JP5547894B2 - 可撓性ダイヤフラムを備える圧力センサ - Google Patents

可撓性ダイヤフラムを備える圧力センサ Download PDF

Info

Publication number
JP5547894B2
JP5547894B2 JP2008547276A JP2008547276A JP5547894B2 JP 5547894 B2 JP5547894 B2 JP 5547894B2 JP 2008547276 A JP2008547276 A JP 2008547276A JP 2008547276 A JP2008547276 A JP 2008547276A JP 5547894 B2 JP5547894 B2 JP 5547894B2
Authority
JP
Japan
Prior art keywords
flexible diaphragm
pressure
pressure sensor
sensor body
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008547276A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009520206A5 (enExample
JP2009520206A (ja
Inventor
シューマッハー，マーク
クロシンスキ，アンドリュー
Original Assignee
ローズマウント インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ローズマウント インコーポレイテッド filed Critical ローズマウント インコーポレイテッド
Publication of JP2009520206A publication Critical patent/JP2009520206A/ja
Publication of JP2009520206A5 publication Critical patent/JP2009520206A5/ja
Application granted granted Critical
Publication of JP5547894B2 publication Critical patent/JP5547894B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
JP2008547276A 2005-12-20 2006-12-07 可撓性ダイヤフラムを備える圧力センサ Expired - Fee Related JP5547894B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/312,062 US7415886B2 (en) 2005-12-20 2005-12-20 Pressure sensor with deflectable diaphragm
US11/312,062 2005-12-20
PCT/US2006/046742 WO2007075290A1 (en) 2005-12-20 2006-12-07 Pressure sensor with deflectable diaphragm

Publications (3)

Publication Number Publication Date
JP2009520206A JP2009520206A (ja) 2009-05-21
JP2009520206A5 JP2009520206A5 (enExample) 2009-12-10
JP5547894B2 true JP5547894B2 (ja) 2014-07-16

Family

ID=37847241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008547276A Expired - Fee Related JP5547894B2 (ja) 2005-12-20 2006-12-07 可撓性ダイヤフラムを備える圧力センサ

Country Status (5)

Country Link
US (1) US7415886B2 (enExample)
EP (1) EP1974195B1 (enExample)
JP (1) JP5547894B2 (enExample)
CN (1) CN101341385B (enExample)
WO (1) WO2007075290A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018523116A (ja) * 2015-06-30 2018-08-16 ローズマウント インコーポレイテッド 使い捨て容器のための高分子遠隔シールシステム

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005017853A1 (de) * 2005-04-18 2006-10-19 Siemens Ag Drucksensorvorrichtung
US8429978B2 (en) * 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US9316553B2 (en) * 2014-03-26 2016-04-19 Rosemount Inc. Span line pressure effect compensation for diaphragm pressure sensor
US10836990B2 (en) * 2016-12-23 2020-11-17 Cyberoptics Corporation Sensor interface for single-use containers
US10584309B2 (en) 2017-02-06 2020-03-10 Rosemount Inc. Pressure transducer for single-use containers
CN107101751A (zh) * 2017-02-28 2017-08-29 宝力马（苏州）传感技术有限公司 一种新型电容式压力传感器及其制备方法
US11046575B2 (en) * 2017-10-31 2021-06-29 Encite Llc Broad range micro pressure sensor
EP3769063B1 (en) 2018-05-17 2023-01-04 Rosemount Inc. Measuring element and measuring device comprising the same
CN108593187A (zh) * 2018-05-23 2018-09-28 金陵科技学院 陶瓷电容式压力传感器及提高压力检测精度的方法
US11371902B2 (en) 2019-12-27 2022-06-28 Rosemount Inc. Process venting feature for use in sensor applications with a process fluid barrier
US12436052B2 (en) 2023-01-12 2025-10-07 Rosemount Inc. Method for forming a pathway in a pressure sensor having a glass to metal seal

Family Cites Families (100)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2533339A (en) 1946-06-22 1950-12-12 Jabez Burns & Sons Inc Flammable vapor protection
US3012432A (en) 1957-09-23 1961-12-12 Richard H Moore Leak tester
GB1023042A (en) 1962-05-07 1966-03-16 Wayne Kerr Lab Ltd Improvements in or relating to pressure responsive apparatus
US3232712A (en) 1962-08-16 1966-02-01 Continental Lab Inc Gas detector and analyzer
US3374112A (en) 1964-03-05 1968-03-19 Yeda Res & Dev Method and apparatus for controlled deposition of a thin conductive layer
US3249833A (en) 1964-11-16 1966-05-03 Robert E Vosteen Capacitor transducer
US3557621A (en) 1969-07-07 1971-01-26 C G S Scient Corp Inc Variable capacitance detecting devices
GB1354025A (en) 1970-05-25 1974-06-05 Medicor Muevek Capacitive pressure transducer
US3924219A (en) 1971-12-22 1975-12-02 Minnesota Mining & Mfg Gas detection device
US3808480A (en) 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US4008619A (en) 1975-11-17 1977-02-22 Mks Instruments, Inc. Vacuum monitoring
US4177496A (en) 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4158217A (en) 1976-12-02 1979-06-12 Kaylico Corporation Capacitive pressure transducer with improved electrode
US4120206A (en) 1977-01-17 1978-10-17 Rosemount Inc. Differential pressure sensor capsule with low acceleration sensitivity
US4168518A (en) 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
US4172387A (en) * 1978-06-05 1979-10-30 The Foxboro Company Pressure responsive apparatus
US4227419A (en) 1979-09-04 1980-10-14 Kavlico Corporation Capacitive pressure transducer
US4244226A (en) 1979-10-04 1981-01-13 Honeywell Inc. Distance measuring apparatus and a differential pressure transmitter utilizing the same
US4434451A (en) 1979-10-29 1984-02-28 Delatorre Leroy C Pressure sensors
US4322775A (en) 1979-10-29 1982-03-30 Delatorre Leroy C Capacitive pressure sensor
US4287553A (en) 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer
US4336567A (en) 1980-06-30 1982-06-22 The Bendix Corporation Differential pressure transducer
US4370890A (en) 1980-10-06 1983-02-01 Rosemount Inc. Capacitive pressure transducer with isolated sensing diaphragm
US4358814A (en) 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US4422335A (en) 1981-03-25 1983-12-27 The Bendix Corporation Pressure transducer
US4458537A (en) 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
US4389895A (en) 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4466290A (en) 1981-11-27 1984-08-21 Rosemount Inc. Apparatus for conveying fluid pressures to a differential pressure transducer
US4455874A (en) 1981-12-28 1984-06-26 Paroscientific, Inc. Digital pressure transducer
US4422125A (en) 1982-05-21 1983-12-20 The Bendix Corporation Pressure transducer with an invariable reference capacitor
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
JPS59127148U (ja) * 1983-02-14 1984-08-27 株式会社島津製作所 静電容量式圧力・差圧伝送器
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
DE3340834A1 (de) 1983-11-11 1985-05-23 Philips Patentverwaltung Gmbh, 2000 Hamburg Schaltungsanordnung zur konstanthaltung der temperaturabhaengigen empfindlichkeit eines differenzdruckmessgeraetes
US4490773A (en) 1983-12-19 1984-12-25 United Technologies Corporation Capacitive pressure transducer
US4542436A (en) 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
US4562742A (en) 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
US4578735A (en) 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
US4586108A (en) 1984-10-12 1986-04-29 Rosemount Inc. Circuit for capacitive sensor made of brittle material
US4670733A (en) 1985-07-01 1987-06-02 Bell Microsensors, Inc. Differential pressure transducer
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4860232A (en) 1987-04-22 1989-08-22 Massachusetts Institute Of Technology Digital technique for precise measurement of variable capacitance
FR2614986B1 (fr) 1987-05-07 1989-08-18 Otic Fischer & Porter Structure de cellule capacitive pour la mesure des pressions differentielles
US4785669A (en) 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
JP2514067Y2 (ja) * 1987-06-29 1996-10-16 京セラ株式会社 セラミック製トランスデュ−サ
US4875369A (en) 1987-09-08 1989-10-24 Panex Corporation Pressure sensor system
US4878012A (en) 1988-06-10 1989-10-31 Rosemount Inc. Charge balanced feedback transmitter
US4977480A (en) 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US4926674A (en) 1988-11-03 1990-05-22 Innovex Inc. Self-zeroing pressure signal generator
US4951174A (en) 1988-12-30 1990-08-21 United Technologies Corporation Capacitive pressure sensor with third encircling plate
US5194819A (en) 1990-08-10 1993-03-16 Setra Systems, Inc. Linearized capacitance sensor system
US5094109A (en) 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5168419A (en) 1991-07-16 1992-12-01 Panex Corporation Capacitor and pressure transducer
DE4124662A1 (de) 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
US5230250A (en) 1991-09-03 1993-07-27 Delatorre Leroy C Capacitor and pressure transducer
JP3182807B2 (ja) 1991-09-20 2001-07-03 株式会社日立製作所 多機能流体計測伝送装置及びそれを用いた流体量計測制御システム
US5233875A (en) 1992-05-04 1993-08-10 Kavlico Corporation Stable capacitive pressure transducer system
US5329818A (en) 1992-05-28 1994-07-19 Rosemount Inc. Correction of a pressure indication in a pressure transducer due to variations of an environmental condition
US5492016A (en) 1992-06-15 1996-02-20 Industrial Sensors, Inc. Capacitive melt pressure measurement with center-mounted electrode post
JP3415846B2 (ja) 1993-09-24 2003-06-09 ローズマウント インコーポレイテッド 圧力伝達装置の隔離ダイアフラム
DE4333753A1 (de) 1993-10-04 1994-05-11 Bosch Gmbh Robert Kapazitiver Differenzdrucksensor
US5542300A (en) 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
US5642301A (en) 1994-01-25 1997-06-24 Rosemount Inc. Transmitter with improved compensation
AU4110596A (en) 1994-11-30 1996-06-19 Rosemount Inc. Pressure transmitter with fill fluid loss detection
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5705978A (en) 1995-09-29 1998-01-06 Rosemount Inc. Process control transmitter
US5992240A (en) 1995-11-21 1999-11-30 Fuji Electric Co., Ltd. Pressure detecting apparatus for measuring pressure based on detected capacitance
US5757608A (en) 1996-01-25 1998-05-26 Alliedsignal Inc. Compensated pressure transducer
US6654697B1 (en) 1996-03-28 2003-11-25 Rosemount Inc. Flow measurement with diagnostics
US5668322A (en) 1996-06-13 1997-09-16 Rosemount Inc. Apparatus for coupling a transmitter to process fluid having a sensor extension selectively positionable at a plurality of angles
DE19633630A1 (de) 1996-08-21 1998-02-26 Endress Hauser Gmbh Co Auswerteeinheit eines Differenzdrucksensors
US5753820A (en) * 1996-10-25 1998-05-19 Arthur D. Little, Inc. Fluid pressure sensing unit incorporating diaphragm deflection sensing array
US20040015069A1 (en) 1996-12-27 2004-01-22 Brown David Lloyd System for locating inflamed plaque in a vessel
FR2762389B1 (fr) * 1997-04-17 1999-05-21 Commissariat Energie Atomique Microsysteme a membrane souple pour capteur de pression et procede de realisation
US5911162A (en) 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5974893A (en) * 1997-07-24 1999-11-02 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
ATE213326T1 (de) 1998-04-09 2002-02-15 Heinz Ploechinger Kapazitive druck- oder kraftsensorstruktur und verfahren zur herstellung derselben
JP3567089B2 (ja) * 1998-10-12 2004-09-15 株式会社日立製作所 静電容量式圧力センサ
US6295875B1 (en) * 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
DE69936794T2 (de) * 1999-08-20 2008-04-30 Hitachi, Ltd. Halbleiterdrucksensor und vorrichtung zur erfassung von drucken
US6701274B1 (en) 1999-08-27 2004-03-02 Rosemount Inc. Prediction of error magnitude in a pressure transmitter
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
AU2001234959A1 (en) 2000-02-11 2001-08-20 Rosemount, Inc. Oil-less differential pressure sensor
US6662662B1 (en) 2000-05-04 2003-12-16 Rosemount, Inc. Pressure transmitter with improved isolator system
DE10052053A1 (de) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Druckmeßzelle
DE10117142A1 (de) * 2001-04-05 2002-10-10 Endress & Hauser Gmbh & Co Kg Kapazitiver Differenz-Drucksensor
US6516672B2 (en) * 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US6828801B1 (en) * 2001-10-26 2004-12-07 Welch Allyn, Inc. Capacitive sensor
US6675655B2 (en) 2002-03-21 2004-01-13 Rosemount Inc. Pressure transmitter with process coupling
US6647794B1 (en) * 2002-05-06 2003-11-18 Rosemount Inc. Absolute pressure sensor
CA2513094C (en) 2002-11-12 2013-08-06 Mark R. Fernald An apparatus having an array of clamp on piezoelectric film sensors for measuring parameters of a process flow within a pipe
WO2004109239A2 (en) 2003-06-05 2004-12-16 Cidra Corporation Apparatus for measuring velocity and flow rate of a fluid having a non-negligible axial mach number using an array of sensors
EP1646864B1 (en) 2003-07-18 2018-11-07 Rosemount Inc. Process diagnostics
US7523667B2 (en) 2003-12-23 2009-04-28 Rosemount Inc. Diagnostics of impulse piping in an industrial process
US6945115B1 (en) * 2004-03-04 2005-09-20 General Mems Corporation Micromachined capacitive RF pressure sensor
US7577543B2 (en) 2005-03-11 2009-08-18 Honeywell International Inc. Plugged impulse line detection
US7401522B2 (en) 2005-05-26 2008-07-22 Rosemount Inc. Pressure sensor using compressible sensor body
US7334484B2 (en) 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
JP5222457B2 (ja) * 2005-09-26 2013-06-26 株式会社日立製作所 センサおよびセンサモジュール

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018523116A (ja) * 2015-06-30 2018-08-16 ローズマウント インコーポレイテッド 使い捨て容器のための高分子遠隔シールシステム

Also Published As

Publication number Publication date
EP1974195B1 (en) 2018-11-07
CN101341385B (zh) 2011-11-23
US20070151349A1 (en) 2007-07-05
WO2007075290A1 (en) 2007-07-05
EP1974195A1 (en) 2008-10-01
CN101341385A (zh) 2009-01-07
JP2009520206A (ja) 2009-05-21
US7415886B2 (en) 2008-08-26

Similar Documents

Publication Publication Date Title
US6295875B1 (en) Process pressure measurement devices with improved error compensation
RU2416786C2 (ru) Измерение давления в трубопроводе с использованием датчика дифференциального давления
RU2538363C2 (ru) Датчик дифференциального давления с измерением давления в линии
JP5547894B2 (ja) 可撓性ダイヤフラムを備える圧力センサ
EP3123134B1 (en) Span line pressure effect compensation for diaphragm pressure sensor
CN101180526A (zh) 使用可压缩的传感器体的压力传感器
CN107209076A (zh) 具有超压保护的压力变送器
CN100406867C (zh) 具有板涂层、微粒过滤器、独立的低成本电容压力变送器
JPH11295176A (ja) 差圧センサ
JP7459257B2 (ja) 高範囲差圧センサ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091023

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091023

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120328

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120807

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20121107

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20121114

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20121207

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20121214

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130107

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20131029

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140127

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140203

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140401

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140403

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140430

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140516

R150 Certificate of patent or registration of utility model

Ref document number: 5547894

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees