JP5429464B2 - 三塩化シランの精製方法 - Google Patents

三塩化シランの精製方法 Download PDF

Info

Publication number
JP5429464B2
JP5429464B2 JP2009168080A JP2009168080A JP5429464B2 JP 5429464 B2 JP5429464 B2 JP 5429464B2 JP 2009168080 A JP2009168080 A JP 2009168080A JP 2009168080 A JP2009168080 A JP 2009168080A JP 5429464 B2 JP5429464 B2 JP 5429464B2
Authority
JP
Japan
Prior art keywords
silane
trichloride
distillation
crude
boron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2009168080A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009269815A5 (enExample
JP2009269815A (ja
Inventor
進 松永
力 稲葉
満敏 生川
久幸 竹末
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP2009168080A priority Critical patent/JP5429464B2/ja
Publication of JP2009269815A publication Critical patent/JP2009269815A/ja
Publication of JP2009269815A5 publication Critical patent/JP2009269815A5/ja
Application granted granted Critical
Publication of JP5429464B2 publication Critical patent/JP5429464B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Silicon Compounds (AREA)
JP2009168080A 2009-07-16 2009-07-16 三塩化シランの精製方法 Expired - Lifetime JP5429464B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009168080A JP5429464B2 (ja) 2009-07-16 2009-07-16 三塩化シランの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009168080A JP5429464B2 (ja) 2009-07-16 2009-07-16 三塩化シランの精製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005181298A Division JP4780284B2 (ja) 2005-06-21 2005-06-21 三塩化シランの精製方法

Publications (3)

Publication Number Publication Date
JP2009269815A JP2009269815A (ja) 2009-11-19
JP2009269815A5 JP2009269815A5 (enExample) 2010-09-16
JP5429464B2 true JP5429464B2 (ja) 2014-02-26

Family

ID=41436714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009168080A Expired - Lifetime JP5429464B2 (ja) 2009-07-16 2009-07-16 三塩化シランの精製方法

Country Status (1)

Country Link
JP (1) JP5429464B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011003453A1 (de) * 2011-02-01 2012-08-02 Wacker Chemie Ag Verfahren zur destillativen Reinigung von Chlorsilanen
JP6095613B2 (ja) * 2014-07-10 2017-03-15 信越化学工業株式会社 クロロシランの精製方法
JP7477620B2 (ja) * 2020-11-05 2024-05-01 ワッカー ケミー アクチエンゲゼルシャフト クロロシラン混合物から不純物を除去する方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3173646D1 (en) * 1980-12-24 1986-03-13 Dynamit Nobel Ag Method of purifying chlorosilanes
DE3805282A1 (de) * 1988-02-19 1989-08-31 Wacker Chemitronic Verfahren zur entfernung von n-dotierenden verunreinigungen aus bei der gasphasenabscheidung von silicium anfallenden fluessigen oder gasfoermigen stoffen
JP3878278B2 (ja) * 1997-05-12 2007-02-07 株式会社トクヤマ 燐含有量の少ない多結晶シリコンの製造方法
JP4780284B2 (ja) * 2005-06-21 2011-09-28 三菱マテリアル株式会社 三塩化シランの精製方法

Also Published As

Publication number Publication date
JP2009269815A (ja) 2009-11-19

Similar Documents

Publication Publication Date Title
JP4780284B2 (ja) 三塩化シランの精製方法
JP4714197B2 (ja) トリクロロシランの製造方法および多結晶シリコンの製造方法
AU2011322027B2 (en) Method for purifying chlorosilanes
JP5311014B2 (ja) 転換反応ガスの分離回収方法。
EP2036858B1 (en) Method for purifying chlorosilanes
CN101378990B (zh) 在综合氯硅烷设备中回收高沸点化合物
US20080314728A1 (en) Process and SYSTEM for the Purification of Trichlorosilane and Silicon Tetrachloride
JP5442780B2 (ja) クロロシランの蒸留による精製方法
JP6287081B2 (ja) テトラクロロシラン回収方法及び多結晶シリコン製造方法
JP5429464B2 (ja) 三塩化シランの精製方法
JP5368909B2 (ja) クロロシラン類の精製方法
JP2005067979A (ja) クロロシラン類の精製方法
WO2011024257A1 (ja) アミン化合物によるクロロシラン類の精製
KR20170027824A (ko) 클로로실레인의 정제 방법
JP5573852B2 (ja) 不活性ガスを用いたベンディングシステムによるホウ素化合物量を低減した多結晶シリコンの製造装置および製造方法
JP5657493B2 (ja) ホウ素化合物の不純物を減じたトリクロロシラン製造方法
TWI811520B (zh) 純化氯矽烷類的製造方法
JP2021100902A (ja) 高純度トリクロロシランの精製方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090909

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100730

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110801

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120725

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120919

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130619

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130810

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20131106

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20131119

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 5429464

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term