JP5355091B2 - モータを用いて圧力変動を補正するためのシステムおよび方法 - Google Patents

モータを用いて圧力変動を補正するためのシステムおよび方法 Download PDF

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Publication number
JP5355091B2
JP5355091B2 JP2008543355A JP2008543355A JP5355091B2 JP 5355091 B2 JP5355091 B2 JP 5355091B2 JP 2008543355 A JP2008543355 A JP 2008543355A JP 2008543355 A JP2008543355 A JP 2008543355A JP 5355091 B2 JP5355091 B2 JP 5355091B2
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Japan
Prior art keywords
pressure
valve
volume
dispensing
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2008543355A
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English (en)
Japanese (ja)
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JP2009527674A (ja
JP2009527674A5 (zh
Inventor
ジョージ ゴネラ，
ジェームス セドロン，
レイモンド エー． ゼイガース，
ロバート エフ． マクローリン，
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Entegris Inc
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Entegris Inc
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Application filed by Entegris Inc filed Critical Entegris Inc
Publication of JP2009527674A publication Critical patent/JP2009527674A/ja
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Expired - Fee Related legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
JP2008543355A 2005-12-02 2006-11-20 モータを用いて圧力変動を補正するためのシステムおよび方法 Expired - Fee Related JP5355091B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02
US60/741,681 2005-12-02
PCT/US2006/045176 WO2007067359A2 (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012085238A Division JP5524269B2 (ja) 2005-12-02 2012-04-04 モータを用いて圧力変動を補正するためのシステムおよび方法

Publications (3)

Publication Number Publication Date
JP2009527674A JP2009527674A (ja) 2009-07-30
JP2009527674A5 JP2009527674A5 (zh) 2010-03-11
JP5355091B2 true JP5355091B2 (ja) 2013-11-27

Family

ID=38123375

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008543355A Expired - Fee Related JP5355091B2 (ja) 2005-12-02 2006-11-20 モータを用いて圧力変動を補正するためのシステムおよび方法
JP2012085238A Expired - Fee Related JP5524269B2 (ja) 2005-12-02 2012-04-04 モータを用いて圧力変動を補正するためのシステムおよび方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012085238A Expired - Fee Related JP5524269B2 (ja) 2005-12-02 2012-04-04 モータを用いて圧力変動を補正するためのシステムおよび方法

Country Status (5)

Country Link
JP (2) JP5355091B2 (zh)
KR (1) KR101243524B1 (zh)
CN (2) CN102705213A (zh)
TW (1) TWI443482B (zh)
WO (1) WO2007067359A2 (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
KR101231945B1 (ko) 2004-11-23 2013-02-08 엔테그리스, 아이엔씨. 가변 홈 위치 토출 장치용 시스템 및 방법
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
JP4845969B2 (ja) 2005-12-02 2011-12-28 エンテグリース，インコーポレイテッド ポンプ制御装置を結合する入出力システム、方法、および装置
CN101356372B (zh) 2005-12-02 2012-07-04 恩特格里公司 用于在泵中进行压力补偿的系统和方法
CN101356715B (zh) 2005-12-02 2012-07-18 恩特格里公司 用于泵中的阀的排序的系统和方法
US7897196B2 (en) 2005-12-05 2011-03-01 Entegris, Inc. Error volume system and method for a pump
TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
ATE456383T1 (de) 2006-09-28 2010-02-15 Tyco Healthcare Tragbares wundtherapiesystem
US8684705B2 (en) * 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
JP5883856B2 (ja) * 2010-06-28 2016-03-15 インテグリス・インコーポレーテッド スマートコントローラを備えたカスタマイズ可能な導出システム
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
TWI563351B (en) * 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
WO2015184057A1 (en) * 2014-05-28 2015-12-03 Entegris, Inc. System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter
WO2016103035A2 (en) 2014-12-22 2016-06-30 Smith & Nephew Plc Negative pressure wound therapy apparatus and methods
WO2017184651A1 (en) * 2016-04-19 2017-10-26 ClearMotion, Inc. Active hydraulec ripple cancellation methods and systems
WO2023084687A1 (ja) 2021-11-11 2023-05-19 旭サナック株式会社 液体噴射装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
JPH04167916A (ja) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd スプレー用給水圧力制御装置
JP3822362B2 (ja) * 1998-07-10 2006-09-20 株式会社スギノマシン 液体加圧装置
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
TW593888B (en) * 1998-11-23 2004-06-21 Mykrolis Corp Pump controller for precision pumping apparatus
US6330517B1 (en) 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
US6478547B1 (en) * 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids
JP4531328B2 (ja) * 2002-05-31 2010-08-25 株式会社タクミナ 定量搬送装置
JP3792624B2 (ja) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 粗大結晶粒組織を有する高温クリープ強度に優れたフェライト系酸化物分散強化型鋼の製造方法
JP3861060B2 (ja) * 2003-01-31 2006-12-20 日機装株式会社 無脈動ポンプ
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (ja) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 光ディスク装置

Also Published As

Publication number Publication date
CN101495756B (zh) 2012-07-04
KR20080071582A (ko) 2008-08-04
WO2007067359A2 (en) 2007-06-14
TW200732872A (en) 2007-09-01
TWI443482B (zh) 2014-07-01
WO2007067359A3 (en) 2009-04-23
JP2009527674A (ja) 2009-07-30
CN101495756A (zh) 2009-07-29
CN102705213A (zh) 2012-10-03
JP5524269B2 (ja) 2014-06-18
KR101243524B1 (ko) 2013-03-20
JP2012154337A (ja) 2012-08-16

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KR101308175B1 (ko) 분배 체적의 오차 보상 방법, 다단계 펌프, 및 시스템 컴플라이언스 보상 방법
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