JP5570883B2 - 超音波ホーン - Google Patents
超音波ホーン Download PDFInfo
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- JP5570883B2 JP5570883B2 JP2010138230A JP2010138230A JP5570883B2 JP 5570883 B2 JP5570883 B2 JP 5570883B2 JP 2010138230 A JP2010138230 A JP 2010138230A JP 2010138230 A JP2010138230 A JP 2010138230A JP 5570883 B2 JP5570883 B2 JP 5570883B2
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- ultrasonic
- horn
- diamond
- carbon
- ultrasonic horn
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 57
- 229910052799 carbon Inorganic materials 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 17
- 238000003466 welding Methods 0.000 claims description 15
- 239000011347 resin Substances 0.000 claims description 14
- 229920005989 resin Polymers 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 5
- 238000007751 thermal spraying Methods 0.000 claims description 5
- 230000001788 irregular Effects 0.000 claims description 2
- 239000000155 melt Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 21
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 230000008859 change Effects 0.000 description 8
- 229910003460 diamond Inorganic materials 0.000 description 8
- 239000010432 diamond Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 239000010419 fine particle Substances 0.000 description 8
- 229910002804 graphite Inorganic materials 0.000 description 8
- 239000010439 graphite Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 239000011651 chromium Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
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- 230000005540 biological transmission Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 238000007750 plasma spraying Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 238000000859 sublimation Methods 0.000 description 3
- 230000008022 sublimation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 3
- 241000251468 Actinopterygii Species 0.000 description 2
- 101001053992 Homo sapiens Deleted in lung and esophageal cancer protein 1 Proteins 0.000 description 2
- 101000966403 Homo sapiens Dynein light chain 1, cytoplasmic Proteins 0.000 description 2
- 101000908706 Homo sapiens Dynein light chain 2, cytoplasmic Proteins 0.000 description 2
- 101001106322 Homo sapiens Rho GTPase-activating protein 7 Proteins 0.000 description 2
- 101000647991 Homo sapiens StAR-related lipid transfer protein 13 Proteins 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 102100021446 Rho GTPase-activating protein 7 Human genes 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 102100025252 StAR-related lipid transfer protein 13 Human genes 0.000 description 2
- 229910000883 Ti6Al4V Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000013543 active substance Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 230000006355 external stress Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002609 medium Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000638 stimulation Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 101100533726 Homo sapiens SMR3B gene Proteins 0.000 description 1
- 101100204204 Homo sapiens STARD8 gene Proteins 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 102100026755 StAR-related lipid transfer protein 8 Human genes 0.000 description 1
- 102100025729 Submaxillary gland androgen-regulated protein 3B Human genes 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910021386 carbon form Inorganic materials 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
(1) ダイヤモンドライクカーボンは、ダイヤモンドの結合形態であるsp3結合をもつ微細粒子と、グラファイトの結合形態であるsp2結合をもった微細粒子により形成された非晶質であり、純粋なカーボンからなる物質である(一部水素を含むものもある)。このため、超音波が集中する起点となる結晶欠陥、不純物、結晶粒界、転位といったものが存在せず、超音波が分散され、超音波集中による超音波ホーンへのダメージを減少させる。
