JP5347286B2 - Adhesive tape, casing and transport / storage method thereof, photomask case and transport / storage method thereof - Google Patents

Description

  The present invention is used to seal a casing used for transporting and storing precision parts such as a photomask, a semiconductor wafer, a liquid crystal substrate, a printed wiring board, and a magnetic recording disk, or to block it from contamination with outside air. It relates to an adhesive tape.

  When manufacturing a semiconductor using a wafer or the like, a projection exposure method is used in which a pattern formed on a photomask is exposed by a projection optical system onto a substrate coated with a photosensitive agent such as a photoresist. In recent years, with the miniaturization of the pattern shape, the exposure light used tends to be shortened, and an exposure apparatus using KrF (wavelength 248 nm) or ArF (wavelength 193 nm) has been put into practical use. On the other hand, several tens of photomasks are used.

  These photomasks become foreign substances by adhering floating dust that floats around during exposure, storage, or transportation. The foreign matter on the photomask hinders image formation at the time of exposure, so that a defect appears in the product. In order to prevent such poor resolution due to foreign matters adhering to the photomask surface, the photomask is equipped with a pellicle as a dust-proof cover having translucency on the surface.

  Even in a photomask with a pellicle mounted, defects have recently occurred depending on the usage environment. This is because, in addition to the foreign matter floating around, by repeating exposure and storage, the fogging substance and the permeable environmental gas inside the member constituting the pellicle are altered to become foreign matter, and the foreign matter is gradually deposited on the photomask. This is due to the effect of accumulating.

  If foreign matter accumulates over a certain amount on the photomask, the photomask becomes cloudy and defects appear in the product. For this reason, it is necessary to clean the photomask in order to remove fogging. However, the cleaning increases the cost for manufacturing the product and wears the pattern of the photomask.

  Furthermore, in recent years, there is a concern about the generation of HAZE due to the oxidation of organic substances due to the influence of ozone generated by exposure in the space between the pellicle film and the photomask, and the generation of active species such as ozone in the space between the pellicle film and the photomask. There is a growing need for suppression and removal of organic matter.

Conventionally, the size of the HAZE generated by this operation is very small, and the influence upon exposure on the wafer is small, and it has not been detected at the time of inspection and has not been regarded as a big problem. However, the fineness of the pattern exposed on the wafer has progressed, and foreign matters that have been overlooked so far have been detected due to advances in inspection technology, and these problems have become apparent.
JP 2000-305254 A JP 2006-330421 A

  For this reason, in order not to generate HAZE in the pellicle, it is necessary to suppress the gas that is generated on the photomask and causes generation of foreign matters. The inventors of the present invention include gas generated from the pellicle and gas generated from a photomask case for storing and transporting the photomask as the factors that cause fogging and foreign matter generation on the photomask surface. Among others, the present inventors have found that the fogging and foreign matter generation on the photomask change depending on the conditions for placing the photomask in the photomask case and storing and transporting the photomask. When the photomask is stored and transported in the photomask case, it is fixed with an adhesive tape.

  Therefore, in the present invention, a gas that easily reacts with active species such as ozone is prevented from coexisting as much as possible inside the pellicle film and in the space on the photomask plate. It is an object to provide an adhesive tape.

  In order to solve the above-mentioned problem, in claim 1, an adhesive tape having an adhesive layer on one side of a base film, wherein a part of the adhesive layer is provided with an inert material layer made of a metal material or an inorganic material. It was set as the adhesive tape characterized by this.

In the invention according to claim 1, the inert material layer is provided along the long side direction of the pressure-sensitive adhesive tape, and the inert material layer is in the center in the short side direction of the pressure-sensitive adhesive tape. It provided on, and a viscous adhesive tape you characterized in that the adhesive layer is exposed in the short side direction at both ends of the adhesive tape.

As an invention according to claim 2 , the inert material layer is provided within a range of 20% to 80% with respect to the total area of the adhesive layer and the inert material layer of the adhesive tape. It was used as a pressure-sensitive adhesive tape of claim 1 Symbol mounting features.

Further, the invention according to claim 3 includes ammonium, organic amine, organic acid, PMMA, butadiene, phthalate ester, siloxane, silane, organic sulfur, organic phosphorus, BHT, aldehyde, and ketone generated from the inert material layer. , gas generation amount of total consisting of nitrogen-containing compound component, and a pressure-sensitive adhesive tape of claim 1, wherein a is 10 ng / cm ² or less with toluene terms relative to 80 ° C. 30 minutes heating conditions.

According to a fourth aspect of the present invention, there is provided a housing incorporating precision parts, the housing having a plurality of members, and a closed space is formed inside the housing in which the plurality of members are fitted together. A precision part is built in the casing, and a connecting portion of the casing in which the plurality of members are fitted is fixed with the adhesive tape according to any one of claims 1 to 3. Further, the casing is fixed so that the connecting portion of the casing does not contact the adhesive layer of the adhesive tape but contacts the inert material layer of the adhesive tape.

According to a fifth aspect of the present invention, there is provided a photomask case incorporating a photomask, wherein the photomask case has a plurality of members and is closed inside the photomask case in which the plurality of members are fitted. space is formed, has a built-in photomask inside the photomask case, and, pressure-sensitive adhesive tape according to any one connection of the photomask case is fitted is the plurality of members of claims 1 to 3 In addition, the photomask case is fixed so that the connecting portion of the photomask case does not contact the adhesive layer of the adhesive tape but contacts the inert material layer of the adhesive tape. A mask case was used.

According to a sixth aspect of the present invention, there is provided a method for transporting a casing in which a precision part is incorporated, the step of installing the precision part in a casing having a plurality of members, and fitting the plurality of members together. The process of making the inside of a housing | casing closed, and the connection part of the housing | casing in which these members are fitted together are fixed with the adhesive tape in any one of Claim 1 thru | or 3 , and connection of this housing | casing A step of fixing the part so as not to contact the adhesive layer of the adhesive tape and a contact with the inactive material layer of the adhesive tape, and a step of transporting the casing in which the precision component is built and fixed by the adhesive tape And a method for conveying precision parts.

The invention according to claim 7 is a method of transporting a photomask case incorporating a photomask, the step of installing the photomask on a photomask case having a plurality of members, and fitting the plurality of members. In addition, a step of making the inside of the photomask a closed space and a connecting portion of the photomask case in which the plurality of members are fitted together are fixed with the adhesive tape according to any one of claims 1 to 3 , and the photo A step of fixing the connecting portion of the mask case so as not to contact the adhesive layer of the adhesive tape but to contact the inert material layer of the adhesive tape; and a photomask having the photomask built therein and fixed with the adhesive tape And a step of conveying the case.

According to an eighth aspect of the present invention, there is provided a method for storing a housing in which a precision component is incorporated, the step of installing the precision component in a housing having a plurality of members, and fitting the plurality of members together. The process of making the inside of a housing | casing closed, and the connection part of the housing | casing in which these members are fitted together are fixed with the adhesive tape in any one of Claim 1 thru | or 3 , and connection of this housing | casing A step of fixing the part so as not to contact the adhesive layer of the adhesive tape and a contact with the inert material layer of the adhesive tape, and a step of storing the casing in which the precision part is built and fixed with the adhesive tape And a method for storing precision parts.

The invention according to claim 9 is a method of storing a photomask case incorporating a photomask, the step of installing the photomask in a photomask case having a plurality of members, and fitting the plurality of members. In addition, a step of making the inside of the photomask a closed space and a connecting portion of the photomask case in which the plurality of members are fitted together are fixed with the adhesive tape according to any one of claims 1 to 3 , and the photo A step of fixing the connecting portion of the mask case so as not to contact the adhesive layer of the adhesive tape but to contact the inert material layer of the adhesive tape; and a photomask having the photomask built therein and fixed with the adhesive tape And a step of storing the case.

  By providing an inert material layer, the pressure-sensitive adhesive tape of the present invention can prevent gas derived from the pressure-sensitive adhesive tape from entering the photomask case and becoming a source of generation of HAZE, and suppresses the generation of HAZE and is stable. It was possible to use a simple photomask.

  The following present invention will be described.

  First, the adhesive tape of this invention is demonstrated.

  1A is a schematic top view of the pressure-sensitive adhesive tape of the present invention, and FIG. 1B is a schematic cross-sectional view taken along line AA ′ in FIGS.

  In the pressure-sensitive adhesive tape 1 of the present invention, the pressure-sensitive adhesive layer 11 is provided on the base film 10, and the inert material layer 12 made of a metal material or an inorganic material is provided in part of the pressure-sensitive adhesive layer. By providing the inert material layer, the present invention can prevent gas from entering the inside of the housing such as a photomask case. Although details will be described later, gas is prevented from entering the housing by fixing the housing with an adhesive tape so that the connection portion of the housing is not in contact with the adhesive layer 11 but the inactive material layer 12. It becomes possible to do.

  Moreover, in the adhesive tape 1 of this invention, as shown in FIG. 1, the inert material layer 12 is provided along the long side direction (X) of an adhesive tape, and the inert material layer 12 is provided. It is provided in the center in the short side direction (Y) of the adhesive tape 1, and it is preferable that the adhesive layer 11 is exposed at both ends of the adhesive tape in the short side direction.

  By providing the inert material layer 12 over the central portion of the adhesive tape, it can be bonded along the connecting portion of the casing so as to surround the adhesive tape, and the casing can be fixed. The configuration in which the adhesive tape of the present invention is provided with the inert material layer over the central portion of the adhesive tape means that the adhesive layer of the adhesive tape is exposed at both ends in the short side direction.

  Moreover, in the pressure-sensitive adhesive tape 1 of the present invention, the inert material layer 12 is provided within a range of 20% to 80% with respect to the total area of the pressure-sensitive adhesive layer and the inert material layer. It is preferable. When the area occupied by the inert material layer is 20% or less, the inert material layer may not be provided at a desired position. That is, it may be difficult to fix the housing with the adhesive tape so that the connection portion of the housing and the inert material layer of the adhesive tape are in contact with each other. Further, when the area occupied by the inert material layer exceeds 80%, the function as an adhesive tape may not be performed. That is, it may be impossible to fix the members to improve the adhesion and sealing performance of the housing.

  In the pressure-sensitive adhesive tape of the present invention, the inert material layer can be made of a material having a small amount of gas generating components, and is appropriately selected from metal materials and inorganic materials. Among these, materials such as aluminum, copper, gold, glass, and quartz can be preferably used because of problems such as cost. Moreover, the fibrous inorganic material used for an activated carbon filter etc. can also be used as an inert material layer forming material. At this time, the pressure-sensitive adhesive tape has not only a small amount of gas generating components, but can also adsorb gas generated from other places (for example, the pressure-sensitive adhesive layer).

In addition, the inert material layer in the pressure-sensitive adhesive tape of the present invention needs to contain no gas generating component. Specifically, ammonium, organic amine, organic acid, PMMA, butadiene, phthalate ester, siloxane, silane, The total gas generation amount composed of organic sulfur, organic phosphorus, BHT, aldehyde, ketone, and nitrogen-containing compound component is preferably 10 ng / cm ² or less in terms of toluene with respect to heating conditions of 80 ° C. for 30 minutes. When the pressure-sensitive adhesive tape of the present invention is used for a photomask case with a built-in photomask, these gas generating components are components that cause HAZE generation when the photomask is used, and the inert material layer has these gas generating components. Is preferably included as much as possible.

Moreover, the adhesive tape of this invention is sulfuric acid extracted with 100 ml of ultrapure water at 100 ° C. for 30 minutes with respect to an inert material layer having an area of 1 cm ² among the inorganic ion components extracted from the inert material layer. It is preferable that the amount is 0.1 ng / ml or less and the ammonia amount is 0.1 ng / ml or less. Sulfate ions and ammonium ions are the causative substances for the generation of HAZE in photomasks. When the adhesive tape of the present invention is used for a photomask case with a built-in photomask, the inert material layer contains sulfate ions and ammonium ions as much as possible. Preferably not.

  The pressure-sensitive adhesive tape of the present invention can be produced by attaching a film or sheet made of a metal material or an inorganic material to a pressure-sensitive adhesive tape having a pressure-sensitive adhesive layer on a base film.

  As a base film used for the adhesive tape, polyester materials such as PET, vinyl chloride materials, cellulose materials such as cellophane, and urethane materials can be used. As the pressure-sensitive adhesive for forming the pressure-sensitive adhesive layer, a pressure-sensitive adhesive such as siloxane, acrylic, or natural rubber can be used.

  Among them, by using an adhesive tape that can be used in a clean room or the like, a film or sheet made of a metal material or an inorganic material is bonded to the adhesive layer of the adhesive tape, and the adhesive tape of the present invention is formed by forming an inert material layer. It is preferable to do.

  The pressure-sensitive adhesive tape of the present invention is used for improving the adhesion and sealing of a housing used for transporting and storing precision parts such as photomasks, semiconductor wafers, liquid crystal substrates, printed wiring boards, and magnetic recording disks.

  Hereinafter, a photomask case for storing and transporting a photomask will be described as an example of the housing of the present invention. FIG. 2 shows a schematic diagram of the photomask case of the present invention.

  The photomask case 2 of the present invention includes an upper lid portion 21 and a lower bottom portion 22. Moreover, the upper lid part 21 and the lower bottom part 22 have a hinge part 23, and one end of the upper lid part 21 and the lower bottom part 22 can be fixed by the hinge part 23 so that the photomask case 2 can be opened and closed. The upper lid portion 21 and the lower bottom portion 22 are provided with a fastener 24 so that when the photomask case 2 is closed and fixed with the fastener 24, the photomask case 2 is not easily opened.

  The photomask case of the present invention used for transporting and storing a photomask can be made by molding a thermoplastic resin mainly composed of an acrylic resin, but is not limited thereto. It is not something.

  Below, the fixing method of the housing | casing using the adhesive tape of this invention, the conveyance method of a precision component, and the storage method are demonstrated.

  3A is a schematic top view of a photomask case incorporating a photomask using the adhesive tape of the present invention, and FIG. 3B is a schematic cross-sectional view taken along line BB ′ in FIG. Indicated.

  In FIG. 3, a photomask 3 having a pellicle 4 is built in a photomask case 2. At this time, the upper cover portion 21 and the lower bottom portion 22 of the photomask are fixed by the fasteners 24.

  At this time, the adhesive tape 1 is provided to fix the upper lid portion 21 and the lower bottom portion 22 of the photomask case 2. By fixing the members composed of the upper lid portion 21 and the lower bottom portion 22 with an adhesive tape, the sealing property can be improved, and foreign matters can be prevented from being mixed from the gaps between the members during transport and storage. Moreover, adhesiveness can be improved by fixing members which consist of the upper cover part 21 and the lower bottom part 22 with an adhesive tape, and it can prevent that a photomask case opens by the unexpected impact at the time of conveyance.

  In the present invention, the connecting portion P between the upper lid portion 21 and the lower bottom portion 22 is provided so as to be in contact with the inert material layer 12 of the adhesive tape 1.

  In the case where the photomask case is fixed such that the adhesive layer of the adhesive tape is in contact with the connecting portion P of the upper lid portion 21 and the lower bottom portion 22, the gas generating component derived from the adhesive layer of the adhesive tape is a photomask. It has been found that it penetrates into the case and causes HAZE when using a photomask.

  Therefore, the present inventors have developed a pressure-sensitive adhesive tape 1 having an inert material layer 12 on the pressure-sensitive adhesive layer 11. Then, using the adhesive tape, the photomask case is fixed in such a manner that the joint P where the members of the upper lid portion 21 and the lower bottom portion 22 of the photomask case 2 are fitted with the inert material layer 12 of the adhesive tape is in contact with each other. By doing so, it was possible to prevent the gas generating component derived from the adhesive layer of the adhesive tape from entering the photomask case, and to suppress the generation of HAZE when using the photomask.

  In the present invention, the joint portion P in which the members of the upper lid portion 21 and the lower bottom portion 22 of the photomask case 2 are fitted to each other and the inert material layer 12 of the adhesive tape 1 are in contact with each other. The upper lid portion 21 and the lower bottom portion 22 are fixed by the adhesive tape 1.

  In the present invention, the connecting portion of the photomask case incorporating the photomask is bonded with the adhesive tape, and the upper lid portion and the lower bottom portion member are fixed or transported or stored.

  The pressure-sensitive adhesive tape of the present invention, a photomask case incorporating a photomask using the same, and its transport method and storage method can also be applied to other precision parts. That is, the pressure-sensitive adhesive tape of the present invention can be suitably used for a housing incorporating precision parts such as a liquid crystal substrate, a printed wiring board, and a magnetic recording disk, and a transport method and storage method thereof.

  Hereinafter, the present invention will be described in detail by way of examples.

  A copper foil was bonded to an adhesive tape having an adhesive layer made of a silicon-based material on an adhesive based on polyester to obtain an adhesive tape of the present invention. At this time, the area of the inert material layer made of copper foil was 50% with respect to the total area of the inert material layer and the adhesive layer.

The copper foil used was subjected to heat desorption GC / MS analysis at 80 ° C. using a heat desorption apparatus (TDSA2 / TDS / CIS, manufactured by Gerstel) and a gas chromatograph mass spectrometer (6890N / 5973 MSD, manufactured by Agilent). When the amount of gas generated was examined under heating conditions for 30 minutes, ammonium, organic amine, organic acid, PMMA, butadiene, phthalate ester, siloxane, silane, organic sulfur, organic phosphorus, BHT, aldehyde, ketone, nitrogen-containing compound components The total gas generation amount consisting of was 10 ng / cm ² or less in terms of toluene.

