JP5571261B1 - Pinch valve - Google Patents

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JP5571261B1
JP5571261B1 JP2014005133A JP2014005133A JP5571261B1 JP 5571261 B1 JP5571261 B1 JP 5571261B1 JP 2014005133 A JP2014005133 A JP 2014005133A JP 2014005133 A JP2014005133 A JP 2014005133A JP 5571261 B1 JP5571261 B1 JP 5571261B1
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valve body
pinch
pinch tube
tube
valve
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JP2015132357A (en
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泰 渡辺
純一 上条
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Tokyo Keiso Co Ltd
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Abstract

【課題】弁本体にピンチチューブを容易にかつ確実に固定する。
【解決手段】弁本体1にはパイプ挿通孔2が形成されており、合成樹脂材から成るピンチチューブ5が挿通されており、弁本体1の上方には電動駆動部6が配置されている。電動駆動部6内には電動機7により上下動される昇降体9が設けられ、昇降体9の下部には棒状の弁体11が固定され、ピンチチューブ5の変形部5aを押圧するようにされている。
ピンチチューブ5は硬質の管体から成り、中央部は外側から例えば肉厚1mmが例えば0.3mmとなるまで切削して、弾性を有し柔軟で変形し易い変形部5aとされている。ピンチチューブ5の両側にはナット13が挿通され、これらのナット13をパイプ挿通孔2に設けられた内ねじ部2aに螺合することにより、ピンチチューブ5は硬質の非変形部により弁本体1に固定されている。
【選択図】図1
A pinch tube is easily and reliably fixed to a valve body.
A pipe insertion hole 2 is formed in a valve body 1, a pinch tube 5 made of a synthetic resin material is inserted, and an electric drive unit 6 is disposed above the valve body 1. An elevating body 9 that is moved up and down by an electric motor 7 is provided in the electric drive unit 6, and a rod-shaped valve body 11 is fixed to the lower part of the elevating body 9 so as to press the deformed portion 5 a of the pinch tube 5. ing.
The pinch tube 5 is formed of a hard tube body, and the central portion is cut from the outside, for example, until a thickness of 1 mm becomes, for example, 0.3 mm, thereby forming a deformable portion 5a having elasticity and being flexible and easily deformed. Nuts 13 are inserted into both sides of the pinch tube 5, and these nuts 13 are screwed into the internal threaded portions 2 a provided in the pipe insertion holes 2, so that the pinch tube 5 is made of the valve body 1 by a hard non-deformable portion. It is fixed to.
[Selection] Figure 1

Description

本発明は、半導体製造工程、化学工場などの各種産業分野における流体移送制御等に用いられる簡素な構造のピンチバルブに関するものである。   The present invention relates to a pinch valve having a simple structure used for fluid transfer control in various industrial fields such as semiconductor manufacturing processes and chemical factories.

ピンチバルブは例えば特許文献1〜3のように、弾性を有するピンチチューブの一部を押し潰すことにより、流体の流量を制御するものであり、従来から多用されている。   For example, as in Patent Documents 1 to 3, a pinch valve controls the flow rate of fluid by crushing a part of a pinch tube having elasticity, and has been widely used.

特開2003−172464号公報JP 2003-172464 A 特開2008−138790号公報JP 2008-138790 A 特開2013−167260号公報JP 2013-167260 A

しかし、これらの従来のピンチバルブはピンチチューブとして弾性を有するゴムや合成樹脂材を用いており、柔軟性を有するために弁体への固定が極めて厄介であり、ピンチチューブを交換する際にも、極めて複雑な手順を要する。また、ピンチチューブの端部を弁体の一部に固定しても、使用中に外れたりして流体が流れ出す虞れが多分にある。   However, these conventional pinch valves use elastic rubber or synthetic resin material as the pinch tube, and because of its flexibility, fixing to the valve body is extremely troublesome, and even when exchanging the pinch tube , Requiring extremely complex procedures. Further, even if the end of the pinch tube is fixed to a part of the valve body, there is a possibility that the fluid may flow out due to detachment during use.

