CN107850254A - Manufacture method, fluid control devices and the joint guard member of fluid control devices - Google Patents
Manufacture method, fluid control devices and the joint guard member of fluid control devices Download PDFInfo
- Publication number
- CN107850254A CN107850254A CN201680031190.0A CN201680031190A CN107850254A CN 107850254 A CN107850254 A CN 107850254A CN 201680031190 A CN201680031190 A CN 201680031190A CN 107850254 A CN107850254 A CN 107850254A
- Authority
- CN
- China
- Prior art keywords
- swagelok
- nut
- guard member
- joint
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 230000002093 peripheral effect Effects 0.000 claims abstract description 44
- 238000007789 sealing Methods 0.000 claims abstract description 44
- 238000004140 cleaning Methods 0.000 claims description 15
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 description 12
- 238000003466 welding Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004323 axial length Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B2/00—Friction-grip releasable fastenings
- F16B2/20—Clips, i.e. with gripping action effected solely by the inherent resistance to deformation of the material of the fastening
- F16B2/22—Clips, i.e. with gripping action effected solely by the inherent resistance to deformation of the material of the fastening of resilient material, e.g. rubbery material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
- F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L57/00—Protection of pipes or objects of similar shape against external or internal damage or wear
Abstract
The present invention provides joint guard member (20,30) and fluid control devices (10) used in a kind of method for efficiently manufacturing fluid control devices (10), method.Joint is welded in the swagelok (13) of stem portion (12) in the state of being removably installed in the through hole that swagelok (13) inserts in nut with guard member (20,30).Joint has the diameter inner peripheral surface (21) bigger than the overall diameter of swagelok (13) with the main part (22) of guard member (20,30); so as to have gap between inner peripheral surface (21) and the outer peripheral face (13B) around axle of swagelok (13), main part (22) possesses the gap (24) for being loaded and unloaded relative to swagelok (13).By the way that joint is installed on into swagelok (13) with guard member (20), to suppress the movement of nut axially so that the sealing of swagelok 13 does not protrude from nut, so as to protect sealing.The state that can keep for joint being installed on stem portion (12) with guard member (20,30) is unchangeably cleaned.
Description
Technical field
The present invention relates to a kind of manufacture method of fluid control devices, fluid control devices and its joint protection used
Part.
Background technology
In the system of the films such as manufacture semiconductor film, dielectric film, conductive film, to process chamber supply gas.Gas supplies
It is and composition by pipe arrangement by the various fluid control devices connections such as switch valve to system.Between fluid control devices
Connection or the connection of fluid control devices and pipe arrangement use joint.
Figure 10 is the figure for the part for representing conventional fluid control devices.Fluid control devices 1 are configured in fitting sleeve
Trunk of the base end part of swagelok 3 with carrying drive division (not shown) in the state of pipe 3 is inserted in the through hole 4A of nut 4
Two sides welding in portion 2.Bearing 5 is provided between the sealing 3A on the top of swagelok 3 back side and nut 4, makes spiral shell
Mother 4 becomes prone to rotate.When fluid control devices 1 dispatch from the factory, in order to limit the movement of nut 4, especially for preventing nut 4
Make sealing 3A prominent to the movement of the side of stem portion 2, set grooving 6B to be limited as limiter 6 in the cylinder part 6A of resin-made
Position device 6 is installed on swagelok 3.So, protected so that sealing 3A is unlikely to unintentionally prominent and occurred in moving process
Damage.
However, in driving distributor (push type dispenser), interlocked as limitation and nozzle head upper and lower
The movement of mobile piston or the means for adjusting moving range, such as consider limiter installing (patent in a elastomeric manner
Document 1 to 3).
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2002-273277 publications
Patent document 2：Japanese Unexamined Patent Publication 2004-203456 publications
Patent document 3：Japanese Unexamined Patent Publication 2012-153409 publications
The content of the invention
In above-mentioned fluid control devices, the limiter for limiting nut movement is set in the cylinder part of resin-made
Grooving is put and manufactured, so to keep its drum by the recuperability of cylinder part.Therefore, because limiter is with bullet
The mode of property, which is touched, to be installed on swagelok and cylinder part and is thin-walled and is difficult to grip, so comparing when dismantling limiter
Trouble.In addition, in the higher toilet (clean room) of cleanliness factor (clean degree) during assembling fluid control devices,
Operator, which has gloves on, carries out operation, therefore the more difficult progress of the handling of such limiter for operator.Particularly, pass through
Cylinder part is cut, the cut-off parts of cylinder end easily become sharp keen, the difficulty increase of limiter handling.
Therefore, the present invention is to complete in view of the above problems, and its object is to provide a kind of system of fluid control devices
Method is made, it can reduce the number from part as joint sleeve pipe handling limiter when manufacturing fluid control devices.
