of the shaft member 20 of the counter mass 46 in the θX direction is greatly deviated, for example, the controllability of the actuator (voice coil motor) of the first drive mechanism 61 attached to a part of the shaft member 20 is deteriorated. May affect the controllability.

  Therefore, the control device 6 determines that the relative position in the θX direction between the counter mass 46 and the support member 21 (or the mask holding member 1) is an allowable value when the counter mass 46 rotates more than a predetermined amount from the reference position. When deviated as described above, the voice coil motor of the holding mechanism 47 is driven, and the position of the counter mass 46 including the shaft member 20 is adjusted (corrected) so as to return to the reference position, for example. Here, the driving of the voice coil motor of the holding mechanism 47 is, for example, an exposure operation such as when the substrate is exchanged, between the time after the first shot area is exposed and before the next second shot area is exposed. It can be executed at a predetermined timing other than inside.

  Further, in the present embodiment, the holding mechanism 47 applies a driving force so that the counter mass 46 can be displaced by a predetermined amount even during scanning exposure (during rotation of the mask holding member 1 by the first driving mechanism 61). Occurs and the counter mass 46 is held soft. In other words, the holding mechanism 47 softly holds the counter mass 46 within a range in which rotation of the counter mass 46 by a predetermined amount or more can be suppressed even during rotation of the mask holding member 1 by the first drive mechanism 61. As shown, the driving force is generated.

  When the holding mechanism 47 is not provided and the counter mass 46 is rotatable in the θX direction, the thrust control of the mask holding member 1 in the θX direction by the actuator of the first drive mechanism 61 may not be performed satisfactorily. .

  Therefore, in this embodiment, the holding mechanism 46 softly holds the counter mass 46 within a range in which the counter mass 46 can be displaced by a predetermined amount even during scanning exposure (during rotation of the mask holding member 1 by the first drive mechanism 61). Therefore, the occurrence of the above-described problems is suppressed.

  In some cases, the position of the counter mass 46 including the shaft member 20 in the θX direction may be placed at the reference position at the start of scanning exposure or calibration operation. In such a case, the control device 6 can adjust the position of the counter mass 46 in the θX direction using the actuator of the holding mechanism 47.

  Next, the exchange system 64 for exchanging the mask M will be described. FIG. 8 is a diagram showing an exchange system 64 for exchanging the mask M. In FIG. 8, the exposure apparatus EX includes an exchange system 64 for exchanging the mask M with respect to the mask holding member 1. As described above, the mask holding member 1 holds the mask M in a detachable manner, and the control device 6 can exchange the mask M with respect to the mask holding member 1 using the exchange system 64.

  The exchange system 64 is provided in the mask holding member 1 and sucks the mask M so as to be detachably attached to the holding surface 26, and the mask M can be accommodated in a predetermined position (for example, the mask M can be accommodated). And a transfer device 65 for transfer to and from the storage device.

  In the present embodiment, the transport device 65 holds and holds the side surface MS on the + X side opposite to the side surface MS on the −X side facing the holding surface 26 of the mask holding member 1 in the mask M. An arm member 66 having a surface is provided. The transfer device 65 is movable while holding the side surface MS of the mask M with the arm member 66.

  FIG. 8A is a diagram illustrating a state in which the transport device 65 is attaching the mask M to the mask holding member 1 (a state in which the mask M is loaded). As shown in FIG. 8A, the transfer device 65 uses the arm member 66 to hold the + X side surface MS of the mask M from the one end side (+ X side) of the shaft member 20. 20 and the mask M is loaded into the mask holding member 1 so as to be inserted into the protrusion 28 of the mask holding member 1. As shown in FIG. 8B, the mask holding member 1 sucks and holds the side surface MS on the −X side of the mask M with the holding surface 26. After the mask holding member 1 holds the mask M, the arm member 66 of the transfer device 65 is retracted from the mask M held by the mask holding member 1.

  When unloading (carrying out) the mask M held by the mask holding member 1 from the mask holding member 1, the arm member 66 of the transfer device 65 is moved from one end side (+ X side) of the shaft member 20. The side surface MS on the + X side of the mask M held by the mask holding member 1 is approached, and the side surface MS on the + X side of the mask M is sucked and held. When the arm member 66 holds the mask M, the holding of the mask M by the mask holding member 1 is released. The arm member 66 of the transfer device 65 moves to the + X side so that the mask M is pulled out from the protruding portion 28 of the shaft member 20 and the mask holding member 1 while holding the mask M. Thereby, the mask M is removed from the mask holding member 1 by the transport device 65.

  As described above, the exchange system 64 including the transport device 65 and the suction mechanism 25 is configured so that the mask member 20 is inserted into and removed from at least a part of the shaft member 20 and the mask holding member 1 from one end side (+ X side) of the shaft member 20. At least one of carrying in the mask M to the holding member 1 and carrying out the mask M from the mask holding member 1 can be executed.

  Next, the 1st detection system 5A which can acquire the positional information on the mask M is demonstrated. FIG. 9 is a schematic diagram for explaining the first detection system 5A. The first detection system 5A detects light passing through the mask M, and acquires position information of the mask M and eventually position information regarding the pattern MP based on the detection result. In the present embodiment, the first detection system 5 </ b> A includes an encoder system 51 and a focus / leveling detection system 52. The first detection system 5A including the encoder system 51 and the focus / leveling detection system 52 is a position in the direction of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions of the mask M (pattern MP). Information can be acquired.

  The encoder system 51 obtains at least one of positional information of the pattern MP of the mask M in the circumferential direction of the outer peripheral surface (pattern forming surface) MF and positional information of the pattern MP of the mask M in the central axis J direction (X-axis direction). Is possible. The encoder system 51 can detect the rotation amount (rotation angle) of the mask M. The focus / leveling detection system 52 can acquire at least position information of the pattern formation surface MF of the mask M in a direction perpendicular to the central axis J (Z-axis direction).

The encoder system 51 of the first detection system 5A detects light via the position detection mark EM formed in a predetermined positional relationship with respect to the pattern MP in the mark formation region MB of the pattern formation surface MF, and the detection result Based on the above, position information regarding the pattern MP is acquired.
The encoder system 51 includes an optical encoder.

  10A is a diagram in which a part of the pattern formation surface MF of the mask M is developed on the XY plane, and FIG. 10B is a diagram in which a part of the mark formation region MB in FIG. 10A is enlarged. It is. As shown in FIG. 10, the mask M is formed in a mark formation region MB on the pattern formation surface MF with a predetermined positional relationship with respect to the pattern MP, and includes marks EM and RM for acquiring position information regarding the pattern MP. Yes.

  The mark formation area MB is disposed outside the pattern formation area MA on one end side (+ X side) and the other end side (−X side) in the central axis J direction (X axis direction) of the pattern formation surface MF of the mask M. Has been. The pattern formation area MA in which the pattern MP is formed is continuously arranged in the circumferential direction of the pattern formation surface MF so as to surround the central axis J, and the mark formation area MB corresponds to the pattern formation area MA. Further, they are continuously arranged in the circumferential direction of the pattern forming surface MF so as to surround the central axis J.

  The mark formed in the mark formation region MB is detected by the position detection mark EM detected by the encoder system 51 and the light receiving device 56 arranged on the image plane side (light emission surface side) of the projection optical system PL. Alignment mark RM. In the present embodiment, the detection system 5 also includes a light receiving device 56.

The position detection mark EM detected by the encoder system 51 includes at least the position information of the pattern MP in the circumferential direction (θX direction) of the pattern forming surface MF and the position information of the pattern MP in the central axis J direction (X axis direction). It is a mark for acquiring one.
The control device 6 uses the encoder system 51 to detect light via the position detection mark EM, and the position information of the pattern MP in the circumferential direction of the pattern forming surface MF and the position of the pattern MP in the central axis J direction. At least one of the information can be acquired.

  The alignment mark RM detected by the light receiving device 56 includes an image of the pattern MP via the projection optical system PL and a shot region S on the substrate P disposed on the image plane side (light emission surface side) of the projection optical system PL. This is a mark for acquiring information related to the positional relationship. The control device 6 can acquire information on the positional relationship between the image of the pattern MP and the shot region S by detecting light via the alignment mark RM using the light receiving device 56.

  The position detection marks EM detected by the encoder system 51 are continuously formed in the circumferential direction of the pattern formation surface MF. The alignment mark RM detected by the light receiving device 56 is intermittently formed in the circumferential direction of the pattern formation surface MF. A plurality of marks EM and RM are formed. The marks EM and RM are formed so as to correspond to each of the plurality of patterns MP.

  The position detection marks EM detected by the encoder system 51 include a plurality of line patterns (line and space patterns) formed along a predetermined direction. As shown in FIG. 10 (B), the position detection mark EM includes a plurality of line patterns formed at a predetermined pitch along the circumferential direction (θX direction) of the pattern formation surface MF with the X-axis direction as the longitudinal direction. The longitudinal direction is the θX direction (Y-axis direction in the developed view of FIG. 10), and a plurality of line patterns formed at a predetermined pitch along the X-axis direction are included. These line patterns function as a scale (diffraction grating) detected by the encoder system 51.

  In the following description, a mark group (line group) including a plurality of line patterns formed at a predetermined pitch along the circumferential direction (θX direction) of the pattern forming surface MF with the X-axis direction as a longitudinal direction is appropriately set as the first. A mark group (line group) including a plurality of line patterns formed with a predetermined pitch along the X-axis direction with the θX direction as a longitudinal direction is referred to as a second mark EM2 as appropriate.

  The first mark EM1 includes a plurality of line patterns arranged at a predetermined pitch in the circumferential direction of the pattern formation surface MF so as to surround the central axis J. The second marks EM2 are arranged at a predetermined pitch in the X-axis direction, and include a plurality of line patterns formed along the circumferential direction of the pattern formation surface MF so as to surround the central axis J. The first mark EM1 and the second mark EM2 are formed in each of the two mark formation areas MB on both sides of the pattern formation area MA.

