JP5477351B2 - ガスバリア積層体およびその製造方法 - Google Patents

ガスバリア積層体およびその製造方法 Download PDF

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JP5477351B2
JP5477351B2 JP2011209700A JP2011209700A JP5477351B2 JP 5477351 B2 JP5477351 B2 JP 5477351B2 JP 2011209700 A JP2011209700 A JP 2011209700A JP 2011209700 A JP2011209700 A JP 2011209700A JP 5477351 B2 JP5477351 B2 JP 5477351B2
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silicon oxide
gas barrier
thin film
oxide thin
film
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JP2013071258A (ja
JP2013071258A5 (enrdf_load_stackoverflow
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敏也 石井
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Toppan Inc
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Toppan Inc
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JP2011209700A 2011-09-26 2011-09-26 ガスバリア積層体およびその製造方法 Active JP5477351B2 (ja)

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JP2011209700A JP5477351B2 (ja) 2011-09-26 2011-09-26 ガスバリア積層体およびその製造方法

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JP2011209700A JP5477351B2 (ja) 2011-09-26 2011-09-26 ガスバリア積層体およびその製造方法

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JP2013071258A JP2013071258A (ja) 2013-04-22
JP2013071258A5 JP2013071258A5 (enrdf_load_stackoverflow) 2013-08-01
JP5477351B2 true JP5477351B2 (ja) 2014-04-23

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150086158A (ko) 2014-01-17 2015-07-27 주식회사 엘지화학 배리어 필름 및 그 제조 방법
KR101702215B1 (ko) * 2014-04-30 2017-02-06 주식회사 엘지화학 배리어 필름 및 그 제조 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10308521A (ja) * 1997-05-07 1998-11-17 Mitsubishi Chem Corp 太陽電池モジュール用保護シート
JP2000063537A (ja) * 1998-08-19 2000-02-29 Teijin Ltd ポリエステルフィルム
JP5142421B2 (ja) * 2000-06-05 2013-02-13 東レ株式会社 透明蒸着用２軸配向ポリエチレンテレフタレートフィルム
JP5412850B2 (ja) * 2009-01-28 2014-02-12 凸版印刷株式会社 ガスバリア積層体
JP5440005B2 (ja) * 2009-07-24 2014-03-12 凸版印刷株式会社 ガスバリア積層体
JP2011148139A (ja) * 2010-01-20 2011-08-04 Toppan Printing Co Ltd ガスバリア積層体

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