JP5579765B2 - 砥粒及びその製造方法 - Google Patents
砥粒及びその製造方法 Download PDFInfo
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- JP5579765B2 JP5579765B2 JP2012055317A JP2012055317A JP5579765B2 JP 5579765 B2 JP5579765 B2 JP 5579765B2 JP 2012055317 A JP2012055317 A JP 2012055317A JP 2012055317 A JP2012055317 A JP 2012055317A JP 5579765 B2 JP5579765 B2 JP 5579765B2
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- JP
- Japan
- Prior art keywords
- calcia
- stabilized zirconia
- abrasive
- particle size
- zirconia
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000006061 abrasive grain Substances 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title description 11
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 108
- 229910002084 calcia-stabilized zirconia Inorganic materials 0.000 claims description 82
- 239000002245 particle Substances 0.000 claims description 35
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 30
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 30
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 21
- 239000000292 calcium oxide Substances 0.000 claims description 20
- 235000012255 calcium oxide Nutrition 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 6
- DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 claims description 4
- 238000005498 polishing Methods 0.000 description 29
- 238000002156 mixing Methods 0.000 description 15
- 239000002994 raw material Substances 0.000 description 14
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 10
- 229910001928 zirconium oxide Inorganic materials 0.000 description 10
- 239000011521 glass Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000006872 improvement Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000003082 abrasive agent Substances 0.000 description 3
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Description
前記粉砕・分級された前記第1のカルシア安定化ジルコニアと前記粉砕・分級された前記第2のカルシア安定化ジルコニアとを所定比率で混合するステップとを、
有する砥粒の製造方法が提供される。
S2、S12 分級ステップ
S3、S13 微粉砕ステップ
S4、S14 微粉分級ステップ
S15 添加剤混合ステップ
S16 第1のカルシア安定化ジルコニアと第2のカルシア安定化ジルコニアの混合ステップ
S17 梱包ステップ
Claims (5)
- 第1のカルシア安定化ジルコニアと、前記第1のカルシア安定化ジルコニアよりカルシアの添加量を増加させた第2のカルシア安定化ジルコニアの混合物からなる砥粒であって、前記第1のカルシア安定化ジルコニアは、電融ジルコニアであり、前記第2のカルシア安定化ジルコニアは、電融ジルコニアとジルコン酸カルシウムが共存しているものであり、前記第1のカルシア安定化ジルコニアの粒度が前記第2のカルシア安定化ジルコニアの粒度より大きい砥粒。
- 前記第1のカルシア安定化ジルコニアのカルシア添加量が3〜4重量%であり、前記第2のカルシア安定化ジルコニアのカルシア添加量が10〜28重量%である請求項1に記載の砥粒。
- 前記第2のカルシア安定化ジルコニアが前記第1のカルシア安定化ジルコニアに対し10〜90重量%で混合されている請求項1又は2に記載の砥粒。
- 前記第1のカルシア安定化ジルコニアの粒度が前記第2のカルシア安定化ジルコニアの粒度と比べ粒度差指数にて1.0以下である、請求項1から3のいずれか1つに記載の砥粒。
- 前記第1のカルシア安定化ジルコニアの粒度より粒度の大きい酸化セリウムが添加されている請求項1から4のいずれか1つに記載の砥粒。
Priority Applications (1)
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JP2012055317A JP5579765B2 (ja) | 2012-03-13 | 2012-03-13 | 砥粒及びその製造方法 |
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JP2012055317A JP5579765B2 (ja) | 2012-03-13 | 2012-03-13 | 砥粒及びその製造方法 |
Publications (2)
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JP2013188811A JP2013188811A (ja) | 2013-09-26 |
JP5579765B2 true JP5579765B2 (ja) | 2014-08-27 |
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JP2012055317A Active JP5579765B2 (ja) | 2012-03-13 | 2012-03-13 | 砥粒及びその製造方法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2016136447A1 (ja) * | 2015-02-26 | 2016-09-01 | 堺化学工業株式会社 | 負帯電性基板の研磨方法、及び、高表面平滑性の負帯電性基板の製造方法 |
CN115448703B (zh) * | 2022-09-06 | 2023-05-19 | 宜兴市隆昌耐火材料有限公司 | 一种含有锆刚玉的高温耐磨浇注料的制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008019144A (ja) * | 2006-07-14 | 2008-01-31 | Sumitomo Osaka Cement Co Ltd | ジルコニア含有セラミックス複合材料の製造方法 |
KR20100062998A (ko) * | 2007-09-07 | 2010-06-10 | 아사히 가라스 가부시키가이샤 | 산화물 결정 미립자의 제조 방법 |
JP2013104023A (ja) * | 2011-11-15 | 2013-05-30 | Tosoh Corp | ジルコニア研磨剤及びその製造方法 |
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