JP5307968B2 - Continuous heat treatment furnace - Google Patents

Description

  The present invention relates to a continuous heat treatment furnace which is used by being incorporated in a workpiece manufacturing system and which heats a workpiece carried out from a previous process and then cools it to send it to a subsequent process.

  2. Description of the Related Art Conventionally, a continuous heat treatment furnace that heats and dries a workpiece that is provided between successive processes and continuously supplied by a conveyor or the like is widely used. In these continuous heat treatment furnaces, a conveyor device such as a conveyor is installed in a tunnel type furnace, and the work is carried into the tunnel furnace by the conveyor and passed through the furnace as it is and heated from the outlet on the opposite side. It is configured to carry out workpieces.

  Further, in many cases, a cooling region for cooling the heated workpiece is provided between the outlet of the continuous heat treatment furnace provided during the continuous process and the carry-in to the subsequent process. The cooling region includes, for example, a conveyor that is integral with or separate from the conveyor that passes through the furnace body, and is configured to cool the workpiece until it is carried into a subsequent process.

  Conventionally, the continuous heat treatment furnace and the cooling region are conventionally configured in the same conveying direction. That is, as shown in FIG. 12, the conveyors 150 and 151 linearly provided between the pre-processing apparatus 200 and the post-processing apparatus 210 are arranged, and the furnace body 152 is provided in the middle thereof. Further, in order to facilitate the carry-in from the pre-process device 160 to the conveyor 150, the work carry-out path 161 of the pre-process device 160 and the conveyor 150 are connected so that the traveling direction is linear. In addition, the carry-in path 171 from the conveyor 151 to the post-processing apparatus 170 is also linearly connected. Therefore, it is necessary to separate the pre-process device 160 and the post-process device 170 by at least the entire length of the conveyors 150 and 151, and there is a problem that the space for placing continuous devices becomes large.

  Also, for example, when the work uses a semiconductor substrate, it is preferable to place the continuous heat treatment furnace in the housing in order to seal the apparatus as a whole and reduce contact with the outside air. When trying to be placed in the body 153, the casing needs to be as long as the entire length of the conveyors 150 and 151, and it is necessary to configure the casing to be elongated. It was difficult to house the heat treatment furnace in the housing 153.

  In order to solve these problems, a continuous heat treatment furnace in which a path along which a workpiece moves in the furnace body is bent is disclosed. For example, Patent Document 1 discloses that a moving frame rotatably supported by a conveyor chain wound around a sprocket is arranged so as to be movable in a furnace, and a work loading / unloading section is provided at an end of the furnace body. A continuous heat treatment furnace provided is disclosed. In this heat treatment furnace, since the workpiece moves in a substantially U shape in the furnace body, the distance between the entrance and exit of the furnace body can be made extremely short, and the interval between the pre-process apparatus and the post-process apparatus arranged continuously can be reduced. Can be placed close together.

  Patent Document 2 discloses a heat treatment furnace for a long steel material in which a long steel material as a workpiece moves in a U-shape in the furnace, and this heat treatment furnace also moves within the furnace body. Since the path to be bent is bent, it is possible to arrange the gap between the pre-process apparatus and the post-process apparatus that are continuously arranged close to each other.

When the configuration of the above heat treatment furnace is adopted, the entire length of the heat treatment furnace can be shortened by bending the movement path in the furnace, so that the conveyance path between processes including the cooling region can be shortened. Compared with the configuration shown in (1), it is likely to be slightly easier to store in the housing.
Japanese Utility Model Publication No. 3-72297 JP-A-57-41315

  However, in the case where a cooling device is provided between the outlet of these continuous heat treatment furnaces and the post-processing device, the continuous heat treatment furnace is provided with the inlet and outlet in the same direction, If it is intended to be provided, the device inevitably becomes L-shaped, which may still increase the installation space. In addition, when the cooling region is configured to be long, the space of the apparatus disposed between the processes becomes large, and it is still difficult to store them in the housing. For this reason, it has been necessary to shorten the cooling region for convenience of storage. Moreover, since the shape of the continuous heat treatment furnace is elongated, the housing in the housing is complicated.

  In addition, these continuous heat treatment furnaces have a problem that when the post-process apparatus stops due to some trouble, the work is stopped in the furnace by stopping the continuous heat treatment furnace. That is, since the work carried out from the heat treatment furnace is stopped, the transfer device moving in the furnace is stopped. In this case, the work stays in the furnace and causes the work to be overheated. .

  On the other hand, if the cooling area is shortened in order to reduce the installation space, it is not possible to keep the work in the cooling area when the post-process equipment stops, and it is necessary for the person to take out the work to be carried out of the furnace body. Met. At this time, when the work is a semiconductor substrate or the like, it is necessary to open the housing for taking out the work. Therefore, there is a problem that the work comes into contact with the outside air and foreign matters adhere to the work.

  Therefore, the technical problem to be solved by the present invention is that the installation space can be reduced, and even if there is a problem in loading and unloading the workpiece, the continuous heat treatment furnace does not cause overheating of the workpiece. Is to provide.

According to the first aspect of the present invention, a furnace body for heating a workpiece to be heated;
A first transfer device for transferring the work carried out from the previous step into the furnace;
A second transport device for transporting the workpiece heated by the furnace body to a subsequent process while cooling the workpiece,
A heat treatment furnace provided in a casing that is configured to be able to move in parallel to deliver the workpiece from the end of the first transfer device to the start end of the second transfer device;
The second conveying device is arranged so as to convey the workpiece to the first conveying device and the flat go One reversed,
Conveying direction of the first conveying device, together with the straight intersects the unloading direction of the prior processes work unloading direction of the second transport device is configured to directly intersect each to carry direction of the workpiece in the after step ,
The second conveying device includes a conveyor unit that conveys the workpiece by a conveyor and a carry-out unit for carrying out the workpiece moved to the terminal end of the pre-carrying unit to the subsequent process,
A plurality of stoppers that are provided at intervals larger than the width of the workpiece in the conveyance direction in the conveyance path of the conveyor unit and stop the workpiece, and a lift configured to be able to lift the workpiece stopped by the stopper from the conveyor With
In the heat treatment furnace, the workpiece is disposed on a pallet,
The pallet includes a plate-like main body, and the main body of the pallet includes a plurality of work placement portions that are through holes for placing the workpieces, and a plurality of holes different from the through holes of the work placement portions. Through-holes are formed,
A continuous heat treatment furnace is provided in which a long groove is provided in a cross shape in a square through hole and a short groove inclined with respect to the long groove is provided in the workpiece placement portion.

According to the second aspect of the present invention, the second transport device is configured to detect whether the work is placed on the carry-out part, and whether the work is positioned in information on the lift part. A control unit that controls the operation of each member of the workpiece detection sensor, the first transfer device, the second transfer device, and the transfer unit,
When the unloading unit sensor detects whether the workpiece is placed on the unloading unit , the control unit sequentially raises the workpiece from a lift unit positioned downstream based on the detection of the workpiece detection sensor. The continuous heat treatment furnace according to the first aspect is provided that stops the conveyor unit when it is detected that all the lift units are raised.

According to a third aspect of the present invention, when the conveyor unit stops, the control unit stops the first conveying device so that the work from the previous process is not carried in. Continuous type according to the second aspect A heat treatment furnace is provided.

According to a fourth aspect of the present invention, the second transfer device is configured like correct length and the first conveying device, to provide a continuous heat treatment furnace of the first embodiment.

  According to the present invention, since the furnace body and the cooling region are arranged in parallel, the entire heat treatment furnace is configured to be compact without being elongated, so that the installation space can be reduced and into the housing. Can be easily stored. In addition, since it is configured to carry the wafer in a straight line with respect to the conveyance direction of the device in the pre-process and the post-process, the installation interval between the device in the pre-process and the post-process can be shortened. It is possible to reduce the installation space as a whole.

  Furthermore, since the operation is controlled so that the workpiece is lifted and supported sequentially from the downstream lift section, the workpiece will not overflow even when the post-processing device is stopped, and the workpiece is moved into the furnace. Can prevent the workpiece from overheating.

  Further, since the workpiece is lifted from the conveyor, it is possible to prevent generation of dust due to wear generated between the conveyor and the workpiece.

  Hereinafter, a continuous heat treatment furnace according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a partial schematic configuration diagram of a CCD camera assembly system incorporating a continuous heat treatment furnace according to an embodiment of the present invention. FIG. 1 shows only the apparatus provided immediately upstream and downstream with respect to one continuous heat treatment furnace in the CCD camera assembly system 200. However, the system as a whole has three continuous heat treatment furnaces. The apparatus which performs each process is provided in each upstream and downstream, IR glass mount from the upstream side, flip chip bonding as the pre-process apparatus 1, UV curable resin sealing as the post-process apparatus, from the system Each process of workpiece unloading is performed.

  In FIG. 1, a continuous heat treatment furnace 10 according to an embodiment of the present invention is disposed between a pre-process apparatus 1 and a post-process apparatus 2. The pre-process device 1 performs an application of a coating agent or a component mounting process in order to mount a component on a CCD camera substrate, which is a workpiece to be manufactured. Specifically, the work is transported to the working unit 4 that performs the coating and mounting process by the transporting device 3, and the work coated and mounted by the working unit 4 is transported to the heat treatment furnace 10 by the transporting device 3.

  The heat treatment furnace 10 heats the workpiece coated and mounted by the pre-process apparatus 1 and dries the coating agent applied by the pre-process apparatus 1 to fix the mounted components. The heat treatment furnace conveys the work carried out from the pre-process apparatus 1 to the post-process apparatus while cooling the work heated by the furnace body 15 and the furnace body 15 that heats the work. The apparatus includes a second transfer device 13 and a transfer device 14 that transfers a workpiece from the end of the first transfer device 12 to the start of the second transfer device 13. These devices are arranged in the housing 11. ing. Details of a specific configuration of the heat treatment furnace 10 will be described later.

  The post-process device 2 transports the work carried out from the heat treatment furnace 10 by the transport device 5 and performs application of the coating agent and component mounting as separate processes by the working unit 6 during the transport. The workpiece processed by the working unit 6 is unloaded from the post-process device 2 by the transfer device 5.

  Throughout the entire system shown in FIG. 1, workpieces are regularly arranged on a plate-like member called a pallet 100, and various processes of coating, mounting, and drying are performed in the state of being arranged on the pallet. Therefore, the conveying apparatus that conveys the workpiece through the entire system is suitably configured to convey the pallet in all processes, including an apparatus for transferring the workpiece between the apparatuses.

  FIG. 2A is a diagram illustrating a configuration of a pallet used for conveying a workpiece in the CCD camera assembly system 200 of FIG. In the pallet 100, in order to place a work on a rectangular plate-like main body 101, work placement portions 102 formed as through holes in the main body 101 are regularly provided in a lattice shape. Further, in order to reduce the weight of the pallet and reduce its heat capacity, circular holes 103 penetrating through the main body 101 are provided at the center of the four workpiece placement portions 102 arranged in a lattice pattern. Note that the pallet used in the CCD camera assembly system 200 of the present embodiment is configured such that the longitudinal dimension of the main body 101 is 800 mm.

  FIG. 2B is a partially enlarged view of the pallet of FIG. 2A. FIG. 2C is a cross-sectional view taken along the line IIC-IIC in FIG. 2B and shows a state in which the workpiece is arranged. The workpiece placement unit 102 is provided with a cross-shaped long groove 105 in a square through-hole 104, and further provided with a short groove 106 that is inclined with respect to the long groove 105 at an angle of 45 °. . The long groove 105 is provided for facilitating the removal of the work 120, and the work can be taken out by inserting a pickup member from the groove. The short groove 106 is for providing a gap in the vicinity so that the corner portion of the workpiece does not hit the through hole 104.

  As shown in FIG. 2C, the workpiece placement unit 102 is configured to hold and hold the workpiece 130 at the portion of the through hole 104. In the work 130, bumps 134 are arranged at the end of the surface on which the light receiving surface 135 of the CCD image sensor 133 is provided, and external terminals 131 are provided via the bumps 134. A sealant 132, which is a coating agent, is applied to the external terminal 131 and the CCD image pickup device 133, and is cured in a heat treatment furnace.

  FIG. 3 is a diagram showing a configuration of a heat treatment furnace 10 used in the CCD camera assembly system of FIG. As described above, the heat treatment furnace has a configuration in which the first transfer device 12, the second transfer device 13, the delivery device 14, and the furnace body 15 are housed in a casing.

  FIG. 4 is a diagram illustrating a schematic configuration of the first transport device in FIG. 3. The 1st conveying apparatus 12 is provided with the two guide rails 22 arrange | positioned in parallel, and the chain conveyor 23 is provided along the guide rail in the conveyor receiving part 26 provided in the said guide rail. The chain conveyor 23 is wound around a guide rail so as to be rotatable, and the pallet 100 is conveyed by driving the chain conveyor 23 with a motor 21. The driving speed of the motor can be adjusted. For example, the pallet is conveyed at a speed of about 1 m / min. Each of the chain conveyors 23 is provided with a protrusion 25 extending toward the inside of the guide rail, and the end of the pallet 100 is placed on the protrusion 25. In this state, the pallet is conveyed by the rotation of the chain conveyor 23.

  The two guide rails 22 are arranged so as to convey the pallet in a direction (X-axis direction) perpendicular to the conveyance direction of the pallet 100 by the conveyance unit 3 of the pre-processing apparatus 1. Further, the guide rail 22 is disposed through the furnace body 15 so that the start end 22 a and the end end 22 b are located outside the furnace body 15.

  At the start end 22 a of the guide rail 22, a transfer unit 16 for mounting the pallet 100 on the guide rail 22 from the transport unit 3 of the pre-process device 1 is provided. In the transfer unit 16, a mounting table 30 for mounting the pallet 100 is disposed so as to be movable in the Y-axis direction, and the pallet positioned at the terminal end of the transport unit 3 of the pre-process device 1 is mounted on the mounting table 30. The pallet 100 is transferred to the starting end 22a of the guide rail 22 by moving in the Y-axis direction while being placed on the top. The placement table 30 is provided with a second sensor 30a for detecting whether or not the pallet 100 is placed on the table.

  The part of the guide rail 22 on which the pallet is placed by the transfer part 16 is outside the furnace body 15, and a carry-in side lift part 28 for lifting the pallet 100 is provided in the part. The carry-in side lift part 28 is a member having a table configured to be movable up and down by driving means such as a cylinder, and the pallet 100 is detached from the conveyor 23 by ascending with the pallet placed on the table. The conveyance of the pallet 100 is stopped. Moreover, the carry-in side lift part 28 is provided with the 1st sensor 29 which detects whether the pallet is mounted in the table.

  Two third sensors 31 are provided in the vicinity of the upstream side of the pallet in the direction of travel of the pallet. This sensor 31 is for detecting the position of the pallet. Specifically, when the detection is performed only on one sensor located on the upstream side, the carry-in lift unit 28 can be raised to lift the pallet. However, when it is detected that the pallet is positioned on the two third sensors 31, the table of the carry-in lift unit 28 is controlled so as not to be raised. As described above, the detection of the presence or absence of the pallet by the sensor 31 prevents the carry-up side lift portion 28 from rising due to an erroneous operation, and prevents the pallet 100 from falling off the guide rail.

