JP2006190567A - Electron beam device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electron beam device not requiring skill of a user represented by a scanning electron microscope suitable for obtaining a dark-field STEM image. <P>SOLUTION: A GUI screen 40 for inputting or displaying a detected scattering angle α or a number (Z contrast Cz) corresponding to the scattering angle is arranged to the electron beam device. A pre-scan window screen 52 for obtaining and displaying a plurality of pre-scan images 52-n is arranged as an assist function for easily finding an optimum condition of the detected scattering angle α, and a means for registering the plurality of pre-scan images in compliance with the position d of a dark-field detector 14 (condition of a detected scattering angle αd) is arranged. Furthermore, an observation condition of the corresponding detected scattering angle αd is set by selecting the pre-scan image displayed on the pre-scan image 52-n on the pre-scan window screen 52. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electron beam apparatus, and more particularly to a scanning electron microscope and a similar apparatus capable of observing a scanning transmission electron microscope image (STEM image) of a sample.

  In general, an electron beam apparatus typified by a scanning electron microscope scans an electron beam on a sample, detects secondary electrons or reflected electrons emitted from the sample, and obtains a scanning electron microscope image.

  When the sample to be observed is a thin film of about 100 nm, most of the scanned electron beams pass through the sample. The electrons transmitted through the sample have different intensities and scattering angles depending on the local state of the sample, the thickness, and the type of atom. When this transmission electron is detected and displayed, a STEM image (Scanning Transmission Microscopy) can be obtained.

  There are bright field images and dark field images in STEM images, and the detected signals are different. A bright-field image is an image obtained by detecting only electrons transmitted without scattering in the sample, and a dark-field image is an image obtained by detecting electrons transmitted while scattering in the sample.

  In recent years, semiconductors have been miniaturized and multilayer structures have been developed, and the STEM method has attracted attention in order to evaluate and measure the microstructure of the cross section. In particular, the dark field STEM method capable of observing the contrast (Z contrast) caused by the difference in the atomic number of the sample has attracted attention.

  In the Z-contrast of the dark field STEM image, a larger atomic number appears brighter. In the dark field STEM method, a dark field STEM image (Z contrast) with higher contrast can be obtained by selecting a range of scattering angles according to the sample and purpose. In a general STEM apparatus, a projection lens is provided between an objective lens and a dark field transmission electron detection apparatus, and this lens current is controlled to control the detected scattering angle of transmitted electrons.

JP 2004-214065 A

  By the way, in the low acceleration STEM method with an acceleration voltage of 50 kV or less, the wavelength of incident electrons is longer than that in the high acceleration STEM method with an acceleration voltage of 100 kV or more. It is necessary to detect dark field transmitted electrons having a large scattering angle of 100 mrad or more. On the other hand, when the observation target is a relatively light element such as a polymer or an organic material, it is necessary to detect dark field transmission electrons having a small scattering angle of several hundred mrad or less.

  However, the conventional STEM apparatus has a problem that it is difficult to control a wide range of detection scattering angles necessary for the low acceleration STEM method because the projection lens for controlling the detection scattering angles is located away from the sample.

  In addition, there is no display of the detected scattering angle or an assist function for finding the optimal detected scattering angle, and there is a problem that requires skill of the user in order to acquire a dark field STEM image under optimal conditions.

  An object of the present invention is to provide an electron beam apparatus typified by a scanning electron microscope suitable for solving the above-described problems and obtaining a high-contrast dark-field STEM image without requiring user skill. To do.

  In order to solve the above problems, the present invention provides an electron beam accelerating means for accelerating an electron beam emitted from an electron source, and an electron beam focusing means for focusing an electron beam accelerated by the electron beam accelerating means on a sample. The electron beam scanning means for two-dimensionally scanning the electron beam accelerated by the electron beam acceleration means on the sample, the transmission electron detection means for detecting the transmitted electrons scattered in the sample, and the transmission electron detection means detect In order to change the detected scattering angle of the transmitted electrons scattered in the sample, a moving means for moving the relative position of the transmitted electron detecting means with respect to the electron beam focusing means and a sample image are displayed based on the detection result of the transmitted electron detecting means. An electron beam apparatus provided with a display means, wherein the transmission position of the transmission electron detection means moved by the movement means is a detected scattering angle of transmitted electrons that can be detected by the transmission electron detection means at the movement position, or Characterized in that it comprises a screen control means for generating a display unit a screen for specifying a numeric value corresponding to the detected scattering angle. As a result, a GUI (Graphical User Interface) screen that displays the detected scattering angle or a numerical value corresponding to the detected scattering angle on the display means, and the detected scattering angles respectively obtained at at least two moving positions of the transmitted electron detecting means. This GUI screen displays the relative position of the transmission electron detection means to the electron beam focusing means for optimizing the Z contrast of the dark field STEM image that differs depending on the sample and purpose. Can be displayed or set with a detected scattering angle or a numerical value corresponding to this detected scattering angle.

  The electron beam apparatus of the present invention further includes a moving means based on a desired detected scattering angle designated on the screen generated by the display means by the screen control means or a numerical value corresponding to the detected scattering angle. A movement control means for driving control is provided. Thus, as an assist function for easily finding the optimum observation conditions, a desired detection scattering angle or a numerical value corresponding to this detection scattering angle is set on the GUI screen, or transmission electron detection displayed in the pre-scan window is detected. By selecting a desired sample image from a plurality of sample images acquired corresponding to the position of the means, the moving means is driven to position the transmission electron detecting means at the moving position of the corresponding observation condition. be able to.

  According to the electron beam apparatus of the present invention, the grasping and setting operation of the relative position of the transmission electron detection means with respect to the electron beam focusing means for optimizing the Z contrast of the dark field STEM image can be detected and scattered from the GUI screen or the pre-scan window. Since it can be performed based on the angle or a numerical value corresponding to the detected scattering angle, the dark field STEM image observation with the optimum Z contrast can be easily performed, and the operability of the apparatus is improved.

  Hereinafter, an embodiment of an electron beam apparatus according to the present invention will be described with reference to the drawings, taking as an example the case where the present invention is applied to a scanning electron microscope capable of observing STEM images.

  FIG. 1 is a schematic configuration diagram of a scanning electron microscope as an embodiment of an electron beam apparatus according to the present invention. In this embodiment, the electron beam apparatus according to the present invention is applied to an in-lens type scanning electron microscope.

  In FIG. 1, a voltage of 0.5 to 30 kV is applied to the electron beam 1 emitted from the field emission electron gun 2 by the electric field of the extraction electrode 3 to which a voltage of several kV (3 to 6 kV) is applied. Accelerated by the anode (electron beam accelerating means) 4, focused by the first focusing lens (C1 lens) 5, and an unnecessary region of the beam is removed by the objective lens aperture 6. The electron beam 1 that has passed through the objective lens aperture 6 is narrowed down by the second focusing lens (C2 lens) 7 and the objective lens 11 that constitute the electron beam focusing means together with the first focusing lens 5.