(2) ダイヤモンドライクカーボンが低い摩擦係数で且つ高硬度、高弾性ゆえ超音波ホーンと相手材との摺動による超音波ホーンへのダメージが少ない。
(3) ダイヤモンドライクカーボンは酸、アルカリ、溶剤といった化学的ポテンシャルに対し不活性であり、反応しづらく、また、高い電気的絶縁性を持ち、電気化学的にも安定であり、コロージョンによる超音波ホーンへのダメージを減少させる。
ダイヤモンドライクカーボンの硬度はISO14577−1に示された押し込み硬さの測定方法に準拠し、20GPa以上であることが必須条件であり、さらに、30GPa以上であることが望ましい。この範囲であれば、超音波集中によるホーン表面に窪みを形成することなく、長期に渡る連続稼動が可能となる。この実証結果は、発明を実施するための形態の項に示した。
超音波ホーンはTi、Al、及びその合金といった、超音波の伝達効率が良い材料によって作製される。これらの材料は活性な物質であり、大気中で表面に強固な酸化皮膜( 不動態化皮膜) を形成する。不動態化皮膜上には、ダイヤモンドライクカーボンを含めた気相コーティングの場合、良好な密着性が得られないことが多い。また、成膜と同一チャンバー中でArガスなどによる物理的なエッチングであるボンバーメントを長時間、高出力にて照射しても完全には不動態化皮膜を除去することは難しく、更に、超音波という微細であるが激しい振動を伴うこの過酷な環境化において、完全な密着性の確保は難しいものがあった。
2 ダイヤモンドライクカーボン
Claims (3)
- 縦方向の振動をもって被接合体である樹脂の界面を摩擦熱により融かして接合させる、樹脂溶着用の超音波ホーンにおいて、多結晶材料からなる超音波ホーン基材の表面をダイヤモンドライクカーボンからなる皮膜で覆うことにより非晶質化し、ホーン表面における不規則な超音波の集中を防止したことを特徴とする超音波ホーン。
- ダイヤモンドライクカーボンの硬度は20Gpa以上、厚みは0.5μm以上である請求項1記載の超音波ホーン。
- 超音波ホーン基材とダイヤモンドライクカーボンの間に、W、WC、SiC、Siから選択した少なくとも1つ以上の皮膜を、溶射により形成した請求項1または2記載の超音波ホーン。
Priority Applications (1)
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JP2010138230A JP5570883B2 (ja) | 2010-06-17 | 2010-06-17 | 超音波ホーン |
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JP2010138230A JP5570883B2 (ja) | 2010-06-17 | 2010-06-17 | 超音波ホーン |
Publications (2)
Publication Number | Publication Date |
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JP2012004871A JP2012004871A (ja) | 2012-01-05 |
JP5570883B2 true JP5570883B2 (ja) | 2014-08-13 |
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JP2010138230A Expired - Fee Related JP5570883B2 (ja) | 2010-06-17 | 2010-06-17 | 超音波ホーン |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105382941A (zh) * | 2014-08-21 | 2016-03-09 | 周振嘉 | 应用于超音波加工的工具单元 |
WO2016169800A1 (de) * | 2015-04-24 | 2016-10-27 | Weber Ultrasonics Gmbh | Vorrichtung und verfahren zum entgraten von bauteilen mittels ultraschall |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102935742A (zh) * | 2012-11-19 | 2013-02-20 | 江苏大学 | 一种耐高温铝液腐蚀的超声变幅杆及其制备方法 |
JP6415456B2 (ja) * | 2013-02-21 | 2018-10-31 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | 導入層のあるdlcコーティング |
CN105637675B (zh) * | 2013-10-03 | 2018-03-30 | 日产自动车株式会社 | 电气设备的分隔件接合装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63139727A (ja) * | 1986-12-02 | 1988-06-11 | Daicel Chem Ind Ltd | 超音波溶着用ホ−ン |
JP2623611B2 (ja) * | 1987-11-17 | 1997-06-25 | 株式会社ニコン | 硬質炭素膜被覆を施した金属基体 |
JP2001205452A (ja) * | 2000-01-24 | 2001-07-31 | Toshiba Corp | 超音波溶接装置、超音波溶接方法および密閉電池とその製造方法 |
JP2005218641A (ja) * | 2004-02-05 | 2005-08-18 | Honda Electronic Co Ltd | 超音波プローブ |
JP2005296737A (ja) * | 2004-04-07 | 2005-10-27 | Mikuni Corp | ビートプレート |
JP4502325B2 (ja) * | 2005-02-28 | 2010-07-14 | 財団法人電力中央研究所 | 超音波ホーン |
JP2007111636A (ja) * | 2005-10-20 | 2007-05-10 | Tamura Seisakusho Co Ltd | 振動子 |
JP2010029815A (ja) * | 2008-07-30 | 2010-02-12 | Hitachi Kokusai Denki Engineering:Kk | 超音波洗浄装置 |
-
2010
- 2010-06-17 JP JP2010138230A patent/JP5570883B2/ja not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105382941A (zh) * | 2014-08-21 | 2016-03-09 | 周振嘉 | 应用于超音波加工的工具单元 |
WO2016169800A1 (de) * | 2015-04-24 | 2016-10-27 | Weber Ultrasonics Gmbh | Vorrichtung und verfahren zum entgraten von bauteilen mittels ultraschall |
CN107666970A (zh) * | 2015-04-24 | 2018-02-06 | 韦伯超声波股份公司 | 用超声波去除构件毛刺的设备和方法 |
TWI669186B (zh) * | 2015-04-24 | 2019-08-21 | 德商韋伯超聲波股份有限公司 | 用超音波去除構件毛刺的裝置和方法 |
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JP2012004871A (ja) | 2012-01-05 |
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