また、ピンチチューブは弁体により押圧されるため弾性を備えたフッ素ゴム等を用いられていルが、これらの素材は耐食性が悪いという問題がある。   In addition, since the pinch tube is pressed by the valve body, elastic rubber or the like is used. However, these materials have a problem of poor corrosion resistance.

本発明の目的は、上述の問題点を解消し、硬質のピンチチューブを使用して、弁本体に容易にかつ確実に固定し得るピンチバルブを提供することにある。   An object of the present invention is to provide a pinch valve that solves the above-described problems and can be fixed to a valve body easily and reliably using a hard pinch tube.

上記目的を達成するための本発明に係るピンチバルブは、一部を変形して断面積を変化させる変形部を有するピンチチューブを弁本体に固定し、弁体の変位により流体の流量を制御するピンチバルブにおいて、前記ピンチチューブは、中央の前記変形部を弾性を有する薄肉とし、前記変形部の両側を硬質の非変形部とした硬質合成樹脂材から成り、前記弁本体のパイプ挿通孔内に前記ピンチチューブを挿通して前記変形部を前記弁本体内に位置させ、前記両側の非変形部に環状のナットを挿通し、これらのナットを前記弁本体に螺合することにより前記ピンチチューブを前記弁本体に固定し、前記変形部を前記弁体により押圧して変形させることを特徴とする。 In order to achieve the above object, a pinch valve according to the present invention has a pinch tube having a deforming portion that is partially deformed to change the cross-sectional area, fixed to a valve body, and controls the flow rate of fluid by the displacement of the valve body. In the pinch valve, the pinch tube is made of a hard synthetic resin material in which the deformed portion at the center is thin with elasticity, and both sides of the deformed portion are hard non-deformed portions, and is inserted into the pipe insertion hole of the valve body. The pinch tube is inserted into the valve body so that the deformed portion is positioned in the valve body, annular nuts are inserted into the non-deformed portions on both sides, and these nuts are screwed into the valve body to It fixes to the said valve main body, The said deformation | transformation part is pressed and deform | transformed with the said valve body, It is characterized by the above-mentioned.

本発明に係るピンチバルブによれば、ピンチチューブは硬質材料から成っているが、中央部の変形部のみを弾性を有するように形成しているので、硬質の非変形部によりピンチチューブの弁本体への固定が容易で確実となる。   According to the pinch valve of the present invention, the pinch tube is made of a hard material, but only the deformed portion at the center is formed to have elasticity, so the valve body of the pinch tube is formed by the hard non-deformed portion. Fixing to is easy and reliable.

また、本発明に係るピンチチューブは、使用中に取付部が外れて液漏れする虞れもない。   In addition, the pinch tube according to the present invention is free from the risk of liquid leakage due to the attachment portion being detached during use.

実施例1のピンチバルブの断面図である。It is sectional drawing of the pinch valve of Example 1. FIG. ピンチバルブに使用するピンチチューブの断面図である。It is sectional drawing of the pinch tube used for a pinch valve. ピンチバルブの作動状態の断面図である。It is sectional drawing of the operation state of a pinch valve. 実施例2のピンチバルブの断面図である。It is sectional drawing of the pinch valve | bulb of Example 2. FIG.

本発明を図示の実施例に基づいて詳細に説明する。   The present invention will be described in detail based on the embodiments shown in the drawings.

図1は実施例1のピンチバルブの断面図、図2はピンチチューブの拡大断面図である。   FIG. 1 is a cross-sectional view of the pinch valve of the first embodiment, and FIG. 2 is an enlarged cross-sectional view of the pinch tube.

合成樹脂又は金属から成る弁本体1の中心部には、水平方向に断面円形のパイプ挿通孔2が形成されており、弁本体1の中央上部には、パイプ挿通孔2に通ずる弁駆動孔3が上下方向に設けられ、弁駆動孔3に対向するパイプ挿通孔2の下部にはピンチ台座4が設けられている。パイプ挿通孔2内には、合成樹脂材から成るピンチチューブ5が挿通されており、弁本体1の上方には電動駆動部6が配置されている。   A pipe insertion hole 2 having a circular cross section in the horizontal direction is formed at the center of the valve body 1 made of synthetic resin or metal, and a valve drive hole 3 communicating with the pipe insertion hole 2 is formed at the upper center of the valve body 1. Is provided in the vertical direction, and a pinch base 4 is provided below the pipe insertion hole 2 facing the valve drive hole 3. A pinch tube 5 made of a synthetic resin material is inserted into the pipe insertion hole 2, and an electric drive unit 6 is disposed above the valve body 1.

電動駆動部6内には正逆回転可能な電動機7が設けられており、電動機7から下方に電動軸8が突出され、この電動軸8のねじ部8aに昇降体9の内ねじ部が回転自在に螺合されている。電動駆動部6内の2個所にはシャフト10が上下方向に配置されており、昇降体9の両側部にシャフト10が摺動自在に挿入され、昇降体9の下部には下部を平坦とした棒状の合成樹脂又は金属から成る弁体11が下方に向けて固定され、弁駆動孔3を通ってパイプ挿通孔2内に出入りできるようにされている。   An electric motor 7 capable of rotating in the forward and reverse directions is provided in the electric drive unit 6. An electric shaft 8 projects downward from the electric motor 7, and an inner screw portion of the lifting body 9 rotates on a screw portion 8 a of the electric shaft 8. It is screwed freely. Shafts 10 are vertically arranged at two locations in the electric drive unit 6, and the shafts 10 are slidably inserted into both side portions of the lifting body 9, and the lower part is flattened below the lifting body 9. A valve body 11 made of a rod-shaped synthetic resin or metal is fixed downward, and can enter and exit the pipe insertion hole 2 through the valve drive hole 3.

また、弁本体1と電動駆動部6との間には、ピンチチューブ5からの漏水時に、液が電動駆動部6側に流入しないように、弁体11に固定され、或いは弁体11と一体とした例えば合成樹脂製のダイアフラム12が配置されている。   In addition, between the valve body 1 and the electric drive unit 6, the liquid is fixed to the valve body 11 or integrated with the valve body 11 so that liquid does not flow into the electric drive unit 6 side when water leaks from the pinch tube 5. For example, a diaphragm 12 made of synthetic resin is disposed.

ピンチチューブ5は図2(a)に示すように、例えばPFA等の耐食性を有する長さ100mmの硬質の管体から成り、例えば外径6mm、内径4mmとされている。そして、ピンチチューブ5の中央部は外側から長さ約30mmに渡ってドットで示す部分を、例えば厚み1mmが例えば0.3mmとなるまで徐々に切削加工して、図2(b)に示すように弾性を有し柔軟で変形し易い変形部5aとされている。従って、加工後のピンチチューブ5は、中央の軟質の変形部5aとそれ以外の硬質の非変形部とから構成される。   As shown in FIG. 2A, the pinch tube 5 is made of a hard tube having a length of 100 mm and having corrosion resistance such as PFA, and has an outer diameter of 6 mm and an inner diameter of 4 mm, for example. Then, in the central portion of the pinch tube 5, a portion indicated by dots from the outside over a length of about 30 mm is gradually cut, for example, until the thickness becomes 1 mm, for example, 0.3 mm, as shown in FIG. The deformable portion 5a is elastic and flexible and easily deformed. Therefore, the processed pinch tube 5 includes a central soft deformable portion 5a and other hard non-deformed portions.

更に、ピンチチューブ5の両端は配管を接続するために、例えば加熱により拡径した拡径部5bとされている。なお、この拡径部5bはピンチチューブ5の弁本体1に固定した後に拡径してもよい。   Furthermore, the both ends of the pinch tube 5 are enlarged diameter portions 5b that are enlarged by heating, for example, in order to connect piping. The diameter-expanded portion 5b may be expanded after being fixed to the valve body 1 of the pinch tube 5.

ピンチチューブ5の変形部5aはピンチ台座4上の位置に配置され、変形部5aの両側には、その内径をピンチチューブ5の外径とほぼ一致させたナット13が挿通され、これらのナット13の外ねじ部13aをパイプ挿通孔2の両側に設けられた内ねじ部2aに螺合することにより、ピンチチューブ5は硬質の非変形部を用いて弁本体1に固定されている。   The deformed portion 5a of the pinch tube 5 is disposed at a position on the pinch pedestal 4, and nuts 13 having an inner diameter substantially equal to the outer diameter of the pinch tube 5 are inserted on both sides of the deformed portion 5a. The pinch tube 5 is fixed to the valve body 1 by using a hard non-deformable portion by screwing the outer screw portion 13a with the inner screw portion 2a provided on both sides of the pipe insertion hole 2.

更に、ピンチチューブ5の両端の拡径部5bの内側に、それぞれ環状のナット14が挿通され、ナット14の内ねじ14aに継手15の外ねじ15aが螺合され、拡径部5bをナット14と継手15で挟むことにより、継手15とピンチチューブ5が接続されている。また、これらのナット13、14、継手15等は耐食性の高いPFAを使用することができる。   Further, annular nuts 14 are respectively inserted inside the enlarged diameter portions 5 b at both ends of the pinch tube 5, the outer screw 15 a of the joint 15 is screwed into the inner screw 14 a of the nut 14, and the enlarged diameter portion 5 b is connected to the nut 14. The joint 15 and the pinch tube 5 are connected. Further, these nuts 13 and 14, the joint 15, etc. can use PFA having high corrosion resistance.

また、継手15の他端にはナット16が設けられ、ナット16に流体を流すための図示しない配管が接続可能とされている。   Further, a nut 16 is provided at the other end of the joint 15, and a pipe (not shown) for flowing a fluid through the nut 16 can be connected.

ピンチバルブを駆動して流体の流量制御をするに際しては、電動機7を正逆転して電動軸8を介して昇降体9を上下動させる。昇降体9は電動軸8の回転をねじ部8aによるねじ機構により上下方向の変位に変換する。この際に、昇降体9は2個所をシャフト10により保持されているので、安定した姿勢で上下動することができる。   When the flow rate of the fluid is controlled by driving the pinch valve, the motor 7 is moved forward and backward to move the lifting body 9 up and down via the electric shaft 8. The elevating body 9 converts the rotation of the electric shaft 8 into a vertical displacement by a screw mechanism by the screw portion 8a. At this time, since the lifting body 9 is held at two places by the shaft 10, it can move up and down in a stable posture.

電動機7を例えば正転させると、図3に示すように、昇降体9の下降に伴って弁体11が下降し、ピンチチューブ5をピンチ台座4との間で押圧する。ピンチチューブ5の変形部5aは弁体11により押し潰され、変形部5aの内径の断面積が減少し、これによりピンチチューブ5内を流れる流体の流量が減少する。   When the electric motor 7 is rotated forward, for example, as shown in FIG. 3, the valve body 11 is lowered as the elevating body 9 is lowered, and the pinch tube 5 is pressed between the pinch base 4. The deformed portion 5a of the pinch tube 5 is crushed by the valve body 11, and the cross-sectional area of the inner diameter of the deformed portion 5a is reduced, whereby the flow rate of the fluid flowing through the pinch tube 5 is reduced.

また、電動機7を逆転すれば弁体11は上昇し、ピンチチューブ5は弁体11の変位に伴って押圧力が減少するので、ピンチチューブ5内の流量の圧力により弾性を有する変形部5aの形状が復元し、流量が大きくなる。   Further, if the electric motor 7 is reversed, the valve body 11 rises and the pressing force of the pinch tube 5 decreases with the displacement of the valve body 11, so that the deformation portion 5 a having elasticity due to the pressure of the flow rate in the pinch tube 5. The shape is restored and the flow rate is increased.