Its purpose, which also resides in, provides a kind of joint guard member used in the manufacture method, and provides one kind and be provided with joint use
The fluid control devices of guard member.In addition, its purpose also resides in, offer is a kind of to be relatively easy to relative to the handling of swagelok
Joint guard member.
To achieve these goals and other association purposes, the present invention are real by the manufacture method of following fluid control devices
It is existing：
Fluid control devices main body is welded in by swagelok insert in the through hole of nut and by above-mentioned swagelok
Stem portion, it is consequently formed following states：By making axle of the above-mentioned nut along above-mentioned swagelok be directed away from above-mentioned master
The direction movement of cadre, above-mentioned nut house the sealing of above-mentioned swagelok, and by making above-mentioned nut be connect along above-mentioned
The axle of head casing tube moves towards close to the direction of above-mentioned stem portion, and above-mentioned sealing protrudes from above-mentioned nut,
By the way that joint is installed on into above-mentioned swagelok with guard member, to suppress the movement of above-mentioned nut so that above-mentioned close
Envelope portion is not prominent from above-mentioned nut and protects above-mentioned sealing, in such a state to being welded with the trunk of above-mentioned swagelok
Portion is cleaned, wherein, above-mentioned joint guard member possesses with the diameter inner peripheral surface bigger than the overall diameter of above-mentioned swagelok
Main part, there is gap between the outer peripheral face of axle with cause above-mentioned inner peripheral surface and above-mentioned swagelok, and above-mentioned
Main part possesses the gap for being installed to above-mentioned swagelok.
The present invention provides a kind of joint guard member, can be loaded and unloaded relative to swagelok, the swagelok is being inserted through
Stem portion is welded in the state of in the through hole of nut, the swagelok is in following states：By make above-mentioned nut along
The axle of above-mentioned swagelok is directed away from the direction movement of above-mentioned stem portion, and above-mentioned nut houses the sealing of above-mentioned swagelok
Portion, and by making axle of the above-mentioned nut along above-mentioned swagelok be moved towards the direction close to above-mentioned stem portion, it is above-mentioned close
Envelope portion protrudes from above-mentioned nut.Above-mentioned joint guard member possesses with the diameter inner circumferential bigger than the overall diameter of above-mentioned swagelok
The main part in face, there is gap, above-mentioned master between the outer peripheral face of axle with cause above-mentioned inner peripheral surface and above-mentioned swagelok
Body portion possesses the gap for being loaded and unloaded relative to above-mentioned swagelok.It is installed in by above-mentioned joint with guard member above-mentioned
Swagelok, to suppress the movement of above-mentioned nut so that the sealing of above-mentioned swagelok is not prominent from above-mentioned nut and protects
Above-mentioned sealing.
Clipping the center in aforementioned body portion and the side opposite with above-mentioned gap possesses handle portion.
It is preferred that above-mentioned handle portion is protrusively provided, its length protruded is set to be installed with guard member by above-mentioned joint
The length not protruded when above-mentioned swagelok from above-mentioned stem portion.It is preferred that a diameter of swagelok of the inner peripheral surface of main part
1.1 to 1.3 times of overall diameter.
It is preferred that aforementioned body portion includes the cylindrical portion with above-mentioned inner peripheral surface, the above-mentioned gap of formation in above-mentioned cylindrical portion
End set have a pair of the guide parts installed for stating swagelok upwards.Above-mentioned guide part is set to than above-mentioned cylinder
The wall thickness in shape portion is thicker.Above-mentioned guide part has the face opposite with above-mentioned gap, in a pair of above-mentioned guide parts above-mentioned plane that
Expanded between this with 70 degree to 100 degree of angle.The width in above-mentioned gap is set to the 0.5 of the overall diameter of above-mentioned swagelok
To 0.6 times.
In above-mentioned joint guard member, preferably aforementioned body portion in the pars intermedia of the moving direction of above-mentioned nut from above-mentioned
Gap side is cut open, and has above-mentioned gap in a manner of separating in the both sides of the moving direction of above-mentioned nut.Can also be above-mentioned
The holding section of connection is provided with the moving direction of nut by the opposite side of separated multiple components, makes above-mentioned holding section
Engage and above-mentioned multiple components are linked and formed.
In addition, the present invention provides a kind of fluid control devices, it possesses：Fluid control devices main body, it is by fitting sleeve
Pipe insert is connected with stem portion in the through hole of nut and by above-mentioned swagelok, drive division is equipped on above-mentioned stem portion and
Form, moved by making axle of the above-mentioned nut along above-mentioned swagelok be directed away from the direction of above-mentioned stem portion, above-mentioned spiral shell
Mother houses the sealing of above-mentioned swagelok, by making axle of the above-mentioned nut along above-mentioned swagelok towards close to above-mentioned trunk
The direction movement in portion, above-mentioned sealing protrude；And the joint guard member being made up of any of the above-described, it is installed in above-mentioned
Swagelok.
Invention effect
According to the present invention, it is mounted with gap because joint is separated with guard member around the axle of swagelok, so can
The state for keeping for joint being installed on swagelok with guard member is unchangeably cleaned, and becomes to easily remove the outer of swagelok
Dirt between side face and the inner peripheral surface of main part.In addition, by the way that joint is installed on into swagelok with guard member, to suppress spiral shell
Female movement so that the sealing of swagelok does not protrude from nut, so as to protect the sealing of swagelok.Particularly, exist
The inner peripheral surface of the main part of joint guard member and swagelok have gap and in main body between the outer peripheral face of axle
In the case that the outer peripheral face in portion possesses handle portion, the handling relative to swagelok are easily carried out using handle portion.Therefore, it is possible to
The handling relative to swagelok are easily carried out, and protect the sealing of swagelok.
Brief description of the drawings
Fig. 1 is the stereogram for representing the fluid control devices that embodiments of the present invention are related to.
Fig. 2 is the stereogram for representing the joint guard member that the first embodiment of the present invention is related to.
Fig. 3 is the sectional view of the joint guard member shown in Fig. 2.
Fig. 4 is the stereogram for representing the joint guard member that second embodiment of the present invention is related to.
Fig. 5 is the side view of the joint guard member shown in Fig. 4.
Fig. 6 represents the joint guard member that third embodiment of the present invention is related to, and (a) and (b) is to represent to form joint
With the stereogram of each component of guard member, (c) is the stereogram of joint guard member.
Fig. 7 is the side view of the joint guard member shown in Fig. 6.
Fig. 8 is the flow chart of the method for the manufacture fluid control devices being related on embodiments of the present invention.
Fig. 9 is to represent that joint that embodiments of the present invention are related to is installed in the state of swagelok with guard member
Figure.
Figure 10 is the figure for the part for representing conventional fluid control devices.
Description of reference numerals
10：Fluid control devices
11：Fluid control devices main body
12：Stem portion
13：Swagelok
13A：Sealing
13B：Outer peripheral face
14：Nut
14A：Through hole
14B：The back side
15：Bearing
16：Fluid grasps acting actuator
20、30：Joint guard member
21：Inner peripheral surface
22：Main part
22A：Ring part
23：Handle portion
24：Gap
25：Cylindrical portion
25A：The end of cylindrical portion
25B：Guide part
26：Groove
27A、27B：Component
28：Forward surface
29A：Convex portion
29B：Recess
Embodiment
Below, embodiments of the present invention are described in detail referring to the drawings.
(the fluid control devices main body for being provided with joint guard member)
Fig. 1 is the stereogram for representing the fluid control devices 10 that embodiments of the present invention are related to.Fluid control devices 10
It is configured to joint guard member 20 being installed on fluid control devices main body 11.Fluid control devices main body 11 possesses：Internally
The connected swagelok 13 of stem portion 12 with stream, the side for being welded in stem portion 12 and base end part and it is mounted
In the nut 14 of swagelok 13.Stem portion 12 turns into for example to for controlling the valve body of internal flow to carry out the stream of switch drive
The base of the drive divisions such as gymnastics acting actuator.
The stream that swagelok 13 internally axially flows formed with fluid, there is sealing 13A, diameter on top
Reduce with interim from sealing 13A to base end part side (the end side for being welded in stem portion 12), for example, as big footpath, in
Footpath, path.Nut 14 houses the sealing 13A of swagelok 13, thus protect sealing 13A injury-free etc..Nut 14 with
The connector (coupling) of contra is (not shown) to be linked, thus the sealing of the connector top ends and swagelok 13
13A clamps pad (not shown), forms a part for fluid feed system., can also for ease of constructing fluid feed system
In the back of sealing 13A of swagelok 13, interim part (the being referred to as flange part) installation axle reduced of external diameter
15 are held, thus makes nut 14 be easy to rotate.Nut 14 is configured to the tubular of the through hole with both ends open, the trunk of nut 14
The end of the side of portion 12 is made up of path through hole, so that the flange part gone out around aixs cylinder with swagelok 13 engages, below
It is referred to as bag-shaped nut.
In the state of in the through hole 14A that swagelok 13 inserts in nut 14, the base end part of swagelok 13 is welded
Stem portion 12 is connected to, due to pars intermedias of the path through hole 14A of nut 14 than swagelok 13 and the base end part side of stem portion 12
Minor diameter part it is big, so nut 14 being free to move axially along swagelok 13.That is, by making nut 14 along fitting sleeve
The axle of pipe 13 is directed away from the direction movement of stem portion 12, and nut 14 houses the sealing 13A of swagelok 13.Also, pass through
Axle of the nut 14 along swagelok 13 is moved towards the direction close to stem portion 12, sealing 13A expose from nut 14 and
It is prominent.Here, the stem portion 12 of fluid control devices main body is also referred to as to the stem portion of fluid control devices main body.