In addition, the used copper foil was cut into a size of 1 cm ² , extracted with 100 ml of ultrapure water under conditions of 100 ° C. for 30 minutes, and from the surface of the copper foil by an ion chromatograph analyzer (DX320 DIONEX). When the extracted inorganic ion component was measured, the amount of sulfuric acid extracted was 0.1 ng / ml or less, and the amount of ammonia was 0.1 ng / ml or less.

Next, a photomask with a pellicle was placed in a photomask case made of ABS resin having an upper lid portion, a lower bottom portion, a hinge portion, and a fastener, and the upper lid portion and the lower bottom portion were fitted together and fixed by the fastener portion. And in the connection part of an upper cover part and a lower bottom part, the photomask case was fixed with the adhesive tape so that a connection part and an inert material layer might contact, and it stored after fixing. During storage, the external environment outside the photomask case was constantly purged with a certain amount of N ₂ to prevent contamination from other environments.

(Comparative example)
The adhesive tape provided with the adhesive layer which consists of a silicon-type member in the adhesive which made the polyester the same base material as the (Example) was used. In (Comparative Example), an adhesive tape having no inert material layer was used.

The same photomask case as in Example was used, and the same pellicle as in Example 1 was used, using a photomask produced by the same manufacturing process as in Example. A photomask with a pellicle was placed in the photomask case, the upper lid part and the lower bottom part were fitted together, and fixed with a fastener part. And in the connection part of an upper cover part and a lower bottom part, the photomask case was fixed with the adhesive tape so that a connection part and an inert material layer might contact, and it stored for 72 hours after fixing. During storage, the external environment outside the photomask case was constantly purged with a certain amount of N ₂ to prevent contamination from other environments.

<Analysis of gas components on photomask>
(Example) In (Comparative Example), after fixing, a photomask is taken out from a photomask case stored for 72 hours, and a heat desorption type GC / MS analysis is performed with a heat desorption apparatus (TDSA2 / TDS / CIS, manufactured by Gerstel) and gas chromatograph. The gas component generated from the photomask was analyzed using a tomograph mass spectrometer (6890N / 5973MSD, manufactured by Agilent).

  FIG. 4A shows a gas chromatograph analysis result of the photomask stored in the photomask case of (Example). FIG. 4B shows a gas chromatograph analysis result of the photomask case stored in the photomask case of (Comparative Example). The photomask in the photomask case fixed using the adhesive tape of the present invention (Example) The gas mask compared with the photomask in the photomask case fixed using a normal adhesive tape (Comparative Example) It was confirmed that there are few components, and in particular, the adsorption of gas generating components derived from the adhesive layer of the adhesive tape indicated by the asterisk in FIG.

<Evaluation of photomask haze generation>
(Example) In (comparative example), after fixing, a photomask having a pellicle is taken out from a photomask case stored for 72 hours, and an ArF laser (manufactured by ximer-300 MPB) is used to emit a wavelength of 50 mW / cm ₂ and 200 Hz In the same shot, each photomask was irradiated.

  As a result, many 0.1 um level products were detected from the photomask having the pellicle taken out from the photomask case (comparative example) fixed with a normal adhesive tape, and the HAZE on the photomask surface was visually observed. Was confirmed. On the other hand, from the photomask having the pellicle taken out from the photomask case of (Example) fixed using the adhesive tape of the present invention, a product of 0.1 um level was compared with the photomask of (Comparative Example). Therefore, HAZE on the surface of the photomask was not visually confirmed.

FIG. 1: is the (a) schematic top view of the adhesive tape of this invention, and a schematic cross section at the time of cut | disconnecting by the AA 'line in (b) (a). FIG. 2 is a schematic view of the photomask case of the present invention. 3A is a schematic top view of a photomask case incorporating a photomask using the adhesive tape of the present invention, and FIG. 3B is a schematic cross-sectional view taken along line BB ′ in FIG. is there. FIG. 4A shows a gas chromatograph analysis result of the photomask stored in the photomask case of the example. FIG. 4B shows a gas chromatograph analysis result of the photomask case stored in the photomask case of (Comparative Example).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Adhesive tape 10 Base film 11 Adhesive layer 12 Inactive material layer 2 Photomask case 21 Upper cover part 22 Lower bottom part 23 Hinge part 24 Fastening part 3 Photomask 4 Pellicle

Claims (9)

An adhesive tape having an adhesive layer on one side of the base film, wherein a part of the adhesive layer is provided with an inert material layer made of a metal material or an inorganic material ,
The inert material layer is provided along the long side direction of the pressure-sensitive adhesive tape, and the inert material layer is provided at the center in the short-side direction of the pressure-sensitive adhesive tape, and the short side of the pressure-sensitive adhesive tape. An adhesive tape, wherein the adhesive layer is exposed at both ends in the direction . The pressure-sensitive adhesive tape according to claim 1, wherein the inert material layer is provided in a range of 20% to 80% with respect to the total area of the pressure-sensitive adhesive layer and the inert material layer of the pressure-sensitive adhesive tape. . Total gas generation from ammonium, organic amine, organic acid, PMMA, butadiene, phthalate ester, siloxane, silane, organic sulfur, organic phosphorus, BHT, aldehyde, ketone, nitrogen-containing compound components generated from the inert material layer amount, pressure-sensitive adhesive tape of claim 1, wherein a is 10 ng / cm ² or less with toluene terms relative to 80 ° C. 30 minutes heating conditions. A housing with precision components built-in,
  The casing has a plurality of members, a closed space is formed inside the casing in which the plurality of members are fitted, a precision component is built in the casing, and
  The connection part of the housing | casing by which this several member is fitted is fixed with the adhesive tape in any one of Claim 1 thru | or 3, Furthermore, the connection part of this housing | casing is an adhesive layer of the said adhesive tape, and A housing which is fixed so as to be in contact with an inert material layer of the adhesive tape without contacting. A photomask case with a built-in photomask,
  The photomask case has a plurality of members, a closed space is formed inside the photomask case in which the plurality of members are fitted, a photomask is built in the photomask case, and
  The connecting portion of the photomask case in which the plurality of members are fitted is fixed with the adhesive tape according to any one of claims 1 to 3, and the connecting portion of the photomask case is further bonded to the adhesive tape. A photomask case fixed so as to be in contact with an inert material layer of the pressure-sensitive adhesive tape without contacting the layer. A method of transporting a housing with precision parts built-in,
  Installing a precision component in a housing having a plurality of members;
  Fitting the plurality of members into a closed space inside the housing; and
  The connecting portion of the housing in which the plurality of members are fitted is fixed with the adhesive tape according to any one of claims 1 to 3, and the connecting portion of the housing is in contact with the adhesive layer of the adhesive tape. Without fixing, in contact with the inert material layer of the adhesive tape,
  A step of transporting the housing in which the precision component is built and fixed with an adhesive tape;
  A method for transporting precision parts. A method of transporting a photomask case with a built-in photomask,
  Installing a photomask in a photomask case having a plurality of members;
  Fitting the plurality of members into a closed space inside the photomask; and
  The connecting portion of the photomask case in which the plurality of members are fitted is fixed with the adhesive tape according to any one of claims 1 to 3, and the connecting portion of the photomask case is connected to the adhesive layer of the adhesive tape. Fixing without contacting, and in contact with the inert material layer of the adhesive tape;
  A step of transporting a photomask case in which the photomask is incorporated and fixed with an adhesive tape;
  A photomask case transport method comprising: A storage method for a housing containing precision parts,
  Installing a precision component in a housing having a plurality of members;
  Fitting the plurality of members into a closed space inside the housing; and
  The connecting portion of the housing in which the plurality of members are fitted is fixed with the adhesive tape according to any one of claims 1 to 3, and the connecting portion of the housing is in contact with the adhesive layer of the adhesive tape. Without fixing, in contact with the inert material layer of the adhesive tape,
  Storing the casing in which the precision component is built and fixed with an adhesive tape;
  A method for storing precision parts. A method of storing a photomask case with a built-in photomask,
  Installing a photomask in a photomask case having a plurality of members;
  Fitting the plurality of members into a closed space inside the photomask; and
  The connecting portion of the photomask case in which the plurality of members are fitted is fixed with the adhesive tape according to any one of claims 1 to 3, and the connecting portion of the photomask case is connected to the adhesive layer of the adhesive tape. Fixing without contacting, and in contact with the inert material layer of the adhesive tape;
  A process for storing the photomask case with the photomask built in and fixed with adhesive tape
About
  A photomask case storage method comprising: