JP5585935B2 - Surface-coated cutting tool with excellent fracture resistance due to hard coating layer - Google Patents
Surface-coated cutting tool with excellent fracture resistance due to hard coating layer Download PDFInfo
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- 238000005520 cutting process Methods 0.000 title claims description 50
- 239000011247 coating layer Substances 0.000 title claims description 44
- 239000010410 layer Substances 0.000 claims description 55
- 239000013078 crystal Substances 0.000 claims description 49
- 238000005259 measurement Methods 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 6
- 238000010894 electron beam technology Methods 0.000 claims description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 16
- 239000002245 particle Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000011362 coarse particle Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004925 denaturation Methods 0.000 description 1
- 230000036425 denaturation Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 235000000396 iron Nutrition 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 102200082816 rs34868397 Human genes 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- Physical Vapour Deposition (AREA)
Description
この発明は、鋼や鋳鉄などの高速断続重切削加工という厳しい切削条件下で用いた場合でも、硬質被覆層がすぐれた耐欠損性を示し、切削工具の長寿命化が可能となる表面被覆切削工具（以下、被覆工具という）に関するものである。 This invention is a surface-coated cutting tool that has excellent chipping resistance and a long tool life even when used under severe cutting conditions such as high-speed intermittent heavy cutting of steel and cast iron. The present invention relates to a tool (hereinafter referred to as a coated tool).
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工にバイトの先端部に着脱自在に取り付けて用いられるインサートや、前記インサートを着脱自在に取り付けて、面削加工や溝加工、さらに肩加工などに用いられるソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミルなどが知られている。 In general, for coated tools, inserts that are detachably attached to the tip of a cutting tool for turning of work materials such as various types of steel and cast iron, and the inserts are detachably attached to be used for chamfering and grooving. An insert type end mill that performs cutting processing in the same manner as a solid type end mill used for processing and shoulder processing is known.
例えば、炭化タングステン基超硬合金基体または炭窒化チタン系サーメット基体の表面に、ＣｒとＡｌの複合窒化物からなる硬質被覆層を物理蒸着してなる表面被覆超硬合金製切削工具における硬質被覆層を、層厚方向にそって、Ａｌ最高含有点とＡｌ最低含有点とが所定間隔をおいて交互に繰り返し存在し、かつ両点間でＡｌ含有量が連続的に変化する成分濃度分布構造を有し、さらに、Ａｌ最高含有点が、組成式：（Ｃｒ１−ｘＡｌｘ）Ｎ（ただし、原子比で、ｘは０．４０〜０．６０を示す）、Ａｌ最低含有点が、組成式：（Ｃｒ１−ｙＡｌｙ）Ｎ（ただし、原子比で、ｙは０．０５〜０．３０を示す）をそれぞれ満足し、かつ隣り合うＡｌ最高含有点とＡｌ最低含有点の間隔が、０．０１〜０．１μｍである硬質被覆層で構成することが知られている（例えば、特許文献１参照）。
また、炭化タングステン（以下、ＷＣで示す）基超硬合金焼結体で構成された工具本体の表面に、ＴｉＡｌＮ系の硬質被覆層を蒸着形成してなる被覆工具が知られており、この被覆工具においては、その特徴の一つとして、硬質被覆層を柱状結晶で構成するとともに、硬質被覆層の表面側に位置する結晶粒の結晶幅を、硬質被覆層の工具基体側に位置する結晶粒の結晶幅より大きい二つの領域で構成することにより、被覆工具の耐欠損性、耐摩耗性を向上させている。
For example, a hard coating layer in a surface-coated cemented carbide cutting tool obtained by physically vapor-depositing a hard coating layer made of a composite nitride of Cr and Al on the surface of a tungsten carbide base cemented carbide substrate or a titanium carbonitride cermet substrate A component concentration distribution structure in which the highest Al content point and the lowest Al content point are alternately present at predetermined intervals along the layer thickness direction, and the Al content continuously changes between the two points. In addition, the highest Al content point is the composition formula: (Cr 1-x Al x ) N (wherein x is 0.40 to 0.60 in atomic ratio), and the lowest Al content point is the composition The formula: (Cr 1-y Al y ) N (wherein y is 0.05 to 0.30 in atomic ratio) is satisfied, and the distance between adjacent Al highest content point and Al lowest content point is The hard coating layer is 0.01 to 0.1 μm (For example, refer to Patent Document 1).
Also known is a coated tool formed by vapor-depositing a TiAlN-based hard coating layer on the surface of a tool body composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide sintered body. One of the features of the tool is that the hard coating layer is composed of columnar crystals, and the crystal width of the crystal grains located on the surface side of the hard coating layer is the crystal grain located on the tool base side of the hard coating layer. By comprising two regions larger than the crystal width, the chipping resistance and wear resistance of the coated tool are improved.
近年の切削加工装置のＦＡ化はめざましく、加えて切削加工に対する省力化、省エネ化、低コスト化さらに効率化の要求も強く、これに伴い、高送り、高切り込みなどより高効率の重切削加工が要求される傾向にあるが、上記の従来被覆工具においては、各種の鋼や鋳鉄を通常条件下で切削加工した場合に特段の問題は生じないが、切刃に対して衝撃的かつ断続的な高負荷が作用する乾式断続重切削や、連続的な高負荷がかかる乾式連続高送り切削に用いた場合には、層中へのクラック進展が避けられず表面被覆層の剥離・欠落が生じるため、切刃部に欠損を生じやすく、これが原因で、比較的短時間で使用寿命に至るのが現状である。 In recent years, the FA of cutting devices has been remarkable, and in addition, there are strong demands for labor saving, energy saving, cost reduction and efficiency for cutting, and with this, high-efficiency heavy cutting such as high feed and high cutting However, in the above-mentioned conventional coated tools, there are no particular problems when various steels and cast irons are machined under normal conditions, but they are shocking and intermittent to the cutting edge. When it is used for dry intermittent heavy cutting where a high load is applied and dry continuous high feed cutting where a continuous high load is applied, crack growth into the layer is inevitable and the surface coating layer is peeled or missing For this reason, the cutting edge is likely to be damaged, and due to this, the service life is reached in a relatively short time.
そこで、本発明者らは、前述のような観点から、被覆工具の耐欠損性を高め、使用寿命の延命化を図るべく、ＣｒＡｌＮ層からなる硬質被覆層の結晶形態に着目し、鋭意研究を行った結果、次のような知見を得た。 In view of the above, the inventors of the present invention focused on the crystal form of the hard coating layer composed of the CrAlN layer in order to increase the fracture resistance of the coated tool and prolong the service life. As a result, the following findings were obtained.
従来の被覆工具のＣｒＡｌＮ層からなる硬質被覆層は、例えば、図２に示される物理蒸着装置の１種であるスパッタリング（ＳＰ）装置に上記のＷＣ基超硬合金焼結体からなる工具基体を装着し、例えば、
装置内加熱温度：３００〜５００℃、
工具基体に印加する直流バイアス電圧：−２０〜−５０Ｖ、
カソード電極：Ｃｒ−Ａｌ合金、
スパッタリング電力：３〜６ｋＷ、
装置内ガス流量：窒素（Ｎ２）ガス＋アルゴン（Ａｒ）ガス、
装置内ガス圧力：０．３〜１．５Ｐａ、
の条件で、ＣｒＡｌＮ層（以下、従来ＣｒＡｌＮ層という）を形成することにより製造されている。
For example, a hard coating layer made of a CrAlN layer of a conventional coated tool is formed by, for example, applying a tool base made of the above WC-based cemented carbide sintered body to a sputtering (SP) apparatus which is one type of physical vapor deposition apparatus shown in FIG. Wearing, for example,
In-apparatus heating temperature: 300-500 ° C
DC bias voltage applied to the tool base: -20 to -50V,
Cathode electrode: Cr-Al alloy,
Sputtering power: 3-6 kW,
Gas flow in the apparatus: nitrogen (N 2 ) gas + argon (Ar) gas,
In-apparatus gas pressure: 0.3 to 1.5 Pa,
In this condition, a CrAlN layer (hereinafter referred to as a conventional CrAlN layer) is formed.
しかし、本発明者らは、ＣｒＡｌＮ層の形成を、例えば、図１に概略説明図で示される物理蒸着装置の１種である圧力勾配型Ａｒプラズマガスを利用したイオンプレーティング装置を用いて、装置内に前記工具基体を装着し、例えば、
工具基体温度：３５０〜４５０ ℃、
蒸発源：金属Ｃｒおよび金属Ａｌ、
プラズマガン放電電力：（金属Ｃｒに対して）８〜１２ ｋＷ、
プラズマガン放電電力：（金属Ａｌに対して）８〜１２ ｋＷ、
反応ガス流量：窒素（Ｎ２）ガス １００〜１２０ ｓｃｃｍ、
放電ガス：アルゴン（Ａｒ）ガス ５０〜６０ ｓｃｃｍ、
工具基体に印加する直流バイアス電圧： ０〜−２０ Ｖ
という条件下で蒸着を行い、かつ、蒸着初期は、バイアス電圧を０Ｖにして工具基体側（領域Ｉ）のＣｒＡｌＮ層を蒸着し、蒸着後期には、バイアス電圧を−５〜−２０Ｖに切り換えて硬質被覆層の表面側（領域ＩＩ）のＣｒＡｌＮ層の蒸着を行うと、この結果形成された領域Ｉと領域ＩＩからなるＣｒＡｌＮ層（以下、改質ＣｒＡｌＮ層という）は、前記従来ＣｒＡｌＮ層に比して、切刃に対して衝撃的かつ断続的な高負荷が作用する乾式断続重切削や、連続的な高負荷がかかる乾式連続高送り切削において、すぐれた耐摩耗性と耐欠損性を示すことを見出したのである。
However, the present inventors have formed a CrAlN layer by using, for example, an ion plating apparatus using a pressure gradient type Ar plasma gas, which is one type of physical vapor deposition apparatus schematically shown in FIG. Mounting the tool base in the apparatus, for example,
Tool substrate temperature: 350 to 450 ° C.
Evaporation source: metal Cr and metal Al,
Plasma gun discharge power: 8-12 kW (relative to metal Cr),
Plasma gun discharge power: 8-12 kW (relative to metal Al),
Reaction gas flow rate: nitrogen (N 2) gas 100 to 120 sccm,
Discharge gas: Argon (Ar) gas 50-60 sccm,
DC bias voltage applied to tool base: 0 to -20 V
In the initial stage of vapor deposition, the bias voltage is set to 0V, and the CrAlN layer on the tool base side (region I) is deposited. In the latter stage of vapor deposition, the bias voltage is switched to -5 to -20V. When the CrAlN layer on the surface side (region II) of the hard coating layer is deposited, the resulting CrAlN layer composed of region I and region II (hereinafter referred to as a modified CrAlN layer) is compared with the conventional CrAlN layer. Excellent wear resistance and fracture resistance in dry intermittent heavy cutting where impact and intermittent high load are applied to the cutting edge and dry continuous high feed cutting where continuous high load is applied I found out.
この発明は、前記研究結果に基づいてなされたものであって、
「（１）炭化タングステン基超硬合金焼結体からなる工具基体の表面に、０．５〜２μｍの平均層厚を有するＣｒＡｌＮ膜からなる硬質被覆層を物理蒸着した表面被覆切削工具において、
（ａ）硬質被覆層の、工具基体とＣｒＡｌＮ膜の界面から０．１μｍの高さ位置にあるＣｒＡｌＮ結晶粒の粒径幅をＷΙ、ＣｒＡｌＮ膜の最表面から０．１μｍの深さ位置にあるＣｒＡｌＮ結晶粒の粒径幅をＷΙΙとしたとき、
１０ｎｍ＜ＷΙ＜５０ｎｍ、かつ、５＜ＷΙΙ／ＷΙ＜１００
の関係を満たし、
（ｂ）さらに、電子線後方散乱回折装置を用いて、硬質被覆層断面のＣｒＡｌＮ結晶粒の結晶方位を解析し、測定された二次元領域を工具基体表面に対して略垂直な方向に１００ｎｍ毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とＣｒＡｌＮ膜の界面からＣｒＡｌＮ膜の成長方向に１００ｎｍ毎のピッチで区切り、１００ｎｍ×１００ｎｍに区分けされたそれぞれの領域（セル）に存在する各測定点の、
＜１１１＞結晶方位とＣｒＡｌＮ膜測定断面の法線方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下であり、
＜１１１＞結晶方位とＣｒＡｌＮ膜測定断面の法線と直交する方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下であり、
＜１００＞結晶方位とＣｒＡｌＮ膜測定断面の法線がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下
である１００ｎｍ幅の縦区分が、測定された全面積のうちの６０％以上を占有することを特徴とする表面被覆切削工具。
（２）前記ＣｒＡｌＮ膜の組成をＣｒ１−ｘＡｌｘＮで表した時に、Ｃｒに対するＡｌの含有割合ｘが０．３≦ｘ≦０．６を満たすことを特徴とする（１）に記載の表面被覆切削工具。」
に特徴を有するものである。
This invention was made based on the research results,
“(1) In a surface-coated cutting tool in which a hard coating layer made of a CrAlN film having an average layer thickness of 0.5 to 2 μm is physically vapor-deposited on the surface of a tool base made of a tungsten carbide-based cemented carbide sintered body,
Of (a) hard coating layer, a CrAlN grains with diameter width that is from the interface of the tool substrate and CrAlN film to the height position of 0.1 [mu] m W iota, the depth position from the outermost surface of 0.1 [mu] m of CrAlN film When the grain width of a certain CrAlN crystal grain is W 2 ,
10nm <W Ι <50nm and,, 5 <W ΙΙ / W Ι <100
Meet the relationship,
(B) Further, the crystal orientation of the CrAlN crystal grains of the hard coating layer cross section is analyzed using an electron beam backscatter diffraction apparatus, and the measured two-dimensional region is measured every 100 nm in a direction substantially perpendicular to the tool substrate surface. Each of the regions (cells) divided into 100 nm × 100 nm by dividing each vertical section into 100 nm × 100 nm from the interface between the tool base and the CrAlN film in the growth direction of the CrAlN film. Of each measuring point present in
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the normal direction of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees among cells existing in the same vertical section. And
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the direction perpendicular to the normal line of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle among cells existing in the same vertical section Is 15 degrees or less,
The average inclination angle of the inclination angle formed by the <100> crystal orientation and the normal line of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees or less among cells existing in the same vertical section. A surface-coated cutting tool characterized in that the vertical section of 100 nm width occupies 60% or more of the total area measured.
