JP7384109B2 - Goods conveyance device - Google Patents

Description

The present invention relates to an article conveying device that conveys a target article having a surface to be inspected.

Such an article conveyance device is installed, for example, in a factory for manufacturing products. The objects to be conveyed by the article conveyance device include finished products or work-in-progress, or parts, jigs, tools, etc. used in the manufacture of products, and those that require inspection during transportation. There is.

For example, in Japanese Unexamined Patent Publication No. 2014-094809 (Patent Document 1), a semiconductor or the like housed in a storage container such as a FOUP or a SMIF pod is transported to an inspection device (21) by an article transport device (32), and then A technique for inspecting with an inspection device (21) is disclosed (numerals in parentheses in the above are those of Patent Document 1). In the technique disclosed in Patent Document 1, an object to be inspected is transported to a place exclusively for inspection and inspected.
Therefore, there is room for improvement in inspection efficiency, such as the distance that the target article must be transported for inspection in some cases becomes long.

Japanese Patent Application Publication No. 2014-094809

In view of the above circumstances, it is desired to realize a technology that can efficiently inspect target articles.

An article conveyance device according to the present disclosure that conveys a target article having a surface to be inspected includes:
a transfer unit that holds and transfers the target article;
an inspection unit that inspects the surface to be inspected;
The transfer unit includes a holding unit that holds the target article, and changes the state between a protruding state and a retracted state by moving the holding unit in and out along a first direction along the inspection target surface, and comprising: an egress/retreat drive section that transfers the target article between an article support section that supports the target article and the holding section; and a base that supports the egress/retraction drive section;
When viewed in an orthogonal direction along a direction perpendicular to the surface to be inspected, a direction intersecting the first direction is defined as a second direction,
The inspection unit has a fixed position with respect to the base, is arranged at a position facing the inspection target surface of the target article held by the holding unit, and has a strip-shaped inspection area along the second direction. configured to inspect the entire
The moving distance of the holding part in the first direction by the moving part and the moving part is greater than or equal to the length of the target article held in the holding part in the first direction,
The length of the inspection area in the second direction is greater than or equal to the length of the target article held by the holding part in the second direction,
a conveyance drive section that conveys the target article by moving a conveyance support section serving as the article support section;
further comprising a determination unit that determines whether the target article is normal or abnormal based on the inspection result by the inspection unit,
The base of the transfer section is fixedly installed in a passage section through which the target article passes when transporting the target article,
After the target article is transferred from the holding unit to the conveyance support unit, the conveyance drive unit conveys the target article to different locations depending on whether the target article is normal or abnormal. .

According to this configuration, the ejection/retraction driving section causes the holding part to move in and out while the target article is being held by the holding part. Can be inspected. Therefore, according to this configuration, there is no need to transport the target article to a place exclusively for inspection, and the surface to be inspected can be inspected while the target article is being transferred, so that the target article can be inspected efficiently. be able to. Further, the moving distance of the holding section in the first direction is equal to or longer than the length of the target article held in the holding section in the first direction, and the length of the strip-shaped inspection area to be inspected by the inspection section in the second direction is Since the length is greater than or equal to the length in the second direction of the target article held by the holding unit, the entire area of the inspection target surface is within the relative movement range of the inspection area when the holding unit moves in and out. can be included. Therefore, according to this configuration, it is possible to appropriately inspect the entire area of the surface to be inspected.
Further, according to this configuration, depending on the inspection results obtained by the inspection unit as the holding unit moves in and out before the target article is conveyed by the conveyance drive unit, the target article is determined to be normal and the target article is determined to be abnormal. It is possible to transport each target article to an appropriate destination. Therefore, according to this configuration, in addition to improving inspection efficiency, it is also possible to improve transport efficiency.

Another article conveying device according to the present disclosure that conveys a target article having a surface to be inspected includes:
a transfer unit that holds and transfers the target article;
an inspection unit that inspects the surface to be inspected;
The transfer unit includes a holding unit that holds the target article, and changes the state between a protruding state and a retracted state by moving the holding unit in and out along a first direction along the inspection target surface, and comprising: an egress/retreat drive section that transfers the target article between an article support section that supports the target article and the holding section; and a base that supports the egress/retraction drive section;
When viewed in an orthogonal direction along a direction perpendicular to the surface to be inspected, a direction intersecting the first direction is defined as a second direction,
The inspection section has a fixed position relative to the base, is arranged at a position facing the inspection target surface of the target article held by the holding section, and has a strip-shaped inspection area along the second direction. configured to inspect;
The moving distance of the holding part in the first direction by the moving part and the moving part is greater than or equal to the length of the target article held in the holding part in the first direction,
The length of the inspection area in the second direction is greater than or equal to the length of the target article held by the holding part in the second direction,
a conveyance drive section that conveys the target article by moving a conveyance support section serving as the article support section;
further comprising a determination unit that determines whether the target article is normal or abnormal based on the inspection result by the inspection unit,
The base of the transfer section is fixedly installed in a passage section through which the target article passes when transporting the target article,
After the target article is transferred from the holding unit to the conveyance support unit, the conveyance drive unit conveys the target article to different locations depending on whether the target article is normal or abnormal. .

According to this configuration, in addition to the above-mentioned effects, the following effects are achieved.
In other words, according to the present configuration, depending on the inspection results obtained by the inspection unit as the holding unit moves in and out before the target article is conveyed by the conveyance drive unit, which target articles are determined to be normal and which are determined to be abnormal. The target articles can be transported to appropriate destinations. Therefore, according to this configuration, in addition to improving inspection efficiency, it is also possible to improve transport efficiency.

Further features and advantages of the technology according to the present disclosure will become clearer from the following description of illustrative and non-limiting embodiments, written with reference to the drawings.

Plan view of article conveyance equipment equipped with article conveyance device Perspective view of transfer section Plan view of transfer section Explanatory diagram showing the operation of receiving the target item Control block diagram of article conveyance equipment Flowchart showing the procedure for controlling the article conveyance device A plan view of article conveyance equipment equipped with an article conveyance device according to a second embodiment Control block diagram of article conveyance equipment equipped with article conveyance device according to third embodiment A plan view of an article conveyance device according to a third embodiment A plan view of an article conveyance device according to a fourth embodiment A diagram showing the irradiation state changing unit in the fifth embodiment

The article conveyance device is provided, for example, in article conveyance equipment provided in a factory for manufacturing products. Such article transport equipment transports, manufactures, inspects, and stores finished products or work-in-progress products, as well as parts, jigs, tools, and the like used in the manufacture of products. Hereinafter, the article conveying apparatus according to the first embodiment will be described by exemplifying the case where the article conveying apparatus is applied to such article conveying equipment.

[First embodiment] [Schematic configuration of article conveyance equipment]
As shown in FIG. 1, the article conveyance equipment 100 includes an article conveyance device 4 that conveys a target article 9 having an inspection target surface 9F, and a storage 1 that stores the target article 9 temporarily or long-term. ing.

Inside the storage 1, a plurality of article storage sections 10 for storing target articles 9 are provided. In this example, the article storage section 10 is each of a plurality of storage areas formed in a storage shelf 11 configured by combining a support member and a beam member. That is, in this example, the plurality of article storage units 10 are arranged in parallel in the vertical direction and in the width direction of the storage shelf 11.

The storage warehouse 1 includes a storage section 2 through which the target article 9 passes when the target article 9 is stored in the storage warehouse 1, and an exit section 3 through which the target article 9 passes when the target article 9 is taken out from the storage warehouse 1. and are connected. The storage section 2 is provided with a temporary storage section 20 in which the target article 9 is temporarily stored when the target article 9 is stored in the storage warehouse 1 . In this example, the temporary storage section 20 is provided extending through the side wall 12 of the storage 1 and extending between the inside and outside of the storage 1. The temporary storage section 20, more specifically, the portion of the temporary storage section 20 located outside the storage 1 is provided with a temporary storage section 20, in which a portion of the temporary storage section 20 is placed outside the storage 1 by a worker, a transport device (for example, an automatic guided vehicle or an overhead transport vehicle), etc. , the target article 9 is transported. In this example, the temporary storage section 20 includes a conveyor that transports the target article 9 transported from outside the storage 1 into the inside of the storage 1. Similarly, the delivery section 3 is provided to penetrate the side wall 12 of the storage 1 and extend between the inside and outside of the storage 1. The delivery section 3 includes a conveyor that conveys the target article 9 from the inside of the storage 1 to the outside.