  This narrowed electron beam 1 is a sample (thin film sample) having a thickness of about 100 nm disposed between the upper and lower magnetic poles 12a and 12b in the objective lens 11 by a two-stage deflection coil (electron beam scanning means) 8. 9 is scanned two-dimensionally. Secondary electrons (or reflected electrons) emitted from the sample 9 are detected by a secondary electron detector (or reflected electron detector) 10 installed above the objective lens 11. Electrons detected by the secondary electron detector (or backscattered electron detector) 10 are amplified by an amplifier (not shown) and configured by a CRT (Cathode Ray Tube) or LCD (Liquid Crystal Display) synchronized with the deflection coil 8. A scanning transmission electron microscope image (SEM image) is formed on the display unit 18.

  Further, in this scanning electron microscope, an annular dark field detector 14 is disposed close to the lower magnetic pole 12 b of the objective lens 11, and transmitted electrons scattered in the sample 9 by the dark field detector 14. , And a dark field STEM image can be formed on the display 18.

  In addition, a bright field detector 17 is disposed below the dark field detector 14, and a bright field stop 16 is provided between the dark field detector 14 and the bright field detector 17. Then, a bright field signal (non-scattered electrons + inelastically scattered electrons) 15 that has passed through the hole in the center of the annular dark field detector 14 and passed through the aperture of the bright field stop 16 is converted by the bright field detector 17. By detecting, a bright field STEM image can also be observed.

  In addition, in this apparatus, in order to optimize the Z contrast Cz of the dark field STEM image, the dark field detector 14 is moved closer to and away from the objective lens 11 (that is, the sample 9) along the optical axis. A moving mechanism 19 (which is not shown in FIG. 1) is provided. When observing the dark field STEM image, the user can operate the moving mechanism 19 to control the detection scattering angle αd of the dark field detector 14.

  FIG. 2 is a configuration diagram of an example of a moving mechanism of the dark field detector used in the scanning electron microscope of the present embodiment. 2A is a top view of a moving mechanism portion in the scanning electron microscope, and FIG. 2B is a side view of the same portion.

  In the present embodiment, the dark field detector 14 is configured to be movable along the optical axis direction together with the bright field detector 17 by a moving mechanism 19 that is motor-driven.

  In this case, the dark field detector 14 is integrally supported by the moving member 21 provided with the circular bright field detector 17 via the support column 20, and the bright field detector 17 is connected to the moving member 21 (that is, the moving field 21). The bright field detectors 17) are spaced apart from each other in the axial direction. Further, in the space between the dark field detector 14 and the bright field detector 17, a bright field stop 16 is fixedly disposed on the side surface of the mirror body (not shown). On the other hand, the moving member 21 can move along the axial direction by a screw 26 that is rotationally driven by a motor 25 in a state where the arrangement side of the bright field detector 17 is vacuum-sealed by a vacuum bellows 24 with respect to the outside of the apparatus. It is like that. Further, when the rotational drive of the screw 26 is stopped, the moving member 21 stops moving along the axial direction of the screw 26 and is held at the axial position of the screw 26 moved at that time. . The screw 26 extends along the optical axis direction of the scanning electron microscope, and guides the dark field detector 14 and the bright field detector 17 movably along the optical axis direction of the scanning electron microscope.

  Here, the detection scattering angle αd of the dark field detector 14 described above will be outlined.

  FIG. 3 is a conceptual diagram for explaining the detection scattering angle of the dark field detector in the scanning electron microscope of the present embodiment.

  In the case of the scanning electron microscope of the present embodiment, among the electrons transmitted through the sample 9 arranged between the upper and lower magnetic poles 12 a and 12 b of the objective lens 11, the transmitted electrons scattered in the sample 9 are transmitted to the objective lens 11. Detection is performed by an annular dark field detector 14 disposed below.

  Here, in FIG. 3, when the scattering angle of the transmitted electrons scattered in the sample 9 is expressed by α, the transmitted electrons reaching the annular detection surface of the dark field detector 14 among the transmitted electrons are scattered angles. α becomes a transmission electron in the range from the minimum scattering angle αmin to the maximum scattering angle αmax. Therefore, the detected scattering angle αd of the dark field detector 14 is represented by a scattering angle range from the minimum scattering angle αdmin to the detected maximum scattering angle αdmax. The detection scattering angle αd can be specified by either the detection minimum scattering angle αdmin or the detection maximum scattering angle αdmax by the configuration of the annular dark field detector 14 described above.

  By the way, this dark field detector 14 is configured such that the position d along the optical axis direction is controlled by the operation of the moving mechanism 19 described in FIG. Specifically, the moving mechanism 19 drives and controls the motor 25 shown in FIG. 2 on the basis of a control command supplied by communication from a control PC (Personal Computer) 30, whereby the dark field detector 14. The position d from the lower magnetic pole 12b of the objective lens 11 on the optical axis, that is, the distance between the sample 9 and the dark field detector 14 is controlled within a predetermined movement range (for example, 5 cm).

  Therefore, when the dark field detector 14 is located close to the objective lens 11 on the optical axis within this predetermined movement range, the dark field detector 14 detects the transmitted electrons having a large scattering angle α. In the case of being spaced from the objective lens 11 on the optical axis, transmitted electrons having a small scattering angle α can be detected well.

  Thereby, the detection scattering angle αd of the dark field detector 14 specified by the above-described minimum detection scattering angle αdmin or maximum detection scattering angle αdmax, or the level of the Z contrast Cz corresponding to this detection scattering angle αd is determined as dark field detection. It can be detected in correspondence with the position d on the optical axis of the device 14. Conversely, the position d on the optical axis of the dark field detector 14 is also the detection scattering angle αd of the dark field detector 14 that can be specified by the above-described minimum detection scattering angle αdmin or maximum detection scattering angle αdmax, or this detection. Detection is possible corresponding to the level of the Z contrast Cz corresponding to the scattering angle αd.

  Therefore, in the PC (control device) 30, the detection scattering angle αd of the dark field detector 14 or the detection scattering angle αd of the dark field detector 14 is made to correspond to each position d on the optical axis of the dark field detector 14 to be controlled. A corresponding numerical value (for example, the level of Z contrast Cz) is obtained, or is detected for each detected scattering angle αd of the dark field detector 14 or for each numerical value (for example, the level of Z contrast Cz) corresponding to the detected scattering angle αd. The position d on the optical axis of the dark field detector 14 can be obtained.

  In the scanning electron microscope of the present embodiment, this desired detection scattering angle is based on the input of the minimum detection scattering angle αdmin or maximum detection scattering angle αdmax for specifying the desired detection scattering angle αd of the dark field detector 14. The position d on the optical axis of the dark field detector 14 corresponding to αd is obtained by the PC 30, and the moving mechanism 19 shown in FIG. 2 is arranged so that the dark field detector 14 is positioned at the obtained position d on the optical axis. The control mechanism can be supplied to control the drive of the moving mechanism 19. As a result, in the scanning electron microscope of the present embodiment, the dark field detector 14 is placed on the optical axis corresponding to the desired detection scattering angle αd or the level of the Z contrast Cz corresponding to the desired detection scattering angle αd. It can be located at position d.