ピンチチューブ5の上流又は下流に超音波流量計などの流量センサを配置して流体の流量を検知し、制御機構により設定流量値との偏差を電動機7による弁体11の上下動にフィードバックすれば、ピンチバルブにより流体の流量を正確に制御することができる。   If a flow rate sensor such as an ultrasonic flow meter is arranged upstream or downstream of the pinch tube 5 to detect the flow rate of the fluid, a deviation from the set flow rate value is fed back to the vertical movement of the valve body 11 by the motor 7 by the control mechanism. The flow rate of the fluid can be accurately controlled by the pinch valve.

ピンチチューブ5の交換に際しては、ナット13を外しピンチチューブ5を切断するなどして引き抜けば、容易に取り外すことができる。また、新しいピンチチューブ5を取り付ける場合にも、先に説明した手順で組み立てればよい。   When exchanging the pinch tube 5, it can be easily removed by removing the nut 13 and cutting the pinch tube 5. Moreover, what is necessary is just to assemble in the procedure demonstrated previously also when attaching the new pinch tube 5. FIG.

図4は駆動源を空気とした実施例2のピンチバルブの断面図であり、図1と同じ符号は同じ部材を示している。   FIG. 4 is a cross-sectional view of the pinch valve of Example 2 in which the drive source is air, and the same reference numerals as those in FIG. 1 denote the same members.

弁本体1の上方には、シリンダ機構を備えた空気圧駆動部21が配置されている。この空気圧駆動部21の筐体は、シリンダ機構のシリンダ胴22を兼ねている。   Above the valve body 1, a pneumatic drive unit 21 having a cylinder mechanism is disposed. The housing of the pneumatic drive unit 21 also serves as the cylinder body 22 of the cylinder mechanism.

下方に向けて弁体11をピストン軸として固定したピストン23は、外周側面にOリング24を装着した円盤状であり、上下動可能かつ密封状態でシリンダ胴22内に収納されている。ピストン23の上方は圧力室25とされ、圧力室25の上部にはナット26が螺合され、ナット26には給排気孔27が設けられている。   The piston 23 having the valve element 11 fixed downward as a piston shaft is in a disk shape with an O-ring 24 mounted on the outer peripheral side surface, and is housed in the cylinder body 22 so as to be vertically movable and sealed. Above the piston 23 is a pressure chamber 25, and a nut 26 is screwed into the upper portion of the pressure chamber 25, and a supply / exhaust hole 27 is provided in the nut 26.

弁本体1のパイプ挿通孔2にピンチチューブ5が挿通され、弁体11によりピンチチューブ5を押圧して流体流量を制御することは、実施例1と同様である。   The pinch tube 5 is inserted into the pipe insertion hole 2 of the valve body 1 and the fluid flow rate is controlled by pressing the pinch tube 5 with the valve body 11 as in the first embodiment.

給排気孔27から圧力室25内に圧縮空気を供給すると、空気圧によりピストン23が下方に押され、外周側面のOリング24をシリンダ胴22の内周に摺接させながら下降する。この下降により、弁体11はピンチチューブ5の変形部5aを押圧し、変形部5aの断面積を変化させる。また、給排気孔27から圧力室25への空気の供給を係止して圧力室25内を減圧すると、ピストン23は上昇し弁体11も共に上昇するので、潰れていた変形部5aの形状は復元する。   When compressed air is supplied from the air supply / exhaust hole 27 into the pressure chamber 25, the piston 23 is pushed downward by the air pressure, and the O-ring 24 on the outer peripheral side is lowered while sliding on the inner periphery of the cylinder body 22. By this descending, the valve body 11 presses the deforming portion 5a of the pinch tube 5 and changes the cross-sectional area of the deforming portion 5a. Further, when the supply of air from the air supply / exhaust hole 27 to the pressure chamber 25 is stopped and the pressure chamber 25 is depressurized, the piston 23 rises and the valve body 11 also rises, so the shape of the deformed deformed portion 5a Will restore.

なお、実施例1、2においては、ピンチチューブ5の変形部5aは切削により薄肉としたが、成型により薄肉で弾性を有する変形部5aを備えたピンチチューブを製作することもできる。   In the first and second embodiments, the deformed portion 5a of the pinch tube 5 is thinned by cutting. However, a pinch tube including the deformed portion 5a that is thin and elastic can be manufactured by molding.

また、実施例1、2においては、変形部5aを円周方向に一様に設けたが、弁体11により押圧される側のみを薄肉とする変形部としてもよい。   In the first and second embodiments, the deformable portion 5a is provided uniformly in the circumferential direction. However, only the side pressed by the valve body 11 may be a thin deformed portion.

本実施例では、一体成形品により変形部5aを有するピンチチューブ5を製作していて、複合体ではないために継ぎ目等もなく構成も簡素である。   In this embodiment, the pinch tube 5 having the deformed portion 5a is manufactured by an integrally molded product, and since it is not a composite body, there is no seam and the configuration is simple.

1 弁本体
2 パイプ挿通孔
5 ピンチチューブ
5a 変形部
5b 拡径部
6 電動駆動部
7 電動機
9 昇降体
11 弁体
13 ナット
21 空気圧駆動部
22 シリンダ胴
23 ピストン
25 圧力室
27 給排気孔
DESCRIPTION OF SYMBOLS 1 Valve body 2 Pipe insertion hole 5 Pinch tube 5a Deformation part 5b Diameter expansion part 6 Electric drive part 7 Electric motor 9 Lifting body 11 Valve body 13 Nut 21 Pneumatic drive part 22 Cylinder body 23 Piston 25 Pressure chamber 27 Supply / exhaust hole

Claims (5)

一部を変形して断面積を変化させる変形部を有するピンチチューブを弁本体に固定し、弁体の変位により流体の流量を制御するピンチバルブにおいて、
前記ピンチチューブは、中央の前記変形部を弾性を有する薄肉とし、前記変形部の両側を硬質の非変形部とした硬質合成樹脂材から成り、
前記弁本体のパイプ挿通孔内に前記ピンチチューブを挿通して前記変形部を前記弁本体内に位置させ、前記両側の非変形部に環状のナットを挿通し、これらのナットを前記弁本体に螺合することにより前記ピンチチューブを前記弁本体に固定し、前記変形部を前記弁体により押圧して変形させることを特徴とするピンチバルブ。
In a pinch valve that fixes a pinch tube having a deformed portion that deforms a part and changes a cross-sectional area to a valve body, and controls the flow rate of fluid by displacement of the valve body,
The pinch tube is made of a hard synthetic resin material in which the deformed portion at the center is thin with elasticity, and both sides of the deformed portion are hard non-deformed portions,
The pinch tube is inserted into a pipe insertion hole of the valve body, the deformed portion is positioned in the valve body, annular nuts are inserted into the non-deformed portions on both sides, and these nuts are inserted into the valve body. A pinch valve characterized in that the pinch tube is fixed to the valve body by screwing, and the deforming portion is pressed and deformed by the valve body.
前記変形部は前記ピンチチューブの外側を切削加工することにより薄肉としたことを特徴とする請求項1に記載のピンチバルブ。   The pinch valve according to claim 1, wherein the deformed portion is thinned by cutting the outside of the pinch tube. 前記ピンチチューブの両端に前記流体を流通させる配管を接続することを特徴とする請求項1又は2に記載のピンチバルブ。 The pinch valve according to claim 1 or 2 , wherein piping for circulating the fluid is connected to both ends of the pinch tube. 前記ピンチチューブは耐食性のフッ素樹脂材から成る請求項1〜の何れか1項に記載のピンチバルブ。 The pinch valve according to any one of claims 1 to 3 , wherein the pinch tube is made of a corrosion-resistant fluororesin material. 前記弁本体上に前記弁体を駆動する駆動部を設けたことを特徴とする請求項1〜の何れか1項に記載のピンチバルブ。 The pinch valve according to any one of claims 1 to 4 , wherein a drive unit that drives the valve body is provided on the valve body.
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