JP5408978B2 - 超音波モータの速度制御装置及び速度制御方法 - Google Patents

超音波モータの速度制御装置及び速度制御方法 Download PDF

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Publication number
JP5408978B2
JP5408978B2 JP2008309766A JP2008309766A JP5408978B2 JP 5408978 B2 JP5408978 B2 JP 5408978B2 JP 2008309766 A JP2008309766 A JP 2008309766A JP 2008309766 A JP2008309766 A JP 2008309766A JP 5408978 B2 JP5408978 B2 JP 5408978B2
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frequency
signal
ultrasonic motor
pwm
frequency signal
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JP2010136527A5 (enExample
JP2010136527A (ja
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寛 西川
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Canon Inc
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Canon Inc
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2008309766A 2008-12-04 2008-12-04 超音波モータの速度制御装置及び速度制御方法 Expired - Fee Related JP5408978B2 (ja)

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JP2008309766A JP5408978B2 (ja) 2008-12-04 2008-12-04 超音波モータの速度制御装置及び速度制御方法

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JP2008309766A JP5408978B2 (ja) 2008-12-04 2008-12-04 超音波モータの速度制御装置及び速度制御方法

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JP2010136527A JP2010136527A (ja) 2010-06-17
JP2010136527A5 JP2010136527A5 (enExample) 2012-01-26
JP5408978B2 true JP5408978B2 (ja) 2014-02-05

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101931341B (zh) * 2010-09-19 2012-08-08 河南科技大学 效率优化控制的超声波电机系统
CN103202708B (zh) * 2012-01-13 2015-02-11 深圳市开立科技有限公司 一种应用于彩色超声诊断仪的高压转换方法及装置
US9054606B2 (en) 2012-06-15 2015-06-09 Canon Kabushiki Kaisha Driving device and driving circuit for a vibration actuator
CN112987656B (zh) * 2019-12-18 2021-12-28 北部湾大学 一种实验室超声波生物处理频率控制系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000287467A (ja) * 1999-03-31 2000-10-13 Minolta Co Ltd 圧電アクチュエータのサーボ制御装置
JP2001119971A (ja) * 1999-10-20 2001-04-27 Canon Inc 振動波モータ駆動制御装置及び駆動制御方法
JP2007215390A (ja) * 2006-01-10 2007-08-23 Seiko Epson Corp 圧電アクチュエータの駆動制御方法、圧電アクチュエータの駆動制御装置、および電子機器

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