The target article 9 has an inspection target surface 9F that is an inspection target. The surface to be inspected 9F may be a flat surface, or may include at least a portion of a curved surface or an uneven surface. In this embodiment, the target article 9 is stored in the article storage section 10 or temporarily placed in the temporary storage section 20 with the inspection target surface 9F facing upward. In addition, when at least a part of the surface to be inspected 9F includes a curved surface or an uneven surface, "the direction in which the surface to be inspected 9F faces" is the normal direction of the surfaces that mainly constitute the surface to be inspected 9F, i.e. , It is assumed that among the entire surface of the surface to be inspected 9F, the area of the portion having the same normal direction is the normal direction of the widest surface. In this embodiment, the target article 9 is configured such that the dimension in the orthogonal direction Z perpendicular to the inspection target surface 9F is shorter than the dimension in the direction along the inspection target surface 9F. In this example, the target article 9 is a vapor deposition mask used for manufacturing an organic EL (electroluminescence) display. In each figure, the shape of the minute part in the vapor deposition mask is omitted, and the target article 9 is shown as a plate-like object.

When storing the target article 9 in the storage 1, the article conveyance device 4 conveys the target article 9 from the storage section 2 (temporary storage section 20) to one of the plurality of article storage sections 10. When unloading the target article 9 from the storage 1, the article transport device 4 conveys the target article 9 from the article storage section 10 to the unloading section 3.

[Goods conveyance device]
The configuration of the article conveyance device 4 will be described in detail below.

As shown in FIGS. 1 to 3, the article conveyance device 4 includes a transfer section 44 that holds and transfers the target article 9, and an inspection section 46 that inspects the inspection target surface 9F of the target article 9. We are prepared.
In the present embodiment, the article conveyance device 4 includes a running section 41 that runs along a running rail 40 provided on the floor, a pair of masts 42 that are erected upward from the running section 41, and a pair of masts 42 that run along running rails 40 provided on the floor. It includes a base 443 (also referred to as an elevating body) that moves up and down along. As described later, the base 443 constitutes a part of the transfer section 44.

In this example, the article conveyance device 4 includes a conveyance drive section Tm that moves the transfer section 44 and conveys the target article 9. The transport drive unit Tm includes a travel motor 41m (travel drive unit) that drives the travel unit 41 to travel, and an elevation motor 443m (elevation drive unit) that drives the base 443 (transfer unit 44) up and down.

The running rail 40 is arranged along the width direction of the storage shelf 11 at a position adjacent to the storage shelf 11 . In the example shown in FIG. 1, a pair of running rails 40 are provided. The traveling section 41 is driven by a traveling motor 41m and travels along the traveling rail 40. That is, in this example, the traveling section 41 is a traveling carriage that travels along the traveling rails 40. The base 443 is driven by a lifting motor 443m and moves up and down along the pair of masts 42. With this configuration, the article transport device 4 can transfer the target article 9 between itself and each of the plurality of article storage units 10 arranged along the vertical direction and the width direction of the storage shelf 11. It is configured. In this example, the article conveyance device 4 is configured as a stacker crane.

The transfer unit 44 supports the target article 9 by changing the state between a protruding state and a retracted state by moving the retaining unit 441 that holds the target article 9 in and out along the first direction X. It includes an egress/return drive section 442 that transfers the target article 9 between the article support section S and the holding section 441, and a base section 443 that supports the egress/retraction drive section 442. In FIG. 3, the holding part 441 and the target article 9 in the protruding state are shown by imaginary lines, and the holding part 441 and the target article 9 in the retracted state are shown by solid lines. In this example, the article support section S includes an article storage section 10 that is provided inside the storage warehouse 1 and stores the target article 9, and an article storage section 10 where the target article 9 is temporarily stored when the target article 9 is stored in the storage warehouse 1. A temporary storage section 20 is included.

Here, "transportation of the target article 9" refers to moving the target article 9 from a source location to a destination location, for example, from the temporary storage section 20 to the article storage section 10. It refers to moving 9, etc. Further, "transferring the target article 9" refers to transferring the target article 9 between the holding section 441 of the transfer section 44 and the article support section S. Note that "transportation of the target article 9" is a concept that includes "transferring the target article 9" as a part thereof. That is, the movement of the target article 9 due to transfer is also part of the transportation of the target article 9. For example, when conveying the target article 9 from the temporary storage section 20 to the article storage section 10, the article conveyance device 4 starts conveying the target article 9 by receiving the target article 9 from the temporary storage section 20. However, when the article conveyance device 4 delivers the target article 9 to the article storage section 10, the conveyance of the target article 9 by the article conveyance device 4 ends.

Hereinafter, one direction along the inspection target surface 9F will be referred to as a first direction X, and a direction intersecting the first direction . Further, the side where the holding part 441 moves to retract in the first direction X is referred to as the first direction proximal end side Xa, and the side in the first direction X where the holding part 441 moves to the protruding action is referred to as the first direction leading end side Xb. Note that the first direction X, the second direction Y, and the orthogonal direction Z are defined with reference to the surface 9F to be inspected of the target article 9 in a state where the target article 9 is held by the holding part 441. In this embodiment, the first direction X and the second direction Y are along the horizontal direction. Therefore, the orthogonal direction Z is along the vertical direction. Further, the second direction Y is orthogonal to the first direction X when viewed in the orthogonal direction Z.

As shown in FIG. 2, the base 443 is attached to the mast 42 by the lifting frame 43. In the illustrated example, the elevating frame 43 includes a linear guide 431 and is attached to the mast 42 via this linear guide 431. Thereby, the base portion 443 is configured to be movable relative to the mast 42. Note that the elevating frame 43 may be provided with a guide member such as a roller instead of the linear guide 431.

The base portion 443 supports an egress/retreat drive portion 442 . In this embodiment, the egress/retreat drive unit 442 is configured using a horizontal multi-joint arm (so-called SCARA: Selective Compliance Assembly Robot Arm). Specifically, the egress/retreat drive unit 442 includes a link mechanism 442L having a plurality of links, and an egress/return motor 442m (see FIG. 5) that drives the link mechanism 442L. In this example, the link mechanism 442L is configured to support the holding portion 441 and to extend and retract by being driven by the retraction motor 442m. The link mechanism 442L is configured to cause the holding portion 441 to move in and out along the first direction X by this expansion and contraction operation.

The holding part 441 is a part that holds the target article 9. In this embodiment, the holding part 441 includes a mounting surface 441F that supports the target article 9 from below with the inspection target surface 9F facing upward. In this example, the mounting surface 441F is formed to be parallel to the inspection surface 9F of the target article 9 while supporting the target article 9. In this example, the mounting surface 441F faces upward. Although detailed illustrations are omitted, the holding part 441 includes, for example, a plurality of protrusions that protrude upward from the placement surface 441F, and simultaneously supports the target article 9 from below by the placement surface 441F. The target article 9 may be supported in the horizontal direction by the section. This makes it possible to hold the target article 9 with high stability.