  As shown in FIG. 9, the encoder system 51 is disposed so as to correspond to each of the first mark EM1 and the second mark EM2. In the present embodiment, the encoder system 51 includes a first encoder 51A that detects the second mark EM2 in the mark formation region MB on the + X side, and a second encoder that detects the first mark EM1 in the mark formation region MB on the + X side. 51B, a third encoder 51C that detects the first mark EM1 of the mark formation region MB on the −X side, and a fourth encoder 51D that detects the second mark EM2 of the mark formation region MB on the −X side. . The first, second, third, and fourth encoders 51A, 51B, 51C, and 51D are optical encoders.

  Each of the first encoder 51A and the fourth encoder 51D can detect the position information of the mask M in the central axis J direction (X-axis direction) and thus the position information of the pattern MP by detecting the second mark EM2. it can. Each of the second encoder 51B and the third encoder 51C can detect the position information of the mask M in the circumferential direction (θX direction) of the pattern formation surface MF by detecting the first mark EM1.

  The detection results of the first, second, third, and fourth encoders 51A, 51B, 51C, and 51D are output to the control device 6. The control device 6 can acquire the position information of the pattern MP of the mask M based on the detection results of the encoders 51A, 51B, 51C, and 51D. In the present embodiment, the control device 6 is based on the detection result of at least one of the first encoder 51A and the fourth encoder 51D, and the pattern MP in the X-axis direction in a state where the pattern formation surface MF is developed on the XY plane. Position information can be acquired. Further, the control device 6 determines the Y-axis direction of the pattern MP (that is, the pattern formation surface) in a state where the pattern formation surface MF is developed on the XY plane based on the detection result of at least one of the second encoder 51B and the third encoder 51C. Position information in the MF circumferential direction) can be acquired. Further, the control device 6 can acquire position information in the θZ direction of the pattern MP in a state where the pattern formation surface MF is developed on the XY plane based on the detection results of both the second encoder 51B and the third encoder 51C. is there.

  FIG. 11 is a schematic diagram showing the second encoder 51B. The second encoder 51B projects the detection light onto the mark formation area MB where the first mark EM1 is formed, and the mark formation area MB of the mask M. And a light receiving device 502 capable of receiving the detected light. In the present embodiment, the second encoder 51B receives the detection light projected from the light projecting device 501 onto the mark formation region MB and reflected by the mark formation region MB by the light receiving device 502. The second encoder 51B projects laser light from the light projecting device 501 onto the first mark EM1 (diffraction grating), and detects the first mark EM1 by an interference phenomenon using this laser light.

  Each line pattern of the first mark EM1 is formed at a predetermined pitch, and when the mask M rotates, a line portion and a non-line portion are alternately arranged in the irradiation region of the detection light projected from the light projecting device 501. As a result, the light receiving state of the light receiving device 502 changes. Thereby, the second encoder 51B can obtain the position (rotation amount, rotation angle) of the rotation direction of the mask M based on the light reception result of the light receiving device 502.

  In addition, a plurality of light emitting elements of the light projecting device 501 are provided, and the detection light irradiation areas by the light emitting elements are formed at a predetermined interval (for example, about 1/4 of the pitch of each line pattern) in the circumferential direction of the mark forming area MB. At the same time, by providing a plurality of light receiving elements of the light receiving device 502 so as to correspond to each light emitting element (irradiation region), the second encoder 51B changes the rotation direction of the mask M based on the light receiving result of each light receiving element. Can be detected.

  The second encoder 51B can detect the rotational speed of the mask M based on the number of each line pattern detected per unit time and the known line pattern pitch.

  In the description using FIG. 11, the second encoder 51B and the first mark EM1 corresponding to the second encoder 51B have been described as an example, but other encoders 51A, 51C, 51D other than the second encoder 51B are described. The marks EM1 and EM2 corresponding to the encoders 51A, 51C, and 51D have the same configuration.

  In the present embodiment, in synchronization with the movement of the substrate P in a predetermined one-dimensional direction (Y-axis direction), the pattern formation surface MF of the mask M is rotated about the central axis J as a plurality of rotation axes. An image of the pattern MP is sequentially formed on the substrate P. In this embodiment, the mask M is provided with a mark EMS for acquiring information related to the rotation start position when the pattern formation surface MF rotates in synchronization with the movement of the substrate P. In the following description, the mark EMS for acquiring information about the rotation start position when the pattern formation surface MF rotates in synchronization with the movement of the substrate P is appropriately referred to as a rotation start position mark EMS.

  FIG. 12 is a diagram in which the vicinity of the pattern formation surface MF of the mask M on which the rotation start position mark EMS is formed is developed on the XY plane. As shown in FIGS. 12 and 10B, the rotation start position mark EMS is formed in the mark formation region MB of the mask M. The rotation start position mark EMS is formed at one place in the circumferential direction of the pattern formation surface MF of the mask M.

  As shown in FIGS. 12 and 9, the encoder system 51 of the first detection system 5A includes a fifth encoder 51S that detects the rotation start position mark EMS. The fifth encoder 51S has a configuration equivalent to that of the first to fourth encoders 51A to 51D, and a light projecting device that projects detection light onto the mark formation region MB where the rotation start position mark EMS is formed; A light receiving device that is projected onto the mark forming area MB and capable of receiving the detection light via the mark forming area MB of the mask M.

  When the mask M rotates and the rotation start position mark EMS is arranged in the detection light irradiation region projected from the light projecting device of the fifth encoder 51S, the light receiving state of the light receiving device varies. Accordingly, the fifth encoder 51S can detect information on the rotation start position of the mask M when the mask M rotates in synchronization with the movement of the substrate P based on the light reception result of the light receiving device.

  As described above, the first detection system 5A can detect the detection light via the rotation start position mark EMS and acquire information on the rotation start position when the mask M rotates in synchronization with the movement of the substrate P. is there. The control device 6 controls the mask driving device 2 based on the detection result of the first detection system 5A including the fifth encoder 51S, and determines the position of the mask M held by the mask holding member 1 on the substrate P. It can be set to the rotation start position when rotating in synchronization with the movement.

  In the present embodiment, the rotation start position mark EMS functions as a reference position (reference mark) when the encoder system 51 detects the position of the mask M in the rotation direction. The positional relationship between the position detection mark EM and the rotation start position mark EMS is known from, for example, design values.

  The focus / leveling detection system 52 of the first detection system 5A can acquire position information of the pattern formation surface MF of the mask M in a direction perpendicular to the central axis J (Z-axis direction). The focus / leveling detection system 52 can acquire position information in an area irradiated with the exposure light EL by the illumination system IL (that is, the illumination area IA) on the pattern forming surface MF of the mask M. As described above, in the present embodiment, the lowermost part BT of the pattern formation surface MF of the mask M is illuminated with the exposure light EL, and the focus / leveling detection system 52 acquires the position information of the lowermost part BT.

  In the present embodiment, the focus / leveling detection system 52 for acquiring the position information of the mask M includes an oblique incidence type focus / leveling detection system. As shown in FIG. 9, the focus / leveling detection system 52 is projected onto the pattern formation surface MF of the mask M and the light projection device 52A that projects detection light from an oblique direction onto the pattern formation surface MF of the mask M. A light receiving device 52B capable of receiving the detection light reflected by the M pattern forming surface MF.

  In this embodiment, the focus / leveling detection system 52 includes a light projecting device 52A capable of projecting a plurality of detection lights (light beams) as disclosed in, for example, Japanese Patent Laid-Open No. 11-045846. The detection light can be irradiated to each of a plurality of predetermined positions on the pattern formation surface MF of the mask M. In the present embodiment, the focus / leveling detection system 52 irradiates each of a plurality of predetermined positions in the vicinity of the lowermost part BT of the pattern formation surface MF of the mask M using the light projecting device 52A.

  The focus / leveling detection system 52 irradiates the pattern formation surface MF of the mask M with the detection light emitted from the light projecting device 52A, and the detection light via the pattern formation surface MF is detected by the light receiving device 52B. Based on the result, the surface position information of the pattern formation surface MF is acquired.

  The detection result of the focus / leveling detection system 52 (the light reception result of the light receiving device 52B) is output to the control device 6. The control device 6 can acquire the position information of the pattern MP of the mask M (position information of the pattern formation surface MF on which the pattern MP is formed) based on the light reception result of the light receiving device 52B. In the present embodiment, the control device 6 sets the pattern formation surface MF to the XY plane based on the light reception result of the light receiving device 52B that has received the detection light applied to the lowermost part BT (or the vicinity thereof) of the pattern formation surface MF. Position information in the Z-axis direction of the pattern MP in the state of being developed upward can be acquired. In addition, the control device 6 receives the light reception result of the light receiving device 52B that has received each of the plurality of detection lights irradiated to the plurality of predetermined positions in the predetermined region including the lowermost part BT (or the vicinity thereof) of the pattern formation surface MF. Based on the above, it is possible to acquire position information in the θX direction and position information in the θY direction of the pattern MP in a state where the pattern formation surface MF is developed on the XY plane.

  Thus, in the present embodiment, the control device 6 determines the X axis, the Y axis, and the θZ direction of the pattern MP in a state where the pattern forming surface MF is developed on the XY plane based on the detection result of the encoder system 51. Position information in the Z axis, θX, and θY directions of the pattern MP in a state in which the pattern formation surface MF is developed on the XY plane based on the detection result of the focus / leveling detection system 52. It can be acquired. That is, in the present embodiment, the first detection system 5A including the encoder system 51 and the focus / leveling detection system 52 has six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions of the pattern MP. It is possible to acquire position information in the direction.

  Next, the substrate holding member 3 and the substrate driving device 4 will be described. FIG. 13 is a view showing the vicinity of the substrate holding member 3 and the substrate driving device 4. The substrate driving device 4 moves the base member 4B supported in a non-contact manner on the upper surface of the third surface plate 9 by the air bearing on the third surface plate 9 in the X-axis, Y-axis, and θZ directions. The first drive system 4H that can move the substrate holding member 3 mounted on the base member 4B in the X axis, Y axis, and θZ directions, and the substrate holding member 3 with respect to the base member 4B, the Z axis, and a second drive system 4V movable in the θX and θY directions.

