JP5350073B2 - Liquid crystal display device and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal display device which can prevent the line of an electric force generated from a data line from being introduced to a pixel electrode, and to improve an aperture ratio. <P>SOLUTION: A first substrate 100A includes an inorganic insulating film 15 covering the data line 12, a projected-shaped insulating organic film 21 formed on the inorganic insulating film 15 above the data line 12, and a shield common electrode 26 covering the first projected-shaped insulating organic film 21 and overlapping the data line 12 when viewed vertically. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a liquid crystal display device, and more particularly to a lateral electric field type active matrix liquid crystal display device and a manufacturing method thereof.

  In a horizontal electric field type active matrix liquid crystal display device, in order to achieve a high aperture ratio and high definition, the electric field from the data line is shielded to prevent the electric field from the data line from reaching the pixel portion, and the data Patent Documents 1 and 2 show techniques for forming a common electrode so as to cover a line.

  In addition, when this technique is used, an increase in parasitic capacitance between the common electrode and the data line becomes a problem. Therefore, in order to reduce this parasitic capacitance, as an insulating interlayer film formed between the common electrode and the data line, a colorless transparent film having a low dielectric constant (for example, a silicon nitride film (SiNx) as an inorganic film, As an organic film, a method using an acrylic film) has been proposed.

  However, when the silicon nitride film is formed by the CVD method, the film formation time is long, so that it takes a long time to obtain a thick film having a thickness of 1 μm or more. Further, in order to obtain an acrylic organic film, an expensive dedicated photolithography line such as a coating apparatus is required.

JP 11-119237 A (paragraph number 0057, FIG. 12) JP-A-10-186407 (paragraph number 0058, FIG. 4)

  35 and 36 show the structure of a conventional lateral electric field type active matrix liquid crystal display device. FIG. 35 is a plan view of a TFT substrate 100 on which a thin film transistor (hereinafter referred to as “TFT”) is formed as viewed from the liquid crystal side, and FIG. 36 is a view along the line AA ′ in FIG. It is sectional drawing of a liquid crystal display device.

  As shown in FIG. 36, the present liquid crystal display device includes a TFT substrate 100, a counter substrate 200 disposed to face the TFT substrate 100, and a liquid crystal formed between the TFT substrate 100 and the counter substrate 200. 220 layers.

  The TFT substrate 100 is formed on a first transparent substrate 101 made of glass and an upper surface of the first transparent substrate 101 (hereinafter, a surface closer to the liquid crystal 220 is referred to as an upper surface and a surface farther from the liquid crystal 220 is referred to as a lower surface). The comb-shaped common electrode 127, the gate wiring 105 (see FIG. 35) formed on the upper surface of the first transparent substrate 101, and the upper surface of the first transparent substrate 101 covering the common electrode 127 are formed. Inorganic first insulating interlayer film 106, data line 112 formed on first insulating interlayer film 106, comb-like pixel electrode 113 formed on first insulating interlayer film 106, data line 112, an inorganic second insulating interlayer film (passivation film) 115 formed on the first insulating interlayer film 106 so as to cover the pixel electrode 113, an alignment film 120 formed on the second insulating interlayer film 115, First transparent substrate 10 A polarizer 130 formed on the lower surface of, and is composed of a thin film transistor.

  The thin film transistor includes an island 109 formed in the same layer as the common electrode 127, a drain electrode 110 and a source electrode 111 formed in the same layer as the data line 112, and the gate wiring 105.

  The counter substrate 200 includes a second transparent substrate 201 made of glass, a black matrix layer 202 partially formed on the upper surface of the second transparent substrate 201, an upper surface of the second transparent substrate 201, and a black matrix layer 202. A partially formed color layer 203, a planarizing layer 204 formed so as to cover the black matrix layer 202 and the colored layer 203, an alignment film 120 formed on the planarizing layer 204, and a second transparent substrate The conductive layer 205 is formed on the lower surface of 201, and the polarizing plate 210 is formed on the conductive layer 205.

  A spacer (not shown) is sandwiched between the TFT substrate 100 and the counter substrate 200, and the layer of the liquid crystal 220 is held at a constant thickness.

  In addition, a sealing material (not shown) for preventing leakage of the liquid crystal 220 is provided around the TFT substrate 100 and the counter substrate 200.

  In the liquid crystal display device shown in FIGS. 35 and 36, the area of the common electrode 127 located beside the data line 112 is increased in order to prevent the electric lines of force generated from the data line 112 from entering the pixel electrode 113. I had to take it. For this reason, the liquid crystal display device shown in FIGS. 35 and 36 has a problem that the aperture ratio cannot be increased.

  In order to increase the aperture ratio, a method in which the common electrode 127 is formed in a layer closer to the liquid crystal 220 than the data line 112 and the data line 112 is shielded by the common electrode 127 can be considered. In this case, an organic insulating interlayer film is formed between the data line 112 and the common electrode 127 in order to reduce the coupling capacitance with the common electrode 127 as a shield layer.

  A general method for forming an organic insulating interlayer film is to apply a photosensitive organic resin liquid (hereinafter referred to as “photoresist”) liquefied with a solvent by slit coating or spin coating with a coating device. And a step of subjecting the photoresist to a photolithography process including exposure, development, and baking to obtain a desired organic film pattern shape.

  An acrylic resin is often used as a material for the organic insulating interlayer film.

Since the acrylic resin is transparent, there is a merit that it can be used for a pixel portion in a liquid crystal display device, but at the same time, it has the following demerits.
(1) In the photolithography process, the acrylic resin cannot be used in combination with the novolak resin in a general novolak photoresist coating apparatus. For this reason, the application apparatus only for acrylic resin was required.
(2) In the photolithography process, an acrylic resin developer and a novolak resin developer are different from each other. Therefore, in a general novolak photoresist developing apparatus, an acrylic resin is mixed with a novolak resin. It cannot be developed. For this reason, a developing device dedicated to acrylic resin is required.
(3) Acrylic photoresist cannot be stored at room temperature. For this reason, it was necessary to perform refrigeration storage.
(4) Acrylic photoresist has a large change over time at room temperature, and tends to thicken.
(5) Since the acrylic photoresist is easily solidified, it is inevitable that the frequency of maintenance of the coating apparatus increases.
(6) Acrylic photoresists are very expensive compared to novolac photoresists.

  On the other hand, the demerit of the novolak resin is only that the novolac resin is a colored material and cannot be used for the pixel portion of the liquid crystal display device.

  The present invention has been made in order to solve the above-described problems, and prevents a line of electric force generated from a data line from entering a pixel electrode and can increase the aperture ratio. An object of the present invention is to provide an active matrix liquid crystal display device of the type and a method for manufacturing the same.

  Furthermore, the present invention makes it possible to use a novolac organic film generally used in a photolithography process as the organic insulating interlayer film, thereby avoiding the chromaticity that is a disadvantage of the novolac organic film. It is an object of the present invention to provide a lateral electric field type active matrix liquid crystal display device and a manufacturing method thereof.

  To achieve the above object, a first substrate including a thin film transistor, a data line, a pixel electrode, and a common electrode, a second substrate, and a liquid crystal sandwiched between the first and second substrates, An image signal is applied to the thin film transistor through the data line, and an electric field is generated between the pixel electrode that has received the image signal and the common electrode, and the liquid crystal is applied to the first substrate by the electric field. In the liquid crystal display device rotating in a plane parallel to the first substrate, the first substrate includes an inorganic insulating film that covers the data line, and a projection made of a colored material that is provided on the inorganic insulating film above the data line. And a shield common electrode that covers the organic insulating film and covers the data line when viewed from above.

  A gate wiring for selecting the thin film transistor is further provided on the first substrate, and the gate wiring and the data line are connected to a gate wiring terminal electrode and a data line terminal electrode, respectively, around the first substrate, and the gate It is preferable that the wiring terminal electrode and the data line terminal electrode are respectively connected to the gate terminal extraction electrode and the data terminal extraction electrode formed simultaneously with the common electrode above the inorganic insulating film.

  The gate wiring terminal electrode and the gate terminal extraction electrode are connected to each other, and the connection portion is formed of a transparent conductive film between the gate wiring terminal electrode and the gate terminal extraction electrode. A conductive layer different from the electrode is formed, and the data line terminal electrode and the data terminal take-out electrode are connected to each other, and the data line terminal electrode and the data terminal take-out are connected to the connection portion. It is preferable that a conductive layer different from both electrodes is formed between the electrodes.

  The gate wiring terminal electrode and the gate terminal extraction electrode are connected to each other, and the connection portion is formed of an opaque conductive film between the gate wiring terminal electrode and the gate terminal extraction electrode. A conductive layer different from the electrode is formed, and the data line terminal electrode and the data terminal take-out electrode are connected to each other, and the data line terminal electrode and the data terminal take-out are connected to the connection portion. It is preferable that a conductive layer different from the two electrodes is formed between the electrodes.

  The gate wiring terminal electrode and the gate terminal lead-out electrode are connected to each other, and the connecting portion includes an opaque conductive layer and a transparent conductive layer between the gate wiring terminal electrode and the gate terminal lead-out electrode. A conductive layer different from the two electrodes is formed, the data line terminal electrode and the data terminal take-out electrode are connected to each other, and the connection portion includes the data line It is preferable that an opaque conductive layer and a transparent conductive layer are formed between the terminal electrode and the data terminal extraction electrode, and a conductive layer different from the two electrodes is formed.

  For example, the shield common electrode is made of a transparent conductive film.

  Alternatively, the shield common electrode can be composed of a laminated film of an opaque conductive film and a transparent conductive film.

  Preferably, the pixel electrode and the common electrode are formed in parallel to each other, and the pixel electrode and the common electrode are provided in the same layer.

  Alternatively, it is preferable that the pixel electrode and the common electrode are formed in parallel to each other, and the pixel electrode and the common electrode are provided in different layers.

  Alternatively, the pixel electrode and the common electrode are formed in parallel to each other, the pixel electrode and the common electrode are formed in a zigzag electrode, and the data line and the projecting organic insulating film are also in the zigzag shape. It is preferable to be provided in parallel with the electrode.

  Alternatively, the pixel electrode and the common electrode are formed in parallel to each other, the pixel electrode and the common electrode are formed in a zigzag electrode, and the data line and the projecting organic insulating film are the pixel It is preferable that the electrode and the common electrode are formed of a portion substantially parallel to the electrode and the portion substantially parallel to the rubbing direction.

  Preferably, the protruding organic insulating film is also provided on the inorganic insulating film on the gate wiring, and the shield common electrode covers the protruding organic insulating film.

  It is preferable that the projecting organic insulating film is also provided on the inorganic insulating film on the thin film transistor, and the projecting organic insulating film is covered with the shield common electrode.

  Preferably, the protruding organic insulating film is formed on the inorganic insulating film on the data line except in the vicinity of the gate wiring, and the shielded common electrode covers the protruding organic insulating film.

  The shield common electrodes of vertically adjacent pixels controlled by different scanning lines are electrically connected to each other, and a portion connecting the shield common electrodes to each other is a conductive layer forming the shield common electrode. The layer is preferably formed at a position that does not overlap the data line.