(2) When the composition of the CrAlN film is expressed by Cr 1-x Al x N, the Al content ratio x with respect to Cr satisfies 0.3 ≦ x ≦ 0.6. Surface coated cutting tool. "
It has the characteristics.
本発明について、以下に詳細に説明する。 The present invention will be described in detail below.
既に述べたように、この発明は、例えば、図１に概略説明図で示される圧力勾配型Ａｒプラズマガスを利用したイオンプレーティング装置を用いて、装置内にＷＣ基超硬合金焼結体からなる工具基体を装着し、例えば、
工具基体温度：３５０〜４５０ ℃、
蒸発源：金属Ｃｒおよび金属Ａｌ、
プラズマガン放電電力：（金属Ｃｒに対して）８〜１２ ｋＷ、
プラズマガン放電電力：（金属Ａｌに対して）８〜１２ ｋＷ、
反応ガス流量：窒素（Ｎ２）ガス １００〜１２０ ｓｃｃｍ、
放電ガス：アルゴン（Ａｒ）ガス ５０〜６０ ｓｃｃｍ、
工具基体に印加する直流バイアス電圧： ０〜−２０ Ｖ
という条件下で蒸着を行い、かつ、蒸着初期は、バイアス電圧を０Ｖにして工具基体側（領域Ｉ）のＣｒＡｌＮ層を蒸着し、蒸着後期には、バイアス電圧を−５〜−２０Ｖに切り換えて硬質被覆層の表面側（領域ＩＩ）のＣｒＡｌＮ層の蒸着を行うことによって、領域Ｉと領域ＩＩからなる改質ＣｒＡｌＮ層を形成するものである。
なお、従来ＣｒＡｌＮ層の構成成分であるＣｒが高温強度を向上させ、また、Ａｌが硬さを向上させ、Ｎが層の強度を向上させる作用があることはすでによく知られているが、これに加えて、この発明の改質ＣｒＡｌＮ層は高速断続重切削加工条件という厳しい使用条件下でも、すぐれた耐欠損性を示す。
そして、その理由は以下に述べるように、改質ＣｒＡｌＮ層の特異な結晶粒形態と強い関連性を有する。
As already described, the present invention uses, for example, a WC-based cemented carbide sintered body in an apparatus using an ion plating apparatus using a pressure gradient type Ar plasma gas shown schematically in FIG. A tool base is mounted, for example,
Tool substrate temperature: 350 to 450 ° C.
Evaporation source: metal Cr and metal Al,
Plasma gun discharge power: 8-12 kW (relative to metal Cr),
Plasma gun discharge power: 8-12 kW (relative to metal Al),
Reaction gas flow rate: nitrogen (N 2) gas 100 to 120 sccm,
Discharge gas: Argon (Ar) gas 50-60 sccm,
DC bias voltage applied to tool base: 0 to -20 V
In the initial stage of vapor deposition, the bias voltage is set to 0V, and the CrAlN layer on the tool base side (region I) is deposited. In the latter stage of vapor deposition, the bias voltage is switched to -5 to -20V. The modified CrAlN layer composed of the regions I and II is formed by vapor deposition of the CrAlN layer on the surface side (region II) of the hard coating layer.
In addition, it is already well known that Cr, which is a component of the conventional CrAlN layer, improves the high temperature strength, Al improves the hardness, and N improves the strength of the layer. In addition, the modified CrAlN layer of the present invention exhibits excellent fracture resistance even under severe use conditions such as high-speed intermittent heavy cutting conditions.
The reason is strongly related to the unique crystal grain shape of the modified CrAlN layer as described below.
まず、前記蒸着で形成された改質ＣｒＡｌＮ層について、膜の成長方向に対して垂直平面内におけるＣｒＡｌＮ結晶粒の粒径幅の変化を観察したところ、図３（ａ）に、層厚方向縦断面模式図を、また、図３（ｂ）には、イ−イ面に沿った斜視断面模式図を示すように、領域Ｉ（工具基体側の硬質被覆層）においては、粒径幅が１０〜５０ｎｍのＣｒＡｌＮ結晶粒が観察され、一方、領域ＩＩ（硬質被覆層の表面側）においては、領域Ｉの粒径幅より大きな粒径幅を有するＣｒＡｌＮ結晶粒が観察された。
さらに、集束イオンビーム加工装置を用いて、例えば、図３（ａ）および図３（ｂ）に示す模式図のイ−イ面に示すように薄片化した試料について、工具基体表面と硬質被覆層界面から垂直高さ換算で０．１μｍの位置での粒径幅ＷΙおよび、硬質被覆層表面から垂直深さ換算で０．１μｍの位置の粒径幅ＷΙΙを測定し、それらの値とＷΙΙ／ＷΙの数値を測定したところ、ＷΙΙ／ＷΙは５〜１００であることを確認した。
なお、この改質ＣｒＡｌＮ層の平均層厚、領域Ｉと領域ＩＩのＣｒＡｌＮ結晶粒の粒径幅、ＷΙ、ＷΙΙおよびＷΙΙ／ＷΙの値は、特に、工具基体である超硬合金焼結体のＷＣの粒径、前記蒸着条件の内の蒸着時間によって影響を受けるが、ＷＣの平均粒径が０．２〜３μｍ、また、蒸着時間が６２〜２５０ｍｉｎであれば、０．５〜２μｍの平均層厚で、かつ、ＷΙΙ／ＷΙが５〜１００の範囲の改質ＣｒＡｌＮ層を形成することができる。
なお、ここでいう「粒径幅」とは、「前記高さ換算あるいは深さ換算で０．１μｍとなる位置に工具基体表面と平行な線を引いた場合に、ひとつの粒子内を通る線分の長さの平均値」である。
First, with respect to the modified CrAlN layer formed by the vapor deposition, when the change in the grain width of the CrAlN crystal grains in a plane perpendicular to the film growth direction was observed, FIG. In the area I (hard coating layer on the tool base side), the particle size width is 10 as shown in the schematic view of the plane and in FIG. CrAlN crystal grains of ˜50 nm were observed, while CrAlN crystal grains having a grain size width larger than that of region I were observed in region II (the surface side of the hard coating layer).
