JP5480808B2 - 気相化学堆積によるナノ複合材料の調製方法 - Google Patents
気相化学堆積によるナノ複合材料の調製方法 Download PDFInfo
- Publication number
- JP5480808B2 JP5480808B2 JP2010517441A JP2010517441A JP5480808B2 JP 5480808 B2 JP5480808 B2 JP 5480808B2 JP 2010517441 A JP2010517441 A JP 2010517441A JP 2010517441 A JP2010517441 A JP 2010517441A JP 5480808 B2 JP5480808 B2 JP 5480808B2
- Authority
- JP
- Japan
- Prior art keywords
- nanoparticles
- injection liquid
- nanocomposite
- metal
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002114 nanocomposite Substances 0.000 title claims description 30
- 238000002360 preparation method Methods 0.000 title description 5
- 238000005234 chemical deposition Methods 0.000 title description 4
- 239000012808 vapor phase Substances 0.000 title 1
- 239000002105 nanoparticle Substances 0.000 claims description 75
- 238000000034 method Methods 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 37
- 239000007924 injection Substances 0.000 claims description 35
- 238000002347 injection Methods 0.000 claims description 35
- 239000007788 liquid Substances 0.000 claims description 35
- 239000002243 precursor Substances 0.000 claims description 26
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 238000000151 deposition Methods 0.000 claims description 21
- 230000008021 deposition Effects 0.000 claims description 18
- 239000011159 matrix material Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 238000005229 chemical vapour deposition Methods 0.000 claims description 12
- 239000002082 metal nanoparticle Substances 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 11
- 229910052697 platinum Inorganic materials 0.000 claims description 11
- 239000000243 solution Substances 0.000 claims description 11
- 150000001412 amines Chemical class 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 239000002904 solvent Substances 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 9
- 239000002131 composite material Substances 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- 239000006185 dispersion Substances 0.000 claims description 8
- 150000002825 nitriles Chemical class 0.000 claims description 8
- 239000003960 organic solvent Substances 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical group CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 claims description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 claims description 6
- JFDZBHWFFUWGJE-UHFFFAOYSA-N benzonitrile Chemical compound N#CC1=CC=CC=C1 JFDZBHWFFUWGJE-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 238000009834 vaporization Methods 0.000 claims description 6
- 230000008016 vaporization Effects 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 5
- 239000011707 mineral Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims description 4
- KDSNLYIMUZNERS-UHFFFAOYSA-N 2-methylpropanamine Chemical compound CC(C)CN KDSNLYIMUZNERS-UHFFFAOYSA-N 0.000 claims description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims description 4
- VBXBSTJDBPXOAD-UHFFFAOYSA-N acetyl acetate;platinum Chemical compound [Pt].CC(=O)OC(C)=O VBXBSTJDBPXOAD-UHFFFAOYSA-N 0.000 claims description 4
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims description 4
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 claims description 4
- -1 oxone Chemical compound 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 239000008096 xylene Substances 0.000 claims description 4
- 230000000845 anti-microbial effect Effects 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 claims description 3
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 claims description 3
- 150000002894 organic compounds Chemical class 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000010457 zeolite Substances 0.000 claims description 3
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical group CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 claims description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 claims description 2
- RFFFKMOABOFIDF-UHFFFAOYSA-N Pentanenitrile Chemical compound CCCCC#N RFFFKMOABOFIDF-UHFFFAOYSA-N 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229910021529 ammonia Inorganic materials 0.000 claims description 2
- 239000001569 carbon dioxide Substances 0.000 claims description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
- 238000000354 decomposition reaction Methods 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 239000007970 homogeneous dispersion Substances 0.000 claims description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 2
- 239000003978 infusion fluid Substances 0.000 claims description 2
- OBYVIBDTOCAXSN-UHFFFAOYSA-N n-butan-2-ylbutan-2-amine Chemical compound CCC(C)NC(C)CC OBYVIBDTOCAXSN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 2
- 239000001272 nitrous oxide Substances 0.000 claims description 2
- 229920000768 polyamine Polymers 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- FVSKHRXBFJPNKK-UHFFFAOYSA-N propionitrile Chemical compound CCC#N FVSKHRXBFJPNKK-UHFFFAOYSA-N 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 claims 3
- 229940043279 diisopropylamine Drugs 0.000 claims 1
- 239000010411 electrocatalyst Substances 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 description 13
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 239000000446 fuel Substances 0.000 description 7
- 125000002524 organometallic group Chemical group 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 5
- 239000012705 liquid precursor Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000012713 reactive precursor Substances 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- KLFRPGNCEJNEKU-FDGPNNRMSA-L (z)-4-oxopent-2-en-2-olate;platinum(2+) Chemical compound [Pt+2].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O KLFRPGNCEJNEKU-FDGPNNRMSA-L 0.000 description 1
- AKEXVWKYUAMNKL-UHFFFAOYSA-N 2,2-dimethylpropanoic acid;silver Chemical compound [Ag].CC(C)(C)C(O)=O AKEXVWKYUAMNKL-UHFFFAOYSA-N 0.000 description 1