  Therefore, in the scanning electron microscope of the present embodiment, the PC 30 includes observation control means for controlling each part of the scanning electron microscope such as the moving mechanism 19 with respect to observation control of the dark field STEM image.

  The observation control means includes, for example, an observation calculation unit, a movement mechanism control unit, a GUI control unit, and a prescan window control unit.

  When the user inputs from the operation input device of the PC 30 or any other one of the detected minimum scattering angle αdmin and the detected maximum scattering angle αdmax is supplied as the detected scattering angle αd, the observation calculation unit detects the detected scattering. It has a configuration in which either the detection minimum scattering angle αdmin or the detection maximum scattering angle αdmax as the angle αd is obtained, and a detectable scattering angle range from the detection minimum scattering angle αdmin to the detection maximum scattering angle αdmax is obtained. .

  In addition, the observation calculation unit is configured to detect the minimum scattering angle αdmin or the maximum detection scattering angle αdmax of the dark field detector 14 set as the detection scattering angle αd by a user input from an operation input device of the PC 30, or the detected scattering. When the level of the Z contrast Cz corresponding to the angle αd is supplied, the user inputs the operation input of the PC 30 based on the supplied detected scattering angle αd or the level of the Z contrast Cz corresponding to the detected scattering angle αd. In consideration of the focus condition set by inputting from the device (for example, conditions such as the arrangement of the sample 9 on the optical axis in the objective lens 11 and the thickness of the sample 9 itself), this detected scattering angle αd or this A configuration for calculating the position d on the optical axis of the dark field detector 14 corresponding to the level of the Z contrast Cz corresponding to the detected scattering angle αd is provided.

  Further, the observation calculation unit considers the focus condition described above based on the position d on the optical axis of the dark field detector 14 supplied from the moving mechanism 19, and the dark field detector corresponding to the position d. 14 detection scattering angles αd, or a level of the Z contrast Cz corresponding to the detection scattering angle αd. The position d on the optical axis of the dark field detector 14 is, for example, on the optical axis of the dark field detector 14 using the rotation amount (number of rotations) of the screw 26 provided in the moving mechanism 19. It is detected by position detecting means for detecting the position d.

  Note that, as described above, the configuration of the observation calculation unit may employ the following configuration instead of the configuration obtained by direct calculation each time.

  For example, in the memory of the PC 30 in advance, the position d on the optical axis of the dark field detector 14 in consideration of the focus condition and the detection minimum scattering angle for defining the detection scattering angle αd are αdmin or the maximum detection scattering angle αdmax. And an observation data relationship table in which the mutual correspondence of the three values such as the level of the Z contrast Cz corresponding to the detected scattering angle αd is stored in advance. Based on the supplied position of the visual field detector 14, the detected scattering angle αd of the dark field detector 14, or any one of the supplied numerical values corresponding to the detected scattering angle αd, this supplied The remaining two types of data corresponding to one type of data can also be read out from the observation data relationship table.

  The movement mechanism control unit controls the movement mechanism 19 to move the dark field detector 14 from the position d on the optical axis at the current position to the movement position dad (dc) on the optical axis calculated by the observation calculation unit. And the control command is supplied to the moving mechanism 19 to drive and control the moving mechanism 19.

  The GUI control unit displays a dark field detector specified by the detected minimum scattering angle αdmin or the detected maximum scattering angle αdmax on the display screen of the display 18 on which a scanning transmission electron microscope image (SEM image) is formed. Display control of a GUI screen (GUI window) for setting numerical values such as 14 detected scattering angles αd or Z contrast Cz corresponding to the detected scattering angles αd, or dark field detection input on this GUI screen The detection scattering angle αd of the detector 14 or the level of the Z contrast Cz corresponding to the detected scattering angle αd is supplied as an input to the observation calculation unit, or calculated by the observation calculation unit by supplying the input to the observation calculation unit. Further, the detection scattering angle αd of the dark field detector 14 or the level of the Z contrast Cz corresponding to the detection scattering angle αd is supplied and displayed on the GUI screen of the display 18.

  The pre-scan window control unit generates one or a plurality of scan windows (pre-scan windows) having a screen size smaller than that of a normal SEM image display screen on the display unit 18, and the user performs a dark field STEM image observation. The observation location of the specimen 9 to be noticed is designated, and the dark field STEM image of the designated observation location is displayed on the scan window.

  In the scanning electron microscope of the present embodiment provided with the above-described observation control means, a GUI screen (GUI window) 40 as shown in FIG. 4 is provided for the dark field STEM image displayed on the display 18. Thus, the level display / level setting of the detected scattering angle αd and the level display / level setting of the Z contrast Cz as a numerical value corresponding to the detected scattering angle αd are realized.

  FIG. 4 is a diagram showing an example of a GUI screen displayed by the scanning electron microscope of the present embodiment.

  The GUI screen 40 according to the present embodiment has an input display window 41 for the detected scattering angle αd of the dark field detector 14 specified by the detected minimum scattering angle αdmin or the detected maximum scattering angle αdmax, and numerical values corresponding to the detected scattering angle αd. As a Z contrast Cz input display window 42, a Z contrast level adjustment slide bar 43, a registration button (Go button) 44, and a close button (Close button) 45. A window screen for setting guidance of the Z contrast Cz is formed.

  The scattering angle input display window 41 indicates the minimum detection scattering angle αdmin or maximum detection scattering angle αdmax for specifying the detection scattering angle αd of the dark field detector 14, for example, a keyboard of the PC 30, an operation input device such as a mouse. It is for inputting numerical values by operation. In the state shown in FIG. 4, the scattering angle input display window 41 is in an input reception state of the detected minimum scattering angle αdmin, and the display “MIN” of the minimum scattering angle input display window 41min is displayed. The maximum scattering angle input display window 41max indicates that the display "MAX" is in a high-luminance display state and is in an input enabled state. In the case of the scanning electron microscope of the present embodiment, because of the configuration, the detected scattering angle αd is determined by the size of the annular detection surface of the dark field detector 14, and therefore the detected scattering angle αd is displayed on the illustrated GUI screen 40. Only one window (41 min or 41 max) in the minimum scattering angle αdmin or the detected maximum scattering angle αdmax necessary for specifying the above can be input.

  The Z-contrast input display window 42 is a numerical value corresponding to the detected scattering angle αd, and the level of the Z-contrast Cz (for example, 0 to 100) caused by the difference in the atomic number of the sample. It is for inputting numerical values by operation.

  The Z contrast level adjusting slide bar 43 does not directly input the Z contrast Cz level (0 to 100) as a numerical value, but according to the movement of the slide button 43c using the operation input device described above. Therefore, it is for relatively adjusting input.

