JPWO2016194826A1 - Method for manufacturing fluid control device, fluid control device, and joint protector - Google Patents

Abstract

  Provided are a method for efficiently producing a fluid control device (10), a joint protector (20, 30) and a fluid control device (10) used at that time. The joint protectors (20, 30) are detachably attached to the joint sleeve (13) welded to the body (12) in a state where the joint sleeve (13) is inserted into the through hole of the nut. . The body part (22) of the joint protector (20, 30) has an inner circumference larger than the outer diameter of the joint sleeve (13) so as to have a clearance from the outer peripheral surface (13B) around the axis of the joint sleeve (13). It has a surface (21), and the main body (22) includes a slit (24) for attaching to and detaching from the joint sleeve (13). By mounting the joint protector (20) on the joint sleeve (13), movement of the nut in the axial direction is suppressed, and the seal portion is protected from protruding from the nut. The body (12) can be cleaned with the joint protectors (20, 30) attached.

Description

  The present invention relates to a method for manufacturing a fluid control device, a fluid control device, and a joint protector used therefor.

  In a system for manufacturing a thin film such as a semiconductor film, an insulating film, or a conductive film, a gas is supplied to a process chamber. The gas supply system is configured by connecting various fluid control devices such as on-off valves by piping. A joint is used for connection between the fluid control devices or between the fluid control device and the pipe.

  FIG. 10 is a diagram showing a part of a conventional fluid control device. The fluid control device 1 is configured by welding the base end portion of the joint sleeve 3 to both side surfaces of the body 2 on which the drive unit (not shown) is mounted in a state where the joint sleeve 3 is inserted into the through hole 4A of the nut 4. Has been. A bearing 5 is formed between the back surface of the seal portion 3A at the tip of the joint sleeve 3 and the nut 4 so that the nut 4 is easy to rotate. When the fluid control device 1 is shipped, in order to restrict the movement of the nut 4, and in particular to prevent the nut 4 from moving to the body 2 side and the seal portion 3 </ b> A from protruding, cut into the cylindrical member 6 </ b> A made of resin. 6B is inserted into a stopper 6, and the stopper 6 is attached to the joint sleeve 3. In this way, the seal portion 3A is protected from being accidentally projected and damaged during movement.

  By the way, in a push-type dispenser, for example, it is considered that a stopper is elastically mounted as a means for restricting the movement of a vertically moving piston linked to the nozzle head or adjusting the moving range ( Patent Documents 1 to 3).

JP 2002-273277 A JP 2004-203456 A JP 2012-153409 A

  In the above-described fluid control device, the stopper for restricting the movement of the nut is made by cutting a resin cylindrical member, so that the cylindrical shape is held by the restoring force of the cylindrical member. For this reason, the stopper is attached elastically in close contact with the joint sleeve, and the cylindrical member is thin and difficult to grasp, so it takes time to remove the stopper. In addition, when the fluid control device is assembled in a clean room with a high degree of cleanliness, the operator is wearing gloves and working, so it is difficult for the operator to attach and detach such a stopper. In particular, by cutting into the cylindrical member, the cut portion of the cylindrical end tends to be sharp, and the difficulty of attaching and detaching the stopper increases.

  Therefore, in view of the above problems, the present invention has an object to provide a method for manufacturing a fluid control device in which the number of times of attaching and detaching a member such as a stopper from the joint sleeve is reduced when the fluid control device is manufactured. . An object of the present invention is to provide a joint protector used in the manufacturing method and to provide a fluid control device to which the joint protector is attached. Another object of the present invention is to provide a joint protector that can be easily attached to and detached from the joint sleeve.

