JP5492032B2 - Scanning electron microscope and method for switching use of objective lens of scanning electron microscope - Google Patents

Description

  The present invention focuses an electron beam generated from an electron gun by an objective lens, irradiates the sample placed on a sample stage, scans the sample, and detects a secondary signal from the sample to detect the sample. The present invention relates to a scanning electron microscope for obtaining a scanning image of the above and an application switching method of an objective lens of the scanning electron microscope.

  In a scanning electron microscope, the shape of the objective lens is an important factor that determines the resolution of the apparatus. Therefore, in order to improve the resolution, the aberration coefficient of the objective lens must be reduced. Therefore, by adopting an in-lens type or semi-in-lens type (strong magnetic field objective lens) objective lens in which the magnetic field on the sample is strengthened, the aberration coefficient is set to 3 mm or less. In addition, when analyzing with a magnetized sample or EBSD (a method of analyzing the orientation of a crystalline sample using backscattered electron diffraction), it is necessary to prevent the magnetic field from leaking onto the sample. Conventionally, devices having different objective lens shapes for each application have been manufactured. Also, when it is desired to attach a detector or a vacuum separation orifice on the lower surface of the objective lens, it may be necessary to change the shape of the objective lens for each application.

  When changing the use of the objective lens, usually, the vacuum is leaked and the entire objective lens is replaced, or a part to be attached is incorporated. For this reason, there is a problem that the change takes time.

  Therefore, as shown in FIG. 5, the applicant of the present application enables the inner magnetic pole piece 3 and the outer magnetic pole piece 5 of the objective lens 1 to move relatively along the optical axis using the drive mechanism 7, and A device in which the auxiliary magnetic pole piece 9 can be selectively disposed under the magnetic pole piece 5 using the drive mechanism 11 and can form different on-axis magnetic field distributions in a short time according to the application with a single objective lens. It has been proposed (see Patent Document 1).

Japanese Patent Application No. 2000-156191

  However, the apparatus described in Patent Document 1 requires a mechanism for driving the inner magnetic pole piece and the outer magnetic pole piece along the optical axis and a mechanism for driving the auxiliary magnetic pole piece, which increases the size of the apparatus. There is.

  The present invention has been made in view of the above-mentioned problems, and its problem is to provide a scanning electron microscope that can be switched in a short time and can be used in a short time, and a method for switching the use of the objective lens of the scanning electron microscope. Is an issue.

  In the invention according to claim 1 for solving the above-mentioned problem, an electron beam generated from an electron gun is focused by an objective lens, irradiated on a sample placed on a sample stage, scanned on the sample, In a scanning electron microscope that obtains a scanned image of a sample by detecting a secondary signal, a first screw portion having an optical axis of the objective lens as an axis at an end of the outer magnetic pole piece of the objective lens on the sample stage side A second screw portion that can be screwed with the first screw portion along the circumferential direction is formed on one of the inner wall surface and the outer wall surface, and the other of the inner wall surface and the outer wall surface is formed. A third screw portion that is coaxial with the second screw portion and has a reverse threading direction is formed on the surface side, and an auxiliary outer pole piece that can be attached to and detached from the outer pole piece, and the third of the auxiliary outer pole piece. A fourth screw portion that can be screwed to the screw portion; Axis is provided on said sample stage so as to coincide with the rotation center of the sample stage of a scanning electron microscope and having a a removable holder removably said auxiliary outer pole piece.

In the invention according to claim 2, the third screw portion of the auxiliary outer magnetic pole piece is screwed to the fourth screw portion of the detachable holder, and the shaft of the third screw portion and the shaft of the first screw portion are connected. In the matched state, the detachable holder is raised by raising the sample stage, the auxiliary outer magnetic pole piece is brought into contact with the outer magnetic pole piece of the objective lens, and the sample stage is rotated to remove the detachable holder. By rotating in one direction, the second threaded portion of the auxiliary outer magnetic pole piece is screwed into the first threaded portion of the outer magnetic pole piece, and the third screw portion of the auxiliary outer magnetic pole piece and the detachable holder The scanning electron microscope according to claim 1, further comprising a control unit that releases screwing with the fourth screw unit.

