JP2015132357A - pinch valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and surely fix a pinch tube to a valve main body.SOLUTION: A pipe penetration hole 2 is formed at a valve main body 1, a synthetic resin made pinch tube 5 is inserted, and an electric drive part 6 is arranged above the valve main body 1. A lift body 9 which is vertically moved by an electric motor 7 is arranged in the electric drive part 6, and a rod-shaped valve body 11 is fixed to a lower part of the lift body 9 so as to press a deformation part 5a of the pinch tube 5. The pinch tube 5 is formed of a hard pipe body, and a center part is cut so that its thickness becomes, for example, 0.3 mm from 1 mm from the outside, and made to serve as the deformation part 5a which has elasticity, is soft, and liable to be deformed. Nuts 13 are fit to both sides of the pinch tube 5, and the pinch tube 5 is fixed to the valve main body 1 by a hard and non-deformable part by screwing these nuts 13 into internal screw parts 2a which are formed in the pipe penetration hole 2.

Description

  The present invention relates to a pinch valve having a simple structure used for fluid transfer control in various industrial fields such as semiconductor manufacturing processes and chemical factories.

  For example, as in Patent Documents 1 to 3, a pinch valve controls the flow rate of fluid by crushing a part of a pinch tube having elasticity, and has been widely used.

JP 2003-172464 A JP 2008-138790 A JP 2013-167260 A

  However, these conventional pinch valves use elastic rubber or synthetic resin material as the pinch tube, and because of its flexibility, fixing to the valve body is extremely troublesome, and even when exchanging the pinch tube , Requiring extremely complex procedures. Further, even if the end of the pinch tube is fixed to a part of the valve body, there is a possibility that the fluid may flow out due to detachment during use.

  In addition, since the pinch tube is pressed by the valve body, elastic rubber or the like is used. However, these materials have a problem of poor corrosion resistance.

  An object of the present invention is to provide a pinch valve that solves the above-described problems and can be fixed to a valve body easily and reliably using a hard pinch tube.

  In order to achieve the above object, a pinch valve according to the present invention has a pinch tube having a deforming portion that is partially deformed to change the cross-sectional area, fixed to a valve body, and controls the flow rate of fluid by the displacement of the valve body. In the pinch valve, the pinch tube is made of a hard synthetic resin material, and a deformed portion at the center of the pinch tube located in the valve body is made thin with elasticity, and a hard non-deformed portion on both sides of the deformed portion is interposed therebetween. And fixed to the valve body, and the deforming portion is pressed and deformed by the valve body.

  According to the pinch valve of the present invention, the pinch tube is made of a hard material, but only the deformed portion at the center is formed to have elasticity, so the valve body of the pinch tube is formed by the hard non-deformed portion. Fixing to is easy and reliable.

  In addition, the pinch tube according to the present invention is free from the risk of liquid leakage due to the attachment portion being detached during use.

It is sectional drawing of the pinch valve of Example 1. FIG. It is sectional drawing of the pinch tube used for a pinch valve. It is sectional drawing of the operation state of a pinch valve. It is sectional drawing of the pinch valve | bulb of Example 2. FIG.

  The present invention will be described in detail based on the embodiments shown in the drawings.

  FIG. 1 is a cross-sectional view of the pinch valve of the first embodiment, and FIG. 2 is an enlarged cross-sectional view of the pinch tube.

  A pipe insertion hole 2 having a circular cross section in the horizontal direction is formed at the center of the valve body 1 made of synthetic resin or metal, and a valve drive hole 3 communicating with the pipe insertion hole 2 is formed at the upper center of the valve body 1. Is provided in the vertical direction, and a pinch base 4 is provided below the pipe insertion hole 2 facing the valve drive hole 3. A pinch tube 5 made of a synthetic resin material is inserted into the pipe insertion hole 2, and an electric drive unit 6 is disposed above the valve body 1.

  An electric motor 7 capable of rotating in the forward and reverse directions is provided in the electric drive unit 6. An electric shaft 8 projects downward from the electric motor 7, and an inner screw portion of the lifting body 9 rotates on a screw portion 8 a of the electric shaft 8. It is screwed freely. Shafts 10 are vertically arranged at two locations in the electric drive unit 6, and the shafts 10 are slidably inserted into both side portions of the lifting body 9, and the lower part is flattened below the lifting body 9. A valve body 11 made of a rod-shaped synthetic resin or metal is fixed downward, and can enter and exit the pipe insertion hole 2 through the valve drive hole 3.

  In addition, between the valve body 1 and the electric drive unit 6, the liquid is fixed to the valve body 11 or integrated with the valve body 11 so that liquid does not flow into the electric drive unit 6 side when water leaks from the pinch tube 5. For example, a diaphragm 12 made of synthetic resin is disposed.

  As shown in FIG. 2A, the pinch tube 5 is made of a hard tube having a length of 100 mm and having corrosion resistance such as PFA, and has an outer diameter of 6 mm and an inner diameter of 4 mm, for example. Then, in the central portion of the pinch tube 5, a portion indicated by dots from the outside over a length of about 30 mm is gradually cut, for example, until the thickness becomes 1 mm, for example, 0.3 mm, as shown in FIG. The deformable portion 5a is elastic and flexible and easily deformed. Therefore, the processed pinch tube 5 includes a central soft deformable portion 5a and other hard non-deformed portions.

  Furthermore, the both ends of the pinch tube 5 are enlarged diameter portions 5b that are enlarged by heating, for example, in order to connect piping. The diameter-expanded portion 5b may be expanded after being fixed to the valve body 1 of the pinch tube 5.

  The deformed portion 5a of the pinch tube 5 is disposed at a position on the pinch pedestal 4, and nuts 13 having an inner diameter substantially equal to the outer diameter of the pinch tube 5 are inserted on both sides of the deformed portion 5a. The pinch tube 5 is fixed to the valve body 1 by using a hard non-deformable portion by screwing the outer screw portion 13a with the inner screw portion 2a provided on both sides of the pipe insertion hole 2.

  Further, annular nuts 14 are respectively inserted inside the enlarged diameter portions 5 b at both ends of the pinch tube 5, the outer screw 15 a of the joint 15 is screwed into the inner screw 14 a of the nut 14, and the enlarged diameter portion 5 b is connected to the nut 14. The joint 15 and the pinch tube 5 are connected. Further, these nuts 13 and 14, the joint 15, etc. can use PFA having high corrosion resistance.

  Further, a nut 16 is provided at the other end of the joint 15, and a pipe (not shown) for flowing a fluid through the nut 16 can be connected.

  When the flow rate of the fluid is controlled by driving the pinch valve, the motor 7 is moved forward and backward to move the lifting body 9 up and down via the electric shaft 8. The elevating body 9 converts the rotation of the electric shaft 8 into a vertical displacement by a screw mechanism by the screw portion 8a. At this time, since the lifting body 9 is held at two places by the shaft 10, it can move up and down in a stable posture.

  When the electric motor 7 is rotated forward, for example, as shown in FIG. 3, the valve body 11 is lowered as the elevating body 9 is lowered, and the pinch tube 5 is pressed between the pinch base 4. The deformed portion 5a of the pinch tube 5 is crushed by the valve body 11, and the cross-sectional area of the inner diameter of the deformed portion 5a is reduced, whereby the flow rate of the fluid flowing through the pinch tube 5 is reduced.

  Further, if the electric motor 7 is reversed, the valve body 11 rises and the pressing force of the pinch tube 5 decreases with the displacement of the valve body 11, so that the deformation portion 5 a having elasticity due to the pressure of the flow rate in the pinch tube 5. The shape is restored and the flow rate is increased.

  If a flow rate sensor such as an ultrasonic flow meter is arranged upstream or downstream of the pinch tube 5 to detect the flow rate of the fluid, a deviation from the set flow rate value is fed back to the vertical movement of the valve body 11 by the motor 7 by the control mechanism. The flow rate of the fluid can be accurately controlled by the pinch valve.

  When exchanging the pinch tube 5, it can be easily removed by removing the nut 13 and cutting the pinch tube 5. Moreover, what is necessary is just to assemble in the procedure demonstrated previously also when attaching the new pinch tube 5. FIG.

  FIG. 4 is a cross-sectional view of the pinch valve according to the second embodiment in which the driving source is air, and the same reference numerals as those in FIG. 1 denote the same members.