  In this embodiment, in order to obtain a high-contrast dark-field STEM image, the value of the Z-contrast Cz value needs to detect dark-field transmitted electrons with a large scattering angle α in the case of a heavy element. In the case of a light element, the dark field detector 14 is light within a predetermined range of movement of the dark field detector 14 in connection with the need to detect dark field transmitted electrons with a small scattering angle α. When the detection scattering angle αd is the smallest in the axial direction and the detection scattering angle αd is the smallest, the Z contrast Cz level is “0”, and the dark field detector 14 is in the position closest to the specimen 9 in the optical axis direction. The case where the detection scattering angle αd is the largest is expressed as the Z contrast level “100”, and is a numerical value corresponding to the detection scattering angle αd corresponding to the light weight of the element capable of obtaining a high-contrast dark field STEM image. Z The level of the level of the trust Cz is determined.

  In the following description of the scanning electron microscope of the present embodiment, for convenience, the description will be made based on the Z contrast Cz determined as described above. However, the Z contrast Cz as a numerical value corresponding to the detected scattering angle αd is described. Specific examples are not limited to the above-described notation.

  The registration button (Go button) 44 uses, for example, the scattering angle input display window 41, the Z contrast input display window 42, or the Z contrast level adjustment slide bar 43 by the above-described operation input device. Then, by registering the level of the detected minimum scattering angle αdmin or the detected maximum scattering angle αdmax or the Z contrast Cz input on the GUI screen 40 in the PC 30 provided with the observation control means as described above, this registered detection is performed. Calculation of the other of the minimum scattering angle αdmin or the detected maximum scattering angle αdmax and the level of the Z contrast Cz, or the detected minimum scattering angle αdmin and the detected maximum scattering angle αdmax corresponding to the registered Z contrast Cz level The calculation is instructed to the observation calculation unit described above, and the calculation result by the observation calculation unit is displayed on the GUI screen 40. Windows 41 and 42 for the corresponding display is intended to be displayed on the slide bar 43.

  Further, in the case of the scanning electron microscope of the present embodiment, the moving position of the dark field detector 14 on the optical axis corresponding to the registered minimum detection scattering angle αdmin or maximum detection scattering angle αdmax or the level of the Z contrast Cz. The calculation of d is instructed in addition to the observation calculation unit described above, and the movement position d on the optical axis of the dark field detector 14 calculated by the observation calculation unit is supplied to the movement mechanism control unit, and the movement mechanism control unit is darkened. A control command for moving the visual field detector 14 to the moving position d is generated, and the moving mechanism 19 is instructed to communicate.

  A close button (Close button) 45 is used to close the GUI screen 40 displayed on the screen of the display 18. The GUI screen 40 itself is opened by manual operation of a tool bar or the like displayed on the screen of the display 18 or in response to detection of a predetermined state of the scanning electron microscope controlled by the PC 30. It is configured to be able to.

  In the GUI screen 40 for adjusting the setting of the detected scattering angle αd and the Z contrast Cz according to the present embodiment, the GUI control unit provided in the PC 30 causes the scattering angle input display window 41, the Z contrast level input display. The window 42 for use and the slide bar 43 for adjusting the Z contrast level are configured such that their settings and display are linked to each other as will be described later.

  Therefore, in the GUI control unit, in the present embodiment, the level of the Z contrast Cz corresponds to the position d of the dark field detector 14 with respect to the optical axis direction with respect to the sample 9, and therefore the Z contrast Cz. From the observation condition such as the level of the above, the corresponding detection scattering angle αd and the moving position d of the dark field detector 14 are calculated or acquired from the observation calculation unit in the PC 30.

  The operation of the GUI screen 40 for setting and adjusting the detected scattering angle αd and the Z contrast will be described. According to the GUI screen 40 of the present embodiment, the setting method for the three detection scattering angles αd can be realized.

  First, as a setting method for the first detected scattering angle αd, there is a method of directly specifying a numerical value for the detected scattering angle αd. In this case, for example, the user operates either the detection minimum scattering angle input display window 41min or the detection maximum scattering angle input display window 41max on the GUI screen 40 by operating an operation input device such as a keyboard or a mouse of the PC 30. Is set in the input enabled state (high brightness display state), and the level of the minimum detection scattering angle αdmin or the maximum detection scattering angle αdmax is set numerically. Then, the user pushes the registration button (Go button) 44 on the GUI screen 40 on the screen by operating an operation input device such as a keyboard or a mouse of the PC 30.

  For example, when the GUI control unit is in an input enabled state (high brightness display state) for the detection minimum scattering angle input display window 41min on the GUI screen 40, a numerical value is input from an operation input device such as a keyboard or a mouse of the PC 30. When the setting is registered, the GUI control unit displays this numerical value in the corresponding window 41min of the scattering angle input display window 41. Further, the observation calculation unit uses the set and registered numerical value as the detection minimum scattering angle αdmin to define the position d on the optical axis of the dark field detector 14 and the detection scattering angle αd in consideration of the focus condition described above, for example. Observation data relationship table in which the mutual detection of each value of Z contrast Cz corresponding to the detected minimum scattering angle αdmin, the maximum detected scattering angle αdmax for defining the detected scattering angle αd, and the detected scattering angle αd is recorded. Therefore, the values of the position d (= dad) on the optical axis of the corresponding dark field detector 14, the maximum detected scattering angle αdmax, and the Z contrast Cz when the set registered numerical value is the minimum detection scattering angle αdmin. The read value of the maximum detected scattering angle αdmax and the Z contrast Cz is supplied to the GUI control unit, and the position d on the optical axis of the dark field detector 14 that is also read out is transferred to the mobile device. It is supplied to the control unit. When the observation calculation unit supplies the read Z contrast Cz value to the GUI control unit, the Z contrast Cz level (0 to 100) unit and on the slide bar 43 for adjusting the Z contrast level by the GUI control unit. If the coordinate level unit of the slide button 43c does not match in advance, a coordinate value obtained by converting the read Z contrast Cz value into the coordinate level unit of the slide button 43c is calculated, and this coordinate value is also read. It is configured to be supplied to the GUI control unit together with the value of Cz.

  Then, the GUI control unit receives the calculated maximum detection scattering angle αdmax and Z contrast Cz values from the observation calculation unit, and displays the maximum detection scattering angle αdmax value on the GUI screen 40. The Z contrast Cz value is displayed on the Z contrast level input display window 42, and the slide button 43c of the slide bar 43 for adjusting the Z contrast level is set to the Z contrast Cz value. Move to the corresponding bar position and redisplay.

  In addition, the movement mechanism control unit receives the calculated position d on the optical axis of the dark field detector 14 from the observation calculation unit, and generates a control command for the movement mechanism 19 for moving to the movement position d. Then, by supplying this control command to the movement mechanism 19, the movement mechanism 19 is driven and controlled.

  As a result, a scanning transmission electron microscope image (STEM image) having a detected scattering angle αd based on the detected minimum scattering angle αdmin consisting of the numerical value input as a setting is formed on the screen of the display 18, and the GUI screen 40 is further displayed. Above, the detected minimum scattering angle αdmin, detected maximum scattering angle αdmax, and Z contrast Cz at that time are displayed in the corresponding display windows 41 and 42 and the slide bar 43, respectively.