According to a third aspect of the present invention, in the control unit, the second screw portion of the auxiliary outer magnetic pole piece is screwed into the first screw portion of the outer magnetic pole piece, and the shaft of the third screw portion and the fourth screw in a state where the axis is coincident parts, said raising the detachable holder by raising the sample stage, the removable holder into contact with the auxiliary outer pole piece, the detachable holder by rotating the sample stage Is rotated in the other direction so that the third screw portion of the auxiliary outer magnetic pole piece and the fourth screw portion of the detachable holder are screwed together, and further, the first screw portion of the outer magnetic pole piece and the auxiliary outer magnetic pole piece 3. The scanning electron microscope according to claim 2, wherein the screw engagement with the second screw portion of the piece is released.

  The invention according to claim 4 is the scanning electron microscope according to any one of claims 1 to 3, wherein the detachable holder is provided with a protrusion located on the shaft of the fourth screw portion.

  According to a fifth aspect of the present invention, the auxiliary outer magnetic pole piece is provided with an auxiliary inner magnetic pole piece capable of contacting the inner magnetic pole piece of the objective lens via a non-magnetic material. A scanning electron microscope according to any one of the above.

In the invention according to claim 6, the electron beam generated from the electron gun is focused by the objective lens, irradiated onto the sample placed on the sample stage, scanned on the sample, and a secondary signal from the sample is obtained. A method for switching the use of an objective lens of a scanning electron microscope that obtains a scanning image of a sample by detecting the sample, wherein an optical axis of the objective lens is used as an axis at an end of the outer magnetic pole piece of the objective lens on the sample stage side A first threaded portion is provided, and a second threaded portion that can be screwed with the first threaded portion along the circumferential direction is formed on one of the inner wall surface and the outer wall surface, and the inner wall surface and the outer wall surface A third screw portion that is coaxial with the second screw portion and has a reverse threading direction is formed on the other surface side, and an auxiliary outer magnetic pole piece that can be attached to and detached from the outer magnetic pole piece, and the auxiliary outer magnetic pole A fourth screw portion that can be screwed with the third screw portion of the piece; A fourth screw portion of the detachable holder using a detachable holder provided on the sample stage so that an axis of the fourth screw portion coincides with a rotation center of the sample stage, and the auxiliary outer magnetic pole piece is detachable; The third screw portion of the auxiliary outer magnetic pole piece is screwed to the shaft, and the axis of the third screw portion is aligned with the axis of the first screw portion, so that the sample stage is lifted to raise the detachable holder The auxiliary outer magnetic pole piece is brought into contact with the outer magnetic pole piece of the objective lens, the sample stage is rotated to rotate the detachable holder in one direction, and the auxiliary outer magnetic pole piece is moved in the first direction. Two screw portions are screwed to the first screw portion of the outer magnetic pole piece, and further, the screwing of the third screw portion of the auxiliary outer magnetic pole piece and the fourth screw portion of the detachable holder is released. Objective of a scanning electron microscope It is a drawing application switching method.

  According to the first to fifth aspects of the present invention, the first screw portion about the optical axis of the objective lens is provided at the end of the outer pole piece of the objective lens on the sample stage side, and the inner wall surface, the outer A second threaded portion that can be screwed together with the first threaded portion along the circumferential direction is formed on one surface side of the wall surface, and the second surface side of the inner wall surface and the outer wall surface is disposed on the second surface side. A third screw portion that is coaxial with the screw portion and has a reverse threading direction is formed. The auxiliary outer magnetic pole piece that can be attached to and detached from the outer magnetic pole piece, and the third screw portion of the auxiliary outer magnetic pole piece can be screwed together. And a detachable holder that is provided on the sample stage so that an axis of the fourth screw portion coincides with the rotation center of the sample stage, and the auxiliary outer magnetic pole piece is detachable. That is, an attachment / detachment holder is provided on the sample stage, and the auxiliary outer magnetic pole piece can be attached to the outer magnetic pole piece of the objective lens by using an existing driving mechanism of the sample stage. Therefore, the mechanism for switching the usage of the objective lens can be reduced in size. Further, since the detachable holder can be placed in the sample chamber via the sample exchange chamber, there is no need for a vacuum leak in the sample chamber, and the use of the objective lens can be switched in a short time.

