JP5328631B2 - 熱硬化型ダイボンドフィルム - Google Patents
熱硬化型ダイボンドフィルム Download PDFInfo
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- JP5328631B2 JP5328631B2 JP2009287992A JP2009287992A JP5328631B2 JP 5328631 B2 JP5328631 B2 JP 5328631B2 JP 2009287992 A JP2009287992 A JP 2009287992A JP 2009287992 A JP2009287992 A JP 2009287992A JP 5328631 B2 JP5328631 B2 JP 5328631B2
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- Prior art keywords
- die
- film
- bonding film
- thermosetting
- die bond
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Description
本発明の熱硬化型ダイボンドフィルム(以下、「ダイボンドフィルム」と言う)について、図1に示す様に基材1上に粘着剤層2が積層されてなるダイシングフィルム上に積層された態様を例にして以下に説明する。
次に、本実施の形態に係るダイボンドフィルムを用いた半導体装置の製造方法について説明する。図3はダイボンドフィルムを介して半導体素子を実装した例を示す断面模式図である。
前記基板等上に半導体素子を3次元実装する場合、半導体素子の回路が形成される面側には、バッファーコート膜が形成されている。当該バッファーコート膜としては、例えば窒化珪素膜やポリイミド樹脂等の耐熱樹脂からなるものが挙げられる。
エポキシ樹脂(JER(株)製、エピコート1001)70重量部、フェノール樹脂(三井化学(株)製、MEH7851)30重量部、カルボキシル基含有アクリル共重合体として酸価1.5のアクリル酸エステル系ポリマー(重量平均分子量80万、ガラス転移点5℃)420重量部、及びフィラーとしての球状シリカ(平均粒径0.5μm、アドマテックス(株)製、SO−25R)270重量部をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。尚、前記アクリル酸エステル系ポリマーは、メタクリル酸エチル30重量%、メタクリル酸ブチル40重量%、及びアクリロニトリル30重量%をモノマー主成分とする。
エポキシ樹脂(JER(株)製のエピコート1001)70重量部、フェノール樹脂(三井化学(株)製、MEH7851)33重量部、カルボキシル基含有アクリル共重合体として酸価1.9のアクリル酸エステル系ポリマー(重量平均分子量80万、ガラス転移点5℃)410重量部、及びフィラーとしての球状シリカ(平均粒径0.5μm、アドマテックス(株)製、SO−25R)270重量部をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。尚、前記アクリル酸エステル系ポリマーは、メタクリル酸エチル30重量%、メタクリル酸ブチル40重量%、及びアクリロニトリル30重量%をモノマー主成分とする。
エポキシ樹脂(JER(株)製のエピコート1001)71重量部、フェノール樹脂(三井化学(株)製、MEH7851)30重量部、カルボキシル基含有アクリル共重合体として酸価2.5のアクリル酸エステル系ポリマー(重量平均分子量80万、ガラス転移点5℃)430重量部、及びフィラーとしての球状シリカ(平均粒径0.5μm、アドマテックス(株)製、SO−25R)270重量部をメチルエチルケトンに溶解させ、濃度23.6重量%の接着剤組成物溶液を得た。尚、前記アクリル酸エステル系ポリマーは、メタクリル酸エチル30重量%、メタクリル酸ブチル40重量%、及びアクリロニトリル30重量%をモノマー主成分とする。
本比較例に於いては、カルボキシル基含有アクリル共重合体として、メタクリル酸エチル30重量%、メタクリル酸ブチル40重量%及びアクリロニトリル30重量%をモノマー主成分とする酸価0.5のアクリル酸エステル系ポリマー(重量平均分子量80万、ガラス転移点5℃)を用いたこと以外は、前記実施例1と同様にして、本比較例に係る熱硬化型ダイボンドフィルムを作製した。この熱硬化型ダイボンドフィルムの酸価を後述の測定方法により測定したところ、0.4であった。
本比較例に於いては、カルボキシル基含有アクリル共重合体として、メタクリル酸エチル30重量%、メタクリル酸ブチル40重量%及びアクリロニトリル30重量%をモノマー主成分とする酸価5のアクリル酸エステル系ポリマー(重量平均分子量80万、ガラス転移点5℃)を用いたこと以外は、前記実施例1と同様にして、本比較例に係る熱硬化型ダイボンドフィルムを作製した。この熱硬化型ダイボンドフィルムの酸価を後述の測定方法により測定したところ、4.9であった。
カルボキシル基含有アクリル共重合体の重量平均分子量は、ゲルパーミエーションクロマトグラフィーによるポリスチレン換算の値である。ゲルパーミエーションクロマトグラフィーは、TSK G2000H HR、G3000H HR、G4000H HR、及びGMH−H HRの4本のカラム(いずれも東ソ株式会社製)を直列に接続して使用し、溶雛液にテトラヒドロフランを用いて、流速1ml/分、温度40℃、サンプル濃度0.1重量%テトラヒドロフラン溶液、サンプル注入量500μlの条件で行い、検出器には示差屈折計を用いた。
熱硬化型ダイボンドフィルムの酸価の値は、JIS K 0070に基づき、次の方法で算出した。即ち、ダイボンドフィルムから約1cm角大に裁断した後、更に1gを正確に秤量して測定用試料を作製した。次に、この測定用試料を容積が200mlの三角フラスコに入れ、更にメチルエチルケトン100mlを加えた。その後、20分間の超音波溶解を行い、試料溶液を作製した。続いて、試料溶液に指示薬として1%フェノールフタレイン溶液を1〜3滴加え、完全に溶解するまで三角フラスコを水浴上で振り混ぜた。滴定は0.025mol/lの水酸化カリウム・エタノール溶液で行い、指示薬のうすい紅色が30秒間続いたときを終点とした。これにより、試料1g中に含有する酸を中和するのに必要とする水酸化カリウムのmg数を酸価として算出した。
カルボキシル基含有アクリル共重合体の酸価の値は、JIS K 0070に基づき、次の方法で算出した。即ち、秤量して得たカルボキシル基含有アクリル共重合体1gを、容積が200mlの三角フラスコに入れ、更にメチルエチルケトン100mlを加えた。その後、20分間の超音波溶解を行い、試料溶液を作製した。続いて、試料溶液に指示薬として1%フェノールフタレイン溶液を1〜3滴加え、完全に溶解するまで三角フラスコを水浴上で振り混ぜた。滴定は0.025mol/lの水酸化カリウム・エタノール溶液で行い、指示薬のうすい紅色が30秒間続いたときを終点とした。これにより、試料1g中に含有する酸を中和するのに必要とする水酸化カリウムのmg数を酸価として算出した。
作製した各熱硬化型ダイボンドフィルムについて、それぞれ引張貯蔵弾性率を測定した。即ち、乾燥機内で175℃、5時間熱処理を行い、各熱硬化型ダイボンドフィルムを熱硬化させた。次に、幅10mmの短冊状にカッターナイフで切り出し、固体粘弾性測定装置(Rheometic Scientific社製、Solid Analyzer RSII)を用いて昇温速度10℃/分、周波数1MHzに於いて260℃での引張貯蔵弾性率を測定した。結果を下記表1に示す。
作製した各熱硬化型ダイボンドフィルムをそれぞれ温度40℃の条件下で5mm角の半導体チップに貼り付け、更に各ダイボンドフィルムを介して半導体チップをBGA基板にマウントした。マウント条件は、温度120℃、圧力0.1MPa、1秒とした。
作製した各熱硬化型ダイボンドフィルムをそれぞれ温度40℃の条件下で5mm角の半導体チップに貼り付け、更に各ダイボンドフィルムを介して半導体チップをBGA基板にマウントした。マウント条件は、温度120℃、圧力0.1MPa、1秒とした。
下記表1の結果から分かる通り、比較例1及び2の様に、カルボキシル基含有アクリル共重合体として、アクリル酸エチル−メチルメタクリレートを主成分とする酸価0.5又は5のアクリル酸エステル系ポリマーを使用した場合、ダイボンド後、100℃で10時間の熱処理をすると、樹脂封止後の熱硬化型ダイボンドフィルムとBGA基板の間に剥離が生じ、耐湿リフロー性が悪いことが確認された。また、比較例2の熱硬化型ダイボンドフィルムにおいては、当該フィルムとBGA基板との間にボイドが発生していることも確認された。
2 粘着剤層
3 ダイボンドフィルム(熱硬化型ダイボンドフィルム)
4 半導体ウェハ
5 半導体チップ
6 被着体
7 ボンディングワイヤー
8 封止樹脂
9 スペーサ
10、11 ダイシング・ダイボンドフィルム
13 ダイボンドフィルム(熱硬化型ダイボンドフィルム)
15 半導体チップ
21 ダイボンドフィルム(熱硬化型ダイボンドフィルム)
Claims (8)
- 半導体装置の製造に用いる熱硬化型ダイボンドフィルムであって、少なくともエポキシ樹脂、フェノール樹脂、重量平均分子量が30万〜200万のカルボキシル基含有アクリル共重合体及びフィラーにより形成され、酸価が1〜3.5の範囲内である熱硬化型ダイボンドフィルム。
- 前記エポキシ樹脂とフェノール樹脂との合計重量Xと、前記アクリル共重合体の重量Yとの比率X/Yが0.11〜4である請求項1に記載の熱硬化型ダイボンドフィルム。
- 熱硬化後の260℃における引張貯蔵弾性率が0.5MPa以上である請求項1又は2に記載の熱硬化型ダイボンドフィルム。
- 前記アクリル共重合体のガラス転移点が−30〜30℃である請求項1〜3の何れか1項に記載の熱硬化型ダイボンドフィルム。
- 前記フィラーの平均粒径が0.005〜10μmである請求項1〜4の何れか1項に記載の熱硬化型ダイボンドフィルム。
- 前記カルボキシル基含有アクリル共重合体の酸価が、1〜4の範囲内である請求項1〜6の何れか1項に記載の熱硬化型ダイボンドフィルム。
- 請求項1〜7の何れか1項に記載の熱硬化型ダイボンドフィルムが、ダイシングフィルム上に積層された構造であるダイシング・ダイボンドフィルム。
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