JP5553360B2 - 流量調整装置 - Google Patents
流量調整装置 Download PDFInfo
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- JP5553360B2 JP5553360B2 JP2011173434A JP2011173434A JP5553360B2 JP 5553360 B2 JP5553360 B2 JP 5553360B2 JP 2011173434 A JP2011173434 A JP 2011173434A JP 2011173434 A JP2011173434 A JP 2011173434A JP 5553360 B2 JP5553360 B2 JP 5553360B2
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- 239000012530 fluid Substances 0.000 claims description 21
- 238000003825 pressing Methods 0.000 claims description 5
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- 230000008859 change Effects 0.000 claims description 2
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- 125000006850 spacer group Chemical group 0.000 description 9
- 230000007423 decrease Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 229920002379 silicone rubber Polymers 0.000 description 4
- 238000007599 discharging Methods 0.000 description 2
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- 230000009467 reduction Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011173434A JP5553360B2 (ja) | 2011-08-08 | 2011-08-08 | 流量調整装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011173434A JP5553360B2 (ja) | 2011-08-08 | 2011-08-08 | 流量調整装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013036396A JP2013036396A (ja) | 2013-02-21 |
| JP2013036396A5 JP2013036396A5 (enExample) | 2014-04-17 |
| JP5553360B2 true JP5553360B2 (ja) | 2014-07-16 |
Family
ID=47886228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011173434A Active JP5553360B2 (ja) | 2011-08-08 | 2011-08-08 | 流量調整装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5553360B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103244392B (zh) * | 2013-05-10 | 2015-08-19 | 北京京城压缩机有限公司 | 一种具有多缸盖的隔膜式压缩机集成缸体部件 |
| JP7449100B2 (ja) * | 2020-01-23 | 2024-03-13 | マブチモーターオーケン株式会社 | ダイヤフラムポンプ |
| KR102666311B1 (ko) * | 2022-04-05 | 2024-05-16 | 세메스 주식회사 | 펌프, 액 공급장치 및 기판처리장치 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10288160A (ja) * | 1997-04-16 | 1998-10-27 | Anest Iwata Corp | 復動式ダイヤフラムポンプの流量コントロールシステム |
| JP2004285883A (ja) * | 2003-03-20 | 2004-10-14 | Casio Comput Co Ltd | ポンプ装置 |
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2011
- 2011-08-08 JP JP2011173434A patent/JP5553360B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013036396A (ja) | 2013-02-21 |
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