  It is preferable that the portion connecting the shield common electrodes of the vertically adjacent pixels covers 60% or more of the gate lines not shielded by other conductive layers in each pixel.

  The protruding organic insulating film preferably has a liquid crystal side surface covered with the shield common electrode.

  The second substrate is provided with a black matrix layer, a color layer, and a planarization film that covers the black matrix and the color layer, and the thickness of the planarization film is 1.5 μm or more. preferable.

  Preferably, the second substrate is provided with a black matrix layer, and the resistivity of the black matrix layer is 1E9 Ω · cm or more.

  It is preferable that a light shielding film in which two different color layers are stacked is formed at a position facing the data line of the second substrate.

  According to the present invention, a liquid crystal is sandwiched between the first substrate and the second substrate, gate lines and data lines intersecting each other are formed on the first substrate, and the gate lines and the data lines intersect. The thin film transistor is formed correspondingly, the source electrode of the thin film transistor is formed, the pixel electrode is formed at the same time, and the common electrode parallel to the pixel electrode is formed. A protruding organic insulating film made of a colored material, which is formed on the liquid crystal side of the data line so as to cover the data line, and the common electrode is provided on the inorganic insulating film on the data line A method for manufacturing a liquid crystal display device is provided, wherein the liquid crystal display device is formed into a shape having a shield common electrode covering the substrate.

  According to the present invention, a liquid crystal is sandwiched between the first substrate and the second substrate, gate lines and data lines intersecting each other are formed on the first substrate, and the gate lines and the data lines intersect. Corresponding to the above, forming a pixel electrode connected to the source electrode of the thin film transistor, and forming a common electrode parallel to the pixel electrode, wherein the common electrode is the An organic insulating film made of a colored material that is formed on the liquid crystal side of the data line so as to cover the data line, and the common electrode is provided on the inorganic insulating film on the data line. A method of manufacturing a liquid crystal display device is provided, wherein the pixel electrode is formed simultaneously with the common electrode.

  The protruding organic insulating film is preferably shielded from the outside by covering the liquid crystal side surface with the shield common electrode.

  Preferably, the protruding organic insulating film is made of a novolac resin, a novolac resin protrusion is formed on the inorganic insulating film, and the protrusion is baked at a temperature in the range of 200 to 270 ° C. for 30 to 120 minutes. .

  Prior to the firing of the novolac resin, it is preferable to heat-treat the protrusions at a temperature in the range of 100 to 150 ° C. for 30 seconds to 15 minutes.

  The baking of the novolac resin is preferably performed at a desired temperature within a range of 200 to 270 ° C. at a temperature rising rate of 5 ° C./min to 15 ° C./min.

  The firing of the novolac resin is preferably performed by providing a constant temperature heating time of 100 to 150 ° C. during the course of firing the novolac resin at a temperature in the range of 200 to 270 ° C.

  According to the present invention, the following effects can be obtained.

  First, since the common electrode has a shield common electrode located on the liquid crystal side of the data line and covering the data line, and covering the protruding organic insulating film provided on the inorganic insulating film on the data line, The electric lines of force from the data lines can be terminated by the shield common electrode. As a result, the pixel electrode can be arranged in the vicinity of the data line, and the aperture ratio can be improved.

  Second, by applying a novolac resin (and similar material) organic film to the insulating interlayer film of the TFT substrate, the parasitic capacitance between the common electrode shielding the data line and the data line can be reduced. Thus, signal delay and power consumption can be suppressed. In addition, when a novolac organic interlayer film is formed on the gate line and is shielded by a common electrode, the parasitic capacitance of the gate line can be reduced, and flicker and pixel writing in-plane failure caused by delay of the gate line can be reduced. Uniformity can be suppressed.

  Third, a TFT substrate can be manufactured at a low cost by using a novolak photoresist that is less expensive than an acrylic photoresist.

  Fourth, in order to minimize the area occupied by the organic film as the interlayer insulating film on the TFT substrate and not to arrange the organic film in the pixel part, the film quality of the comb electrode made of the transparent conductive film arranged in the pixel part is It becomes possible to improve, and it becomes possible to form a comb-tooth electrode pattern accurately.

  Fifth, by covering an electrode made of a metal having atmospheric corrosivity such as molybdenum (Mo) or copper (Cu) with an organic insulating film, exposure to the atmosphere is prevented and the anticorrosion performance of the electrode is greatly improved. Is possible.

  Sixth, by covering an electrode made of a metal having atmospheric corrosive properties such as molybdenum (Mo) and copper (Cu) with a two-layer transparent conductive film, exposure to the atmosphere is prevented and the anticorrosion performance of the electrode is greatly increased. It becomes possible to improve.

In the liquid crystal display device which concerns on the 1st Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 2 is a cross-sectional view taken along line A-A ′ of FIG. 1 in the liquid crystal display device according to the first embodiment of the present invention. FIG. 3A is a partial plan view showing the shape of the data line, and FIG. 3B is an enlarged view of the rectangular region S surrounded by the dotted line in FIG. c) is a partial plan view showing another example of the shape of the data line. In the liquid crystal display device which concerns on the 2nd Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 5 is a cross-sectional view taken along line A-A ′ of FIG. 4 in a liquid crystal display device according to a second embodiment of the present invention. In the liquid crystal display device which concerns on the 3rd Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 7 is a cross-sectional view taken along line A-A ′ of FIG. 6 in a liquid crystal display device according to a third embodiment of the present invention. In the liquid crystal display device which concerns on the 4th Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 9 is a cross-sectional view taken along line A-A ′ of FIG. 8 in a liquid crystal display device according to a fourth embodiment of the present invention. In the liquid crystal display device which concerns on the 5th Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 11 is a cross-sectional view taken along line A-A ′ of FIG. 10 in a liquid crystal display device according to a fifth embodiment of the present invention. In the liquid crystal display device which concerns on the 6th Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 13 is a cross-sectional view taken along line A-A ′ of FIG. 12 in a liquid crystal display device according to a sixth embodiment of the present invention. FIGS. 3A and 3B are cross-sectional views of the TFT substrate sequentially illustrating the manufacturing steps of the TFT substrate in the liquid crystal display device according to the first embodiment shown in FIGS. In addition to the TFT element, the cross-sectional view includes the TFT element, the common electrode wiring contact part, the data line terminal part, the gate wiring terminal (common wiring terminal) part, and the gate wiring. It is sectional drawing which shows the manufacturing process following FIG. FIG. 16 is a cross-sectional view showing a manufacturing step that follows FIG. 15; FIG. 17A is a plan view of an example of the gate terminal electrode, and FIG. 17B is a plan view of an example of the data line terminal electrode. It is sectional drawing which shows the positional relationship of a novolak-type organic insulating layer, the gate wiring shield (or data line shield) which covers a novolak-type organic insulating layer, and a gate wiring (or data line). In the liquid crystal display device which concerns on the 8th Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 20 is a cross-sectional view taken along line A-A ′ of FIG. 19 in a liquid crystal display device according to an eighth embodiment of the present invention. FIG. 21A shows the result (in-plane feedthrough voltage difference) of plotting the average value of the potentials of the in-plane pixel electrodes in the direction of the gate wiring (scanning line) of a 19-inch SXGA panel created as an example. FIG. 21B is a schematic diagram showing in-plane points of feedthrough voltage in a 19-inch SXGA panel. In the liquid crystal display device which concerns on the 9th Embodiment of this invention, it is a top view at the time of seeing the TFT substrate in which a thin-film transistor is formed from the liquid crystal side. FIG. 23 is a cross-sectional view taken along line A-A ′ of FIG. 22 in a liquid crystal display device according to a ninth embodiment of the present invention. It is a flowchart of the method of forming a novolak-type organic film. 3 is a flowchart of a method for forming an acrylic organic film. It is sectional drawing of the 1st example of the TFT substrate structure of the horizontal electric field type active matrix type liquid crystal display device which has the corrosion prevention structure of an atmospheric corrosive metal. It is sectional drawing of the 2nd example of the TFT substrate structure of the horizontal electric field type active matrix type liquid crystal display device which has a corrosion prevention structure of an atmospheric corrosive metal. It is sectional drawing of the 3rd example of the TFT substrate structure of the horizontal electric field type active matrix type liquid crystal display device which has a corrosion prevention structure of an atmospheric corrosive metal. It is sectional drawing of the 4th example of the TFT substrate structure of the horizontal electric field type active matrix liquid crystal display device which has a corrosion prevention structure of an atmospheric corrosive metal. It is sectional drawing of the 5th example of the TFT substrate structure of the horizontal electric field type active matrix liquid crystal display device which has a corrosion prevention structure of an atmospheric corrosive metal. It is sectional drawing of the 6th example of the TFT substrate structure of the horizontal electric field type active matrix liquid crystal display device which has a corrosion prevention structure of an atmospheric corrosive metal. It is sectional drawing of the 7th example of the TFT substrate structure of the horizontal electric field type active matrix type liquid crystal display device which has a corrosion prevention structure of an atmospheric corrosive metal. It is sectional drawing of the 1st example of the TFT substrate structure of the horizontal electric field type active matrix type liquid crystal display device which uses the metal without air corrosiveness for a wiring material. It is sectional drawing of the 2nd example of the TFT substrate structure of the horizontal electric field type active matrix type liquid crystal display device which uses the metal without air corrosiveness for a wiring material. In the conventional liquid crystal display device, it is a top view at the time of seeing the TFT substrate in which a thin film transistor is formed from the liquid crystal side. FIG. 36 is a cross-sectional view taken along line A-A ′ of FIG. 35.

(First embodiment)
The structure of a lateral electric field type active matrix liquid crystal display device 500 according to the first embodiment of the present invention is shown in FIGS. FIG. 1 is a plan view of a TFT substrate 100A on which a thin film transistor is formed as viewed from the liquid crystal side, and FIG. 2 is a cross-sectional view of the present liquid crystal display device 500 along the line AA ′ in FIG. .

  As shown in FIG. 2, the present liquid crystal display device 500 is formed between a TFT substrate 100A, a counter substrate 200A arranged to face the TFT substrate 100A, and the TFT substrate 100A and the counter substrate 200A. And a layer of the liquid crystal 220.

  The TFT substrate 100A includes a first transparent substrate 1 made of glass, an inorganic first insulating interlayer film 6 formed on the upper surface of the first transparent substrate 1, and data formed on the first insulating interlayer film 6. Lines 12, comb-like pixel electrodes 13 formed on the first insulating interlayer film 6, and inorganic second electrodes formed on the first insulating interlayer film 6 so as to cover the data lines 12 and the pixel electrodes 13. An insulating interlayer film (passivation film) 15, a novolac organic insulating layer 21 formed on the second insulating interlayer film 15 above the data line 12, and a pixel electrode 13 on the second insulating interlayer film 15. The comb-like common electrode 27, the novolac organic insulating layer 21, the data line shield 26 formed in the same layer as the common electrode 27, the common electrode 27, the data Line shield 26 and second insulating interlayer film 5, an alignment film 120 covering 5, a polarizing plate 110 formed on the lower surface of the first transparent substrate 101, a gate wiring 5 (see FIG. 1) formed on the upper surface of the first transparent substrate 1, a thin film transistor, It is composed of

  As shown in FIG. 1, the thin film transistor includes an island 9, a drain electrode 10 and a source electrode 11 formed in the same layer as the data line 12, and the gate wiring 5.

  The gate wiring 5 is provided for selecting a thin film transistor, and the gate wiring 5 and the data line 12 are respectively connected to the gate wiring terminal electrode 51 (see FIG. 26) and the data line terminal electrode 53 (see FIG. 26) on the outer periphery of the TFT substrate 100A. Connected).

  The counter substrate 200A includes a second transparent substrate 201 made of glass, a black matrix layer 202 partially formed on the upper surface of the second transparent substrate 201, the upper surface of the second transparent substrate 201, and the black matrix layer 202. A partially formed color layer 203, a planarizing layer 204 formed so as to cover the black matrix layer 202 and the colored layer 203, an alignment film 120 formed on the planarizing layer 204, and a second transparent substrate The conductive layer 205 is formed on the lower surface of 201, and the polarizing plate 210 is formed on the conductive layer 205.

  That is, the counter substrate 200A has the same structure as the counter substrate 200 shown in FIG.

  A spacer (not shown) is sandwiched between the TFT substrate 100A and the counter substrate 200A, and the layer of the liquid crystal 220 is held at a constant thickness.

  Further, a sealing material (not shown) for preventing the liquid crystal 220 from leaking is provided around the TFT substrate 100A and the counter substrate 200A.

  In the liquid crystal display device 500 according to the present embodiment, as shown in FIG. 2, the common electrode 27 and the data line 12 are directly connected to the common electrode 27 via the inorganic second insulating interlayer film 15 and the novolac organic insulating layer 21. A data line shield 26 of the same layer is arranged so that the data line shield 26 covers the data line 12.

  Therefore, the electric lines of force generated from the data line 12 are terminated by the data line shield 26, and the electric lines of force from the data line 12 can be prevented from entering the pixel electrode 13.

  If the parasitic capacitance between the data line 12 and the data line shield 26 immediately above it is large, problems such as signal delay and increased power consumption arise. In order to solve these problems, the parasitic capacitance can be sufficiently reduced by making the thickness of the novolac organic insulating layer 21 mainly composed of novolak resin larger than the thickness of the second insulating interlayer film 15. .

  Since the electric lines of force from the data line 12 are terminated by the data line shield 26 immediately above the data line 12, the pixel electrode 13 can be disposed in the vicinity of the data line 12, and the aperture ratio is improved. be able to.

  As shown in FIG. 1, the pixel electrode 13, the common electrode 27, and the data line 12 are symmetrical with respect to the rubbing direction so that the liquid crystal 220 is parallel to each other in the initial alignment direction (rubbing direction) R of the liquid crystal 220. It can be rotated in two directions. That is, the liquid crystal display device 500 according to the present embodiment constitutes a multi-domain IPS. In the multi-domain IPS, the domain rotated in one direction and the domain rotated in the other direction compensate each other, so that viewing angle characteristics can be improved.

  Note that the planarization film 204, which is one component of the counter substrate 200A, covers the black matrix layer 202 and the color layer 203, and the film thickness is desirably 1.5 μm or more. By setting the thickness of the planarizing film 204 to 1.5 μm or more, the black matrix layer 202 can be sufficiently wide between the black matrix layer 202 and the data line shield 26 covering the novolac organic insulating layer 21. Inhibition of the electric field due to is eliminated, and a good display can be obtained.

  The resistivity of the black matrix layer 202 is desirably 1E9 Ω · cm or more. Thereby, inhibition of the electric field by the black matrix layer 202 can be suppressed, and a good display can be obtained.

  In addition, at the position facing the data line 12, instead of forming the black matrix layer 202, a laminated film of two or more color layers different from each other can be formed. Also in this case, the laminated film of two or more color layers has a function of sufficiently blocking excess light, and at the same time, the resistance of the laminated portion is very large, so that the black matrix layer 202 having a large resistivity is formed. Compared with the case of forming, further, it is less affected by the inhibition of the electric field in this portion, and good display performance can be obtained.

  FIG. 3A is a partial plan view showing the shape of the data line 12, and FIG. 3B is an enlarged view of a rectangular region S surrounded by a dotted line in FIG.

  As shown in FIG. 3B, the data line 12 has a shape that bends in a zigzag shape. By bending the data line 12 in a zigzag manner so as to be parallel to the pixel electrode 13 and the common electrode 27, a light transmission region of the pixel display portion can be efficiently formed.

  FIG. 3C is a partial plan view showing another example of the shape of the data line 12.

  As shown in FIG. 3C, the data lines 12 are arranged in a zigzag manner with linear portions 12a parallel to the rubbing direction R at regular intervals parallel to the rubbing direction R, and the inclined portions 12b inclined by the linear portions 12a. It can also be formed so as to be joined. Even if it does in this way, light utilization efficiency will not be reduced significantly.

  Further, the pattern of the novolac organic insulating layer 21 formed along the data line 12 is formed as a pattern parallel to the rubbing direction R in the straight line portion 12a where the data line 12 extends parallel to the rubbing direction R. be able to. In this case, since the influence of the rubbing cloth on the pattern of the novolak organic insulating layer 21 can be reduced when rubbing, the alignment film 120 in the vicinity of the pattern of the novolac organic insulating layer 21 can be more aligned. It can be performed uniformly. Thereby, the alignment direction of the liquid crystal 220 is stabilized, and the display contrast can be improved.

(Second Embodiment)
The structure of a lateral electric field type active matrix liquid crystal display device 510 according to a second embodiment of the present invention is shown in FIGS. 4 is a plan view of the TFT substrate 100A on which the thin film transistor is formed as viewed from the liquid crystal side, and FIG. 5 is a cross-sectional view of the present liquid crystal display device 510 along the line AA ′ in FIG. .

  In the liquid crystal display device 500 according to the first embodiment, the pixel electrode 13 and the common electrode 27 and the data line 12 are bent in a zigzag (comb shape) so as to be parallel to the rubbing direction R. Thereby, a transverse electric field is generated in two directions, and the liquid crystal 220 is rotated in two directions symmetrical to the rubbing direction R by this electric field. Since the domain rotated in one direction and the donmain rotated in the other direction compensate each other, the viewing angle characteristics can be improved.

  That is, the liquid crystal display device 500 according to the first embodiment shown in FIGS. 1 and 2 has a multi-domain IPS structure.

  On the other hand, in the liquid crystal display device 510 according to the present embodiment, as apparent from the comparison between FIG. 4 and FIG. 1, the liquid crystal display device according to the first embodiment shown in FIGS. Unlike 500, the data line 12, the pixel electrode 13, and the common electrode 27 (including the data line shield 26) extend in a straight line without bending in a direction perpendicular to the gate wiring 5.

  That is, the liquid crystal display device 510 according to the present embodiment has a single domain IPS structure. Thus, the present invention can be applied not only to multi-domain IPS but also to single-domain IPS.

  As shown in FIG. 4, the novolac organic insulating layer 21 and the data line shield (common electrode) 26 covering the novolac organic insulating layer 21 provided on the second inorganic insulating interlayer film 15 on the data wiring 5 are arranged as shown in FIG. It can also be formed so as to cover the entire top. Thus, by covering the data line 12 with the novolac organic insulating layer 21 and the data line shield (common electrode) 26, for example, an etching solution (etchant) for forming the pattern of the data line shield (common electrode) 26 is used. Can penetrate into the pinhole of the second inorganic insulating interlayer film 15 on the data line 12 and the problem that the data line 12 is disconnected can be suppressed.

(Third embodiment)
The structure of a horizontal electric field type active matrix liquid crystal display device 520 according to the third embodiment of the present invention is shown in FIGS. 6 is a plan view of the TFT substrate 100A on which the thin film transistor is formed as viewed from the liquid crystal side, and FIG. 7 is a cross-sectional view of the present liquid crystal display device 520 along the line AA ′ in FIG. .

  The liquid crystal display device 520 according to the present embodiment is different from the liquid crystal display device 500 according to the first embodiment shown in FIGS. 1 and 2 in that the pixel electrode is formed in two layers. ing. That is, in the liquid crystal display device 520 according to the present embodiment, the pixel electrode includes the upper layer pixel electrode 313 and the lower layer pixel electrode 413.

  In the liquid crystal display device 500 according to the first embodiment, the pixel electrode 13 is formed on the first insulating interlayer film 6, whereas in the liquid crystal display device 520 according to the present embodiment, the lower layer pixel. The electrode 413 is formed on the first insulating interlayer film 6, and the upper pixel electrode 313 is formed on the second insulating interlayer film (passivation film) 15, that is, the uppermost layer. Except for the position where the upper pixel electrode 313 is formed, the liquid crystal display device 520 according to the present embodiment has the same structure as the liquid crystal display device 500 according to the first embodiment.

  Also with the liquid crystal display device 520 according to the present embodiment, the same effects as those of the liquid crystal display device 500 according to the first embodiment can be obtained.

  Similar to the liquid crystal display device 510 according to the second embodiment, also in the liquid crystal display device 520 according to the present embodiment, the novolac organic insulating layer 21 provided on the second inorganic insulating interlayer film 15 on the data wiring 5. The data line shield (common electrode) 26 covering the same can also be formed so as to cover the entire data line 12 of the pixel portion as shown in FIG. Thus, by covering the data line 12 with the novolac organic insulating layer 21 and the data line shield (common electrode) 26, for example, an etching solution (etchant) for forming the pattern of the data line shield (common electrode) 26 is used. Can penetrate into the pinhole of the second inorganic insulating interlayer film 15 on the data line 12 and the problem that the data line 12 is disconnected can be suppressed.

(Fourth embodiment)
The structure of a lateral electric field type active matrix liquid crystal display device 530 according to a fourth embodiment of the present invention is shown in FIGS. 8 is a plan view of the TFT substrate 100A on which the thin film transistor is formed as viewed from the liquid crystal side, and FIG. 9 is a cross-sectional view of the present liquid crystal display device 530 along the line AA ′ in FIG. .

  In the liquid crystal display device 530 according to the present embodiment, similarly to the liquid crystal display device 520 according to the third embodiment, the pixel electrode includes an upper layer pixel electrode 313 and a lower layer pixel electrode 413, and the lower layer pixel electrode 413. The upper pixel electrode 313 is formed on the first insulating interlayer film 6, and is formed on the second insulating interlayer film (passivation film) 15, that is, the uppermost layer. Except for the position where the upper pixel electrode 313 is formed, the liquid crystal display device 530 according to the present embodiment has the same structure as the liquid crystal display device 500 according to the first embodiment.

  Also by the liquid crystal display device 530 according to the present embodiment, the same effects as those of the liquid crystal display device 500 according to the first embodiment can be obtained.

  In the liquid crystal display device 530 according to the present embodiment, as shown in FIG. 8, the novolac organic insulating layer 21 provided on the second inorganic insulating interlayer film 15 covering the data line 12 is not connected to the data line 12 of the pixel portion. The data line shield (common electrode) 26 covering the entire top and covering the novolac organic insulating layer 21 can be formed only in a region related to display.