In order to achieve the above and other related purposes, the present invention provides:
The nut is moved by moving the nut in the direction away from the body along the axis of the joint sleeve by inserting the joint sleeve into the through hole of the nut and welding the joint sleeve to the body for the fluid control device main body. Accommodates the seal portion of the joint sleeve and causes the seal portion to protrude from the nut by movement of the nut in a direction approaching the body along the axis of the joint sleeve,
A main body having an inner peripheral surface larger in diameter than the outer diameter of the joint sleeve so as to have a gap with an outer peripheral surface around the shaft of the joint sleeve, and a slit for mounting the main body on the joint sleeve; The joint sleeve is welded in a state in which the seal portion is protected by attaching the protective device for the joint to the joint sleeve so that the movement of the nut is suppressed and the seal portion does not protrude from the nut. This is realized by a method for manufacturing a fluid control device that cleans the body.

  The present invention provides a joint sleeve welded to a body in a state of being inserted through a through hole of the nut, wherein the nut moves along a shaft of the joint sleeve in a direction away from the body, so that the nut The seal portion of the sleeve is accommodated, and the nut can be attached to and detached from the joint sleeve in a state in which the seal portion protrudes from the nut as the nut moves along the axis of the joint sleeve toward the body. Providing protective equipment for joints. The joint protector includes a main body having an inner peripheral surface larger in diameter than an outer diameter of the joint sleeve so as to have a gap with an outer peripheral surface around the axis of the joint sleeve, and the main body is attached to and detached from the joint sleeve. A slit is provided. When the joint protector is attached to the joint sleeve, the movement of the nut is suppressed, and the seal portion is protected so that the seal portion of the joint sleeve does not protrude from the nut.

A knob is provided on the opposite side of the slit across the center of the main body.
The knob is preferably provided so as to protrude, and the protruding length is set to a length that does not protrude from the body when the joint protector is mounted on the joint sleeve. The diameter of the inner peripheral surface of the main body is preferably 1.1 to 1.3 times the outer diameter of the joint sleeve.
Preferably, the main body portion is configured by a cylindrical portion having the inner peripheral surface, and a pair of guide portions for mounting on the joint sleeve is provided at an end portion forming the slit in the cylindrical portion. . The guide portion is set to be thicker than the wall thickness of the cylindrical portion. The guide portion has a surface facing the slit, and the planes of the pair of guide portions are widened at an angle of 70 degrees to 100 degrees. The width of the slit is set to 0.5 to 0.6 times the outer diameter of the joint sleeve.

  In the joint protector, preferably, the main body portion is notched from the slit side at an intermediate portion in the movement direction of the nut, and has the slits separated on both sides in the movement direction of the nut. ing. An engaging portion for connection may be provided on the opposing side surfaces of the plurality of pieces divided in the moving direction of the nut, and the plurality of pieces may be connected by engaging the engaging portion. .

  Further, the fluid control device of the present invention is configured such that the joint sleeve is inserted into the through hole of the nut, the joint sleeve is connected to the body, and the drive unit is mounted on the body, and the nut is a shaft of the joint sleeve. The nut accommodates the seal part of the joint sleeve by moving in a direction away from the body along the axis, and the seal part by moving the nut in a direction approaching the body along the axis of the joint sleeve. The fluid control device main body protrudes from the joint sleeve, and the joint protector comprising any one of the above-described joints attached to the joint sleeve.

  According to the present invention, since the joint protector is mounted with a gap around the shaft of the joint sleeve, the joint protector can be cleaned while being mounted on the joint sleeve, It becomes easy to remove dirt between the inner peripheral surface of the main body. Further, by mounting the joint protector on the joint sleeve, the movement of the nut is suppressed, and the seal portion of the joint sleeve is protected so that the seal portion of the joint sleeve does not protrude from the nut. In particular, in the case where the inner peripheral surface of the body part of the joint protector has a clearance from the outer peripheral surface around the axis of the joint sleeve and the outer peripheral surface of the main body part is provided with a knob, This facilitates attachment / detachment to / from the joint sleeve. Therefore, it can be easily attached to and detached from the joint sleeve, and the seal portion of the joint sleeve can be protected.

It is a perspective view which shows the fluid control apparatus which concerns on embodiment of this invention. It is a perspective view which shows the protector for couplings which concerns on 1st Embodiment of this invention. FIG. 3 is a cross-sectional view of the joint protector shown in FIG. 2. It is a perspective view which shows the protector for couplings which concerns on 2nd Embodiment of this invention. FIG. 5 is a side view of the joint protector shown in FIG. 4. The joint protector which concerns on 3rd Embodiment of this invention is shown, (a) And (b) is a perspective view which shows each piece which comprises the protector for joints, (c) is a perspective view of the protector for joints. is there. FIG. 7 is a side view of the joint protector shown in FIG. 6. It is a flowchart about the method of manufacturing the fluid control apparatus which concerns on embodiment of this invention. It is a figure which shows the state with which the protector for joints which concerns on embodiment of this invention is mounted | worn with the joint sleeve. It is a figure which shows a part of conventional fluid control apparatus.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[Fluid control device body to which fitting protective equipment is attached]
FIG. 1 is a perspective view showing a fluid control device 10 according to an embodiment of the present invention. The fluid control device 10 is configured by attaching a joint protector 20 to the fluid control device main body 11. The fluid control device main body 11 includes a body 12 having a flow path therein, a joint sleeve 13 welded to a side surface of the body 12 and connected to a base end portion, and a nut 14 attached to the joint sleeve 13. . The body 12 serves as a pedestal for a fluid operation actuator or other drive unit for opening and closing a valve body for controlling internal fluid, for example.

  The joint sleeve 13 is formed with a flow path through which fluid flows in the axial direction. The joint sleeve 13 has a seal portion 13A at the tip, and the base end side (the end portion side welded to the body 12) from the seal portion 13A. ), The diameter gradually decreases and becomes, for example, a large diameter, a medium diameter, and a small diameter. The nut 14 accommodates the seal portion 13A of the joint sleeve 13, thereby protecting the seal portion 13A from scratches and the like. The nut 14 is fastened to a counterpart coupling (not shown), and the coupling tip portion and the seal portion 13A of the joint sleeve 13 sandwich the gasket (not shown), and the fluid supply system is Parts. In order to facilitate the construction of the fluid supply system, the nut 14 is mounted by attaching the bearing 15 to a portion (which may be referred to as a flange portion) whose outer diameter gradually decreases in the back portion of the seal portion 13A of the joint sleeve 13. May be easy to rotate. The nut 14 is formed in a cylindrical shape having through holes that are open at both ends, and the end of the nut 14 on the body 12 side is a small diameter through hole that engages with a flange that protrudes around the axis of the joint sleeve 13. This is hereinafter referred to as a bag-shaped nut.

  In a state where the joint sleeve 13 is inserted into the through hole 14A of the nut 14, the base end portion of the joint sleeve 13 is welded to the body 12, and the small diameter through hole 14A of the nut 14 is connected to the intermediate portion of the joint sleeve 13 and the body 12. Since it is larger than the small-diameter portion on the base end side, the nut 14 is movable in the axial direction of the joint sleeve 13. That is, the nut 14 accommodates the seal portion 13 </ b> A of the joint sleeve 13 by the movement of the nut 14 in the direction away from the body 12 along the axis of the joint sleeve 13. Further, the movement of the nut 14 in the direction approaching the body 12 along the axis of the joint sleeve 13 exposes and protrudes from the nut 14. Here, the body 12 in the fluid control device main body is also referred to as a fluid control device main body.

[Fitting protective gear]
As shown in FIG. 1, the joint protector 20 according to the first embodiment of the present invention is a joint sleeve welded to the body 12 in a state where the joint sleeve 13 is inserted into the through hole 14 </ b> A of the bag-like nut 14. 13 is attached. FIG. 2 is a perspective view showing the joint protector 20 according to the first embodiment of the present invention, and FIG. 3 is a sectional view thereof.

  The joint protector 20 includes a main body portion 22 having an inner peripheral surface 21 larger in diameter than the outer diameter of the joint sleeve 13 so as to have a gap with the outer peripheral surface 13B around the shaft of the joint sleeve 13. A slit 24 for attaching to and detaching from the sleeve 13 is provided. In the form shown in FIG. 1, the knob 23 is formed so as to protrude from the outer peripheral surface of the main body 22, and is provided so as to protrude on the opposite side (opposite side) to the slit 24 with respect to the center of the main body 22. ing.