  Further, by arbitrarily setting the shape of the auxiliary outer magnetic pole piece, switching to an objective lens having various characteristics (for example, switching from a semi-in lens to a normal out lens) can be performed.

According to the invention of claim 2, the third screw portion of the auxiliary outer magnetic pole piece is screwed to the fourth screw portion of the detachable holder, and the shaft of the third screw portion and the shaft of the first screw portion in a state in which bets are matched, the detachable and holder raises the by raising the sample stage, wherein the auxiliary outer pole shoe in contact with the outer pole piece of the objective lens, the detachable by rotating the sample stage The holder is rotated in one direction so that the second screw portion of the auxiliary outer magnetic pole piece is screwed into the first screw portion of the outer magnetic pole piece, and the third screw portion of the auxiliary outer magnetic pole piece, By having the control unit that releases the screwing with the fourth screw portion of the detachable holder, the auxiliary outer magnetic pole piece can be automatically attached to the outer magnetic pole piece of the objective lens.

According to a third aspect of the present invention, the controller is configured such that the second screw portion of the auxiliary outer magnetic pole piece is screwed into the first screw portion of the outer magnetic pole piece, and the shaft of the third screw portion and the first screw portion are engaged. in a state where the shaft has four matching threaded portion above said raising the detachable holder by raising the sample stage, the removable holder into contact with the auxiliary outer pole piece, by rotating the sample stage The attachment / detachment holder is rotated in the other direction so that the third screw portion of the auxiliary outer magnetic pole piece and the fourth screw portion of the attachment / detachment holder are screwed together, and further, the first screw portion of the outer magnetic pole piece and the auxiliary screw portion The auxiliary outer magnetic pole piece can be removed from the outer magnetic pole piece of the objective lens by releasing the screwing of the outer magnetic pole piece with the second screw portion.

  According to the fourth aspect of the present invention, the protrusion is located on the shaft of the fourth threaded portion on the detachable holder, so that, for example, the electron beam is focused by the opening angle control lens and the protrusion is scanned. By confirming in the image, the protrusion can be easily aligned with the optical axis of the objective lens, that is, the axis of the first screw portion.

  According to the fifth aspect of the present invention, the auxiliary outer magnetic pole piece is provided with an auxiliary inner magnetic pole piece that can contact the inner magnetic pole piece of the objective lens via a non-magnetic material. By arbitrarily setting the shape, it is possible to switch the application to an objective lens having various characteristics (for example, a semi-in lens or a normal out lens).

According to the sixth aspect of the present invention, the electron beam generated from the electron gun is focused by the objective lens, irradiated onto the sample placed on the sample stage, scanned on the sample, and secondary from the sample. A method for switching the use of an objective lens of a scanning electron microscope that detects a signal and obtains a scanned image of a sample, the optical axis of the objective lens being an axis at an end of the outer magnetic pole piece of the objective lens on the sample stage side A first threaded portion is provided, and a second threaded portion that can be screwed with the first threaded portion along the circumferential direction is formed on one of the inner wall surface and the outer wall surface, and the inner wall surface, A third screw portion that is coaxial with the second screw portion and has a reverse threading direction is formed on the other surface side of the outer wall surface, and an auxiliary outer magnetic pole piece that can be attached to and detached from the outer magnetic pole piece, and the auxiliary A fourth screw portion that can be screwed with the third screw portion of the outer pole piece And a detachable holder provided on the sample stage so that the axis of the fourth screw portion coincides with the rotation center of the sample stage, and the auxiliary outer magnetic pole piece is detachable. By raising the sample stage in a state where the third screw portion of the auxiliary outer magnetic pole piece is screwed to the four screw portions and the axis of the third screw portion and the axis of the first screw portion are aligned. The detachable holder is raised, the auxiliary outer magnetic pole piece is brought into contact with the outer magnetic pole piece of the objective lens, and the sample holder is rotated to rotate the detachable holder in one direction, so that the auxiliary outer magnetic pole piece is The second screw portion is screwed into the first screw portion of the outer magnetic pole piece, and further, the screwing of the third screw portion of the auxiliary outer magnetic pole piece and the fourth screw portion of the detachable holder is released. That is, an attachment / detachment holder is provided on the sample stage, and the auxiliary outer magnetic pole piece can be attached to the outer magnetic pole piece of the objective lens by using an existing driving mechanism of the sample stage. Therefore, the mechanism for switching the usage of the objective lens can be reduced in size. Further, since the detachable holder can be placed in the sample chamber via the sample exchange chamber, there is no need for a vacuum leak in the sample chamber, and the use of the objective lens can be switched in a short time.

