JP2009520206A5 - - Google Patents

Download PDF

Info

Publication number
JP2009520206A5
JP2009520206A5 JP2008547276A JP2008547276A JP2009520206A5 JP 2009520206 A5 JP2009520206 A5 JP 2009520206A5 JP 2008547276 A JP2008547276 A JP 2008547276A JP 2008547276 A JP2008547276 A JP 2008547276A JP 2009520206 A5 JP2009520206 A5 JP 2009520206A5
Authority
JP
Japan
Prior art keywords
diaphragm
pressure
sensor body
cavity
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008547276A
Other languages
English (en)
Japanese (ja)
Other versions
JP5547894B2 (ja
JP2009520206A (ja
Filing date
Publication date
Priority claimed from US11/312,062 external-priority patent/US7415886B2/en
Application filed filed Critical
Publication of JP2009520206A publication Critical patent/JP2009520206A/ja
Publication of JP2009520206A5 publication Critical patent/JP2009520206A5/ja
Application granted granted Critical
Publication of JP5547894B2 publication Critical patent/JP5547894B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008547276A 2005-12-20 2006-12-07 可撓性ダイヤフラムを備える圧力センサ Expired - Fee Related JP5547894B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/312,062 US7415886B2 (en) 2005-12-20 2005-12-20 Pressure sensor with deflectable diaphragm
US11/312,062 2005-12-20
PCT/US2006/046742 WO2007075290A1 (en) 2005-12-20 2006-12-07 Pressure sensor with deflectable diaphragm

Publications (3)

Publication Number Publication Date
JP2009520206A JP2009520206A (ja) 2009-05-21
JP2009520206A5 true JP2009520206A5 (enExample) 2009-12-10
JP5547894B2 JP5547894B2 (ja) 2014-07-16

Family

ID=37847241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008547276A Expired - Fee Related JP5547894B2 (ja) 2005-12-20 2006-12-07 可撓性ダイヤフラムを備える圧力センサ

Country Status (5)

Country Link
US (1) US7415886B2 (enExample)
EP (1) EP1974195B1 (enExample)
JP (1) JP5547894B2 (enExample)
CN (1) CN101341385B (enExample)
WO (1) WO2007075290A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005017853A1 (de) * 2005-04-18 2006-10-19 Siemens Ag Drucksensorvorrichtung
US8429978B2 (en) * 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US9316553B2 (en) * 2014-03-26 2016-04-19 Rosemount Inc. Span line pressure effect compensation for diaphragm pressure sensor
US9562819B2 (en) * 2015-06-30 2017-02-07 Rosemount Inc Polymeric remote seal system for single-use containers
US10836990B2 (en) * 2016-12-23 2020-11-17 Cyberoptics Corporation Sensor interface for single-use containers
US10584309B2 (en) 2017-02-06 2020-03-10 Rosemount Inc. Pressure transducer for single-use containers
CN107101751A (zh) * 2017-02-28 2017-08-29 宝力马（苏州）传感技术有限公司 一种新型电容式压力传感器及其制备方法
US11046575B2 (en) * 2017-10-31 2021-06-29 Encite Llc Broad range micro pressure sensor
EP3769063B1 (en) 2018-05-17 2023-01-04 Rosemount Inc. Measuring element and measuring device comprising the same
CN108593187A (zh) * 2018-05-23 2018-09-28 金陵科技学院 陶瓷电容式压力传感器及提高压力检测精度的方法
US11371902B2 (en) 2019-12-27 2022-06-28 Rosemount Inc. Process venting feature for use in sensor applications with a process fluid barrier
US12436052B2 (en) 2023-01-12 2025-10-07 Rosemount Inc. Method for forming a pathway in a pressure sensor having a glass to metal seal

Family Cites Families (100)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2533339A (en) 1946-06-22 1950-12-12 Jabez Burns & Sons Inc Flammable vapor protection
US3012432A (en) 1957-09-23 1961-12-12 Richard H Moore Leak tester
GB1023042A (en) 1962-05-07 1966-03-16 Wayne Kerr Lab Ltd Improvements in or relating to pressure responsive apparatus
US3232712A (en) 1962-08-16 1966-02-01 Continental Lab Inc Gas detector and analyzer
US3374112A (en) 1964-03-05 1968-03-19 Yeda Res & Dev Method and apparatus for controlled deposition of a thin conductive layer
US3249833A (en) 1964-11-16 1966-05-03 Robert E Vosteen Capacitor transducer
US3557621A (en) 1969-07-07 1971-01-26 C G S Scient Corp Inc Variable capacitance detecting devices
GB1354025A (en) 1970-05-25 1974-06-05 Medicor Muevek Capacitive pressure transducer
US3924219A (en) 1971-12-22 1975-12-02 Minnesota Mining & Mfg Gas detection device
US3808480A (en) 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US4008619A (en) 1975-11-17 1977-02-22 Mks Instruments, Inc. Vacuum monitoring
US4177496A (en) 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4158217A (en) 1976-12-02 1979-06-12 Kaylico Corporation Capacitive pressure transducer with improved electrode
US4120206A (en) 1977-01-17 1978-10-17 Rosemount Inc. Differential pressure sensor capsule with low acceleration sensitivity
US4168518A (en) 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
US4172387A (en) * 1978-06-05 1979-10-30 The Foxboro Company Pressure responsive apparatus
US4227419A (en) 1979-09-04 1980-10-14 Kavlico Corporation Capacitive pressure transducer
US4244226A (en) 1979-10-04 1981-01-13 Honeywell Inc. Distance measuring apparatus and a differential pressure transmitter utilizing the same
US4434451A (en) 1979-10-29 1984-02-28 Delatorre Leroy C Pressure sensors
US4322775A (en) 1979-10-29 1982-03-30 Delatorre Leroy C Capacitive pressure sensor
US4287553A (en) 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer
US4336567A (en) 1980-06-30 1982-06-22 The Bendix Corporation Differential pressure transducer
US4370890A (en) 1980-10-06 1983-02-01 Rosemount Inc. Capacitive pressure transducer with isolated sensing diaphragm
US4358814A (en) 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US4422335A (en) 1981-03-25 1983-12-27 The Bendix Corporation Pressure transducer
US4458537A (en) 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
US4389895A (en) 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4466290A (en) 1981-11-27 1984-08-21 Rosemount Inc. Apparatus for conveying fluid pressures to a differential pressure transducer
US4455874A (en) 1981-12-28 1984-06-26 Paroscientific, Inc. Digital pressure transducer
US4422125A (en) 1982-05-21 1983-12-20 The Bendix Corporation Pressure transducer with an invariable reference capacitor
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
JPS59127148U (ja) * 1983-02-14 1984-08-27 株式会社島津製作所 静電容量式圧力・差圧伝送器
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
DE3340834A1 (de) 1983-11-11 1985-05-23 Philips Patentverwaltung Gmbh, 2000 Hamburg Schaltungsanordnung zur konstanthaltung der temperaturabhaengigen empfindlichkeit eines differenzdruckmessgeraetes
US4490773A (en) 1983-12-19 1984-12-25 United Technologies Corporation Capacitive pressure transducer
US4542436A (en) 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
US4562742A (en) 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
US4578735A (en) 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
US4586108A (en) 1984-10-12 1986-04-29 Rosemount Inc. Circuit for capacitive sensor made of brittle material
US4670733A (en) 1985-07-01 1987-06-02 Bell Microsensors, Inc. Differential pressure transducer
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4860232A (en) 1987-04-22 1989-08-22 Massachusetts Institute Of Technology Digital technique for precise measurement of variable capacitance
FR2614986B1 (fr) 1987-05-07 1989-08-18 Otic Fischer & Porter Structure de cellule capacitive pour la mesure des pressions differentielles
US4785669A (en) 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
JP2514067Y2 (ja) * 1987-06-29 1996-10-16 京セラ株式会社 セラミック製トランスデュ−サ
US4875369A (en) 1987-09-08 1989-10-24 Panex Corporation Pressure sensor system
US4878012A (en) 1988-06-10 1989-10-31 Rosemount Inc. Charge balanced feedback transmitter
US4977480A (en) 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US4926674A (en) 1988-11-03 1990-05-22 Innovex Inc. Self-zeroing pressure signal generator
US4951174A (en) 1988-12-30 1990-08-21 United Technologies Corporation Capacitive pressure sensor with third encircling plate
US5194819A (en) 1990-08-10 1993-03-16 Setra Systems, Inc. Linearized capacitance sensor system
US5094109A (en) 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5168419A (en) 1991-07-16 1992-12-01 Panex Corporation Capacitor and pressure transducer
DE4124662A1 (de) 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
US5230250A (en) 1991-09-03 1993-07-27 Delatorre Leroy C Capacitor and pressure transducer
JP3182807B2 (ja) 1991-09-20 2001-07-03 株式会社日立製作所 多機能流体計測伝送装置及びそれを用いた流体量計測制御システム
US5233875A (en) 1992-05-04 1993-08-10 Kavlico Corporation Stable capacitive pressure transducer system
US5329818A (en) 1992-05-28 1994-07-19 Rosemount Inc. Correction of a pressure indication in a pressure transducer due to variations of an environmental condition
US5492016A (en) 1992-06-15 1996-02-20 Industrial Sensors, Inc. Capacitive melt pressure measurement with center-mounted electrode post
JP3415846B2 (ja) 1993-09-24 2003-06-09 ローズマウント インコーポレイテッド 圧力伝達装置の隔離ダイアフラム
DE4333753A1 (de) 1993-10-04 1994-05-11 Bosch Gmbh Robert Kapazitiver Differenzdrucksensor
US5542300A (en) 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
US5642301A (en) 1994-01-25 1997-06-24 Rosemount Inc. Transmitter with improved compensation
AU4110596A (en) 1994-11-30 1996-06-19 Rosemount Inc. Pressure transmitter with fill fluid loss detection
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5705978A (en) 1995-09-29 1998-01-06 Rosemount Inc. Process control transmitter
US5992240A (en) 1995-11-21 1999-11-30 Fuji Electric Co., Ltd. Pressure detecting apparatus for measuring pressure based on detected capacitance
US5757608A (en) 1996-01-25 1998-05-26 Alliedsignal Inc. Compensated pressure transducer
US6654697B1 (en) 1996-03-28 2003-11-25 Rosemount Inc. Flow measurement with diagnostics
US5668322A (en) 1996-06-13 1997-09-16 Rosemount Inc. Apparatus for coupling a transmitter to process fluid having a sensor extension selectively positionable at a plurality of angles
DE19633630A1 (de) 1996-08-21 1998-02-26 Endress Hauser Gmbh Co Auswerteeinheit eines Differenzdrucksensors
US5753820A (en) * 1996-10-25 1998-05-19 Arthur D. Little, Inc. Fluid pressure sensing unit incorporating diaphragm deflection sensing array
US20040015069A1 (en) 1996-12-27 2004-01-22 Brown David Lloyd System for locating inflamed plaque in a vessel
FR2762389B1 (fr) * 1997-04-17 1999-05-21 Commissariat Energie Atomique Microsysteme a membrane souple pour capteur de pression et procede de realisation
US5911162A (en) 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5974893A (en) * 1997-07-24 1999-11-02 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
ATE213326T1 (de) 1998-04-09 2002-02-15 Heinz Ploechinger Kapazitive druck- oder kraftsensorstruktur und verfahren zur herstellung derselben
JP3567089B2 (ja) * 1998-10-12 2004-09-15 株式会社日立製作所 静電容量式圧力センサ
US6295875B1 (en) * 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
DE69936794T2 (de) * 1999-08-20 2008-04-30 Hitachi, Ltd. Halbleiterdrucksensor und vorrichtung zur erfassung von drucken
US6701274B1 (en) 1999-08-27 2004-03-02 Rosemount Inc. Prediction of error magnitude in a pressure transmitter
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
AU2001234959A1 (en) 2000-02-11 2001-08-20 Rosemount, Inc. Oil-less differential pressure sensor
US6662662B1 (en) 2000-05-04 2003-12-16 Rosemount, Inc. Pressure transmitter with improved isolator system
DE10052053A1 (de) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Druckmeßzelle
DE10117142A1 (de) * 2001-04-05 2002-10-10 Endress & Hauser Gmbh & Co Kg Kapazitiver Differenz-Drucksensor
US6516672B2 (en) * 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US6828801B1 (en) * 2001-10-26 2004-12-07 Welch Allyn, Inc. Capacitive sensor
US6675655B2 (en) 2002-03-21 2004-01-13 Rosemount Inc. Pressure transmitter with process coupling
US6647794B1 (en) * 2002-05-06 2003-11-18 Rosemount Inc. Absolute pressure sensor
CA2513094C (en) 2002-11-12 2013-08-06 Mark R. Fernald An apparatus having an array of clamp on piezoelectric film sensors for measuring parameters of a process flow within a pipe
WO2004109239A2 (en) 2003-06-05 2004-12-16 Cidra Corporation Apparatus for measuring velocity and flow rate of a fluid having a non-negligible axial mach number using an array of sensors
EP1646864B1 (en) 2003-07-18 2018-11-07 Rosemount Inc. Process diagnostics
US7523667B2 (en) 2003-12-23 2009-04-28 Rosemount Inc. Diagnostics of impulse piping in an industrial process
US6945115B1 (en) * 2004-03-04 2005-09-20 General Mems Corporation Micromachined capacitive RF pressure sensor
US7577543B2 (en) 2005-03-11 2009-08-18 Honeywell International Inc. Plugged impulse line detection
US7401522B2 (en) 2005-05-26 2008-07-22 Rosemount Inc. Pressure sensor using compressible sensor body
US7334484B2 (en) 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
JP5222457B2 (ja) * 2005-09-26 2013-06-26 株式会社日立製作所 センサおよびセンサモジュール

Similar Documents

Publication Publication Date Title
US11300470B2 (en) Flexible temperature-sensitive pressure sensor based on nanoparticle lattice array quantum conductance, and assembly method and application thereof
Yang et al. Multimodal sensors with decoupled sensing mechanisms
CN108291797B (zh) 含直线诱导的裂纹的高灵敏度传感器及其制造方法
JP2009520206A5 (enExample)
CN100454455C (zh) 微机电传感器
US7401522B2 (en) Pressure sensor using compressible sensor body
Zhao et al. A fully packaged CMOS interdigital capacitive humidity sensor with polysilicon heaters
Fung et al. A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements
CN104089737B (zh) 一种高灵敏度叠层式挠曲电压力传感器
Li et al. Piezoresistive thin film pressure sensor based on carbon nanotube-polyimide nanocomposites
CN101329187A (zh) 用于测量多个被测对象的组合传感器系统
WO2007126491A3 (en) Differential pressure transducer configurations including displacement sensor
KR101980224B1 (ko) 공압 기반 촉각센서
JPS5829862B2 (ja) 圧力測定装置
CN105067016A (zh) 基于氧化石墨烯的柔性集成温湿度传感器及其制备方法
CN105190272B (zh) 具有实时健康监测和补偿的压力传感器
CN107667279A (zh) 压力感测设备
CN104483054A (zh) 挠曲电型无源扭矩传感器
US20110198711A1 (en) System and method for an integrated electronic and optical mems based sensor
CN106247920A (zh) 一种基于弹性基底夹心叉指电容的表面应变检测器件
CN204043823U (zh) 高聚能介电弹性体微力传感器
KR100773759B1 (ko) 마이크로 압력센서
RU2003133914A (ru) Датчик и способ измерения давления
CN203704919U (zh) 一种差动液态电容倾角传感器
CN206095141U (zh) 一种基于弹性基底夹心叉指电容的表面应变检测器件