(joint guard member)
As shown in figure 1, the joint that the first embodiment of the present invention is related to is arranged on swagelok 13 with guard member 20, should
Swagelok 13 is welded in stem portion 12 in the state of swagelok 13 is inserted in the through hole 14A of bag-shaped nut 14.
Fig. 2 is the stereogram for representing the joint guard member 20 that the first embodiment of the present invention is related to, and Fig. 3 is its sectional view.
Joint guard member 20 possesses the main part 22 of the inner peripheral surface 21 for the overall diameter for being more than swagelok 13 with diameter,
To have gap between inner peripheral surface 21 and the outer peripheral face 13B around axle of swagelok 13, main part 22 possesses for phase
The gap 24 loaded and unloaded for swagelok 13.In the condition shown in figure 1, handle portion 23 is arranged to from the outer of main part 22
Side face is protrudedly formed, prominent in the side (opposite side) opposite with gap 24 of the center relative to main part 22.
Joint guard member 20 is installed in swagelok 13, thus suppresses nut 14 and is moved along the axial direction of swagelok 13
It is dynamic.That is, the distance between the back side 14B of nut 14 and sealing 13A of swagelok 13 is limited in certain limit
It is interior, and the distance between the back side 14B of nut 14 and side 12B of stem portion 12 is limited in certain limit.Therefore, make
The sealing 13A for obtaining swagelok 13 does not protrude from nut 14, so as to protect sealing 13A.
Then, reference picture 2 and the further butt joints of Fig. 3 are illustrated with the concrete mode of guard member 20.Joint is protected
The main part 22 of part 20 includes the cylindrical portion 25 with inner peripheral surface 21, and the end 25A in the formation gap 24 in cylindrical portion 25 is set
It is equipped with the guide part 25B for being installed to swagelok 13.Beyond guide part 25B has than the end 25A of cylindrical portion 25
Position the thick thickness of thickness.A pair of guide part 25B are expanded laterally from gap 24, and guide part 25B is formed in this direction
To be plane.Therefore, guide part 25B plane plays function as guiding piece when being installed to swagelok 13, becomes
Easily enter.The thickness at the position formed beyond the end 25A of the thickness ratio cylindrical portion 25 at the position of the plane is thick.In addition, lead
There is fillet in direction toward each other and opposite side to portion 25B, thus workability improves.
The handle portion 23 of joint guard member 20 be arranged to the center for clipping main part 22 and opposite with gap 24 one
Side protrudes.Handle portion 23 has approximately spherical, the substantially toroidal such as Elliptical spherical shape.The section of handle portion 23 can also be triangle
The polygons such as shape, quadrangle, but acute angle is preferably not present to cause particle not accumulate.Handle portion 23 is outside main part 22
The length (H shown in Fig. 9) of side face protrusion, protected when joint guard member 20 is installed on into swagelok 13 from joint
Length H of the contact site of part 20 and swagelok 13 untill the top of handle portion 23 is set to, and is protected by joint
Do not protruded when part 20 is installed on swagelok 13 from the stem portion 12 shown in Fig. 9.Such as it is set to not from the bottom of stem portion 12
12C downward sides in face protrude.This is to prevent from loading the stem portion 12 for being provided with joint guard member 20 in swagelok 13
Handle portion 23 disturbs with generations such as operation posts and workability is deteriorated when operation post etc..
As shown in fig. 3 in cross section, joint has diameter (big footpath) D than swagelok 13 with the main part 22 of guard member 20
Overall diameter d length inner peripheral surface 21.The section of inner peripheral surface 21 and it is non-circular but when oval shape, with it is interior
The circle of the area for the area equivalent that side face 21 is surrounded carrys out approximate, overall diameter of the approximate diameter of a circle than swagelok 13
D is big.If the inner peripheral surface 21 of main part 22 touches with swagelok 13, by joint in flow chart described later
Sleeve pipe 13 is welded in when stem portion 12 waits afterwards and cleaned, may also be residual between the outer surface of swagelok 13 and inner peripheral surface 21
Leave residue., whereas if inner peripheral surface 21 is excessive, then it may depart from swagelok 13.Therefore, the substantially section of main body 22
Hollow representative section diameter D has the overall diameter d of swagelok 13 1.1 to 1.3 times or so of size, particularly preferably has
1.2 ± 0.05 times of size.In addition, the section of inner peripheral surface 21 is not limited to circular, oval shape, such as can also be quadrangle,
As long as it can be loaded and unloaded relative to swagelok 13.
Material as joint with guard member 20, teflon (registration mark) can be used as conventional limiter,
Also the low-cost resins such as the polypropylene with resistance to chemical reagents, heat resistance can be used.
As shown in fig. 3 in cross section, the main part 22 of joint guard member 20 possesses for entering relative to swagelok 13
The gap 24 that luggage unloads.If gap 24 is larger, it is easy to depart from swagelok 13, on the other hand, if gap 24 is smaller,
It is difficult to be installed on swagelok 13.In the case where joint is above-mentioned material with the material of guard member 20, the preferred chi in gap 24
Very little W is 0.5 to 0.6 times of the overall diameter d of swagelok 13.
As shown in fig. 3 in cross section, the main part 22 of joint guard member 20 sets guiding in a manner of forming gap 24
Portion 25B.Guide part 25B is than the ring part 22A of the approximately C-shaped in addition to guide part 25B of main part 22, i.e. cylindrical portion 25
Thickness is thick.This is to be easily installed using guide part 25B in swagelok 13.Paired (a pair of the guiding of guide part 25B
Portion) in gap side in plane, paired plane forms 70 degree to 100 degree each other.This is because, if guide part 25B's is flat
The angle that face is formed each other is excessive or too small, then is not easy to be installed in swagelok 13.
Fig. 4 is the stereogram for representing the joint guard member 20 that second embodiment of the present invention is related to, and Fig. 5 is Fig. 4 institutes
The side view of the joint shown guard member 20.It is pair identical or corresponding position marks with guard member 20 with the joint shown in Fig. 2 and 3
Identical reference.In the joint that second embodiment is related to in guard member 20, main part 22 axial pars intermedia from
The lateral incision of gap 24 come set groove 26, gap 24 and guide part 25B axial direction both sides separate.Here, the axial direction of main part 22
It is the axial identical direction with swagelok 13.It is real with first in the joint that second embodiment is related to in guard member 20
Mode difference is applied, ratio, the i.e. area ratio that the inner peripheral surface 21 of main part 22 covers the outer peripheral face 13B of swagelok 13 reduces,
The outer peripheral face 13B of swagelok 13 is easily exposed, realize the high efficiency of cleaning.
Then, the joint that third embodiment of the present invention is related to is illustrated with guard member.Joint guarantor is installed
The swagelok 13 of guard 20 sets axial length according to specification of fluid supply line etc..Therefore, it is being installed in axial direction
The joint of upper long swagelok is with guard member 20, one or more in main part 22, handle portion 23, guide part 25B
Individual position is divided into component (piece) in the axial direction, and the mutual opposite side of component is provided with holding section, thus enabled that
The opposite side of multiple components engages with each other and integrated.Holding section is for example configured to one and another phase in component
To side form recess and convex portion, carried out in a manner of them is engaged with each other using jog chimeric and integrated.It is concavo-convex
Portion is not only the bumps or pin and part as pin insertion hole of shape.Can be with the axial length pair that suitably sets
Should, realize the generalization of part.
Fig. 6 represents the joint guard member that third embodiment of the present invention is related to, and (a) and (b) is to represent to form joint
With the stereogram of each component of guard member, (c) is the stereogram of joint guard member, and Fig. 7 is the joint guard member shown in Fig. 6
Side view.Fig. 6 (a) and Fig. 6 (b) show the face of component toward each other be located at paper with front side.Such as such as Fig. 6 and Fig. 7
Shown, the joint guard member 30 that third embodiment of the present invention is related to is formed by assembling multiple component 27A, 27B.It is main
Accordingly press multiple components in body portion 22, handle portion 23 and guide part 25B and the swagelok 13 as installation destination axial direction
27A, 27B are separated, and joint guard member 30 is formed by assembling multiple component 27A, 27B.In each component 27A, 27B phase
Some in convex portion 29A, the recess 29B of assembling is respectively arranged with to face 28, by the way that convex portion 29A is chimeric with recess 29B
And make multiple component 27A and component 27B integrations.In the third embodiment, also it is preferably provided with as second embodiment
Groove and the outer peripheral face 13B of swagelok 13 is easily cleaned.
(fluid control devices)
As shown in figure 1, fluid control devices 10 of the present embodiment possess：Fluid control devices main body 11, its structure
As being inserted swagelok 13 in the through hole 14A of bag-shaped nut 14 and swagelok 13 being welded in into stem portion 12, make
Fluid behaviour's acting actuator 16 is for example equipped on stem portion 12 for drive division；And it is installed in fluid control devices main body 11
Swagelok 13 joint guard member 20, joint is freely loaded and unloaded with guard member 20 from swagelok 13 by operator.
By the way that joint guard member 20 is installed on into swagelok 13, to suppress axial direction of the nut 14 along swagelok 13
It is mobile, due to nut 14 not to the side of stem portion 12 beyond movement as needed, so the sealing 13A of swagelok 13 is not from nut
14 protrude.Therefore, the sealing 13A of swagelok 13 is protected not to be hit or damage., can as fluid control devices 10
Enumerate switch valve pneumatically or manually etc..
(manufacture methods of fluid control devices)
The manufacture method for the fluid control devices being related to embodiments of the present invention illustrates.Fig. 8 is to represent this hair
The flow chart of the manufacture method for the fluid control devices that bright embodiment is related to.