  By attaching the joint protector 20 to the joint sleeve 13, the nut 14 is prevented from moving in the axial direction of the joint sleeve 13. That is, the distance between the back surface 14B of the nut 14 and the seal portion 13A of the joint sleeve 13 is restricted to a certain range, and the distance between the back surface 14B of the nut 14 and the side surface 12B of the body 12 is restricted to a certain range. Therefore, the seal portion 13A is protected so that the seal portion 13A of the joint sleeve 13 does not protrude from the nut 14.

  Next, a specific form of the joint protector 20 will be further described with reference to FIGS. 2 and 3. The body portion 22 of the joint protector 20 is composed of a cylindrical portion 25 having an inner peripheral surface 21, and an end portion 25 </ b> A that forms the slit 24 in the tubular portion 25 is attached to the joint sleeve 13. A guide portion 25B is provided. The guide portion 25B has a thickness greater than the thickness of the portion other than the end portion 25A of the cylindrical portion 25. The pair of guide portions 25B expands outward from the slit 24, and the guide portions 25B are formed in a planar shape in that direction. Therefore, the flat surface of the guide portion 25B functions as a guide when the joint sleeve 13 is attached to the joint sleeve 13 and can be easily inserted. The thickness of the portion forming the plane is thicker than the thickness of the portion other than the end portion 25 </ b> A of the cylindrical portion 25. Moreover, workability | operativity improves by giving the guide part 25B roundness on the opposite side to the direction which mutually faces.

  The knob 23 of the joint protector 20 is provided so as to protrude on the opposite side of the slit 24 across the center of the main body 22. The knob portion 23 has a round shape such as a substantially spherical shape and a substantially elliptical spherical shape. The section of the knob 23 may be a polygon such as a triangle or a square, but it is preferable that there is no acute angle so that particles do not accumulate. The length (H shown in FIG. 9) that the knob 23 protrudes from the outer peripheral surface of the main body 22, that is, the joint protector 20 and the joint sleeve 13 when the joint protector 20 is attached to the joint sleeve 13. The length H from the contact site to the tip of the knob 23 is set so as not to protrude from the body 12 shown in FIG. 9 when the joint protector 20 is attached to the joint sleeve 13. For example, it is set so as not to protrude downward from the bottom surface 12 </ b> C of the body 12. This is because when the body 12 having the joint protector 20 mounted on the joint sleeve 13 is placed on a work table or the like, the knob 23 and the work table or the like interfere with each other to prevent deterioration of workability.

  As shown in the sectional view of FIG. 3, the main body portion 22 of the joint protector 20 has an inner peripheral surface 21 having a diameter (large diameter) D longer than the outer diameter d of the joint sleeve 13. When the cross section of the inner peripheral surface 21 is not a circular shape but an elliptical shape, it is approximated by a circular shape having an area equivalent to the area surrounded by the inner peripheral surface 21, and the diameter of the approximated circle is the joint sleeve. It may be larger than the outer diameter d of 13. When the inner peripheral surface 21 of the main body 22 is in close contact with the joint sleeve 13, the outer surface of the joint sleeve 13 and the inner periphery of the joint sleeve 13 can be cleaned even after cleaning is performed after the joint sleeve 13 is welded to the body 12. Residue may remain between the surface 21 and the surface 21. On the other hand, if the inner peripheral surface 21 is too large, the joint sleeve 13 may be detached. For this reason, the equivalent cross-sectional diameter D of the hollow section of the main body portion 22 is approximately 1.1 to 1.3 times the outer diameter d of the joint sleeve 13, particularly preferably 1.2 ± 0.05 times larger. It is good to have. The cross section of the inner peripheral surface 21 is not limited to a circular shape or an elliptical shape, and may be, for example, a square as long as it can be attached to and detached from the joint sleeve 13.

