JP5357759B2 - イオンビームの磁場走査および補正のためのシステム - Google Patents
イオンビームの磁場走査および補正のためのシステム Download PDFInfo
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1475—Scanning means magnetic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/004—Charge control of objects or beams
- H01J2237/0041—Neutralising arrangements
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/05—Arrangements for energy or mass analysis
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Description
Claims (24)
- ビーム経路にそって進むイオンビームを生成するイオン源と、
上記イオン源の下流に位置し、上記イオンビームに対して質量分析を行う質量分析部と、
上記質量分析部の下流に位置し、経時変化する振動磁場を上記ビーム経路のある一部分を横切る方向に生成する磁場スキャナと、
上記磁場スキャナの入口周囲に位置し、上記ビーム経路を横切る方向に第1の磁場を生成し、かつ、第1の極性配置を有する第1の永久磁石の組と、
上記磁場スキャナの出口周囲に位置し、上記ビーム経路を横切る方向に第2の磁場を生成し、かつ、上記第1の極性配置とは逆の第2の極性配置を有する第2の永久磁石の組と、
上記磁場スキャナの下流に位置し、共通軸に平行に上記イオンビームを再度導くコリメータと、
上記コリメータの下流に位置し、上記イオンビームを受けるエンドステーションとを備え、
上記第1の磁場の強度は、第1の永久磁石の組の近傍では大きく他では弱く、
上記第2の磁場の強度は、第2の永久磁石の組の近傍では大きく他では弱い、イオン注入システム。 - 上記磁場スキャナの複数の内部表面の少なくとも一部にそって位置し、複数のカスプ磁場を生成して電子の閉じ込めを容易にする複数のカスプ磁場生成器をさらに備えている請求項1に記載のシステム。
- 上記コリメータの複数の内部表面の少なくとも一部にそって位置し、複数のカスプ磁場を生成して電子の閉じ込めを容易にする複数のカスプ磁場生成器をさらに備えている請求項1に記載のシステム。
- 上記第1の永久磁石の組は、上記磁場スキャナの入口の周囲に1対の永久磁石を備えている請求項1に記載のシステム。
- 上記第1の永久磁石の組は、上記磁場スキャナの外部に1対の永久磁石を備えている請求項1に記載のシステム。
- 上記第2の永久磁石の組は、上記磁場スキャナの出口の周囲に1対の永久磁石を備えている請求項1に記載のシステム。
- 上記第2の永久磁石の組は、上記磁場スキャナの外部に1対の永久磁石を備えている請求項1に記載のシステム。
- 上記第1の永久磁石の組は、上記磁場スキャナの内部に1対の永久磁石を備えている請求項1に記載のシステム。
- 上記第1の永久磁石の組は、上記磁場スキャナの周囲に1対の電磁石を備えている請求項1に記載のシステム。
- 上記第1の永久磁石の組は、コバルト・サマリウム化合物を含んでなる1対の永久磁石を備えている請求項1に記載のシステム。
- 上記コリメータの下流に加減速アセンブリをさらに備えている請求項1に記載のシステム。
- 磁場スキャナであって、
経時変化する振動磁場をイオンビームの経路を横切る方向に生成し、該イオンビームを走査方向へ偏向させる上側極子および下側極子と、
上記磁場スキャナの入口の周囲に位置し、上記イオンビームの経路を横切る方向に第1の磁場を生成し、かつ第1の極性配置を有する第1の永久磁石の組と、
上記磁場スキャナの出口の周囲に位置し、上記イオンビームの経路を横切る方向に第2の磁場を生成し、かつ上記第1の極性配置とは逆の第2の極性配置を有する第2の永久磁石の組とを備え、
上記第1の磁場の強度は、第1の永久磁石の組の近傍では大きく他では弱く、
上記第2の磁場の強度は、第2の永久磁石の組の近傍では大きく他では弱い、磁場スキャナ。 - 上記第1の永久磁石の組が、S極が下側極子に向き、N極が上側極子に向く1対の永久磁石を含んでなる請求項12に記載の磁場スキャナ。
- 上記第2の永久磁石の組が、S極が下側極子に向き、N極が上側極子に向く1対の永久を含んでなる請求項12に記載の磁場スキャナ。
- 経時変化する上記振動磁場は、上記上側極子および上記下側極子の内部の面に垂直である請求項12に記載の磁場スキャナ。
- 上記上側極子および上記下側極子が、上記経時変化する振動磁場を誘起する経時変化する電流が流れるコイルを含んでなる請求項12に記載の磁場スキャナ。
- 上記上側極子および上記下側極子のコイルに接続した、制御可能な電源をさらに備えている請求項16に記載の磁場スキャナ。
- 上記上側極子の内部の面と上記下側極子の内部の面とにそって位置し、電子の閉じ込めを容易にする複数のカスプ磁石をさらに備えている請求項12に記載の磁場スキャナ。
- ビーム経路にそって進むイオンビームを生成するステップと、
上記イオンビームに対して質量分析を行うステップと、
磁場スキャナの入口に第1の極性配置を有する第1の磁場を印加するステップと、
上記磁場スキャナ内部でイオンビームに対して経時変化する振動磁場を印加し、走査方向にイオンビームを走査するステップと、
上記磁場スキャナの出口に上記第1の極性配置とは逆の第2の極性配置を有する第2の磁場を印加するステップとを含み、
上記第1の磁場の強度は、磁場スキャナの入口の近傍では大きく他では弱く、
上記第2の磁場の強度は、磁場スキャナの出口の近傍では大きく他では弱い、
イオン注入システムの操作方法。 - 上記第1の磁場と上記第2の磁場とは、ゼロ場効果を緩和する方向を向いている請求項19に記載の方法。
- 上記第2の磁場を印加した後に上記イオンビームを平行光にするステップをさらに含む請求項19に記載の方法。
- 上記磁場スキャナの複数の内部表面の近傍で複数のカスプ磁場を生成して、上記イオンビームからの電子の遊離を抑制するステップをさらに含む請求項19に記載の方法。
- エンドステーションで上記イオンビームを受けるステップをさらに含む請求項19に記載の方法。
- 加工対象物の近傍で上記イオンビームのビーム電流を測定するステップをさらに含む請求項19に記載の方法。
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US11/523,148 US7615763B2 (en) | 2006-09-19 | 2006-09-19 | System for magnetic scanning and correction of an ion beam |
US11/523,148 | 2006-09-19 | ||
PCT/US2007/019903 WO2008036192A2 (en) | 2006-09-19 | 2007-09-13 | System and magnetic scanning and correction of an ion beam |
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EP (1) | EP2064728A2 (ja) |
JP (1) | JP5357759B2 (ja) |
KR (1) | KR101354633B1 (ja) |
CN (1) | CN101558469B (ja) |
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CN101558469A (zh) | 2009-10-14 |
KR20090074771A (ko) | 2009-07-07 |
TW200832486A (en) | 2008-08-01 |
KR101354633B1 (ko) | 2014-01-22 |
US7615763B2 (en) | 2009-11-10 |
WO2008036192A2 (en) | 2008-03-27 |
WO2008036192A3 (en) | 2008-05-08 |
TWI442442B (zh) | 2014-06-21 |
EP2064728A2 (en) | 2009-06-03 |
JP2010503965A (ja) | 2010-02-04 |
US20080067436A1 (en) | 2008-03-20 |
CN101558469B (zh) | 2012-06-13 |
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