  Further, by arbitrarily setting the shape of the auxiliary outer magnetic pole piece, an objective lens having various characteristics (for example, a semi-in lens to a normal out lens) can be obtained.

It is sectional drawing explaining the objective lens and attachment / detachment holder of embodiment. It is a figure explaining the whole structure of the scanning electron microscope of embodiment. It is sectional drawing of another auxiliary pole piece. It is sectional drawing of another auxiliary pole piece. It is a figure explaining a prior art example.

  The embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view illustrating an objective lens and a detachable holder, and FIG. 2 is a diagram illustrating an overall configuration of a scanning electron microscope according to the present embodiment.

  First, the scanning electron microscope will be described with reference to FIG. In the figure, an electron gun 51 that emits an electron beam (electron beam) is provided in the upper part of a mirror body 50.

  Inside the mirror body 50, a focusing lens 53, an opening angle control lens 55, a scanning coil 57, and an objective lens 59 are provided from above.

  The inside of the sample chamber 60 provided in the lower part of the mirror body 50 is kept in a vacuum state, and a sample stage 61 is provided therein. The sample stage 61 is movable in the Z direction (optical axis direction of the objective lens 59), the X direction (direction perpendicular to the optical axis of the objective lens 59 on the paper surface), and the Y direction (perpendicular to the paper surface). It has become. The sample chamber 60 is provided with a secondary electron detector 63 that detects secondary electrons (secondary signals) from the sample.

  A sample exchange chamber 70 is provided adjacent to the sample chamber 60.

  The control unit 81 includes the electron gun 51, the focusing lens driving unit 85, the opening angle control lens driving unit 87, the scanning coil driving unit 89, the objective lens driving unit 91, and the sample stage driving unit 93. The focusing lens 53, the opening angle control lens 55, the scanning coil 57, the objective lens 59, and the sample stage 61 are driven.

  Further, the detection signal of the secondary electrons detected by the secondary electron detector 63 is sent to the image signal processing unit 95, and scan image data based on this is generated. The image data is sent to the display device 97 via the control unit 81, and an image based on the data is displayed as a secondary electron image (scanned image).

  The objective lens 59 includes an outer magnetic pole piece 101, an inner magnetic pole piece 103, and an exciting coil 105.

  In this embodiment, an auxiliary outer magnetic pole piece and an auxiliary inner magnetic pole piece, which will be described later, are attached to the end portion (lower end) of the outer magnetic pole piece 101 and the inner magnetic pole piece 103 of the objective lens 59 on the sample stage 61 side. A characteristic objective lens (for example, a change in use from a semi-in lens to a normal out lens) can be obtained.

  In the drawing, an attachment / detachment holder 111 for holding the auxiliary magnetic pole piece and attaching / detaching the auxiliary magnetic pole piece to / from the objective lens 59 is provided on the sample stage 61.

  Here, the detachable holder 111 and the auxiliary magnetic pole piece will be described with reference to FIG. The detachable holder 111 includes a base 113 provided on the sample stage 61 and a holding member 115 provided on the base 113 and holding an auxiliary magnetic pole piece.

  The base 113 includes a columnar base main body 113a and a cylindrical inner cylinder portion 113b formed on the upper surface of the base main body 113a.

  The holding member 115 has a cylindrical shape, and includes an outer cylindrical portion 115a that is fitted to the inner cylindrical portion 113b of the base 113 from the outside, and a top portion 115b that is bent inward from the upper end portion of the outer cylindrical portion 115a. Yes. A hole 115c is formed in the central portion of the top portion 115b, and a fourth screw portion 117 is formed in the inner wall of the hole 115c.

