JP5590308B2 - Surface-coated cutting tool with excellent fracture resistance due to hard coating layer - Google Patents
Surface-coated cutting tool with excellent fracture resistance due to hard coating layer Download PDFInfo
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- 238000005520 cutting process Methods 0.000 title claims description 51
- 239000011247 coating layer Substances 0.000 title claims description 42
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 claims description 92
- 229910008482 TiSiN Inorganic materials 0.000 claims description 72
- 239000010410 layer Substances 0.000 claims description 57
- 239000013078 crystal Substances 0.000 claims description 51
- 238000005259 measurement Methods 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 17
- 239000002245 particle Substances 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000011362 coarse particle Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 229910008484 TiSi Inorganic materials 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004925 denaturation Methods 0.000 description 1
- 230000036425 denaturation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 235000000396 iron Nutrition 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Description
この発明は、鋼や鋳鉄などの高速断続重切削加工という厳しい切削条件下で用いた場合でも、硬質被覆層がすぐれた耐欠損性を示し、切削工具の長寿命化が可能となる表面被覆切削工具(以下、被覆工具という)に関するものである。 This invention is a surface-coated cutting tool that has excellent chipping resistance and a long tool life even when used under severe cutting conditions such as high-speed intermittent heavy cutting of steel and cast iron. The present invention relates to a tool (hereinafter referred to as a coated tool).
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工にバイトの先端部に着脱自在に取り付けて用いられるインサートや、前記インサートを着脱自在に取り付けて、面削加工や溝加工、さらに肩加工などに用いられるソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミルなどが知られている。 In general, for coated tools, inserts that are detachably attached to the tip of a cutting tool for turning of work materials such as various types of steel and cast iron, and the inserts are detachably attached to be used for chamfering and grooving. An insert type end mill that performs cutting processing in the same manner as a solid type end mill used for processing and shoulder processing is known.
例えば、特許文献1に示されるように、炭化タングステン(以下、WCで示す)基超硬合金焼結体で構成された工具本体の表面にTiC、TiCN、TiNの内の1種の単層または2種以上の複層を介して(Ti1−xSix)(C1−yNy)[ただし、0.55≦x≦0.99、0.01≦y≦1.0、0.5≦z≦1.34]からなる組成のTiとSiの複合炭窒化物硬質層および/または複合窒化物硬質層を被覆してなる被覆工具が知られている。
また、特許文献2に示されるように、WC基超硬合金焼結体で構成された工具本体の表面に、TiAlN系の硬質被覆層を蒸着形成してなる被覆工具が知られており、この被覆工具においては、その特徴の一つとして、硬質被覆層を柱状結晶で構成するとともに、硬質被覆層の表面側に位置する結晶粒の結晶幅を、硬質被覆層の工具基体側に位置する結晶粒の結晶幅より大きい二つの領域で構成することにより、被覆工具の耐欠損性、耐摩耗性を向上させている。
For example, as shown in
Further, as shown in
近年の切削加工装置のFA化はめざましく、加えて切削加工に対する省力化、省エネ化、低コスト化さらに効率化の要求も強く、これに伴い、高送り、高切り込みなどより高効率の重切削加工が要求される傾向にあるが、上記の従来被覆工具においては、各種の鋼や鋳鉄を通常条件下で切削加工した場合に特段の問題は生じないが、切刃に対して衝撃的かつ断続的な高負荷が作用する乾式断続重切削や、連続的な高負荷がかかる乾式連続高送り切削に用いた場合には、層中へのクラック進展が避けられず表面被覆層の剥離・欠落が生じるため、切刃部に欠損を生じやすく、これが原因で、比較的短時間で使用寿命に至るのが現状である。
すなわち、前記特許文献1のように、TiSiNを被覆層として用いた技術では、高速の断続切削のように切刃に対して衝撃的な負荷がかかる切削加工条件においては、層内へのクラック進展を避けられず、比較的短時間で寿命に至るという欠点があった。
また、前記特許文献2のように、柱状晶によって構成される硬質皮膜は、粒子同士の結合力が弱く、結晶粒の欠落などが原因で高速切削に上限があった。
In recent years, the FA of cutting devices has been remarkable, and in addition, there are strong demands for labor saving, energy saving, cost reduction and efficiency for cutting, and with this, high-efficiency heavy cutting such as high feed and high cutting However, in the above-mentioned conventional coated tools, there are no particular problems when various steels and cast irons are machined under normal conditions, but they are shocking and intermittent to the cutting edge. When it is used for dry intermittent heavy cutting where a high load is applied and dry continuous high feed cutting where a continuous high load is applied, crack growth into the layer is inevitable and the surface coating layer is peeled or missing For this reason, the cutting edge is likely to be damaged, and due to this, the service life is reached in a relatively short time.
That is, in the technique using TiSiN as a coating layer as in
Further, as in
そこで、本発明者らは、前述のような観点から、被覆工具の耐欠損性を高め、使用寿命の延命化を図るべく、TiSiN層からなる硬質被覆層の結晶形態に着目し、鋭意研究を行った結果、次のような知見を得た。 In view of the above, the inventors of the present invention focused on the crystal form of the hard coating layer made of the TiSiN layer in order to increase the fracture resistance of the coated tool and to prolong the service life. As a result, the following findings were obtained.
従来の被覆工具のTiSiN層からなる硬質被覆層は、例えば、図2に示される物理蒸着装置の1種であるスパッタリング(SP)装置に上記のWC基超硬合金焼結体からなる工具基体を装着し、例えば、
装置内加熱温度:300〜500℃、
工具基体に印加する直流バイアス電圧:−50〜−100V、
カソード電極:TiSi合金、
スパッタリング電力:3〜6kW、
装置内ガス流量:窒素(N2)ガス+アルゴン(Ar)ガス、
装置内ガス圧力:0.3〜1.5Pa、
の条件で、TiSiN層(以下、従来TiSiN層という)を形成することにより製造されている。
For example, a hard coating layer made of a TiSiN layer of a conventional coated tool is formed by, for example, applying a tool substrate made of the above WC-based cemented carbide sintered body to a sputtering (SP) apparatus which is one type of physical vapor deposition apparatus shown in FIG. Wearing, for example,
In-apparatus heating temperature: 300-500 ° C
DC bias voltage applied to the tool base: −50 to −100 V,
Cathode electrode: TiSi alloy,
Sputtering power: 3-6 kW,
Gas flow in the apparatus: nitrogen (N 2 ) gas + argon (Ar) gas,
In-apparatus gas pressure: 0.3 to 1.5 Pa,
Under these conditions, a TiSiN layer (hereinafter referred to as a conventional TiSiN layer) is formed.
