JP5367996B2 - 粘着シートの基材フィルムおよび粘着シート - Google Patents

粘着シートの基材フィルムおよび粘着シート Download PDF

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Publication number
JP5367996B2
JP5367996B2 JP2008074196A JP2008074196A JP5367996B2 JP 5367996 B2 JP5367996 B2 JP 5367996B2 JP 2008074196 A JP2008074196 A JP 2008074196A JP 2008074196 A JP2008074196 A JP 2008074196A JP 5367996 B2 JP5367996 B2 JP 5367996B2
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Prior art keywords
base film
adhesive sheet
pressure
sensitive adhesive
wafer
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Japanese (ja)
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JP2009231491A5 (enrdf_load_stackoverflow
JP2009231491A (ja
Inventor
高志 阿久津
泰史 藤本
修 山崎
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Lintec Corp
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Lintec Corp
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Priority to JP2008074196A priority Critical patent/JP5367996B2/ja
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  • Laminated Bodies (AREA)
  • Adhesive Tapes (AREA)
JP2008074196A 2008-03-21 2008-03-21 粘着シートの基材フィルムおよび粘着シート Active JP5367996B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008074196A JP5367996B2 (ja) 2008-03-21 2008-03-21 粘着シートの基材フィルムおよび粘着シート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008074196A JP5367996B2 (ja) 2008-03-21 2008-03-21 粘着シートの基材フィルムおよび粘着シート

Publications (3)

Publication Number Publication Date
JP2009231491A JP2009231491A (ja) 2009-10-08
JP2009231491A5 JP2009231491A5 (enrdf_load_stackoverflow) 2010-12-02
JP5367996B2 true JP5367996B2 (ja) 2013-12-11

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ID=41246573

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JP2008074196A Active JP5367996B2 (ja) 2008-03-21 2008-03-21 粘着シートの基材フィルムおよび粘着シート

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JP (1) JP5367996B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012054431A (ja) * 2010-09-01 2012-03-15 Nitto Denko Corp 半導体ウエハ保護用粘着シート
JP2012054432A (ja) * 2010-09-01 2012-03-15 Nitto Denko Corp 半導体ウエハ保護用粘着シート
KR101539133B1 (ko) * 2012-07-10 2015-07-23 (주)엘지하우시스 반도체 웨이퍼 표면보호 점착필름 및 그의 제조방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003174125A (ja) * 2001-09-26 2003-06-20 Nitto Denko Corp 半導体装置の製造法及びこれに用いるシート状樹脂組成物
JP4519409B2 (ja) * 2003-02-24 2010-08-04 リンテック株式会社 粘着シートおよびその使用方法
JP4942404B2 (ja) * 2006-06-21 2012-05-30 旭化成イーマテリアルズ株式会社 シート状又は円筒状印刷基材の製造方法

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JP2009231491A (ja) 2009-10-08

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