  Above the valve body 1, a pneumatic drive unit 21 having a cylinder mechanism is disposed. The housing of the pneumatic drive unit 21 also serves as the cylinder body 22 of the cylinder mechanism.

  The piston 23 having the valve element 11 fixed downward as a piston shaft is in a disk shape with an O-ring 24 mounted on the outer peripheral side surface, and is housed in the cylinder body 22 so as to be vertically movable and sealed. Above the piston 23 is a pressure chamber 25, and a nut 26 is screwed into the upper portion of the pressure chamber 25, and a supply / exhaust hole 27 is provided in the nut 26.

  The pinch tube 5 is inserted into the pipe insertion hole 2 of the valve body 1 and the fluid flow rate is controlled by pressing the pinch tube 5 with the valve body 11 as in the first embodiment.

  When compressed air is supplied from the air supply / exhaust hole 27 into the pressure chamber 25, the piston 23 is pushed downward by the air pressure, and the O-ring 24 on the outer peripheral side is lowered while sliding on the inner periphery of the cylinder body 22. By this descending, the valve body 11 presses the deforming portion 5a of the pinch tube 5 and changes the cross-sectional area of the deforming portion 5a. Further, when the supply of air from the air supply / exhaust hole 27 to the pressure chamber 25 is stopped and the pressure chamber 25 is depressurized, the piston 23 rises and the valve body 11 also rises, so the shape of the deformed deformed portion 5a Will restore.

  In the first and second embodiments, the deformed portion 5a of the pinch tube 5 is thinned by cutting. However, a pinch tube including the deformed portion 5a that is thin and elastic can be manufactured by molding.

  In the first and second embodiments, the deformable portion 5a is provided uniformly in the circumferential direction. However, only the side pressed by the valve body 11 may be a thin deformed portion.

  In this embodiment, the pinch tube 5 having the deformed portion 5a is manufactured by an integrally molded product, and since it is not a composite body, there is no seam and the configuration is simple.

DESCRIPTION OF SYMBOLS 1 Valve body 2 Pipe insertion hole 5 Pinch tube 5a Deformation part 5b Diameter expansion part 6 Electric drive part 7 Electric motor 9 Lifting body 11 Valve body 13 Nut 21 Pneumatic drive part 22 Cylinder body 23 Piston 25 Pressure chamber 27 Supply / exhaust hole

In order to achieve the above object, a pinch valve according to the present invention has a pinch tube having a deforming portion that is partially deformed to change the cross-sectional area, fixed to a valve body, and controls the flow rate of fluid by the displacement of the valve body. In the pinch valve, the pinch tube is made of a hard synthetic resin material in which the deformed portion at the center is thin with elasticity, and both sides of the deformed portion are hard non-deformed portions, The pinch tube is inserted into the valve body so that the deformed portion is positioned in the valve body, annular nuts are inserted into the non-deformed portions on both sides, and these nuts are screwed into the valve body to It fixes to the said valve main body, The said deformation | transformation part is pressed and deform | transformed with the said valve body, It is characterized by the above-mentioned.

Claims (6)

In a pinch valve that fixes a pinch tube having a deformed portion that deforms a part and changes a cross-sectional area to a valve body, and controls the flow rate of fluid by displacement of the valve body,
The pinch tube is made of a hard synthetic resin material, and a deformed portion at the center of the pinch tube located in the valve body is thin with elasticity, and the valve body is inserted through hard non-deformed portions on both sides of the deformed portion. A pinch valve characterized in that the pinch valve is deformed by pressing the deforming portion with the valve body.   The pinch valve according to claim 1, wherein the deformed portion is thinned by cutting the outside of the pinch tube.   The pinch tube is fixed to the valve body by inserting an annular nut through the non-deformed portion of the pinch tube and screwing the nut into the valve body. The pinch valve described in 1.   The pinch valve according to any one of claims 1 to 3, wherein piping for circulating the fluid is connected to both ends of the pinch tube.   The pinch valve according to any one of claims 1 to 4, wherein the pinch tube is made of a corrosion-resistant fluororesin material.   The pinch valve according to any one of claims 1 to 5, wherein a drive unit that drives the valve body is provided on the valve body.

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