  Next, as a setting method for the second detected scattering angle αd, there is a method of directly specifying a numerical value for the level of the Z contrast Cz. In this case, for example, the user makes the Z contrast input display window 42 of the GUI screen 40 in an input enabled state (high brightness display state) by operating an operation input device such as a keyboard or a mouse of the PC 30, and then the Z contrast. Cz level (0-100) is set numerically. Then, the user pushes the registration button (Go button) 44 on the GUI screen 40 on the screen by operating an operation input device such as a keyboard or a mouse of the PC 30.

  For example, when the GUI control unit is in a state where the Z-contrast input display window 42 of the GUI screen 40 can be input (high luminance display state), the numerical value is based on the operation of the operation input device such as the keyboard and mouse of the PC 30. Is registered, the GUI control unit displays this numerical value on the window 42 for Z contrast input display. Further, the observation calculation unit detects the position d (= dad) on the optical axis of the corresponding dark field detector 14 from the above-described observation data relation table based on the numerical value of the registered Z contrast Cz. The values of the minimum scattering angle αdmin and the detected maximum scattering angle αdmax are read out, and the read out values of the detected minimum scattering angle αdmin and the detected maximum scattering angle αdmax are supplied to the GUI control unit. The position d on the optical axis is supplied to the movement mechanism control unit.

  Then, the GUI control unit receives the values of the calculated detection minimum scattering angle αdmin and the detection maximum scattering angle αdmax from the observation calculation unit, and displays these values for the detection maximum scattering angle input display on the GUI screen 40. And the slide button 43c of the slide bar 43 for adjusting the Z contrast level is moved to the bar position corresponding to the value of the input Z contrast Cz and displayed again.

  Further, the movement mechanism control unit receives the calculated movement position d on the optical axis of the dark field detector 14 from the observation calculation unit, and controls the movement mechanism 19 to move to the movement position d. Is generated, and the movement mechanism 19 is driven and controlled by using this control command as the movement mechanism 19.

  As a result, a scanning transmission electron microscope image (STEM image) of the detected scattering angle αd based on the level of the Z contrast Cz consisting of the numerical value inputted and set is formed on the screen of the display 18, and the GUI screen 40 is further displayed. Above, the detected minimum scattering angle αdmin, detected maximum scattering angle αdmax, and Z contrast Cz at that time are displayed in the corresponding display windows 41 and 42 and the slide bar 43, respectively.

  Next, as a setting method for the third detected scattering angle αd, there is a method in which the Z contrast Cz is relatively adjusted and input in accordance with the movement of the slide button 43c. In this case, for example, the user sets the slide bar 43 for adjusting the Z contrast level on the GUI screen 40 to an input enabled state (high brightness display state) by operating an operation input device such as a keyboard or a mouse of the PC 30. The slide button 43c is moved to a desired position on the slide bar 43. Then, the user pushes the registration button 44 on the GUI screen 40 on the screen by operating the operation input device such as the keyboard and mouse of the PC 30.

  For example, when the slide bar 43 for adjusting the Z contrast level on the GUI screen 40 is in an input enabled state (high brightness display state), the GUI control unit slides 43c from an operation input device such as a keyboard or mouse of the PC 30. When the location on the slide bar 43 is set and registered, the GUI control unit supplies the coordinate value on the slide bar 43 corresponding to the location to the observation calculation unit. The observation calculation unit converts the coordinate value on the slide bar 43 that has been set and registered into a numerical value of the Z contrast Cz as necessary, and based on this, the slide data on the slide bar 43 is converted from the above-described observation data relationship table. The values of the position d (= dad) on the optical axis of the dark field detector 14 corresponding to the location of the button 43c, the minimum detection scattering angle αdmin, and the maximum detection scattering angle αdmax are read, and the read minimum detection scattering angle αdmin is read out. In addition, the value of the maximum detection scattering angle αdmax is supplied to the GUI control unit, and the read position d on the optical axis of the dark field detector 14 is also supplied to the moving mechanism control unit.

  Then, the GUI control unit receives the calculated maximum detection scattering angle αdmax and Z contrast Cz values from the observation calculation unit, and displays the maximum detection scattering angle αdmax value on the GUI screen 40. On the other hand, the value of the Z contrast Cz is displayed on the window 42 for Z contrast level input display.

  In addition, the movement mechanism control unit receives the calculated position d on the optical axis of the dark field detector 14 from the observation calculation unit, and generates a control command for the movement mechanism 19 for moving to the movement position d. Then, by supplying this control command to the movement mechanism 19, the movement mechanism 19 is driven and controlled.

  As a result, a scanning transmission electron microscope image (STEM image) having a detected scattering angle αd based on the detected minimum scattering angle αdmin consisting of the numerical value input as a setting is formed on the screen of the display 18, and the GUI screen 40 is further displayed. Above, the detected minimum scattering angle αdmin, detected maximum scattering angle αdmax, and Z contrast Cz at that time are displayed in the corresponding display windows 41 and 42 and the slide bar 43, respectively.

  On the other hand, FIG. 5 is a diagram showing an example of a pre-scan window screen displayed by the scanning electron microscope of the present embodiment.

  In FIG. 5A, FIG. 5A shows an operation input device such as a keyboard and a mouse of the PC 30 on the display screen 50 of the normal dark field STEM image before the Z contrast adjustment displayed on the display 18. In this state, the user performs an operation for specifying the observation range of the scan window, specifies a desired observation position of the sample 9, and sets the scan window 51 for specifying the observation range. 5B, after that, the user performs a pre-scan window display operation, and the pre-scan window screen 52 (in the illustrated example, four pre-scan screens 52-1 to 52-4 are displayed on the display unit 18. This shows a state in which “having” is displayed.

  In the present embodiment, each of the pre-scan screens 52-1 to 52-4 has an observation screen portion 53 and an adjustment screen portion 54 for the detection scattering angle αd. The detection scattering angle αd adjustment screen unit 54 is provided with a slide bar 55 having a slide button 55c similar to the Z contrast level adjustment slide bar 43 in the GUI screen 40 described above. Note that the pre-scan window screen 52 may be displayed on the display unit 18 together with the STEM image display screen 50 before normal Z contrast adjustment on the display unit 18, or before the normal Z contrast adjustment on the display unit 18. Instead of the SEM image display screen 50 of FIG.

  Next, a setting method for the detected scattering angle αd using the pre-scan window screen 52 in the dark field STEM image observation in the scanning electron microscope of the present embodiment will be described with reference to FIG.

  FIG. 6 is a flowchart for setting control of the detected scattering angle using the pre-scan window by the scanning electron microscope of the present embodiment.

  In FIG. 6, the user places the sample 9 between the upper and lower magnetic poles 12a and 12b of the objective lens 11 of the scanning electron microscope (step S10), and starts the observation of the STEM image by predetermined operation of the operation input device of the PC 30 (step S10). Step S20). In this state, it is assumed that the dark field detector 14 is located at a predetermined initial position on the optical axis or an observation end position at the previous observation.

  When observing the dark field STEM image, the user performs a predetermined operation on the operation input device of the PC 30 to switch the display on the display 18 to the display of the dark field STEM image (step S30). Then, the user confirms the dark field STEM image displayed on the screen of the display 18, and determines whether or not the Z contrast Cz is optimized according to the sample and purpose (step S40).

  When the user determines that the dark field STEM image displayed on the screen of the display 18 is optimized for the sample or purpose, the dark field STEM acquired on the screen of the display 18 is used. The image observation is continued (step S120).

  However, when the user thinks that the dark field STEM image displayed on the screen of the display 18 is not optimized for the sample or purpose, the operation input device of the PC 30 is operated in a predetermined manner, and FIG. The setting operation of the described prescan window is performed (step S50).

  When the pre-scan window setting operation is performed, the pre-scan window control unit of the observation control unit in the PC 30 performs the following control.

  The pre-scan window control unit displays, for example, the above-described observation window designating scan window 51 on the display unit 18 and a pre-scan condition setting GUI screen (not shown) to the GUI control unit. The user is instructed to set the pre-scan conditions. Here, the scan window 51 for designating the observation range has an observation area smaller than the observation area on the display screen 50 of the normal dark field STEM image.

  Based on this guidance, the user operates the operation input device such as the keyboard and mouse of the PC 30 to move the scan window 51 to a desired location on the display screen 50 of the currently displayed dark field STEM image. Set the observation range, change the values if there are changes in the individual conditions such as the observation level range and the number of observation points displayed on the GUI screen, and change the individual conditions such as the observation level range and the number of observation points Set (step S60). In the following, as pre-scan conditions, the observation range is set by the scan window 51 as shown in FIG. 5A, and the observation level range is set to “0 to 100” at the level of the Z contrast Cz. A case where the number is set to “4” will be described as an example.

  The pre-scan window control unit performs a pre-scan of the dark field STEM image based on the registration operation of the set pre-scan conditions (Step S70).

  In this case, the prescan window control unit sets the level “0” of the Z contrast Cz obtained by dividing the observation level range “0 to 100” into approximately three equal parts from the observation level range “0 to 100” and the number of observation points “4”. ”,“ 33 ”,“ 67 ”,“ 100 ”are set as the moving positions of the dark field detector 14 for obtaining the pre-scan screens 52-1 to 52-4, and the moving mechanism control unit described above The generation of a control command for moving the dark field detector 14 to the position d on the optical axis corresponding to the level “0” of the Z contrast Cz is instructed. The movement mechanism control unit supplies the generated control command to the movement mechanism 19, and the movement mechanism 19 moves the dark field detector 14 to the position d on the optical axis corresponding to the level “0” of the Z contrast Cz. When the movement mechanism control unit receives the movement completion report based on the control command from the movement mechanism 19, the movement mechanism control unit transfers the movement completion report to the pre-scan window control unit.

  The pre-scan window control unit receives the movement completion report, and receives the dark field STEM image for at least the scan window 51 part on the display screen 50 of the dark field STEM image acquired from the GUI control unit. In order to perform scanning of the line 1 by the deflection coil 8 as the electron beam scanning means, for example, the coordinate data of the scan window 51 portion with respect to the electron beam scanning control means (not shown) that drives and controls the deflection coil 8 (not shown). Is supplied as scanning range information, the scanning range of the electron beam 1 is limited, and the sample 9 is pre-scanned.

  Further, the pre-scan window control unit outputs a dark field STEM image of the scan window 51 portion based on the output corresponding to the scanning (pre-scan) of the electron beam 1 of the scan window 51 portion of the dark field detector 14 at that time. It is acquired and stored in a storage area (not shown) for prescan screen accumulation formed in the memory of the PC 30.

  At this time, the pre-scan window control unit obtains the dark field STEM image of the acquired scan window 51 portion from the Z contrast Cz level (in this case, “ 0 ″), the position d on the optical axis of the dark field detector 14, the detection scattering angle αd of the dark field detector 14 (at least one of the detection minimum scattering angle αdmin or the detection maximum scattering angle αdmax) and Correspondingly, it is stored in a storage area for prescan screen accumulation.

  When the pre-scan window control unit completes the pre-scan for the Z-contrast Cz level “0” as described above, in this example, the Z-contrast Cz level “33” is based on the setting conditions described above. , “67” and “100” are sequentially pre-scanned, and the dark field STEM image of the scan window 51 portion acquired for each pre-scan is associated with the acquisition-related information at that time, and the memory of the PC 30 The data is sequentially stored in the storage area for storing the prescan screen formed therein.

  In addition, the pre-scan window control unit performs the dark field STEM image of the scan window 51 for each of the above-described setting conditions every time the acquisition of the dark field STEM image of the scan window 51 for each of the above-described setting conditions is completed. 5 is completed, a pre-scan window screen 52 as shown in FIG. 5B is generated based on the information stored in the storage area for the pre-scan window in the memory and displayed. It is displayed on the screen of the device 18.

  The prescan window screen 52 displays the Z contrast Cz levels “0”, “33”, “67”, “67” obtained based on the observation conditions (observation level range “0 to 100” and the number of observation points is “4”). 100 ″, four pre-scan screens 52-1 to 52-4 are provided, and the observation screen portion 53 of each of the screens 52-1 to 52-4 has an image storage area for pre-scan window screen control. The stored dark field STEM image of the corresponding scan window 51 is displayed, and the slide button 55c is associated with the dark field STEM image on the slide bar 55 as the adjustment screen unit 54 of the detection scattering angle αd. Are displayed at positions corresponding to the levels “0”, “33”, “67”, and “100” of the Z contrast Cz. To have.

  As a result, the user can darkfield STEM of the scan window 51 portion displayed on the observation screen portion 53 of each prescan screen 52-1 to 52-4 in the prescan window screen 52 displayed on the display 18. While comparing the images, it is determined whether or not there is a dark field STEM image having an optimum Z contrast Cz suitable for the sample and purpose (step S80).

  When the dark field STEM image having the optimum Z contrast Cz suitable for the sample or purpose is obtained from the prescan screens 52-1 to 52-4 of the prescan window screen 52, the user can use the keyboard and mouse of the PC 30. A corresponding prescan screen 52-n (n is any one of 1 to 4) is selected on the prescan window screen 52 using an operation input device such as (step S90).

  As a specific example, assuming that the user selects the pre-scan screen 52-2 shown in FIG. 5B, the pre-scan window control unit corresponds to the movement mechanism control unit of the pre-scan screen 52-2. Based on the acquisition related information (Z contrast Cz level “33” or the like), the generation of the control command for moving the dark field detector 14 to the position d on the optical axis defined by the acquisition related information is moved. The mechanism control unit is instructed (step S100).

