JP5373815B2 - 超音波トランスデューサ用複合受動材料 - Google Patents

超音波トランスデューサ用複合受動材料 Download PDF

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Publication number
JP5373815B2
JP5373815B2 JP2010539682A JP2010539682A JP5373815B2 JP 5373815 B2 JP5373815 B2 JP 5373815B2 JP 2010539682 A JP2010539682 A JP 2010539682A JP 2010539682 A JP2010539682 A JP 2010539682A JP 5373815 B2 JP5373815 B2 JP 5373815B2
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layer
ultrasonic transducer
active acoustic
transducer array
photoresist
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Japanese (ja)
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JP2011507457A (ja
JP2011507457A5 (enExample
Inventor
アレン サダカ
ジャン アール ユアン
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Boston Scientific Scimed Inc
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Scimed Life Systems Inc
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    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004Mounting transducers, e.g. provided with mechanical moving or orienting device
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/02Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
JP2010539682A 2007-12-18 2008-12-15 超音波トランスデューサ用複合受動材料 Active JP5373815B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/959,104 US7804228B2 (en) 2007-12-18 2007-12-18 Composite passive materials for ultrasound transducers
US11/959,104 2007-12-18
PCT/US2008/086853 WO2009079467A2 (en) 2007-12-18 2008-12-15 Composite passive materials for ultrasound transducers

Publications (3)

Publication Number Publication Date
JP2011507457A JP2011507457A (ja) 2011-03-03
JP2011507457A5 JP2011507457A5 (enExample) 2012-02-09
JP5373815B2 true JP5373815B2 (ja) 2013-12-18

Family

ID=40754175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010539682A Active JP5373815B2 (ja) 2007-12-18 2008-12-15 超音波トランスデューサ用複合受動材料

Country Status (5)

Country Link
US (2) US7804228B2 (enExample)
EP (1) EP2232481B1 (enExample)
JP (1) JP5373815B2 (enExample)
CA (1) CA2709402A1 (enExample)
WO (1) WO2009079467A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009060501A (ja) * 2007-09-03 2009-03-19 Fujifilm Corp バッキング材、超音波探触子、超音波内視鏡、超音波診断装置、及び、超音波内視鏡装置
EP2236993A1 (en) * 2009-04-02 2010-10-06 Kamstrup A/S Flow meter with housing and separate unit
US8776335B2 (en) 2010-11-17 2014-07-15 General Electric Company Methods of fabricating ultrasonic transducer assemblies
US8783099B2 (en) * 2011-07-01 2014-07-22 Baker Hughes Incorporated Downhole sensors impregnated with hydrophobic material, tools including same, and related methods
WO2014138050A1 (en) * 2013-03-04 2014-09-12 Sunnybrook Health Sciences Centre System and method for measuring and correcting ultrasound phase distortions induced by aberrating media
WO2015006420A1 (en) * 2013-07-09 2015-01-15 United Technologies Corporation Vented plated polymer
US10227704B2 (en) 2013-07-09 2019-03-12 United Technologies Corporation High-modulus coating for local stiffening of airfoil trailing edges
CA2917967A1 (en) 2013-07-09 2015-01-15 United Technologies Corporation Plated polymer compressor
US11268526B2 (en) 2013-07-09 2022-03-08 Raytheon Technologies Corporation Plated polymer fan
US9789664B2 (en) 2013-07-09 2017-10-17 United Technologies Corporation Plated tubular lattice structure
WO2015006487A1 (en) 2013-07-09 2015-01-15 United Technologies Corporation Erosion and wear protection for composites and plated polymers
CA2917916A1 (en) 2013-07-09 2015-02-05 United Technologies Corporation Plated polymer nosecone
CN103691654B (zh) * 2013-12-24 2016-03-23 中国科学院上海硅酸盐研究所 低频窄脉冲超声换能器
GB2571361B (en) 2018-03-02 2020-04-22 Novosound Ltd Ultrasound array transducer manufacturing