  As a material for the joint protector 20, Teflon (registered trademark) may be used like a conventional stopper, but an inexpensive resin such as polypropylene having chemical resistance and heat resistance can be used.

  As shown in the sectional view of FIG. 3, the main body portion 22 of the joint protector 20 includes a slit 24 for attaching to and detaching from the joint sleeve 13. If the slit 24 is wide, it is easy to be detached from the joint sleeve 13, while if the slit 24 is narrow, it is difficult to attach the joint sleeve 13. When the material of the joint protector 20 is the above-described material, the dimension W of the slit 24 is preferably 0.5 to 0.6 times the outer diameter d of the joint sleeve 13.

  As shown in the cross-sectional view of FIG. 3, the main body portion 22 of the joint protector 20 includes a guide portion 25 </ b> B so as to form a slit 24. The guide part 25B is thicker than the thickness of the substantially C-shaped ring part 22A excluding the guide part 25B of the main body part 22, that is, the cylindrical part 25. This is for facilitating mounting on the joint sleeve 13 by the guide portion 25B. A pair of guide portions 25B (a pair of guide portions) has a flat surface on the slit side, and the pair of flat surfaces form 70 to 100 degrees. This is because if the angle formed by the flat surfaces of the guide portion 25B is too large or too small, the fitting sleeve 13 cannot be easily mounted.

  FIG. 4 is a perspective view showing a joint protector 20 according to the second embodiment of the present invention, and FIG. 5 is a side view of the joint protector 20 shown in FIG. Parts that are the same as or correspond to the joint protector 20 shown in FIGS. 2 and 3 are given the same reference numerals. In the joint protector 20 according to the second embodiment, a groove 26 is provided by cutting out from the slit 24 side in the axially intermediate portion of the main body 22, and the slit 24 and the guide portion 25 </ b> B are separated on both sides in the axial direction. Yes. Here, the axial direction of the main body portion 22 is the same direction as the axial direction of the joint sleeve 13. In the joint protector 20 according to the second embodiment, unlike the first embodiment, the ratio of the inner peripheral surface 21 of the main body portion 22 covering the outer peripheral surface 13B of the joint sleeve 13, that is, the area ratio, is reduced. Therefore, it is easy to expose the outer peripheral surface 13B of 13 and the cleaning efficiency can be improved.

  Next, a joint protector according to a third embodiment of the present invention will be described. The joint sleeve 13 to which the joint protector 20 is attached has an axial length set according to the specifications of the fluid supply line. Therefore, in the joint protector 20 attached to the joint sleeve that is relatively long in the axial direction, one or more parts of the main body part 22, the knob part 23, and the guide part 25B are divided as pieces in the axial direction. Then, by providing the engaging portions on the opposing side surfaces of the pieces, the opposing side surfaces of the plurality of pieces can be engaged and integrated with each other. For example, the engaging portion may be formed by forming a concave portion and a convex portion on one and the other opposing side surfaces of the piece, and fitting and integrating them with the concave and convex portions so as to join each other. The concavo-convex part may be not only a concavo-convex shape but also a pin and a pin insertion hole. The length in the axial direction can be appropriately set, and the parts can be shared.

  FIG. 6 shows a joint protector according to a third embodiment of the present invention, in which (a) and (b) are perspective views showing each piece constituting the joint protector, and (c) is a joint protector. FIG. 7 is a side view of the joint protector shown in FIG. FIG. 6A and FIG. 6B show that the opposing surfaces of the pieces are in front of the paper surface. For example, as shown in FIGS. 6 and 7, the joint protector 30 according to the third embodiment of the present invention is configured by assembling a plurality of pieces 27 </ b> A and 27 </ b> B. The main body part 22, the knob part 23, and the guide part 25B are divided into a plurality of pieces 27A and 27B corresponding to the axial direction of the joint sleeve 13 to be mounted, and the joint protector 30 includes a plurality of pieces 27A. , 27B are assembled. A plurality of pieces 27A and pieces 27B are integrated by providing either an assembling convex portion 29A or a concave portion 29B on the opposing surface 28 of each piece 27A, 27B, and fitting the convex portion 29A into the concave portion 29B. The Also in the third embodiment, it is preferable to provide a groove to facilitate cleaning of the outer peripheral surface 13B of the joint sleeve 13 as in the second embodiment.

[Fluid control equipment]
As shown in FIG. 1, the fluid control apparatus 10 according to the present embodiment inserts a joint sleeve 13 into a through hole 14 </ b> A of a bag-like nut 14, welds the joint sleeve 13 to the body 12, and drives the body 12 to a drive unit. For example, a fluid control device main body 11 configured to include a fluid manipulation actuator 16 and a joint protector 20 attached to a joint sleeve 13 of the fluid control device main body 11 are provided. The protective device 20 is detachable from the joint sleeve 13 by an operator.

  Since the joint protector 20 is attached to the joint sleeve 13, the nut 14 is prevented from moving in the axial direction of the joint sleeve 13, and the nut 14 does not move to the body 12 side more than necessary. The seal portion 13 </ b> A of the sleeve 13 does not protrude from the nut 14. Therefore, the seal portion 13A of the joint sleeve 13 is protected from impacts and scratches. Examples of the fluid control device 10 include air and a manual on-off valve.

[Manufacturing method of fluid control device]
A method for manufacturing a fluid control device according to an embodiment of the present invention will be described. FIG. 8 is a flowchart showing a method for manufacturing a fluid control device according to an embodiment of the present invention.

  First, the joint sleeve 13 is welded and connected to the flow path in the body 12 at the welding location (STEP 1). At that time, the joint sleeve 13 is inserted into the through hole 14 </ b> A of the bag-like nut 14. In this state, the nut 14 moves in the direction away from the body 12 along the axis of the joint sleeve 13, so that the nut 14 accommodates the seal portion 13 </ b> A of the joint sleeve 13 and the body 12 along the axis of the joint sleeve 13. As the nut 14 moves in a direction approaching the seal portion 13A, the seal portion 13A is exposed from the nut 14 and protrudes.

  Next, the joint protectors 20 and 30 according to the embodiments of the present invention are attached to the joint sleeve 13 which is a work in progress in which the joint sleeve 13 is welded to the body 12. At the time of mounting, the operator picks the knob 23 and inserts it from the slit 24 using the guide 25B to mount the joint protectors 20 and 30 on the joint sleeve 13. In this state, the movement of the nut 14 is suppressed and the seal portion 13A does not protrude from the nut 14, so that the seal portion 13A is protected. Thereafter, a plurality of the bodies 12 to which the joint sleeves 13 are welded are transported to a cleaning place.

  After that, one or a plurality of work-in-process items are accommodated in a cleaning net in a cleaning place, if necessary, and then cleaned by ultrasonic waves or the like (STEP 2). As shown in FIG. 9, the knob 23 of the joint protector 20, 30 faces downward in the vertical direction due to the mass of the knob 23. Since the work-in-process is immersed in the cleaning liquid in such a state, the guide portion 25B of the main body portion 22 and the vicinity thereof are likely to remain in contact with the joint sleeve 13. However, the contact portion between the inner peripheral surface 21 of the joint protectors 20 and 30 and the joint sleeve 13 can be reduced as much as possible, and the entire outer peripheral surface 13B of the joint sleeve 13 can be cleaned by swinging during cleaning. Thereby, the residue adhering to the joint sleeve 13 can be removed. Further, when cleaning is performed while flowing the cleaning liquid, a force is applied to the knob 23 by the flow of the cleaning liquid while the knob 23 is caught on the joint sleeve 13, and the knob 23 rotates around the joint sleeve 13. . Therefore, the welded portion of the joint sleeve 13 and the body 12 and the periphery thereof, the outer peripheral surface of the joint sleeve 13 and the like can be more efficiently cleaned.

  FIG. 9 is a view showing a state in which the joint protectors 20 and 30 are attached to the joint sleeve 13. The outer peripheral surface 13 </ b> B of the joint sleeve 13 and the inner peripheral surface 21 of the joint protectors 20, 30 are in contact with each other only at a small portion as indicated by reference numeral 40. That is, a crescent-shaped gap is formed between the outer peripheral surface 13B of the joint sleeve 13 and the inner peripheral surface 21 of the joint protectors 20 and 30. Therefore, operations such as cleaning and drying are facilitated by this gap.

  Conventionally, the stopper is removed from the joint sleeve of the work in process transported to the cleaning place and cleaned, and when the cleaning is completed, the stopper is attached to the joint sleeve for transporting to the inspection place. In the embodiment of the present invention, since the joint protectors 20 and 30 are washed while being attached to the joint sleeve 13, the working efficiency is improved. Since the joint protectors 20 and 30 themselves are also cleaned at the time of cleaning, the cleanliness of the fluid control device is also improved.

  When cleaning is completed, the body with the joint sleeve in progress is transported to the inspection site. At the inspection place, the operator picks the knob 23 of the joint protectors 20, 30 and removes it from the joint sleeve 13, and inspects it according to specifications such as whether there are any scratches or dirt (STEP 3). The joint protectors 20 and 30 are attached to the joint sleeve 13 of the work in process that has passed the inspection in the same procedure as described above.

  Next, the body with the joint sleeve in progress is transported to a cleaning place in a super clean room having a high degree of cleanliness. Therefore, the worker cleans the body with the joint sleeve in progress (STEP 4) as in STEP 2, and then transports it to the assembly site through a predetermined process. At the assembly site, an assembly operation such as attaching the fluid operation actuator 16 determined by the specification to the body 12 is performed (STEP 5).

  Next, the Hoddy with the joint sleeve in progress is transported to an inspection place in the super clean room. Therefore, the operator removes the joint protectors 20 and 30, conducts a leak inspection gas into the flow paths of the joint sleeve 13 and the body 12, performs a leak inspection, and performs a final inspection (STEP 6). When performing the final inspection, the operator picks the knob portion 23 of the joint protector 20, 30 and removes it from the joint sleeve 13, and the final inspection is performed according to the inspection item. The joint protectors 20 and 30 are attached to the joint sleeve 13 of the work in progress that has passed the final inspection in the same procedure as described above.

  After that, the joint protectors 20 and 30 are attached to the joint sleeve 13 of the work in progress that has passed the final inspection in the same procedure as described above, and transported to the packaging work place in the super clean room.

  Finally, the work-in-process is accommodated in a vacuum pack at the packaging location and vacuum packaging is performed (STEP 7).

  As described above, in the manufacturing method according to the embodiment of the present invention, it is not necessary to remove the joint protectors 20 and 30 from the joint sleeve 13 before cleaning, and to attach the joint protector 13 to the joint sleeve 13 after the cleaning is completed. . By using the joint protectors 20 and 30 according to the embodiment of the present invention, various operations such as cleaning, carrying-in and carrying-out can be performed while the joint sleeve 13 is mounted, and the attachment / detachment to the joint sleeve 13 is possible. Therefore, the working efficiency is further improved.

  In addition, the procedure of the manufacturing method of the fluid control device can be changed as appropriate. For example, after welding the joint sleeve 13 to the body 12, it is inspected whether the standard is satisfied, and then the joint protector 20 is attached. It may be attached to the joint sleeve 13 and cleaned.

  The embodiments of the present invention are not limited to the illustrated aspects and the matters described above, and may be appropriately changed within the scope of the present invention. For example, depending on the length of the joint sleeve 13 and depending on the presence or absence of the bearing, the joint protectors 20 and 30 can be colored, so that it is possible to eliminate parts in the work.

