JP2009269815A5 - - Google Patents

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Publication number
JP2009269815A5
JP2009269815A5 JP2009168080A JP2009168080A JP2009269815A5 JP 2009269815 A5 JP2009269815 A5 JP 2009269815A5 JP 2009168080 A JP2009168080 A JP 2009168080A JP 2009168080 A JP2009168080 A JP 2009168080A JP 2009269815 A5 JP2009269815 A5 JP 2009269815A5
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JP
Japan
Prior art keywords
silane
trichloride
silane trichloride
polymer
distillation apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2009168080A
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English (en)
Japanese (ja)
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JP5429464B2 (ja
JP2009269815A (ja
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Priority to JP2009168080A priority Critical patent/JP5429464B2/ja
Priority claimed from JP2009168080A external-priority patent/JP5429464B2/ja
Publication of JP2009269815A publication Critical patent/JP2009269815A/ja
Publication of JP2009269815A5 publication Critical patent/JP2009269815A5/ja
Application granted granted Critical
Publication of JP5429464B2 publication Critical patent/JP5429464B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2009168080A 2009-07-16 2009-07-16 三塩化シランの精製方法 Expired - Lifetime JP5429464B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009168080A JP5429464B2 (ja) 2009-07-16 2009-07-16 三塩化シランの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009168080A JP5429464B2 (ja) 2009-07-16 2009-07-16 三塩化シランの精製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005181298A Division JP4780284B2 (ja) 2005-06-21 2005-06-21 三塩化シランの精製方法

Publications (3)

Publication Number Publication Date
JP2009269815A JP2009269815A (ja) 2009-11-19
JP2009269815A5 true JP2009269815A5 (enExample) 2010-09-16
JP5429464B2 JP5429464B2 (ja) 2014-02-26

Family

ID=41436714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009168080A Expired - Lifetime JP5429464B2 (ja) 2009-07-16 2009-07-16 三塩化シランの精製方法

Country Status (1)

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JP (1) JP5429464B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011003453A1 (de) * 2011-02-01 2012-08-02 Wacker Chemie Ag Verfahren zur destillativen Reinigung von Chlorsilanen
JP6095613B2 (ja) * 2014-07-10 2017-03-15 信越化学工業株式会社 クロロシランの精製方法
JP7477620B2 (ja) * 2020-11-05 2024-05-01 ワッカー ケミー アクチエンゲゼルシャフト クロロシラン混合物から不純物を除去する方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3173646D1 (en) * 1980-12-24 1986-03-13 Dynamit Nobel Ag Method of purifying chlorosilanes
DE3805282A1 (de) * 1988-02-19 1989-08-31 Wacker Chemitronic Verfahren zur entfernung von n-dotierenden verunreinigungen aus bei der gasphasenabscheidung von silicium anfallenden fluessigen oder gasfoermigen stoffen
JP3878278B2 (ja) * 1997-05-12 2007-02-07 株式会社トクヤマ 燐含有量の少ない多結晶シリコンの製造方法
JP4780284B2 (ja) * 2005-06-21 2011-09-28 三菱マテリアル株式会社 三塩化シランの精製方法

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