しかし、本発明者らは、TiSiN層の形成を、例えば、図1に概略説明図で示される物理蒸着装置の1種である圧力勾配型Arプラズマガスを利用したイオンプレーティング装置を用いて、装置内に上記の工具基体を装着し、例えば、
工具基体温度:350〜450 ℃、
蒸発源:金属Tiおよび金属Si
プラズマガン放電電力(金属Tiに対して):9〜13kW
プラズマガン放電電力(金属Siに対して):8〜12kW
反応ガス流量:窒素(N2)ガス 100〜120sccm、
放電ガス:アルゴン(Ar)ガス 50〜60sccm、
工具基体に印加する直流バイアス電圧: 0〜−20V
という条件下で蒸着を行い、かつ、蒸着初期は、バイアス電圧を0Vにして工具基体側(領域I)のTiSiN層を蒸着し、蒸着後期には、バイアス電圧を−10〜−20Vに切り換えて硬質被覆層の表面側(領域II)のTiSiN層の蒸着を行うと、この結果形成された領域Iと領域IIからなるTiSiN層(以下、改質TiSiN層という)は、前記従来TiSiN層に比して、切刃に対して衝撃的かつ断続的な高負荷が作用する乾式断続重切削や、連続的な高負荷がかかる乾式連続高送り切削において、すぐれた耐摩耗性と耐欠損性を示すことを見出したのである。
However, the present inventors have formed a TiSiN layer by using, for example, an ion plating apparatus using a pressure gradient type Ar plasma gas, which is one type of physical vapor deposition apparatus schematically shown in FIG. The above tool base is mounted in the apparatus, for example,
Tool substrate temperature: 350 to 450 ° C.
Evaporation source: Metal Ti and Metal Si
Plasma gun discharge power (relative to metal Ti): 9-13 kW
Plasma gun discharge power (relative to metal Si): 8-12 kW
Reaction gas flow rate: nitrogen (N 2) gas 100~120Sccm,
Discharge gas: Argon (Ar) gas 50-60 sccm,
DC bias voltage applied to tool base: 0 to -20V
In the initial stage of vapor deposition, the bias voltage is set to 0 V, and the TiSiN layer on the tool base side (region I) is deposited. In the latter stage of vapor deposition, the bias voltage is switched to -10 to -20 V. When the TiSiN layer on the surface side (region II) of the hard coating layer is deposited, the resulting TiSiN layer composed of region I and region II (hereinafter referred to as a modified TiSiN layer) is compared with the conventional TiSiN layer. Excellent wear resistance and fracture resistance in dry intermittent heavy cutting where impact and intermittent high load are applied to the cutting edge and dry continuous high feed cutting where continuous high load is applied I found out.
この発明は、前記研究結果に基づいてなされたものであって、
「(1) 炭化タングステン基超硬合金焼結体からなる工具基体の表面に、0.5〜2μmの平均層厚を有するTiSiN膜からなる硬質被覆層を物理蒸着した表面被覆切削工具において、
(a)硬質被覆層の、工具基体とTiSiN膜の界面から0.1μmの高さ位置にあるTiSiN結晶粒の粒径幅をWΙ、TiSiN膜の最表面から0.1μmの深さ位置にあるTiSiN結晶粒の粒径幅をWΙΙとしたとき、
10nm<WΙ<50nm、かつ、5<WΙΙ/WΙ<100
の関係を満たし、
(b)さらに、電子線後方散乱回折装置を用いて、硬質被覆層断面のTiSiN結晶粒の結晶方位を解析し、測定された二次元領域を工具基体表面に対して略垂直な方向に100nm毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とTiSiN膜の界面からTiSiN膜の成長方向に100nm毎のピッチで区切り、100nm×100nmに区分けされたそれぞれの領域(セル)に存在する各測定点の、
<111>結晶方位とTiSiN膜測定断面の法線方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下であり、
<111>結晶方位とTiSiN膜測定断面の法線と直交する方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下であり、
<100>結晶方位とTiSiN膜測定断面の法線がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下
である100nm幅の縦区分が、測定された全面積のうちの60%以上を占有することを特徴とする表面被覆切削工具。
(2) 前記TiSiN膜の組成をTi1−xSixNで表した時に、Tiに対するSiの含有割合xが0.3≦x≦0.6を満たすことを特徴とする(1)に記載の表面被覆切削工具。」
に特徴を有するものである。
This invention was made based on the research results,
“(1) In a surface-coated cutting tool in which a hard coating layer made of a TiSiN film having an average layer thickness of 0.5 to 2 μm is physically vapor-deposited on the surface of a tool base made of a tungsten carbide-based cemented carbide sintered body,
Of (a) hard coating layer, a TiSiN grains with diameter width that is from the interface of the tool substrate and the TiSiN film to a height position of 0.1 [mu] m W iota, the depth position from the outermost surface of 0.1 [mu] m of the TiSiN film When the grain width of a certain TiSiN crystal grain is W 1 ,
10nm <W Ι <50nm and,, 5 <W ΙΙ / W Ι <100
Meet the relationship,
(B) Further, using an electron beam backscatter diffraction device, the crystal orientation of the TiSiN crystal grains in the hard coating layer cross section is analyzed, and the measured two-dimensional region is measured every 100 nm in a direction substantially perpendicular to the tool substrate surface. Each of the regions (cells) divided into 100 nm × 100 nm by dividing each vertical section into 100 nm × 100 nm from the interface between the tool base and the TiSiN film in the growth direction of the TiSiN film. Of each measuring point present in
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the normal direction of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees among cells existing in the same vertical section. And
The average inclination angle of the inclination angle formed by the direction perpendicular to the <111> crystal orientation and the normal line of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle among cells existing in the same vertical section Is 15 degrees or less,
The average inclination angle of the inclination angle formed by the <100> crystal orientation and the normal line of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees or less among the cells existing in the same vertical section. A surface-coated cutting tool characterized in that the vertical section of 100 nm width occupies 60% or more of the total area measured.