The holding portion 441 is configured to be driven by the ejection/retraction driving portion 442 to change its state between a protruding state and a retracted state. When the target article 9 is delivered to and from the article support section S, the holding section 441 changes its state between a protruding state and a retracted state. For example, when receiving the target article 9 from the temporary storage section 20 (article support section S), the holding section 441 moves from the retracted state to the protruding state, so that the holding section 441 moves below the target article 9 placed on the temporary storage section 20. The target article 9 is supported from below by the mounting surface 441F by being located at the same position and rising. Then, the holding unit 441 completes the transfer operation by entering the retired state while supporting the target article 9. Thereafter, the transfer unit 44 including the holding unit 441 is moved to the destination of the target article 9 by the transport drive unit Tm. For example, when delivering the target article 9 to the article storage section 10 (article support section S), the holding section 441 changes from the retracted state to the protruding state while supporting the target article 9 from below on the placement surface 441F. This positions the target article 9 above the article storage section 10, and lowers the object article 9 to place the target article 9 on the article storage section 10. Then, the holding section 441 completes the transfer operation by entering the retired state without supporting the target article 9. Note that each of the temporary storage section 20 and the article storage section 10 has an interval that is larger than the length (width) of the holding section 441 in the second direction Y and less than the length (width) of the target article 9 in the second direction Y. A pair of placing parts are provided spaced apart from each other in the second direction Y. Thereby, the holding part 441 can pass between the pair of placement parts in the vertical direction, and the pair of placement parts can support the target article 9 from below. The target article 9 is temporarily placed in the temporary storage section 20 by being placed on the pair of placement sections in the temporary storage section 20 . Further, the target article 9 is stored in the article storage section 10 by being placed on a pair of placement sections in the article storage section 10 .

The inspection unit 46 has a fixed position with respect to the base 443, is placed at a position facing the inspection target surface 9F of the target article 9 held by the holding unit 441, and has a strip-shaped inspection area R along the second direction Y. (see FIG. 3). In this embodiment, the inspection section 46 is arranged at a position above the placement surface 441F of the holding section 441 and facing the inspection surface 9F of the target article 9. Here, the position where the inspection section 46 faces the surface to be inspected 9F refers to the position where the inspection section 46 faces the surface to be inspected 9F while the target article 9 is being moved by the movement of the holding section 441 into and out. In other words, the inspection unit 46 is arranged so as to face the inspection target surface 9F of the target article 9 with a prescribed interval when viewed in the first direction X along the first direction X. . In this example, when the holding part 441 is in both the retracted state and the protruding state in the orthogonal direction Z view (plan view), the inspection part 46 does not overlap with the target article 9 held by the holding part 441. placed in position. The inspection section 46 is arranged at a position overlapping the target article 9 held by the holding section 441 during the retraction operation and the protruding operation of the holding section 441 when viewed in the orthogonal direction Z. As shown in FIG. 3, in this example, the inspection unit 46 is located in the first direction from the article front end 9b, which is the end of the target article 9 held by the holding unit 441 in the retired state, on the first direction front end side Xb. It is arranged on the tip side Xb. Furthermore, the inspection section 46 is arranged closer to the proximal side Xa in the first direction than the article proximal end 9a, which is the end of the target article 9 held by the holding section 441 in the protruding state, on the proximal end Xa in the first direction. ing. In this embodiment, the inspection area R is set at a position that overlaps with the inspection section 46 when viewed in the orthogonal direction Z. More specifically, the inspection region R is set vertically below the inspection section 46.

The inspection unit 46 inspects an area that overlaps with the inspection area R on the inspection target surface 9F of the target article 9. More specifically, the inspection unit 46 inspects the area where the inspection target surface 9F and the inspection area R overlap while the holding unit 441 holding the target article 9 moves in and out. In this embodiment, the inspection unit 46 includes an imaging device 460 that captures an image of the inspection region R. This imaging device 460 images an area where the inspection target surface 9F and the inspection region R overlap while the holding unit 441 holding the target article 9 moves in and out. More specifically, the imaging device 460 is configured to obtain an image of the inspection target surface 9F by taking a close-up of a region overlapping with the inspection region R on the inspection target surface 9F.
Thereby, the inspection target surface 9F can be inspected in detail. The inspection unit 46 inspects, for example, the presence or absence of minute scratches, irregularities, or deposits on the inspection target surface 9F.

In this embodiment, the inspection section 46 is fixed to the base 443 via the support frame 45. In this example, the support frame 45 that fixes the inspection section 46 is connected to the base 443 via the elevating frame 43.

In the present embodiment, the support frame 45 includes a first direction extending portion 451 extending from a connecting portion with the elevating frame 43 to the first direction leading end side Xb, and a first direction extending portion 451 extending toward the first direction leading end side Xb. It includes an orthogonal direction extending portion 452 extending from the end of Xb in the orthogonal direction Z (in this example, upward). The inspection section 46 is supported above the orthogonally extending section 452. As a result, the inspection unit 46 is placed on the first direction front end side Xb of the target article 9 held by the holding unit 441 in the retired state, and above the inspection target surface 9F of the target article 9. It is located. In the illustrated example, the inspection section 46 is supported by a pair of support frames 45. One of the pair of support frames 45 is connected to one of the pair of elevating frames 43, and the other of the pair of support frames 45 is connected to the other of the pair of elevating frames 43.

Here, as described above, the transfer section 44 includes the ejection/retraction drive section 442 that moves the holding section 441 into and out to change the state between the protruding state and the retracted state. As shown in FIG. 3, the moving distance L1 of the moving part L1 of the holding part 441 in the first direction X by the moving part driving part 442 is the length ( The length of the inspection area R in the second direction (second area length RL) is equal to or greater than the length of the target article 9 held in the holding part 441 in the second direction Y ( The length of the second article is 92L) or more.

The “exit/retreat movement distance L1” is the movement distance when the holding portion 441 changes its state from the protruding state to the retracted state, or when changing the state from the retired state to the protruding state. That is, the "extend/retract movement distance L1" is a one-way distance when the holding part 441 moves in and out, and can also be referred to as an in/out movement range.

Since the second region length RL is equal to or greater than the second article length 92L, the inspection unit 46 inspects the entire area in the second direction Y of the inspection target surface 9F of the target article 9 held by the holding unit 441. can do. Furthermore, since the moving distance L1 is equal to or greater than the first article length 91L, the inspection unit 46 performs an inspection on the target article 9 held in the holding unit 441 as the holding unit 441 moves in and out. The entire area of the target surface 9F in the first direction X can be inspected. That is, with the above configuration, as the holding part 441 moves in and out, the inspection part 46 inspects the entire area of the inspection target surface 9F of the target article 9 held by the holding part 441, that is, the first direction of the inspection target surface 9F. The entire area in the X and second directions Y can be inspected.

In this embodiment, the inspection unit 46 inspects the inspection target surface 9F of the target article 9 when transferring (receiving) the target article 9 from the temporary storage unit 20 to the holding unit 441. FIG. 4 is a plan view showing the operation when the article conveyance device 4 receives the target article 9. As shown in FIG.

For example, when receiving the target article 9 from the temporary storage section 20 (see FIG. 1), the article conveyance device 4 changes the state of the holding section 441 from the retracted state to the protruding state using the egress/retreat drive section 442. The left diagram in FIG. 4 shows a state in which the holding portion 441 changes its state from the retracted state to the protruded state and supports the target article 9 by the mounting surface 441F. As shown in the left diagram of FIG. 4, in this embodiment, when the holding part 441 is in the protruding state, the inspection area R is located at a position that is lower than the article base end 9a of the target article 9 held by the holding part 441. It is arranged on the proximal end side Xa in one direction.

After the target article 9 is supported by the mounting surface 441F with the holding part 441 in the protruding state, the article conveying device 4 causes the holding part 441 to be retracted by the egress/retreat drive part 442. The center diagram of FIG. 4 shows a state in which the holding portion 441 is in the middle of a retiring operation in which the state is changed from the protruding state to the retracted state. As shown in the center view of FIG. 4, in this embodiment, while the holding part 441 is retiring, the inspection area R is moved in a direction orthogonal to the inspection target surface 9F of the target article 9 held by the holding part 441. They are set to overlap in the Z view (planar view in this example). Then, the inspection unit 46 inspects an area that overlaps with the inspection area R on the inspection target surface 9F.

Then, upon completion of such a retirement operation, the holding section 441 enters a retired state. The right diagram in FIG. 4 shows the position of the holding part 441 in the retired state. As shown in the right diagram of FIG. 4, in the present embodiment, when the holding part 441 is in the retired state, the inspection area R is located at the first end of the article tip 9b of the target article 9 held by the holding part 441. It is arranged on the leading end side Xb in the direction.

With the above-described configuration, when the target article 9 is held by the holding section 441, the ejection/retraction drive section 442 causes the holding section 441 to move in and out. It becomes possible to properly inspect the entire area.

Next, the control configuration of the article conveyance device 4 will be explained. FIG. 5 is a block diagram showing the control configuration of the article conveyance equipment 100.

As shown in FIG. 5, the article conveyance device 4 includes a control device C that controls the operation of each part. The control device C controls the operation of each part of the article conveyance device 4 in response to a conveyance command and the like from the general control device Ct that manages the entire equipment. The overall control device Ct and the control device C are configured to be able to communicate with each other wirelessly. The overall control device Ct and the control device C include, for example, a processor such as a microcomputer, peripheral circuits such as a memory, and the like. Each function is realized through cooperation between these hardware and a program executed on a processor such as a computer.

In this embodiment, the control device C controls the ejection/retraction motor 442m (exit/retraction drive section 442) and the transport drive section Tm. As described above, in this example, the transport drive unit Tm includes the travel motor 41m (travel drive unit) and the lift motor 443m (lift drive unit). Control device C controls these traveling motor 41m and lifting motor 443m.

In this embodiment, the article conveyance device 4 further includes a determination section 47 that determines whether the target article 9 is normal or abnormal based on the inspection result by the inspection section 46. Here, the determination as to whether the target article 9 is normal or abnormal is made by, for example, determining whether there are minute scratches, irregularities, deposits, etc. on the inspection target surface 9F based on preset determination criteria. This is the judgment. This criterion may be appropriately set according to various conditions such as the type and shape of the target article 9, or the portion of the target article 9 where the inspection target surface 9F is formed. In this embodiment, image recognition processing is performed on the image data of the inspection target surface 9F captured by the imaging device 460 included in the inspection unit 46 to recognize minute scratches, etc., and a judgment is made based on the recognition result. I do.

In this embodiment, the transport drive unit Tm transports the target article 9 to different locations depending on whether the target article 9 is normal or abnormal. In this example, the control device C acquires the determination result by the determination unit 47, determines the destination of the target article 9 based on the determination result, and drives the conveyor to convey the target article 9 to the destination. The section Tm is controlled. As shown in FIG. 1, when the target article 9 is normal, the conveyance drive unit Tm conveys the target article 9 to the first area A1, and when the target article 9 is abnormal, the conveyance drive unit Tm conveys the target article 9 to the first area A1. The article 9 is transported to the second area A2. In this example, the second area A2 is set in a part of the plurality of article storage units 10 provided on the storage shelf 11. Here, the rate at which the target article 9 is determined to be abnormal is lower than the rate at which it is determined to be normal. Therefore, in the illustrated example, the second area A2, which is the destination for the target article 9 that has been determined to be abnormal, has a larger article storage area than the first area A1, which is the destination for the target article 9 that has been determined to be normal. The number of 10 is set to be small. In FIG. 1, the target articles 9 stored in the article storage section 10 in the first area A1 are shown in color, and the target articles 9 stored in the article storage section 10 in the second area A2 are shown in color. The target article 9 determined to be abnormal is temporarily stored in the article storage section 10 in the second area A2 for, for example, repair or further inspection. However, the second area A2 may be provided outside the storage 1, for example, without being limited to such a configuration.

Next, a control procedure for the article conveyance device 4 will be explained. Here, as an example, a control procedure when the target article 9 is stored in the storage 1 by the article conveyance device 4 will be described. FIG. 6 is a flowchart showing this control procedure.

The article conveyance device 4 determines, for example, whether or not there is a target article 9 in the temporary storage section 20 (see FIG. 1) (step #1). This determination is made based on, for example, the detection result obtained from an inventory sensor (not shown) that detects the presence or absence of the target article 9 in the temporary storage section 20, or information indicating the transportation status of the target article 9 transmitted from the central control device Ct. etc. When the article conveyance device 4 determines that there is no target article 9 in the temporary storage section 20 (step #1: No), it repeatedly executes step #1. If it is determined that the target article 9 is present in the temporary storage section 20 (step #1: Yes), the article transport device 4 transfers the target article 9 (step #2). In this example, the article conveyance device 4 performs an operation to receive the target article 9 from the temporary storage section 20 to the holding section 441. Further, the article transport device 4 inspects the inspection target surface 9F of the target article 9 during transfer of the target article 9 (step #3). In this example, the article conveying device 4 inspects the inspection target surface 9F of the target article 9 while changing the state of the holding part 441 holding the target article 9 from the protruding state to the retracted state. Thereafter, the article transport device 4 determines whether the target article 9 is normal based on the inspection result of the inspection target surface 9F (step #4). When determining that the target article 9 is normal (Step #4: Yes), the article conveyance device 4 conveys the target article 9 to the first area A1 (Step #5). When determining that the target article 9 is not normal, in other words, abnormal (step #4: No), the article conveyance device 4 conveys the target article 9 to the second area A2.

[Second embodiment]
Next, a second embodiment of the article conveyance device will be described with reference to FIG. 7. Below, differences from the first embodiment described above will be mainly explained. Points that are not particularly described are the same as those in the first embodiment described above.

As shown in FIG. 7, the article conveyance equipment 200 according to the present embodiment includes a transfer section 44 and an internal conveyance device 243 as an article conveyance device 240 that conveys the target article 9. The internal transport device 243 is a device that transports the target article 9 within the specified area AD. Moreover, the article conveyance equipment 200 according to the present embodiment further includes an external conveyance device 250 that conveys the target article 9 outside the specified area AD. In the illustrated example, an external transport device 250 is provided on the outside, and an internal transport device 243 is provided on the inside, with the side wall portion 211 surrounding the defined area AD interposed therebetween. The transfer unit 44 is configured to transfer the target article 9 between the external conveyance device 250 and the internal conveyance device 243. In this example, the external transport device 250 is configured as a trackless automatic guided vehicle. Further, the internal transport device 243 is configured as a tracked automatic guided vehicle that travels along the travel rails 230.

In this embodiment, the base 443 of the transfer section 44 is fixedly installed on the passage section 220 through which the target article 9 passes when the target article 9 is transported. In this example, the passage section 220 is a loading section into the prescribed area AD, through which the target article 9 to be conveyed into the prescribed area AD passes. That is, the passage portion 220 is set near the opening 212 formed in the side wall portion 211 surrounding the specified area AD. Then, the transfer unit 44 receives the target article 9 from the external conveyance device 250 using the holding unit 441 and delivers the target article 9 to the internal conveyance device 243. For this reason, in the present embodiment, the transfer section 44 includes a turning section 444 that turns the holding section 441 and the egress/retraction drive section 442 relative to the base section 443. Here, the pivot axis of the pivot portion 444 is set along the vertical direction (orthogonal direction Z). The transfer unit 44 moves the holding unit 441 toward and out of the external transport device 250 to receive the target article 9, then rotates the holding unit 441 by 180 degrees, and then moves the holding unit 441 toward the internal transport device 243 to hold the target article 9. The target article 9 is handed over by performing an exit/exit operation of the section 441.

The inspection unit 46 inspects the inspection target surface 9F of the target article 9 while the holding unit 441 receives the target article 9 from the external conveyance device 250. Specifically, while the holding part 441 in the protruding state protruding toward the external conveying device 250 receives the target article 9 from the external conveying device 250 and changes its state from the protruding state to the retired state, The inspection target surface 9F of the target article 9 is inspected. However, without being limited to such a configuration, the inspection unit 46 may be configured to inspect the inspection target surface 9F of the target article 9 while the holding unit 441 is delivering the target article 9 to the internal conveyance device 243. You can leave it there. In this case, the inspection unit 46 inspects the inspection target surface 9F of the target article 9 while the holding unit 441 holding the target article 9 changes its state from the retracted state to the protruding state protruding toward the internal conveyance device 243. .

In this embodiment, the article conveyance device 240 includes a conveyance drive section 243m that moves a conveyance support section 243a as an article support section S to convey the target article 9. The internal transport device 243 is equipped with the transport support section 243a and the transport drive section 243m. That is, in this example, the article conveyance device 4 includes a transfer section 44 disposed in the passage section 220 to transfer the target article 9, and an internal conveyance device 243 that conveys the target article 9 inside the specified area AD. It is composed of: Then, when determining that the target article 9 is normal based on the inspection result by the inspection unit 46, the article conveyance device 240 transfers the target article 9 to the first transfer station located in the first area A10. It is transported to the machine 260. On the other hand, when it is determined that the target article 9 is abnormal, the article conveyance device 240 conveys the target article 9 to the second transfer machine 270 arranged in the second area A20. The first transfer machine 260 and the second transfer machine 270 are installed corresponding to mutually different processing devices or transport devices. The first transfer machine 260 and the second transfer machine 270 receive the target article 9 from the internal conveyance device 243 and deliver the target article 9 to their corresponding processing device or conveyance device.

[Third embodiment]
Next, a third embodiment of the article conveyance device will be described with reference to FIGS. 8 and 9. Below, differences from the first embodiment described above will be mainly explained. Points that are not particularly described are the same as those in the first embodiment described above.

As shown in FIGS. 8 and 9, the article conveyance device 4 according to the present embodiment is provided in an article conveyance facility 100 in which a plurality of types of articles having different shapes of inspection target surfaces 9F are conveyed as target articles 9. .

Here, the target article 9 is a vapor deposition mask used for manufacturing an organic EL display, as in the first embodiment. In this example, the target article 9 is a metal mask made of a metal plate or the like on which a mask pattern is formed, which is used in the manufacturing process of an organic EL display. For example, the surface of the metal plate on which such a pattern is formed is the surface to be inspected 9F.
The plurality of types of target articles 9 handled by the article transport facility 100 have different patterns formed on the inspection target surface 9F, and thus the shape of the inspection target surface 9F differs depending on the type of the target article 9.

In the present embodiment, the article conveyance device 4 includes an irradiation device 5 that is disposed at a position facing the inspection target surface 9F of the target article 9 held by the holding unit 441 and irradiates the inspection target surface 9F with light, and It includes an irradiation state changing unit 6 that changes the irradiation state of light to the surface 9F, and a type information acquisition unit 7 that acquires type information indicating the type of article to be transported as the target article 9. Then, the inspection unit 46, here the imaging device 460, inspects the inspection target surface 9F while the inspection target surface 9F is irradiated with the light from the irradiation device 5.

In this embodiment, the overall control device Ct manages a plurality of target articles 9 transported within the article conveyance facility 100, together with type information indicating the type thereof. The type information acquisition unit 7 is configured to acquire type information of the target article 9 conveyed by the article conveyance device 4 equipped with the type information acquisition unit 7 from the overall control device Ct. Then, the irradiation state changing section 6 changes the irradiation state according to the type information acquired by the type information acquisition section 7. As mentioned above, different mask patterns are formed on the inspection target surface 9F depending on the type of article, and the light irradiation state suitable for inspecting the inspection target surface 9F depends on the type of article. There are various types. According to the above configuration, since the irradiation state changing section 6 changes the irradiation state according to the article type information, the inspection section is set in an irradiation state suitable for each of the inspection target surfaces 9F having different shapes depending on the article type. 46 inspection can be performed.

As shown in FIG. 9, in this embodiment, the irradiation device 5 includes a plurality of light sources 50 that are spaced apart from each other around the inspection section 46. In the illustrated example, the irradiation device 5 includes six light sources 50a to 50f. The plurality of light sources 50 are arranged at positions facing the inspection target surface 9F of the target article 9 held by the holding part 441. Moreover, the plurality of light sources 50 are arranged on the same side of the inspection target surface 9F as the inspection section 46 in the direction perpendicular to the inspection target surface 9F.

In this embodiment, the irradiation device 5 includes a light source support frame 51 that supports a plurality of light sources 50. The relative positions of the light source support frame 51 and the inspection section 46 are fixed. The light source support frame 51 is preferably connected to a support frame 45 that fixes the inspection section 46 to the base 443, as shown in FIGS. 2 and 3, for example. As shown in FIG. 9, in this example, the light source support frame 51 includes a proximal frame 51a disposed on the proximal side Xa in the first direction with respect to the inspection section 46, and a proximal frame 51a disposed on the proximal side Xa in the first direction with respect to the inspection section 46. A distal end side frame 51b disposed on the distal end side Xb. Each of the proximal frame 51a and the distal frame 51b is formed to extend along the second direction Y.

The proximal frame 51a supports some of the plurality of light sources 50 included in the irradiation device 5. In this embodiment, the proximal frame 51a supports three light sources 50a, 50b, and 50c among the six light sources 50a to 50f in a state where they are lined up in the second direction Y.

The distal end frame 51b supports the other part of the plurality of light sources 50 included in the irradiation device 5 that is not supported by the proximal frame 51a. In this embodiment, the distal end frame 51b supports three light sources 50d, 50e, and 50f among the six light sources 50a to 50f in a state where they are lined up in the second direction Y.

With such a configuration, the plurality of light sources 50 can be arranged so as to surround the inspection region R inspected by the inspection section 46 in plan view.

Then, the irradiation state changing unit 6 changes the irradiation angle of light with respect to the inspection target surface 9F according to the type information acquired by the type information acquisition unit 7. Thereby, the inspection target surface 9F can be satisfactorily inspected while the light is irradiated at an angle suitable for the shape of the inspection target surface 9F. In this embodiment, the irradiation state changing unit 6 turns on the light source 50 selected from the plurality of light sources 50 according to the type information acquired by the type information acquiring unit 7. Thereby, by selecting the light source 50 that can irradiate light at an angle suitable for the shape of the surface to be inspected 9F from among the plurality of light sources 50 arranged apart from each other, and turning on the light source 50, the corresponding light source 50 can be turned on. The inspection of the inspection target surface 9F can be performed satisfactorily. In the configuration of the present embodiment, by lighting all or part of the plurality of light sources 50 supported by the proximal frame 51a, light is emitted from the proximal side Xa in the first direction to the inspection area R by the inspection unit 46. can be irradiated. Moreover, by lighting all or part of the plurality of light sources 50 supported by the distal end side frame 51b, light can be irradiated onto the inspection region R by the inspection section 46 from the distal end side Xb in the first direction. Further, by lighting the plurality of light sources 50 that are supported in line in the second direction Y by the proximal frame 51a and the distal frame 51b in only a part of the area in the second direction Y, It is also possible to emit light from a biased side. Alternatively, light can be emitted from all directions by turning on all of the plurality of light sources 50 supported by the proximal frame 51a and the distal frame 51b. In the example shown in FIG. 9, among the six light sources 50a to 50f, three light sources 50d, 50e, and 50f arranged on the front end side Xb in the first direction with respect to the inspection section 46 are turned on. Note that the number of light sources 50 selected by the irradiation state changing unit 6 can be set arbitrarily. The irradiation state changing unit 6 can select and turn on one or more of the plurality of light sources 50 included in the irradiation device 5.

[Fourth embodiment]
Next, a fourth embodiment of the article conveyance device will be described with reference to FIG. 10. The fourth embodiment is a modification of the third embodiment described above. Since the control configuration is the same as that of the third embodiment, reference will be made to FIG. 8 showing the control configuration of the third embodiment as necessary.

As shown in FIG. 10, in this embodiment, the irradiation device 5 includes a movable light source 52 that is movable around the inspection section 46. In the illustrated example, the irradiation device 5 includes one movable light source 52. Thereby, the number of light sources can be reduced compared to the case where a plurality of light sources 50 are provided as in the third embodiment. The movable light source 52 is arranged at a position facing the inspection target surface 9F of the target article 9 held by the holding part 441. Moreover, the movable light source 52 is arranged on the same side of the inspection target surface 9F as the inspection section 46 in the direction orthogonal to the inspection target surface 9F.

In this embodiment, the irradiation device 5 includes a light source support frame 53 that is arranged along the periphery of the inspection section 46 and supports the movable light source 52 in a movable manner. The light source support frame 53 is formed into a rail shape that allows a connecting portion with the movable light source 52 to be guided along the direction in which the light source support frame 53 extends. In the illustrated example, the light source support frame 53 is formed in an annular shape surrounding the inspection section 46 in plan view. The movable light source 52 is configured to be driven by a drive unit (not shown) and move on the light source support frame 53. The movable light source 52 stops at an arbitrary position on the light source support frame 53, and irradiates the surface to be inspected 9F at that position. Further, the movable light source 52 may irradiate the surface to be inspected 9F while moving on the light source support frame 53.

With such a configuration, light can be irradiated from any direction onto the inspection region R inspected by the inspection section 46.

In this embodiment, the irradiation state changing unit 6 changes the position of the movable light source 52 according to the type information acquired by the type information acquiring unit 7 (see FIG. 8). Thereby, by changing the position of the movable light source 52 to a position where it can irradiate light at an angle suitable for the shape of the surface to be inspected 9F, the inspection of the surface to be inspected 9F can be performed satisfactorily. Note that the irradiation state changing unit 6 may stop the movable light source 52 at a preset position according to the shape of the inspection target surface 9F during the inspection of the inspection target surface 9F by the inspection unit 46, or It may be moved within a preset range depending on the shape of the target surface 9F. In other words, the inspection unit 46 may inspect the inspection target surface 9F with the movable light source 52 irradiating the inspection target surface 9F stopped, or the inspection unit 46 may inspect the inspection target surface 9F with the movable light source 52 illuminating the inspection target surface 9F. The surface to be inspected 9F may be inspected while moving on the light source support frame 53.

[Fifth embodiment]
Next, a fifth embodiment of the article conveyance device will be described with reference to FIG. 11. In the following, points different from each of the above embodiments will be mainly explained. Points that are not particularly described are the same as in each of the above embodiments.

In this embodiment, the irradiation state changing unit 6 changes at least one of the color and brightness of the light irradiated by the irradiation device 5 according to the type information acquired by the type information acquisition unit 7 (see FIG. 8). . Depending on the shape and condition of the surface to be inspected 9F, the color or brightness of light suitable for the inspection of the surface to be inspected 9F by the inspection unit 46 may differ. According to this embodiment, by changing at least one of the color and brightness of the light emitted by the irradiation device 5 according to the type of article, the inspection target surface 9F can be brought into a state suitable for inspection. Therefore, the inspection section 46 can properly inspect the surface 9F to be inspected.

In this embodiment, the irradiation state changing unit 6 includes a brightness changing unit 61 that changes the brightness of the light emitted from the light source 54 of the irradiation device 5, and a color changing unit 61 that changes the color (wavelength) of the light emitted from the light source 54. A changing unit 62 is provided. The brightness changing section 61 and the color changing section 62 are controlled by the irradiation state changing section 6. The brightness changing unit 61 includes a device that changes the intensity of light emitted from the light source 54. The device includes, for example, an electrical circuit that varies the voltage supplied to the light source 54.

In the present embodiment, as an example, the color changing unit 62 includes a rotating frame 621 provided with a plurality of light transmitting plates 621a to 621f that transmit light of a specific wavelength among the light emitted from the light source 54, and a rotating frame A rotation drive unit 622 that rotates the rotation drive unit 621 is provided.

The rotating frame 621 is arranged between the light source 54 and the inspection target surface 9F (not shown in FIG. 11). In this example, six light transmitting plates 621a to 621f are arranged in line in the circumferential direction around the rotation axis of the rotation frame 621. The rotation drive unit 622 rotates the rotation frame 621 so that one of the six light transmission plates 621a to 621f is in a position facing the light source 54.

Each of the six light transmitting plates 621a to 621f transmits the light emitted from the light source 54 to the inspection target surface 9F side. At this time, each of the six light transmitting plates 621a to 621f is configured to transmit light of mutually different wavelengths. Thereby, the inspection target surface 9F can be irradiated with light of a plurality of different colors from the light source 54.

In this embodiment, the irradiation state changing unit 6 sets a combination of color and brightness of the light emitted from the light source 54 according to article type information, and sends a command to change the brightness to the brightness changing unit 61. At the same time, a command to change the color is transmitted to the color changing section 62.

[Other embodiments]
Next, other embodiments of the article conveyance device will be described.

(1) In each of the above embodiments, when the holding part 441 is in the retired state, the inspection area R is located closer to the leading end side Xb in the first direction than the article leading end part 9b of the target article 9 held by the holding part 441. An example in which the inspection region R is arranged closer to the proximal end side Xa in the first direction than the article proximal end 9a of the target article 9 held by the holding part 441 when the holding part 441 is in a protruding state. explained. However, without being limited to such an example, when the holding part 441 is in the retired state, the inspection area R is arranged at the same position as the article tip 9b of the target article 9 held by the holding part 441. You can leave it there. Further, when the holding part 441 is in the protruding state, the inspection region R may be arranged at the same position as the article base end 9a of the target article 9 held by the holding part 441.

(2) In each of the above embodiments, an example has been described in which the holding unit 441 is configured to support the target article 9 with the inspection target surface 9F facing upward from below using the mounting surface 441F. However, without being limited to such examples, for example, the holding unit 441 may hold the target article 9 with the inspection target surface 9F tilted upward, or with the inspection target surface 9F facing downward. The target article 9 may be held by a chuck mechanism or the like.

(3) In each of the above embodiments, an example has been described in which the transport drive unit Tm transports the target article 9 to different locations depending on whether the target article 9 is normal or abnormal. However, without being limited to such an example, the transport drive section Tm may transport the target article 9 to the same location regardless of whether the target article 9 is normal or abnormal. In this case, after the target article 9 is transported, appropriate processing may be performed on the target article 9 based on whether the target article 9 is normal or abnormal.

(4) In each of the above embodiments, an example has been described in which the inspection unit 46 includes the imaging device 460 that captures an image of the inspection region R. However, without being limited to such an example, the inspection section 46 may be configured to include, for example, an ultrasonic sensor, a laser sensor, etc. that detects minute irregularities in the inspection area R.

(5) In the third embodiment described above, the light source support frame 51 that supports the plurality of light sources 50 includes the proximal frame 51a and the distal frame 51b extending in the second direction Y. . However, without being limited to such an example, for example, the light source support frame 51 that supports the plurality of light sources 50 may be formed in an annular shape surrounding the inspection section 46 as in the fourth embodiment described above. It's okay.

(6) In the third embodiment described above, an example has been described in which the irradiation device 5 includes six light sources 50a to 50f. However, without being limited to such an example, the irradiation device 5 may include only one light source 50, or may include two or more (including seven or more) light sources 50. good.

(7) In the third embodiment described above, an example will be described in which the irradiation state changing unit 6 changes the irradiation angle of light with respect to the inspection target surface 9F by lighting the light source 50 selected from the plurality of light sources 50. did. However, the present invention is not limited to such an example, and the light source 50 is supported in a swingable manner while being fixed in position with respect to the light source support frame 51, and the irradiation state changing unit 6 controls the swinging of the light source 50. It may be configured to change the irradiation angle of light to the surface to be inspected 9F by changing the angle.

(8) In the fourth embodiment described above, an example has been described in which the light source support frame 53 that supports the movable light source 52 is formed in an annular shape surrounding the inspection section 46. However, without being limited to such an example, the light source support frame 53 that supports the movable light source 52 may include two support frames extending in the second direction Y, as in the third embodiment described above. It's okay to stay. In this case, it is preferable that the movable light source 52 is provided on each of the two support frames. The movable light sources 52 provided on each of the two support frames are configured to move along the second direction Y.

(9) In the fourth embodiment described above, the example in which the irradiation device 5 includes one movable light source 52 has been described. However, without being limited to such an example, the irradiation device 5 may include a plurality of movable light sources 52, that is, two or more movable light sources 52.

(10) In the fifth embodiment described above, the color changing unit 62 changes the color of the light emitted from the light source 54 by including the rotating frame 621 provided with a plurality of light transmitting plates 621a to 621f. An example of this was explained. However, without being limited to such an example, means for changing the color of the light emitted from the light source 54 may include, for example, a plurality of light sources emitting light of different wavelengths (for example, red, blue, green). Known means can be used, such as providing a three-color LED light source.

(11) Note that the configuration disclosed in the embodiment described above can also be applied in combination with the configuration disclosed in other embodiments as long as no contradiction occurs. Regarding other configurations, the embodiments disclosed herein are merely illustrative in all respects. Therefore, various modifications can be made as appropriate without departing from the spirit of the present disclosure.

[Summary of the above embodiment]
The article conveyance device described above will be described below.

An article conveyance device that conveys a target article having a surface to be inspected,
a transfer unit that holds and transfers the target article;
an inspection unit that inspects the surface to be inspected;
The transfer unit includes a holding unit that holds the target article, and changes the state between a protruding state and a retracted state by moving the holding unit in and out along a first direction along the inspection target surface, and comprising: an egress/retreat drive section that transfers the target article between an article support section that supports the target article and the holding section; and a base that supports the egress/retraction drive section;
When viewed in an orthogonal direction along a direction perpendicular to the surface to be inspected, a direction intersecting the first direction is defined as a second direction,
The inspection section has a fixed position relative to the base, is arranged at a position facing the inspection target surface of the target article held by the holding section, and has a strip-shaped inspection area along the second direction. configured to inspect;
The moving distance of the holding part in the first direction by the moving part and the moving part is greater than or equal to the length of the target article held in the holding part in the first direction,
The length of the inspection area in the second direction is greater than or equal to the length of the target article held by the holding part in the second direction.

According to this configuration, the ejection/retraction driving section causes the holding part to move in and out while the target article is being held by the holding part. Can be inspected. Therefore, according to this configuration, there is no need to transport the target article to a place exclusively for inspection, and the surface to be inspected can be inspected while the target article is being transferred, so that the target article can be inspected efficiently. be able to. Further, the moving distance of the holding section in the first direction is equal to or longer than the length of the target article held in the holding section in the first direction, and the length of the strip-shaped inspection area to be inspected by the inspection section in the second direction is Since the length is greater than or equal to the length in the second direction of the target article held by the holding unit, the entire area of the inspection target surface is within the relative movement range of the inspection area when the holding unit moves in and out. can be included. Therefore, according to this configuration, it is possible to appropriately inspect the entire area of the surface to be inspected.

here,
The side on which the holding part in the first direction is retracted is defined as a first direction proximal side, and the side in the first direction where the holding part is protruded is defined as a first direction distal side,
When the holding unit is in a retired state, the inspection area is at the same position as the article tip, which is the end of the target article held by the holding unit on the front end side in the first direction, or at the tip of the article. disposed on the front end side in the first direction than the section,
When the holding part is in a protruding state, the inspection area is at the same position as the article proximal end that is the proximal end in the first direction of the target article held by the holding part, or It is preferable that it is disposed closer to the proximal end in the first direction than the proximal end of the article.

According to this configuration, by changing the state of the holding portion holding the target article between the retracted state and the protruding state, it is possible to appropriately inspect the entire area of the target article.

Also,
The holding unit includes a mounting surface that supports the target article from below with the inspection target surface facing upward,
It is preferable that the inspection section is disposed at a position above the placement surface and facing the surface to be inspected.

According to this configuration, the target article can be held with a relatively simple configuration, and the surface to be inspected of the held target article can be appropriately inspected by the inspection unit.

Also,
a transport drive unit that transports the target article by moving the transfer unit;
further comprising a determination unit that determines whether the target article is normal or abnormal based on the inspection result by the inspection unit,
Preferably, the transport drive section transports the target article to different locations depending on whether the target article is normal or abnormal.

According to this configuration, the target article determined to be normal and the target determined to be abnormal according to the inspection results by the inspection unit obtained as the holding unit moves in and out before the target article is conveyed by the conveyance drive unit. Each article can be transported to an appropriate destination. Therefore, according to this configuration, in addition to improving inspection efficiency, it is also possible to improve transport efficiency.

Further, as described above, when the target article is transported to different locations depending on whether the target article is normal or abnormal,
The article support section includes an article storage section that is provided inside a storage warehouse and stores the target article, and a temporary storage section where the target article is temporarily placed when the target article is stored in the storage warehouse. , includes;
Preferably, the inspection section inspects the surface to be inspected of the target article when transferring the target article from the temporary storage section to the holding section.

According to this configuration, the surface to be inspected of the target article can be inspected along with the operation of receiving the target article from the temporary storage section to the holding section. Therefore, according to this configuration, the surface to be inspected of the target article is inspected when entering the storage, and depending on the inspection results, the target article is determined to be normal and the target article is determined to be abnormal. and can be transported to appropriate destinations inside the storage.

Also,
a conveyance drive section that conveys the target article by moving a conveyance support section serving as the article support section;
further comprising a determination unit that determines whether the target article is normal or abnormal based on the inspection result by the inspection unit,
The base of the transfer section is fixedly installed in a passage section through which the target article passes when transporting the target article,
After the target article is transferred from the holding unit to the conveyance support unit, the conveyance driving unit conveys the target article to different locations depending on whether the target article is normal or abnormal. suitable.

According to this configuration, the target article determined to be normal and the target determined to be abnormal according to the inspection results by the inspection unit obtained as the holding unit moves in and out before the target article is conveyed by the conveyance drive unit. Each article can be transported to an appropriate destination. Therefore, according to this configuration, in addition to improving inspection efficiency, it is also possible to improve transport efficiency.

Also,
Preferably, the inspection section includes an imaging device that captures an image of the inspection area.

According to this configuration, the surface to be inspected of the target article can be appropriately inspected using the image data captured by the imaging device.

Also,
A plurality of types of articles having different shapes of the surfaces to be inspected are provided in an article conveying facility to be conveyed as the target articles,
an irradiation device that is disposed at a position opposite to the surface to be inspected of the target article held by the holding unit and irradiates the surface to be inspected with light; and irradiation that changes the state of irradiation of the light to the surface to be inspected. further comprising: a state change unit; and a type information acquisition unit that acquires type information indicating the type of the article to be transported as the target article;
Preferably, the irradiation state changing unit changes the irradiation state according to the type information acquired by the type information acquisition unit.

Depending on the shape of the surface to be inspected, the state of light suitable for the inspection of the surface to be inspected by the inspection unit may differ. According to this configuration, since the light irradiation state of the irradiation device is changed according to the shape of the inspection target surface of each of multiple types of articles with different shapes of the inspection target surface, the irradiation state is adjusted to suit the shape of each inspection target surface. Inspections can be carried out in good condition.

Further, in the configuration including the irradiation device, the irradiation state changing section, and the type information acquisition section,
Preferably, the irradiation state changing unit changes the irradiation angle of the light with respect to the inspection target surface according to the type information acquired by the type information acquisition unit.

According to this configuration, the inspection target surface can be satisfactorily inspected while the light is irradiated at an angle suitable for the shape of the inspection target surface.

Further, in the configuration in which the irradiation state changing unit changes the irradiation angle of the light,
The irradiation device includes a plurality of light sources spaced apart from each other around the inspection section,
It is preferable that the irradiation state changing unit turns on the light source selected from the plurality of light sources in accordance with the type information acquired by the type information acquiring unit.

According to this configuration, a light source capable of emitting light at an angle suitable for the shape of the surface to be inspected is selected from among a plurality of light sources arranged apart from each other, and the light source is turned on to perform the inspection. The target surface can be inspected well.

Further, in the configuration in which the irradiation state changing unit changes the irradiation angle of the light,
The irradiation device includes a movable light source that can move around the inspection section,
Preferably, the irradiation state changing unit changes the position of the movable light source according to the type information acquired by the type information acquiring unit.

According to this configuration, by changing the position of the movable light source to a position where light can be irradiated at an angle suitable for the shape of the surface to be inspected, the surface to be inspected can be inspected satisfactorily.

Further, in the configuration including the irradiation device, the irradiation state changing section, and the type information acquisition section,
It is preferable that the irradiation state changing unit changes at least one of the color and brightness of the light irradiated by the irradiation device according to the type information acquired by the type information acquisition unit.

Depending on the shape and condition of the surface to be inspected, the color or brightness of light suitable for the inspection of the surface to be inspected by the inspection unit may vary. According to this configuration, by changing at least one of the color and brightness of the light emitted by the irradiation device according to the type of article, the surface to be inspected can be brought into a state suitable for inspection. The surface to be inspected can be well inspected by the section.

The technology according to the present disclosure can be used in an article conveyance device that conveys a target article having a surface to be inspected.

1: Storage 2: Storage section 4: Article conveyance device 44: Transfer section 441: Holding section 441F: Placement surface 442: Exit/removal drive section 443: Base section 46: Inspection section 460: Imaging device 47: Judgment section 5: Irradiation device 50: Light source 52: Movable light source 6: Irradiation state changing unit 7: Type information acquisition unit 9: Target article 9F: Inspection target surface 9a: Article base end 9b: Article tip 10: Article storage unit 20: Temporary storage Part 243a: Conveyance support section 243m: Conveyance drive section L1: Moving distance R: Inspection area S: Article support section Tm: Conveyance drive section X: First direction Xa: First direction proximal side Xb: First direction tip Side Y: Second direction Z: Orthogonal direction

Claims (13)

An article conveyance device that conveys a target article having a surface to be inspected,
a transfer unit that holds and transfers the target article;
an inspection unit that inspects the surface to be inspected;
The transfer unit includes a holding unit that holds the target article, and changes the state between a protruding state and a retracted state by moving the holding unit in and out along a first direction along the inspection target surface, and comprising: an egress/retreat drive section that transfers the target article between an article support section that supports the target article and the holding section; and a base that supports the egress/retraction drive section;
When viewed in an orthogonal direction along a direction perpendicular to the surface to be inspected, a direction intersecting the first direction is defined as a second direction,
The inspection unit has a fixed position with respect to the base, is arranged at a position facing the inspection target surface of the target article held by the holding unit, and has a strip-shaped inspection area along the second direction. configured to inspect the entire
The moving distance of the holding part in the first direction by the moving part and the moving part is greater than or equal to the length of the target article held in the holding part in the first direction,
The length of the inspection area in the second direction is greater than or equal to the length of the target article held by the holding part in the second direction,
a conveyance drive section that conveys the target article by moving a conveyance support section serving as the article support section;
further comprising a determination unit that determines whether the target article is normal or abnormal based on the inspection result by the inspection unit,
The base of the transfer section is fixedly installed in a passage section through which the target article passes when transporting the target article,
After the target article is transferred from the holding unit to the conveyance support unit, the conveyance drive unit conveys the target article to different locations depending on whether the target article is normal or abnormal. , Goods conveying device. The article conveyance device according to claim 1, wherein the inspection section inspects the entire surface to be inspected by one retraction operation or one protrusion operation by the holding section. The side on which the holding part in the first direction is retracted is defined as a first direction proximal side, and the side in the first direction where the holding part is protruded is defined as a first direction distal side,
When the holding unit is in a retired state, the inspection area is at the same position as the article tip, which is the end of the target article held by the holding unit on the front end side in the first direction, or at the tip of the article. disposed on the front end side in the first direction than the section,
When the holding part is in a protruding state, the inspection area is at the same position as the article proximal end that is the proximal end in the first direction of the target article held by the holding part, or The article conveyance device according to claim 1 or 2, wherein the article conveyance device is arranged closer to the proximal end in the first direction than the article proximal end. The holding unit includes a mounting surface that supports the target article from below with the inspection target surface facing upward,
The article conveyance device according to any one of claims 1 to 3, wherein the inspection section is disposed at a position above the placing surface and facing the inspection target surface. a transport drive unit that transports the target article by moving the transfer unit;
further comprising a determination unit that determines whether the target article is normal or abnormal based on the inspection result by the inspection unit,
The article conveyance device according to any one of claims 1 to 4, wherein the conveyance drive unit conveys the target article to different locations depending on whether the target article is normal or abnormal. The article support section includes an article storage section that is provided inside a storage warehouse and stores the target article, and a temporary storage section where the target article is temporarily placed when the target article is stored in the storage warehouse. , includes;
The article conveying device according to claim 5, wherein the inspection section inspects the inspection target surface of the target article when transferring the target article from the temporary storage section to the holding section. The article conveyance device according to any one of claims 1 to 6 , wherein the inspection section includes an imaging device that captures an image of the inspection area. A plurality of types of articles having different shapes of the surfaces to be inspected are provided in an article conveying facility to be conveyed as the target articles,
an irradiation device that is disposed at a position opposite to the surface to be inspected of the target article held by the holding unit and irradiates the surface to be inspected with light; and irradiation that changes the state of irradiation of the light to the surface to be inspected. further comprising: a state change unit; and a type information acquisition unit that acquires type information indicating the type of the article to be transported as the target article;
The article conveyance device according to any one of claims 1 to 7 , wherein the irradiation state changing unit changes the irradiation state according to the type information acquired by the type information acquisition unit. The article conveyance device according to claim 8 , wherein the irradiation state changing unit changes the irradiation angle of the light with respect to the inspection target surface according to the type information acquired by the type information acquisition unit. The irradiation device includes a plurality of light sources spaced apart from each other around the inspection section,
The article conveyance device according to claim 9 , wherein the irradiation state changing unit turns on the light source selected from the plurality of light sources according to the type information acquired by the type information acquiring unit. The irradiation device includes a movable light source that can move around the inspection section,
The article conveying device according to claim 9 or 10 , wherein the irradiation state changing unit changes the position of the movable light source according to the type information acquired by the type information acquiring unit. Any one of claims 8 to 11 , wherein the irradiation state changing unit changes at least one of the color and brightness of the light irradiated by the irradiation device according to the type information acquired by the type information acquisition unit. The article conveyance device according to item (1). An article conveyance device that conveys a target article having a surface to be inspected,
a transfer unit that holds and transfers the target article;
an inspection unit that inspects the surface to be inspected;
The transfer unit includes a holding unit that holds the target article, and changes the state between a protruding state and a retracted state by moving the holding unit in and out along a first direction along the inspection target surface, and comprising: an egress/retreat drive section that transfers the target article between an article support section that supports the target article and the holding section; and a base that supports the egress/retraction drive section;
When viewed in an orthogonal direction along a direction perpendicular to the surface to be inspected, a direction intersecting the first direction is defined as a second direction,
The inspection section has a fixed position relative to the base, is arranged at a position facing the inspection target surface of the target article held by the holding section, and has a strip-shaped inspection area along the second direction. configured to inspect;
The moving distance of the holding part in the first direction by the moving part and the moving part is greater than or equal to the length of the target article held in the holding part in the first direction,
The length of the inspection area in the second direction is greater than or equal to the length of the target article held by the holding part in the second direction,
a conveyance drive section that conveys the target article by moving a conveyance support section serving as the article support section;
further comprising a determination unit that determines whether the target article is normal or abnormal based on the inspection result by the inspection unit,
The base of the transfer section is fixedly installed in a passage section through which the target article passes when transporting the target article,
After the target article is transferred from the holding unit to the conveyance support unit, the conveyance drive unit conveys the target article to different locations depending on whether the target article is normal or abnormal. , Goods conveying device.

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