  By forming the novolac organic insulating layer 21 and the data line shield (common electrode) 26 in this manner, the data line 12 is covered with the novolac organic insulating layer 21, so that the data line shield (common electrode) 26 It is possible to suppress the problem that the etchant (etchant) at the time of pattern formation penetrates into the pinhole of the second inorganic insulating interlayer film 15 on the data line 12 and disconnects the data line 12.

  Furthermore, since the data line shield (common electrode) 26 is formed only in a necessary portion, an increase in capacitance between the data line 12 and the data line shield (common electrode) 26 can be prevented.

(Fifth embodiment)
The structure of a lateral electric field type active matrix liquid crystal display device 540 according to a fifth embodiment of the present invention is shown in FIGS. 10 is a plan view of the TFT substrate 100A on which the thin film transistor is formed as viewed from the liquid crystal side, and FIG. 11 is a cross-sectional view of the present liquid crystal display device 540 along the line AA ′ in FIG. .

  In the liquid crystal display device 540 according to the present embodiment, similarly to the liquid crystal display device 520 according to the third embodiment, the pixel electrode includes an upper layer pixel electrode 313 and a lower layer pixel electrode 413, and the lower layer pixel electrode 413. The upper pixel electrode 313 is formed on the first insulating interlayer film 6, and is formed on the second insulating interlayer film (passivation film) 15, that is, the uppermost layer. Except for the position where the upper layer pixel electrode 313 is formed, the liquid crystal display device 540 according to the present embodiment has the same structure as the liquid crystal display device 500 according to the first embodiment.

  Also by the liquid crystal display device 540 according to the present embodiment, the same effects as those of the liquid crystal display device 500 according to the first embodiment can be obtained.

  In the liquid crystal display device 540 according to the present embodiment, as shown in FIG. 10, the novolac organic insulating layer 21 provided on the second inorganic insulating interlayer film 15 covering the data lines 12 and the data line shield ( The common electrode 26 is formed only in a region related to display, and in the vicinity of a region where the data line 12 and the gate wiring 5 intersect, a novolac organic insulating layer 21 and a data line shield covering the novolac organic insulating layer 21 are formed. The (common electrode) 26 may be omitted.

  The liquid crystal display device 500 according to the first embodiment shown in FIG. 1, the liquid crystal display device 510 according to the second embodiment shown in FIG. 4, and the liquid crystal display device 520 according to the third embodiment shown in FIG. In the case of the liquid crystal display device 530 according to the fourth embodiment shown in FIG. 8, since the novolac organic insulating layer 21 exists like a wall with respect to all the data lines 12, the liquid crystal 220 is provided in the panel. In the case of injection, there is a problem that the liquid crystal 220 is difficult to enter. On the other hand, in the liquid crystal display device 540 according to the present embodiment, since there is a gap in the pattern of the novolac organic insulating layer 21, there is an effect that such a problem is reduced.

(Sixth embodiment)
The structure of a lateral electric field type active matrix liquid crystal display device 550 according to a sixth embodiment of the present invention is shown in FIGS. 12 is a plan view of the TFT substrate 100A on which the thin film transistor is formed as viewed from the liquid crystal side, and FIG. 13 is a cross-sectional view of the present liquid crystal display device 550 along the line AA ′ in FIG. .

  The liquid crystal display device 520 according to the third embodiment shown in FIGS. 6 and 7 has a multi-domain IPS structure.

  On the other hand, in the liquid crystal display device 550 according to the present embodiment, as apparent from the comparison between FIG. 12 and FIG. 6, the liquid crystal display device according to the third embodiment shown in FIGS. Unlike 520, the data line 12, the pixel electrode 13, and the common electrode 27 (including the data line shield 26) extend in a straight line without bending in a direction perpendicular to the gate wiring 5.

  That is, the liquid crystal display device 550 according to the present embodiment has a single domain IPS structure. Other structures are the same as those of the liquid crystal display device 520 according to the third embodiment.

  As described above, the liquid crystal display device 520 according to the third embodiment can be configured not only as a multi-domain IPS but also as a single-domain IPS. Similarly, the liquid crystal display device 530 according to the fourth embodiment and the liquid crystal display device 540 according to the fifth embodiment can be configured not only as a multi-domain IPS but also as a single domain IPS.

(Seventh embodiment)
14, FIG. 15 and FIG. 16 are cross-sectional views of the TFT substrate sequentially showing the manufacturing process of the TFT substrate 100A in the liquid crystal display device 500 according to the first embodiment shown in FIG. 1 and FIG. In addition to the cross section along the line AA ′ (pixel portion), the cross section includes each cross section of the TFT element, common electrode wiring contact portion, data line terminal portion, gate wiring terminal (common wiring terminal) portion, and gate wiring FIG. Hereinafter, as a seventh embodiment, a manufacturing method of the liquid crystal display device 500 according to the first embodiment will be described in the order of manufacturing steps with reference to FIGS. 14 to 16.

  First, as shown in FIG. 14A, a molybdenum (Mo) film is formed to a thickness of 400 nm on the first transparent substrate 1 by sputtering. Next, photolithography is performed on the molybdenum film to form the gate electrode 2, the common electrode wiring 3, the gate terminal electrode 4, and the gate wiring 5.

  Here, the wiring material may be other than Mo-based, and may be, for example, Cr-based, Al-based, Cu-based, Ag-based, Ti-based, or W-based metal.

  Next, as shown in FIG. 14B, a silicon dioxide (SiO 2) film having a thickness of 100 nm is formed on the first transparent substrate 1 so as to cover the gate electrode 2, the common electrode wiring 3, the gate terminal electrode 4 and the gate wiring 5. A silicon nitride film (gate-SiNx) is formed to a thickness of 300 nm on the silicon dioxide (SiO2) film by the CVD method. These silicon dioxide (SiO2) film and silicon nitride film form the first insulating interlayer film 6.

  Further, on the silicon nitride film, an amorphous silicon film (a-Si) 7 is formed in a thickness of 215 nm and an n + type amorphous silicon (a-Si) film 8 is sequentially formed by a CVD method with a thickness of 50 nm.

  Next, photolithography is performed, and unnecessary a-Si is removed by a-Si dry etching to form islands 9 as shown in FIG.

  Then, a molybdenum (Mo) film is again formed to a thickness of 210 nm by sputtering, and photolithography is performed on the molybdenum film. As shown in FIG. 14C, the drain electrode 10 and the source electrode 11 of the thin film transistor are formed. Form.

  Simultaneously with the formation of the drain electrode 10 and the source electrode 11, the data line 12, the pixel electrode 13, and the data line terminal electrode 14 are formed.

  As a wiring material for the drain electrode 10, the source electrode 11, the data line 12, the pixel electrode 13, and the data line terminal electrode 14, a metal other than Mo-based metal can be selected. For example, Cr-based, Al-based, Cu-based, Ag-based, Ti-based, and W-based metals may be used.

  Subsequently, the excess n + -type amorphous silicon (a-Si) film 8 in the back channel portion of the thin film transistor is removed by dry etching (FIG. 14C).

  A passivation film 15 made of silicon nitride (SiNx) having a thickness of 300 nm is formed thereon by CVD, and heat treatment is performed at about 270 ° C. This heat treatment can be omitted by substituting the novolac organic film firing step.

  Thereafter, the passivation film 15 and the first insulating interlayer film 6 (passivation on the data line terminal electrode 14 is performed) using photolithography and dry etching, or using a wet and dry process including etching with buffered hydrofluoric acid and dry etching. The film 15 only) is opened, and contact holes 16, 17 and 18 are formed as shown in FIG. The contact hole 16 reaches the common electrode wiring 3, the contact hole 17 reaches the data line terminal electrode 14, and the contact hole 18 reaches the gate terminal electrode 4.

  By forming such contact holes 16, 17, 18, it is possible to avoid damage due to the resist stripping solution during the subsequent pattern formation of the novolac organic insulating layer 21.

  Next, a first ITO film having a thickness of 40 nm is formed on the passivation film 15 by sputtering, and photolithography is performed to form an interlayer contact 19 as shown in FIG.

  The reverse stagger type TFT is completed through the steps so far.

  Next, as shown in FIG. 15C, a photosensitive heat-resistant novolac resist 20 is applied so as to cover the passivation film 15 and the interlayer contact 19 so that the film thickness after baking becomes about 2 μm.

  Next, photolithography is performed on the photosensitive heat-resistant novolak resist 20, and the novolac organic insulating layer 21 is formed only on the data line 12, the common electrode wiring 3, the data line terminal electrode 14, the gate terminal electrode 4 and the gate wiring 5. The other novolak resists 20 are removed leaving 22, 23, 24, and 25.

  Thereafter, heat treatment at 140 ° C. is performed to melt the novolac organic insulating layers 21, 22, 23, 24, 25, and as shown in FIG. 16A, the novolac organic insulating layers 21, 22, 23, 24 are melted. , 25 is formed in an inverted U shape. Then, it puts into a baking furnace, heats at 240 degreeC, and bakes.

  Next, a second ITO film having a thickness of 40 nm is formed on the substrate shown in FIG. 16A by sputtering, and photolithography is performed on the ITO film, as shown in FIG. 16B. The data line shield 26, the comb-like common electrode 27, the common electrode ITO 28, the data line terminal ITO 29, and the gate wiring terminal / common wiring terminal ITO 30 are formed.

  Molybdenum (Mo), which is an atmospheric corrosive metal constituting the common electrode wiring 3, the data line terminal electrode 14, and the gate terminal electrode 4, is an interlayer contact (first ITO) 19 and a common electrode ITO (second ITO) 28. Therefore, the anticorrosion performance of molybdenum (Mo) is improved.

  A plan view of an example of the gate terminal electrode 4 is shown in FIG. 17A, and a plan view of an example of the data line terminal electrode 14 is shown in FIG.

  The gate terminal electrode 4 made of molybdenum (Mo), which is an atmospheric corrosive metal, has an interlayer contact (first contact) covering the inner wall of the contact hole 18 formed in the passivation film (SiNx) 15 and the first insulating interlayer film 6. ITO) 19. Furthermore, the corrosion resistance of the gate terminal electrode 4 can be further improved by covering the interlayer contact (first ITO) 19 with the gate wiring terminal / common wiring terminal ITO (second ITO) 30.

  FIG. 18 shows the positional relationship between the novolac organic insulating layer 25 (or 21), the gate wiring shield 31 (or data line shield 26) covering the novolac organic insulating layer 25, and the gate wiring 5 (or data line 12). FIG.

  As shown in FIG. 18, the amount of the novolac organic insulating layer 25 protruding from the gate wiring 5 in the horizontal direction is set in the range of 0.5 μm to 4.0 μm. Similarly, the amount of the novolac organic insulating layer 21 protruding from the data line 12 in the horizontal direction is set in the range of 0.5 μm to 4.0 μm.

  The amount of the gate wiring shield 31 (or the data line shield 26) protruding from the novolac organic insulating layer 25 (or 21) in the horizontal direction is set in the range of 0 μm to 3.0 μm. By forming the gate wiring shield 31 (or the data line shield 26) within this range, the parasitic capacitance between the data line 12 and the data line shield 26 and the variation in the parasitic capacitance between the gate wiring 5 and the gate wiring shield 31 are reduced. Therefore, the shielding property of the leakage electric field from the data line 12 (or both of the data line 12 and the gate wiring 5) is sufficient.

  Further, since the novolac organic insulating layer 25 (or 21) is completely covered with the gate wiring shield (ITO shield) 31 (or the data line shield 26), the novolac organic insulating layers 25 and 21 are made of the ITO etchant or resist. Since there is no direct exposure to the stripping solution, the novolac organic insulating layers 25 and 21 can be prevented from being deteriorated by the chemical solution.

  The typical relative dielectric constant of the heat-resistant novolac organic insulating layer is about 4.2, which is as small as about two-thirds of the SiNx film, so that the parasitic capacitance can be reduced with a film thickness thinner than that of the SiNx film. There is also an effect.

  Further, a data line shield (ITO) 26 constituting a common electrode is disposed directly above the data line 12 via the inorganic second insulating interlayer film 15 and the novolac organic insulating layer 21, and the data line shield (ITO) ) By covering the data line 12 with 26, the electric lines of force from the data line 12 can be terminated. Thereby, it is possible to prevent the electric lines of force from the data line 12 from entering the pixel electrode 13.

  If the parasitic capacitance between the data line 12 and the data line shield 26 immediately above it is large, problems such as signal delay and increase in power consumption occur. However, the novolac organic insulating layer 21 mainly composed of novolac resin is used as the second. This problem can be solved by making it thicker than the insulating interlayer film 15 and sufficiently reducing the parasitic capacitance.

  Terminating the electric lines of force from the data line 12 with the data line shield 26 immediately above the data line 12 makes it possible to dispose the pixel electrode 13 in the vicinity of the data line 12 and improve the aperture ratio. Can do.

(Eighth embodiment)
The structure of a horizontal electric field type active matrix liquid crystal display device 560 according to an eighth embodiment of the present invention is shown in FIGS. 19 is a plan view of a TFT substrate 100A on which a thin film transistor is formed as viewed from the liquid crystal side, and FIG. 20 is a cross-sectional view of the present liquid crystal display device 560 along the line AA ′ in FIG. .

  The liquid crystal display device 560 according to the present embodiment corresponds to a modification of the liquid crystal display device 540 according to the fifth embodiment illustrated in FIGS. 10 and 11.

  As described above, in the liquid crystal display device 540 according to the fifth embodiment shown in FIGS. 10 and 11, data excluding the intersection region between the gate line 5 and the data line 12 in order to increase the liquid crystal injection efficiency. The novolac organic insulating layer 21 is left only on the line 12.

  When the novolac organic insulating layer 21 is formed in this manner, in order to avoid an increase in capacitance between the data line 12 and the data line shield (common electrode) 26, data is crossed on the intersection region of the gate line 5 and the data line 12. The data line shield (common electrode) 26 cannot be disposed on the line 12. Therefore, in the liquid crystal display device 540 according to the fifth embodiment, the data line shield (common electrode) 26 is independent for each gate wiring (scanning line) 5.

  On the other hand, in the liquid crystal display device 560 according to the present embodiment, the upper and lower pixels are avoided by avoiding the data line 12 in the intersection region between the gate line 5 and the data line 12 where the novolac organic insulating layer 21 is not left. Data line shields (common electrodes) 26 are connected to each other. That is, the data line shield (common electrode) 26 is passed over the data line 12 so as not to overlap the data line 12, and the data line shields (common electrode) 26 of the upper and lower pixels are mutually connected by the same conductive layer. ing. Structures other than this point are the same as those of the liquid crystal display device 540 according to the fifth embodiment.

  The common electrode 27 is disposed so as not to overlap the pixel electrode 313.

  The liquid crystal display device 560 according to the present embodiment can have the following effects by having the above-described structure.

  For example, in a large, high-definition panel having a diagonal size of 18 inches or more, the time constant due to the wiring resistance Rc of the common electrode wiring 3 and the capacitance Cp between the pixel electrode 13 and the common electrode 27 of each pixel becomes large. Inevitable. As a result, in a pixel group in which writing is controlled by a certain gate wiring 5 (scanning line), the potential of the pixel electrode 13 is reduced when the voltage of the gate wiring 5 (scanning line) falls. Due to capacitive coupling (mainly parasitic capacitance of the transistor) with the scanning line), voltage drops occur at the same time. At this time, due to the capacitance Cp between the pixel electrode 13 and the common electrode 27, the potential of the common electrode wiring 3 also drops, and according to the time constant proportional to the product of the wiring resistance Rc and the capacitance Cp, the common electrode wiring 3 Delay will occur.

  When a delay occurs in the common electrode wiring 3 as described above, the potential of the pixel electrode 13 instantaneously causes a larger voltage drop. As a result, the difference between the potential of the data line 12 and the potential of the pixel electrode 13 becomes large at the fall of the voltage of the gate wiring 5 (scanning line).

  On the other hand, since a delay also occurs in the gate wiring 5 (scanning line), if a difference occurs between the potential of the data line 12 and the potential of the pixel electrode 13, the gate wiring 5 (scanning line) is not turned off. In addition, a flow of charge from the data line 12 to the pixel electrode 13 (rewriting to the pixel electrode 13) occurs. Due to the fluctuation of the potential of the common electrode 27 due to the delay of the common electrode wiring 3, the amount of rewriting increases.

  As a result, the potential of the pixel electrode 13 becomes higher in a state where the delay of the common electrode wiring 3 is restored to the set value after a certain time. Therefore, in a state where the potential of the common electrode 27 is higher, the average potential of the pixel electrode 13 and the potential of the common electrode 27 become equal, and no DC potential is generated between them, and flicker and afterimage can be suppressed.

  FIG. 21A shows the result (in-plane feedthrough voltage difference) of plotting the average value of the potentials of the in-plane pixel electrodes 13 in the direction of the gate wiring 5 (scanning line) of the 19-inch SXGA panel created as an example. Show.

  That is, the in-plane feedthrough voltage difference shown in FIG. 21A represents the in-plane variation of the feedthrough voltage as an in-plane distribution of pixel voltage average values in positive and negative frames. FIG. 21B is a schematic diagram showing in-plane points of the feedthrough voltage in the 19-inch SXGA panel.

  When the upper and lower data line shields (common electrodes) 26 are not connected as in the liquid crystal display device 540 according to the fifth embodiment shown in FIGS. 10 and 11, a plot labeled “No vertical connection” in the drawings. As described above, the average potential of the pixel electrode 13 varies greatly in the plane along the gate wiring 5 (scanning line), and it becomes difficult to suppress flicker uniformly in the plane.

  On the other hand, when the data line shields (common electrodes) 26 of the upper and lower pixels are connected to each other as in the liquid crystal display device 560 according to the present embodiment, the data line shields (common electrodes) 26 are connected to the gate wiring 5 (scanning). Line) is connected to the common electrode wiring 3 connected to the pixel in which the potential fluctuation does not occur, and as a result, the downward fluctuation of the potential of the common electrode wiring 3 as described above is remarkably suppressed. .

  As a result, the resistance at the time of connecting the data line shields (common electrodes) 26 of the upper and lower pixels was changed as shown in FIG. 21A, and the average potential of the pixel electrode 13 was evaluated. The connection resistance was 750 kΩ or less. In this case, the fluctuation of the average potential of the pixel electrode 13 in the direction of the gate wiring (scanning line) 5 can be remarkably suppressed.

  That is, from FIG. 21A, by forming the data line shield (common electrode) 26 in a matrix, the in-plane variation of the in-plane feedthrough voltage is reduced, and the data line shield (common electrode) 26 It can be seen that a great effect is obtained when the connection resistance is 750 kΩ / pixel or less.

  Further, by suppressing the delay of the common electrode 27, it is possible to suppress the delay of the common electrode wiring 3 during the period in which the gate wiring (scanning line) 5 is turned on, and to reduce the horizontal crosstalk. Can be suppressed.

  Further, when connecting the data line shields (common electrodes) 26 of the upper and lower pixels, the data lines 12 are overlapped with the data lines 12 in the vicinity of the intersection region of the gate lines 5 and the data lines 12 where the novolac organic insulating layer 21 is not formed. Since the data line shield (common electrode) 26 is connected to each other so as not to become a problem, the capacitance between the data line 12 and the data line shield (common electrode) 26 does not increase. Therefore, good quality can be maintained without increasing the delay of the data line 12 and the delay of the common electrode wiring 3.

(Ninth embodiment)
The structure of a lateral electric field type active matrix liquid crystal display device 570 according to a ninth embodiment of the present invention is shown in FIGS. 22 is a plan view of the TFT substrate 100A on which the thin film transistor is formed as viewed from the liquid crystal side, and FIG. 23 is a cross-sectional view of the present liquid crystal display device 570 along the line AA ′ in FIG. .

  In the liquid crystal display device 570 according to the present embodiment, similarly to the liquid crystal display device 560 according to the eighth embodiment, the data line shields (common electrodes) 26 of the adjacent upper and lower pixels are connected to each other. The area where the data line shields (common electrodes) 26 of the adjacent upper and lower pixels are connected is widened, and the gate wiring 5 is covered with the connection area of the data line shield (common electrode) 26 over a wide range. Structures other than this point are the same as those of the liquid crystal display device 540 according to the fifth embodiment.

  According to the liquid crystal display device 570 according to the ninth embodiment having the above-described structure, the following effects can be achieved.

  In the liquid crystal display device 570 according to the present embodiment, similarly to the liquid crystal display device 560 according to the eighth embodiment, the data line shields (common electrodes) 26 of the adjacent upper and lower pixels are connected to each other. In addition, the gate line 5 is covered with a data line shield (common electrode) 26 and an equipotential connection region.

  Thereby, in addition to being able to reduce the delay of the common electrode wiring 3, it is possible to reduce the capacitive coupling between the gate wiring 5 and the black matrix layer 202. As a result, the potential of the black matrix layer 202 is reduced. Can be suppressed from being biased to a negative potential by the negative potential when the gate wiring 5 is turned off. For this reason, it is possible to suppress problems such as afterimages due to fluctuations in the potential of the black matrix layer 202 from the potential of the data line shield (common electrode) 26.

  Experimentally, a remarkable effect was obtained by covering 60% or more of the gate wiring 5 not covered with another conductive layer with a connection region equipotential to the data line shield (common electrode) 26.

  Also in the liquid crystal display device 570 according to the present embodiment, the data line shield is provided so as not to overlap the data line 12 in the vicinity of the intersection between the gate line 5 and the data line 12 where the novolac organic insulating layer 21 is not formed. Since the (common electrode) 26 is connected, an increase in capacitance between the data line 12 and the data line shield (common electrode) 26 can be prevented. Therefore, good quality can be maintained without increasing the delay of the data line 12 and the delay of the common electrode wiring 3.

  In the liquid crystal display devices 500, 510, 520, 530, 540, 550, 560, and 570 according to the first to sixth, eighth, and ninth embodiments, the novolac organic insulating layer 21 is formed as an insulating interlayer film. It is used as.