(2) When the composition of the TiSiN film is represented by Ti 1-x Si x N, the Si content ratio x with respect to Ti satisfies 0.3 ≦ x ≦ 0.6. Surface coated cutting tool. "
It has the characteristics.
本発明について、以下に詳細に説明する。 The present invention will be described in detail below.
既に述べたように、この発明は、例えば、図1に概略説明図で示される圧力勾配型Arプラズマガスを利用したイオンプレーティング装置を用いて、装置内にWC基超硬合金焼結体からなる工具基体を装着し、例えば、
工具基体温度:350〜450 ℃、
蒸発源:金属Tiおよび金属Si
プラズマガン放電電力(金属Tiに対して):9〜13kW
プラズマガン放電電力(金属Siに対して):8〜12kW
反応ガス流量:窒素(N2)ガス 100〜120sccm、
放電ガス:アルゴン(Ar)ガス 50〜60sccm、
工具基体に印加する直流バイアス電圧: 0〜−20V
という条件下で蒸着を行い、かつ、蒸着初期は、バイアス電圧を0Vにして工具基体側(領域I)のTiSiN層を蒸着し、蒸着後期には、バイアス電圧を−10〜−20Vに切り換えて硬質被覆層の表面側(領域II)のTiSiN層の蒸着を行うことによって、領域Iと領域IIからなる改質TiSiN層を形成するものである。
なお、従来TiSiN層の構成成分であるTiが高温強度を向上させ、また、Siが耐熱性を向上させ、Nが層の強度を向上させる作用があることはすでによく知られているが、これに加えて、この発明の改質TiSiN層は高速断続重切削加工条件という厳しい使用条件下でも、すぐれた耐欠損性を示す。
そして、その理由は以下に述べるように、改質TiSiN層の特異な結晶粒形態と強い関連性を有する。
As already described, the present invention uses, for example, a WC-based cemented carbide sintered body in an apparatus using an ion plating apparatus using a pressure gradient type Ar plasma gas shown schematically in FIG. A tool base is mounted, for example,
Tool substrate temperature: 350 to 450 ° C.
Evaporation source: Metal Ti and Metal Si
Plasma gun discharge power (relative to metal Ti): 9-13 kW
Plasma gun discharge power (relative to metal Si): 8-12 kW
Reaction gas flow rate: nitrogen (N 2) gas 100~120Sccm,
Discharge gas: Argon (Ar) gas 50-60 sccm,
DC bias voltage applied to tool base: 0 to -20V
In the initial stage of vapor deposition, the bias voltage is set to 0 V, and the TiSiN layer on the tool base side (region I) is deposited. In the latter stage of vapor deposition, the bias voltage is switched to -10 to -20 V. A modified TiSiN layer composed of regions I and II is formed by vapor-depositing a TiSiN layer on the surface side (region II) of the hard coating layer.
It is well known that Ti, which is a constituent component of the TiSiN layer, improves the high temperature strength, Si improves the heat resistance, and N improves the strength of the layer. In addition, the modified TiSiN layer of the present invention exhibits excellent fracture resistance even under severe use conditions such as high-speed intermittent heavy cutting conditions.
The reason is strongly related to the unique crystal grain shape of the modified TiSiN layer as described below.
まず、前記蒸着で形成された改質TiSiN層について、膜の成長方向に対して垂直平面内におけるTiSiN結晶粒の粒径幅の変化を観察したところ、図3(a)に、層厚方向縦断面模式図を、また、図3(b)には、イ−イ面に沿った斜視断面模式図を示すように、領域I(工具基体側の硬質被覆層)においては、粒径幅が10〜50nmのTiSiN結晶粒が観察され、一方、領域II(硬質被覆層の表面側)においては、領域Iの粒径幅より大きな粒径幅を有するTiSiN結晶粒が観察された。
さらに、集束イオンビーム加工装置を用いて、例えば、図3(a)および図3(b)に示す模式図のイ−イ面に示すように薄片化した試料について、工具基体表面と硬質被覆層界面から垂直高さ換算で0.1μmの位置での粒径幅WΙおよび、硬質被覆層表面から垂直深さ換算で0.1μmの位置の粒径幅WΙΙを測定し、それらの値とWΙΙ/WΙの数値を測定したところ、WΙΙ/WΙは5〜100であることを確認した。
なお、この改質TiSiN層の平均層厚、領域Iと領域IIのTiSiN結晶粒の粒径幅、WΙ、WΙΙおよびWΙΙ/WΙの値は、特に、工具基体である超硬合金焼結体のWCの粒径、前記蒸着条件の内の蒸着時間によって影響を受けるが、WCの平均粒径が0.2〜3μm、また、蒸着時間が75〜330minであれば、0.5〜2μmの平均層厚で、かつ、WΙΙ/WΙが5〜100の範囲の改質TiSiN層を形成することができる。
なお、ここでいう「粒径幅」とは、「前記高さ換算あるいは深さ換算で0.1μmとなる位置に工具基体表面と平行な線を引いた場合に、ひとつの粒子内を通る線分の長さの平均値」である。
First, with respect to the modified TiSiN layer formed by the vapor deposition, when the change in the grain width of the TiSiN crystal grains in a plane perpendicular to the film growth direction was observed, FIG. In the area I (hard coating layer on the tool base side), the particle size width is 10 as shown in the schematic view of the plane and in FIG. TiSiN crystal grains of ˜50 nm were observed, while TiSiN crystal grains having a particle size width larger than the particle size width of region I were observed in region II (the surface side of the hard coating layer).
Further, using the focused ion beam processing apparatus, the surface of the tool base and the hard coating layer are obtained for the thinned sample as shown, for example, in the Y plane of the schematic diagrams shown in FIGS. 3 (a) and 3 (b). grain radial width W from the interface at the location of 0.1μm in vertical height in terms Ι and measures the particle radial width W Iotaiota position 0.1μm vertical depth Convert hard coating layer surface, and their values measurement of the value of the W ΙΙ / W Ι, the W ΙΙ / W Ι was confirmed to be 5 to 100.
The average layer thickness of the reformed TiSiN layer, regions I and II of the TiSiN grains with diameter width, W iota, the value of W Iotaiota and W ΙΙ / W Ι is particularly the tool substrate of cemented carbide Although it is affected by the WC grain size of the sintered body and the deposition time among the above deposition conditions, if the average grain size of WC is 0.2 to 3 μm and the deposition time is 75 to 330 min, 0.5% with an average layer thickness of ~2Myuemu, and, W ΙΙ / W Ι can form a modified TiSiN layer ranging from 5 to 100.
The term “particle size width” as used herein means “a line passing through one particle when a line parallel to the tool base surface is drawn at a position where the height or depth is 0.1 μm. The average length of minutes.
ついで、さらに、電子線後方散乱回折装置を用いて、硬質被覆層断面のTiSiN結晶粒の結晶方位を解析し、測定された二次元領域を垂直に100nm毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とTiSiN膜の界面からTiSiN膜の成長方向に100nm毎のピッチで区切り、100nm×100nmに区分けされたそれぞれの領域(セル)に存在する各測定点の、
<111>結晶方位とTiSiN膜測定断面の法線方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下であり、
<111>結晶方位とTiSiN膜測定断面の法線と直交する方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下であり、
<100>結晶方位とTiSiN膜測定断面の法線がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下である100nm幅の縦区分が、測定された全面積のうちの60%以上を占有することが見出された。
Then, using an electron beam backscatter diffractometer, the crystal orientation of the TiSiN crystal grains of the hard coating layer cross section is analyzed, and the measured two-dimensional region is vertically divided into vertical sections at a pitch of every 100 nm, Each vertical section is divided from the interface between the tool base and the TiSiN film at a pitch of 100 nm in the growth direction of the TiSiN film, and each measurement point existing in each region (cell) divided into 100 nm × 100 nm,
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the normal direction of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees among cells existing in the same vertical section. And
The average inclination angle of the inclination angle formed by the direction perpendicular to the <111> crystal orientation and the normal line of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle among cells existing in the same vertical section Is 15 degrees or less,
The average inclination angle of the inclination angle formed by the <100> crystal orientation and the normal line of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees or less among the cells existing in the same vertical section. It has been found that a 100 nm wide longitudinal section occupies more than 60% of the total area measured.
前記改質TiSiN層の領域II(粗粒領域)では、すくい面側から生じる垂直方向へのクラック発生を抑制するとともに、直下の領域Iに存在する微細な結晶粒群の結晶方位と強く配向し、ずれが15度以下となる結晶方位を有することから、領域Iと領域IIの結晶界面で高い整合性が導入され、層界面の付着強度を高めるだけでなく、領域IIの粗大粒子を媒介として領域Iの微細粒同士の結合を高め、高い靭性を発揮させ耐欠損性を向上させる作用を有する。
また、領域Iでは、結晶粒界が多数導入されていることで、改質TiSiN層中での亀裂進展を分散させ、耐欠損性を向上させる作用を有する。
In the region II (coarse grain region) of the modified TiSiN layer, the generation of cracks in the vertical direction generated from the rake face side is suppressed, and the crystal orientation of the fine grain group existing in the region I immediately below is strongly oriented. Since the crystal orientation is such that the deviation is 15 degrees or less, high consistency is introduced at the crystal interface between the region I and the region II, and not only the adhesion strength at the layer interface is increased but also the coarse particles in the region II are used as mediators. It has the effect of enhancing the bonding between the fine grains in the region I, exhibiting high toughness and improving fracture resistance.
In the region I, since a large number of crystal grain boundaries are introduced, the crack progress in the modified TiSiN layer is dispersed and the fracture resistance is improved.
前記改質TiSiN層について、領域IのTiSiN結晶粒の粒径幅が50nmを超えると、前記した亀裂の進展分散効果および領域IIの粗大粒欠落抑制効果が小さくなり、一方、領域IのTiSiN結晶粒の粒径幅が10nm未満では、TiSiN結晶粒自体の強度が維持されないため、領域IのTiSiN結晶粒の粒径幅は10〜50nmと定めた。
また、領域Iと領域IIのそれぞれの中間高さにおけるTiSiN結晶粒の粒径幅WΙ、WΙΙの比の値WΙΙ/WΙが5未満では、領域IIの粗大TiSiN結晶粒の大きさが十分でなく、領域Iの微細TiN結晶粒の結合を高める効果が得られず、一方、WΙΙ/WΙが100を超えると粒径幅が大きくなり結晶粒が粗大化しすぎて、剥離を生じやすくなることから、WΙΙ/WΙの値は、5〜100と定めた。
さらに、TiSiN膜の組成をTi1−xSixNで表した時に、Tiに対するSiの含有割合xが0.3未満では、Siの含有割合が低く所望の耐熱性が得られないため好ましくなく、0.6を超えるとTiの含有割合が低く所望の高温強度が得られないため好ましくない。そこで、xの値は、0.3〜0.6と定めた。
When the grain width of the TiSiN crystal grains in the region I exceeds 50 nm in the modified TiSiN layer, the effect of spreading and distributing cracks and the effect of suppressing the loss of coarse grains in the region II are reduced, while the TiSiN crystal in the region I is reduced. When the grain size width of the grains is less than 10 nm, the strength of the TiSiN crystal grains themselves is not maintained. Therefore, the grain width of the TiSiN crystal grains in the region I is determined to be 10 to 50 nm.