First, the stream in welding place, with stem portion 12 is accordingly by welding come (the step of jointing sleeve pipe 13
1).Now, swagelok 13 is inserted through in the through hole 14A of bag-shaped nut 14.In this state, by making the edge of nut 14
The axle for swagelok 13 is directed away from the direction movement of stem portion 12, and nut 14 houses the sealing 13A of swagelok 13, led to
The axle that crossing makes nut 14 along swagelok 13 moves towards the direction close to stem portion 12, and sealing 13A exposes from nut 14
And protrude.
Then, the joint guard member 20,30 that the embodiments of the present invention are related to is installed on swagelok 13
It is welded in the swagelok 13 as unfinished work of stem portion 12.When mounted, operator pinches handle portion 23, while using leading
To portion 25B while joint guard member 20,30 is inserted from gap 24 and is installed on swagelok 13.In this state, spiral shell
The movement of mother 14 is suppressed, and sealing 13A does not protrude from nut 14, therefore protects sealing 13A.Then, it is welded with multiple
The stem portion 12 of swagelok 13 is transported to cleaning place.
Then, place is being cleaned, after such a or multiple unfinished works are housed in cleaning net as needed,
(step 2) is cleaned using ultrasonic wave etc..As shown in figure 9, due to the quality of handle portion 23, joint guard member 20,30
Handle portion 23 is towards on the downside of vertical.Because unfinished work is immersed in cleaning fluid in this state, so easily retainer body portion
22 guide part 25B and its state nearby contacted with swagelok 13 are constant.However, joint guard member is reduced as far as possible
20th, the contact portion of 30 inner peripheral surface 21 and swagelok 13, in cleaning can Tong Guo Oscillating move to clean swagelok 13
Whole outer peripheral face 13B.Thereby, it is possible to remove to be attached to the residue of swagelok 13.In addition, cleaning fluid is set to flow one on one side
While in the case of being cleaned, the state that holding handle portion 23 is connected in swagelok 13 is constant, passes through the flowing pair of cleaning fluid
The applying power of handle portion 23, handle portion 23 rotate around swagelok 13.Therefore, it is possible to more efficiently clean swagelok 13
Outer peripheral face of welding portion and its surrounding, swagelok 13 with stem portion 12 etc..
Fig. 9 is to represent that joint guard member 20,30 is installed in the figure of the state of swagelok 13.Outside swagelok 13
Side face 13B and the joint inner peripheral surface 21 of guard member 20,30 only little by little location contacts like that as shown by reference numeral 40.Also
It is to say, is produced between the inner peripheral surface 21 with guard member 20,30 of outer peripheral face 13B and joint of swagelok 13 between crescent shape
Gap.Therefore, it the operation such as can easily be cleaned using the gap or be dried.
In the past, unloaded lower retainer from the swagelok as unfinished work for being transported to cleaning place to be cleaned, clear
At the end of washing, limiter is installed on swagelok due to be transported to inspection Check places.In embodiments of the present invention, by
In keeping being cleaned the state that joint is installed on swagelok 13 with guard member 20,30, so operating efficiency improves.Clear
When washing, joint itself is also cleaned with guard member 20,30, so the cleanliness factor of fluid control devices also improves.
At the end of cleaning, the stem portion of unfinished belt lacing sleeve pipe is transported to inspection Check places.Then, in inspection Check fields
Institute, operator pinch the handle portion 23 of joint guard member 20,30, pull open and unload from swagelok 13, check as requested
There are (the steps 3) such as not damaged or dirt.According to step same as described above by joint guard member 20,30 be installed on inspection Check it is qualified
The swagelok 13 as unfinished work.
Then, the cleaning stem portion of unfinished belt lacing sleeve pipe being transported in the higher super toilet of cleanliness factor
Place.Here, operator is equally cleaned (step 4) with step 2 to the stem portion of unfinished belt lacing sleeve pipe, then,
By defined processing, assembling place is transported to.In assembling place, enter the fluid for being about to determine according to specification and grasp acting actuator
16 are installed on the grade assembling operation (step 5) of stem portion 12.
Then, the inspection Check places stem portion of unfinished belt lacing sleeve pipe being transported in super toilet.Here, make
Dealer unloads lower contact guard member 20,30, leakage inspection Check is flowed into gas in swagelok 13 and the stream of stem portion 12, enters
Row leakage inspection Check, and carry out final inspection Check (steps 6).When carrying out final inspection Check, operator pinches joint guard member 20,30
Handle portion 23, unloaded from swagelok 13, final inspection Check carried out according to inspection Check projects.It will be connect according to step same as described above
Head is installed on by the use of guard member 20,30 and finally examines the qualified swageloks 13 as unfinished work of Check.
Then, according to step same as described above using joint by the use of guard member 20,30 be installed on final inspection Check it is qualified as
The swagelok 13 of unfinished work, the package handling place being transported in super toilet.
Finally, packaging place, by unfinished work be housed in vacuum with wrap in (step 7) is vacuum-packed.
So, in the manufacture method that embodiments of the present invention are related to, it is not necessary to before cleaning by joint guard member
20th, 30 unloaded from swagelok 13 and swagelok 13 is installed on after cleaning terminates, operating efficiency improves.By using this
The joint that the embodiment of invention is related to guard member 20,30, the state that can keep being installed on swagelok 13 is unchangeably entered
Row cleaning, the various operations for the conveying moved into and taken out of, and the handling relative to swagelok 13 can be easily carried out, therefore
Operating efficiency further improves.
In addition, the step of manufacture method of fluid control devices, can suitably change, such as can also be by swagelok
13 are welded in after stem portion 12 and check whether and meet benchmark, then, joint guard member 20 are installed on into swagelok 13 and entered
Row cleaning.
Embodiments of the present invention are not limited to the mode of diagram, above-mentioned item, can also enter within the scope of the invention
The appropriate change of row.For example, there is bearing-free to be carried out come butt joint with guard member 20,30 according to the length of swagelok 13 and basis
Color, thus, it is possible on cancel job to the mispick of part.
Claims (12)
- A kind of 1. manufacture method of fluid control devices, it is characterised in that：Fluid control devices main body is welded in by swagelok insert in the through hole of nut and by the swagelok Stem portion, it is consequently formed following states：By making axle of the nut along the swagelok be directed away from the stem portion Direction movement, the nut houses the sealing of the swagelok, and by making the nut along the fitting sleeve The axle of pipe moves towards close to the direction of the stem portion, and the sealing protrudes from the nut,By the way that joint is installed on into the swagelok with guard member, to suppress the movement of the nut so that the sealing The sealing is not protected from nut protrusion, the stem portion for being welded with the swagelok is entered in such a state Row cleaning, wherein, the joint guard member possesses the master with the diameter inner peripheral surface bigger than the overall diameter of the swagelok Body portion, there is gap, and the main body between the outer peripheral face of axle with cause the inner peripheral surface and the swagelok Portion possesses the gap for being installed to the swagelok.
- A kind of 2. joint guard member, it is characterised in that：It can be loaded and unloaded relative to swagelok, the swagelok in the through hole for be inserted through nut in the state of be welded in Stem portion, the swagelok are in following states：By making axle of the nut along the swagelok be directed away from the master The direction movement of cadre, the nut house the sealing of the swagelok, and by making the nut be connect along described The axle of head casing tube moves towards close to the direction of the stem portion, and the sealing protrudes from the nut,The joint guard member possesses the main part with the diameter inner peripheral surface bigger than the overall diameter of the swagelok, so that The inner peripheral surface and the swagelok have gap around the outer peripheral face of axle between, the main part possesses is used for relatively In the gap that the swagelok is loaded and unloaded,The swagelok is installed in guard member by the joint, to suppress the movement of the nut so that described to connect The sealing of head casing tube is not prominent from the nut and protects the sealing.
- 3. joint guard member according to claim 2, it is characterised in that：Clipping the center of the main part and the side opposite with the gap possesses handle portion.
- 4. joint guard member according to claim 3, it is characterised in that：The handle portion is protrusively provided in the main part, and its length protruded is set to by the joint guard member It is installed on the length not protruded during the swagelok from the stem portion.
- 5. joint guard member according to claim 2, it is characterised in that：1.1 to 1.3 times of the overall diameter of a diameter of swagelok of the inner peripheral surface of the main part.
- 6. joint guard member according to claim 2, it is characterised in that：The main part includes the cylindrical portion with the inner peripheral surface,The end set in the formation gap in the cylindrical portion has for installed to the swagelok a pair Guide part.
- 7. joint guard member according to claim 6, it is characterised in that：The guide part is set to thicker than the wall thickness of the cylindrical portion.
- 8. joint guard member according to claim 7, it is characterised in that：The guide part has the plane opposite with the gap, with 70 between plane described in a pair of guide parts Spend to 100 degree of angle and expand.
- 9. joint guard member according to claim 2, it is characterised in that：The width in the gap is set to 0.5 to 0.6 times of the overall diameter of the swagelok.
- 10. joint guard member according to claim 2, it is characterised in that：The main part is cut open in the pars intermedia of the moving direction of the nut from the gap side, in the movement of the nut The both sides in direction have the gap in a manner of separating.
- 11. joint guard member according to claim 2, it is characterised in that：The holding section of connection is provided with by the opposite side of separated multiple components on the moving direction of the nut, is made The holding section engages and links the multiple component and form.
- 12. a kind of fluid control devices, it is characterised in that possess：Fluid control devices main body, its be by swagelok insert in the through hole of nut and by the swagelok and trunk Portion is connected, and drive division is equipped on into the stem portion and formed, by making axle court of the nut along the swagelok Moved to the direction away from the stem portion, the nut houses the sealing of the swagelok, by making the nut edge The axle for the swagelok moves towards close to the direction of the stem portion, and the sealing protrudes；AndJoint guard member any one of claim 2 to 11, it is installed in the swagelok.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015110950 | 2015-05-29 | ||
| JP2015-110950 | 2015-05-29 | ||
| PCT/JP2016/065756 WO2016194826A1 (en) | 2015-05-29 | 2016-05-27 | Method for producing fluid control device, fluid control device, and protective equipment for joint |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107850254A true CN107850254A (en) | 2018-03-27 |
| CN107850254B CN107850254B (en) | 2019-09-03 |
Family
ID=57442368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680031190.0A Expired - Fee Related CN107850254B (en) | 2015-05-29 | 2016-05-27 | Manufacturing method, fluid control devices and the connector guard member of fluid control devices |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6721913B2 (en) |
| KR (1) | KR102022440B1 (en) |
| CN (1) | CN107850254B (en) |
| TW (1) | TWI597448B (en) |
| WO (1) | WO2016194826A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022023375A (en) * | 2020-07-27 | 2022-02-08 | 扶桑産業株式会社 | Discharge amount adjusting tool and bottle container |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55106709U (en) * | 1979-01-22 | 1980-07-25 | ||
| JPS6028860Y2 (en) * | 1976-12-28 | 1985-09-02 | 臼井国際産業株式会社 | Long, small diameter connecting steel pipes with connecting heads such as flares, bridges, or sleeve joints. |
| CN103917816A (en) * | 2011-10-20 | 2014-07-09 | 东洋克斯株式会社 | Pipe joint |
| JP5571261B1 (en) * | 2014-01-15 | 2014-08-13 | 東京計装株式会社 | Pinch valve |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5571261A (en) * | 1993-08-06 | 1996-11-05 | River Medical, Inc | Liquid delivery device |
| JP3421871B2 (en) * | 1994-02-18 | 2003-06-30 | 株式会社フジキン | Joint member protection cap |
| JP3982971B2 (en) | 2000-02-24 | 2007-09-26 | 株式会社コガネイ | Air conditioning equipment |
| JP2002273277A (en) | 2001-03-15 | 2002-09-24 | Canyon Corp | Push type dispenser |
| JP2004203456A (en) | 2002-12-26 | 2004-07-22 | Daiwa Can Co Ltd | Stopper for preventing descent of nozzle of ejection pump |
| JP2005083579A (en) | 2003-09-05 | 2005-03-31 | Kiban Lee | Ts valve |
| JP5311795B2 (en) * | 2007-10-25 | 2013-10-09 | 旭有機材工業株式会社 | Pipe fitting |
| TWM356023U (en) * | 2008-10-06 | 2009-05-01 | Huan-Qi Zhang | Clip |
| JP2012153409A (en) | 2011-01-27 | 2012-08-16 | Seihachi Sakazume | Fixed quantity variable discharging container |
| JP5844593B2 (en) * | 2011-09-28 | 2016-01-20 | 株式会社ブリヂストン | Fitting protective cap |
| JP5898988B2 (en) | 2012-02-09 | 2016-04-06 | 株式会社ニフコ | clip |
| KR101407676B1 (en) | 2013-09-17 | 2014-06-13 | 주식회사 유니락 | Stop collar for pipe fitting device |
| TWM489925U (en) * | 2014-08-07 | 2014-11-11 | Button International Co Ltd | Rope locking buckle |
| TWM499504U (en) * | 2014-12-04 | 2015-04-21 | Tsung-Yuan Chen | Tube-body connector |
-
2016
- 2016-05-27 CN CN201680031190.0A patent/CN107850254B/en not_active Expired - Fee Related
- 2016-05-27 KR KR1020177037930A patent/KR102022440B1/en active IP Right Grant
- 2016-05-27 TW TW105116941A patent/TWI597448B/en active
- 2016-05-27 JP JP2017521907A patent/JP6721913B2/en active Active
- 2016-05-27 WO PCT/JP2016/065756 patent/WO2016194826A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6028860Y2 (en) * | 1976-12-28 | 1985-09-02 | 臼井国際産業株式会社 | Long, small diameter connecting steel pipes with connecting heads such as flares, bridges, or sleeve joints. |
| JPS55106709U (en) * | 1979-01-22 | 1980-07-25 | ||
| CN103917816A (en) * | 2011-10-20 | 2014-07-09 | 东洋克斯株式会社 | Pipe joint |
| JP5571261B1 (en) * | 2014-01-15 | 2014-08-13 | 東京計装株式会社 | Pinch valve |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016194826A1 (en) | 2016-12-08 |
| TW201704669A (en) | 2017-02-01 |
| TWI597448B (en) | 2017-09-01 |
| KR20180020180A (en) | 2018-02-27 |
| JP6721913B2 (en) | 2020-07-15 |
| KR102022440B1 (en) | 2019-09-18 |
| JPWO2016194826A1 (en) | 2018-08-30 |
| CN107850254B (en) | 2019-09-03 |
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Granted publication date: 20190903 |