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3021449A1 (de) * 1980-06-06 1981-12-24 Siemens AG, 1000 Berlin und 8000 München Ultraschallwandleranordnung und verfahren zu seiner herstellung
DE3478357D1 (en) * 1983-03-17 1989-06-29 Matsushita Electric Industrial Co Ltd Ultrasonic transducers having improved acoustic impedance matching layers
US4514247A (en) * 1983-08-15 1985-04-30 North American Philips Corporation Method for fabricating composite transducers
JPS60135858A (ja) 1983-12-26 1985-07-19 Toshiba Corp 超音波探触子及びその製造方法
GB8431718D0 (en) * 1984-12-15 1985-01-30 Plessey Co Plc Piezoelectric composites
DE3619871A1 (de) * 1986-06-13 1987-12-17 Siemens Ag Verfahren zur herstellung keramischen materials mit piezoelektrischen eigenschaften
US4869768A (en) * 1988-07-15 1989-09-26 North American Philips Corp. Ultrasonic transducer arrays made from composite piezoelectric materials
US4963782A (en) * 1988-10-03 1990-10-16 Ausonics Pty. Ltd. Multifrequency composite ultrasonic transducer system
US5311095A (en) * 1992-05-14 1994-05-10 Duke University Ultrasonic transducer array
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US5744898A (en) * 1992-05-14 1998-04-28 Duke University Ultrasound transducer array with transmitter/receiver integrated circuitry
JP2606249Y2 (ja) * 1993-12-21 2000-10-10 ジーイー横河メディカルシステム株式会社 超音波探触子
US5511296A (en) * 1994-04-08 1996-04-30 Hewlett Packard Company Method for making integrated matching layer for ultrasonic transducers
US5539965A (en) * 1994-06-22 1996-07-30 Rutgers, The University Of New Jersey Method for making piezoelectric composites
US5615466A (en) * 1994-06-22 1997-04-01 Rutgers University Mehtod for making piezoelectric composites
US5625149A (en) * 1994-07-27 1997-04-29 Hewlett-Packard Company Ultrasonic transductor
US6225728B1 (en) * 1994-08-18 2001-05-01 Agilent Technologies, Inc. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US5648942A (en) * 1995-10-13 1997-07-15 Advanced Technology Laboratories, Inc. Acoustic backing with integral conductors for an ultrasonic transducer
US6236144B1 (en) * 1995-12-13 2001-05-22 Gec-Marconi Limited Acoustic imaging arrays
US5844349A (en) * 1997-02-11 1998-12-01 Tetrad Corporation Composite autoclavable ultrasonic transducers and methods of making
US6043590A (en) * 1997-04-18 2000-03-28 Atl Ultrasound Composite transducer with connective backing block
JP3964508B2 (ja) * 1997-09-19 2007-08-22 株式会社日立メディコ 超音波探触子及び超音波診断装置
JP3926448B2 (ja) * 1997-12-01 2007-06-06 株式会社日立メディコ 超音波探触子及びこれを用いた超音波診断装置
JP4118381B2 (ja) * 1998-04-16 2008-07-16 株式会社日立メディコ 超音波探触子及びその製造方法並びにその超音波探触子を用いた超音波診断装置
US6183578B1 (en) * 1998-04-21 2001-02-06 Penn State Research Foundation Method for manufacture of high frequency ultrasound transducers
JP2000023297A (ja) * 1998-07-02 2000-01-21 Sumitomo Electric Ind Ltd 異方性導電材料の製造方法
US6625854B1 (en) * 1999-11-23 2003-09-30 Koninklijke Philips Electronics N.V. Ultrasonic transducer backing assembly and methods for making same
US6467138B1 (en) * 2000-05-24 2002-10-22 Vermon Integrated connector backings for matrix array transducers, matrix array transducers employing such backings and methods of making the same
US6868594B2 (en) * 2001-01-05 2005-03-22 Koninklijke Philips Electronics, N.V. Method for making a transducer
US20050225210A1 (en) * 2004-04-01 2005-10-13 Siemens Medical Solutions Usa, Inc. Z-axis electrical connection and methods for ultrasound transducers
JP4583901B2 (ja) * 2004-12-13 2010-11-17 富士フイルム株式会社 体腔内診断用超音波プローブ、および体腔内診断用超音波プローブの作製方法
CN101238506A (zh) 2005-08-08 2008-08-06 皇家飞利浦电子股份有限公司 具有聚乙烯第三匹配层的宽带矩阵换能器
US7622853B2 (en) * 2005-08-12 2009-11-24 Scimed Life Systems, Inc. Micromachined imaging transducer
US8183745B2 (en) * 2006-05-08 2012-05-22 The Penn State Research Foundation High frequency ultrasound transducers
US8946972B2 (en) 2006-08-16 2015-02-03 Siemens Medical Solutions Usa, Inc. Layer switching for an ultrasound transducer array
JP5331483B2 (ja) * 2006-11-08 2013-10-30 パナソニック株式会社 超音波探触子

Also Published As

Publication number Publication date
EP2232481A2 (en) 2010-09-29
US7804228B2 (en) 2010-09-28
CA2709402A1 (en) 2009-06-25
US20100325855A1 (en) 2010-12-30
US20090156939A1 (en) 2009-06-18
EP2232481B1 (en) 2019-01-23
WO2009079467A3 (en) 2010-04-22
JP2011507457A (ja) 2011-03-03
WO2009079467A2 (en) 2009-06-25

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