  The furnace body 15 has a box-shaped housing, and a guide rail 22 of the first transfer device passes through the inside of the furnace body 15. In the present embodiment, the furnace body 15 has a length dimension in which four pallets can be simultaneously stored. In the furnace body 15, a workpiece conveyed along the guide rail 22 can be heated and dried by an infrared heater (not shown) and hot air. The temperature in the furnace body 15 can be adjusted. For example, the heating temperature of the workpiece can be set to 70 to 250 ° C., particularly around 150 ° C. The inside of the furnace body is heated while maintaining the temperature of the workpiece raised in the workpiece conveyance direction upstream to raise the temperature of the workpiece from room temperature to the target set temperature, and the temperature of the workpiece heated by the temperature raising region, It is divided into a maintenance area located on the downstream side in the workpiece conveyance direction for performing the drying process. The temperature rising area and the maintenance area may be partitioned by a partition or the like, and the inside of the furnace is divided into both areas by controlling the set temperature of the heaters arranged in each area and the amount of hot air blown out. Can be set.

  A delivery device 14 for transferring the pallet from the first transport device 12 to the second transport device 13 is provided in the vicinity of the terminal end 22 b of the guide rail 22 of the first transport device 12. As shown in FIG. 5, the delivery device 14 is configured such that the main body 33 can move in the Y-axis direction along a guide portion 32 provided on the floor surface of the housing 11 so as to extend in the Y-axis direction. . The main body 33 moves in the Y-axis direction between the first position located near the first transport device 12 and the second position located near the second transport device 13 along the guide portion 32. Further, the delivery device 14 is configured such that the arm 35 can be moved up and down in the Z-axis direction by a cylinder 34 provided in the main body. The guide part 32 is disposed so as to be positioned outside the terminal end 22b of the guide rail 22 so that the movement of the main body part 33 is not restricted by the guide rail 22 of the first transport device when the main body 33 moves in the Y axis. The arm 35 protrudes toward the guide rail 22 and can be positioned between the two guide rails 22.

  A fourth sensor 36 for detecting whether the pallet 100 is present at the position is provided in the vicinity of the end 22b of the guide rail 22, and the arm 35 has a pallet 100 on the mounting table. A fifth sensor 37 for detecting whether or not is mounted.

  FIG. 6 is a diagram illustrating a schematic configuration of the second transport device of FIG. 3. FIG. 7 is a schematic view of the second transport device of FIG. 6 as viewed from the transport direction. The second transport device 13 includes a guide rail 38 that is disposed substantially parallel to the first transport device and is configured to have substantially the same length. The guide rail 38 includes two rails arranged in parallel, and a chain conveyor 45 is wound around the guide rail on a conveyor receiving portion 48 provided on the guide rail 38. The chain conveyor 45 is rotated by being driven by a motor 39. The driving speed of the motor 69 can be adjusted. For example, the pallet is conveyed at a speed of about 1 m / min. The driving speed of the motor 69 is preferably the same as the pallet transport speed of the first transport device. The chain conveyor 45 is wound around a driving roller 39 a connected to the motor 39, two guide rollers 50, and a tension roller 51 that adjusts the tension of the chain conveyor 45. As will be described later, the tension roller 51 is provided in accordance with the load applied to the chain conveyor 45 in the pallet lift control in the second transport device, and depends on the number of pallets placed on the conveyor. Thus, the tension of the chain conveyor 45 can be automatically adjusted.

  The chain conveyor 45 is provided with a protruding portion 47 that extends toward the inside of the guide rail 38, and the end of the pallet 100 is placed on the protruding portion 47. In this state, the pallet is conveyed as the chain conveyor 45 rotates.

  The two guide rails 38 convey the pallet in a direction opposite to the conveyance direction of the guide rail 22 of the first conveyance device and in a direction orthogonal to the conveyance direction of the pallet 100 by the conveyance device 5 of the post-processing device 2. Are arranged to be. A guide rail 32 of the delivery device 14 is provided at the start end 38a of the guide rail 38. When the main body 33 of the delivery device 14 is in the second position, the arm 35 is stretched between the two guide rails. It comes out. Further, a sixth sensor 50 is provided in the vicinity of the start end 38a of the guide rail 38 so that it can be detected whether or not a pallet is present at the position.

  An unloading unit 17 for unloading the pallet to the transfer unit 5 of the post-processing device 2 is provided at the end 38 b of the guide rail 38. The carry-out unit 17 is configured to be driven in the X-axis direction and is configured to be rotatable about the Z-axis. In addition, the carry-out unit 17 includes a pallet chuck 51 that holds the pallet 100 therebetween. The pallet chuck 51 is configured to be able to hold the pallet by opening and closing. The pallet 100 is taken out from the guide rail 38 of the second transport device and rotated around the Z axis to move the pallet to the post-processing device 2. After moving onto the transport unit 5, the pallet is detached and transferred to the transport unit 5. Further, an eleventh sensor 52 for detecting whether or not the pallet 100 is present at the end position is provided in the vicinity of the end 38 b of the guide rail 38.

  In addition, lift portions 40 a to 40 d for lifting the pallet 100 are provided at an intermediate portion of the guide rail 38. The lift parts 40a to 40d are respectively provided from the first lift part 40a to the fourth lift part 40d in order from the upstream side of the second transport device. A member having a table configured to be movable up and down by a driving means such as a cylinder. The pallet 100 is detached from the conveyor 45 when the pallet is placed on the table and the conveyance of the pallet 100 is stopped. The In addition, in the vicinity of the lift portions 40a to 40d of the guide rail 38, sensors (seventh sensor 41, no. 8 sensor 42, 9th sensor 43, 10th sensor 44) are provided.

  As shown in FIG. 8A, the lift portions 40 a to 40 d include a main body 52 fixed to the floor surface of the housing 11, a cylinder 34 provided on the main body and configured to be movable in the Z-axis direction, and the movement of the cylinder 34. And a mounting table 54 that rises accordingly. The mounting table 54 is normally stored at a position lower than the pallet 100 conveyed by the guide rail 38, but when the pallet 100 is lifted, it rises to a position higher than the guide rail 38, thereby temporarily holding the pallet. 100 is removed from the guide rail, and pallet transportation is stopped. In addition, each lift part 40a-40d is arrange | positioned so that the space | interval between adjacent lift parts may become wider than the length of each pallet.

  8B and 8C are diagrams showing a modification of the lift portion. The examples of FIGS. 8B and 8C differ in the configuration of the placement table on which the pallet 100 is placed. In the example of FIG. 8B, the mounting table 54b is configured to be long in the conveyance direction 97 of the pallet 100, and the protrusions 54d are formed at both ends thereof. The distance between the protrusions 54d is configured to be approximately equal to the length of the pallet 100, and the protrusion 100d is configured so that the pallet 100 is not displaced in the traveling direction.

  In the example of FIG. 8C, the mounting table 54c includes a plurality of pins 54e on the mounting surface, and supports the pallet 100 in a state of being separated from the mounting surface of the mounting table 54c. Thus, by reducing the contact area between the mounting table 54e and the pallet 100, dust can be prevented from adhering to the pallet. The position where the pin 54e is provided is a position which does not cover the position where the workpiece placement portion 102 or the through hole 103 of the pallet 100 is provided, and the pallet 100 can be supported stably.

  Moreover, the 2nd conveying apparatus is provided with stopper device 49a-49d corresponding to each lift part 40a-40d. The stopper device is provided on each downstream side of the corresponding lift portions 40a to 40d between the guide rails 38. The stopper device is configured so that it can be stored in the main body 55 by inserting and removing the stopper 56. When the stopper is extended, the pallet 100 in the advancing direction side abuts against the stopper 56 and the pallet is in the middle of conveyance. Stops on the spot. Even in this state, the conveyance of the pallet 100 can be stopped, but since the rotation of the conveyor is not stopped, friction is generated between the pallet 100 and the chain conveyor 45, and the pallet 100 or the chain conveyor 45 is worn. Cause dust. Therefore, in this embodiment, in addition to stopping by the stopper, lifting of the pallet by the lift portion is performed to suppress dust generation. Hereinafter, in the first to fourth lift portions 40a to 40d, the process of lifting the pallet is that the pallet is stopped by the extension of the stopper 56 of the stopper devices 49a to 49d, and then the pallet is lifted from the guide rail 38 by the lift device. Means.

  Next, drive control of a part related to the heat treatment furnace in the CCD camera assembly system having the above configuration will be described. The CCD camera assembly system according to this embodiment is entirely controlled by a control unit (not shown), and performs drive control of each member as follows according to a control program provided in the control unit.

  First, drive control of the delivery device 14 will be described. In the CCD camera assembly system according to the present embodiment, various members function properly by the control unit using the detection of the pallet by various sensors as a trigger signal, and the pallet is conveyed. Here, the transfer processing from the first transfer device to the second transfer device in the heat treatment furnace 10 is performed by the transfer device 14. FIG. 9 shows an operation explanatory diagram of the operation of transferring the pallet from the first transfer device to the second transfer device by the delivery device 14. FIG. 10 shows a processing flow of the delivery operation of FIG.

  First, when the pallet is transported to the vicinity of the end 22b of the guide rail 22 by the first transport device (# 11), when the pallet 100 is transported to the vicinity of the end 22b of the guide rail 22, the fourth sensor 36 detects the pallet. (# 12). Next, it is determined whether the main body 33 of the delivery device 14 is in the first position (# 13). If the main body 33 of the delivery device 14 does not exist at the first position, the main body 33 is moved to the first position (# 14).

  When the main body 33 is in the first position and the pallet 100 is ready to be lifted by the arm 35, the cylinder 35 of the delivery device 14 is operated to raise the arm 35 as indicated by the arrow 90. The arm 35 is lifted by a preset lift width (# 15), and the pallet 100 is placed and lifted from the guide rail 22. At this time, if the pallet is properly placed on the arm 35, the fifth sensor 37 always detects the pallet 100. Accordingly, when the fifth sensor 37 cannot detect the pallet 100, it is determined that the operation error has occurred (# 22), and the apparatus is stopped (# 23).

  Next, as indicated by an arrow 91, the main body 33 of the delivery device 14 moves to the second position (# 17). When the movement of the main body 33 to the second position is completed, the arm 35 is lowered by operating the cylinder 34 of the delivery device 14 as indicated by an arrow 92 (# 18). The arm 35 is lowered by a preset lowering width, and the pallet 100 is placed on the guide rail 38 of the second transport device 13. At this time, if the sixth sensor 50 of the second transport device cannot detect the pallet 100 (# 19), the pallet 100 is not properly placed on the guide rail 38, and an operation error occurs. It is determined that there is (# 22), and the apparatus is stopped (# 23).

  Next, it is determined whether the fifth sensor 37 detects the pallet 100 (# 20). Since the fifth sensor 37 should not detect the pallet 100 when the arm 35 is lowered and the pallet 100 is placed on the guide rail 38, the pallet 100 is detected by the fifth sensor 37 in this state. It is determined that there was an operation error. Accordingly, in this case, it is determined that the error is an operation error (# 22), and the apparatus is stopped (# 23).

  When the delivery of the pallet 100 to the guide rail 38 of the second transport device is finished, the main body 33 of the delivery device 14 is moved from the second position to the first position (# 21), and the delivery process is finished.

  Next, a process in the case where some trouble occurs in the devices after the post-process device 2 of the CCD camera assembly system 200 according to the present embodiment and the post-process device 2 is stopped will be described. If the supply and discharge of the pallet 100 to and from the heat treatment furnace are not properly controlled in this state, the pallet carried out in the heat treatment furnace overflows, and it is necessary to remove the pallet 100 manually. Moreover, if the conveyance of the pallet in the heat treatment furnace is simply stopped, the pallet 100 staying in the furnace body is overheated, leading to a defect of the workpiece. Therefore, in this case, it is necessary to control the conveying operation of the heat treatment furnace so that no pallet remains in the furnace body and overflow does not occur. In addition, about the following embodiment, although control about the heat processing furnace after flip-chip bonding in the pre-process apparatus 1 is illustrated as an example, the same control is performed also about another heat processing furnace.

  11A and 11B are flowcharts of the processing operation of the heat treatment furnace when the post-process apparatus immediately upstream of the heat treatment furnace is stopped. This processing is not performed when the downstream apparatus is stopped. For example, when two upstream devices are stopped, processing may be performed. In this case, triggers at the start of processing are different. In the following flowchart, when the operation of the post-process apparatus is resumed while each process is being performed, the subsequent processing is stopped by the interrupt control, and the normal operation is resumed. However, when an interrupt signal is received during an operation in which the lift portion is raised in the following flowchart, the lift portion is lowered and then the normal operation is resumed.

  When the control unit detects that the post-process apparatus 2 has stopped (# 31), it is first determined whether or not the pallet is clamped by the pallet chuck 51 (# 32). When the pallet 100 is not clamped by the pallet chuck, the control unit advances the pallet, and when the sensor 52 detects that the pallet has moved to the end 38b of the guide rail 38, the pallet chuck is controlled to control the pallet. 100 is held (# 33).

  When the pallet 100 is sandwiched between the pallet chucks when it is detected that the post-process apparatus 2 has stopped, the pallet 100 is advanced until the pallet 100 is detected (# 34) by the tenth sensor 44 (# 35). ). When the tenth sensor 44 detects the pallet 100, the fourth lift portion 40d rises and lifts the pallet (# 36).

  In the case where the stopped state of the post-process device 2 is not released before the fourth lift part is lifted, the pallet is further lifted by the third lift part 40c. Specifically, after the fourth lift portion 40d is raised, the pallet is continuously conveyed until the ninth sensor 43 detects the pallet (# 37) (# 38). When the ninth sensor 43 detects the pallet 100, the third lift portion 40c rises and lifts the pallet (# 39). In addition, when this process is performed, the trigger signal for stopping the transfer part 16 of the 1st conveying apparatus 12 is transmitted.

  Furthermore, when the post-process apparatus 2 is not released from the stopped state, the pallet is lifted by the second and first lift portions 40b and 40a. Specifically, the pallet is continuously conveyed until the eighth sensor 42 detects the pallet (# 40) (# 41), and when the eighth sensor 42 detects the pallet 100, the second lift unit 40b. Rises and lifts the pallet (# 42). The pallet is continuously conveyed until the pallet is detected by the seventh sensor 41 (# 43) (# 44). When the seventh sensor 41 detects the pallet 100, the first lift part 40a is raised. The pallet is lifted (# 44). At this stage, the second transport device can hold the five pallets without stopping the operation of the guide rail 38. Moreover, two pallets can be hold | maintained after carrying in to the heat processing furnace 10 from the pre-process apparatus mentioned later is stopped.

  Next, even when the pallet is lifted by the first to fourth lift portions 40a to 40d, if the post-process device 2 is not released from the stopped state, the pallet is held by the delivery device 14 below. . Specifically, as shown in FIG. 11B, it is first determined whether or not a pallet is detected by the sixth sensor 50. When a pallet is detected by the sixth sensor 50, it means that the pallet has already been moved upstream of the first lift device 40a of the guide rail of the second transport device, and therefore the downstream side of this. In order to prevent the pallet from being conveyed, the conveyance by the guide rail of the second conveying device 13 is stopped (# 47).

  On the other hand, when the pallet is lifted by the first to fourth lift portions 40a to 40d and the pallet is not detected by the sixth sensor, the holding of the pallet by the delivery device 14 is maintained, and the next processing is performed. Is called. When the pallet is not detected by the sixth sensor in # 46, the above-described delivery process (see FIG. 9) to the second transport device is performed (# 54). Thereafter, the conveyance of the pallet by the guide rail of the second conveyance device is stopped. As a result, the pallet chuck 51, the first to fourth lift devices 40a to 40d, and the start end 38a of the guide rail 38 are held in the second transport device in a state where a total of six pallets are held.

  Next, it is determined by the fourth sensor 36 whether a pallet is detected at the end of the first transport device 12 (# 48). When the pallet is detected, the pallet is placed on the end 22b of the guide rail 22, and when the pallet is not detected, the pallet has not reached the end of the guide rail, or is delivered. The pallet is transferred to the arm of the device. Therefore, when the pallet is detected by the fourth sensor 36, the arm 35 of the delivery device 14 is raised (# 49), and the first transport device is stopped (# 50).

  On the other hand, if the pallet is not detected by the fourth sensor 36, it is determined whether the pallet is detected by the fifth sensor, that is, whether the pallet is placed on the arm 35. If the pallet is not detected by the fifth sensor 37, the pallet has not reached the end of the guide rail 22 of the first transport device, and the pallet is not supported by the arm 35. The pallet is transported by the transport device (# 52), and the process returns to the above-described processing of # 48. On the other hand, when the pallet is detected by the fifth sensor 37, since the pallet is supported on the arm, the conveyance of the pallet is stopped (# 53).

  Thus, a total of seven pallets can be supported on the first transport device and the second transport device. As described above, in step # 39, four pallets are supported after the stop trigger signal of the transfer unit 16 of the first transport device is issued. As described above, since the furnace body of the heat treatment furnace according to the present embodiment is designed to heat four pallets simultaneously, the first transfer device is already in operation when the transfer unit 16 of the first transfer device is stopped. The four pallets transported to 12 can be all supported, and the pallet is not left in the furnace body, and the workpiece in the pallet is not overheated.

  FIG. 11C is a flowchart of the processing operation of the transfer unit 16 when a trigger signal is generated in # 39 of FIG. 11A. As described above, when the pallet is supported by the third lift unit 40c, a trigger signal is generated, and the following processing for stopping the transfer unit 16 of the first transport device is performed.

  First, it is detected whether the pallet is arranged on the table of the carry-in lift unit 28 (# 60). If the pallet is not placed, the pallet is transported (# 61) until the position at which the third sensor 31 can safely lift the pallet is detected (# 62) (# 61). Increase (# 63). Accordingly, one pallet 100 is held on the table of the carry-in lift section.

  If the pallet is placed, the second sensor 30a detected by the transfer unit 16 detects whether the pallet is placed on the table (# 64). When the pallet 100 is placed on the table 30 of the transfer unit 16 by the second sensor, the loading-side lift unit 16 is immediately stopped. On the other hand, when the second sensor detects that the pallet 100 is not placed on the table 30 of the transfer unit 16, the pallet is transported to the transfer unit 16 side, and the process returns to the step # 64.

  Thus, when the trigger signal to the transfer part 16 is transmitted, the two pallets of the carry-in side lift part 28 and the table 30 of the transfer part 16 will be supported. Therefore, as described above, not only the pallet fed into the furnace through the first transfer device 12 but also the transfer of the pallet from the pre-processing device 1 to the heat treatment furnace 10 cannot be stopped immediately. Even if it exists, since two pallets can be held, the pallet does not overflow.

  As described above, in the heat treatment furnace of the present invention, the first transport device 12 and the second transport device 13 are provided in parallel, and the transport direction of the pallet by these transport devices is the previous process. Since the direction is perpendicular to the transfer direction of the transfer unit of the apparatus 1 and the post-process apparatus 2, the space between the pre-process apparatus and the post-process apparatus can be reduced, and the arrangement space can be reduced. Therefore, the housing can be more easily stored, product defects caused by dust and the like can be reduced, and the yield can be improved.

  Further, even when the post-processing device 2 is stopped due to some problem, the pallet can be held away from the guide rail using a lift unit or the like, and therefore, due to wear of the guide rail conveyor and the pallet. Generation of dust can be prevented, and since no workpiece remains in the furnace, problems such as workpiece overheating can be prevented.

  In this embodiment, when the post-process apparatus is stopped, after the unloading section for unloading the pallet stops, the lift section provided in the second transfer apparatus 13 is sequentially driven from the downstream side to hold the workpiece. This is to prevent problems of overflow at the time of unloading to the post-processing device and overheating of the workpiece into the furnace, but the present invention is not limited to the above embodiment, and other It can be implemented in various ways. For example, in the present embodiment, four lift parts are provided in the second transport device, but the present invention is not limited to this. Moreover, although it is preferable to provide the lift part by the number of pallets which can be simultaneously stored in the furnace body provided in the 1st conveying apparatus, it is not limited to this. In the present embodiment, the trigger signal is transmitted after the third lift portion is lifted, but the present invention is not limited to this, and the lift of other lift portions such as the second lift portion is increased. At the same time, a trigger signal may be transmitted.

It is a partial schematic block diagram of a CCD camera assembly system in which a continuous heat treatment furnace according to an embodiment of the present invention is incorporated. It is a figure which shows the structure of the pallet used for conveyance of a workpiece | work in the CCD camera assembly system of FIG. It is the elements on larger scale of the pallet of FIG. 2A. It is sectional drawing when cut | disconnecting by the IIC-IIC line | wire of FIG. 2B. It is a figure which shows the structure of the heat processing furnace used for the CCD camera assembly system of FIG. It is a figure which shows schematic structure of the 1st conveying apparatus of FIG. It is the schematic which shows the structure of the terminal vicinity vicinity of the 1st conveying apparatus of FIG. It is a figure which shows schematic structure of the 2nd conveying apparatus of FIG. It is the schematic which looked at the 2nd conveying apparatus of Drawing 6 from the conveyance direction. It is the schematic which shows the structure of the lift part of the 2nd conveying apparatus of FIG. It is a figure which shows the modification of the lift part of the 2nd conveying apparatus of FIG. It is a figure which shows the modification of the lift part of the 2nd conveying apparatus of FIG. It is operation | movement explanatory drawing of the operation | movement which transfers a pallet from a 1st conveying apparatus to a 2nd conveying apparatus by a delivery apparatus. 10 is a flowchart showing a processing flow of the delivery operation of FIG. 9. It is a flowchart of the processing operation of the heat processing furnace when a post-process apparatus stops. It is a flowchart of the processing operation of the heat processing furnace when a post-process apparatus stops. FIG. 11B is a flowchart of the processing operation of the transfer unit when a trigger signal is generated in # 39 of FIG. 11A. It is the schematic which shows the arrangement configuration of the system which has the conventional continuous heat processing furnace.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Pre-process apparatus 2 Post-process apparatus 3, 5 Conveyance apparatus 4, 6 Working part 10 Heat treatment furnace 11 Case 12 1st conveyance apparatus 13 2nd conveyance apparatus 14 Delivery apparatus 15 Furnace body 16 Transfer part 17 Unloading part 28 Carry-in side Lift part 40a-40d Lift part 100 Pallet 200 CCD camera assembly system

Claims (4)

A furnace body for heating a workpiece to be heated;
A first transfer device for transferring the work carried out from the previous step into the furnace;
A second transport device for transporting the workpiece heated by the furnace body to a subsequent process while cooling the workpiece,
A heat treatment furnace provided in a casing that is configured to be able to move in parallel to deliver the workpiece from the end of the first transfer device to the start end of the second transfer device;
The second conveying device is arranged so as to convey the workpiece to the first conveying device and the flat go One reversed,
Conveying direction of the first conveying device, together with the straight intersects the unloading direction of the prior processes work unloading direction of the second transport device is configured to directly intersect each to carry direction of the workpiece in the after step ,
The second conveying device includes a conveyor unit that conveys the workpiece by a conveyor and a carry-out unit for carrying out the workpiece moved to the terminal end of the pre-carrying unit to the subsequent process,
A plurality of stoppers that are provided at intervals larger than the width of the workpiece in the conveyance direction in the conveyance path of the conveyor unit and stop the workpiece, and a lift configured to be able to lift the workpiece stopped by the stopper from the conveyor With
In the heat treatment furnace, the workpiece is disposed on a pallet,
The pallet includes a plate-like main body, and the main body of the pallet includes a plurality of work placement portions that are through holes for placing the workpieces, and a plurality of holes different from the through holes of the work placement portions. Through-holes are formed,
A continuous heat treatment furnace characterized in that, in the work placement portion, a long groove is provided in a square shape in a square through hole, and a short groove inclined with respect to the long groove is provided. The second transport device includes a carry-out part sensor that detects whether the work is placed on the carry-out part, a work detection sensor that detects whether the work is positioned in the information of the lift part, and A first transport device, a second transport device, a control unit for controlling the operation of each member of the delivery unit,
When the unloading unit sensor detects whether the workpiece is placed on the unloading unit , the control unit sequentially raises the workpiece from a lift unit positioned downstream based on the detection of the workpiece detection sensor. The continuous heat treatment furnace according to claim 1, wherein when it is detected that all the lift parts are raised, the conveyor part is stopped.   3. The continuous heat treatment furnace according to claim 2, wherein when the conveyor unit is stopped, the control unit stops the first transfer device so that a workpiece from the previous process is not carried in. 4. The second conveying device, characterized in that it is configured to equal correct length and the first conveying device, continuous heat treatment furnace according to claim 1.

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