10: Fluid control device 11: Fluid control device body 12: Body 13: Fitting sleeve 13A: Seal portion
13B: Outer peripheral surface 14: Nut 14A: Through hole 14B: Back surface 15: Bearing 16: Actuator for fluid operation 20, 30: Fitting protector 21: Inner peripheral surface 22: Main body 22A: Ring portion 23: Knob 24: Slit 25: Cylindrical part 25A: End 25B of the cylindrical part: Guide part 26: Groove 27A, 27B: Piece 28: Opposing surface 29A: Convex part 29B: Concave part

Claims (12)

The nut is moved by moving the nut in the direction away from the body along the axis of the joint sleeve by inserting the joint sleeve into the through hole of the nut and welding the joint sleeve to the body for the fluid control device main body. Accommodates the seal portion of the joint sleeve and causes the seal portion to protrude from the nut by movement of the nut in a direction approaching the body along the axis of the joint sleeve,
A main body having an inner peripheral surface larger in diameter than the outer diameter of the joint sleeve so as to have a gap with an outer peripheral surface around the shaft of the joint sleeve, and a slit for mounting the main body on the joint sleeve; The joint sleeve is welded in a state in which the seal portion is protected by attaching the protective device for the joint to the joint sleeve so that the movement of the nut is suppressed and the seal portion does not protrude from the nut. A method of manufacturing a fluid control device for cleaning a body that has been cleaned. A joint sleeve welded to the body in a state of being inserted into a through hole of the nut, wherein the nut moves along a shaft of the joint sleeve in a direction away from the body, so that the nut is a seal portion of the joint sleeve And a fitting protector that can be attached to and detached from the joint sleeve in a state in which the seal portion protrudes from the nut by moving the nut along the axis of the joint sleeve toward the body. And
The joint protector includes a main body having an inner peripheral surface having a diameter larger than an outer diameter of the joint sleeve so as to have a gap with an outer peripheral surface around the shaft of the joint sleeve, and the main body is attached to and detached from the joint sleeve. With a slit to
The joint protector is attached to the joint sleeve, thereby suppressing movement of the nut and protecting the seal portion so that the seal portion of the joint sleeve does not protrude from the nut. Ingredients.   The joint protector according to claim 2, further comprising a knob on a side opposite to the slit across the center of the main body.   The said knob | pick part is protruded and provided in the said main-body part, The protrusion length is set to the length which does not protrude from the said body, when the said protector for joints is mounted | worn with the said joint sleeve. Protective equipment for joints as described in 1.   The joint protector according to claim 2, wherein a diameter of an inner peripheral surface of the main body is 1.1 to 1.3 times an outer diameter of the joint sleeve. The main body portion is composed of a cylindrical portion having the inner peripheral surface,
The joint protector according to claim 2, wherein a pair of guide portions for mounting on the joint sleeve is provided at an end portion of the cylindrical portion that forms the slit.   The joint protector according to claim 6, wherein the guide portion is set to be thicker than a thickness of the cylindrical portion.   The joint protector according to claim 7, wherein the guide portion has a flat surface facing the slit, and the flat surfaces of the pair of guide portions expand at an angle of 70 degrees to 100 degrees. .   The joint protector according to claim 2, wherein a width of the slit is set to 0.5 to 0.6 times an outer diameter of the joint sleeve.   The joint protection according to claim 2, wherein the main body portion has an intermediate portion in the moving direction of the nut cut out from the slit side, and the slits are separated on both sides in the moving direction of the nut. Ingredients.   The engagement part for connection is provided in the side surface which a plurality of pieces divided into the movement direction of the nut oppose, and the plurality of pieces were connected by engaging the engagement part. Protective equipment for joints as described. The joint sleeve is inserted into the through hole of the nut and the joint sleeve is connected to the body, and the drive unit is mounted on the body. The nut moves along the axis of the joint sleeve in a direction away from the body. The nut accommodates the seal portion of the joint sleeve, and the nut moves toward the body along the axis of the joint sleeve; and the fluid control device main body from which the seal portion protrudes,
The joint protector according to any one of claims 2 to 11, which is attached to the joint sleeve;
With fluid control equipment.

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