Further, regions I and each of definitive to an intermediate height TiSiN grains with diameter width W of II iota, the ratio of the values W ΙΙ / W Ι is less than 5 W Iotaiota, coarse TiSiN grain region II size is not sufficient, not to obtain the effect of enhancing the binding of fine TiN grains in the region I, whereas, W ΙΙ / W Ι is too greater than the crystal grains are coarsened particle diameter width is increased to 100, the release since the easily occur, the value of W ΙΙ / W Ι was defined as 5 to 100.
Further, when the composition of the TiSiN film is expressed by Ti 1-x Si x N, if the Si content ratio x with respect to Ti is less than 0.3, the Si content ratio is low and the desired heat resistance cannot be obtained. If it exceeds 0.6, the Ti content is low and the desired high-temperature strength cannot be obtained. Therefore, the value of x is set to 0.3 to 0.6.
また、本発明の改質TiSiN層は、工具基体表面から硬質被覆層の表面にまで、成長方向に、結晶方位のずれが15度以下である縦区分の占有面積が60%以上であることから、既に述べたように、領域IIの粗大粒子と領域Iの微細粒子の界面において高い結合力を発揮し、さらに、領域IIの粗大粒子を介して領域Iの微細結晶粒が高い靭性を発揮するのである。 Further, the modified TiSiN layer of the present invention has an occupied area of 60% or more in the vertical section where the deviation of crystal orientation is 15 degrees or less in the growth direction from the surface of the tool base to the surface of the hard coating layer. As described above, high bonding force is exhibited at the interface between the coarse particles in region II and the fine particles in region I, and the fine crystal grains in region I exhibit high toughness through the coarse particles in region II. It is.
本発明の被覆工具は、改質TiSiN層からなる硬質被覆層が、TiSiN結晶粒の粒径幅が小さい領域Iと、粒径幅がこれより大きい領域IIとからなり、かつ、領域Iの微細粒子と領域IIの粗大粒子の結晶方位のずれが15度以下となる縦区分の面積割合が高いため、切刃に対して衝撃的・断続的高負荷が作用する乾式断続重切削条件や、連続的な高負荷がかかる乾式連続高送り切削条件においても、すぐれた高温強度に加えてすぐれた耐欠損性と靭性を示し、すぐれた工具特性を発揮し、工具寿命の延命化に寄与するものである。 In the coated tool of the present invention, the hard coating layer composed of the modified TiSiN layer is composed of a region I in which the grain size width of the TiSiN crystal grains is small and a region II in which the grain size width is larger than this, and the region I Because the area ratio of the vertical section where the deviation of the crystal orientation of the particles and the coarse particles in the region II is 15 degrees or less is high, the dry interrupted heavy cutting conditions in which impact / intermittent high load acts on the cutting blade, continuous Even under dry continuous high-feed cutting conditions where high loads are applied, it exhibits excellent fracture resistance and toughness in addition to excellent high-temperature strength, exhibits excellent tool characteristics, and contributes to the extension of tool life. is there.
つぎに、本発明の被覆工具を実施例により具体的に説明する。
なお、ここでは被覆インサートを中心にして説明するが、被覆インサートに限らず、被覆エンドミル、被覆ドリル等の各種の被覆工具に適用できるものである。
Next, the coated tool of the present invention will be specifically described with reference to examples.
In addition, although demonstrated centering on a covering insert here, it is applicable not only to a covering insert but to various covering tools, such as a covering end mill and a covering drill.
原料粉末として、いずれも0.8〜3.0μmの平均粒径を有するWC粉末、TiC粉末、VC粉末、TaC粉末、NbC粉末、Cr3 C2 粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、ボールミルで72時間湿式混合し、乾燥した後、100MPa の圧力で圧粉体にプレス成形し、この圧粉体を6Paの真空中、温度:1400℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.03のホーニング加工を施してISO規格・CNMG120408のインサート形状をもったWC基超硬合金製の工具基体A1〜A12を形成した。 WC powder, TiC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, and Co powder all having an average particle diameter of 0.8 to 3.0 μm are prepared as raw material powders. Were blended in the composition shown in Table 1, wet mixed by a ball mill for 72 hours, dried, and then pressed into a green compact at a pressure of 100 MPa. The green compact was heated at a pressure of 1400 in a vacuum of 6 Pa. Sintered under the condition of holding at 1 ° C. for 1 hour, and after sintering, a tool base made of a WC-based cemented carbide having an ISO standard / CNMG120408 insert shape by applying a honing process of R: 0.03 to the cutting edge portion. A1 to A12 were formed.
