JP5346702B2 - Mounting tool set and annular blade mounting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mounting tool set and method for mounting an annular blade using the same, capable of significantly facilitating mounting of the annular blade on a tool mount without requiring skill and causing damage to the annular blade. <P>SOLUTION: The mounting tool set includes the following three tools: a blade retaining tool (42) for sucking and retaining the side face of the annular blade (2); a mounting guide tool (44) for guiding the blade retaining tool (42) so that the side face of the annular blade (2) abuts onto an annular receiving surface of the tool mount (12) in parallel in fitting the annular blade (2) sucked in and retained at the blade retaining tool (42) onto the tool mount (12); and a blade charging tool (42) for charging the annular blade (2) at a specified position of the blade retaining tool (42). <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a mounting portion having a cylindrical mounting surface mounted on a rotating spindle and extending in the rotation axis direction of the spindle, and an annular receiving surface having an annular receiving surface extending radially outward from the base end of the mounting portion. The present invention relates to a mounting tool set and a mounting method for mounting an annular blade having a mounting hole fitted to a mounting surface of the mounting unit on a tool mount including a mounting portion.

  As disclosed in Patent Document 1 below, in a cutting apparatus for dicing a plate-like object such as a semiconductor package substrate, a tool mount is attached to a rotating spindle that is rotated at high speed, and an annular blade is attached to the tool mount. Wearing. The tool mount includes a mounting portion having a cylindrical mounting surface extending in the rotation axis direction of the spindle, and an annular receiving portion having an annular receiving surface extending radially outward from the base end of the mounting portion. . The annular blade has an annular shape, and a mounting hole that is fitted to the mounting surface of the tool mount is formed at the center.

  As an operation for mounting the annular blade on the tool mount, the mounting hole of the annular blade is slid on the mounting surface of the tool mount, and one surface of the annular blade is brought into contact with the annular receiving surface of the tool mount. Thereafter, a fixed plate having the same outer diameter as the annular receiving surface is brought into contact with the other surface of the annular blade, the fixed plate is fixed to the tool mount with a mount nut, and the annular blade is attached to the tool mount.

JP-A-11-33907

  The above-described operation of attaching the annular blade to the tool mount is performed manually by the operator. However, the annular blade is extremely thin (for example, about 100 μm), hard and brittle, the clearance between the mounting surface of the tool mount and the mounting hole of the annular blade is extremely small, and the annular blade is placed around the tool mount such as the wheel cover. There is a high possibility that the annular blade is damaged during the mounting operation due to a collision with a certain member.

  The present invention has been made in view of the above-mentioned facts, and the main technical problem thereof is to attach the annular blade to the tool mount sufficiently easily without requiring skill and without damaging the annular blade. It is an object to provide a mounting tool set that enables the mounting of an annular blade using such a mounting tool set.

According to the present invention, as a mounting tool set that achieves the main technical problem described above, a mounting portion that is mounted on a rotary spindle and has a cylindrical mounting surface that extends in the rotation axis direction of the spindle, and a base of the mounting portion. A mounting tool for mounting an annular blade having a mounting hole fitted to the mounting surface of the mounting portion on a tool mount having an annular receiving portion having an annular receiving surface extending radially outward from the end A set,
A blade holding tool that sucks and holds the side surface of the annular blade, and the annular blade that is sucked and held by the blade holding tool when the annular blade is attached to the tool mount with respect to the annular receiving surface of the tool mount. It is composed of three tools: a mounting guide tool for guiding the blade holding tool so that the side surfaces abut against each other in parallel, and a blade loading tool for loading the annular blade into a predetermined position of the blade holding tool.
The mounting guide tool includes a rod-shaped mounting guide portion that is detachably fixed to a tip portion of the tool mount mounted on the spindle and has a guide surface parallel to the mounting surface of the tool mount,
The blade holding tool has a grip portion having a guided recess to be fitted to the mounting guide portion of the mounting guide tool, and adsorbs a side surface of the annular blade formed on the outer periphery of the guided recess of the grip portion. An annular blade suction part, and a suction path opened in the suction surface of the blade suction part,
The blade loading tool includes a mounting table that supports a side surface of the annular blade, and a cylindrical defining surface that defines the position of the annular blade by engaging the mounting hole of the annular blade mounted on the mounting table. And a rod-shaped guide convex portion that extends upward from the center of the specific portion and engages with the guided concave portion of the blade holding tool.
An installation tool set is provided.

  Preferably, a frustoconical guide surface whose radius gradually increases downward is disposed between the lower end of the rod-shaped guide convex portion and the upper end of the defining portion of the blade loading tool, The holding tool includes an annular auxiliary member that is detachably mounted, and a front end surface of the annular auxiliary member has an annular expansion surface that surrounds the blade adsorption portion and is flush with the blade adsorption surface. The outer diameter of the expansion surface is preferably larger than the outer diameter of the annular blade.

Further, according to the present invention, as a mounting method for achieving the main technical problem, the annular blade is aligned with the mounting surface of the blade loading tool by aligning the mounting hole of the annular blade with the specified surface of the blade loading tool. An annular blade mounting step for mounting;
A mounting guide tool mounting step for mounting the mounting guide tool on the tip of the tool mount;
After the annular blade mounting step, the guided concave portion of the blade holding tool is slidably engaged with the rod-shaped guide convex portion of the blade loading tool, and the blade suction surface of the blade holding tool is placed on the blade loading tool. A blade suction holding step for adsorbing the annular blade to the annular blade suction surface by sucking the annular blade close to the side surface of the annular blade placed on the suction path, and
After the mounting guide tool attaching step and the blade suction holding step, the guided member of the blade holding tool that sucks and holds the annular blade on the mounting guide portion of the mounting guide tool mounted on the tip of the tool mount. A blade mounting step of sliding the recess, inserting a side surface of the annular blade into contact with the annular receiving surface of the tool mount and mounting the annular blade to the tool mount;
After the blade mounting step, the suction of the blade holding tool through the suction path is released, the blade holding tool is removed from the mounting guide tool, and the mounting guide tool is removed from the tool mount. And a mounting method of the annular blade using the mounting tool described above.

  By using the mounting tool set of the present invention, the annular blade can be mounted on the tool mount as easily as required without skill and without causing the annular blade to collide with the wheel cover or the tool mount and be damaged. can do.

The disassembled perspective view which shows the relationship between a spindle mechanism and the annular blade with which a spindle mechanism is mounted | worn. Sectional drawing which shows the relationship between a spindle mechanism and the tool mount with which a spindle mechanism is mounted | worn. Sectional drawing which shows the relationship between an annular blade and a wheel cover. Sectional drawing which shows an installation tool set. Sectional drawing which shows a cyclic | annular blade mounting step. Sectional drawing which shows a blade loading step. (A) Sectional drawing which shows a blade loading step. (B) The principal part expanded sectional view. Sectional drawing which shows a mounting | wearing guide tool attachment step. Sectional drawing which shows a blade mounting | wearing step. Sectional drawing which shows a blade mounting | wearing step. Sectional drawing which shows a tool removal step. Sectional drawing which shows the state which fixes an annular blade. Sectional drawing which shows the state with which the cyclic | annular braid | blade was mounted | worn with the tool mount.

  Hereinafter, the mounting tool set and mounting method of the present invention will be described in more detail with reference to the accompanying drawings.

  FIG. 1 shows a spindle mechanism 4 on which the annular blade 2 is mounted. The spindle mechanism 4 includes a housing 6 and a spindle 8 rotatably supported by an air bearing structure (not shown) in the housing 6, and a tip end portion of the spindle 8 projects from the housing 6. The tip of the spindle 8 is formed in a tapered shape that becomes narrower toward the tip, and a female screw hole 10 that opens to the tip is formed in the tip.

  As shown in FIGS. 1 and 2, the tool mount 12 extends in the axial direction of the spindle 8 and has a mounting portion 16 having a columnar mounting surface 14 on the front side and a front side from the mounting portion 16 (left in FIG. 2). And a cylindrical front end portion 17 having an outer diameter smaller than the outer diameter of the mounting portion 16 and an annular receiving portion 18 having an outer diameter larger than the outer diameter of the mounting portion 16. A front end surface of the annular receiving portion 18 extends radially outward from the mounting surface 14 to constitute an annular receiving surface 20 that receives the cutting tool 2. A fitting hole 22 that fits into the tapered portion at the tip of the spindle 8 is formed inside the annular receiving portion 18. A male screw 26 into which the mount nut 24 is screwed is formed on the outer peripheral surface of the front end portion 17. An insertion hole 28 into which the fixing bolt 13 is inserted is formed inside the front end portion 17, and the insertion hole 28 communicates with the fitting hole 22. A female screw 29 is formed at the tip of the insertion hole 28. In the tool mount 12 configured in this manner, the fitting hole 22 is fitted into the tip tapered portion of the spindle 8, the fixing bolt 13 is inserted into the insertion hole 28 through the washer 15, and the female screw at the tip of the spindle 8 is inserted. It is screwed into the hole 10 and fixed to the spindle 8.

  As shown in FIG. 1, the annular blade 2 attached to the tool mount 12 has a mounting hole 30 that is fitted into the mounting surface 14 of the tool mount 12. The annular blade 2 is formed to have an outer diameter larger than the outer diameter of the annular receiving portion 18 of the tool mount 12. The annular blade 2 is mounted on the tool mount 12 by fitting the mounting hole 30 of the annular blade 2 on the mounting surface 14 of the tool mount 12 and bringing one surface of the annular blade 2 into contact with the annular receiving surface 20 of the tool mount 12. Is done. Next, as shown in FIGS. 1 and 12, the outer diameter of the tool mount 12 is the same as or equal to the outer diameter of the annular receiving portion 18, and the center portion is fitted to the front end portion 17 of the tool mount 12. The annular blade 2 is fixed to the tool mount 12 by a substantially frustoconical fixing plate 34 having a hole 32. A contact surface 36 is formed on one surface (right surface in FIG. 12) of the fixed plate 34 so as to be fitted to the mounting portion 16 of the tool mount 12 and contact the side surface of the annular blade 2 mounted on the mounting portion 16. . The fitting hole 32 of the fixed plate 34 is fitted to the front end portion 17 of the tool mount 12 so that the abutting surface 36 abuts against the side surface of the annular blade 2. Thereafter, the mount nut 24 formed in an annular shape and having an internal thread 38 formed on the inner periphery thereof is screwed into the external thread 26 of the front end portion 17 of the tool mount 12, and the fixing plate 34 and the annular blade 2 are connected to the tool. It is fixed to the mount 12.

  As shown in FIG. 3, the annular blade 2 mounted on the tool mount 12 is covered on the left and right sides and the upper portion, and the rotating annular blade 2 and a wheel cover 37 for supplying cutting water to the processing point are fixed to the housing 6. (The housing 6 and the spindle 8 are not shown in FIG. 3). The wheel cover 37 is made of, for example, stainless steel. In FIG. 3A, an injection nozzle 39 that injects cutting water from the right side of the annular blade 2 toward the lower end of the outer periphery of the annular blade 2, and a side surface of the annular blade 2. An injection nozzle 40 and the like for injecting cutting water in the vertical direction are included. The injection nozzle 40 is configured to be movable in the left-right direction as shown in FIG. When the annular blade 12 is attached / detached, as shown in FIG. 3B, the injection nozzle 40 is positioned in the open state where it moves to the left, and the annular blade 2 is attached / detached.

  Next, an embodiment of a mounting tool set according to the present invention will be described with reference to FIG. The mounting tool set 1 includes three tools: a blade loading tool 42, a mounting guide tool 44, and a blade holding tool 46.

  The blade loading tool 42 is made of a rigid material such as stainless steel, and the mounting table 48 that supports the side surface of the annular blade 2 and the mounting hole 30 of the annular blade 2 mounted on the mounting table 48 are engaged with each other. A defining portion 52 having a cylindrical defining surface 50 that defines the position, and a cylindrical rod-shaped guide convex portion 54 having an outer diameter of D1 (mm) and a height L1 (mm) protruding upward from the center of the defining portion 52. Including. Between the lower end of the rod-shaped guide convex portion 54 and the upper end of the defining portion 52, a tapered portion 58 having a frustoconical guide surface 56 whose radius gradually increases downward is disposed, and the upper end of the tapered portion 58 is A horizontal plane 60 is provided. From the horizontal surface 60 to the upper surface of the mounting table 48, a thickness of L4 (mm) is formed. The outer edges of the mounting table 48, the defining portion 52, the taper portion 58, and the rod-shaped guide convex portion 54 are circular and concentrically formed. Furthermore, a taper shape is formed at the upper end portion of the rod-shaped guide convex portion 54 and is formed into a shape that can be easily inserted when a blade holding tool 46 described later is engaged.

  The mounting guide tool 44 is entirely formed of a rigid material such as stainless steel, and includes a cylindrical mounting guide portion 62 and a screw portion 64 formed at one end of the mounting guide portion 62. The mounting guide part 62 is formed in a cylindrical shape having an outer diameter of D2 (mm) and a height L2 (mm), and the outer diameter D1 (mm) and the height L1 of the rod-shaped guide convex part 54 of the blade loading tool 42. (Mm) is substantially the same. Further, the outer diameter of the screw portion 64 is formed to be substantially the same as the inner diameter of the insertion hole 28 of the distal end portion 17 of the tool mount 12, and the screw portion 64 is screwed into the female screw 29 of the tool mount 12. The mounting guide 62 has a guide surface 63 that is parallel to the mounting surface 14 of the tool mount 12 when the screw portion 64 is mounted on the tool mount 12. The mounting guide portion 62 of the mounting guide tool 44 is not limited to a columnar shape but may have other shapes such as a prismatic shape as long as it has a guide surface 63 that is parallel to the mounting surface 14 of the tool mount 12 when attached to the tool mount 12. It may be formed. Further, the other end portion of the mounting guide portion 62 is formed in a tapered shape, and is configured to be easily inserted when a blade holding tool 46 described later is engaged.

  As shown in FIG. 4, the blade holding tool 46 includes a cylindrical grip portion 66, a cylindrical concave portion 70 having an inner diameter D4 (mm) formed at one end of the grip portion 66, and the center of the concave portion 70. And a cylindrical guided recessed portion 68 formed on the inside and having an inner circumference of D3 (mm) and a depth of L3 (mm). The entire grip portion 66 is formed of a rigid material such as stainless steel. The inner diameter D3 and the depth L3 of the guided concave portion 68 of the blade holding tool 46 are the outer diameter D1 and the height L1 of the rod-shaped guide convex portion 54 of the blade loading tool 42 and the outer diameter D2 of the mounting guide portion 62 of the mounting guide tool 44. It is formed to be able to engage slightly larger than the height L2. Further, the inner diameter D4 of the recess 70 is formed so as to be able to be engaged slightly larger than the outer diameter of the mounting portion 16 of the tool mount 12. The shape of the guided recess 68 of the blade holding tool 46 is not limited to a cylindrical shape, but may be formed in other shapes such as a prismatic shape as long as the guide surface 63 of the mounting guide tool 44 and the rod-shaped guide protrusion 54 of the blade loading tool 42 can be engaged. May be.

  The grip portion 66 includes an annular blade suction portion 72 that is formed on the outer periphery of the concave portion 70 and sucks the side surface of the annular blade 2, and a suction path 76 that opens to the suction surface 74 of the blade suction portion 72. The suction path 76 includes an annular groove 76 a that surrounds the recess 70, and a communication path 76 b that communicates with the groove 76 a formed inside the grip part 66, and the communication path 76 b extends from the side surface of the grip part 66 to the outside. To a vacuum suction source (not shown).

  Further, an annular auxiliary member 78 having an annular shape surrounding the outer periphery of the blade adsorbing portion 72 is detachably mounted. The front end surface of the annular auxiliary member 78 has an annular expansion surface 80 that is flush with the blade suction surface 74. The outer diameter of the annular auxiliary member 78 is formed larger than the outer diameter of the annular blade 2. Annular auxiliary members 78 having various outer diameters corresponding to the outer diameter of the annular blade 2 are prepared, and are appropriately changed according to the annular blade 2 to be used. Further, when the annular auxiliary member 78 is formed of a transparent material such as an acrylic resin, the mounting state of the annular blade 2 can be visually confirmed.

  The description of the blade holding tool 46 will be continued with reference to FIGS. 4 and 7. As shown in FIG. 7A, the guided recessed portion 68 and the recessed portion 70 of the blade holding tool 46 engage with the rod-shaped guiding convex portion 54, the tapered portion 58, and the defining portion 52 of the blade loading tool 42. As shown in FIG. 4, the depth L5 (mm) of the recess 70 of the blade holding tool 46 is a thickness L4 (mm) from the horizontal surface 60 at the upper end of the tapered portion 58 of the blade loading tool 42 to the upper surface of the mounting table 48. It is formed smaller than. That is, the annular blade 2 is formed to be smaller by the thickness of several hundred μm, for example, 200 μm. Therefore, as shown in FIG. 7A, the side surface of the annular blade 2 is placed on the upper surface of the mounting table 48 of the blade loading tool 42, and the upper wall surface of the recess 70 of the blade holding tool 46 is defined by the blade loading tool 42. When brought into contact with the horizontal surface 60 of the portion 52, as shown in FIG. 7B, several hundred μm, for example, between the side surface of the annular blade 2 and the blade suction surface 74 and the annular expansion surface 80 of the blade holding tool 46. A gap 79 of about 200 μm is generated. Therefore, the annular blade 2 can be prevented from being damaged by being pressed between the blade suction surface 74 and the annular expansion surface 80 of the blade holding tool 46 and the mounting table 48 of the blade loading tool 42.