  In this case, the pre-scan window control unit transmits the acquisition-related information (Z contrast Cz level “33”, etc.) corresponding to the selected pre-scan screen 52-2 together with the control command generation instruction to the movement mechanism control unit. The movement mechanism control unit generates a control command for moving the dark field detector 14 to the movement position d on the optical axis corresponding to the level of the Z contrast Cz “33”, and supplies the control command to the movement mechanism 19. To do. Thereby, the moving mechanism 19 moves, for example, on the optical axis corresponding to the moving position d (for example, the level “100” of the Z contrast Cz) on the optical axis on which the dark field detector 14 stands by after completion of the prescan. When the position d) is different from the movement position d (the movement position d on the optical axis corresponding to the level of Z contrast Cz “33”) according to the control command supplied from the movement mechanism controller, the dark field detector 14 Is moved to the movement position d by the control command supplied from the movement mechanism control unit.

  As a result, the display screen 50 of the normal dark field STEM image before the Z contrast adjustment displayed on the display 18 depends on the level “33” of the Z contrast Cz which is the setting condition of the selected prescan screen 52-2. The screen is switched to the normal dark field STEM image screen, and the observation of the optimum dark field STEM image with the Z contrast Cz level “33” is started (step S120).

  On the other hand, if an image having an optimum Z contrast Cz suitable for the sample or purpose is not obtained from the prescan screens 52-1 to 52-4 of the prescan window screen 52, the user can The pre-scan screen 52-n (n is any one of 1 to 4) close to the Z contrast Cz is selected, and the operation of the slide bar 55 on the adjustment screen unit 54 is selected using an operation input device such as a keyboard or mouse of the PC 30. The slide button 55c is moved to adjust the level of the Z contrast Cz (step S110).

  As a specific example, it is assumed that the pre-scan screen 52-3 shown in FIG. 5B is selected and the slide button 55c of the slide bar 55 on the adjustment screen portion 54 is moved and adjusted.

  When the slide button 55c of the slide bar 55 in the adjustment screen portion 54 of the prescan screen 52-3 is designated using an operation input device such as a keyboard or a mouse of the user's PC 30, first, the prescan window control unit Acquisition-related information (Z contrast Cz level “67” or the like) corresponding to the selected pre-scan screen 52-3 is supplied to the movement mechanism control unit, and the movement mechanism control unit has a Z contrast Cz level of “67”. A control command for moving the dark field detector 14 to the moving position d on the optical axis corresponding to is generated and supplied to the moving mechanism 19. Thereby, the moving mechanism 19 moves, for example, on the optical axis corresponding to the moving position d (for example, the level “100” of the Z contrast Cz) on the optical axis on which the dark field detector 14 stands by after completion of the prescan. When the position d) is different from the movement position d (movement position d on the optical axis corresponding to the level of Z contrast Cz “67”) according to the control command supplied from the movement mechanism controller, the dark field detector 14 Is moved to the movement position d by the control command supplied from the movement mechanism control unit.

  In addition, the pre-scan window control unit displays the observation screen unit 53 of the pre-scan screen 52-3 together with the movement of the dark field detector 14 for storing the pre-scan screen formed in the memory of the PC 30. Instead of the dark field STEM image of the scan window 51 portion acquired corresponding to the level “67” of the Z contrast Cz stored in the storage area, the scan window 51 portion currently acquired by the dark field detector 14 is displayed. Switch to dark field STEM image display.

  Thus, when the user designates the slide button 55c of the slide bar 55 on the prescan screen 52-3, the level of the Z contrast Cz is set to “67” in the observation screen portion 53 of the prescan screen 52-3. A dark field STEM image of the scan window 51 portion currently acquired by the dark field detector 14 after moving to the movement position d on the corresponding optical axis is displayed.

  Thereafter, when the slide button 55c of the slide bar 55 is moved using an operation input device such as a keyboard or a mouse of the user's PC 30, the pre-scan window control unit moves on the slide bar 55 supplied from the GUI control unit. The Z contrast Cz level is updated by increasing or decreasing the Z contrast Cz level from the initial “67” based on the amount of movement at, and the updated Z contrast Cz level is updated to the pre-scan screen 52-3. Is set as the moving position of the dark field detector 14 for acquiring the control signal, and the moving mechanism control unit is instructed to generate a control command for moving to the position d on the optical axis corresponding to the updated Z contrast Cz level. To do. Thereby, for example, the moving mechanism 19 moves, for example, on the optical axis corresponding to the level “67” of the Z contrast Cz on the optical axis on which the dark field detector 14 is waiting after completion of the pre-scan. The movement position d) and the movement position d by the control command newly supplied from the movement mechanism control unit (movement position d on the optical axis corresponding to a numerical value in which the level of the Z contrast Cz is increased or decreased with respect to “67”) If the difference is different from the above, the dark field detector 14 is moved to the moving position d by the control command newly supplied from the moving mechanism control unit.

  The pre-scan window control unit receives the movement completion report, and is necessary for acquiring a dark field STEM image of at least the scan window 51 portion on the display screen 50 of the dark field STEM image acquired from the GUI control unit. In order to perform scanning of the electron beam 1 by the deflection coil 8 as the electron beam scanning means, for example, the scanning window 51 portion is compared with the electron beam scanning control means (not shown) that drives and controls the deflection coil 8 (not shown). Coordinate data is supplied as scanning range information, the scanning range of the electron beam 1 is limited, and the sample 9 is pre-scanned.

  As a result, the observation screen portion 53 of the pre-scan screen 52-3 corresponds to the level of the Z contrast Cz adjusted by moving the operation input device such as the keyboard and mouse of the PC 30 of the user. The dark field STEM image of the scan window 51 portion acquired by the dark field detector 14 located at the moving position d on the optical axis corresponding to the Z contrast Cz is displayed following the display.

  Accordingly, when the user obtains the dark field STEM image of the scan window 51 portion with the optimum Z contrast Cz on the selected prescan screen 52-3, the keyboard and mouse of the PC 30 are obtained. The operation based on the operation of the slide button 55c of the dark field detector 14 is completed by selecting the pre-scan screen 52-3 again on the pre-scan window screen 52 using an operation input device such as. The level of the Z contrast Cz adjusted by the slide button 55c of the slide bar 55 of the selected prescan screen 52-3 on the display screen 50 of the dark field STEM image before the normal Z contrast adjustment displayed on the display 18 is displayed. Is displayed on the display screen 50 of the dark field STEM image of the entire sample 9 by the So that the contrast Cz dark field STEM image by an observer is started (step S120).

  As a result, the dark field STEM image varies greatly depending on the Z contrast Cz, the range of the detection scattering angle αd, or the position d of the dark field detector 14, depending on the material (constituting elements and thickness) of the sample 9. Even when it is difficult to select a dark-field STEM image having an optimum Z contrast, the prescan window screen 52 shown in FIG. 5B is used, and the prescan screens 52-1 to 52-4 are selected. By selecting the optimum pre-scan screen 52-n from the image and further adjusting the Z-contrast level of the selected pre-scan screen 52-n, the dark field STEM of the optimum Z-contrast Cz can be easily and quickly performed. Images can be acquired.

  That is, conventionally, the user manually changes the moving position d of the dark field detector 14, and the display screen 50 of the dark field STEM image of the entire sample 9 before the Z contrast adjustment is changed to the manually changed moving position d. The corresponding dark field STEM image display screen 50 of the entire sample 9 is switched to determine whether the changed dark field STEM image has the optimum Z contrast Cz. The prescan window screen 52 as described above is used. Is used, the pre-scan screen 52-n designated by the scan window 51 can be smaller than the display screen 50 for the normal dark field STEM image of the entire sample 9, and scanning, image processing, etc. Can be shortened, and an optimum Z contrast Cz can be obtained by comparing dark field STEM images with a plurality of prescan screens 52-n. Since the determination can be made, it is possible to reduce time and effort required to obtain a dark field STEM image having the optimum Z contrast Cz of the entire sample 9.

  In the case of the scanning electron microscope of the above-described embodiment, the pre-scan screens 52-1 to 52-4 are obtained by pre-scanning the moving position of the dark field detector 14 on the optical axis at four places. However, the observation conditions such as the observation level range “0 to 100” and the number of observation points “4” can be arbitrarily set by the user. For example, when the number of observation points is two or more, Any number of places is acceptable.

  In the case of the scanning electron microscope of the above-described embodiment, the adjustment screen portion 54 of each pre-scan screen 52-n in the pre-scan window screen 52 is configured to include the slide bar 55, which has been described with reference to FIG. The GUI screen 40 may be configured to include an input unit for the value of the minimum detection scattering angle αdmin or the maximum detection scattering angle αdmax.

  Further, in the case of the scanning electron microscope of the above-described embodiment, the adjustment screen portion 54 of each prescan screen 52-n displays a corresponding dark field STEM image of the scan window 51 portion on each prescan screen 52-n. After that, it is configured to be operated to adjust the Z contrast Cz of the displayed dark field STEM image. However, the dark field corresponding to the scan window 51 portion corresponds to the observation screen part 53 of each prescan screen 52-n. It is operated before the STEM image is displayed, and is used to set and register the Z contrast Cz of the corresponding dark field STEM image of the scan window 51 portion displayed on the observation screen portion 53 of each pre-scan screen 52-n. Also good.

  As described above, various modifications of the electron beam apparatus of the present invention can be considered as described above, and the specific configuration thereof is not limited to the specific configuration of the above-described embodiment. Absent.

It is a schematic block diagram of the scanning electron microscope as one Embodiment of the electron beam apparatus by this invention. It is a block diagram of one Example of the moving mechanism of the dark field detector used for the scanning electron microscope of this Embodiment. It is a conceptual diagram for demonstrating the detection scattering angle of the dark field detector in the scanning electron microscope of this Embodiment. It is the figure which showed an example of the GUI screen displayed with the scanning electron microscope of this Embodiment. It is the figure which showed an example of the pre-scan window screen displayed with the scanning electron microscope of this Embodiment. It is a flowchart about the setting control of the detection scattering angle using the pre-scan window by the scanning electron microscope of this embodiment.

Explanation of symbols

1 Electron Beam 2 Field Emission Electron Gun 3 Extraction Electrode 4 Anode 5 First Focusing Lens (C1 Lens)
6 Objective lens diaphragm 7 Second focusing lens (C2 lens)
8 Deflection coil 9 Sample (thin film sample)
DESCRIPTION OF SYMBOLS 10 Secondary electron detector 11 Objective lens 14 Dark field detector 16 Bright field stop 17 Bright field detector 18 Display 19 Movement mechanism 25 Motor 30 PC
40 GUI screen 41 Detected scattering angle αd input display window 42 Z contrast Cz input display window 43 Z contrast level slide bar 44 Registration button (Go button)
50 SEM image display screen 51 Scan window 52 Pre-scan window screen 53 Observation screen section 54 Adjustment screen section 55 Slide bar

Claims (5)

An electron beam acceleration means for accelerating the electron beam emitted from the electron source;
Electron beam focusing means for focusing the electron beam accelerated by the electron beam acceleration means on the sample;
An electron beam scanning means for two-dimensionally scanning an electron beam accelerated by the electron beam acceleration means on a sample;
A transmission electron detection means for detecting transmission electrons scattered in the sample;
Moving means for moving the relative position of the transmitted electron detection means with respect to the electron beam focusing means in order to change the detection scattering angle of the transmitted electrons scattered in the sample detected by the transmitted electron detection means;
An electron beam apparatus comprising display means for displaying a sample image based on a detection result of the transmission electron detection means,
A screen for designating a moving position of the transmitted electron detecting means moved by the moving means by a detected scattering angle of transmitted electrons that can be detected by the transmitted electron detecting means at the moving position, or a numerical value corresponding to the detected scattering angle. An electron beam apparatus comprising screen control means for generating the display means. An electron beam acceleration means for accelerating the electron beam emitted from the electron source;
Electron beam focusing means for focusing the electron beam accelerated by the electron beam acceleration means on the sample;
An electron beam scanning means for two-dimensionally scanning an electron beam accelerated by the electron beam acceleration means on a sample;
A transmission electron detection means for detecting transmission electrons scattered in the sample;
Moving means for moving the relative position of the transmitted electron detection means with respect to the electron beam focusing means in order to change the detection scattering angle of the transmitted electrons scattered in the sample detected by the transmitted electron detection means;
An electron beam apparatus comprising display means for displaying a sample image based on a detection result of the transmission electron detection means,
A screen for designating a moving position of the transmitted electron detecting means moved by the moving means by a detected scattering angle of transmitted electrons that can be detected by the transmitted electron detecting means at the moving position, or a numerical value corresponding to the detected scattering angle. Screen control means for generating the display means;
A desired control scattering angle designated on the screen generated by the screen control means on the display means, or a movement control means for driving and controlling the moving means based on a numerical value corresponding to the detected scattering angle. An electron beam apparatus characterized by comprising: The said screen control means produces | generates the pre-scan window which displays the sample image from which the detection scattering angle each acquired in the at least 2 or more moving position of the said transmission electron detection means at the said display means is characterized by the above-mentioned. The electron beam apparatus according to 1. The screen control means generates a pre-scan window on the display means for displaying sample images having different detection scattering angles respectively obtained at at least two moving positions of the transmission electron detection means,
The movement control unit is configured to detect a detection scattering angle of the selected image based on one selected image selected from sample images having different detection scattering angles of the pre-scan window generated on the display unit by the screen control unit. 3. The electron beam apparatus according to claim 2, wherein the moving means is driven and controlled so that the transmitted electron detecting means is positioned at a moving position corresponding to a numerical value corresponding to the detected scattering angle. When the screen control unit generates a pre-scan window on the display unit, the movement control unit is configured to acquire the sample image at at least two predetermined movement positions by the transmission electron detection unit. 5. The electron beam apparatus according to claim 3, wherein the moving means is driven and controlled.

Images