KR101243524B1 - 모터를 이용한 압력 변동 보정 시스템 및 보정 방법 - Google Patents

모터를 이용한 압력 변동 보정 시스템 및 보정 방법 Download PDF

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Publication number
KR101243524B1
KR101243524B1 KR1020087013119A KR20087013119A KR101243524B1 KR 101243524 B1 KR101243524 B1 KR 101243524B1 KR 1020087013119 A KR1020087013119 A KR 1020087013119A KR 20087013119 A KR20087013119 A KR 20087013119A KR 101243524 B1 KR101243524 B1 KR 101243524B1
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KR
South Korea
Prior art keywords
pressure
dispensing
chamber
valve
volume
Prior art date
Application number
KR1020087013119A
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English (en)
Korean (ko)
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KR20080071582A (ko
Inventor
조지 고넬라
제임스 케드론
레이몬드 에이 제이거스
로버트 에프 맥러플린
Original Assignee
엔테그리스, 아이엔씨.
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Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20080071582A publication Critical patent/KR20080071582A/ko
Application granted granted Critical
Publication of KR101243524B1 publication Critical patent/KR101243524B1/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
KR1020087013119A 2005-12-02 2006-11-20 모터를 이용한 압력 변동 보정 시스템 및 보정 방법 KR101243524B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02
US60/741,681 2005-12-02
PCT/US2006/045176 WO2007067359A2 (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Publications (2)

Publication Number Publication Date
KR20080071582A KR20080071582A (ko) 2008-08-04
KR101243524B1 true KR101243524B1 (ko) 2013-03-20

Family

ID=38123375

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087013119A KR101243524B1 (ko) 2005-12-02 2006-11-20 모터를 이용한 압력 변동 보정 시스템 및 보정 방법

Country Status (5)

Country Link
JP (2) JP5355091B2 (zh)
KR (1) KR101243524B1 (zh)
CN (2) CN102705213A (zh)
TW (1) TWI443482B (zh)
WO (1) WO2007067359A2 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
KR101231945B1 (ko) 2004-11-23 2013-02-08 엔테그리스, 아이엔씨. 가변 홈 위치 토출 장치용 시스템 및 방법
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
JP4845969B2 (ja) 2005-12-02 2011-12-28 エンテグリース，インコーポレイテッド ポンプ制御装置を結合する入出力システム、方法、および装置
CN101356372B (zh) 2005-12-02 2012-07-04 恩特格里公司 用于在泵中进行压力补偿的系统和方法
CN101356715B (zh) 2005-12-02 2012-07-18 恩特格里公司 用于泵中的阀的排序的系统和方法
US7897196B2 (en) 2005-12-05 2011-03-01 Entegris, Inc. Error volume system and method for a pump
TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
ATE456383T1 (de) 2006-09-28 2010-02-15 Tyco Healthcare Tragbares wundtherapiesystem
US8684705B2 (en) * 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
JP5883856B2 (ja) * 2010-06-28 2016-03-15 インテグリス・インコーポレーテッド スマートコントローラを備えたカスタマイズ可能な導出システム
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
TWI563351B (en) * 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
WO2015184057A1 (en) * 2014-05-28 2015-12-03 Entegris, Inc. System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter
WO2016103035A2 (en) 2014-12-22 2016-06-30 Smith & Nephew Plc Negative pressure wound therapy apparatus and methods
WO2017184651A1 (en) * 2016-04-19 2017-10-26 ClearMotion, Inc. Active hydraulec ripple cancellation methods and systems
WO2023084687A1 (ja) 2021-11-11 2023-05-19 旭サナック株式会社 液体噴射装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6330517B1 (en) 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
US6478547B1 (en) 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids

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US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
JPH04167916A (ja) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd スプレー用給水圧力制御装置
JP3822362B2 (ja) * 1998-07-10 2006-09-20 株式会社スギノマシン 液体加圧装置
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
TW593888B (en) * 1998-11-23 2004-06-21 Mykrolis Corp Pump controller for precision pumping apparatus
JP4531328B2 (ja) * 2002-05-31 2010-08-25 株式会社タクミナ 定量搬送装置
JP3792624B2 (ja) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 粗大結晶粒組織を有する高温クリープ強度に優れたフェライト系酸化物分散強化型鋼の製造方法
JP3861060B2 (ja) * 2003-01-31 2006-12-20 日機装株式会社 無脈動ポンプ
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (ja) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 光ディスク装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6330517B1 (en) 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
US6478547B1 (en) 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids

Also Published As

Publication number Publication date
CN101495756B (zh) 2012-07-04
KR20080071582A (ko) 2008-08-04
WO2007067359A2 (en) 2007-06-14
TW200732872A (en) 2007-09-01
TWI443482B (zh) 2014-07-01
WO2007067359A3 (en) 2009-04-23
JP5355091B2 (ja) 2013-11-27
JP2009527674A (ja) 2009-07-30
CN101495756A (zh) 2009-07-29
CN102705213A (zh) 2012-10-03
JP5524269B2 (ja) 2014-06-18
JP2012154337A (ja) 2012-08-16

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