ついで、前記工具基体A1〜A12を、アセトン中で超音波洗浄し、乾燥した状態で、図1に示される圧力勾配型Arプラズマガンを利用したイオンプレーティング装置に装着し、蒸発源として、TiSi合金を装着し、まず、装置内を排気して1.0×10−3Pa以下の真空に保持しながらヒーターで装置内を400℃に加熱した後、Arガスを導入して2.3×10−2Paとしたのち、圧力勾配型プラズマガンの放電電力を2kWとし、装置内にArイオンを発生させ、工具基体に−200Vのバイアス電圧を印加することによって、前記工具基体を10分間Arボンバード処理し、ついで、装置内を一旦1×10−3Pa程度の真空にした後、
表2に示す条件で、まず、工具基体にバイアス電圧を印加しないで、圧力勾配型Arプラズマガンの放電電力を表2に示される所定の値とし、Arガスを50〜60sccm,窒素ガスを100〜120sccm流しながら、炉内の圧力を3×10−2〜6×10−2Paに保ち、Ti蒸発源およびSi蒸発源にプラズマビームを入射し金属Tiおよび金属Siの蒸気を発生させるとともにプラズマビームでイオン化して、工具基体表面に、表2に示される所定時間の間、TiSiN層の領域Iを蒸着形成し、
引き続き、同じく表2に示す条件で、工具基体に−10〜−20Vのバイアス電圧を印加した状態で、前記同様に、工具基体表面に、表2に示される所定時間の間、改質TiSiN層の領域IIを蒸着形成することにより、本発明被覆工具としての本発明表面被覆インサート(以下、本発明インサートという)1〜17を製造した。
なお、表2に、本発明インサート1〜17の改質TiSiN層の形成条件である圧力勾配型Arプラズマガンを利用したイオンプレーティングの各種条件を示す。
Next, the tool bases A1 to A12 are ultrasonically cleaned in acetone and dried, and are attached to an ion plating apparatus using a pressure gradient type Ar plasma gun shown in FIG. 1, and TiSi is used as an evaporation source. The alloy was mounted, and first, the inside of the apparatus was evacuated and the inside of the apparatus was heated to 400 ° C. with a heater while maintaining a vacuum of 1.0 × 10 −3 Pa or less, and then Ar gas was introduced to 2.3 × After 10 −2 Pa, the discharge power of the pressure gradient type plasma gun is set to 2 kW, Ar ions are generated in the apparatus, and a bias voltage of −200 V is applied to the tool base, so that the tool base is placed in Ar for 10 minutes. After bombarding, the inside of the apparatus was once evacuated to about 1 × 10 −3 Pa,
Under the conditions shown in Table 2, first, without applying a bias voltage to the tool base, the discharge power of the pressure gradient type Ar plasma gun is set to the predetermined values shown in Table 2, Ar gas is 50-60 sccm, and nitrogen gas is 100 The pressure in the furnace is maintained at 3 × 10 −2 to 6 × 10 −2 Pa while flowing at −120 sccm, and a plasma beam is incident on the Ti evaporation source and the Si evaporation source to generate vapor of metal Ti and metal Si and plasma. By ionizing with a beam, a region I of the TiSiN layer is deposited on the surface of the tool base for a predetermined time shown in Table 2,
Subsequently, the modified TiSiN layer was applied to the tool base surface for a predetermined time shown in Table 2 with a bias voltage of −10 to −20 V applied to the tool base under the same conditions as shown in Table 2. The surface-coated
Table 2 shows various conditions for ion plating using a pressure gradient type Ar plasma gun, which are conditions for forming the modified TiSiN layers of the
比較の目的で、前記工具基体A1〜A11をアセトン中で超音波洗浄し、乾燥した状態で、図2に示されるスパッタリング(SP)装置に装着し、カソード電極(蒸発源)として金属CrおよびTiSi合金を装着し、まず、装置内を排気して0.01Pa以下の真空に保持しながらヒーターで装置内を300〜460℃に加熱した後、Arガスを200sccm導入し、金属Crと前記工具基体との間に−800Vの直流バイアス電圧を印加し、前記工具基体表面を5分間Crボンバード処理し、ついで、表3に示す条件で、装置内に雰囲気ガスとして窒素ガスおよびArガスを導入して0.5Paの雰囲気とするとともに、前記TiSi合金と前記工具基体との間にバイアス電圧として−50Vの直流バイアス電圧を印加し、もって前記工具基体の表面に、表6に示される目標層厚の従来TiSiN層を硬質被覆層として蒸着形成することにより、従来被覆工具としての従来表面被覆インサート(以下、従来インサートという)1〜13を製造した。
なお、表3には、従来インサート1〜13の従来TiSiN層の形成されるスパッタリング条件を示す。
For the purpose of comparison, the tool bases A1 to A11 are ultrasonically cleaned in acetone and dried, and then mounted on the sputtering (SP) apparatus shown in FIG. 2, and metal Cr and TiSi are used as cathode electrodes (evaporation sources). The alloy is mounted, and first, the interior of the apparatus is evacuated and the interior of the apparatus is heated to 300 to 460 ° C. with a heater while Ar gas is introduced at 200 sccm, and the metal Cr and the tool base are introduced. A DC bias voltage of −800 V was applied between the tool substrate and the surface of the tool base was Cr bombarded for 5 minutes. Then, under the conditions shown in Table 3, nitrogen gas and Ar gas were introduced into the apparatus as atmospheric gases. In addition to an atmosphere of 0.5 Pa, a DC bias voltage of −50 V was applied as a bias voltage between the TiSi alloy and the tool base, Conventional surface-coated inserts (hereinafter referred to as conventional inserts) 1 to 13 as conventional coated tools are manufactured by depositing and forming a conventional TiSiN layer having a target layer thickness shown in Table 6 as a hard coating layer on the surface of the tool substrate. did.
Table 3 shows the sputtering conditions for forming the conventional TiSiN layers of the
本発明インサート1〜17の改質TiSiN層および従来インサート1〜13の従来TiSiN層について、硬質被覆層の垂直縦断面内におけるTiSiN結晶粒の粒径の変化を、走査型電子顕微鏡(CarlZeiss社製 ULTRA55)で観察したところ、例えば、図3(a)に例示されるように、改質TiSiN層の工具基体表面近傍は幅10〜50nmの微細粒からなる領域Iからなり、さらに、硬質被覆層表面近傍は幅50nm以上の粗大粒からなる領域IIからなることが観察された。
さらに、集束イオンビーム加工装置を用いて、図3(a)および図3(b)に示す模式図のイ−イ面に例示されるように、基板表面に対して5度の傾きで試料を幅7μm×長さ10μm×厚さ100nmに薄片化した試料について、透過型電子顕微鏡(JEM−2010F)を用いて、工具基体表面と硬質被覆層界面から垂直高さ換算で0.1μmの位置での粒径幅WΙおよび、硬質被覆層表面から垂直深さ換算で0.1μmの位置の粒径幅WΙΙを測定し、それらの値をWΙΙ/WΙの数値とともに表4および表5に示した。
なお、ここでいう粒径幅とは、「観察された表面内で、前記高さ換算あるいは深さ換算で0.1μmとなる位置に工具基体表面と平行な線を引いた場合に、ひとつの粒子内を通る線分の長さの平均値」である。
表4から、本発明インサート1〜17の改質TiSiN層は、工具基体表面と硬質被覆層界面から垂直高さ換算で0.1μmの位置での粒径幅WΙおよび、硬質被覆層表面から垂直深さ換算で0.1μmの位置の粒径幅WΙΙが、それぞれ、
10nm<WΙ<50nm、かつ、5<WΙΙ/WΙ<100
の関係を満たしていることが分かる。
一方、表5から、従来インサート1〜13の従来TiSiN層は、前記関係式を満たしていないことが分かる。
For the modified TiSiN layers of the
Further, using the focused ion beam processing apparatus, the sample is inclined at 5 degrees with respect to the substrate surface as exemplified by the Y-plane in the schematic diagram shown in FIGS. 3 (a) and 3 (b). Using a transmission electron microscope (JEM-2010F), a sample cut into a width of 7 μm × length of 10 μm × thickness of 100 nm was measured at a position of 0.1 μm in terms of vertical height from the tool base surface and the hard coating layer interface. and particle diameter width W iota of, measuring the particle radial width W Iotaiota position 0.1μm vertical depth Convert hard coating layer surface, tables 4 and 5 their values with numeric W ΙΙ / W Ι It was shown to.
Incidentally, the particle size width referred to here means that “one line is drawn when a line parallel to the tool base surface is drawn at a position where the height or depth is converted to 0.1 μm in the observed surface. The average value of the lengths of the line segments passing through the particles.
From Table 4, modification TiSiN layer of the present invention the
10nm <W Ι <50nm and,, 5 <W ΙΙ / W Ι <100
It can be seen that this relationship is satisfied.
On the other hand, it can be seen from Table 5 that the conventional TiSiN layers of the
ついで、本発明インサート1〜17の改質TiSiN層および従来インサート1〜13の従来TiSiN層について、硬質被覆層の縦断面を研磨面とした状態で、電子線後方散乱回折装置(EBSD)を用いて、硬質被覆層の縦断面の結晶方位を解析した。すなわち、幅10μm、高さ硬質被覆層の層厚相当の領域を、0.01μm/stepの間隔で、前記断面研磨面の法線方向および法線と直交する任意の方向に対して各測定点の結晶方位<111>がなす傾斜角、および断面研磨面の法線方向と結晶方位<100>がなす傾斜角を測定し、この測定結果に基づいて、測定された面積領域を基板表面に垂直に100nm毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とTiSiN膜の界面からTiSiN膜の成長方向に100nm毎のピッチで区切り、100nm×100nmに区分けされたそれぞれの領域(セル)に存在する測定点の前記三つの測定傾斜角の平均値をそれぞれ計算し、同一の前記縦区分に存在する複数セルの三つの測定傾斜角の平均値の最大値と最小値の差をそれぞれ計算し、これらの値を表4および表5に示した。
そして、表4から、本発明インサートの改質TiSiN層は、縦区分内に存在するセルにおける、前記断面研磨面の法線方向と<111>方向のなす平均傾斜角、前記断面研磨面の法線に直交する方向と<111>方向のなす平均傾斜角、前記断面研磨面の法線方向と<100>方向のなす平均傾斜角の最大値と最小値の差が15度以下となる縦区分が全面積の60%以上を占めていることが分かる。
一方、表5から、従来インサートの従来TiSiN層は、同一縦区分における各平均傾斜角の最大値と最小値の差が15度以下となる縦区分は、存在するものの、少ない(50%以下)ことが分かる。
Next, with respect to the modified TiSiN layers of the present invention inserts 1 to 17 and the conventional TiSiN layers of the
And, from Table 4, the modified TiSiN layer of the insert of the present invention has an average inclination angle formed between the normal direction of the cross-section polished surface and the <111> direction in the cells existing in the vertical section, and the method of the cross-sectional polished surface Vertical section in which the difference between the average inclination angle formed between the direction perpendicular to the line and the <111> direction and the maximum value and minimum value of the average inclination angle formed between the normal direction of the cross-section polished surface and the <100> direction is 15 degrees or less Occupies 60% or more of the total area.
On the other hand, from Table 5, the conventional TiSiN layer of the conventional insert has few vertical sections in which the difference between the maximum value and the minimum value of each average inclination angle is 15 degrees or less in the same vertical section (although it is 50% or less). I understand that.
つぎに、本発明インサート1〜17および従来インサート1〜13について、これを工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材:JIS・SUS316の等間隔4本縦溝入り丸棒、
切削速度: 220 m/min.、
切り込み: 2 mm、
送り: 0.3 mm/rev.、
切削時間: 2 分、
の条件(切削条件1という)でのステンレス鋼の乾式断続高速切削加工試験(通常の切削速度および送りは、それぞれ、150m/min、0.2mm/rev.)、
被削材:JIS・SCM440の長さ方向等間隔4本縦溝入り丸棒、
切削速度: 170 m/min.、
切り込み: 3 mm、
送り: 0.3 mm/rev.、
切削時間: 2 分、
の条件(切削条件2という)での炭素鋼の乾式断続高速切削加工試験(通常の切削速度および送りは、それぞれ、120m/min.、0.2mm/rev.)、
を行い、
いずれの切削加工試験でも切刃の逃げ面摩耗幅を測定した。
この測定結果を表6に示した。
Next, about this invention inserts 1-17 and conventional inserts 1-13, in the state where this was screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS · SUS316 equally spaced four vertical grooved round bars,
Cutting speed: 220 m / min. ,
Incision: 2 mm,
Feed: 0.3 mm / rev. ,
Cutting time: 2 minutes,
(Continuous cutting speed and feed are 150 m / min and 0.2 mm / rev., Respectively)
Work material: JIS · SCM440 lengthwise equidistant 4 vertical grooved round bar,
Cutting speed: 170 m / min. ,
Cutting depth: 3 mm,
Feed: 0.3 mm / rev. ,
Cutting time: 2 minutes,
Of carbon steel under the following conditions (referred to as cutting condition 2) (normal cutting speed and feed are 120 m / min. And 0.2 mm / rev., Respectively),
And
In any cutting test, the flank wear width of the cutting edge was measured.
The measurement results are shown in Table 6.
表4、6に示される結果から、本発明インサート1〜17は、TiSiN結晶粒の粒径幅が小さい領域Iと、粒径幅がこれより大きい領域IIとからなり、かつ、基板に対して垂直に連続する領域Iの微細粒子と領域IIの粗大粒子の結晶方位のずれが15度以下となる縦区分の面積割合が高いため、切刃に対して衝撃的・断続的高負荷が作用する乾式断続重切削条件や、連続的な高負荷がかかる乾式連続高送り切削条件においても、すぐれた高温強度に加えてすぐれた耐欠損性と靭性を示し、すぐれた工具特性を発揮することが明らかである。
さらに、表4、6から、本発明インサートの改質TiSiN層の中でも特に性能のよいものは、縦区分内に存在するセルにおける、前記断面研磨面の法線方向と<111>方向のなす平均傾斜角、前記断面研磨面の法線に直交する方向と<111>方向のなす平均傾斜角、前記断面研磨面の法線方向と<100>方向のなす平均傾斜角の最大値と最小値の差が5度以下となる縦区分が全面積の60%以上を占めていることが分かる。
これに対して、表5、6から、従来インサート1〜13においては、従来TiSiN層は、耐欠損性と靭性に劣り、乾式断続重切削条件や、乾式連続高送り切削条件では欠損等により、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Tables 4 and 6, the
Furthermore, from Tables 4 and 6, among the modified TiSiN layers of the inserts of the present invention, those having particularly good performance are the averages of the normal direction of the cross-section polished surface and the <111> direction in the cells existing in the vertical section. An inclination angle, an average inclination angle formed between the direction perpendicular to the normal line of the cross-section polished surface and the <111> direction, and a maximum value and a minimum value of an average inclination angle formed between the normal direction of the cross-section polished surface and the <100> direction. It can be seen that vertical sections with a difference of 5 degrees or less occupy 60% or more of the total area.
On the other hand, from Tables 5 and 6, in the
前述のように、この発明の被覆工具は、硬質被覆層(改質TiSiN層)がすぐれた靭性、耐欠損性を有することから、被覆インサートばかりでなく、被覆エンドミル、被覆ドリル等の各種被覆工具として用いることができ、そして、これによって、靭性不足、強度不足等に起因する工具欠損の発生を防止し、長期の使用に亘って優れた切削性能を発揮するものであるから、低コスト化に十分満足に対応できるとともに、工具寿命の延命化を図ることができるものである。 As described above, the coated tool of the present invention has not only a coated insert but also various coated tools such as a coated end mill and a coated drill because the hard coating layer (modified TiSiN layer) has excellent toughness and fracture resistance. As a result, it prevents tool breakage due to insufficient toughness, insufficient strength, etc., and exhibits excellent cutting performance over a long period of use. In addition to being able to respond satisfactorily, the tool life can be extended.
1: 工具基体
2: 硬質被覆層
3: 工具基体と硬質被覆層の界面
4: 硬質被覆層の最表面
5: 工具基体と硬質被覆層の界面から、基体に垂直な高さ換算で0.1μmの位置
6: 硬質被覆層の最表面から、基体に垂直な深さ換算で0.1μmの位置
1: Tool substrate 2: Hard coating layer 3: Interface between tool substrate and hard coating layer 4: Outermost surface of hard coating layer 5: 0.1 μm in terms of height perpendicular to the substrate from the interface between the tool substrate and the hard coating layer Position 6: 0.1 μm position in terms of depth perpendicular to the substrate from the outermost surface of the hard coating layer
Claims (2)
(a)硬質被覆層の、工具基体とTiSiN膜の界面から0.1μmの高さ位置にあるTiSiN結晶粒の粒径幅をWI、TiSiN膜の最表面から0.1μmの深さ位置にあるTiSiN結晶粒の粒径幅をWIIとしたとき、
10nm<WI<50nm、かつ、5<WII/WI<100
の関係を満たし、
(b)さらに、電子線後方散乱回折装置を用いて、硬質被覆層断面のTiSiN結晶粒の結晶方位を解析し、測定された二次元領域を工具基体表面に対して略垂直な方向に100nm毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とTiSiN膜の界面からTiSiN膜の成長方向に100nm毎のピッチで区切り、100nm×100nmに区分けされたそれぞれの領域(セル)に存在する各測定点の、
<111>結晶方位とTiSiN膜測定断面の法線方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下であり、
<111>結晶方位とTiSiN膜測定断面の法線と直交する方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下であり、
<100>結晶方位とTiSiN膜測定断面の法線がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が15度以下
である100nm幅の縦区分が、測定された全面積のうちの60%以上を占有することを特徴とする表面被覆切削工具。 In a surface-coated cutting tool in which a hard coating layer made of a TiSiN film having an average layer thickness of 0.5 to 2 μm is physically vapor-deposited on the surface of a tool base made of a tungsten carbide-based cemented carbide sintered body,
(A) In the hard coating layer, the grain width of the TiSiN crystal grains at a height of 0.1 μm from the interface between the tool base and the TiSiN film is set to W I , and the depth of 0.1 μm from the outermost surface of the TiSiN film. When the grain width of a certain TiSiN crystal grain is W II ,
10 nm <W I <50 nm and 5 <W II / W I <100
Meet the relationship,
(B) Further, using an electron beam backscatter diffraction device, the crystal orientation of the TiSiN crystal grains in the hard coating layer cross section is analyzed, and the measured two-dimensional region is measured every 100 nm in a direction substantially perpendicular to the tool substrate surface. Each of the regions (cells) divided into 100 nm × 100 nm by dividing each vertical section into 100 nm × 100 nm from the interface between the tool base and the TiSiN film in the growth direction of the TiSiN film. Of each measuring point present in
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the normal direction of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees among cells existing in the same vertical section. And
The average inclination angle of the inclination angle formed by the direction perpendicular to the <111> crystal orientation and the normal line of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle among cells existing in the same vertical section Is 15 degrees or less,
The average inclination angle of the inclination angle formed by the <100> crystal orientation and the normal line of the TiSiN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees or less among the cells existing in the same vertical section. A surface-coated cutting tool characterized in that the vertical section of 100 nm width occupies 60% or more of the total area measured.
2. The surface coating according to claim 1, wherein when the composition of the TiSiN film is expressed by Ti 1-x Si x N, the Si content ratio x with respect to Ti satisfies 0.3 ≦ x ≦ 0.6. Cutting tools.
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