JP5588424B2 - 電子顕微鏡検査のサンプル担体のための保持器 - Google Patents

電子顕微鏡検査のサンプル担体のための保持器 Download PDF

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Publication number
JP5588424B2
JP5588424B2 JP2011259339A JP2011259339A JP5588424B2 JP 5588424 B2 JP5588424 B2 JP 5588424B2 JP 2011259339 A JP2011259339 A JP 2011259339A JP 2011259339 A JP2011259339 A JP 2011259339A JP 5588424 B2 JP5588424 B2 JP 5588424B2
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Prior art keywords
sample carrier
mount
substrate
mounting
opening
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Japanese (ja)
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JP2012119315A5 (https=
JP2012119315A (ja
Inventor
ゲヒター レアンデル
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ライカ ミクロジュステムス（シュヴァイツ）アーゲー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/262—Non-scanning techniques

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2011259339A 2010-11-29 2011-11-28 電子顕微鏡検査のサンプル担体のための保持器 Expired - Fee Related JP5588424B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT1986/2010 2010-11-29
ATA1986/2010A AT510799B1 (de) 2010-11-29 2010-11-29 Halterung für einen elektronenmikroskopischen probenträger

Publications (3)

Publication Number Publication Date
JP2012119315A JP2012119315A (ja) 2012-06-21
JP2012119315A5 JP2012119315A5 (https=) 2014-02-27
JP5588424B2 true JP5588424B2 (ja) 2014-09-10

Family

ID=45217259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011259339A Expired - Fee Related JP5588424B2 (ja) 2010-11-29 2011-11-28 電子顕微鏡検査のサンプル担体のための保持器

Country Status (4)

Country Link
US (1) US8395130B2 (https=)
EP (1) EP2458616B1 (https=)
JP (1) JP5588424B2 (https=)
AT (1) AT510799B1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015030271A1 (ko) * 2013-08-28 2015-03-05 한국기초과학지원연구원 투과전자현미경에서의 다목적 3차원 이미징을 위한 시료스테이지 및 시료 홀더의 정밀제어장치
EP3069367B1 (en) 2013-11-11 2019-01-09 Howard Hughes Medical Institute Workpiece transport and positioning apparatus
US20170018397A1 (en) * 2014-03-28 2017-01-19 Hitachi High-Technologies Corporation Sample holder for charged particle beam device, and charged particle beam device
WO2016016000A1 (de) 2014-07-29 2016-02-04 Leica Mikrosysteme Gmbh Lichtmikroskop mit einem probentisch für die kryo-mikroskopie
DE102014110724B4 (de) 2014-07-29 2016-09-01 European Molecular Biology Laboratory Manipulationsbehälter für die Kryo-Mikroskopie
CN105911685B (zh) * 2016-06-21 2018-09-14 核工业理化工程研究院 用于轴类零件端部观察的显微镜载物台
JP6906786B2 (ja) * 2017-03-27 2021-07-21 株式会社日立ハイテクサイエンス 試料保持具、部材装着用器具、および荷電粒子ビーム装置
EP3385771B1 (de) 2017-04-05 2023-10-25 Leica Mikrosysteme GmbH Haltevorrichtung für probenträger und verfahren zum ein- und ausbringen eines probenträgers
JP6876652B2 (ja) * 2018-05-14 2021-05-26 日本電子株式会社 観察方法、試料支持体、試料保持具セット、および透過電子顕微鏡
JP6995093B2 (ja) * 2019-09-05 2022-01-14 日本電子株式会社 試料プレートホルダ
CN113804909B (zh) * 2020-06-12 2023-12-12 中国科学院苏州纳米技术与纳米仿生研究所 真空互联样品转移组件
EP4047407B1 (en) 2021-08-03 2023-10-04 Leica Mikrosysteme GmbH Sample transfer device
US20250104962A1 (en) * 2023-09-22 2025-03-27 Fei Company Sample carrier and uses thereof
CN119984991B (zh) * 2025-02-23 2025-10-10 北京艾博智业离子技术有限公司 一种离子减薄样品台及其减薄仪

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164761U (ja) * 1984-04-12 1985-11-01 株式会社トプコン 電子顕微鏡等の試料保持装置
JPH0731260B2 (ja) * 1987-06-04 1995-04-10 ウシオ電機株式会社 水平移動装置
JPH09102292A (ja) * 1995-10-05 1997-04-15 Shin Etsu Chem Co Ltd 試料保持装置
JP3340603B2 (ja) * 1995-10-05 2002-11-05 日本電子株式会社 電子顕微鏡用試料ホルダ
US6002136A (en) 1998-05-08 1999-12-14 International Business Machines Corporation Microscope specimen holder and grid arrangement for in-situ and ex-situ repeated analysis
WO2000010191A1 (en) * 1998-08-12 2000-02-24 Gatan, Inc. Double tilt and rotate specimen holder for a transmission electron microscope
US6246060B1 (en) * 1998-11-20 2001-06-12 Agere Systems Guardian Corp. Apparatus for holding and aligning a scanning electron microscope sample
JP2001084939A (ja) * 1999-09-17 2001-03-30 Canon Inc 走査電子顕微鏡の試料ホルダ
ATE520970T1 (de) * 2002-04-08 2011-09-15 E A Fischione Instr Inc Präparathaltevorrichtung
DE10258104B4 (de) * 2002-12-11 2005-11-03 Leica Mikrosysteme Gmbh Präparathalter mit Entnahmehilfe für die Mikrotomie und die AFM-Mikroskopie
JP4616701B2 (ja) * 2005-05-30 2011-01-19 日本電子株式会社 電子顕微鏡の試料ホルダ
EP1868225A1 (en) * 2006-05-29 2007-12-19 FEI Company Sample carrier and sample holder
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
JP2008159513A (ja) * 2006-12-26 2008-07-10 Jeol Ltd 電子顕微鏡用試料ホルダー
EP1947675B1 (en) 2007-01-22 2009-03-25 FEI Company Manipulator for rotating and translating a sample holder
JP4937896B2 (ja) * 2007-12-26 2012-05-23 アオイ電子株式会社 微小試料台集合体の製造方法、微小試料台の製造方法および試料ホルダの製造方法
DE102009020663A1 (de) * 2009-05-11 2010-11-25 Carl Zeiss Ag Mikroskopie eines Objektes mit einer Abfolge von optischer Mikroskopie und Teilchenstrahlmikroskopie

Also Published As

Publication number Publication date
US8395130B2 (en) 2013-03-12
EP2458616B1 (de) 2018-03-28
EP2458616A2 (de) 2012-05-30
AT510799A1 (de) 2012-06-15
AT510799B1 (de) 2012-12-15
JP2012119315A (ja) 2012-06-21
EP2458616A3 (de) 2013-11-27
US20120132828A1 (en) 2012-05-31

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