  Next, a mounting method for mounting the annular blade 2 on the tool mount 12 using the mounting tool set configured as described above will be described. As shown in FIG.3 (b), the injection nozzle 40 of the wheel cover 37 is located in an open position. Then, the mount nut 24 and the fixing plate 34 are removed from the tool mount 12, and the annular blade 2 that needs to be replaced is removed from the mounting surface 14 of the tool mount 12, and the state shown in FIG.

  First, as shown in FIG. 5, the mounting hole 30 of the annular blade 2 is inserted into the rod-shaped guide convex portion 54 of the blade loading tool 42. The mounting hole 30 is guided by the guide surface 56 of the tapered portion 58 of the blade loading tool 42, and the mounting hole 30 of the annular blade 2 is engaged with the defining surface 50 of the defining portion 52. In this manner, the annular blade 2 is placed on the placement table 48 of the blade loading tool 42 (annular blade placement step (S1)). Since the blade loading tool 42 has a guide surface 56, the mounting hole 30 of the annular blade 2 is guided by the guide surface 56 and can be easily aligned with the defined surface 50 of the blade loading tool 42.

  Next, as shown in FIGS. 6 and 7, the guided concave portion 68 of the blade holding tool 46 is slidably engaged with the rod-shaped guide convex portion 54 of the blade loading tool 42, and the upper wall surface of the concave portion 70 of the blade holding tool 46. Is brought into contact with the horizontal surface 60 of the tapered portion 58 of the blade loading tool 42. At this time, a space of about 200 μm exists between the side surface of the annular blade 2 mounted on the mounting table 48 of the blade loading tool 42 and the blade suction surface 74 and the annular expansion surface 80 of the blade holding tool 46. It is possible to prevent the blade 2 from being damaged by being pressed between the blade suction surface 74 and the annular expansion surface 80 of the blade holding tool 46 and the mounting table 48 of the blade loading tool 42. Thereafter, the suction path 76b communicates with the suction source, and the suction force communicates with the groove 76a, so that the side surface of the annular blade 2 is sucked and held by the blade suction surface 74 and the annular expansion surface 80 (blade suction holding step (S2)). .

  On the other hand, as shown in FIG. 8, the screw portion 64 of the mounting guide tool 44 is screwed into the female screw 29 of the insertion hole 28 at the tip of the tool mount 12, and the mounting guide tool 44 is attached to the tool mount 12 ( Mounting guide tool mounting step (S3)).

  After the steps S1 to S3, a blade mounting step (S4) is performed. The blade holding tool 46 that sucks and holds the annular blade 2 is removed from the blade loading tool 42. Then, as shown in FIG. 9, a guided recess 68 of the blade holding tool 46 that sucks and holds the annular blade 2 is inserted into the mounting guide portion 62 of the mounting guide tool 44 mounted at the tip of the tool mount 12. Move. As shown in FIG. 10, the annular blade 2 is slid until the side surface of the annular blade 2 comes into contact with the annular receiving surface 20 of the tool mount 12 (blade mounting step (S4)).

  Since the guided recess 68 of the blade holding tool 46 is guided to the guide surface 63 of the mounting guide portion 62, the side surface of the annular blade 2 abuts against the annular receiving surface 20 of the tool mount 12 in parallel. Further, since the annular blade 2 is loaded at the specified position of the blade suction surface 74 by the blade loading tool 42, the mounting hole 30 of the annular blade 2 is smoothly inserted without contacting the mounting surface 14 of the tool mount 12. Therefore, even when an extremely thin annular blade 2 having a blade thickness of 100 μm or less is attached, the annular blade 2 can be attached without causing damage. Further, as shown in FIG. 3B, a wheel cover 37 is disposed around the tool mount 12, but the outer periphery of the annular expansion surface 80 of the blade holding tool 46 is larger than the outer diameter of the annular blade 2. Since it is comprised, it can prevent that the blade edge | tip of the annular blade 2 contacts the wheel cover 37 as much as possible.

  After the blade mounting step (S 4), as shown in FIG. 11, the suction action of the blade holding tool 46 is released and the blade holding tool 46 is removed from the mounting guide tool 44. Thereafter, the mounting guide tool 44 is removed from the tool mount 12 (tool removal step (S5)). Since the mounting hole 30 of the annular blade 2 is fitted to the mounting surface 14 of the tool mount 12, the annular blade 2 remains in contact with the annular receiving surface 20 of the tool mount 12 even after the blade holding tool 46 is removed. Maintained.

  Next, as shown in FIG. 12, the fitting hole 32 of the fixing plate 34 is fitted to the front end portion 17 of the tool mount 12, and the contact surface 36 of the fixing plate 34 is brought into contact with the side surface of the annular blade 2. Then, the mount nut 24 is screwed into the male screw 26 of the front end portion 17 of the tool mount 12, and the fixing plate 34 and the annular blade 2 are fixed to the tool mount 12.

2 annular blade 4 spindle mechanism 12 tool mount 14 mounting surface 34 fixing plate 37 wheel cover 42 blade loading tool 46 blade holding tool 44 mounting guide tool 62 mounting guide portion 68 guided recess 74 blade suction surface 80 annular expansion surface

Claims (4)

A mounting portion having a cylindrical mounting surface mounted on the rotary spindle and extending in the direction of the rotation axis of the spindle; and an annular receiving portion having an annular receiving surface extending radially outward from the proximal end of the mounting portion. A mounting tool set for mounting an annular blade having a mounting hole fitted to the mounting surface of the mounting portion on a tool mount comprising:
A blade holding tool that sucks and holds the side surface of the annular blade, and the annular blade that is sucked and held by the blade holding tool when the annular blade is attached to the tool mount with respect to the annular receiving surface of the tool mount. It is composed of three tools: a mounting guide tool for guiding the blade holding tool so that the side surfaces abut against each other in parallel, and a blade loading tool for loading the annular blade into a predetermined position of the blade holding tool.
The mounting guide tool includes a rod-shaped mounting guide portion that is detachably fixed to a tip portion of the tool mount mounted on the spindle and has a guide surface parallel to the mounting surface of the tool mount,
The blade holding tool has a grip portion having a guided recess to be fitted to the mounting guide portion of the mounting guide tool, and adsorbs a side surface of the annular blade formed on the outer periphery of the guided recess of the grip portion. An annular blade suction part, and a suction path opened in the suction surface of the blade suction part,
The blade loading tool includes a mounting table that supports a side surface of the annular blade, and a columnar defining surface that defines the position of the annular blade by engaging the mounting hole of the annular blade mounted on the mounting table. And a rod-shaped guide convex portion that extends upward from the center of the specific portion and engages with the guided concave portion of the blade holding tool.
An installation tool set characterized by that.   A taper portion having a truncated cone-shaped guide surface whose radius gradually increases downward is disposed between the lower end of the rod-shaped guide convex portion of the blade loading tool and the upper end of the defining portion. Item 1. A mounting tool set according to item 1.   The blade holding tool includes an annular auxiliary member that is detachably mounted, and a front end surface of the annular auxiliary member has an annular expansion surface that surrounds the blade adsorption portion and is flush with the blade adsorption surface. The mounting tool set according to claim 1 or 2, wherein an outer diameter of the annular expansion surface is larger than an outer diameter of the annular blade. An annular blade mounting step of engaging the mounting hole of the annular blade with the defined surface of the blade loading tool and placing the annular blade on the mounting table of the blade loading tool;
A mounting guide tool mounting step for mounting the mounting guide tool on the tip of the tool mount;
After the annular blade mounting step, the guided concave portion of the blade holding tool is slidably engaged with the rod-shaped guide convex portion of the blade loading tool, and the blade suction surface of the blade holding tool is placed on the blade loading tool. A blade suction holding step for adsorbing the annular blade to the annular blade suction surface by sucking the annular blade close to the side surface of the annular blade placed on the suction path, and
After the mounting guide tool attaching step and the blade suction holding step, the guided member of the blade holding tool that sucks and holds the annular blade on the mounting guide portion of the mounting guide tool mounted on the tip of the tool mount. A blade mounting step of sliding the recess, inserting a side surface of the annular blade into contact with the annular receiving surface of the tool mount and mounting the annular blade to the tool mount;
After the blade mounting step, the suction of the blade holding tool through the suction path is released, the blade holding tool is removed from the mounting guide tool, and the mounting guide tool is removed from the tool mount. When,
The mounting method of the annular blade using the mounting tool set in any one of Claim 1 to 3 comprised from these.

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