  The first drive system 4H includes an actuator such as a linear motor, and can drive the base member 4B supported in a non-contact manner on the third surface plate 9 in the X-axis, Y-axis, and θZ directions. The second drive system 4V is provided between the base member 4B and the substrate holding member 3, for example, an actuator such as a voice coil motor, and a measurement device (such as an encoder) (not shown) that measures the drive amount of each actuator. including. As shown in FIG. 13, the substrate holding member 3 is supported on the base member 4B by at least three actuators. Each of the actuators can independently drive the substrate holding member 3 in the Z-axis direction with respect to the base member 4B, and the control device 6 adjusts the driving amount of each of the three actuators to adjust the base member 4B. On the other hand, the substrate holding member 3 is driven in the Z-axis, θX, and θY directions.

  As described above, the substrate driving apparatus 4 including the first and second driving systems 4H and 4V is configured to move the substrate holding member 3 in the six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. Can be moved to. The control device 6 controls the substrate driving device 4 so that the surface of the substrate P held by the substrate holding member 3 has six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. The position with respect to can be controlled.

Next, the 2nd detection system 5B which can acquire the positional information on the board | substrate P is demonstrated. In FIG. 13, the second detection system 5 </ b> B can acquire position information regarding the X axis, the Y axis, and the θZ direction of the substrate holding member 3 (and thus the substrate P) using the measurement mirror provided on the substrate holding member 3. A laser interferometer system 53 and a focus / leveling detection system 54 capable of acquiring surface position information (position information regarding the Z axis, θX, and θY directions) of the surface of the substrate P held by the substrate holding member 3 are included. . The focus / leveling detection system 54 includes an oblique incidence type focus / leveling detection system as disclosed in, for example, Japanese Patent Laid-Open No. 8-37149 (corresponding US Pat. No. 6,327,025). It has a light projecting device 54A that projects detection light on the surface of P from an oblique direction, and a light receiving device 54B that can receive the detection light projected on the surface of the substrate P and reflected by the surface of the substrate P. The focus / leveling detection system 54 may employ a system using a capacitive sensor.
The control device 6 drives the substrate driving device 4 based on the detection results of the second detection system 5B including the laser interferometer system 53 and the focus / leveling detection system 54, and the substrate P held by the substrate holding member 3 is used. Control the position of the.

  Thus, in the present embodiment, the control device 6 can acquire position information in the X-axis, Y-axis, and θZ directions of the surface of the substrate P based on the detection result of the laser interferometer system 53. Based on the detection result of the focus / leveling detection system 52, position information of the surface of the substrate P in the Z-axis, θX, and θY directions can be acquired. That is, in the present embodiment, the second detection system 5B including the laser interferometer system 53 and the focus / leveling detection system 54 has 6 in the X axis, Y axis, Z axis, θX, θY, and θZ directions of the substrate P. Position information in the direction of the degree of freedom can be acquired.

  Next, a method for exposing the substrate P using the exposure apparatus EX having the above-described configuration will be described with reference to the flowchart in FIG. 14 and the schematic diagrams in FIGS. 15, 16, and 17.

  When the exposure sequence is started, the mask M is loaded on the mask holding member 1 and the substrate P is loaded on the substrate holding member 3 (step SA1), the control device 6 starts a predetermined measurement process. For example, the control device 6 starts measurement processing related to the substrate holding member 3 that holds the substrate P.

  In the present embodiment, the measurement process includes a detection operation using the alignment system 55. The control device 6 moves the substrate holding member 3 holding the substrate P in the XY directions using the substrate driving device 4, and the reference on the substrate holding member 3 is placed in the detection region of the alignment system 55 as shown in FIG. A mark FM is arranged. The control device 6 is provided on the substrate holding member 3 using the alignment system 55 while measuring the position information of the substrate holding member 3 in the X-axis direction and the Y-axis direction using the laser interferometer system 53. The detected reference mark FM is detected (step SA2).

  Thereby, the control device 6 can obtain position information regarding the X-axis direction and the Y-axis direction of the reference mark FM on the substrate holding member 3 in the coordinate system defined by the laser interferometer system 53.

  Further, the control device 6 uses the laser interferometer system 53 to measure the positional information of the substrate holding member 3 holding the substrate P in the X-axis direction and the Y-axis direction, as shown in FIG. 55, a predetermined number of alignment marks AM provided on the substrate P are detected (step SA3).

  As a result, the control device 6 can obtain position information regarding the X-axis direction and the Y-axis direction of each alignment mark AM in the coordinate system defined by the laser interferometer system 53.

  The control device 6 determines the positions of the plurality of shot regions S1 to S26 on the substrate P with respect to the detection reference position of the alignment system 55 based on the position information of each alignment mark AM on the substrate P obtained in step SA3. Information is obtained by arithmetic processing (step SA4). When the position information of each of the plurality of shot areas S1 to S26 on the substrate P is obtained by arithmetic processing, for example, so-called EGA (enhanced global alignment) as disclosed in Japanese Patent Application Laid-Open No. 61-44429 is disclosed. ) Method.

  As a result, the control device 6 detects the alignment mark AM on the substrate P using the alignment system 55, and a plurality of provided on the substrate P in the XY coordinate system defined by the laser interferometer system 53. The position coordinates (array coordinates) of each of the shot areas S1 to S26 can be determined. That is, the control device 6 determines where the shot areas S1 to S26 on the substrate P are located with respect to the detection reference position of the alignment system 55 in the XY coordinate system defined by the laser interferometer system 53. Can know.

  The control device 6 uses the encoder system 51 to detect the position information of the mask M held by the mask holding member 1 and uses the laser interferometer system 53 to position the substrate holding member 3 holding the substrate P. While measuring the information, an image (projected image, aerial image) of the alignment mark RM provided on the mask M is detected using the light receiving device 56 provided on the substrate holding member 3 (step SA5).

  That is, as shown in FIG. 17, the control device 6 uses the exposure light EL to align the alignment mark RM provided on the mask M with the projection optical system PL and the opening 56K on the substrate holding member 3 facing each other. Illuminate. Thereby, the aerial image of the alignment mark RM provided on the mask M is projected onto the upper surface 3F of the substrate holding member 3 including the opening 56K via the projection optical system PL, and the light reception provided on the substrate holding member 3 is received. The device 56 can detect an aerial image of the alignment mark RM provided on the mask M.

  Thus, the control device 6 receives the positions of the aerial image (projected image) in the X-axis direction and the Y-axis direction within the coordinate system defined by the laser interferometer system 53, and the light-receiving device 56 provided on the substrate holding member 3. (Opening 56K).

  The position information of the mask M when the light receiving device 56 measures the aerial image of the alignment mark RM is detected by the encoder system 51. The encoder system 51 detects the position information of the alignment mark RM with reference to the reference mark (rotation start position mark) RMS and thus the position information of the pattern MP by detecting the position detection mark EM (first mark EM1). To do. That is, the control device 6 can know where each pattern MP on the mask M is located with respect to the reference mark (rotation start position mark) RMS based on the detection result of the encoder system 51.

  The pattern MP of the mask M and the alignment mark RM are formed in a predetermined positional relationship, and the positional relationship between the reference mark FM on the substrate holding member 3 and the opening 56K (light receiving device 56) is also known. Further, the detection value of the encoder system 51 of the detection system 5 and the detection value of the laser interferometer system 53 are associated with each other. Therefore, the control device 6 derives the relationship between the predetermined reference position in the coordinate system defined by the laser interferometer system 53 and the projection position of the image of the pattern MP of the mask M based on the detection result of step SA5. (Step SA6).

  The control device 6 determines the positional relationship between the predetermined reference position in the coordinate system defined by the laser interferometer system 53 and each of the shot areas S1 to S26 on the substrate P (relative to the predetermined reference position) obtained in step SA4. The arrangement information of the shot areas S1 to S26), and the relationship between the predetermined reference position in the coordinate system defined by the laser interferometer system 53 and the projection position of the image of the pattern MP of the mask M obtained in step SA6. Based on this, the relationship between the projection position of the image of the pattern MP of the mask M within the coordinate system defined by the laser interferometer system 53 and each of the shot areas S1 to S26 on the substrate P is derived (step SA7).

  As described above, in the present embodiment, the control device 6 detects the light that has passed through the alignment mark RM of the mask M by the light receiving device 56, and the image of the pattern MP of the mask M and the shot regions S1 to S1 on the substrate P. Information regarding the positional relationship with S26 can be acquired.

  In order to start the exposure of the substrate P, the control device 6 uses the laser interferometer system 53 to obtain the position information of the substrate holding member 3 holding the substrate P (and thus the position information of the shot region S on the substrate P). While measuring, the substrate driving device 4 is used to move the substrate P held by the substrate holding member 3 to the first exposure start position. In the present embodiment, the control device 6 holds the substrate holding member 3 so that the first shot area S1 of the plurality of shot areas S1 to S26 is arranged in the vicinity of the −Y side of the projection area AR. The substrate P being moved is moved.

  Further, in order to start exposure of the substrate P, the control device 6 uses the encoder system 51 to measure the position information of the mask M held by the mask holding member 1 (and thus the position information of the pattern MP of the mask M). However, the mask M held by the mask holding member 1 is moved to the exposure start position (rotation start position) by using the mask drive device 2. The control device 6 detects the detection light via the rotation start position mark EMS using the fifth encoder 51S of the first detection system 5A, and rotates when rotating the mask M in synchronization with the movement of the substrate P. The mask M is moved (rotated) to the start position. In the present embodiment, based on the detection result using the fifth encoder 51S, the control device 6 includes the first pattern formation region MA among the plurality (six) pattern formation regions MA that is + Y of the illumination region IA. The mask M held by the mask holding member 1 is moved so as to be arranged near the side (step SA8).

  Further, the control device 6 adjusts the surface (exposure surface) of the substrate P and the image plane of the projection optical system PL to have a predetermined positional relationship based on the detection result of the focus / leveling detection system 54.

  Further, the control device 6 adjusts the lowermost part BT of the mask M and the object plane of the projection optical system PL to have a predetermined positional relationship based on the detection result of the focus / leveling detection system 52. The lowermost BT of the mask M is arranged at a position optically conjugate with the surface of the substrate P with respect to the projection optical system PL.