  FIG. 24 is a flowchart of a method for forming a novolac organic insulating film, and FIG. 25 is a flowchart of a method for forming an acrylic organic insulating film. Hereinafter, the advantage of using the novolac organic insulating layer 21 as the insulating interlayer film will be described with reference to FIGS. 24 and 25 as compared with the case where the acrylic organic film is used as the insulating interlayer film.

  As shown in FIGS. 24 and 25, the basic steps of the method of forming the novolac organic film and the method of forming the acrylic organic film are the same. Hereinafter, basic steps of both methods will be described.

  First, before applying the resist, the object is cleaned using the cleaning unit 315 (step S1).

  Next, a resist is applied to the object (step S2). The resist is usually applied automatically using an inline photolithography apparatus. The in-line photolithography apparatus has a line for applying a novolak resist for photolithography and a line for applying a novolak resist for forming an organic film. When forming a novolak organic film, the novolak for forming an organic film is used. The resist is applied by selecting a line for applying the resist. In contrast, when an acrylic organic film is formed, the resist 309 that has been refrigerated and stored in the refrigerated storage 319 is seasoned, and then the resist 309 is applied to the object.

  Next, the surface of the object to which the resist is applied is washed (step S3). When the resist is applied (step S2), and further when the object after the resist is applied is cleaned (step S3), a resist waste liquid 311 is generated.

  Next, the resist applied to the object is dried under reduced pressure (step S4).

  Next, the resist is pre-baked (step S5).

  The resist coating (step S2), cleaning (step S3), drying (step S4), and pre-baking (step S5) are performed using the resist coating unit 316.

  Next, the resist is exposed to a predetermined pattern using the exposure unit 317 (step S6).

  Next, the exposed resist is developed using the developer 312 (step S7). In the development of the novolac organic film resist, the developer 312 is used as it is. However, in the development of the acrylic organic film resist, the developer 312 is once diluted using the developer dilution unit 320 and diluted. A developer 313 is used.

  During development of the resist, development waste liquid 314 is generated.

  Next, the developed resist is post-baked (step S8). The resist exposure (step S7) and post-bake (step S8) are performed using the developing unit 318.

  As described above, in forming the acrylic organic film and the novolac organic film, an organic film pattern is formed through a photolithography process.

  Most of the photoresist used in photolithography is usually a novolak type. Usually, when a novolak resist for photolithography and an acrylic resist for forming an organic film are mixed, the resist may solidify. Therefore, when forming an acrylic organic film, resist coating (step S2), It is necessary to separate the edge cleaning (step S3) and the resist waste liquid 311.

  Further, since the concentration of the developing solution 312 used differs between the novolak resist for photolithography and the acrylic resist for forming the organic film, it is necessary to prepare the developing solutions 312 having different concentrations.

  Also, in the development process (step S7), if the acrylic development waste liquid 314 and the novolak development waste liquid 314 are mixed, there is a possibility of solidifying. Therefore, in the formation of the acrylic organic film, the development process (step S7) The diluted developer 313 and the waste developer 314 need to be separated.

  On the other hand, the novolak resist for photolithography and the novolak resist for forming an organic film are commonly composed of the same novolak resin, so that the photolithography apparatus can be shared. Therefore, it is not necessary to prepare an expensive photolithography apparatus for forming the organic film, and a photolithography apparatus for normal photolithography can be used.

  In addition, since the acrylic resist is severely deteriorated when stored at room temperature (actually thickens), it is necessary to prepare a refrigerator 309 dedicated to the acrylic resist. On the other hand, in the case of a novolak resist, it is not necessary to prepare a dedicated refrigerator.

  Furthermore, in the case of an acrylic resist, since a dedicated resist waste liquid facility is required, the resist waste liquid treatment cost becomes higher than the novolak resist waste liquid treatment.

  As described above, by using the novolac organic film as the insulating interlayer film, various advantages can be obtained as compared with the case where the acrylic organic film is used as the insulating interlayer film.

(Tenth embodiment)
When a novolac organic insulating film is used as an insulating interlayer film and a metal having a relatively low resistance but high atmospheric corrosive properties such as molybdenum (Mo) is used as an underlayer of the novolac organic film, the atmosphere of the metal Several examples of the TFT substrate structure of the active matrix type liquid crystal display device that can prevent corrosion will be described below.

(First example)
FIG. 26 is a cross-sectional view of a first example of a TFT substrate structure of a lateral electric field type active matrix liquid crystal display device having a corrosion prevention structure of atmospheric corrosive metal.

  Note that all of the thin film transistors (TFTs) in the following example as well as this example are inverted staggered TFTs.

  In the TFT substrate structure according to this example, the data line 12 includes a data line lower layer film ITO (first transparent conductive film) 56 and a data line superimposed metal (drain metal) 54. An organic interlayer film (novolac organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 is a data line shield (transparent conductive film) 26 that constitutes a common electrode. Shielded.

  The comb electrode of the common electrode 27 and the comb electrode of the pixel electrode 13 are made of a transparent conductive film.

  The terminal contact portion 52 of the atmospheric corrosive metal Mo is drawn out by the terminal ITO electrode (first transparent conductive film) 53 of the data line terminal portion and is completely covered with the inorganic passivation film 15.

  The contact hole 17 is covered with a data terminal ITO (second transparent conductive film) 29 to form a data wiring terminal.

  The gate terminal electrode (Mo) 4 is connected to the terminal ITO electrode (first transparent conductive film) 51 of the gate wiring terminal / common wiring terminal portion through the contact hole 18, and is further completely covered with the inorganic passivation film 15. Covered.

  A part of the passivation film 15 on the terminal ITO electrode (first transparent conductive film) 51 of the gate wiring terminal / common wiring terminal part is opened, and the ITO for the gate wiring terminal / common wiring terminal (second transparent conductive film). 30 to form gate wiring terminals and common wiring terminals. Here, both the terminal ITO electrode 53 of the data line terminal portion and the terminal ITO electrode (first transparent conductive film) 51 of the gate wiring terminal / common wiring terminal portion are formed in the transparent conductive film of the same layer below the data line 12. Formed with.

  The TFT substrate structure according to this example can be manufactured by performing the photoresist process eight times.

(Second example)
FIG. 27 is a cross-sectional view of a second example of a TFT substrate structure of a lateral electric field type active matrix liquid crystal display device having an atmospheric corrosive metal corrosion prevention structure.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the common electrode 27 and the comb electrode of the pixel electrode 13 are made of a transparent conductive film. At this time, the data line shield (transparent conductive film) 26 and the comb electrode may be configured by either the first transparent conductive film 19 and the second transparent conductive film 28 (or 29, 30), respectively. You may comprise by the single layer of the transparent conductive film 28 (or 29, 30).

  The contact holes 17 and 18 reaching the data line terminal electrode 14 and the gate terminal electrode 4 exposed to the atmosphere, respectively, are covered with a first transparent conductive film 19, and the first transparent conductive film 19 is further covered with a second transparent conductive film 29, 30. Thereby, the corrosivity of the air corrosive metal can be improved. In this case, the data line terminal ITO (second transparent conductive film) 29 is the terminal extraction electrode of the data line 12, and the gate wiring terminal / common wiring terminal ITO (second transparent conductive film) 30 is the terminal of the gate wiring 5. It becomes an extraction electrode.

(Third example)
FIG. 28 is a cross-sectional view of a third example of a TFT substrate structure of a lateral electric field type active matrix liquid crystal display device having a corrosion prevention structure of atmospheric corrosive metal.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the pixel electrode 13 is in the same layer as the data line 12 and is made of the same metal as the data line 12. The comb electrode of the common electrode 27 is formed of the same transparent conductive film as the data line shield 26 on the inorganic passivation film 15.

  The contact holes 17 and 18 reaching the data line terminal electrode 14 and the gate terminal electrode 4 exposed to the atmosphere, respectively, are covered with a first transparent conductive film 19, and the first transparent conductive film 19 is further covered with a second transparent conductive film 29, 30. Thereby, the corrosivity of the air corrosive metal can be improved.

(Fourth example)
FIG. 29 is a cross-sectional view of a fourth example of a TFT substrate structure of a lateral electric field type active matrix liquid crystal display device having a corrosion prevention structure of atmospheric corrosive metal.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the common electrode 27 and the comb electrode of the pixel electrode 13 are made of a transparent conductive film. At that time, the data line shield (transparent conductive film) 26 and the comb electrode are formed of a single layer of the second transparent conductive film 28 (or 29, 30).

  The common electrode contact hole 16 is opened in the inorganic first insulating interlayer film 6 and the second insulating interlayer film 15 and is covered with the first transparent conductive film 19 to form an interlayer contact. Subsequently, the novolac organic film 22 is filled in the contact hole 16 covered with the first transparent conductive film 19, and the novolac organic film 22 is further covered with the second transparent conductive film 28.

  In the gate wiring terminal portion, the first insulating interlayer film 6 and the second insulating interlayer film 15 are opened above the gate terminal electrode 4 to form a contact hole 18. The contact hole 18 is formed by the first transparent conductive film 19. A contact is formed by covering. Subsequently, in order to completely prevent the corrosion of the atmospheric corrosive metal, the contact hole 18 covered with the first transparent conductive film 19 is filled with the novolac organic film 24, and the novolac organic film 24 is further filled with the second transparent conductive film. Cover with conductive film 30.

  In the data line terminal portion, an inorganic passivation film 15 is opened above the data line terminal electrode 14, a contact hole 17 is formed, the contact hole 17 is covered with a first transparent conductive film 19, and a contact is formed. Forming. Subsequently, in order to completely prevent the corrosion of the air corrosive metal, the contact hole 17 covered with the first transparent conductive film 19 is filled with the novolac organic film 23, and the novolac organic film 23 is further filled with the second transparent film. Cover with a conductive film 29.

  Here, in the data line terminal portion, the gate wiring terminal portion, and the common electrode terminal portion, the electrode 19 formed of the first transparent conductive film is replaced with the data wiring terminal underlying electrode, the gate wiring terminal underlying electrode, and the common electrode terminal underlying electrode, respectively. I will call it.

(Fifth example)
FIG. 30 is a cross-sectional view of a fifth example of a TFT substrate structure of a horizontal electric field type active matrix liquid crystal display device having a corrosion prevention structure of atmospheric corrosive metal.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the common electrode 27 and the comb electrode of the pixel electrode 13 are made of a transparent conductive film. At that time, the data line shield (transparent conductive film) 26 and the comb electrode are formed of a single layer of the second transparent conductive film 28 (or 29, 30).

  The common electrode contact hole 16 is covered with a first transparent conductive film 19, and the first transparent conductive film 19 is further covered with a second transparent conductive film 28.

  In the gate wiring terminal portion, the first insulating interlayer film 6 and the second insulating interlayer film 15 are opened above the gate terminal electrode 4 to form a contact hole 18. The contact hole 18 is formed by the first transparent conductive film 19. A contact is formed by covering. Subsequently, in order to completely prevent the corrosion of the atmospheric corrosive metal, the contact hole 18 covered with the first transparent conductive film 19 is filled with the novolac organic film 24, and the novolac organic film 24 is further filled with the second transparent conductive film. Cover with conductive film 30.

  In the data line terminal portion, an inorganic passivation film 15 is opened above the data line terminal electrode 14, a contact hole 17 is formed, the contact hole 17 is covered with a first transparent conductive film 19, and a contact is formed. Forming. Subsequently, in order to completely prevent the corrosion of the air corrosive metal, the contact hole 17 covered with the first transparent conductive film 19 is filled with the novolac organic film 23, and the novolac organic film 23 is further filled with the second transparent film. Cover with a conductive film 29.

(Sixth example)
FIG. 31 is a cross-sectional view of a sixth example of a TFT substrate structure of a lateral electric field type active matrix liquid crystal display device having a corrosion prevention structure of atmospheric corrosive metal.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the pixel electrode 13 is in the same layer as the data line 12 and is made of the same metal as the data line 12. The comb electrode of the common electrode 27 is formed of the same transparent conductive film as the data line shield 26 on the inorganic passivation film 15.

  The common electrode contact hole 16 is opened in the inorganic first insulating interlayer film 6 and the second insulating interlayer film 15 and is covered with the first transparent conductive film 19 to form an interlayer contact. Subsequently, in order to completely prevent the corrosion of the atmospheric corrosive metal, the novolac organic film 22 is filled in the contact hole 16 covered with the first transparent conductive film 19, and the novolac organic film 22 is further filled with the second transparent film. Covered with a conductive film 28.

  In the gate wiring terminal portion, the first insulating interlayer film 6 and the second insulating interlayer film 15 are opened above the gate terminal electrode 4 to form a contact hole 18. The contact hole 18 is formed by the first transparent conductive film 19. A contact is formed by covering. Subsequently, in order to completely prevent the corrosion of the atmospheric corrosive metal, the contact hole 18 covered with the first transparent conductive film 19 is filled with the novolac organic film 24, and the novolac organic film 24 is further filled with the second transparent conductive film. Cover with conductive film 30.

  In the data line terminal portion, an inorganic passivation film 15 is opened above the data line terminal electrode 14, a contact hole 17 is formed, the contact hole 17 is covered with a first transparent conductive film 19, and a contact is formed. Forming. Subsequently, in order to completely prevent the corrosion of the air corrosive metal, the contact hole 17 covered with the first transparent conductive film 19 is filled with the novolac organic film 23, and the novolac organic film 23 is further filled with the second transparent film. Cover with a conductive film 29.

(Seventh example)
FIG. 32 is a cross-sectional view of a seventh example of the TFT substrate structure of a lateral electric field type active matrix liquid crystal display device having a corrosion prevention structure of atmospheric corrosive metal.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the pixel electrode 13 is in the same layer as the data line 12 and is made of the same metal as the data line 12. The comb electrode of the common electrode 27 is formed of the same transparent conductive film as the data line shield 26 on the inorganic passivation film 15.

  The common electrode contact hole 16 is opened in the inorganic first insulating interlayer film 6 and the second insulating interlayer film 15 and is covered with the first transparent conductive film 19 and the second transparent conductive film 28.

  In the gate wiring terminal portion, the first insulating interlayer film 6 and the second insulating interlayer film 15 are opened above the gate terminal electrode 4 to form a contact hole 18. The contact hole 18 is formed by the first transparent conductive film 19. A contact is formed by covering. Subsequently, in order to completely prevent the corrosion of the atmospheric corrosive metal, the contact hole 18 covered with the first transparent conductive film 19 is filled with the novolac organic film 24, and the novolac organic film 24 is further filled with the second transparent conductive film. Cover with conductive film 30.

  In the data line terminal portion, an inorganic passivation film 15 is opened above the data line terminal electrode 14, a contact hole 17 is formed, the contact hole 17 is covered with a first transparent conductive film 19, and a contact is formed. Forming. Subsequently, in order to completely prevent the corrosion of the atmospheric corrosive metal, the contact hole 17 covered with the first transparent conductive film 19 is filled with the novolac organic film 23, and the novolac organic film 23 is further filled with the second novolac organic film 23. Cover with a transparent conductive film 29.

  In the TFT substrate structures according to the second to seventh examples described above, the first transparent conductive film 19 covering the contact holes 16, 17 and 18 is made of chromium having a low air corrosivity instead of the air corrosive metal. It can also be made of a metal such as (Cr). When chromium (Cr) is used, the blocking property against moisture or the like of the outside air is further increased, and the corrosion resistance can be enhanced.

  Furthermore, in the TFT substrate structures according to the second to seventh examples, instead of the first transparent conductive film 19 made of an air corrosive metal covering the contact holes 16, 17, 18, chromium (Cr It is also possible to use a laminated film made of a metal such as) and a metal such as ITO (Indium-Tin Oxide) with good surface contact.

  By doing in this way, the blocking property with respect to the water | moisture content etc. of external air can further increase, corrosion resistance can be improved, and contact resistance between this laminated film and the 2nd transparent conductive film 29 can be reduced simultaneously. The resistance between the terminal and the wiring can be reduced, and a good display with little crosstalk or the like can be obtained.

  In the TFT substrate structures according to the second to seventh examples, the first or second data line shield (transparent conductive film) 26 covering the organic interlayer film (novolak organic film) 21 above the data line 12 is used. However, instead of this, a laminated film of an opaque film such as chromium (Cr) and a transparent film can also be used. As a result, when the pixel is displayed in black, light passing through the vicinity of the organic insulating film can be blocked, the luminance during black display can be reduced, and the contrast is improved.

(Eleventh embodiment)
An active matrix type liquid crystal display using a novolac organic insulating film as an insulating interlayer film and a metal having a relatively high resistance such as chromium (Cr) but not corrosive to the air, which is used as an insulating interlayer. An example of the TFT substrate structure of the device will be described below.

(First example)
FIG. 33 is a cross-sectional view of a first example of a TFT substrate structure of a lateral electric field type active matrix liquid crystal display device using a metal having no air corrosiveness as a wiring material.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the common electrode 27 and the comb electrode of the pixel electrode 13 are made of a transparent conductive film.

  In the common electrode wiring contact hole 16, the data line terminal contact hole 17, and the gate wiring terminal contact hole 18, the metal constituting the common electrode wiring 3, data line terminal electrode 14, and gate terminal electrode 4 is transparently conductive. It may be covered with a film or exposed to the atmosphere with a single metal layer.

  In this example, the lead electrode is formed by the first transparent conductive film 19 or the second transparent conductive films 28, 29, and 30.

(Second example)
FIG. 34 is a cross-sectional view of a second example of a TFT substrate structure of a lateral electric field type active matrix liquid crystal display device using a metal having no air corrosiveness as a wiring material.

  In the TFT substrate structure according to this example, an organic interlayer film (novolak organic film) 21 is formed above the data line 12, and the organic interlayer film (novolak organic film) 21 forms a data line shield ( A transparent conductive film) 26 is shielded.

  The comb electrode of the pixel electrode 13 is in the same layer as the data line 12 and is made of the same metal as the data line 12. The comb electrode of the common electrode 27 is formed of the same transparent conductive film as the data line shield 26 on the inorganic passivation film 15.

  In the common electrode wiring contact hole 16, the data line terminal contact hole 17, and the gate wiring terminal contact hole 18, the metal constituting the common electrode wiring 3, data line terminal electrode 14, and gate terminal electrode 4 is transparently conductive. It may be covered with a film or exposed to the atmosphere with a single metal layer.

  In this example, the lead electrode is formed by the first transparent conductive film 19 or the second transparent conductive films 28, 29, and 30.

  In the first to seventh examples in the tenth embodiment and the first and second examples in the eleventh embodiment, the novolac organic interlayer film 21 is formed only above the data line 12, and the novolac organic The interlayer film 21 is shielded by a data line shield (transparent conductive film) 26 constituting a common electrode. The novolac organic interlayer film can be formed not only above the data line 12 but also above the gate wiring 5 as shown by a broken line in FIG. 34. In this case as well, the novolac organic interlayer film 21 The data line shield (transparent conductive film) 26 constituting the common electrode is shielded.

  Alternatively, a novolac organic interlayer film shielded by a data line shield (transparent conductive film) 26 can also be formed above the thin film transistor. As a result, the effective display area of the pixels can be further expanded, and a bright display with a high aperture ratio can be obtained.

  The liquid crystal display device according to the present invention is not limited to the first to eleventh embodiments described above, and can be variously modified as described below and has the following characteristics. .

  For example, a terminal electrode made of a corrosive metal can be formed by connecting two transparent conductive films to each other. This terminal electrode can be manufactured by eight times of photolithography.

  In the terminal portion, a through hole to a metal having atmospheric corrosivity such as molybdenum (Mo) or copper (Cu) is covered with a first transparent conductive film, and the through hole is further filled with an organic insulating film. Next, it is covered with a second transparent conductive film. At the time of forming the second transparent conductive film, a comb-like pixel electrode is also formed at the same time. This structure can be manufactured by 7 (or 6) photolithography.

  Alternatively, in the terminal portion exposed to the atmosphere, the through hole to the metal having atmospheric corrosive properties such as molybdenum (Mo) and copper (Cu) is covered with the first transparent conductive film, and further, the through hole is covered with an organic insulating film. fill in. On the other hand, the through hole of the pixel portion not exposed to the atmosphere is not filled with an organic film, and is further covered with a second transparent conductive film. At the time of forming the second transparent conductive film, a comb-like pixel electrode is also formed at the same time. This structure can be manufactured by 7 (or 6) photolithography.

  Alternatively, in the terminal portion, a through hole to an air corrosive metal such as molybdenum (Mo) or copper (Cu) is covered with a first transparent conductive film, and further covered with a second transparent conductive film. By making the structure, moisture from the atmosphere of the metal having atmospheric corrosivity is blocked. At the time of forming the second transparent conductive film, a comb-like pixel electrode is also formed at the same time. This structure can be manufactured by 7 (or 6) photolithography.

  The data line 12 can be composed of a laminated structure of an inorganic layer and an organic layer, and the laminated structure can be covered with an insulating film, and the common electrode can be formed so as to cover the data line 12 above the data line 12. . The organic insulating film mainly composed of novolak resin (and its similar substances) is formed only on the data line 12, the data line 12, the gate wiring 5, or the vicinity thereof. The common electrode can also be formed so as to cover the gate wiring 5.

  Alternatively, the organic insulating film is formed only on the data line 12 or the region covering the data line 12 and the gate wiring 5, and the comb-like common electrode and the pixel electrode can be formed in the same layer in the uppermost layer.

  Alternatively, the organic insulating film is formed only on the data line 12 or in a region covering the data line 12 and the gate wiring 5, and the comb-like common electrode and the pixel electrode may be disposed with the inorganic insulating film interposed therebetween. it can. The thickness of the inorganic insulating film is preferably 100 nm to 600 nm so that a short circuit between the common electrode and the pixel electrode does not occur and an electric field applied to the liquid crystal can be appropriately obtained.

  Alternatively, the organic insulating film is formed only on the data line 12 or the region covering the data line 12 and the gate wiring 5, and the amount of the organic film protruding on the data line 12 or the gate wiring 5 is 0.5 μm to 4 μm. The overhanging amount of the gate wiring shield on the insulating film is preferably 0.5 μm to 6 μm.

  Further, the data line 12 can be prevented from being disconnected by covering the intersecting region between the gate line 5 and the data line 12 with an insulating film made of a laminated film of an inorganic film and an organic film to prevent the penetration of the chemical solution. .

  Alternatively, the data line 12 is entirely covered with an insulating film made of a laminated film of an inorganic film and an organic film, and shielded by the common electrode except for the intersection region between the gate wiring 5 and the data line 12, whereby the data line 12 And the common electrode shield can be reduced.

  Alternatively, the data line 12 and the gate line 5 are all covered with an insulating film made of a laminated film of an inorganic film and an organic film, and shielded by a common electrode except for the intersection region between the gate line 5 and the data line 12. As a result, the capacitance between the data line 12 and the common electrode shield and the capacitance between the gate line 5 and the common electrode shield can be reduced.

  During the formation of the novolac organic film, the novolac organic insulating film is baked at a high temperature of 200 to 270 ° C. for 30 to 120 minutes, thereby resisting an alkaline chemical solution such as a resist stripping solution, an organic solvent, and an acidic chemical solution such as an ITO etchant. The resistance of the novolac organic insulating film can be improved, and the shape of the novolac organic insulating film in the subsequent process can be stabilized. For example, the novolac organic insulating film is not damaged in the photolithography process when forming the common electrode after forming the novolak organic insulating film. Further, in the step of raising the temperature after the formation of the novolac organic film, for example, in the step of baking the alignment film, etc., the novolac resin film is decomposed and degassing occurs. This eliminates the problem of being taken in as impurities. In this case, the above effect is remarkably exhibited by further setting the firing temperature in the range of 235 to 255 ° C.

  If a contact hole is formed in the inorganic insulating film after the organic insulating film is formed, the organic insulating film may be deteriorated by being exposed to a stripping solution when the resist pattern for forming the contact hole is removed. However, in the present invention, since the contact hole is formed in the inorganic insulating film before the organic insulating film is formed, the organic insulating film is not directly exposed to the resist stripping solution, and the shape of the organic film is more stable. Can be maintained.

  When the novolac organic insulating film is formed, a heat treatment at about 100 to 150 ° C. is performed for 30 seconds to 15 minutes after development and before baking, so that an inverted U-shaped cross-sectional shape is formed on the data line 12 or the gate wiring 5. A novolac-based organic film can be obtained. As a result, the influence of the shape of the organic insulating film on the liquid crystal alignment during rubbing can be reduced, and a more uniform homogeneous alignment state can be obtained.

  Alternatively, when the novolac organic insulating film is formed, heat treatment before firing is not performed, and the temperature rise rate during firing is set to 5 ° C./minute to 15 ° C./minute, so that the data line 12 or the gate wiring 5 is formed. A novolac organic insulating film having an inverted U-shaped cross-sectional shape can be obtained. As a result, the influence of the shape of the organic insulating film on the liquid crystal alignment during rubbing can be reduced, and a more uniform homogeneous alignment state can be obtained.

  Alternatively, when the novolac organic insulating film is formed, heat treatment before baking is not performed, and the organic insulating film is melted by providing a constant temperature heating time at a temperature in the range of 100 to 150 ° C. during baking, and then 200 ° C. The above baking is performed (for example, baking is performed at a high temperature of 200 to 270 ° C. for 30 to 120 minutes). By this heating method, a novolac organic insulating film having an inverted U-shaped cross-sectional shape can be obtained on the data line 12 or the gate wiring 5. As a result, the influence of the shape of the organic insulating film on the liquid crystal alignment during rubbing can be reduced, and a more uniform homogeneous alignment state can be obtained.

  By substituting the novolac organic insulating film firing step for the heat treatment of the TFT performed in the steps after the formation of the passivation (SiNx) film 15, the step of the heat treatment step can be shortened.

1, 101, 201 Glass substrate 2 Gate electrode 3 Common electrode wiring 4 Gate terminal electrode (Mo)
5, 105 Gate wiring 6, 106 First insulating interlayer film (inorganic insulating interlayer film)
9, 109 Island 10, 110 Drain electrode 11, 111 Source electrode 12, 112 Data line 13, 113, 313 Pixel electrode (comb electrode)
14 Terminal electrodes 15 and 115 of the data line terminal portion Passivation film (inorganic insulating interlayer film)
16, 17, 18 Contact hole 19 Interlayer contact (first ITO)
20, 21, 22, 23, 24, 25 Novolak organic insulating layer (resist)
26 Data line shield (common electrode)
27, 127 Common electrode (comb electrode)
28 Common electrode ITO (second ITO)
29 ITO for data line terminals (second transparent conductive film)
30 ITO for gate wiring terminals and common wiring terminals (second transparent conductive film)
31 Gate Wiring Shield 51 Gate Wiring Terminal / Common Wiring Terminal Portion ITO Electrode (First Transparent Conductive Film)
52 Terminal contact (drain metal)
53 Terminal ITO electrode (first transparent conductive film) of data line terminal section
54 Data line superimposed metal (drain metal)
55 Interlayer contact (drain metal)
56 Data line lower layer ITO (first transparent conductive film)
100, 100A TFT substrate 110, 130, 210 Polarizing plate 120 Alignment film 126 Common electrode 200, 200A Counter substrate 201 Glass substrate 202 Black matrix 203 Color layer 204 Flattening film 205 Conductive layer 220 Liquid crystal 313 Upper pixel electrode (comb electrode)
413 Lower layer pixel electrode (comb electrode)
500 Liquid crystal display device 510 according to the first embodiment Liquid crystal display device 520 according to the second embodiment Liquid crystal display device 530 according to the third embodiment Liquid crystal display device 540 according to the fourth embodiment Fifth embodiment Liquid crystal display device 550 according to the sixth embodiment Liquid crystal display device 560 according to the sixth embodiment Liquid crystal display device 570 according to the seventh embodiment Liquid crystal display device according to the eighth embodiment

Claims (16)

A first substrate comprising a thin film transistor, a data line, a pixel electrode, and a common electrode;
A second substrate;
A liquid crystal sandwiched between the first and second substrates,
An image signal is applied to the thin film transistor through the data line, and an electric field is generated between the pixel electrode that has received the image signal and the common electrode, and the liquid crystal is parallel to the first substrate by the electric field. In a liquid crystal display device that rotates in a plane,
The first substrate is
An inorganic insulating film covering the data line;
An organic insulating film made of a novolac resin, which is a projection-like colored material, provided on the inorganic insulating film above the data line;
A shield common electrode that covers the organic insulating film and covers the data line when viewed from above;
The data line crosses the gate line, the projecting of the organic insulating film is formed on the inorganic insulating film in the intersections of the data lines and the gate lines on the data line except, and the The shield common electrode covers the protruding organic insulating film,
The shield common electrodes of vertically adjacent pixels controlled by different scanning lines are electrically connected to each other, and a portion connecting the shield common electrodes to each other is a conductive layer forming the shield common electrode. A liquid crystal display device, characterized in that it is formed by a layer so as not to overlap the data line. Before Symbol gate line and the data line is connected to each gate line terminal electrode and the data line terminal electrodes around the first substrate,
2. The gate wiring terminal electrode and the data line terminal electrode are respectively connected to a gate terminal extraction electrode and a data terminal extraction electrode formed simultaneously with the common electrode above the inorganic insulating film. A liquid crystal display device according to 1. The gate wiring terminal electrode and the gate terminal extraction electrode are connected to each other, and the connection portion is formed of a transparent conductive film between the gate wiring terminal electrode and the gate terminal extraction electrode. A conductive layer separate from the electrode is formed,
The data line terminal electrode and the data terminal extraction electrode are connected to each other, and the connection portion is formed of a transparent conductive film between the data line terminal electrode and the data terminal extraction electrode. The liquid crystal display device according to claim 2, wherein a conductive layer different from the electrode is formed. The gate wiring terminal electrode and the gate terminal extraction electrode are connected to each other, and the connection portion is formed of an opaque conductive film between the gate wiring terminal electrode and the gate terminal extraction electrode. A conductive layer separate from the electrode is formed,
The data line terminal electrode and the data terminal extraction electrode are connected to each other, and the connection portion is formed of an opaque conductive film between the data line terminal electrode and the data terminal extraction electrode. The liquid crystal display device according to claim 2, wherein a conductive layer different from the electrode is formed. The gate wiring terminal electrode and the gate terminal lead-out electrode are connected to each other, and the connecting portion includes an opaque conductive layer and a transparent conductive layer between the gate wiring terminal electrode and the gate terminal lead-out electrode. A conductive layer different from the two electrodes is formed,
The data line terminal electrode and the data terminal take-out electrode are connected to each other, and the connection portion includes an opaque conductive layer and a transparent conductive layer between the data line terminal electrode and the data terminal take-out electrode. The liquid crystal display device according to claim 2, wherein a conductive layer different from the electrodes is formed.   6. The liquid crystal display device according to claim 1, wherein the shield common electrode is made of a transparent conductive film.   The liquid crystal display device according to claim 1, wherein the shield common electrode is formed of a laminated film of an opaque conductive film and a transparent conductive film.   The liquid crystal according to claim 1, wherein the pixel electrode and the common electrode are formed in parallel to each other, and the pixel electrode and the common electrode are provided in the same layer. Display device.   The liquid crystal according to claim 1, wherein the pixel electrode and the common electrode are formed in parallel to each other, and the pixel electrode and the common electrode are provided in different layers. Display device.   The pixel electrode and the common electrode are formed in parallel to each other, the pixel electrode and the common electrode are formed in a zigzag electrode, and the data line and the protruding organic insulating film are also formed in the zigzag electrode. The liquid crystal display device according to claim 1, wherein the liquid crystal display device is provided in parallel.   The pixel electrode and the common electrode are formed in parallel to each other, the pixel electrode and the common electrode are formed in a zigzag electrode, and the data line and the projecting organic insulating film are the pixel electrode and The liquid crystal display device according to claim 1, wherein the liquid crystal display device is formed of a portion substantially parallel to the common electrode and a portion substantially parallel to the rubbing direction. The portion connecting the shield common electrodes of the pixels adjacent in the vertical direction covers 60% or more of the gate lines not shielded by other conductive layers in each pixel. 1 liquid crystal display device according to any one of 1. The projecting of the organic insulating film, the surface of the liquid crystal side, the liquid crystal display device according to any one of claims 1 to 1 2, characterized in that it is covered by the shielding common electrode. The second substrate is provided with a black matrix layer, a color layer, and a planarization film that covers the black matrix and the color layer,
The liquid crystal display device according to any one of claims 1 to 1 3, wherein the thickness of the planarization layer is 1.5μm or more. Wherein the second substrate, a black matrix layer is provided, the liquid crystal display device according to any one of claims 1 to 1 4 resistivity of the black matrix layer is equal to or is 1E9Ω · cm or more . Wherein the position opposite to the second the data line of the substrate, as claimed in any one of claims 1 to 1 5, characterized in that the light-shielding film formed by laminating a color layer of two different colors are formed liquid crystal Display device.

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