Further, using the focused ion beam processing apparatus, the surface of the tool base and the hard coating layer are obtained for the thinned sample as shown, for example, in the Y plane of the schematic diagrams shown in FIGS. 3 (a) and 3 (b). grain radial width W from the interface at the location of 0.1μm in vertical height in terms Ι and measures the particle radial width W Iotaiota position 0.1μm vertical depth Convert hard coating layer surface, and their values measurement of the value of the W ΙΙ / W Ι, the W ΙΙ / W Ι was confirmed to be 5 to 100.
The average layer thickness of the reformed CrAlN layer, regions I and II of CrAlN grains with diameter width, W iota, the value of W Iotaiota and W ΙΙ / W Ι is particularly the tool substrate of cemented carbide Although it is affected by the WC grain size of the sintered body and the deposition time among the above deposition conditions, if the average grain size of WC is 0.2 to 3 μm and the deposition time is 62 to 250 min, 0.5% with an average layer thickness of ～2Myuemu, and, W ΙΙ / W Ι can form a modified CrAlN layer ranging from 5 to 100.
The term “particle size width” as used herein means “a line passing through one particle when a line parallel to the tool base surface is drawn at a position where the height or depth is 0.1 μm. The average length of minutes.
ついで、さらに、電子線後方散乱回折装置を用いて、硬質被覆層断面のＣｒＡｌＮ結晶粒の結晶方位を解析し、測定された二次元領域を垂直に１００ｎｍ毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とＣｒＡｌＮ膜の界面からＣｒＡｌＮ膜の成長方向に１００ｎｍ毎のピッチで区切り、１００ｎｍ×１００ｎｍに区分けされたそれぞれの領域（セル）に存在する各測定点の、
＜１１１＞結晶方位とＣｒＡｌＮ膜測定断面の法線方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下であり、
＜１１１＞結晶方位とＣｒＡｌＮ膜測定断面の法線と直交する方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下であり、
＜１００＞結晶方位とＣｒＡｌＮ膜測定断面の法線がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下である１００ｎｍ幅の縦区分が、測定された全面積のうちの６０％以上を占有することが見出された。
Then, using an electron beam backscatter diffractometer, the crystal orientation of the CrAlN crystal grains of the hard coating layer cross section is analyzed, and the measured two-dimensional region is vertically divided into vertical sections at a pitch of every 100 nm. Each vertical section is divided from the interface between the tool base and the CrAlN film in the growth direction of the CrAlN film with a pitch of every 100 nm, and each measurement point existing in each region (cell) divided into 100 nm × 100 nm,
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the normal direction of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees among cells existing in the same vertical section. And
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the direction perpendicular to the normal line of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle among cells existing in the same vertical section Is 15 degrees or less,
The average inclination angle of the inclination angle formed by the <100> crystal orientation and the normal line of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees or less among cells existing in the same vertical section. It has been found that a 100 nm wide longitudinal section occupies more than 60% of the total area measured.
前記改質ＣｒＡｌＮ層の領域ＩＩ（粗粒領域）では、すくい面側から生じる垂直方向へのクラック発生を抑制するとともに、直下の領域Ｉに存在する微細な結晶粒群の結晶方位と強く配向し、ずれが１５度以下となる結晶方位を有することから、領域Ｉと領域ＩＩの結晶界面で高い整合性が導入され、層界面の付着強度を高めるだけでなく、領域ＩＩの粗大粒子を媒介として領域Ｉの微細粒同士の結合を高め、高い靭性を発揮させ耐欠損性を向上させる作用を有する。
また、領域Ｉでは、結晶粒界が多数導入されていることで、改質ＣｒＡｌＮ層中での亀裂進展を分散させ、耐欠損性を向上させる作用を有する。
In the region II (coarse grain region) of the modified CrAlN layer, the generation of cracks in the vertical direction generated from the rake face side is suppressed and the crystal orientation of the fine grain group existing in the region I immediately below is strongly oriented. Since the crystal orientation is such that the deviation is 15 degrees or less, high consistency is introduced at the crystal interface between the region I and the region II, and not only the adhesion strength at the layer interface is increased but also the coarse particles in the region II are used as mediators. It has the effect of enhancing the bonding between the fine grains in the region I, exhibiting high toughness and improving fracture resistance.
In the region I, since a large number of crystal grain boundaries are introduced, the crack growth in the modified CrAlN layer is dispersed, and the fracture resistance is improved.
前記改質ＣｒＡｌＮ層について、領域ＩのＣｒＡｌＮ結晶粒の粒径幅が５０ｎｍを超えると、前述した亀裂の進展分散効果および領域ＩＩの粗大粒欠落抑制効果が小さくなり、一方、領域ＩのＣｒＡｌＮ結晶粒の粒径幅が１０ｎｍ未満では、ＣｒＡｌＮ結晶粒自体の強度が維持されないため、領域ＩのＣｒＡｌＮ結晶粒の粒径幅は１０〜５０ｎｍと定めた。
また、領域Ｉと領域ＩＩのそれぞれの中間高さにおけるＣｒＡｌＮ結晶粒の粒径幅ＷΙ、ＷΙΙの比の値ＷΙΙ／ＷΙが５未満では、領域ＩＩの粗大ＣｒＡｌＮ結晶粒の大きさが十分でなく、領域Ｉの微細ＣｒＡｌＮ結晶粒の結合を高める効果が得られず、一方、ＷΙΙ／ＷΙが１００を超えると粒径幅が大きくなり結晶粒が粗大化しすぎて、剥離を生じやすくなることから、ＷΙΙ／ＷΙの値は、５〜１００と定めた。
さらに、ＣｒＡｌＮ膜の組成をＣｒ１−ｘＡｌｘＮで表した時に、Ｃｒに対するＡｌの含有割合ｘが０．３未満では、Ａｌの含有割合が低く、所望の耐摩耗性と耐熱性を発揮することができないため好ましくなく、０．６を超えるとＣｒの含有割合が低く、所望の高温強度を得ることができないため好ましくない。そこで、ｘの値は、０．３〜０．６と定めた。
In the modified CrAlN layer, when the grain width of the CrAlN crystal grains in the region I exceeds 50 nm, the above-mentioned effect of crack propagation and dispersion and the effect of suppressing the loss of coarse grains in the region II are reduced, while the CrAlN crystal in the region I is reduced. If the grain width of the grains is less than 10 nm, the strength of the CrAlN crystal grains themselves is not maintained, so the grain width of the CrAlN crystal grains in the region I is determined to be 10 to 50 nm.