- ZFFMLCVRJBZUDZ-UHFFFAOYSA-N 2,3-dimethylbutane Chemical group CC(C)C(C)C ZFFMLCVRJBZUDZ-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000264877 Hippospongia communis Species 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 230000001699 photocatalysis Effects 0.000 description 1
- 239000011941 photocatalyst Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
- H01M4/92—Metals of platinum group
- H01M4/925—Metals of platinum group supported on carriers, e.g. powder carriers
- H01M4/926—Metals of platinum group supported on carriers, e.g. powder carriers on carbon or graphite
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01N—PRESERVATION OF BODIES OF HUMANS OR ANIMALS OR PLANTS OR PARTS THEREOF; BIOCIDES, e.g. AS DISINFECTANTS, AS PESTICIDES OR AS HERBICIDES; PEST REPELLANTS OR ATTRACTANTS; PLANT GROWTH REGULATORS
- A01N59/00—Biocides, pest repellants or attractants, or plant growth regulators containing elements or inorganic compounds
- A01N59/16—Heavy metals; Compounds thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
- H01M4/9075—Catalytic material supported on carriers, e.g. powder carriers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Electrochemistry (AREA)
- Plant Pathology (AREA)
- Environmental Sciences (AREA)
- Zoology (AREA)
- Wood Science & Technology (AREA)
- General Health & Medical Sciences (AREA)
- Dentistry (AREA)
- Health & Medical Sciences (AREA)
- Pest Control & Pesticides (AREA)
- Agronomy & Crop Science (AREA)
- Catalysts (AREA)
- Chemical Vapour Deposition (AREA)
- Inert Electrodes (AREA)
Description
−1種または複数種のガス状反応種の基板上への移送;
−これらの反応物の表面上への吸着;
−吸着相における反応とフィルムの成長;
−揮発性副生成物の脱着;および
−ガス状生成物の移送と排気。
a)少なくとも1種の注入液体I1であって、
i)前記エレメントのうちの1つの少なくとも1種の液体前駆体、または
ii)前記エレメントのうちの1つの少なくとも1種の前駆体の有機溶媒中溶液からなる、注入液体I1の、ならびに
b)他のエレメントの固体ナノ粒子であって、注入液体I1内および/または注入液体I1とは別個の注入液体I2内の均質ディスパーションの形態で存在する、固体ナノ粒子の
同時直接液体注入により行われることを特徴とする。
i)金属ナノ粒子、酸化物ナノ粒子、炭化物ナノ粒子および窒化物ナノ粒子から選択される少なくとも1つのファミリーのナノ粒子の含有物(inclusion)を有する、金属、酸化物、炭化物もしくは窒化物マトリックスからなる連続層、または
ii)ナノ粒子の不連続ディスパーションであって、金属ナノ粒子、酸化物ナノ粒子、炭化物ナノ粒子および窒化物ナノ粒子から選択される、少なくとも2つのファミリーのナノ粒子が並置した形態であるディスパーションのいずれかからなることを特徴とする。
i)金属ナノ粒子、炭化物ナノ粒子、窒化物ナノ粒子および酸化物ナノ粒子から選択される少なくとも1つのファミリーのナノ粒子の含有物を有し、後者の酸化物は、連続マトリックスを形成する酸化物とは異なる、連続酸化物マトリックス、
ii)炭化物ナノ粒子、窒化物ナノ粒子、酸化物ナノ粒子、および連続マトリックスを形成する金属または金属合金の性質とは異なる性質の金属(または金属合金)のナノ粒子から選択される、少なくとも1つのファミリーのナノ粒子の含有物を有する、金属または金属合金の連続マトリックス、
iii)金属ナノ粒子、炭化物ナノ粒子、酸化物ナノ粒子、および連続マトリックスを形成する窒化物とは異なる性質の窒化物のナノ粒子から選択される、少なくとも1つのファミリーのナノ粒子の含有物を有する、窒化物の連続マトリックス、ならびに
iv)金属ナノ粒子、酸化物ナノ粒子、窒化物ナノ粒子、および連続マトリックスを形成する炭化物とは異なる性質の炭化物のナノ粒子から選択される、少なくとも1つのファミリーのナノ粒子の含有物を有する、炭化物の連続マトリックスからなる。
i)ナノ粒子を含む、または含まない、前駆体の化学溶液(複数可)を貯蔵するための容器(複数可)、
ii)1つまたは複数の供給ラインまたはパイプを介して前駆体の化学溶液(複数可)を貯蔵するための容器(複数可)に接続された、例えばガソリンエンジン噴射装置型のもの等の1つまたは複数の注入器であって、電子制御デバイスにより制御される注入器(複数可)、
iii)例えばアルゴン等の不活性キャリアガス用供給ラインまたはパイプ、および
iv)気化デバイス(蒸発器)。
本実施例の目的は、本発明による方法を使用して、触媒機能を有する2種類の構成要素ファミリーを有する燃料電池電極材料を調製することができることを実証することである。
−注入器周波数:3Hz;
−注入器開放時間:2ms;
−N2/O2流量:60〜240ml;
−圧力:800Pa;
−堆積時間:20分。
また、実施例1で上述した方法を、有機金属前駆体としてキシレン中1mol/lの濃度のチタンテトライソプロポキシド(TTIP)を含み、また一方で15質量%の量の50nmのナノ粒子サイズのSiO2ナノ粒子を含む化学堆積溶液を使用して、シリコンに対して繰り返した。使用した堆積条件は、以下の通りである。
−蒸発器温度:200℃;
−注入器周波数:2Hz;
−注入器開放時間:2ms;
−N2/O2流量:40〜160ml;
−圧力:800Pa;
−堆積時間:7分。
Claims (22)
- ガスの存在下での少なくとも1回の化学気相堆積ステップを含む、シリカおよび白金からなるナノ複合材を基板の表面上に形成する方法であって、前記ステップは、
a)少なくとも1種の注入液体I1であって、
i)液体の白金アセチルアセテート、または
ii)有機溶媒中に溶解した白金アセチルアセテートの溶液
からなる、注入液体I1の、ならびに
b)SiO 2 の固体ナノ粒子であって、注入液体I1内および/または注入液体I1とは別個の注入液体I2内の均質ディスパーションの形態で存在する、固体ナノ粒子の
同時直接液体注入により行われることを特徴とする方法。 - 注入液体I1用の有機溶媒が、前駆体(複数可)の分解温度未満の蒸発温度を有する溶媒から選択されることを特徴とする、請求項1に記載の方法。
- 前記溶媒が、常圧条件下で50℃から200℃(これらを含む)の蒸発温度を有する液体有機化合物から選択されることを特徴とする、請求項2に記載の方法。
- 前記溶媒が、メシチレン、シクロヘキサン、キシレン、トルエン、n−オクタン、アセチルアセトン、エタノールおよびこれらの混合物から選択されることを特徴とする、請求項2または3に記載の方法。
- 注入液体I1が、アミンおよび/またはニトリルおよび/または水をさらに含むことを特徴とする、請求項1から4のいずれか一項に記載の方法。
- 注入液体I1中のアミンおよび/またはニトリルおよび/または水の総量が、20体積%未満であることを特徴とする、請求項5に記載の方法。
- アミンが、n−ヘキシルアミン、イソブチルアミン、ジ−sec−ブチルアミン、トリエチルアミン、ベンジルアミン、エタノールアミン、ジイソプロピルアミン、ポリアミンおよびこれらの混合物から選択されることを特徴とする、請求項5または6に記載の方法。
- ニトリルが、アセトニトリル、バレロニトリル、ベンゾニトリル、プロピオニトリルおよびこれらの混合物から選択されることを特徴とする、請求項5または6に記載の方法。
- 注入液体I2が、請求項2から4のいずれか一項に記載の注入液体I1用の溶媒から選択されることを特徴とする、請求項1から8のいずれか一項に記載の方法。
- 注入液体(複数(I1およびI2)可)が気化デバイス中に導入され、それを介して、その少なくとも1つの表面が前記ナノ複合材でコーティングされるべき基板を含有する加熱堆積チャンバ中に注入液体が送られることを特徴とする、請求項1から9のいずれか一項に記載の方法。
- 堆積が、500℃以下の基板温度で行われる、請求項1から10のいずれか一項に記載の方法。
- 堆積が、大気圧下、または40Paから1000Paの圧力の真空下で行われることを特徴とする、請求項1から11のいずれか一項に記載の方法。
- プラズマ支援により行われることを特徴とする、請求項1から12のいずれか一項に記載の方法。
- 基板が高密度または多孔質であり、ガラス、シリコン、金属、スチール、セラミック、ファブリック、ゼオライトおよびポリマーから選択されることを特徴とする、請求項1から13のいずれか一項に記載の方法。
- ガスが、反応性ガスおよび/または蒸気運搬不活性ガスで構成されることを特徴とする、請求項1から14のいずれか一項に記載の方法。
- 反応性ガスが、酸素、水素、アンモニア、亜酸化窒素、二酸化炭素、オキソン、二酸化窒素およびこれらの混合物から選択されることを特徴とする、請求項15に記載の方法。
- 蒸気運搬不活性ガスが、アルゴン、窒素、ヘリウムおよびこれらの混合物から選択されることを特徴とする、請求項15に記載の方法。
- 請求項1から17のいずれか一項に記載の方法を実施することにより得ることができる担持ナノ複合材であって、
i)金属ナノ粒子または酸化物ナノ粒子のいずれか一方の含有物を有する、該金属ナノ粒子または酸化物ナノ粒子の他方を含有するマトリックスからなる連続層、または
ii)ナノ粒子の不連続ディスパーションであって、金属ナノ粒子および酸化物ナノ粒子から選択される、少なくとも2つのファミリーのナノ粒子が並置した形態であるディスパーション
のいずれかからなり、
前記金属ナノ粒子は白金アセチルアセテート、前記酸化物ナノ粒子はSiO 2 からなる
ことを特徴とする、担持ナノ複合材。 - i)前記金属ナノ粒子の含有物を有する、前記酸化物ナノ粒子の連続マトリックス、または
ii)前記酸化物ナノ粒子の含有物を有する、前記金属ナノ粒子の連続マトリックス、
からなることを特徴とする、請求項18に記載の複合材。 - 少なくとも1種の酸化物および少なくとも1種の金属を含むことを特徴とする、請求項18または19に記載の複合材。
- 銀およびチタンをベースとする請求項18から20のいずれか一項に記載のナノ複合材の、抗菌コーティングとしての使用。
- 白金および鉱物ナノ粒子をベースとする請求項18から20のいずれか一項に記載のナノ複合材の、電極触媒としての使用。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0705333 | 2007-07-23 | ||
FR0705333A FR2919308B1 (fr) | 2007-07-23 | 2007-07-23 | Procede de preparation d'un materiau nanocomposite par depot chimique en phase vapeur. |
PCT/FR2008/001061 WO2009037397A1 (fr) | 2007-07-23 | 2008-07-18 | Procede de preparation d'un materiau nanocomposite par depot chimique en phase vapeur |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010534279A JP2010534279A (ja) | 2010-11-04 |
JP5480808B2 true JP5480808B2 (ja) | 2014-04-23 |
Family
ID=39099826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010517441A Expired - Fee Related JP5480808B2 (ja) | 2007-07-23 | 2008-07-18 | 気相化学堆積によるナノ複合材料の調製方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20100166815A1 (ja) |
EP (1) | EP2183406A1 (ja) |