  In addition, a protrusion 115 d is formed at the center of the base body 113 a so as to coincide with the axis of the fourth screw portion 117 and toward the top portion 115 b of the holding member 115.

  Further, a spring 119 is wound around the outer peripheral surface of the inner cylinder portion 113 b of the base 113. One end of the spring 119 is in contact with the base body 113 a of the base 113, and the other end is in contact with the lower end surface of the outer cylinder portion 115 a of the holding member 115 to urge the base 113 toward the objective lens 59.

  Further, a hole 113c through which secondary electrons pass and a hole 115e are formed in the peripheral portion of the inner cylinder portion 113b of the base 113 and the peripheral portion of the outer cylinder portion 115a of the holding member 115.

  An annular mounting member 121 made of a nonmagnetic material and projecting from the lower surface of the outer magnetic pole piece 101 is provided on the inner wall surface side of the lower part of the outer magnetic pole piece 101 of the objective lens 59. A first screw portion 123 whose axis coincides with the optical axis O of the objective lens 59 is formed on the outer peripheral surface of the portion of the mounting member 121 protruding from the lower surface of the outer magnetic pole piece 101.

  The auxiliary magnetic pole piece 131 of the present embodiment includes a bottomed cylindrical auxiliary outer magnetic pole piece 133 made of a magnetic material and having one surface open, and an inner cylindrical surface of the auxiliary outer magnetic pole piece 133 made of a nonmagnetic material. An annular bracket 135 provided and an auxiliary inner magnetic pole piece 137 provided on the wall surface of the inner hole 135 a of the bracket 135 and made of a magnetic material and capable of contacting the inner magnetic pole piece 103.

  A second screw portion 139 that can be screwed into the first screw portion on the objective lens 59 side is formed on the inner cylindrical surface of the auxiliary outer magnetic pole piece 133 along the circumferential direction. The auxiliary outer magnetic pole piece 133 has a third cylindrical surface that is coaxial with the second screw portion 139 and screwed in the fourth screw portion 117 of the detachable holder 111 with the threading direction (winding direction of the screw) reversed. The screw part 141 is formed along the circumferential direction.

  A hole 133 a is formed at the center of the bottom of the auxiliary outer magnetic pole piece 133.

  In the present embodiment, in addition to the auxiliary magnetic pole piece 131 having the shape shown in FIG. 1, an auxiliary magnetic pole piece 131 'shown in FIG. 3 can be attached. The difference between the auxiliary magnetic pole piece 131 and the auxiliary magnetic pole piece 131 ′ is the diameter (φ) of the hole 133 a of the auxiliary outer magnetic pole piece 133 and the diameter (φ ′) of the hole 133 a ′ of the auxiliary outer magnetic pole piece 133 ′. Since φ <φ ′, the objective lens to which the auxiliary magnetic pole piece 131 shown in FIG. 1 is attached functions as an out lens, and the objective lens to which the auxiliary magnetic pole piece 131 ′ shown in FIG. 3 is attached is a semi-in lens. Function as.

  Further, as shown in FIG. 4, an auxiliary magnetic pole piece 131 provided with an orifice 201 and a semiconductor detector 203 in the hole 133 a of the auxiliary outer magnetic pole piece 133 can be attached.

Here, the operation of the above configuration will be described.
(Attachment of auxiliary pole piece)
The auxiliary magnetic pole piece 131 is attached to the detachable holder 111 by screwing the third screw portion 141 of the auxiliary magnetic pole piece 131 into the fourth screw portion 117 of the detachable holder 111 outside the apparatus (outside of the vacuum).

  The detachable holder 111 to which the auxiliary magnetic pole piece 131 is attached is disposed on the sample stage 61 in the sample chamber 60 through the sample replacement chamber 70 by the same method as the sample replacement. At this time, the detachable holder 111 is set so that the axis (projection 115 d) of the fourth screw portion 141 coincides with the rotation center of the sample stage 61.

  The control unit 81 focuses the electron beam on the upper surface of the projection 115d of the attachment / detachment holder 111 by the lens action of the opening angle control lens 55, and scans the electron beam by the deflection action of the scanning coil 57. Thereby, the scanning image of the protrusion 115d is acquired and displayed.

  Next, the sample stage 61 is driven in the X and Y axis directions so that the protrusion 115d coincides with the optical axis O of the objective lens 59. This operation can also be operated by the operator. In this case, the operator performs driving scanning while visually confirming the displayed scanning image.

  Here, the operator presses the auxiliary magnetic pole piece selection button and the auxiliary magnetic pole piece attachment button of the operation unit 80 (see FIG. 2). The control unit 81 drives the sample stage 61 upward along the Z-axis direction until the second screw part 139 of the auxiliary magnetic pole piece 131 of the detachable holder 111 contacts the first screw part 123 of the objective lens 59. The contact between the second screw portion 139 of the auxiliary magnetic pole piece 131 and the first screw portion 123 of the objective lens 59 and the first screw portion 123 is based on the existing contact detecting means 94 provided on the sample stage 61 (FIG. 2). For example). The contact between the second screw portion 139 and the first screw portion 123 is also displayed on the display device 97.

  When the second screw portion 139 and the first screw portion 123 come into contact with each other, the control unit 81 rotates the sample stage 61 in one direction (counterclockwise). Then, the second screw portion 139 of the auxiliary magnetic pole piece 131 and the first screw portion 123 of the objective lens 59 are screwed together. When the screwing of the second screw portion 139 and the first screw portion 123 is completed, the auxiliary magnetic pole piece 131 stops rotating, and then the holding member 115 starts to rotate in one direction (counterclockwise). At this time, the auxiliary inner magnetic pole piece 137 of the auxiliary magnetic pole piece 131 contacts the inner magnetic pole piece 103 of the objective lens 59. The holding member 115 is lowered while resisting the urging force of the spring 119, and the screwing of the fourth screw portion 123 of the holding member 115 and the third screw portion 141 of the auxiliary magnetic pole piece 131 is released. The screwing of the fourth screw portion 123 of the holding member 115 and the third screw portion 141 of the auxiliary magnetic pole piece 131 is released, and the separation of the auxiliary magnetic pole piece 131 and the detachable holder 111 is determined by the signal of the contact detection means 94. The When the auxiliary magnetic pole piece 131 and the detachable holder 111 are separated, the control unit 81 stops the rotation of the sample stage 61 in one direction. The separation between the auxiliary magnetic pole piece 131 and the detachable holder 111 is also displayed on the display device 97.

  The control unit 81 lowers the sample stage 61 to the original position, and data corresponding to the selected auxiliary magnetic pole piece 131 from the table 96 (see FIG. 2) in which the characteristics of the auxiliary magnetic pole pieces 131 and 131 ′ are recorded. The control table used at the time of sample observation and the operation screen of the display device 97 are changed.

The operator takes out the detachable holder 111 on the sample stage 61 from the sample chamber 60 by the same method as the sample exchange, and observes the sample.
(Removing the auxiliary pole piece)
The detachable holder 111 is placed on the sample stage 61 in the sample chamber 60 via the sample replacement chamber 70 by the same method as the sample replacement. At this time, the detachable holder 111 is set so that the axis (projection 115 d) of the fourth screw portion 141 coincides with the rotation center of the sample stage 61.

  Similarly to the above, the control unit 81 acquires and displays a scanned image of the protrusion 115d of the attachment / detachment holder 111. Next, the sample stage 61 is driven in the X and Y axis directions so that the projection 115d coincides with the optical axis O of the objective lens 59 (same as above).

  Here, the operator presses the auxiliary magnetic pole piece removal button of the operation unit 80. The control unit 81 drives the sample stage 61 upward along the Z-axis direction until the fourth screw portion 117 of the attachment / detachment holder 111 contacts the third screw portion 114 of the auxiliary magnetic pole piece 131. The contact between the fourth screw portion 117 of the attachment / detachment holder 111 and the third screw portion 114 of the auxiliary magnetic pole piece 131 is determined by detecting a signal from the contact detection means 94 provided on the sample stage 61. Note that the contact between the fourth screw portion 117 and the third screw portion 141 is also displayed on the display device 97.

