JP5379934B2 - ダイヤモンド・コーティングした工具およびその製造方法 - Google Patents
ダイヤモンド・コーティングした工具およびその製造方法 Download PDFInfo
- Publication number
- JP5379934B2 JP5379934B2 JP2000609625A JP2000609625A JP5379934B2 JP 5379934 B2 JP5379934 B2 JP 5379934B2 JP 2000609625 A JP2000609625 A JP 2000609625A JP 2000609625 A JP2000609625 A JP 2000609625A JP 5379934 B2 JP5379934 B2 JP 5379934B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon layer
- carbon
- diamond
- tool
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010432 diamond Substances 0.000 title claims description 106
- 229910003460 diamond Inorganic materials 0.000 title claims description 105
- 238000004519 manufacturing process Methods 0.000 title description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 178
- 229910052799 carbon Inorganic materials 0.000 claims description 172
- 239000000758 substrate Substances 0.000 claims description 38
- 239000013078 crystal Substances 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 25
- 238000000576 coating method Methods 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 14
- 238000003754 machining Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000001237 Raman spectrum Methods 0.000 description 15
- 238000005520 cutting process Methods 0.000 description 11
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 238000001069 Raman spectroscopy Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000635 electron micrograph Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- -1 argon ion Chemical class 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical group [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000003705 background correction Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19914585A DE19914585C1 (de) | 1999-03-31 | 1999-03-31 | Diamantbeschichtetes Werkzeug und Verfahren zu seiner Herstellung |
| DE19914585.7 | 1999-03-31 | ||
| PCT/EP2000/002890 WO2000060137A1 (en) | 1999-03-31 | 2000-03-31 | Diamond-coated tool and process for producing thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002540970A JP2002540970A (ja) | 2002-12-03 |
| JP2002540970A5 JP2002540970A5 (enExample) | 2007-05-24 |
| JP5379934B2 true JP5379934B2 (ja) | 2013-12-25 |
Family
ID=7903062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000609625A Expired - Lifetime JP5379934B2 (ja) | 1999-03-31 | 2000-03-31 | ダイヤモンド・コーティングした工具およびその製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1165860B1 (enExample) |
| JP (1) | JP5379934B2 (enExample) |
| AT (1) | ATE274607T1 (enExample) |
| CA (1) | CA2367184A1 (enExample) |
| DE (2) | DE19914585C1 (enExample) |
| IL (1) | IL145174A0 (enExample) |
| WO (1) | WO2000060137A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002092866A2 (de) | 2001-05-16 | 2002-11-21 | Widia Gmbh | Mit einer diamantschicht überzogener verbundwirkstoff und verfahren zu dessen herstellung |
| WO2005002742A1 (en) * | 2003-02-07 | 2005-01-13 | Diamond Innovations, Inc. | Process equipment wear surfaces of extended resistance and methods for their manufacture |
| WO2004083484A1 (de) * | 2003-03-21 | 2004-09-30 | Cemecon Ag | Körper mit glatter diamantschicht, sowie vorrichtung und verfahren |
| US7732058B2 (en) | 2005-03-16 | 2010-06-08 | Diamond Innovations, Inc. | Lubricious coatings |
| US8927101B2 (en) | 2008-09-16 | 2015-01-06 | Diamond Innovations, Inc | Abrasive particles having a unique morphology |
| MY160162A (en) | 2009-07-31 | 2017-02-28 | Diamond Innovations Inc | Precision wire including surface modified abrasive particles |
| US8590643B2 (en) | 2009-12-07 | 2013-11-26 | Element Six Limited | Polycrystalline diamond structure |
| JP2013532227A (ja) | 2010-04-30 | 2013-08-15 | セメコン アーゲー | 被覆された物体及び物体の被覆方法 |
| JP5573635B2 (ja) * | 2010-11-30 | 2014-08-20 | 三菱マテリアル株式会社 | ダイヤモンド被覆切削工具 |
| JP5590334B2 (ja) * | 2011-02-28 | 2014-09-17 | 三菱マテリアル株式会社 | ダイヤモンド被覆切削工具 |
| EP2707566B8 (en) | 2011-05-10 | 2019-04-17 | Element Six Abrasives Holdings Limited | Pick tool |
| DE102013218446A1 (de) | 2013-09-13 | 2015-03-19 | Cemecon Ag | Werkzeug sowie Verfahren zum Zerspanen von faserverstärktenMaterialien |
| JP7018391B2 (ja) * | 2015-11-27 | 2022-02-10 | セメコン アーゲー | ダイヤモンド層及び硬質材料層を有するボデーのコーティング |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3706340A1 (de) * | 1987-02-27 | 1988-09-08 | Winter & Sohn Ernst | Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis |
| EP0449571B1 (en) * | 1990-03-30 | 1995-08-30 | Sumitomo Electric Industries, Ltd. | Polycrystalline diamond tool and method for producing the polycrystalline diamond tool |
| JPH0463606A (ja) * | 1990-07-03 | 1992-02-28 | Nippon Steel Corp | 表面に非晶質炭素層を持つダイヤモンド工具 |
| JPH0499278A (ja) * | 1990-08-13 | 1992-03-31 | Sumitomo Electric Ind Ltd | ダイヤモンド被覆工具部材 |
| EP0596619A1 (en) * | 1992-11-03 | 1994-05-11 | Crystallume | Diamond-coated article with integral wearout indicator |
| EP0752293B1 (en) * | 1995-07-05 | 1999-10-20 | Ngk Spark Plug Co., Ltd | Diamond coated article and process for its production |
-
1999
- 1999-03-31 DE DE19914585A patent/DE19914585C1/de not_active Expired - Lifetime
-
2000
- 2000-03-31 WO PCT/EP2000/002890 patent/WO2000060137A1/en not_active Ceased
- 2000-03-31 DE DE60013264T patent/DE60013264T2/de not_active Expired - Lifetime
- 2000-03-31 EP EP00920642A patent/EP1165860B1/en not_active Expired - Lifetime
- 2000-03-31 IL IL14517400A patent/IL145174A0/xx unknown
- 2000-03-31 JP JP2000609625A patent/JP5379934B2/ja not_active Expired - Lifetime
- 2000-03-31 AT AT00920642T patent/ATE274607T1/de not_active IP Right Cessation
- 2000-03-31 CA CA002367184A patent/CA2367184A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002540970A (ja) | 2002-12-03 |
| DE19914585C1 (de) | 2000-09-14 |
| CA2367184A1 (en) | 2000-10-12 |
| EP1165860B1 (en) | 2004-08-25 |
| IL145174A0 (en) | 2002-06-30 |
| EP1165860A1 (en) | 2002-01-02 |
| ATE274607T1 (de) | 2004-09-15 |
| WO2000060137A1 (en) | 2000-10-12 |
| DE60013264D1 (de) | 2004-09-30 |
| DE60013264T2 (de) | 2005-08-11 |
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