JP5411958B2 - エピタキシャル膜形成用配向基板及びその製造方法 - Google Patents
エピタキシャル膜形成用配向基板及びその製造方法 Download PDFInfo
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- JP5411958B2 JP5411958B2 JP2012064918A JP2012064918A JP5411958B2 JP 5411958 B2 JP5411958 B2 JP 5411958B2 JP 2012064918 A JP2012064918 A JP 2012064918A JP 2012064918 A JP2012064918 A JP 2012064918A JP 5411958 B2 JP5411958 B2 JP 5411958B2
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- nickel
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- epitaxial film
- palladium
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- 239000000758 substrate Substances 0.000 title claims description 76
- 230000015572 biosynthetic process Effects 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 138
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 115
- 229910052759 nickel Inorganic materials 0.000 claims description 69
- 229910052763 palladium Inorganic materials 0.000 claims description 58
- 239000000463 material Substances 0.000 claims description 48
- 239000010949 copper Substances 0.000 claims description 43
- 229910052802 copper Inorganic materials 0.000 claims description 42
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 41
- 238000010438 heat treatment Methods 0.000 claims description 38
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 35
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 238000007747 plating Methods 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 15
- 230000001590 oxidative effect Effects 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 9
- 230000003746 surface roughness Effects 0.000 claims description 8
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 7
- 239000012779 reinforcing material Substances 0.000 claims description 7
- 230000004888 barrier function Effects 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 156
- 239000010408 film Substances 0.000 description 48
- 230000000694 effects Effects 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000005304 joining Methods 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000009499 grossing Methods 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 229920000298 Cellophane Polymers 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001295 No alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910000905 alloy phase Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- XXLDWSKFRBJLMX-UHFFFAOYSA-N carbon dioxide;carbon monoxide Chemical compound O=[C].O=C=O XXLDWSKFRBJLMX-UHFFFAOYSA-N 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910001293 incoloy Inorganic materials 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- -1 organic acid salt Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
- H10N60/0632—Intermediate layers, e.g. for growth control
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
- H10N60/855—Ceramic superconductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12583—Component contains compound of adjacent metal
- Y10T428/1259—Oxide
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
・真空度:10−5Pa
(真空槽、エッチングチャンバ内はアルゴンガス雰囲気下)
・印加電圧:2kV
・エッチング時間:5分間
・接合時加圧力:2MPa
Claims (11)
- 少なくとも片面に配向化金属層を有するエピタキシャル膜形成用配向基板において、
前記配向化金属層は、立方体集合組織を有する銅層と、前記銅層上に形成され厚さ100〜20000nmのニッケル層とからなり、
前記ニッケル層は、その表面に厚さ1〜30nmの酸化ニッケルからなる酸化ニッケル層が形成されており、
更に、前記ニッケル層は、前記酸化ニッケル層との界面に、パラジウムを含むニッケルからなるパラジウム含有領域を有するエピタキシャル膜形成用配向基板。 - 酸化ニッケル層表面の面粗さが10nm以下である請求項1記載のエピタキシャル膜形成用配向基板。
- ニッケル層のパラジウム含有領域は、その深さが50〜200nmであり、パラジウムが平均1〜25質量%、残部ニッケルで構成される請求項1又は請求項2記載のエピタキシャル膜形成用配向基板。
- 銅層は、{100}<001>立方体集合組織を有し、その表面における結晶軸のずれ角ΔφがΔφ≦6°である請求項1〜請求項3のいずれかに記載のエピタキシャル膜形成用配向基板。
- 銅層はその補強のための補強材を備える請求項1〜請求項4のいずれかに記載のエピタキシャル膜形成用配向基板。
- 請求項1〜請求項5のいずれかに記載のエピタキシャル膜形成用配向基板の配向化金属層上に、少なくとも1層の中間層と、酸化物超電導材料からなる超電導材層が形成されてなる超電導材料。
- 中間層は、少なくともバリア層及びキャップ層を有し、前記バリア層は、ジルコニウム酸化物を含む酸化物からなり、前期キャップ層は、希土類元素酸化物又は希土類元素を含む複合酸化物からなる請求項6記載の超電導材料。
- 超電導材層は、RE系超電導材料である請求項6又は請求項7記載の超電導材料。
- 請求項1〜請求項5のいずれかに記載のエピタキシャル膜形成用配向基板の製造方法であって、
立方体集合組織を有する銅層の表面に、エピタキシャル成長によりニッケル層を形成する工程と、
前記ニッケル層表面に、膜厚相当で1〜20nmのパラジウムを付加する工程と、
非酸化性雰囲気中で400℃以上に加熱して第1の熱処理を行う工程と、
更に、酸素分圧10−21〜1Paの真空雰囲気中で400℃以上に加熱して第2の熱処理を行う工程と、
を含むエピタキシャル膜形成用配向基板の製造方法。 - 銅層の表面にニッケル層を形成する工程は、メッキ法による請求項9記載のエピタキシャル膜形成用配向基板の製造方法。
- ニッケル層表面にパラジウムを付加する工程は、メッキ法による請求項9又は請求項10記載のエピタキシャル膜形成用配向基板の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012064918A JP5411958B2 (ja) | 2012-03-22 | 2012-03-22 | エピタキシャル膜形成用配向基板及びその製造方法 |
PCT/JP2013/057984 WO2013141272A1 (ja) | 2012-03-22 | 2013-03-21 | エピタキシャル膜形成用配向基板及びその製造方法 |
ES13764121.3T ES2584857T3 (es) | 2012-03-22 | 2013-03-21 | Sustrato de alineamiento para formar una película epitaxial y procedimiento para producir el mismo |
US14/381,255 US9242433B2 (en) | 2012-03-22 | 2013-03-21 | Textured substrate for epitaxial film formation, and method for manufacturing the same |
EP13764121.3A EP2829641B1 (en) | 2012-03-22 | 2013-03-21 | Alignment substrate for forming epitaxial film, and process for producing same |
KR1020147029107A KR101621642B1 (ko) | 2012-03-22 | 2013-03-21 | 에피택셜막 형성용 배향 기판 및 그 제조 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2012064918A JP5411958B2 (ja) | 2012-03-22 | 2012-03-22 | エピタキシャル膜形成用配向基板及びその製造方法 |
Publications (3)
Publication Number | Publication Date |
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JP2013196996A JP2013196996A (ja) | 2013-09-30 |
JP2013196996A5 JP2013196996A5 (ja) | 2013-11-14 |
JP5411958B2 true JP5411958B2 (ja) | 2014-02-12 |
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JP2012064918A Active JP5411958B2 (ja) | 2012-03-22 | 2012-03-22 | エピタキシャル膜形成用配向基板及びその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9242433B2 (ja) |
EP (1) | EP2829641B1 (ja) |
JP (1) | JP5411958B2 (ja) |
KR (1) | KR101621642B1 (ja) |
ES (1) | ES2584857T3 (ja) |
WO (1) | WO2013141272A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5763718B2 (ja) * | 2013-08-01 | 2015-08-12 | 中部電力株式会社 | エピタキシャル膜形成用配向基板及びその製造方法 |
CN106816227B (zh) * | 2016-12-16 | 2018-08-24 | 上海超导科技股份有限公司 | 第二代高温超导带材金属韧性模板的制备方法 |
RU2719388C1 (ru) * | 2017-05-12 | 2020-04-17 | Фудзикура Лтд. | Сверхпроводящий провод и сверхпроводящая катушка |
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JP4398582B2 (ja) * | 2000-11-15 | 2010-01-13 | 古河電気工業株式会社 | 酸化物超電導線材およびその製造方法 |
EP1271666A3 (en) * | 2001-06-22 | 2006-01-25 | Fujikura Ltd. | Oxide superconductor layer and its production method |
JP4568894B2 (ja) * | 2003-11-28 | 2010-10-27 | Dowaエレクトロニクス株式会社 | 複合導体および超電導機器システム |
JP5074083B2 (ja) | 2007-04-17 | 2012-11-14 | 中部電力株式会社 | エピタキシャル薄膜形成用のクラッド配向金属基板及びその製造方法 |
JP5324763B2 (ja) * | 2007-08-21 | 2013-10-23 | 中部電力株式会社 | エピタキシャル膜形成用配向基板及びエピタキシャル膜形成用配向基板の表面改質方法 |
JP5400416B2 (ja) * | 2009-02-20 | 2014-01-29 | 中部電力株式会社 | 超電導線材 |
-
2012
- 2012-03-22 JP JP2012064918A patent/JP5411958B2/ja active Active
-
2013
- 2013-03-21 WO PCT/JP2013/057984 patent/WO2013141272A1/ja active Application Filing
- 2013-03-21 KR KR1020147029107A patent/KR101621642B1/ko not_active IP Right Cessation
- 2013-03-21 ES ES13764121.3T patent/ES2584857T3/es active Active
- 2013-03-21 EP EP13764121.3A patent/EP2829641B1/en active Active
- 2013-03-21 US US14/381,255 patent/US9242433B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2829641A4 (en) | 2015-10-14 |
JP2013196996A (ja) | 2013-09-30 |
EP2829641B1 (en) | 2016-06-15 |
EP2829641A1 (en) | 2015-01-28 |
US20150094208A1 (en) | 2015-04-02 |
US9242433B2 (en) | 2016-01-26 |
KR20140135252A (ko) | 2014-11-25 |
WO2013141272A1 (ja) | 2013-09-26 |
ES2584857T3 (es) | 2016-09-29 |
KR101621642B1 (ko) | 2016-05-16 |
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