  When the fourth screw portion 117 and the third screw portion 141 come into contact with each other, the control unit 81 rotates the sample stage 61 in the other direction (clockwise). Then, the fourth screw portion 117 of the attachment / detachment holder 111 and the third screw portion 141 of the auxiliary magnetic pole piece 131 are screwed together. When the screwing of the fourth screw portion 117 and the third screw portion 141 is completed, the auxiliary magnetic pole piece 131 is then rotated in the other direction (clockwise). The holding member 115 is lowered while resisting the biasing force of the spring 119, and the screwing of the first screw portion 123 of the objective lens 59 and the second screw portion 139 of the auxiliary magnetic pole piece 131 is released. The screw engagement between the first screw portion 123 of the objective lens 59 and the second screw portion 139 of the auxiliary magnetic pole piece 131 is released, and the separation between the auxiliary magnetic pole piece 131 and the objective lens 59 is determined by a signal of the contact detection means 94. The When the auxiliary magnetic pole piece 131 and the objective lens 59 are separated, the control unit 81 stops the rotation of the sample stage 61 in the other direction. The separation between the auxiliary magnetic pole piece 131 and the objective lens 59 is also displayed on the display device 97.

  Then, the control unit 81 lowers the sample stage 61 to the original position.

  The operator takes out the detachable holder 111 on the sample stage 61 from the sample chamber 60 in the same manner as the sample exchange.

  According to such a configuration, the following effects can be obtained.

 (1) An attachment / detachment holder 111 is provided on the sample stage 61, and the auxiliary magnetic pole piece 131 can be attached / detached to / from the objective lens 59 by using an existing drive mechanism of the sample stage 61. Therefore, the mechanism for changing the application of the objective lens 59 can be reduced in size. In addition, since the detachable holder 111 can be disposed in the sample chamber 60 via the sample exchange chamber 70, a vacuum leak in the sample chamber 60 becomes unnecessary, and the application of the objective lens 59 can be changed in a short time. it can.

 (2) By arbitrarily setting the shape of the auxiliary outer pole piece, the objective lens can function as an out lens or a semi-in lens.

 (3) By providing the attachment / detachment holder 111 with the projection 115d positioned on the axis of the fourth screw portion 117, the opening angle control lens 55 focuses the electron beam and confirms the projection 115d in the scanning image. Thus, the protrusion 115 d can be easily aligned with the optical axis O of the objective lens 59, that is, the axis of the first screw portion 123.

 (4) By having the table 96 in which the characteristics of the auxiliary magnetic pole pieces 131 and 131 'to be attached are recorded, many adjustments by the manufacturer's workers are not necessary even after replacement, and the images can be observed immediately.

 (5) Since the auxiliary magnetic pole piece is attached to the objective lens 59 by screwing, it can be attached with high accuracy.

  The present invention is not limited to the above embodiment. In the above embodiment, after the sample stage 61 is driven in the X and Y axis directions so that the projection 115 d of the attachment / detachment holder 111 coincides with the optical axis O of the objective lens 59, the control unit 81 detects the sample stage 61. Although the control of raising, rotating, and lowering is performed, the operator may raise, rotate, and lower the sample stage 61 by a switch operation.

  In the case of automatic control, the controller 81 moves the sample stage 61 in the X and Y axis directions so that the projection 115d of the detachable holder 111 coincides with the optical axis O of the objective lens 59 using image recognition. It is also possible to drive it.

  Further, the auxiliary magnetic pole piece 131 may not include the bracket 135 and the auxiliary inner magnetic pole piece 137.

59 Objective lens 61 Sample stage 101 Outer magnetic pole piece 111 Detachable holder 117 Fourth screw portion 123 First screw portion 139 Second screw portion 141 Third screw portion

Claims (6)

The electron beam generated from the electron gun is focused by the objective lens, irradiated onto the sample placed on the sample stage, scanned on the sample, and a secondary signal from the sample is detected to detect a scanned image of the sample. In the scanning electron microscope to obtain
A first screw portion with the optical axis of the objective lens as an axis is provided at an end of the outer pole piece of the objective lens on the sample stage side,
A second screw portion that can be screwed with the first screw portion along the circumferential direction is formed on one surface side of the inner wall surface and the outer wall surface, and on the other surface side of the inner wall surface and the outer wall surface. A third screw portion that is coaxial with the second screw portion and has a reverse threading direction, and an auxiliary outer magnetic pole piece that can be attached to and detached from the outer magnetic pole piece,
A fourth screw portion that can be screwed with the third screw portion of the auxiliary outer magnetic pole piece, and is provided on the sample stage so that an axis of the fourth screw portion coincides with a rotation center of the sample stage; A detachable holder to which the auxiliary outer magnetic pole piece is detachable;
A scanning electron microscope characterized by comprising: In a state where the third screw portion of the auxiliary outer magnetic pole piece is screwed to the fourth screw portion of the detachable holder, and the axis of the third screw portion and the axis of the first screw portion coincide with each other, the sample stage To raise the detachable holder to bring the auxiliary outer pole piece into contact with the outer pole piece of the objective lens,
The attachment / detachment holder is rotated in one direction by rotating the sample stage, the second screw portion of the auxiliary outer magnetic pole piece is screwed to the first screw portion of the outer magnetic pole piece, and the auxiliary The scanning electron microscope according to claim 1, further comprising: a control unit that releases screwing of the third screw portion of the outer magnetic pole piece and the fourth screw portion of the detachable holder. The controller is
In a state where the second screw portion of the auxiliary outer pole piece is screwed into the first screw portion of the outer pole piece, and the axis of the third screw portion and the axis of the fourth screw portion are aligned, the sample stage The detachable holder is lifted to bring the detachable holder into contact with the auxiliary outer magnetic pole piece,
The attachment / detachment holder is rotated in the other direction by rotating the sample stage, the third screw portion of the auxiliary outer magnetic pole piece and the fourth screw portion of the attachment / detachment holder are screwed together, and the outer magnetic pole 3. The scanning electron microscope according to claim 2, wherein the screwing of the first screw portion of the piece and the second screw portion of the auxiliary outer magnetic pole piece is released.   The scanning electron microscope according to any one of claims 1 to 3, wherein the detachable holder is provided with a protrusion positioned on an axis of the fourth screw portion.   5. The scanning electron according to claim 1, wherein the auxiliary outer magnetic pole piece is provided with an auxiliary inner magnetic pole piece capable of contacting the inner magnetic pole piece of the objective lens via a non-magnetic material. microscope. The electron beam generated from the electron gun is focused by the objective lens, irradiated onto the sample placed on the sample stage, scanned on the sample, and a secondary signal from the sample is detected to detect a scanned image of the sample. A method for switching the use of an objective lens of a scanning electron microscope,
A first screw portion having an optical axis of the objective lens as an axis is provided at an end of the outer magnetic pole piece of the objective lens on the sample stage side,
A second screw portion that can be screwed with the first screw portion along the circumferential direction is formed on one surface side of the inner wall surface and the outer wall surface, and on the other surface side of the inner wall surface and the outer wall surface. A third screw portion that is coaxial with the second screw portion and has a reverse threading direction, and an auxiliary outer magnetic pole piece that can be attached to and detached from the outer magnetic pole piece,
A fourth screw portion that can be screwed with the third screw portion of the auxiliary outer magnetic pole piece, and is provided on the sample stage so that an axis of the fourth screw portion coincides with a rotation center of the sample stage; A removable holder to which the auxiliary outer magnetic pole piece is removable;
In a state where the third screw portion of the auxiliary outer magnetic pole piece is screwed to the fourth screw portion of the detachable holder, and the axis of the third screw portion and the axis of the first screw portion coincide with each other, the sample stage To raise the detachable holder to bring the auxiliary outer pole piece into contact with the outer pole piece of the objective lens,
The attachment / detachment holder is rotated in one direction by rotating the sample stage, the second screw portion of the auxiliary outer magnetic pole piece is screwed to the first screw portion of the outer magnetic pole piece, and the auxiliary An objective lens application switching method for a scanning electron microscope, wherein the screwing of the third screw portion of the outer magnetic pole piece and the fourth screw portion of the detachable holder is released.

Images