Further, regions I and each of definitive to an intermediate height CrAlN grains with diameter width W of II iota, the ratio of the values W ΙΙ / W Ι is less than 5 W Iotaiota, coarse CrAlN grain region II size is not sufficient, not to obtain the effect of enhancing the binding of the fine CrAlN grain region I, whereas, W ΙΙ / W Ι is too greater than the crystal grains are coarsened particle diameter width is increased to 100, the release since the easily occur, the value of W ΙΙ / W Ι was defined as 5 to 100.
Further, when the composition of the CrAlN film is expressed by Cr 1-x Al x N, if the Al content ratio x relative to Cr is less than 0.3, the Al content ratio is low, and the desired wear resistance and heat resistance are exhibited. This is not preferable because it cannot be performed, and if it exceeds 0.6, the Cr content is low, and a desired high-temperature strength cannot be obtained. Therefore, the value of x is set to 0.3 to 0.6.
また、本発明の改質ＣｒＡｌＮ層は、工具基体表面から硬質被覆層の表面にまで、成長方向に、結晶方位のずれが１５度以下である縦区分の占有面積が６０％以上であることから、既に述べたように、領域ＩＩの粗大粒子と領域Ｉの微細粒子の界面において高い結合力を発揮し、さらに、領域ＩＩの粗大粒子を介して領域Ｉの微細結晶粒が高い靭性を発揮するのである。 Further, the modified CrAlN layer of the present invention has an occupied area of 60% or more in the vertical section in which the crystal orientation deviation is 15 degrees or less in the growth direction from the surface of the tool base to the surface of the hard coating layer. As described above, high bonding force is exhibited at the interface between the coarse particles in region II and the fine particles in region I, and the fine crystal grains in region I exhibit high toughness through the coarse particles in region II. It is.
本発明の被覆工具は、改質ＣｒＡｌＮ層からなる硬質被覆層が、ＣｒＡｌＮ結晶粒の粒径幅が小さい領域Ｉと、粒径幅がこれより大きい領域ＩＩとからなり、かつ、領域Ｉの微細粒子と領域ＩＩの粗大粒子の結晶方位のずれが１５度以下となる縦区分の面積割合が高いため、切刃に対して衝撃的・断続的高負荷が作用する乾式断続重切削条件や、連続的な高負荷がかかる乾式連続高送り切削条件においても、すぐれた高温強度に加えてすぐれた耐欠損性と靭性を示し、すぐれた工具特性を発揮し、工具寿命の延命化に寄与するものである。 In the coated tool of the present invention, the hard coating layer made of the modified CrAlN layer is composed of a region I in which the grain width of CrAlN crystal grains is small and a region II in which the grain size width is larger than this, and the region I is fine. Because the area ratio of the vertical section where the deviation of the crystal orientation of the particles and the coarse particles in the region II is 15 degrees or less is high, the dry interrupted heavy cutting conditions in which impact / intermittent high load acts on the cutting blade, continuous Even under dry continuous high-feed cutting conditions where high loads are applied, it exhibits excellent fracture resistance and toughness in addition to excellent high-temperature strength, exhibits excellent tool characteristics, and contributes to the extension of tool life. is there.
つぎに、本発明の被覆工具を実施例により具体的に説明する。
なお、ここでは被覆インサートを中心にして説明するが、被覆インサートに限らず、被覆エンドミル、被覆ドリル等の各種の被覆工具に適用できるものである。
Next, the coated tool of the present invention will be specifically described with reference to examples.
In addition, although demonstrated centering on a covering insert here, it is applicable not only to a covering insert but to various covering tools, such as a covering end mill and a covering drill.
原料粉末として、いずれも０．８〜３．０μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3 Ｃ2 粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、ボールミルで７２時間湿式混合し、乾燥した後、１００ＭＰａ の圧力で圧粉体にプレス成形し、この圧粉体を６Ｐａの真空中、温度：１４００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のインサート形状をもったＷＣ基超硬合金製の工具基体Ａ１〜Ａ１２を形成した。 WC powder, TiC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, and Co powder all having an average particle diameter of 0.8 to 3.0 μm are prepared as raw material powders. Were blended in the composition shown in Table 1, wet mixed by a ball mill for 72 hours, dried, and then pressed into a green compact at a pressure of 100 MPa. The green compact was heated at a pressure of 1400 in a vacuum of 6 Pa. Sintered under the condition of holding at 1 ° C. for 1 hour, and after sintering, a tool base made of a WC-based cemented carbide having an ISO standard / CNMG120408 insert shape by applying a honing process of R: 0.03 to the cutting edge portion. A1 to A12 were formed.
ついで、前記工具基体Ａ１〜Ａ１２を、アセトン中で超音波洗浄し、乾燥した状態で、図１に示される圧力勾配型Ａｒプラズマガンを利用したイオンプレーティング装置に装着し、蒸発源として、金属Ｃｒおよび金属Ａｌを装着し、まず、装置内を排気して１．０×１０−３Ｐａ以下の真空に保持しながらヒーターで装置内を４００℃に加熱した後、Ａｒガスを導入して２．３×１０−２Ｐａとしたのち、圧力勾配型プラズマガンの放電電力を２ｋＷとし、装置内にＡｒイオンを発生させ、工具基体に−２００Ｖのバイアス電圧を印加することによって、前記工具基体を１０分間Ａｒボンバード処理し、ついで、装置内を一旦１×１０−３Ｐａ程度の真空にした後、
表２に示す条件で、まず、工具基体にバイアス電圧を印加しないで、圧力勾配型Ａｒプラズマガンの放電電力を表２に示す出力値とし、Ａｒガスを６０ｓｃｃｍ，窒素ガスを１００ｓｃｃｍ流しながら、炉内の圧力を３×１０−２〜６×１０−２Ｐａに保ち、夫々の蒸発源にプラズマビームを入射し金属Ｃｒおよび金属Ａｌの蒸気を発生させるとともにプラズマビームでイオン化して、工具基体表面に、表４に示される所定時間の間、改質ＣｒＡｌＮ層の領域Ｉを蒸着形成し、
引き続き、同じく表２に示す条件で、工具基体に−１０〜−２０Ｖのバイアス電圧を印加した状態で、前記同様に、工具基体表面に、表４に示される所定時間の間、改質ＣｒＡｌＮ層の領域ＩＩを蒸着形成することにより、本発明被覆工具としての本発明表面被覆インサート（以下、本発明インサートという）１〜１７を製造した。
なお、表２に、本発明インサート１〜１７の改質ＣｒＡｌＮ層の形成条件である圧力勾配型Ａｒプラズマガンを利用したイオンプレーティングの各種条件を示す。
Next, the tool bases A1 to A12 are ultrasonically cleaned in acetone and dried, and then attached to the ion plating apparatus using the pressure gradient type Ar plasma gun shown in FIG. First, the inside of the apparatus was exhausted and the inside of the apparatus was heated to 400 ° C. with a heater while maintaining a vacuum of 1.0 × 10 −3 Pa or less. .3 × 10 −2 Pa, the discharge power of the pressure gradient plasma gun is set to 2 kW, Ar ions are generated in the apparatus, and a bias voltage of −200 V is applied to the tool base to After Ar bombarding for 10 minutes, the inside of the apparatus was once evacuated to about 1 × 10 −3 Pa,
Under the conditions shown in Table 2, first, without applying a bias voltage to the tool base, the discharge power of the pressure gradient type Ar plasma gun was set to the output value shown in Table 2, and while the Ar gas flowed at 60 sccm and the nitrogen gas flowed at 100 sccm, the furnace The pressure inside is maintained at 3 × 10 −2 to 6 × 10 −2 Pa, plasma beams are incident on the respective evaporation sources to generate vapors of metal Cr and metal Al, and ionize with the plasma beams to obtain the tool base surface. And depositing the region I of the modified CrAlN layer for a predetermined time shown in Table 4,
Subsequently, under the conditions shown in Table 2, the modified CrAlN layer was applied to the tool base surface for a predetermined time shown in Table 4 with a bias voltage of −10 to −20 V applied to the tool base. The surface-coated
Table 2 shows various conditions for ion plating using a pressure gradient type Ar plasma gun, which are conditions for forming the modified CrAlN layers of the
比較の目的で、前記工具基体Ａ１〜Ａ１１を、アセトン中で超音波洗浄し、乾燥した状態で、図２に示されるスパッタリング（ＳＰ）装置に装着し、カソード電極（蒸発源）として金属ＣｒおよびＣｒ−Ａｌ合金を装着し、まず、装置内を排気して０．０１Ｐａ以下の真空に保持しながらヒーターで装置内を３００〜４６０℃に加熱した後、Ａｒガスを２００ｓｃｃｍ導入し、金属Ｃｒと前記工具基体との間に−８００Ｖの直流バイアス電圧を印加し、前記工具基体表面を５分間Ｃｒボンバード処理し、ついで、表３に示す条件で、装置内に雰囲気ガスとして窒素ガスおよびＡｒガスを導入して０．５Ｐａの雰囲気とするとともに、前記ＣｒＡｌ合金と前記工具基体との間にバイアス電圧として−３０Ｖおよび−５０Ｖの直流バイアス電圧を印加し、もって前記工具基体の表面に、表６に示される目標層厚の従来ＣｒＡｌＮ層を硬質被覆層として蒸着形成することにより、従来被覆工具としての従来表面被覆インサート（以下、従来インサートという）１〜１３を製造した。
なお、表３には、従来インサート１〜１３の従来ＣｒＡｌＮ層の形成されるスパッタリング条件を示す。
For the purpose of comparison, the tool bases A1 to A11 are ultrasonically cleaned in acetone and dried, and mounted on the sputtering (SP) apparatus shown in FIG. A Cr—Al alloy is mounted, and first, the inside of the apparatus is evacuated and heated to 300 to 460 ° C. with a heater while maintaining a vacuum of 0.01 Pa or less, and then Ar gas is introduced at 200 sccm, and the metal Cr and A DC bias voltage of −800 V is applied between the tool substrate and the surface of the tool substrate is subjected to Cr bombardment for 5 minutes. Then, under the conditions shown in Table 3, nitrogen gas and Ar gas are used as atmospheric gases in the apparatus. Introducing an atmosphere of 0.5 Pa, and applying a DC bias voltage of −30 V and −50 V as a bias voltage between the CrAl alloy and the tool base. In addition, a conventional surface-coated insert as a conventional coated tool (hereinafter referred to as a conventional insert) is formed by vapor-depositing a conventional CrAlN layer having a target layer thickness shown in Table 6 on the surface of the tool base as a hard coating layer. 1-13 were produced.
Table 3 shows sputtering conditions for forming the conventional CrAlN layers of the
本発明インサート１〜１７の改質ＣｒＡｌＮ層および従来インサート１〜１３の従来ＣｒＡｌＮ層について、硬質被覆層の垂直縦断面内におけるＣｒＡｌＮ結晶粒の粒径の変化を、走査型電子顕微鏡（ＣａｒｌＺｅｉｓｓ社製 ＵＬＴＲＡ５５）で観察したところ、例えば、図３（ａ）に例示されるように、改質ＣｒＡｌＮ層の工具基体表面近傍は幅１０〜５０ｎｍの微細粒からなる領域Ｉからなり、さらに、硬質被覆層表面近傍は幅５０ｎｍ以上の粗大粒からなる領域ＩＩからなることが観察された。
さらに、集束イオンビーム加工装置を用いて、図３（ａ）および図３（ｂ）に示す模式図のイ−イ面に例示されるように、基板表面に対して５度の傾きで試料を幅７μｍ×長さ１０μｍ×厚さ１００ｎｍに薄片化した試料について、透過型電子顕微鏡（ＪＥＭ−２０１０Ｆ）を用いて、工具基体表面と硬質被覆層界面から垂直高さ換算で０．１μｍの位置での粒径幅ＷΙおよび、硬質被覆層表面から垂直深さ換算で０．１μｍの位置の粒径幅ＷΙΙを測定し、それらの値をＷΙΙ／ＷΙの数値とともに表４および表５に示した。
なお、ここでいう粒径幅とは、「観察された表面内で、前記高さ換算あるいは深さ換算で０．１μｍとなる位置に工具基体表面と平行な線を引いた場合に、ひとつの粒子内を通る線分の長さの平均値」である。
表４から、本発明インサート１〜１７の改質ＣｒＡｌＮ層は、工具基体表面と硬質被覆層界面から垂直高さ換算で０．１μｍの位置での粒径幅ＷΙおよび、硬質被覆層表面から垂直深さ換算で０．１μｍの位置の粒径幅ＷΙΙが、それぞれ、
１０ｎｍ＜ＷΙ＜５０ｎｍ、かつ、５＜ＷΙΙ／ＷΙ＜１００
の関係を満たしていることが分かる。
一方、表５から、従来インサート１〜１３の従来ＣｒＡｌＮ層は、前記関係式を満たしていないことが分かる。
For the modified CrAlN layers of the
Further, using the focused ion beam processing apparatus, the sample is inclined at 5 degrees with respect to the substrate surface as exemplified by the Y-plane in the schematic diagram shown in FIGS. 3 (a) and 3 (b). Using a transmission electron microscope (JEM-2010F), a sample cut into a width of 7 μm × length of 10 μm × thickness of 100 nm was measured at a position of 0.1 μm in terms of vertical height from the tool base surface and the hard coating layer interface. and particle diameter width W iota of, measuring the particle radial width W Iotaiota position 0.1μm vertical depth Convert hard coating layer surface, tables 4 and 5 their values with numeric W ΙΙ / W Ι It was shown to.
Incidentally, the particle size width referred to here means that “one line is drawn when a line parallel to the tool base surface is drawn at a position where the height or depth is converted to 0.1 μm in the observed surface. The average value of the lengths of the line segments passing through the particles.
From Table 4, modification CrAlN layer of the present invention the
10nm <W Ι <50nm and,, 5 <W ΙΙ / W Ι <100
It can be seen that this relationship is satisfied.
On the other hand, it can be seen from Table 5 that the conventional CrAlN layers of the
ついで、本発明インサート１〜１７の改質ＣｒＡｌＮ層および従来インサート１〜１３の従来ＣｒＡｌＮ層について、硬質被覆層の縦断面を研磨面とした状態で、電子線後方散乱回折装置（ＥＢＳＤ）を用いて、硬質被覆層の縦断面の結晶方位を解析した。すなわち、幅１０μｍ、高さ硬質被覆層の層厚相当の領域を、０．０１μｍ／ｓｔｅｐの間隔で、前記断面研磨面の法線方向および法線と直交する任意の方向に対して各測定点の結晶方位＜１１１＞がなす傾斜角、および断面研磨面の法線方向と結晶方位＜１００＞がなす傾斜角を測定し、この測定結果に基づいて、測定された面積領域を基板表面に垂直に１００ｎｍ毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とＣｒＡｌＮ膜の界面からＣｒＡｌＮ膜の成長方向に１００ｎｍ毎のピッチで区切り、１００ｎｍ×１００ｎｍに区分けされたそれぞれの領域（セル）に存在する測定点の前記三つの測定傾斜角の平均値をそれぞれ計算し、同一の前記縦区分に存在する複数セルの三つの測定傾斜角の平均値の最大値と最小値の差をそれぞれ計算し、これらの値を表４および表５に示した。
そして、表４から、本発明インサートの改質ＣｒＡｌＮ層は、縦区分内に存在するセルにおける、前記断面研磨面の法線方向と＜１１１＞方向のなす平均傾斜角、前記断面研磨面の法線に直交する方向と＜１１１＞方向のなす平均傾斜角、前記断面研磨面の法線方向と＜１００＞方向のなす平均傾斜角の最大値と最小値の差が１５度以下となる縦区分が全面積の６０％以上を占めていることが分かる。
一方、表５から、従来インサートの従来ＣｒＡｌＮ層は、同一縦区分における各平均傾斜角の最大値と最小値の差が１５度以下となる縦区分は、存在するものの、少ない（５０％以下）ことが分かる。
Next, with respect to the modified CrAlN layers of the
Then, from Table 4, the modified CrAlN layer of the insert of the present invention has an average inclination angle formed between the normal direction of the cross-sectional polishing surface and the <111> direction in the cells existing in the vertical section, and the method of the cross-sectional polishing surface. Vertical section in which the difference between the average inclination angle formed between the direction perpendicular to the line and the <111> direction and the maximum value and minimum value of the average inclination angle formed between the normal direction of the cross-section polished surface and the <100> direction is 15 degrees or less Occupies 60% or more of the total area.
On the other hand, from Table 5, the conventional CrAlN layer of the conventional insert has few vertical sections where the difference between the maximum value and the minimum value of each average inclination angle in the same vertical section is 15 degrees or less, but it is small (50% or less). I understand that.
つぎに、本発明インサート１〜１７および従来インサート１〜１３について、これを工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＵＳ３０４の長さ方向等間隔６本縦溝入り丸棒、
切削速度： ２２０ｍ／ｍｉｎ．、
切り込み： ３．０ｍｍ、
送り： ０．４ｍｍ／ｒｅｖ．、
切削時間： ２分、
の条件（切削条件１という）でのステンレス鋼の乾式連続高送り切削加工試験（通常の切削速度および送りは、それぞれ、１２０ｍ／ｍｉｎ、０．３ｍｍ／ｒｅｖ．）、
被削材：ＪＩＳ・Ｓ４５Ｃの長さ方向等間隔６本縦溝入り丸棒、
切削速度： ２００ｍ／ｍｉｎ．、
切り込み： ３．０ｍｍ、
送り： ０．４ｍｍ／ｒｅｖ．、
切削時間： ２分、
の条件（切削条件２という）での炭素鋼の乾式断続重切削加工試験（通常の切り込み及び送りは、それぞれ、１８０ｍｍ、０．２ｍｍ／ｒｅｖ．）、
を行い、
いずれの切削加工試験でも切刃の逃げ面摩耗幅を測定した。
この測定結果を表６に示した。
Next, about this invention inserts 1-17 and conventional inserts 1-13, in the state where this was screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SUS304 lengthwise equal 6 round bars with vertical grooves,
Cutting speed: 220 m / min. ,
Cutting depth: 3.0mm,
Feed: 0.4 mm / rev. ,
Cutting time: 2 minutes
Dry continuous high feed cutting test of stainless steel under the following conditions (referred to as cutting condition 1) (normal cutting speed and feed are 120 m / min and 0.3 mm / rev., Respectively),
Work material: 6 JIS S45C longitudinally spaced round bars with regular grooves,
Cutting speed: 200 m / min. ,
Cutting depth: 3.0mm,
Feed: 0.4 mm / rev. ,
Cutting time: 2 minutes
(Continuous cutting and feeding are 180 mm and 0.2 mm / rev., Respectively)
And
In any cutting test, the flank wear width of the cutting edge was measured.
The measurement results are shown in Table 6.
表４、６に示される結果から、本発明インサート１〜１７は、ＣｒＡｌＮ結晶粒の粒径幅が小さい領域Ｉと、粒径幅がこれより大きい領域ＩＩとからなり、かつ、基板に対して垂直に連続する領域Ｉの微細粒子と領域ＩＩの粗大粒子の結晶方位のずれが１５度以下となる縦区分の面積割合が高いため、切刃に対して衝撃的・断続的高負荷が作用する乾式断続重切削条件や、連続的な高負荷がかかる乾式連続高送り切削条件においても、すぐれた高温強度に加えてすぐれた耐欠損性と靭性を示し、すぐれた工具特性を発揮することが明らかである。
さらに、表４、６から、本発明インサートの改質ＣｒＡｌＮ層の中でも特に性能のよいものは、縦区分内に存在するセルにおける、前記断面研磨面の法線方向と＜１１１＞方向のなす平均傾斜角、前記断面研磨面の法線に直交する方向と＜１１１＞方向のなす平均傾斜角、前記断面研磨面の法線方向と＜１００＞方向のなす平均傾斜角の最大値と最小値の差が５度以下となる縦区分が全面積の６０％以上を占めていることが分かる。
これに対して、表５、６から、従来インサート１〜１３においては、従来ＣｒＡｌＮ層は、耐欠損性と靭性に劣り、乾式断続重切削条件や、乾式連続高送り切削条件では欠損等により、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Tables 4 and 6, the
Further, from Tables 4 and 6, among the modified CrAlN layers of the inserts of the present invention, the particularly good performance is the average formed by the normal direction of the cross-section polished surface and the <111> direction in the cells existing in the vertical section. An inclination angle, an average inclination angle formed between the direction perpendicular to the normal line of the cross-section polished surface and the <111> direction, and a maximum value and a minimum value of an average inclination angle formed between the normal direction of the cross-section polished surface and the <100> direction. It can be seen that vertical sections with a difference of 5 degrees or less occupy 60% or more of the total area.
On the other hand, from Tables 5 and 6, in the
前述のように、この発明の被覆工具は、硬質被覆層（改質ＣｒＡｌＮ層）がすぐれた靭性、耐欠損性を有することから、被覆インサートばかりでなく、被覆エンドミル、被覆ドリル等の各種被覆工具として用いることができ、そして、これによって、靭性不足、強度不足等に起因する工具欠損の発生を防止し、長期の使用に亘って優れた切削性能を発揮するものであるから、低コスト化に十分満足に対応できるとともに、工具寿命の延命化を図ることができるものである。 As described above, the coated tool according to the present invention has not only a coated insert but also various coated tools such as a coated end mill and a coated drill because the hard coating layer (modified CrAlN layer) has excellent toughness and fracture resistance. As a result, it prevents tool breakage due to insufficient toughness, insufficient strength, etc., and exhibits excellent cutting performance over a long period of use. In addition to being able to respond satisfactorily, the tool life can be extended.
１： 工具基体
２： 硬質被覆層
３： 工具基体と硬質被覆層の界面
４： 硬質被覆層の最表面
５： 工具基体と硬質被覆層の界面から、基体に垂直な高さ換算で０．１μｍの位置
６： 硬質被覆層の最表面から、基体に垂直な深さ換算で０．１μｍの位置
1: Tool substrate 2: Hard coating layer 3: Interface between tool substrate and hard coating layer 4: Outermost surface of hard coating layer 5: 0.1 μm in terms of height perpendicular to the substrate from the interface between the tool substrate and the hard coating layer Position 6: 0.1 μm position in terms of depth perpendicular to the substrate from the outermost surface of the hard coating layer
Claims (2)
（ａ）硬質被覆層の、工具基体とＣｒＡｌＮ膜の界面から０．１μｍの高さ位置にあるＣｒＡｌＮ結晶粒の粒径幅をＷＩ、ＣｒＡｌＮ膜の最表面から０．１μｍの深さ位置にあるＣｒＡｌＮ結晶粒の粒径幅をＷＩＩとしたとき、
１０ｎｍ＜ＷＩ＜５０ｎｍ、かつ、５＜ＷＩＩ／ＷＩ＜１００
の関係を満たし、
（ｂ）さらに、電子線後方散乱回折装置を用いて、硬質被覆層断面のＣｒＡｌＮ結晶粒の結晶方位を解析し、測定された二次元領域を工具基体表面に対して略垂直な方向に１００ｎｍ毎のピッチで縦区分に区切り、さらに、それぞれの縦区分内を工具基体とＣｒＡｌＮ膜の界面からＣｒＡｌＮ膜の成長方向に１００ｎｍ毎のピッチで区切り、１００ｎｍ×１００ｎｍに区分けされたそれぞれの領域（セル）に存在する各測定点の、
＜１１１＞結晶方位とＣｒＡｌＮ膜測定断面の法線方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下であり、
＜１１１＞結晶方位とＣｒＡｌＮ膜測定断面の法線と直交する方向がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下であり、
＜１００＞結晶方位とＣｒＡｌＮ膜測定断面の法線がなす傾斜角の平均傾斜角を計算し、同一縦区分に存在するセルのうち、測定傾斜角の最大値と最小値の差が１５度以下
である１００ｎｍ幅の縦区分が、測定された全面積のうちの６０％以上を占有することを特徴とする表面被覆切削工具。 In a surface-coated cutting tool in which a hard coating layer made of a CrAlN film having an average layer thickness of 0.5 to 2 μm is physically vapor-deposited on the surface of a tool base made of a tungsten carbide-based cemented carbide sintered body,
(A) In the hard coating layer, the grain width of the CrAlN crystal grains at a height position of 0.1 μm from the interface between the tool base and the CrAlN film is set to W I , and the depth position of 0.1 μm from the outermost surface of the CrAlN film. When the grain width of a certain CrAlN crystal grain is W II ,
10 nm <W I <50 nm and 5 <W II / W I <100
Meet the relationship,
(B) Further, the crystal orientation of the CrAlN crystal grains of the hard coating layer cross section is analyzed using an electron beam backscatter diffraction apparatus, and the measured two-dimensional region is measured every 100 nm in a direction substantially perpendicular to the tool substrate surface. Each of the regions (cells) divided into 100 nm × 100 nm by dividing each vertical section into 100 nm × 100 nm from the interface between the tool base and the CrAlN film in the growth direction of the CrAlN film. Of each measuring point present in
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the normal direction of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees among cells existing in the same vertical section. And
The average inclination angle of the inclination angle formed by the <111> crystal orientation and the direction perpendicular to the normal line of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle among cells existing in the same vertical section Is 15 degrees or less,
The average inclination angle of the inclination angle formed by the <100> crystal orientation and the normal line of the CrAlN film measurement cross section is calculated, and the difference between the maximum value and the minimum value of the measurement inclination angle is 15 degrees or less among cells existing in the same vertical section. A surface-coated cutting tool characterized in that the vertical section of 100 nm width occupies 60% or more of the total area measured.
2. The surface coating according to claim 1, wherein when the composition of the CrAlN film is expressed by Cr 1-x Al x N, the Al content ratio x with respect to Cr satisfies 0.3 ≦ x ≦ 0.6. Cutting tools.
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| JP3136778B2 (en) * | 1992-06-11 | 2001-02-19 | 三菱マテリアル株式会社 | Surface coated titanium carbonitride based cermet cutting tool with excellent chipping resistance |
| JP3901336B2 (en) * | 1998-03-31 | 2007-04-04 | 大日本印刷株式会社 | Operation method of ion plating apparatus |
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| JP5560513B2 (en) * | 2010-03-23 | 2014-07-30 | 三菱マテリアル株式会社 | Surface-coated cutting tool with excellent fracture resistance due to hard coating layer |
-
2010
- 2010-06-17 JP JP2010138408A patent/JP5585935B2/en not_active Expired - Fee Related
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| CN108277456A (en) * | 2018-01-31 | 2018-07-13 | 天津涂冠科技有限公司 | A method of PVD tube type work piece plated film aspect ratios are improved by externally-applied magnetic field |
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