  The control device 6 controls the substrate driving device 4 to start the movement of the substrate P in the + Y direction, and also controls the mask driving device 2 to start the movement (rotation) of the mask M in the −θX direction. To do.

  When the moving speed in the + Y direction of the substrate P and the rotational speed (angular speed) in the −θX direction of the mask M are constant, and the + Y side end of the first shot area S1 reaches the projection area AR, The control device 6 emits exposure light EL from the illumination system IL. The control device 6 uses each of the mask driving device 2 and the substrate driving device 4 to synchronize with the movement (rotation) of the mask M in the −θX direction, while moving the substrate P in the + Y direction, The pattern MP is illuminated with the exposure light EL, and an image of the pattern MP of the mask M is projected onto the substrate P via the projection optical system PL. The control device 6 illuminates the pattern MP of the mask M with the exposure light EL while rotating the mask M around the central axis J as the rotation axis.

  At the time of scanning exposure, the pattern MP at the lowermost part BT of the mask M is substantially in the −Y direction with respect to the projection optical system PL while the image of a part of the pattern MP of the mask M is projected on the projection area AR. In synchronization with the movement at V, the substrate P moves in the + Y direction at a speed β · V (β is the projection magnification).

  A plurality of patterns MP are formed along the circumferential direction of the pattern formation surface MF of the mask M, and the control device 6 moves the shot area S of the substrate P in the Y-axis direction with respect to the projection area AR of the projection optical system PL. The exposure light EL moves while rotating (rotating) the pattern formation surface MF of the mask M in the θX direction with respect to the illumination area IA of the illumination system IL in synchronization with the movement of the substrate P in the Y-axis direction. , The shot area S on the substrate P is exposed with the image of the pattern MP formed in the projection area AR. In synchronization with the movement of the substrate P in the Y-axis direction, the pattern MP of the plurality of masks M is illuminated by irradiating the pattern MP of the mask M with the exposure light EL while rotating the mask M about the central axis J as the rotation axis. Are sequentially formed on the substrate P (step SA9).

  The control device 6 monitors the position information of the mask M (pattern MP) using the first detection system 5A of the detection system 5, and uses the second detection system 5B to detect the position of the substrate P (shot region S). While monitoring the information, the mask M and the substrate P are driven to expose the substrate P with the image of the pattern MP of the mask M. That is, the control device 6 controls the mask driving device 2 and the substrate driving device 4 based on the detection result of the detection system 5 to form the mask M and the mask M when the image of the pattern MP of the mask M is formed on the substrate P. The drive of the substrate P is controlled.

  Specifically, the first detection system 5A projects detection light onto the mark formation area MB of the mask M from the light projecting devices 501 of the encoders 51A to 51D of the encoder system 51 while the mask M is rotating. Then, each light receiving device 502 detects detection light through the mark formation area MB of the mask M. Further, the first detection system 5A projects detection light onto the pattern formation area MA of the mask M from the light projecting device 52A of the focus / leveling detection system 52 while the mask M is rotating, and the pattern of the mask M Detection light passing through the formation area MA is detected by the light receiving device 52B. That is, the first detection system 5A detects the detection light through the mask M while the mask M is rotating, and based on the detection result, the position of the pattern MP of the mask M in the direction of 6 degrees of freedom. Get information.

  The control device 6 uses the first detection system 5A to detect the position detection mark EM (first mark EM1), thereby detecting the position detection mark EM (reference to the reference mark (rotation start position mark) RMS). The position information of the first mark EM1) and thus the position information of the pattern MP can be detected in real time. That is, the control device 6 knows in real time where each pattern MP on the mask M is located with respect to the reference mark (rotation start position mark) RMS based on the detection result of the first detection system 5A. be able to.

  The second detection system 5B projects detection light to the measurement mirror of the substrate holding member 3 that holds the substrate P from the laser interferometer system 53 while the substrate P is moving, and passes through the measurement mirror. The detection light is detected. The second detection system 5B projects detection light onto the surface of the substrate P from the light projecting device 54A of the focus / leveling detection system 54 while the substrate P is moving, and passes through the surface of the substrate P. Detection light is detected by the light receiving device 54B. That is, the second detection system 5B detects the detection light through the substrate P while the substrate P is moving, and relates to the direction of 6 degrees of freedom of the shot area S of the substrate P based on the detection result. Get location information.

  The control device 6 uses the first detection system 5A to obtain the pattern MP of the mask M based on the positional information regarding the six degrees of freedom of the pattern MP of the mask M including the circumferential direction (θX direction) of the pattern formation surface MF. The driving in the direction of 6 degrees of freedom including the periphery of the central axis J (θX direction) of the mask M when forming the image on the substrate P is controlled.

  Further, the control device 6 uses the second detection system 5B to obtain the substrate MP when the pattern MP of the mask M is formed on the substrate P based on the positional information regarding the six degrees of freedom of the shot region S of the substrate P. Control the driving of P in the direction of 6 degrees of freedom.

  As described above, the control device 6 determines the position of the mask M and the substrate P in the direction of 6 degrees of freedom (mask) based on the positional information regarding the direction of the degrees of freedom of the mask M and the substrate P acquired using the detection system 5. The exposure light EL is irradiated onto the substrate P through the mask M while adjusting the relative positional relationship between M and the substrate P.

  In the present embodiment, since six patterns MP are formed on the mask M along the circumferential direction of the pattern formation surface MF, the exposure of the first shot region S1 is performed when the mask M rotates approximately 60 degrees. finish.

  When the scanning exposure for the first shot region S1 to be exposed first is completed, the control device 6 does not decelerate the mask holding member 1 holding the mask M and the substrate holding member 3 holding the substrate P, respectively. The rotation of the mask M in the −θX direction is continued and the movement of the substrate P in the + Y direction is continued. Then, the control device 6 performs the exposure of the second shot area S2 arranged on the −Y side of the first shot area S1 in the same manner as the first shot area S1.

  Then, the control device 6 continues the rotation of the mask M in the −θX direction without decelerating the mask holding member 1 holding the mask M and the substrate holding member 3 holding the substrate P, and the substrate P The movement in the + Y direction is continued, and each of the third shot region S3 and the fourth shot region S4 is continuously exposed. As described above, in the present embodiment, the control device 6 continuously performs exposure of the shot areas S1 to S4 for one column arranged in the Y-axis direction in one scan.

  When the exposure of the fourth shot region S4 is completed, the control device 6 decelerates the substrate holding member 3. Then, the control device 6 determines whether or not the exposure of one substrate P has been completed, that is, whether or not all the exposure on the substrate P has been completed (step SA10). Here, only the exposure of the first to fourth shot areas S1 to S4 has just been completed, and other shot areas to be exposed remain.

If it is determined in step SA10 that all exposure on the substrate P has not been completed, the control device 6 uses the laser interferometer system 53 to detect the position information (and consequently the substrate) of the substrate holding member 3 holding the substrate P. While measuring the position information of the shot region S on P), the substrate P held by the substrate holding member 3 is moved to the next exposure start position using the substrate driving device 4.
In the present embodiment, the control device 6 is held by the substrate holding member 3 so that the fifth shot area S5 of the plurality of shot areas S1 to S26 is arranged near the + Y side of the projection area AR. The substrate P being moved is moved.

  Further, in order to start exposure of the substrate P, the control device 6 uses the encoder system 51 to measure the position information of the mask M held by the mask holding member 1 (and thus the position information of the pattern MP of the mask M). However, the mask M held by the mask holding member 1 is moved to the exposure start position (rotation start position) by using the mask drive device 2. The control device 6 detects the detection light via the rotation start position mark EMS using the fifth encoder 51S of the first detection system 5A, and rotates when rotating the mask M in synchronization with the movement of the substrate P. The mask M is moved (rotated) to the start position. In the present embodiment, the control device 6 holds the mask so that the first pattern formation area MA is arranged near the −Y side of the illumination area IA among the plurality (six) of pattern formation areas MA. The mask M held on the member 1 is moved (step SA11).

  In the present embodiment, the control device 6 executes the movement of the mask M to the rotation start position in parallel with at least a part of the movement of the substrate P to the exposure start position. Further, the control device 6 stops the exposure of the exposure light EL to the mask M during the movement of the mask M to the rotation start position (temporarily stops the exposure of the substrate P).

  Here, in order to expose the first to fourth shot areas S1 to S4, the mask M is rotated in the −θX direction, and after the exposure of the fourth shot area S4 is completed, the first -Continued rotation in the same direction as the exposure of the fourth shot areas S1 to S4, that is, in the -θX direction, reaches the rotation start position more quickly than in the reverse direction, that is, in the + θX direction. can do.

  When the movement of the mask M and the substrate P to the respective exposure start positions is completed, the control device 6 sets the movement direction (rotation direction) of the mask holding member 1 holding the mask M in the reverse direction, and moves the substrate P over the substrate P. The moving direction of the held substrate holding member 3 is set in the reverse direction (step SA12).

  Then, the control device 6 controls the substrate driving device 4 to start the movement of the substrate P in the −Y direction and controls the mask driving device 2 to move (rotate) the mask M in the + θX direction. To start.

  When the movement speed of the substrate P in the −Y direction and the rotation speed of the mask M in the + θX direction are constant, and the −Y side end of the fifth shot area S5 reaches the projection area AR, the control device 6 emits the exposure light EL from the illumination system IL. The control device 6 illuminates the pattern MP of the mask M with the exposure light EL while moving the substrate P in the −Y direction in synchronization with the movement (rotation) of the mask M in the + θX direction, and the pattern MP of the mask M Are projected onto the substrate P via the projection optical system PL. The control device 6 illuminates the pattern MP of the mask M with the exposure light EL while rotating the mask M around the central axis J as the rotation axis. In synchronization with the movement of the substrate P in the Y-axis direction, the pattern MP of the plurality of masks M is illuminated by irradiating the pattern MP of the mask M with the exposure light EL while rotating the mask M about the central axis J as the rotation axis. Are sequentially formed on the substrate P (step SA9).

  Even in this case, the control device 6 uses the position information regarding the direction of 6 degrees of freedom of the mask M and the substrate P based on the position information regarding the direction of the degrees of freedom of the mask M and the substrate P (using the detection system 5). The exposure light EL through the mask M is irradiated onto the substrate P while adjusting the relative positional relationship between the mask M and the substrate P.

  When the scanning exposure for the fifth shot region S5 is completed, the control device 6 performs the + θX direction of the mask M without performing deceleration of the mask holding member 1 holding the mask M and the substrate holding member 3 holding the substrate P, respectively. And the movement of the substrate P in the -Y direction is continued. Then, the control device 6 performs exposure of the sixth shot region S6 arranged on the + Y side of the fifth shot region S5 in the same manner as the fifth shot region S5.

  Then, the control device 6 continues the rotation of the mask M in the + θX direction without decelerating the mask holding member 1 holding the mask M and the substrate holding member 3 holding the substrate P. The movement in the −Y direction is continued, and each of the seventh, eighth, ninth, and tenth shot areas S7, S8, S9, and S10 is continuously exposed. As described above, in the present embodiment, the control device 6 continuously performs exposure of the shot areas S5 to S10 for one column arranged in the Y-axis direction in one scan.

  As described above, in the present embodiment, the pattern MP of the mask M is the maximum number of shot regions S in the scanning direction (Y-axis direction) of the substrate P along the circumferential direction of the pattern formation surface MF (this embodiment). In the form, only six) are formed. Therefore, the control device 6 can perform the exposure of the shot regions S5 to S10 for one column aligned in the Y-axis direction by rotating the mask M 360 degrees (one rotation).

  Similarly, the controller 6 reverses the rotation direction of the mask M every time the exposure of one row of shot areas S (S11 to S16, S17 to S22, S23 to S26) arranged in the Y-axis direction is completed. Is set (inverted), and the moving direction of the substrate P is set in the reverse direction, and exposure processing is performed in units of columns (steps SA9 to SA12).

  When the above operations are repeated and it is determined in step SA10 that all exposure on the substrate P has been completed, the control device 6 unloads the substrate P held on the substrate holding member 3 (step SA13). Then, the control device 6 determines whether there is a substrate P to be exposed next (step SA14). If it is determined in step SA14 that there is a substrate P to be exposed, the control device 6 repeats the processes in and after step SA1. On the other hand, if it is determined in step SA14 that there is no substrate P to be exposed, the control device 6 ends the exposure sequence.

  As described above, in the present embodiment, the position detection mark EM is formed in the mark formation region MB on the pattern formation surface (outer peripheral surface) MF of the cylindrical mask M in a predetermined positional relationship with the pattern MP. Therefore, the position information of the pattern MP of the mask M can be accurately acquired by detecting the position detection mark EM with the detection system 5 (first detection system 5A). Therefore, it is possible to accurately execute the adjustment of the position of the pattern MP of the mask M and the adjustment of the positional relationship between the mask M and the substrate P using the acquired position information of the pattern MP. Therefore, it is possible to satisfactorily form an image of the pattern MP of the mask M on the substrate P.

  In the present embodiment, the detection system 5 includes a focus / leveling detection system 52 and can also acquire position information of the pattern formation surface MF (pattern formation region MA) of the mask M in the Z-axis direction. Therefore, it is possible to accurately execute the adjustment of the position of the pattern MP of the mask M and the adjustment of the positional relationship between the mask M and the substrate P using the acquired position information of the pattern MP, and the mask M on the substrate P. The image of the pattern MP can be formed satisfactorily.

  In the present embodiment, the position detection marks EM are continuously formed in the circumferential direction of the pattern formation surface MF, and the control device 6 rotates the mask M using the mask driving device 2. Using the detection system 5 (first detection system 5A), the position information of the pattern MP of the mask M in a rotating state can be acquired in real time. Further, the control device 6 drives around the central axis J of the mask M when forming (projecting) an image of the pattern MP of the mask M on the substrate P based on the acquired positional information of the pattern MP of the mask M. Can be accurately controlled.

  In the present embodiment, the mask M is formed with an alignment mark RM for acquiring information about the positional relationship between the image of the pattern MP and the shot area S, and the alignment mark RM is used by using the detection system 5. , The positional relationship between the image of the pattern MP and the shot area S can be accurately adjusted.

  In the present embodiment, a plurality of patterns MP are formed on the pattern formation surface MF of the mask M, and the marks EM and RM are formed so as to correspond to each of the plurality of patterns MP. Therefore, the position information of each pattern MP and the information on the positional relationship between the image of each pattern MP and the shot area S can be accurately acquired using the detection system 5.

  In the present embodiment, the rotation start position mark EMS is formed on the mask M, and the control device 6 detects the rotation start position mark EMS using the detection system 5 (fifth encoder 51S). Thus, the position of the mask M can be set to the rotation start position (rotation start state) when rotating in synchronization with the movement of the substrate P.

  In the present embodiment, the rotation start position mark EMS functions as a reference position (reference mark) when the encoder system 51 detects the position in the rotation direction of the mask M, and the control device 6 uses the detection system 5. The position detection mark EM (first mark EM1) is used to detect the position information of the position detection mark EM (first mark EM1) with reference to the reference mark (rotation start position mark) RMS, and thus the pattern. MP position information can be detected.

Second Embodiment
Next, a second embodiment will be described. In the first embodiment described above, the position detection mark EM is continuously formed in the circumferential direction of the pattern formation surface MF. However, the characteristic part of the second embodiment is that the position detection mark EM is Further, the pattern forming surface MF is intermittently (discretely) formed in the circumferential direction. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 18 is a diagram in which a part of the pattern formation surface MF of the mask M according to the second embodiment is developed on the XY plane. As shown in FIG. 18, on the pattern formation surface MF of the mask M according to the second embodiment, a mark (line pattern) LM for acquiring position information of the pattern MP in the circumferential direction of the pattern formation surface MF is a pattern. It is formed intermittently (discretely) in the circumferential direction of the forming surface MF. That is, in the second embodiment, a predetermined number of first marks EM1 for acquiring position information of the pattern MP in the circumferential direction of the pattern formation surface MF are intermittently formed in the circumferential direction of the pattern formation surface MF. It is constituted by a mark (line pattern) LM.

  In the present embodiment, the line pattern LM constituting the first mark EM1 is formed at each of three predetermined positions in the circumferential direction of the pattern formation surface MF with respect to one pattern MP (pattern formation region MA). ing. Each of the line patterns LM is formed in a predetermined positional relationship with the pattern MP. In FIG. 18, the mark formation area MB is set on each of the + X side and the −X side of the pattern formation area MA, and the line pattern LM is one mark formation area MB with respect to one pattern formation area MA. Are formed at six predetermined positions, and are formed at six positions in total.

  Further, the rotation start position mark EMS is formed on the pattern formation surface MF of the mask M, as in the first embodiment. In FIG. 18, the second mark EM2 and the alignment mark RM are not shown.

  In the present embodiment, the encoder system 51 of the first detection system 5A detects light via the line pattern LM at a plurality of positions in the circumferential direction of the pattern formation surface MF, and acquires the line pattern obtained based on the detection result. Based on the LM position information and the rotation speed of the mask M, the position information of the pattern MP in the circumferential direction of the pattern formation surface MF is acquired. The rotational speed of the mask M can be obtained from the output of the first drive mechanism 61, or a speed sensor that can detect the rotational speed of the mask M is provided, and can be obtained from the output of the speed sensor.

  The control device 6 detects the first mark EM1 (line pattern LM) by using the encoder system 51 of the first detection system 5A, and thereby the line pattern LM based on the rotation start position mark (reference mark) RMS is detected. It is possible to detect the position information and thus the position information of the pattern MP. That is, the control device 6 can know where each pattern MP on the mask M is located with respect to the rotation start position mark (reference mark) RMS based on the detection result of the detection system 5.

  In the present embodiment, the line pattern LM is formed intermittently, and when the position information of the pattern MP is detected using the encoder system 51 while the mask M is rotating, the light projecting device of the encoder system 51 In the period when the detection light is projected between the line patterns LM, the encoder system 51 does not detect the line pattern LM.

  In the present embodiment, even when the encoder system 51 does not detect the line pattern LM, the control device 6 detects the timing (time) when the encoder system 51 detects the line pattern LM and the rotation speed of the mask M. Based on the above, position information of the pattern MP with respect to the reference mark RMS can be estimated. That is, in a period in which the encoder system 51 does not detect the line pattern LM, the control device 6 estimates the position information of the pattern M of the mask M while interpolating the position of the mask M using the rotational speed of the mask M. Then, the control device 6 controls driving around the central axis J of the mask M when forming an image of the pattern MP of the mask M on the substrate P based on the estimated position information of the pattern MP of the mask M. .

<Third Embodiment>
Next, a third embodiment will be described. In the first and second embodiments described above, the detection light from the detection system 5 (light different from the exposure light EL) is applied to the position detection mark EM. The portion is that the position detection mark EM is irradiated with the exposure light EL, and the position information of the pattern MP of the mask M is obtained using the exposure light EL via the position detection mark EM. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 19 is a diagram in which a part of the pattern formation surface MF of the mask M according to the third embodiment is developed on the XY plane. As shown in FIG. 19, on the pattern formation surface MF of the mask M according to the third embodiment, a mark EM3 for acquiring position information of the pattern MP in the circumferential direction of the pattern formation surface MF is provided on the pattern formation surface MF. It is formed intermittently (discretely) in the circumferential direction. In the present embodiment, the mark EM3 is formed in a predetermined position with respect to the pattern MP in a predetermined area of the pattern formation area MA. In the present embodiment, the mark EM3 extends along the circumferential direction of the pattern formation surface MF of the mask M at each of the + X side end (edge) and the −X side end (edge) of the pattern formation region MA. A plurality are formed. The mark EM3 is formed so as to be arranged inside the illumination area IA of the illumination system IL. That is, the mark EM3 is illuminated with the exposure light EL from the illumination system IL.

  FIG. 20 is a schematic diagram showing an exposure apparatus EX according to this embodiment. In the present embodiment, the detection system 5 includes a light receiving device 57 that can receive the exposure light EL through the mask M and a part of the projection optical system PL. The projection optical system PL of the present embodiment has a beam splitter BS, and the exposure light EL that is irradiated onto the mask M by the illumination system IL and enters the projection optical system PL through the mask M is the beam splitter BS. Separated by. A part of the exposure light EL separated by the beam splitter BS is guided to the substrate P, and another part is guided to the light receiving surface 57A of the light receiving device 57 of the detection system 5 disposed outside the projection optical system PL. It is burned.

  The light receiving surface 57A of the light receiving device 57 is disposed at a position (or in the vicinity thereof) optically conjugate with the object plane and the image plane of the projection optical system PL. That is, the light receiving surface 57A of the light receiving device 57 is disposed at a position (or in the vicinity thereof) optically conjugate with the lowermost part BT of the pattern forming surface MF of the mask M irradiated with the exposure light EL and the surface of the substrate P. ing.

  In order to expose the substrate P, the control device 6 illuminates the mask M with the exposure light EL while rotating the mask M in the θX direction in synchronization with the movement of the substrate P in the Y-axis direction. A part of the exposure light EL through the mask M is guided onto the substrate P via the projection optical system PL including the beam splitter BS, and an image of the pattern MP is formed on the substrate P. On the other hand, part of the exposure light EL that passes through the mask M is guided to the light receiving device 57 via the projection optical system PL including the beam splitter BS, and forms an image of the mark EM3 on the light receiving surface 57A of the light receiving device 57. . An image of the mark EM3 is formed on the substrate P together with the image of the pattern MP, and an image of the pattern MP is formed on the light receiving surface 57A of the light receiving device 57 together with the image of the mark EM3.

  As described above, a plurality of marks EM3 are formed on the pattern formation surface MF of the mask M along the circumferential direction of the pattern formation surface MF. Therefore, when the mask M is rotated to expose the shot area S of the substrate P, each of the plurality of marks EM3 is sequentially arranged in the illumination area IA. The light receiving device 57 of the detection system 5 sequentially acquires the position information of the image of the mark EM3 formed on the light receiving surface 57A when the mask M is rotating. The light receiving device 57 has an index mark. The image of the mark EM3 and the image of the index mark are imaged using an imaging element such as a CCD, and the image signal is processed to obtain the position of the mark EM3. Get information. Based on the position information of the mark EM3, the control device 6 can acquire the position information of the pattern MP formed in a predetermined positional relationship with respect to the mark EM3.

  Further, the mark EM3 is intermittently formed along the circumferential direction of the pattern formation surface MF, and during the rotation of the mask M, a period in which the light receiving device 57 does not detect the mark EM3 occurs. In substantially the same manner as in the embodiment, the control device 6 can estimate the position information of the pattern MP based on the timing (time) when the mark EM3 is detected by the light receiving device 57 and the rotational speed of the mask M. That is, during a period in which the light receiving device 57 does not detect the mark EM3, the control device 6 estimates the position information of the pattern MP of the mask M while interpolating the position of the mask M using the rotational speed of the mask M. Then, the control device 6 controls driving around the central axis J of the mask M when forming an image of the pattern MP of the mask M on the substrate P based on the estimated position information of the pattern MP of the mask M. .

<Fourth embodiment>
Next, a fourth embodiment will be described. The characteristic part of the fourth embodiment is that the position information of the pattern MP of the mask M is acquired based on the detection result of light through the mask holding member 1. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 21 is a schematic diagram for explaining the mask holding member 1 and the detection system 5 (first detection system 5A) according to the fourth embodiment. The encoder system 51 of the first detection system 5A of the present embodiment includes a sixth encoder 51E and a seventh encoder 51T that can detect light via the mask holding member 1 that holds the mask M. The sixth and seventh encoders 51E and 51T have the same configuration as the first to fifth encoders 51A to 51D and 51S described above.

  A position detection mark EM ′ for acquiring positional information in the circumferential direction (θX direction) of the outer peripheral surface 1F of the mask holding member 1 is provided on the outer peripheral surface 1F arranged around the central axis J of the mask holding member 1. Is formed. The position detection mark EM ′ is detected by the sixth encoder 51 </ b> E of the encoder system 51.

  The position detection mark EM 'is continuously formed in the circumferential direction of the outer peripheral surface 1F. The position detection mark EM ′ includes a plurality of line patterns (line and space patterns) formed along a predetermined direction. The position detection mark EM ′ includes a plurality of line patterns formed at a predetermined pitch along the circumferential direction (θX direction) of the outer peripheral surface 1 </ b> F so that the X axis direction is the longitudinal direction and the central axis J is surrounded. These line patterns function as a scale (diffraction grating) detected by the encoder system 51.

  The sixth encoder 51E of the encoder system 51 can detect position information in the rotational direction (θX direction) of the mask holding member 1 holding the mask M based on the detection result of detecting the position detection mark EM ′. .

  In addition, by providing a plurality of position detection marks EM ′ in the X-axis direction and detecting each of the plurality of position detection marks EM ′ with an encoder, the encoder system 51 is based on the detection result of each encoder. Position information in the X-axis direction, the Y-axis direction (that is, the circumferential direction of the outer peripheral surface 1F), and the θZ direction of the outer peripheral surface 1F in a state where the outer peripheral surface 1F is developed on the XY plane can be acquired.

  Further, a reference mark EMS ′ that functions as a reference position when the encoder system 51 detects the position of the mask holding member 1 in the rotation direction is formed at a predetermined position on the outer peripheral surface 1F of the mask holding member 1. The reference mark EMS 'is formed at one place in the circumferential direction of the outer peripheral surface 1F of the mask holding member 1. The reference mark EMS ′ of the mask holding member 1 is detected by the seventh encoder 51T of the encoder system 51.

  When the mask holding member 1 rotates and the reference mark EMS 'is arranged in the irradiation region of the detection light projected from the light projecting device of the seventh encoder 51T, the light receiving state of the light receiving device changes. The control device 6 controls the mask driving device 2 based on the detection result of detecting the reference mark EMS ′ by the seventh encoder 51T, and moves the position of the mask holding member 1 holding the mask M, for example, the movement of the substrate P. It is possible to set the rotation start position when the mask M is rotated in synchronization with the rotation.

  Similarly to the first to third embodiments described above, the reference mark EMS is formed in the mark formation region MB of the pattern formation surface MF of the mask M, and the encoder system 51 uses the reference mark EMS of the mask M. A fifth encoder 51S is provided for detecting.

  In the present embodiment, the control device 6 is projected onto the mask holding member 1 from the sixth and seventh encoders 51E and 51T of the first detection system 5A (encoder system 51), and the detection light via the mask holding member 1 Information on the positional relationship between the mask holding member 1 and the mask M on the basis of the detection result and the detection result of the detection light projected through the mask M from the fifth encoder 51S of the encoder system 51. The position information of the pattern MP of the mask M is acquired based on the acquired information and the detection result of the detection light through the mask holding member 1, and the mask is acquired based on the position information of the acquired pattern MP. The driving around the central axis J of the mask M when the image of the M pattern MP is formed on the substrate P is controlled.

  In the present embodiment, the control device 6 uses the seventh encoder 51T and the fifth encoder 51S to detect light via the reference mark EMS ′ formed on the mask holding member 1 and the reference formed on the mask M. Information on the positional relationship between the mask holding member 1 and the mask M is acquired by detecting each of the detection light via the mark EMS, and the acquired positional information and the reference mark EMS ′ of the mask holding member 1 are obtained. The position information of the pattern MP of the mask M is acquired based on the detection result of the detected light.

  Specifically, after loading the mask M onto the mask holding member 1 using the replacement system 64 and before starting exposure of the substrate P, the control device 6 uses the sixth encoder 51E of the first detection system 5A. The reference mark EMS ′ of the mask holding member 1 is detected using the seventh encoder 51T while the position detection mark EM ′ of the mask holding member 1 is detected, and the reference mark of the mask M is detected using the fifth encoder 51S. EMS is detected. Thereby, the control device 6 determines the positional relationship regarding the rotation direction between the reference mark EMS ′ of the mask holding member 1 and the reference mark EMS of the mask M, and consequently the position regarding the rotation direction between the mask holding member 1 and the mask M (pattern MP). Relationships can be acquired.

  As described above, the reference mark EMS ′ of the mask holding member 1 is the reference position when the encoder system 51 detects the position of the mask holding member 1 in the rotation direction using the position detection mark EM ′ of the mask holding member 1. Function as. Further, the reference mark EMS of the mask M is formed with a predetermined positional relationship with respect to each pattern MP of the mask M. Further, as described above, the positional relationship regarding the rotation direction between the mask holding member 1 and the pattern MP of the mask M is acquired in advance by detecting the reference marks EMS and EMS '. Therefore, the control device 6 loads the mask M onto the mask holding member 1 and acquires information on the positional relationship regarding the rotation direction between the mask holding member 1 and the pattern MP of the mask M by detecting the reference marks EMS and EMS ′. After that, by detecting the reference mark EMS ′ of the mask holding member 1 using the seventh encoder 51T, where each pattern MP on the mask M is positioned with respect to the reference mark RMS ′ of the mask holding member 1 You can know what you are doing.

  Then, in order to start the exposure of the substrate P, the control device 6 detects the detection light via the reference mark EMS ′ using the seventh encoder 51T of the first detection system 5A, and moves the substrate P. The mask M is moved (rotated) to the rotation start position when the mask M is rotated synchronously. Since the positional relationship between the reference mark EMS ′ of the mask holding member 1 and the reference mark (rotation start position mark) EMS of the mask M has already been acquired, the control device 6 is based on the detection result of the seventh encoder 51T. The mask M can be arranged at the rotation start position.

  Then, the control device 6 uses the sixth encoder 51E of the encoder system 51 to detect the position detection mark EM ′ of the mask holding member 1 and monitor the position information of the mask holding member 1, while the mask driving device. 2 is controlled, and the mask M is illuminated with the exposure light EL while rotating the mask holding member 1 holding the mask M. In addition, the control device 6 controls the substrate driving device 4 to monitor the position of the substrate P using the second detection system 5B in synchronization with the rotation of the mask M, and holds the substrate P. While moving the member 3, the exposure light EL through the mask M is irradiated onto the substrate P. The marks EM ′ and EMS ′ formed on the mask holding member 1 and the marks EMS formed on the mask M in a predetermined positional relationship with respect to the pattern MP are associated with each other, and the control device 6 controls the sixth encoder 51E. The position information of the pattern MP of the mask M can be acquired by monitoring the position information of the mask holding member 1.

  In the present embodiment, the position detection mark EM ′ and the reference mark EMS ′ are formed on the mask holding member 1, but the member on which the position detection mark EM ′, the reference mark EMS ′, and the like are formed is The mask holding member 1 is not limited as long as it is a predetermined member arranged in a predetermined positional relationship with the mask M.

<Fifth Embodiment>
Next, a fifth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  In each of the above-described embodiments, the marks EM, RM, EMS, etc. for acquiring the position information of the pattern MP of the mask M are formed in a predetermined region of the outer peripheral surface MF. Further, it may be formed in a portion other than the outer peripheral surface MF.

  FIG. 22 is a schematic diagram for explaining the mask M and the detection system 5 (first detection system 5A) according to the fifth embodiment. As in the above-described embodiments, a plurality of patterns MP are formed on the outer peripheral surface MF of the mask M along the circumferential direction of the outer peripheral surface MF. The mask M is held by the mask holding member 1 on the side surface MS on the −X side. As in the above-described embodiments, the control device 6 synchronizes with the movement of the substrate P in the Y-axis direction while rotating the mask M about the central axis J as the rotation axis, and displays images of a plurality of patterns MP on the substrate P. Sequentially formed on top.

  In the present embodiment, position information in the rotation direction (θX direction) of the pattern MP is obtained on the + X side surface opposite to the −X side surface MS facing the mask holding member 1 in the mask M. For this purpose, a position detection mark EM is formed. The position detection mark EM is centered in a predetermined positional relationship with respect to the pattern MP formed on the outer peripheral surface MF in a predetermined region of the side surface MS on the + X side of the mask M (in this embodiment, the peripheral region of the side surface MS). A plurality of line patterns (marks) formed around the axis J are included. Each line pattern is formed along the radial direction from the central axis J on the side surface MS. These line patterns function as a scale (diffraction grating) detected by the encoder system 51.

  The encoder system 51 of the first detection system 5A can detect line patterns of a plurality of position detection marks EM formed around the central axis J with a predetermined positional relationship with respect to the pattern MP in a predetermined region of the side surface MS of the mask M. An eighth encoder 51F is provided. The eighth encoder 51F has a configuration equivalent to that of the first to seventh encoders described above.

  Further, in the mark formation region MB on the outer peripheral surface MF of the mask M, a rotation start position mark (reference mark) EMS is formed as in the above-described embodiments, and the encoder system 51 of the first detection system 5A is A fifth encoder 51S capable of detecting the rotation start position mark EMS is provided.

  The positional relationship between the rotation start position mark EMS and the position detection mark EM is known, and the rotation start position mark EMS is used as a reference position (reference mark) when the encoder system 51 detects the position of the mask M in the rotation direction. Function. The control device 6 uses the eighth encoder 51F of the encoder system 51 to detect the position detection mark EM, so that the position information of the position detection mark EM with reference to the rotation start position mark RMS, and thus the pattern MP, is detected. Position information can be detected.

  The control device 6 detects the detection light via the position detection mark EM using the encoder system 51 including the eighth encoder 51F, and acquires the position information of the pattern MP when the mask M rotates (monitoring). However, the driving around the central axis J of the mask M when the image of the pattern MP of the mask M is formed on the substrate P is controlled.

  In the first to fifth embodiments described above, each encoder of the encoder system 51 projects detection light onto the detection surface (the outer peripheral surface MF of the mask M, the outer peripheral surface 1F of the mask holding member 1, etc.), The case of a reflective encoder that acquires position information by receiving detection light reflected by the detection surface has been described as an example. For example, as shown in FIG. A light projecting device 501 ′ that projects detection light and a light receiving device 502 ′ that is disposed so as to face the light projecting device 501 ′ across the outer peripheral surface MF and that receives the detection light transmitted through the outer peripheral surface MF. A transmissive encoder may be used. The mask M has a cylindrical shape, and one of the light projecting device 501 ′ and the light receiving device 502 ′ can be disposed in the internal space MK of the mask M, and the other can be disposed in the external space.

  In each of the above-described embodiments, each encoder of the encoder system 51 detects a position detection mark EM and acquires a relative position of the position detection mark EM with respect to the reference mark EMS (incremental method) encoder. As an example, the absolute position of each mark can be obtained by making the structures of marks (lines) formed at each position on the detection surface such as the pattern formation surface MF different from each other. May be an encoder of an absolute type (absolute type).

  In each embodiment described above, each encoder of the encoder system 51 is an optical encoder, but may be a magnetic encoder.

  In each of the above-described embodiments, the imaging characteristics (optical characteristics) of the projection optical system PL may be adjusted according to the curvature of the cylindrical (or columnar) mask M. For example, when the curvature (diameter) of the mask M to be used changes, in order to satisfactorily expose the image of the pattern MP of the mask M on the substrate P, the projection optical system PL is provided with, for example, JP-A-60-78454. An image formation characteristic adjusting device capable of adjusting the image formation characteristic of the projection optical system PL as disclosed in Japanese Patent Application Laid-Open No. 11-195602, International Publication No. 03/65428 pamphlet, and the like is provided. Depending on the curvature, the imaging characteristic adjustment device may be used to adjust the imaging characteristic of the projection optical system PL. The imaging characteristic adjusting device includes an optical element driving mechanism capable of moving a part of a plurality of optical elements constituting the projection optical system PL, and a part of the optical elements held inside the lens barrel of the projection optical system PL. It includes a pressure adjustment mechanism that adjusts the pressure of the gas in the space between the two. For example, as disclosed in JP-A-2005-311020, by irradiating a specific optical element among a plurality of optical elements of the projection optical system PL with infrared light, the projection optical system PL The imaging characteristics may be adjusted. Further, there is a possibility that the curvature of the mask M changes due to a manufacturing error of the mask M. In this case, the imaging characteristics of the projection optical system PL are adjusted as described above according to the curvature of the mask M. As a result, an image of the pattern MP of the mask M can be satisfactorily formed on the substrate P.

  In each of the embodiments described above, a reflective mask is used as a mask, but a transmissive mask may be used. In that case, the illumination system IL illuminates the exposure light EL on the uppermost part of the mask M, for example. Then, the exposure light EL that has passed through the mask M and passed through the lowermost part BT of the mask M enters the projection optical system PL.

  In each of the above-described embodiments, the mask M is cylindrical, but may be columnar. In this case, in the mask holding member 1, the protruding portion 28 protruding to the + X side from the holding surface 26 and a part of the shaft member 20 are omitted.

  In each of the above-described embodiments, a plurality of patterns MP are formed along the circumferential direction of the pattern formation surface MF of the mask M. For example, the size of the device (shot region S) to be manufactured, etc. Accordingly, it is not always necessary to form a plurality of masks along the circumferential direction of the mask M.

  In each of the above-described embodiments, a plurality of patterns MP may be formed along the central axis J direction (X-axis direction) of the mask M.

  In each of the above-described embodiments, an immersion method as disclosed in, for example, International Publication No. 99/49504 pamphlet may be applied. That is, the optical path space of the exposure light EL between the projection optical system PL and the substrate P, in other words, a state where the optical path space on the image plane (exit surface) side of the optical element at the tip of the projection optical system PL is filled with liquid. Then, the mask P, the projection optical system PL, and the exposure light EL through the liquid may be irradiated onto the substrate P to project an image of the pattern MP of the mask M onto the substrate P. When the immersion method is applied, the projection area AR is so covered as to cover a part of the area on the substrate P as disclosed in, for example, WO 99/49504. A local liquid immersion method that forms a liquid immersion region that is larger than the substrate P and smaller than the substrate P may be employed. For example, Japanese Patent Laid-Open Nos. 6-124873, 10-303114, and US Pat. , 825, 043, etc., a global liquid immersion method may be employed in which exposure is performed in a state where the entire surface of the substrate to be exposed is immersed in the liquid. In addition, the liquid may be water (pure water), or may be other than water, such as perfluorinated polyether (PFPE), a fluorinated fluid such as fluorinated oil, or cedar oil. When applying the liquid immersion method, for example, as disclosed in the pamphlet of International Publication No. 2004/019128, the optical path space on the object surface (incident surface) side of the tip optical element is also filled with the liquid. May be.

In each of the above-described embodiments, ArF excimer laser light is used as the exposure light EL. However, when a reflective mask is used as the mask M, soft X-rays (EUV) may be used as the exposure light EL. The reflective mask pattern MP can be formed based on an EB drawing method using an EB exposure machine, as disclosed in, for example, Japanese Patent Laid-Open No. 7-153672.
The reflective mask forms a multilayer film containing Mo, Si, etc. on a substrate such as quartz or ceramics, and has absorption on EUV containing Cr, W, Ta, etc. on the multilayer film. It can be formed by forming a body pattern.

  In addition, as the substrate P in each of the above embodiments, not only a semiconductor wafer for manufacturing a semiconductor device, but also a glass substrate for a display device, a ceramic wafer for a thin film magnetic head, or an original mask (reticle) used in an exposure apparatus ( Synthetic quartz, silicon wafer) or the like is applied.

  As the exposure apparatus EX, a step-and-scan type scanning exposure apparatus (scanning stepper) that scans and exposes a substrate P with an image of a pattern MP of the mask M while moving the substrate P in synchronization with the movement of the mask M. In addition, a step-and-repeat projection exposure apparatus (stepper) that performs batch exposure of the substrate P with an image of the pattern MP of the mask M while the mask M and the substrate P are stationary and sequentially moves the substrate P stepwise. Can also be applied.

  Furthermore, in the step-and-repeat exposure, after the reduced image of the first pattern is transferred onto the substrate P using the projection optical system while the first pattern and the substrate P are substantially stationary, the second pattern With the projection optical system, the reduced image of the second pattern may be partially overlapped with the first pattern and collectively exposed on the substrate P (stitch type batch exposure apparatus). ). Further, the stitch type exposure apparatus can be applied to a step-and-stitch type exposure apparatus in which at least two patterns are partially transferred on the substrate P, and the substrate P is sequentially moved.

  Further, the present invention provides a multi-stage type (twin stage) having a plurality of substrate stages as disclosed in JP-A-10-163099, JP-A-10-214783, JP-T 2000-505958, and the like. Type) exposure apparatus.

  Further, for example, as disclosed in JP-A-11-135400 (corresponding to International Publication No. 1999/23692 pamphlet), JP-A 2000-164504 (corresponding US Pat. No. 6,897,963), etc. The present invention can also be applied to an exposure apparatus that includes a substrate stage for holding a substrate and a reference member on which a reference mark is formed and / or a measurement stage on which various photoelectric sensors are mounted.

  The type of exposure apparatus EX is not limited to an exposure apparatus for manufacturing a semiconductor element that exposes a semiconductor element pattern onto a substrate P, but an exposure apparatus for manufacturing a liquid crystal display element or a display, a thin film magnetic head, an image sensor (CCD). In addition, the present invention can be widely applied to an exposure apparatus for manufacturing a micromachine, MEMS, DNA chip, reticle, mask, or the like.

  Further, as disclosed in, for example, Japanese translations of PCT publication No. 2004-51850 (corresponding US Pat. No. 6,611,316), two mask patterns are synthesized on a substrate via a projection optical system. The present invention can also be applied to an exposure apparatus that double-exposes one shot area on a substrate almost simultaneously by multiple scanning exposures.

  As described above, the exposure apparatus EX according to the embodiment of the present application maintains various mechanical subsystems including the respective constituent elements recited in the claims of the present application so as to maintain predetermined mechanical accuracy, electrical accuracy, and optical accuracy. Manufactured by assembling. In order to ensure these various accuracies, before and after assembly, various optical systems are adjusted to achieve optical accuracy, various mechanical systems are adjusted to achieve mechanical accuracy, and various electrical systems are Adjustments are made to achieve electrical accuracy. The assembly process from the various subsystems to the exposure apparatus includes mechanical connection, electrical circuit wiring connection, pneumatic circuit piping connection and the like between the various subsystems. Needless to say, there is an assembly process for each subsystem before the assembly process from the various subsystems to the exposure apparatus. When the assembly process of the various subsystems to the exposure apparatus is completed, comprehensive adjustment is performed to ensure various accuracies as the entire exposure apparatus. The exposure apparatus is preferably manufactured in a clean room where the temperature, cleanliness, etc. are controlled.

  As shown in FIG. 24, a microdevice such as a semiconductor device includes a step 201 for designing a function / performance of the microdevice, a step 202 for producing a mask (reticle) based on the design step, and a substrate as a base material of the device. Manufacturing step 203, substrate processing step 204 including substrate processing (exposure processing) for exposing the substrate with an image of a mask pattern and developing the exposed substrate according to the above-described embodiment, device assembly step (dicing process, bonding) (Including processing processes such as process and package process) 205, inspection step 206 and the like.

DESCRIPTION OF SYMBOLS 1 ... Mask holding member, 2 ... Mask drive device, 3 ... Substrate holding member, 4 ... Substrate drive device, 5 ... Detection system, 5A ... 1st detection system, 5B ... 2nd detection system, 6 ... Control apparatus, EM ... Position measurement mark, EMS ... rotation start position mark, EL ... exposure light, EX ... exposure apparatus, IL ... illumination system, J ... central axis, M ... mask, MA ... pattern formation region, MB ... mark formation region, MF ... Pattern formation surface, MP ... pattern, MS ... side surface, P ... substrate, PL ... projection optical system, RM ... alignment mark, S (S1 to S26) ... shot region

Claims (18)

An exposure apparatus for transferring an image of a pattern onto a substrate moving in a predetermined direction,
Arranged along a cylindrical outer peripheral surface having a constant radius from a rotation center line parallel to the X axis of the XYZ orthogonal coordinate system ;
A pattern forming region where a pattern to be transferred is formed on the substrate, and a mark arranged outside the pattern forming region with respect to the direction of the rotation center line, and a mark for measuring a circumferential position of the pattern forming region A mask support device for supporting a cylindrical mask having a mark formation region to be formed so as to be rotatable around the rotation center line;
A first driving device for generating a driving force for rotating the cylindrical mask in a θx direction around the rotation center line in order to continuously transfer the pattern of the pattern formation region onto the substrate;
A driving force for moving the cylindrical mask in three directions of the X-axis direction parallel to the direction of the rotation center line, the Y-axis direction orthogonal to the rotation center line, and the Z-axis direction, and about the Y axis a second driving device that generates a driving force for moving the cylindrical mask in the θy direction and the θz direction around the Z axis;
An exposure apparatus comprising: In the mark formation region of the cylindrical mask, a scale for measuring the rotational position of the cylindrical mask in the θx direction or the position in the X-axis direction parallel to the rotational center line is along the outer peripheral surface. The exposure apparatus according to claim 1, wherein the exposure apparatus is formed continuously.   The exposure apparatus according to claim 2, further comprising an encoder system arranged to face the mark formation region of the cylindrical mask and measuring the scale.   The exposure apparatus according to claim 3, further comprising a control device that inputs measurement information from the encoder system and controls the first drive device or the second drive device based on the measurement information. The mark area of the cylindrical mask includes a first mark formation area disposed on one of both sides of the pattern formation area with respect to the X-axis direction parallel to the rotation center line, and a second mark disposed on the other side. A mark formation area,
The encoder system is opposed to the first mark formation area, and is opposed to the first encoder system that measures a first scale formed in the first mark formation area, and the second mark formation area. A second encoder system for measuring a second scale formed in the second mark formation region;
The exposure apparatus according to claim 3, further comprising: The exposure apparatus includes a substrate drive device that moves the substrate in a predetermined direction for exposure, and a substrate position measurement device that measures a movement position of the substrate,
The control device synchronizes the rotation position of the cylindrical mask in the θx direction and the movement position of the substrate, and scans and exposes the pattern of the pattern formation region of the cylindrical mask on the substrate. The exposure apparatus according to claim 5, wherein the exposure apparatus controls the first driving apparatus and the substrate driving apparatus.   The exposure apparatus according to claim 5, wherein the encoder system is an optical encoder that projects light onto the scale and detects reflected light by a light receiving element.   The exposure apparatus according to claim 5, wherein the scale formed in the mark formation region of the cylindrical mask is configured by one of an incremental type and an absolute type. The first encoder system and the second encoder system are arranged to face each of the first and second mark forming regions of the cylindrical mask, separated in the X-axis direction parallel to the rotation center line. An exposure apparatus according to claim 5. The mask support device includes a mask holding member that detachably holds the cylindrical mask, a support member that rotatably supports the mask holding member around the rotation center line , and a base member that supports the support member. And
The first driving device applies a driving force in the θx direction from the support member to the mask holding member ;
The said 2nd drive device gives each drive force of the said X-axis direction, the said Y-axis direction, the said Z-axis direction, the said (theta) y direction, and the (theta) z direction from the said base member to the said supporting member. Exposure equipment.   The first driving device includes a magnet unit and a coil unit provided on the mask holding member side and the support member side, and a driving force for rotating the cylindrical mask in the θx direction; The exposure apparatus according to claim 5, wherein the driving force in the X-axis direction parallel to the rotation center line is generated by a Lorentz force. The mark formation region of the cylindrical mask is provided with a plurality of alignment marks intermittently arranged in the rotation direction in a positional relationship defined with respect to the pattern of the pattern formation region,
12. The exposure apparatus according to claim 1, further comprising a projection optical system capable of projecting a part of a pattern in a pattern formation region of the cylindrical mask and the alignment mark toward the substrate at a magnification β. The exposure apparatus according to one item. In the mark formation region of the cylindrical mask, a reference mark corresponding to a start position in the rotation direction of the pattern formation region is provided at a specific position in the rotation direction,
The exposure apparatus includes a light receiving device that optically detects the reference mark in order to acquire information about a rotation start position when the cylindrical mask rotates in synchronization with the movement of the substrate. The exposure apparatus described.   The device manufacturing method using the exposure apparatus as described in any one of Claims 1-13. In an exposure method for transferring an image of a mask pattern onto a substrate moving in a predetermined direction by a scanning method,
A pattern forming region in which a pattern to be transferred on the substrate is formed from a rotation center line parallel to the X axis of the XYZ orthogonal coordinate system along a cylindrical outer peripheral surface; A cylindrical mask provided outside the pattern formation region with respect to the direction and provided with a mark formation region on which a mark for measuring a circumferential position of the pattern formation region is formed . Rotating in the θx direction , and irradiating a part of the pattern formation region with rectangular illumination light whose longitudinal direction is the direction of the rotation center line;
During the rotation of the cylindrical mask, the position of the cylindrical mask is adjusted with respect to the X-axis direction parallel to the rotation center line , the three directions of the Y-axis direction and the Z-axis direction orthogonal to the X-axis direction. And adjusting the position of the cylindrical mask with respect to each of the θy direction around the Y axis and the θz direction around the Z axis ,
An exposure method in which the pattern of the cylindrical mask is continuously scanned and exposed while being aligned with a predetermined region on the substrate. A scale for measuring the rotational position of the cylindrical mask or the position in the direction of the rotation center line is continuously formed along the outer peripheral surface in the mark forming region of the cylindrical mask, The exposure method according to claim 15, wherein control of rotation of the cylindrical mask in the θx direction or control of movement in the direction of the rotation center line is performed based on measurement information from an encoder system disposed opposite to the control system . .   The mark area of the cylindrical mask includes a first mark formation area disposed on one side of the pattern formation area with respect to the direction of the rotation center line, and a second mark formation area disposed on the other side. The exposure method according to claim 16, wherein the scale formed in each of the first mark formation region and the second mark formation region is measured by a plurality of encoder systems.   The device manufacturing method using the exposure method as described in any one of Claims 15-17.

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