JP5581707B2 - 制御方法 - Google Patents

制御方法 Download PDF

Info

Publication number
JP5581707B2
JP5581707B2 JP2010017196A JP2010017196A JP5581707B2 JP 5581707 B2 JP5581707 B2 JP 5581707B2 JP 2010017196 A JP2010017196 A JP 2010017196A JP 2010017196 A JP2010017196 A JP 2010017196A JP 5581707 B2 JP5581707 B2 JP 5581707B2
Authority
JP
Japan
Prior art keywords
scanning
signal
drive signal
control method
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010017196A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011154312A5 (enExample
JP2011154312A (ja
Inventor
弘 岸本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2010017196A priority Critical patent/JP5581707B2/ja
Publication of JP2011154312A publication Critical patent/JP2011154312A/ja
Publication of JP2011154312A5 publication Critical patent/JP2011154312A5/ja
Application granted granted Critical
Publication of JP5581707B2 publication Critical patent/JP5581707B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Microscoopes, Condenser (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2010017196A 2010-01-28 2010-01-28 制御方法 Expired - Fee Related JP5581707B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010017196A JP5581707B2 (ja) 2010-01-28 2010-01-28 制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010017196A JP5581707B2 (ja) 2010-01-28 2010-01-28 制御方法

Publications (3)

Publication Number Publication Date
JP2011154312A JP2011154312A (ja) 2011-08-11
JP2011154312A5 JP2011154312A5 (enExample) 2013-04-04
JP5581707B2 true JP5581707B2 (ja) 2014-09-03

Family

ID=44540308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010017196A Expired - Fee Related JP5581707B2 (ja) 2010-01-28 2010-01-28 制御方法

Country Status (1)

Country Link
JP (1) JP5581707B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10049245B2 (en) 2012-06-20 2018-08-14 Metrologic Instruments, Inc. Laser scanning code symbol reading system providing control over length of laser scan line projected onto a scanned object using dynamic range-dependent scan angle control
EP2960708A4 (en) * 2013-02-20 2016-11-16 Pioneer Corp TWO-DIMENSIONAL OPTICAL SCANNING DEVICE
JP6405092B2 (ja) * 2014-01-28 2018-10-17 キヤノン株式会社 画像生成装置および画像生成方法
CN114467035A (zh) * 2019-10-01 2022-05-10 富士通株式会社 激光传感器、反射镜控制方法以及程序
CN114967109B (zh) * 2021-02-25 2024-01-05 成都理想境界科技有限公司 图像矫正方法及光纤扫描成像系统
CN113660434B (zh) * 2021-08-17 2024-11-19 中国科学院上海技术物理研究所 空间红外相机参数匹配和重构方法、系统、设备及应用
CN115468746A (zh) * 2022-08-30 2022-12-13 歌尔光学科技有限公司 一种振镜性能测试系统和方法
JP2024105017A (ja) 2023-01-25 2024-08-06 株式会社日立ハイテク 光計測装置、光計測方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4337346B2 (ja) * 2003-01-07 2009-09-30 株式会社ニコン レーザ走査顕微鏡
DE602007011940D1 (enExample) * 2006-07-18 2011-02-24 Nippon Kogaku Kk

Also Published As

Publication number Publication date
JP2011154312A (ja) 2011-08-11

Similar Documents

Publication Publication Date Title
JP5581707B2 (ja) 制御方法
JP5814709B2 (ja) タイムラプス観察方法、及び、それに用いられるタイムラプス観察装置
US20080251689A1 (en) Scanning optical device and observation method
US20090187378A1 (en) Depth measurement apparatus and depth measurement method
JP5307418B2 (ja) 走査型レーザ顕微鏡
US9835837B2 (en) Method and apparatus for estimating an in-focus position
JP2009145826A (ja) 走査型顕微鏡装置
JP2005275199A (ja) ３次元共焦点顕微鏡システム
US7679045B2 (en) Method for correcting a control of an optical scanner in a device for imaging a sample by scanning and the device for performing the method
US9091861B2 (en) Scanning microscope
JP7066368B2 (ja) レーザ加工機の制御装置、レーザ加工方法、及びレーザ加工機
US20070086048A1 (en) Method for correcting a control of an optical scanner and the optical scanner
JPWO2010143375A1 (ja) 顕微鏡装置および制御プログラム
JP4337346B2 (ja) レーザ走査顕微鏡
JP5083325B2 (ja) 走査型レーザ顕微鏡
JP5378187B2 (ja) 走査型顕微鏡
JP7333744B2 (ja) 高さ測定方法および高さ測定装置
JPH0886622A (ja) 形状計測装置
JP2012073551A (ja) 走査型顕微鏡
JP7773351B2 (ja) 顕微鏡システム、及び、顕微鏡制御装置
US11243388B2 (en) Sampling circuit and laser scanning microscope
JP2011186060A (ja) レーザ走査型顕微鏡および制御方法
JP7530305B2 (ja) 画像検出装置および画像検出方法
JP2018521575A (ja) マルチライン検出方法
JP2003177343A (ja) 走査光学系ビーム測定装置及びビーム測定方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130124

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130213

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20131217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140128

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140317

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140617

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140630

R150 Certificate of patent or registration of utility model

Ref document number: 5581707

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees