CN101341385B - 具有可偏转隔板的压力传感器 - Google Patents

具有可偏转隔板的压力传感器 Download PDF

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Publication number
CN101341385B
CN101341385B CN2006800483176A CN200680048317A CN101341385B CN 101341385 B CN101341385 B CN 101341385B CN 2006800483176 A CN2006800483176 A CN 2006800483176A CN 200680048317 A CN200680048317 A CN 200680048317A CN 101341385 B CN101341385 B CN 101341385B
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CN
China
Prior art keywords
pressure
diaphragm
sensor body
pressure sensor
sensor
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN2006800483176A
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English (en)
Chinese (zh)
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CN101341385A (zh
Inventor
马克·斯库马切尔
安德鲁·克罗辛斯基
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Rosemount Inc
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Rosemount Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
CN2006800483176A 2005-12-20 2006-12-07 具有可偏转隔板的压力传感器 Expired - Fee Related CN101341385B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/312,062 US7415886B2 (en) 2005-12-20 2005-12-20 Pressure sensor with deflectable diaphragm
US11/312,062 2005-12-20
PCT/US2006/046742 WO2007075290A1 (en) 2005-12-20 2006-12-07 Pressure sensor with deflectable diaphragm

Publications (2)

Publication Number Publication Date
CN101341385A CN101341385A (zh) 2009-01-07
CN101341385B true CN101341385B (zh) 2011-11-23

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CN2006800483176A Expired - Fee Related CN101341385B (zh) 2005-12-20 2006-12-07 具有可偏转隔板的压力传感器

Country Status (5)

Country Link
US (1) US7415886B2 (enExample)
EP (1) EP1974195B1 (enExample)
JP (1) JP5547894B2 (enExample)
CN (1) CN101341385B (enExample)
WO (1) WO2007075290A1 (enExample)

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DE102005017853A1 (de) * 2005-04-18 2006-10-19 Siemens Ag Drucksensorvorrichtung
US8429978B2 (en) * 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US9316553B2 (en) * 2014-03-26 2016-04-19 Rosemount Inc. Span line pressure effect compensation for diaphragm pressure sensor
US9562819B2 (en) * 2015-06-30 2017-02-07 Rosemount Inc Polymeric remote seal system for single-use containers
US10836990B2 (en) * 2016-12-23 2020-11-17 Cyberoptics Corporation Sensor interface for single-use containers
US10584309B2 (en) 2017-02-06 2020-03-10 Rosemount Inc. Pressure transducer for single-use containers
CN107101751A (zh) * 2017-02-28 2017-08-29 宝力马（苏州）传感技术有限公司 一种新型电容式压力传感器及其制备方法
US11046575B2 (en) * 2017-10-31 2021-06-29 Encite Llc Broad range micro pressure sensor
EP3769063B1 (en) 2018-05-17 2023-01-04 Rosemount Inc. Measuring element and measuring device comprising the same
CN108593187A (zh) * 2018-05-23 2018-09-28 金陵科技学院 陶瓷电容式压力传感器及提高压力检测精度的方法
US11371902B2 (en) 2019-12-27 2022-06-28 Rosemount Inc. Process venting feature for use in sensor applications with a process fluid barrier
US12436052B2 (en) 2023-01-12 2025-10-07 Rosemount Inc. Method for forming a pathway in a pressure sensor having a glass to metal seal

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
DE4333753A1 (de) * 1993-10-04 1994-05-11 Bosch Gmbh Robert Kapazitiver Differenzdrucksensor
CN1236433A (zh) * 1996-10-25 1999-11-24 亚瑟D·立德公司 具有隔板挠度检测阵列的流体检测装置
US6295875B1 (en) * 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation

Also Published As

Publication number Publication date
EP1974195B1 (en) 2018-11-07
US20070151349A1 (en) 2007-07-05
WO2007075290A1 (en) 2007-07-05
EP1974195A1 (en) 2008-10-01
CN101341385A (zh) 2009-01-07
JP5547894B2 (ja) 2014-07-16
JP2009520206A (ja) 2009-05-21
US7415886B2 (en) 2008-08-26

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