JP (1) | JP5480808B2 (ja) |
CN (1) | CN101784695B (ja) |
FR (1) | FR2919308B1 (ja) |
WO (1) | WO2009037397A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140263181A1 (en) | 2013-03-15 | 2014-09-18 | Jaeyoung Park | Method and apparatus for generating highly repetitive pulsed plasmas |
US9873110B2 (en) * | 2013-11-09 | 2018-01-23 | Sensiran | Method for deposition of noble metal nanoparticles on catalysts to promote same, and the compositions so produced |
FR3026024B1 (fr) * | 2014-09-24 | 2018-06-15 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Module catalytique presentant une efficacite amelioree au vieillissement |
CN105126808A (zh) | 2015-07-03 | 2015-12-09 | 河海大学 | 一种氧化铝担载型二氧化铈粉体材料的制备方法 |
CN111628151A (zh) * | 2020-06-09 | 2020-09-04 | 湖南长远锂科股份有限公司 | 一种三元正极材料的表面改性方法 |
WO2024049305A1 (en) * | 2022-08-29 | 2024-03-07 | Functional Coatings Holdings Limited | Method and apparatus for the controlled deposition of coatings on surfaces |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6338809B1 (en) * | 1997-02-24 | 2002-01-15 | Superior Micropowders Llc | Aerosol method and apparatus, particulate products, and electronic devices made therefrom |
DE19958473A1 (de) * | 1999-12-04 | 2001-06-07 | Bosch Gmbh Robert | Verfahren zur Herstellung von Kompositschichten mit einer Plasmastrahlquelle |
DE10301984B4 (de) * | 2003-01-15 | 2008-07-03 | Hahn-Meitner-Institut Berlin Gmbh | Flexible, atmungsaktive Polymerfolie |
FR2852971B1 (fr) * | 2003-03-25 | 2005-06-03 | Centre Nat Rech Scient | Procede pour le depot par cvd d'un film d'argent sur un substrat |
WO2006034717A1 (en) * | 2004-09-29 | 2006-04-06 | Danmarks Tekniske Universitet | A process for the preparation of an asymmetric membrane comprising a meso- or macro-porous substrate and a micro/meso-porous layer deposited thereon and an asymmetric membrane |
CN100351427C (zh) * | 2005-03-09 | 2007-11-28 | 西安交通大学 | 工业设备制备纳米复合超硬薄膜材料的方法 |
JP4808436B2 (ja) * | 2005-05-18 | 2011-11-02 | 株式会社神戸製鋼所 | 機能膜形成方法 |
EP1954850A2 (en) * | 2005-10-31 | 2008-08-13 | UCL Business PLC | Nanoparticle and nanocomposite films |
FR2897070B1 (fr) * | 2006-02-03 | 2008-12-19 | Commissariat Energie Atomique | Procede dli-mocvd pour la fabrication d'electrodes pour reacteurs electrochimiques, electrodes obtenues par ce procede et pile a combustible et accumulateur mettant en oeuvre de telles electrodes |
DE102006031262A1 (de) * | 2006-07-04 | 2008-01-10 | Merck Patent Gmbh | Fluortenside |
-
2007
- 2007-07-23 FR FR0705333A patent/FR2919308B1/fr not_active Expired - Fee Related
-
2008
- 2008-07-18 WO PCT/FR2008/001061 patent/WO2009037397A1/fr active Application Filing
- 2008-07-18 US US12/670,239 patent/US20100166815A1/en not_active Abandoned
- 2008-07-18 EP EP08831830A patent/EP2183406A1/fr not_active Withdrawn
- 2008-07-18 JP JP2010517441A patent/JP5480808B2/ja not_active Expired - Fee Related
- 2008-07-18 CN CN2008801040973A patent/CN101784695B/zh not_active Expired - Fee Related
-
2015
- 2015-03-12 US US14/645,832 patent/US20150188147A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN101784695B (zh) | 2012-07-18 |
EP2183406A1 (fr) | 2010-05-12 |
CN101784695A (zh) | 2010-07-21 |
FR2919308A1 (fr) | 2009-01-30 |
JP2010534279A (ja) | 2010-11-04 |
FR2919308B1 (fr) | 2009-12-11 |
US20100166815A1 (en) | 2010-07-01 |
US20150188147A1 (en) | 2015-07-02 |
WO2009037397A1 (fr) | 2009-03-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20150188147A1 (en) | Method for Preparation of a Nanocomposite Material by Vapour Phase Chemical Deposition | |
Van Bui et al. | Atomic and molecular layer deposition: off the beaten track | |
EP2155923B1 (fr) | Procede et dispositif de preparation d'un revetement multicouche sur un substrat | |
CN102026917B (zh) | 碳纳米管在碳或金属基底上的生长 | |
US9999858B2 (en) | Method for making multiple walled nested coaxial nanostructures | |
US20100055340A1 (en) | Method for Coating Core Ceramic Particles by Emulsion Flame Spray Pyrolysis | |
Liu et al. | Crystallinity-controlled synthesis of zirconium oxide thin films on nitrogen-doped carbon nanotubes by atomic layer deposition | |
Sobel et al. | Nanoscale structuring of surfaces by using atomic layer deposition | |
KR20080035581A (ko) | 나노구조화된 부재의 제조방법 및 피복방법 | |
Majimel et al. | Supercritical fluid chemical deposition as an alternative process to CVD for the surface modification of materials | |
O'Nei et al. | Reactive deposition of conformal metal oxide films from supercritical carbon dioxide | |
CN102812155A (zh) | 包含金属的复合材料 | |
TW201410574A (zh) | 固體前驅物微粒之輸送裝置 | |
Astié et al. | Direct liquid injection chemical vapor deposition | |
TW200912029A (en) | Method and apparatus for production of metal oxide thin film | |
Arya et al. | Chemical vapor deposition (CVD) technique for nanomaterials deposition | |
KR102545477B1 (ko) | 코발트가 도핑된 삼산화텅스텐 나노플레이트 및 이를 이용한 가스 센서 | |
US20230311213A1 (en) | Method and system for manufacturing nanoporous structures on a substrate | |
JP2018070437A (ja) | 結晶性ZrO2膜の製造方法および結晶性ZrO2膜 | |
Yan | Atomic Layer Deposition for Surface Modifications and Solid Film Fabrication | |
Vernardou | Advances in Chemical Vapor Deposition | |
KR101281841B1 (ko) | 금속막 형성방법 | |
JP2004103549A (ja) | 固体電解質用電極、その製造方法、その使用方法並びに固体電解質型酸素センサー及び排ガスセンサー | |
Dinelli | Development of a new methodology for Flame Spraying of colloidal suspension process for nanostructured coating production | |
KR20040099719A (ko) | 금속 및 금속화합물의 입자 코팅을 위한 유동층화학기상증착 방법 및 그 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110621 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130218 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130312 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130607 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130614 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130617 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140121 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140214 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5480808 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |