JP5304568B2 - Fluid ejection device, surgical instrument - Google Patents

Description

  The present invention relates to a fluid ejecting apparatus including a check valve that opens and closes an inlet channel communicating with a fluid chamber, and a surgical instrument including the fluid ejecting apparatus.

  Surgery with fluid ejected in a pulsed manner allows the organ parenchyma to be incised while preserving the vascular structure such as blood vessels. Furthermore, since incidental damage to living tissue other than the incision is slight, the burden on the patient is small. In addition, since there is little bleeding, the bleeding does not interfere with the field of view of the operative field, so that a rapid operation is possible.

  As a fluid ejecting apparatus for incising or excising a living tissue, there is a fluid ejecting apparatus that reduces the volume of a fluid chamber (pump chamber body) with a diaphragm and ejects fluid from a fluid ejecting opening in a pulse shape. In such a fluid ejecting apparatus, a check valve (check valve) is provided between a fluid chamber and an inlet flow path for supplying fluid to the fluid chamber, and when the fluid is supplied, the check valve is opened, and the fluid chamber There is known a fluid ejection device that closes a check valve when reducing the volume of the fluid (for example, see Patent Document 1).

Japanese Patent Laying-Open No. 2005-152127 (page 7, FIG. 1)

  In such a configuration according to Patent Document 1, a check valve is directly provided in an inlet connection pipe in which an inlet channel is provided. Since the communication portion between the inlet connecting pipe and the fluid chamber is set to be extremely small in order to increase the volume reduction rate of the fluid chamber, the check valve itself is also extremely small, making it difficult to manufacture and handle the check valve.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A fluid ejecting apparatus according to this application example supplies a fluid to the fluid chamber, a fluid ejecting portion that reduces the volume of the fluid chamber by a diaphragm and ejects fluid from the fluid ejecting opening in a pulse shape, and the fluid chamber. An inlet channel and a check valve formed in the diaphragm and disposed between the inlet channel and the fluid chamber, and the check valve when the volume of the fluid chamber is reduced When the inlet channel is closed and the volume of the fluid chamber is expanded from a reduced state, the check valve bends to open the inlet channel.

  According to such a configuration, when the diaphragm is manufactured, the check valve can be integrally formed, so that it is not necessary to make a fine check valve as a single unit and it is easy to manufacture. Further, since the check valve can be attached by attaching the diaphragm to the fluid chamber, there is an effect that the handling is easy and the assemblability is improved.

  Further, if the diaphragm and the check valve are integrally formed, the relative positional accuracy between the diaphragm and the check valve can be increased, and thereby the positional accuracy between the opening and closing inlet flow path and the check valve can be increased. There is also an effect.

  In addition, by providing a check valve, when the fluid chamber is reduced by the diaphragm, the fluid is prevented from flowing back into the inlet channel, and the internal pressure of the fluid chamber is increased to the required size, and the fluid ejection efficiency Can be increased.

  Application Example 2 In the fluid ejection device according to the application example, it is preferable that the check valve is formed by providing a slit.

  According to such a configuration, the check valve can be formed, for example, by providing a substantially U-shaped slit in the diaphragm. Since the diaphragm is formed of a thin plate, the diaphragm and the check valve can be formed in the same processing step by pressing or etching.

  Application Example 3 In the fluid ejection device according to the application example, it is preferable that the check valve has a thin portion in a thickness direction of a bent portion of the check valve.

  According to such a configuration, the check valve bends sensitively to the pressure difference between the fluid chamber and the inlet channel while providing a thickness suitable for the diaphragm by providing a thin portion at the bent portion of the check valve. When the volume of the fluid chamber is reduced, the inlet channel is closed, and when the volume of the fluid chamber returns to the initial state, the inlet channel can be opened.

  Application Example 4 In the fluid ejecting apparatus according to the application example, it is preferable that the check valve is fixed at a position away from a formation range of the thin portion.

  According to such a configuration, since the check valve is bent at the thin portion, the displacement due to the bending is not transmitted to the fixed portion. Therefore, when the check valve is bent, an infinitely small gap does not occur between the fixed part and the fixed part. Therefore, the infinitesimal gap due to repeated bending is clogged with minute dust, resulting in poor check valve closing. And the presence of this dust prevents stress from concentrating on the fulcrum and destroying the check valve, improving durability.

  Application Example 5 In the fluid ejecting apparatus according to the application example described above, a communication portion having a size that does not prevent the check valve from operating is provided at an end of the fluid chamber on the inlet flow channel side. It is desirable.

  According to such a configuration, by providing a continuous communication portion in the fluid chamber, the operating range of the check valve can be secured in a narrow range without greatly affecting the volume of the fluid chamber, which is advantageous for downsizing. is there.

  Application Example 6 In the fluid ejecting apparatus according to the application example described above, the inlet flow path is disposed in a direction opposite to the fluid chamber with the diaphragm interposed therebetween, and the fluid chamber and the inlet flow path It is preferable that the check valve is disposed in a communication path that communicates with each other.

  According to such a configuration, the check valve only needs to be formed in the same plane of the diaphragm, so the shape is simplified, the positional accuracy relative to the open / close communication path is improved, and the inlet flow path is reliably blocked. Can be done.

  Application Example 7 In the fluid ejecting apparatus according to the application example described above, it is preferable that the communication path is provided at a position separated from a peripheral edge of the fluid chamber and communicates with the fluid chamber through a connection hole. .

  According to such a configuration, it is possible to provide a fixed surface of the diaphragm that does not have a notch at the periphery of the fluid chamber and the entire circumference is continuous, and the entire circumference of the diaphragm can be fixed, so that the displacement amount of the diaphragm is stable. In addition, the volume reduction amount of the fluid chamber is stabilized.

  Application Example 8 In the fluid ejection device according to the application example described above, it is preferable that the check valve protrudes from an end portion of the diaphragm to a position that covers the communication portion.

  In such a configuration, the shape of the check valve can be simplified, and a structure that can be easily manufactured can be obtained.

  Application Example 9 In the fluid ejection device according to the application example, it is preferable that the check valve has a width of the bent portion smaller than a portion other than the bent portion.

  If the width of the bent portion of the check valve is reduced, the rigidity of the bent portion can be further reduced, and the opening / closing followability of the inlet channel due to the pressure difference between the fluid chamber and the inlet channel can be improved.

  Application Example 10 In the fluid ejecting apparatus according to the application example described above, the check valve is provided between two support arms projecting from an end portion of the diaphragm in the communication path direction and the two support arms. And a closing portion protruding from the tips of the two supporting arms toward the end of the diaphragm, and the sum of the widths of the supporting arms is smaller than the width of the closing portions, and the supporting arms are bent. Accordingly, it is preferable that the closing portion opens and closes the communication path.

  With such a configuration, it is possible to reduce the rigidity of the bent portion by making the width of the support arm smaller than the width of the closing portion, and improve the followability of opening and closing of the communication path.

  In addition, since the supporting arms are arranged on both sides of the closing portion, the stress balance in bending is good, and the inclination due to twist or the like is suppressed with respect to the communication path, and the communication path can be reliably closed.

  Application Example 11 In the fluid ejecting apparatus according to the application example described above, the inlet flow path is provided substantially parallel to the bottom surface of the fluid chamber and is directly communicated with the fluid chamber, and the check valve is fixed to the diaphragm. It is preferable to bend and extend in a direction substantially perpendicular to the surface, and to open and close the inlet channel.

  According to such a configuration, since the inlet channel communicates linearly with the fluid chamber, the fluid resistance at the communicating portion between the inlet channel and the fluid chamber is reduced, and the fluid can easily flow into the fluid chamber. The dimension in the thickness direction can be reduced.

  Application Example 12 In the fluid ejecting apparatus according to the application example described above, the fluid chamber includes a frame-shaped spacer having an opening penetrating in the thickness direction, and the opening is disposed on both surfaces of the spacer and seals the opening. Preferably, the check valve is formed on at least one of the two diaphragms.

  According to such a configuration, since the diaphragm is provided on each of the surfaces facing one fluid chamber, the volume reduction rate of the fluid chamber can be increased, and a check valve is provided. The back flow of the fluid can be prevented and the pressure in the fluid chamber can be increased.

  [Application Example 13] In the fluid ejecting apparatus according to the application example described above, each of the check valves provided in the two diaphragms includes two inlet flow paths communicating with the fluid chamber. It is desirable to open and close each.

  According to such a configuration, the amount of fluid supplied to the fluid chamber can be increased by providing two inlet channels for one fluid chamber. Accordingly, since the fluid supply pressure from the outside can be reduced, the fluid can be supplied by a simple method such as suspending a liquid bag as a fluid supply source at a higher position than the fluid ejecting apparatus.

  Application Example 14 In the fluid ejecting apparatus according to the application example described above, the inlet flow path includes a groove provided along the outer periphery of the fluid ejecting section, and a fluid supply tube fitted to cover the groove. It is preferable that it is comprised by cullet.

According to such a configuration, since the inlet channel is formed by the groove provided on the outer periphery of the fluid ejecting unit, the inlet channel can be formed by cutting or the like, and is formed more easily than by forming with a thin tube. be able to.
Further, the degree of freedom of the cross-sectional area of the inlet channel is increased, and there is also an effect that adjustment of increase / decrease in the amount of liquid supply is facilitated.

  Application Example 15 In the fluid ejecting apparatus according to the application example described above, it is preferable that the diaphragm is provided with a corrugated structure having irregularities in the thickness direction of the diaphragm around a piezoelectric element that displaces the diaphragm. .

  By providing the corrugated structure, the in-plane stress when the diaphragm is displaced can be suppressed, and the volume of the fluid chamber can be efficiently reduced.

  Application Example 16 A surgical instrument according to this application example includes the fluid ejection device according to the application example.

  According to this application example, a small-sized surgical instrument with high fluid ejection efficiency can be realized by using a fluid ejection device in which a diaphragm and a check valve are integrally formed.

FIG. 3 is an explanatory diagram illustrating an example of a schematic configuration of the fluid ejecting apparatus according to the first embodiment. FIG. 3 is a side cross-sectional view of the fluid ejection unit according to the first embodiment. (A) is a top view which shows the fluid injection part of the state which saw through the upper frame which concerns on Embodiment 1, (b) is a partial top view which expands and shows the planar shape of a check valve. FIG. 3 is a partial cross-sectional view showing the operation of the check valve according to the first embodiment. FIG. 6 is a partial plan view showing a check valve according to another example according to Embodiment 1. FIG. 4 shows a part of a fluid ejection unit according to Embodiment 2, (a) is a perspective view showing a part of a lower frame, and (b) is a side cross-section showing a part of the fluid ejection part. FIG. 7 shows another example 1 of the check valve according to Embodiment 2, wherein (a) is a partial plan view showing a diaphragm, and (b) is a cross-sectional view showing a part of a fluid ejecting unit. The partial top view which shows the check valve of the other Example 2 of Embodiment 2. FIG. The partial top view which shows the check valve of the other Example 3 of Embodiment 2. FIG. The partial top view which shows the check valve of the other Example 4 of Embodiment 2. FIG. FIG. 6 is a side cross-sectional view illustrating a part of a fluid ejection unit according to a third embodiment. The partial top view which shows the check valve of the other Example 1 of Embodiment 3. FIG. FIG. 9 is a partial cross-sectional view illustrating a part of a fluid ejection device according to Example 1 of Embodiment 3. The partial top view which shows the check valve of the other Example 2 of Embodiment 3. FIG. FIG. 6 is a side cross-sectional view illustrating a fluid ejection unit according to a fourth embodiment. The spacer which concerns on Embodiment 4 is shown, (a) is a perspective view, (b) is a fragmentary perspective view which shows the other Example of a spacer. The fluid injection part which concerns on Embodiment 5 is shown, (a) is side sectional drawing, (b) is sectional drawing which shows CC cut surface of (a). FIG. 10 is a plan view illustrating a configuration of a diaphragm according to a sixth embodiment. Sectional drawing which shows the AA cut surface of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 5 show a fluid ejecting apparatus according to Embodiment 1, FIGS. 6 to 10 show Embodiment 2, FIGS. 11 to 14 show Embodiment 3, FIGS. 15 and 16 show Embodiment 4, and FIG. Embodiment 5 and FIGS. 18 and 19 show a fluid ejection device according to Embodiment 6. FIG.
Note that the drawings referred to in the following description are schematic views in which the vertical and horizontal scales of members or portions are different from actual ones for convenience of illustration.

In addition, the fluid ejecting apparatus according to the present invention can be used in various ways such as drawing with ink, cleaning fine objects and structures, cutting and excision of objects, scalpels for operation, etc. In the embodiment, a fluid ejecting apparatus suitable for being installed at the distal end of a catheter used for the purpose of insertion into a blood vessel and removing a thrombus, or a fluid ejecting apparatus suitable for incising or excising a living tissue will be described as an example. To do. Therefore, the fluid used in the embodiment is water, physiological saline, a chemical solution, or the like. Hereinafter, these fluids are collectively referred to as a liquid.
(Embodiment 1)

  FIG. 1 is an explanatory diagram illustrating an example of a schematic configuration of the fluid ejecting apparatus according to the first embodiment. In FIG. 1, a fluid ejecting apparatus 100 contains a liquid as a basic configuration and an infusion bag 120 as a supply source of the liquid, a drive control unit 110, a fluid ejecting unit 10 that changes the liquid into pulsation, and an infusion bag 120. And a fluid supply tube 20 that communicates with the fluid ejecting section 10. The fluid ejecting unit 10 changes the liquid into a pulsation and ejects the fluid jet opening 30 as a droplet 200 at high speed in a pulsed manner. The fluid supply tube 20 can be a catheter.

The drive control unit 110 includes a drive waveform generation circuit unit and a drive control circuit unit (not shown), and an adjustment device that adjusts the drive waveform in accordance with conditions such as the hardness of the surgical part. Further, the drive control unit 110 and the piezoelectric element 51 (see FIG. 2) provided in the fluid ejection unit 10 are connected by a connection cable 130.
The infusion bag 120 may be stored inside the drive control unit 110. In this case, it is preferable to provide a small pump that infuses at a constant pressure inside the drive control unit 110.

Next, the fluid ejecting apparatus according to the first embodiment will be described with reference to FIGS.
FIG. 2 is a side cross-sectional view of the fluid ejection unit according to the first embodiment. In FIG. 2, the fluid ejecting unit 10 includes a fluid chamber 60 and an inlet for supplying a liquid to the fluid chamber 60 inside a cylindrical casing 15 configured by fixing an upper frame 70 and a lower frame 80 to each other. A flow path 72 and an outlet flow path 31 for flowing a liquid from the fluid chamber 60 to the fluid ejection opening 30 are provided.

  In a state where the upper frame 70 and the lower frame 80 are fixed, a cylindrical fitting portion 12 is formed at the rear end portion of the housing 15. The fluid supply tube 20 is fitted into the fitting portion 12, whereby the inlet channel 72 communicates with the fluid supply tube 20. Here, it is more preferable that the outer diameter of the housing 15 is substantially matched with the outer diameter of the fluid supply tube 20.

  The lower frame 80 is provided with a recess 81 on the surface facing the upper frame 70. In addition, the peripheral edge of the diaphragm 40 is tightly fixed to the peripheral edge of the recess 81. A space formed by the recess 81 and the diaphragm 40 is a fluid chamber 60.

  The upper frame 70 is provided with an inlet channel 72 that is spaced apart from the fluid chamber 60 in the opposite direction across the diaphragm 40 and is substantially parallel to the bottom surface of the fluid chamber 60 (concave portion 81). Yes. In addition, the fluid chamber 60 and the inlet flow path 72 are communicated with each other by a communication path 65 including an upper frame side communication path 66 and a lower frame side communication path 77.

  A piezoelectric element 51 as an actuator is provided on the surface of the diaphragm 40 opposite to the fluid chamber 60. A recess 75 is formed in the upper frame 70 so as to avoid the driving range of the piezoelectric element 51. A check valve 90 is formed at the end of the diaphragm 40 on the side of the inlet channel 72. The check valve 90 is provided to open and close the upper frame side communication path 66 that communicates with the inlet flow path 72.

Next, the shape and operation of the check valve 90 will be described with reference to FIGS.
3A and 3B show the plan shape of the check valve according to the present embodiment, wherein FIG. 3A is a plan view showing the plan shape of the fluid ejecting portion in a state where the upper frame is seen through, and FIG. 3B is an enlarged plan view of the check valve. FIG. 4 is a partial sectional view showing the operation of the check valve. 3 and 4, the check valve 90 is formed by providing a substantially U-shaped slit 91 in the diaphragm 40 and extends in a peninsular shape from the inlet channel 72 side toward the fluid chamber 60. The check valve 90 has a flat area larger than the diameter of the upper frame side communication passage 66.

  In addition, a lower frame side communication passage 77 having a size that does not hinder the operation of the check valve 90 is provided at the end of the recess 81 (fluid chamber 60) provided in the lower frame 80 on the inlet flow path 72 side. Yes. Specifically, the size of the lower frame side communication passage 77 is a size that does not contact the recess 81 and the side wall of the lower frame side communication passage 77 when the check valve 90 opens the upper frame side communication passage 66. To do.

  Further, on the surface of the check valve 90 on the upper frame 70 side (see FIG. 2), there is a thin portion 92 that is thinner than the diaphragm 40 in the bent portion when the upper frame side communication passage 66 is opened and closed. Is provided. The thin-walled portion 92 is formed so that the diaphragm 40 crosses the base portion of the check valve 90 by a processing means such as half etching.

  Next, the fixed form and operation of the check valve 90 will be described. The peripheral edge portion of the diaphragm 40 is fixed to the diaphragm fixing surface 82 of the lower frame 80 by means such as adhesion (see FIG. 3A). Further, as shown in FIG. 4, the side wall 77 a of the lower frame side communication passage 77 is set at a position away from the formation range of the thin portion 92. That is, the diaphragm 40 (check valve 90) and the diaphragm fixing surface 82 are fixed at a position away from the formation range of the thin portion 92.

  Further, although the upper frame 70 extends to cover the thin portion 92, the fixing range with the check valve 90 is a range away from the formation range of the thin portion 92 shown in FIG.

  On the surface of the diaphragm 40, a piezoelectric element 51 is provided at a substantially central portion of the fluid chamber 60.

  Next, the flow action of the liquid in the fluid ejecting apparatus 100 according to the present embodiment will be described with reference to FIGS. The infusion bag 120 is disposed at a high position with respect to the fluid ejecting unit 10, and fluid is supplied at a constant pressure using a pressure difference caused by a difference in position head between the infusion bag 120 and the fluid ejecting unit 10. The fluid is supplied to the fluid chamber 60 through the tube 20. Further, the supplied liquid is converted into a pulsating flow by the fluid ejecting unit 10, and ejected in a pulse form from the fluid ejecting opening 30 through the outlet channel 31.

  Next, the operation of the fluid ejecting unit 10 will be described with reference to FIGS. The drive control unit 110 applies the drive waveform formed by the drive waveform generation circuit unit included in the drive control unit 110 from the drive control circuit unit to the piezoelectric element 51. When supplying the liquid from the inlet flow path 72, the check valve 90 bends to a position 90c shown in FIG. 4 to open the upper frame side communication path 66 so that the inlet flow path 72 and the fluid chamber 60 communicate with each other. A liquid is supplied into 60.

  When a drive signal is input to the piezoelectric element 51 and the piezoelectric element 51 is charged and rapidly contracts, the diaphragm 40 is suddenly displaced in a convex shape in the direction of reducing the volume of the fluid chamber 60. As a result, the pressure in the fluid chamber 60 rises higher than the supply pressure from the inlet flow path 72, and the check valve 90 closes the upper frame side communication path 66. That is, the check valve 90 closes the inlet channel 72. In this way, the check valve 90 closes the inlet channel 72, whereby the pressure in the fluid chamber 60 rises more rapidly and reaches several atmospheres. As a result, pulsed fluid discharge, that is, high-speed droplets 200 are ejected in pulses from the fluid ejection opening 30 through the outlet channel 31.

  When the drive signal applied to the piezoelectric element 51 is removed, the piezoelectric element 51 is discharged. When the piezoelectric element 51 is discharged and returned to the initial state, the diaphragm 40 rapidly displaces the volume of the fluid chamber 60 to the initial state. Then, the internal pressure of the fluid chamber 60 is abruptly reduced or becomes a vacuum state. At this time, since the liquid is supplied to the inlet channel 72 from the infusion bag 120 at a constant pressure, the check valve 90 is opened due to the pressure difference between the fluid chamber 60 and the inlet channel 72, and the liquid enters the fluid chamber 60. Supplied. By repeating such operations of the diaphragm 40 and the check valve 90, pulsed droplet ejection is continued.

  Therefore, according to the first embodiment described above, by providing the check valve 90, when the fluid chamber 60 is contracted by the diaphragm 40, the liquid is prevented from flowing back to the inlet flow path 72, and the internal pressure of the fluid chamber 60 is reduced. Can be increased to the required size, and the fluid ejection efficiency can be increased.

  The planar size of the diaphragm 40 in the present embodiment is such that the width W is 1 to 2 mm, the length is several mm, and the thickness is 20 μm, and the check valve 90 is formed in the plane of the diaphragm 40 so that it has a finer shape. Become.

  Therefore, according to the present embodiment, since the check valve 90 can be formed at the same time when the diaphragm 40 is manufactured, it is not necessary to make the fine check valve 90 alone, and it is easy to manufacture. Further, since the check valve 90 can be attached by attaching the diaphragm 40 to the fluid chamber 60, there is an effect that the handling is easy and the assembling property is improved.

  Further, if the diaphragm 40 and the check valve 90 are integrally formed, the relative positional accuracy between the diaphragm 40 and the check valve 90 can be improved, and thereby, the upper frame side communication path 66 and the check valve 90 can be improved. There is also an effect that the positional accuracy can be increased.

  Further, since the diaphragm 40 is formed of a thin plate, the diaphragm 40 and the check valve 90 can be easily formed in the same process by pressing or etching.

  Further, by providing the thin portion 92 at the bent portion of the check valve 90, the check valve 90 bends sensitively to the pressure difference between the fluid chamber 60 and the inlet channel 72 while having a thickness suitable for the diaphragm 40. The inlet channel 72 can be closed when the volume of the fluid chamber 60 is reduced, and the inlet channel 72 can be opened when the volume of the fluid chamber 60 returns to the initial state.

  Further, since the check valve 90 is bent at the thin wall portion 92, the displacement due to the bending is not transmitted to the fixing surface (the range of A in the drawing or the fixing portion of the diaphragm fixing surface 82). Therefore, when the check valve 90 is bent, an infinitely small gap B (see FIG. 4) does not occur between the fixing portion of the upper frame 70 and the check valve 90.

  As a result, the infinitesimal gap B is clogged by repeated bending and the check valve 90 is not closed or the check valve 90 is broken by stress applied to the fulcrum. The durability of the check valve 90 can be improved.

  Further, by providing the lower frame side communication passage 77 having a size that does not prevent the check valve 90 from operating at the end of the fluid chamber 60 on the inlet flow path 72 side, the volume of the fluid chamber 60 is greatly affected. The operating range of the check valve 90 can be secured within a narrow range without giving it, which is advantageous for downsizing.

Further, as shown in FIG. 2, the fluid chamber 60 and the inlet channel 72 are spaced apart from each other in the cross-sectional direction, and the check valve 90 is disposed in the communication path 65 that communicates the fluid chamber 60 and the inlet channel 72. It is installed. Therefore, since the check valve 90 may be formed in the same plane as the diaphragm 40, the shape is simplified, the relative positional accuracy with respect to the upper frame side communication path 66 to be opened and closed is improved, and the inlet channel 72 (upper The frame side communication path 66) can be reliably closed.
(Other examples of Embodiment 1)

Note that the check valve 90 of the present embodiment preferably has a shape as shown in FIG. 5 in order to improve followability due to a pressure difference between the fluid chamber 60 and the inlet channel 72.
FIG. 5 is a partial plan view showing a check valve according to another example of the present embodiment. The check valve 90 is provided with constricted portions 94a and 94b on both side surfaces of the thin portion 92, and the width is partially reduced.

  That is, the check valve 90 improves the followability of opening and closing of the inlet channel due to the pressure difference between the fluid chamber 60 and the inlet channel 72 by further reducing the rigidity of the bent portion by narrowing the width of the bent portion. can do.

  In addition, it is preferable that the constricted portions 94a and 94b have a smooth arc shape. In this way, the stress concentration due to the bending of the check valve 90 can be eliminated and the durability can be enhanced.

Note that either one of the constricted portions 94a and 94b may be provided, or a through hole may be provided at the center in the width direction of the bent portion.
(Embodiment 2)

  Next, the fluid ejecting apparatus according to the second embodiment will be described with reference to the drawings. The second embodiment is characterized in that the form of the communication portion between the inlet channel and the fluid chamber is different from that of the first embodiment. Therefore, the description will focus on the differences from the first embodiment. The same functional parts are denoted by the same reference numerals.

  6A and 6B show a part of the fluid ejecting unit according to the second embodiment, FIG. 6A is a perspective view showing a part of the lower frame, and FIG. 6B is a side sectional view showing a part of the fluid ejecting part. 6 (a) and 6 (b), the lower frame 80 includes a recess 81 that forms the fluid chamber 60, a connection hole 68 that opens along the bottom surface of the recess 81, an inlet channel 72, and a connection hole 68. And a lower frame side communication passage 77 that communicates with each other. The connection hole 68 and the lower frame side communication passage 77 are in communication with each other, leaving the diaphragm fixing portion 85.

  As shown in FIG. 6A, the diaphragm fixing surface 82 is formed in the same plane over the entire periphery of the peripheral portion of the fluid chamber 60. The cross-sectional shape of the connection hole 68 is not limited to a quadrangle, and may be a circle.

  The diaphragm 40 includes the check valve 90 and has the same shape as that of the first embodiment (see FIG. 3). The peripheral edge is fixed to the diaphragm fixing surface 82 and the surface of the diaphragm fixing portion 85 (diaphragm fixing surface 82). Fixed. That is, the diaphragm 40 is fixed to the entire periphery of the peripheral edge of the fluid chamber 60, and the root portion of the check valve 90 is fixed.

  The upper frame side communication path 66 (that is, the inlet flow path 72) is opened and closed by the check valve 90. When the volume of the fluid chamber 60 decreases, the upper frame side communication path 66 is closed by the check valve 90, and when the volume of the fluid chamber 60 returns to the initial state, the upper frame side communication path 66 is opened.

  According to such a configuration, since the notch is not present in the periphery of the fluid chamber 60 and the entire circumference is continuous, the diaphragm 40 can be fixed over the entire periphery of the periphery of the fluid chamber 60, so that the diaphragm 40 can be stably displaced. The action can be continued.

In addition, although the check valve of this embodiment illustrated and demonstrated the shape by Embodiment 1 (refer FIG. 3) mentioned above, it can adapt not only to this shape.
(Other Example 1 of Embodiment 2)

  7A and 7B show another example 1 of the check valve according to the second embodiment, in which FIG. 7A is a partial plan view showing a diaphragm, and FIG. 7B is a cross-sectional view showing a part of a fluid ejection unit. 7A and 7B, the check valve 90 is formed by a substantially U-shaped slit 91, has a thin portion 92 on the fluid chamber 60 side, and protrudes on the upper frame side communication path 66 side. Yes. The lower frame 80 has a shape similar to that shown in FIG.

  The diaphragm 40 is fixed to a diaphragm fixing surface 82 including a peripheral edge surrounding the fluid chamber 60. At this time, the side wall 77 a on the diaphragm fixing portion 85 side of the lower frame side communication passage 77 is set at a position away from the formation range of the thin portion 92. That is, the fixing range of the check valve 90 with the diaphragm fixing surface 82 is a position away from the formation range of the thin portion 92.

  Further, although the upper frame 70 extends to cover the thin portion 92, the check valve 90 is fixed in a range indicated by A in FIG.

  Further, the check valve 90 has the same operation as that of the second embodiment described above, and there is no notch at the periphery of the fluid chamber 60, and the entire circumference continues. Thereby, the diaphragm 40 can be fixed over the entire periphery of the peripheral edge of the fluid chamber 60, and the diaphragm 40 can continue a stable displacement action.

In this embodiment, the check valve 90 formed by the substantially U-shaped slit 91 is illustrated, but the shape of the check valve is not limited to this shape.
(Other Example 2 of Embodiment 2)

  FIG. 8 is a partial plan view showing a check valve according to another example 2 of the second embodiment. The check valve 90 protrudes in a peninsular shape from the end of the diaphragm 40 toward the upper frame side communication path 66. The outer shape of the check valve 90 is within the range of the lower frame side communication passage 77 (see FIG. 7A) and has a size to block the upper frame side communication passage 66.

  A thin portion 92 is provided at the base portion (bent portion) of the check valve 90 at substantially the same position as in the first embodiment (see FIG. 7A). The method for fixing the diaphragm 40 is performed in the same way as in the first embodiment (see FIGS. 7A and 7B).

Even if the check valve 90 has such a shape, the same effects as those of Embodiment 2 and Example 1 described above can be obtained, and the shape of the check valve can be simplified and the structure can be easily manufactured.
(Other Example 3 of Embodiment 2)

  FIG. 9 is a partial plan view illustrating a check valve according to another example 3 of the second embodiment. The check valve 90 protrudes in a peninsular shape from the diaphragm 40 toward the upper frame side communication path 66. The outer shape of the check valve 90 is within the range of the lower frame side communication passage 77 (see FIG. 7A) and has a size to block the upper frame side communication passage 66.

  The check valve 90 is provided with constricted portions 94a and 94b on both side surfaces of the thin portion 92, and the width is partially reduced.

  That is, the check valve 90 can further reduce the rigidity of the bent portion by narrowing the width of the bent portion. Thereby, the followability of opening and closing of the inlet flow path 72 (upper frame side communication path 66) due to the pressure difference between the fluid chamber 60 and the inlet flow path 72 can be improved.

  The constricted portions 94a and 94b are preferably formed in a smooth circular arc shape, and the stress concentration due to the bending of the check valve 90 can be eliminated and the durability can be enhanced.

Note that either one of the constricted portions 94a and 94b may be provided, or a through hole may be provided at the center in the width direction of the bent portion.
(Other Example 4 of Embodiment 2)

  FIG. 10 is a partial plan view showing a check valve according to Example 4 of the second embodiment. The check valve 90 includes two support arms 96 and 97 projecting from the end of the diaphragm 40 in the direction of the upper frame side communication path 66, and the tips of the support arms 96 and 97 between the support arms 96 and 97. And a closing portion 98 protruding in the direction of the end portion of the diaphragm 40.

  The sum of the widths of the support arms 96 and 97 is at least smaller than the width of the closing portion 98. Preferably, the width is set to be small within a range in which the closed portion 98 is in the same plane as the diaphragm 40 in the initial state. The support arms 96 and 97 have a width that can be bent by a pressure difference between the fluid chamber 60 and the inlet channel 72. Further, the support arms 96 and 97 are equally disposed on both sides of the closing portion 98 in the width direction.

  The outer shape of the check valve 90 is within the range of the lower frame side communication passage 77 (see FIG. 7A) and has a size for blocking the upper frame side communication passage 66.

  The fixing structure of the diaphragm 40 including the check valve 90 and the upper frame 70 and the lower frame 80 can be performed in the same relationship as the structure shown in FIG. Each of the support arms 96 and 97 has a thin portion 92 in the vicinity of the root portion. The position of the thin portion 92 corresponds to the bent portions of the support arms 96 and 97.

  Accordingly, the check valve 90 is bent at the thin wall portion 92 of the support arms 96 and 97 due to the pressure difference between the fluid chamber 60 and the inlet flow path 72, and the closing portion 98 is displaced without being deformed, and the upper frame side communication passage 66. (Inlet channel 72) is opened and closed.

  With such a configuration, the rigidity of the bent portion can be further reduced, and the followability of opening and closing of the upper frame side communication path 66 due to the pressure difference between the fluid chamber 60 and the inlet flow path 72 can be improved. .

In addition, since the support arms 96 and 97 are evenly arranged on both sides in the width direction of the closing portion 98, the bending balance (stress balance) is good and the upper frame side communication path 66 is prevented from being inclined due to twisting or the like. The upper frame side communication path 66 can be reliably closed.
(Embodiment 3)

Subsequently, a fluid ejecting apparatus according to Embodiment 3 will be described with reference to the drawings. The third embodiment is characterized in that the arrangement of the inlet channel and the form of the check valve are different from the configurations of the first and second embodiments described above. Therefore, the description will focus on the differences from the first embodiment. The same functional parts are denoted by the same reference numerals.
FIG. 11 is a side cross-sectional view illustrating a part of the fluid ejection unit according to the third embodiment. In the fluid ejection unit 10, the inlet channel 72 is provided in parallel to the bottom surface of the fluid chamber 60, and is in direct communication with the fluid chamber 60. The check valve 90 is bent and extended in a substantially vertical direction with respect to the diaphragm fixing surface 82, and is configured to directly open and close the inlet flow path 72.

  The check valve 90 is formed by the slit 91 as in the first embodiment (see FIG. 3), and a thin portion 92 is provided on the lower frame 80 side surface of the bent portion. The fixed portion between the upper frame 70 and the lower frame 80 of the check valve 90 is set at a position away from the thin portion 92. Further, a flat portion 93 having an area sufficiently larger than the cross-sectional area of the inlet channel 72 and having an area capable of closing the inlet channel 72 is provided at the tip of the thin portion 92.

  As in the configuration of the second embodiment (see FIG. 6A) described above, a diaphragm fixing portion 86 having a connection hole 68 is formed between the inlet channel 72 and the fluid chamber 60, and this diaphragm fixing. The diaphragm 40 can be fixed to the entire periphery of the peripheral edge of the fluid chamber 60 by fixing the diaphragm 40 to the diaphragm fixing surface 82 on the upper surface of the portion 86.

  In such a configuration, when the volume of the fluid chamber 60 decreases, the check valve 90 closes the inlet flow path 72, and when the volume of the fluid chamber 60 returns to the initial state, the check valve 90 is positioned. Bent to 90c to open the inlet channel 72.

  The check valve 90 is bent from a developed shape as shown in FIG. 3B (indicated by a two-dot chain line 90A in FIG. 11) after forming the thin portion 92 by a processing means such as half-etching and then at a right angle. Can be formed.

  According to such a configuration, since the inlet channel 72 communicates directly with the fluid chamber 60, the fluid is compared to a structure in which the inlet channel 72 and the fluid chamber 60 are separated from each other in the cross-sectional direction and communicated with each other through the communication channel. The resistance can be reduced and the liquid can easily flow into the fluid chamber 60, and the cross-sectional dimension can be reduced.

The check valve 90 of the present embodiment has been described by exemplifying the shape formed by the slit 91 as in the first embodiment (see FIG. 3) described above, but is not limited to this shape and can be adapted. .
(Other Example 1 of Embodiment 3)

  FIG. 12 is a partial plan view showing a check valve of another example 1 according to the third embodiment, and FIG. 13 is a partial cross-sectional view showing a part of the fluid ejection device. 12 and 13, the check valve 90 protrudes in a peninsular shape from the end of the diaphragm 40 in the direction of the inlet flow path 72, and is bent and extended in a substantially vertical direction with respect to the diaphragm fixing surface 82. 72 is configured to directly open and close.

  The check valve 90 is provided with a thin portion 92 on the surface of the bent portion on the upper frame 70 side. The fixed portion between the upper frame 70 and the lower frame 80 of the check valve 90 is set at a position away from the thin portion 92. Further, a flat portion 93 having an area sufficiently larger than the cross-sectional area of the inlet channel 72 and having an area capable of closing the inlet channel 72 is provided at the tip of the thin portion 92.

  A diaphragm fixing part 86 having a connection hole 68 is formed between the inlet channel 72 and the fluid chamber 60. In the diaphragm 40, the peripheral edge of the fluid chamber 60 is fixed to the diaphragm fixing surface 82 on the upper surface of the diaphragm fixing portion 86.

  Even in such a configuration, when the volume of the fluid chamber 60 becomes small, the check valve 90 closes the inlet flow path 72, and when the volume of the fluid chamber 60 returns to the initial state, the check valve 90 Bends to position 90c to open the inlet channel 72.

  Note that the check valve 90 can be formed from a developed shape as shown in FIG. 11 (indicated by a two-dot chain line 90A) by forming the thin portion 92 by a processing means such as half etching and then bending it at a right angle. .

With such a configuration, the same effects as those of the third embodiment described above can be obtained, and the shape of the diaphragm 40 including the check valve 90 is simplified, which makes it easier to manufacture.
(Other Example 2 of Embodiment 3)

  FIG. 14 is a partial plan view showing a check valve according to another example 2 of the embodiment 3. First, the developed shape of the check valve 90 will be described. The check valve 90 includes a closed portion 98 of the inlet channel that extends from the diaphragm 40 and a connection portion 99 that connects the closed portion 98 and the end portion of the diaphragm 40.

  The connecting portion 99 extends from the end portion of the diaphragm 40 and is narrower than the closing portion 98. Further, the closing portion 98 extends from the connecting portion 99 to a range where the inlet channel 72 is closed.

  Here, the connection part 99 is bent perpendicularly to the surface of the diaphragm 40. The diaphragm 40 is fixed by an upper frame 70 and a lower frame 80 as shown in FIG. 13 in a state where the check valve 90 is bent. A thin portion 92 is formed on the surface of the connection portion 99. The thin portion 92 is formed at a position corresponding to a bent portion of the check valve 90.

Even if the check valve 90 has such a configuration, the same effects as those of the first example of the third embodiment described above can be obtained.
(Embodiment 4)

  Next, a fluid ejecting apparatus according to Embodiment 4 will be described with reference to the drawings. The fourth embodiment is characterized in that the above-described first to third embodiments have two diaphragms and two inlet channels, in contrast to the configuration using one diaphragm.

  FIG. 15 is a side cross-sectional view illustrating a fluid ejecting unit according to Embodiment 4, FIG. 16A is a perspective view of a spacer, and FIG. 16B is a partial perspective view illustrating another example of the spacer. In FIG. 15 and FIG. 16A, in the fluid ejecting unit 10, the diaphragm 40 is fixed to the front surface 143 and the diaphragm 41 is fixed to the back surface 144 of the thin plate-like spacer 140. The spacer 140 has a frame shape having an opening 141 as shown in FIG. The opening 141 is sealed with the diaphragms 40 and 41 to form a fluid chamber 60 in which the diaphragm 40 is an upper lid, the diaphragm 41 is a lower lid, and the spacer 140 is a side wall.

  In addition, an outlet channel 31 and a fluid ejection opening 30 are formed at one end of the spacer 140. Further, a communication portion 142 that is continuous with the fluid chamber 60 is provided on a side surface that faces the outlet channel 31. In addition, piezoelectric elements 51 and 52 are fixed to the diaphragms 40 and 41 at positions facing each other with the fluid chamber 60 interposed therebetween.

  The upper frame 70 is formed with an inlet channel 72 that is separated from the fluid chamber 60 in the cross-sectional direction, and an upper frame side communication channel 66 that connects the fluid chamber 60 and the inlet channel 72 in a substantially vertical direction. On the other hand, the lower frame 80 is formed with an inlet channel 88 that is separated from the fluid chamber 60 in the cross-sectional direction, and a lower frame side communication channel 89 that connects the fluid chamber 60 and the inlet channel 88 in a substantially vertical direction. Yes. The inlet channels 72 and 88 communicate with the fluid supply tube 20 that is fitted to the rear end of the fluid ejecting unit 10.

  Check valves 90 and 95 are provided at the openings on the fluid chamber 60 side of each of the upper frame side communication path 66 and the lower frame side communication path 89. The check valve 90 is formed integrally with the diaphragm 40, and the check valve 95 is formed integrally with the diaphragm 41. In the present embodiment, a check valve having the same configuration as that of the first embodiment (see FIG. 3) described above can be adopted, and the diaphragm 41 can be considered as a shape in which the front and back of the diaphragm 40 are interchanged.

  In such a configuration, when drive signals having the same phase are applied to the piezoelectric elements 51 and 52, the diaphragms 40 and 41 are displaced so as to reduce the volume of the fluid chamber 60. When the application of the drive signal to the piezoelectric elements 51 and 52 is stopped, both the diaphragms 40 and 41 return to the initial state. When the volume of the fluid chamber 60 decreases, the pressure inside the fluid chamber 60 increases, the check valve 90 closes the inlet flow path 72, and the check valve 95 closes the inlet flow path 88. Further, when the volume of the fluid chamber 60 returns to the initial state, the pressure of the inlet channels 72 and 88 becomes larger than the internal pressure of the fluid chamber 60, so the check valve 90 opens the inlet channel 72. Then, the check valve 95 opens the inlet channel 88 and the liquid is supplied to the fluid chamber 60.

According to such a configuration, the diaphragms 40 and 41 are provided on the surfaces facing the one fluid chamber 60, respectively, and the volume reduction rate of the fluid chamber 60 can be increased by driving in the same phase. In addition, since two inlet channels communicating with the fluid chamber 60 are provided, a sufficient amount of liquid can be supplied.
Further, since the check valves 90 and 95 are provided in the respective inlet channels, the back flow of the liquid to the inlet channels 72 and 88 can be prevented, the pressure in the fluid chamber 60 can be increased, and more powerful droplet ejection. There is an effect that can be performed.

  In the present embodiment, the structure in which the two inlet channels 72 and 88 are provided for one fluid chamber has been described as an example. However, the inlet channel 72 or the inlet channel 88 that communicates with the fluid chamber 60 is identical. It is good also as a structure which provides one. At this time, two pairs of the inlet flow path and the check valve are prepared, and either one of the check valves is fixed in a closed state. A configuration may be adopted.

  Moreover, in this embodiment, the technical idea of Embodiment 2 (refer FIG. 6) mentioned above can be applied. For example, as shown in FIG. 16B, a communication hole 146 that penetrates from the front surface 143 to the back surface 144 is opened at a position spaced apart from the opening 141 of the spacer 140 in the plane direction, and communicates from the opening 141 to the communication hole 146. A connection hole 145 is provided. The communication hole 146 communicates with the upper frame side communication path 66 and the lower frame side communication path 89 shown in FIG.

  With this configuration, the peripheral portion of the opening 141 is formed with a diaphragm fixing surface 143a on the front surface side of the spacer 140 and a diaphragm fixing surface 143b on the back surface side. It can be fixed over the circumference, and the diaphragms 40 and 41 can continue a stable displacement action.

Further, in the structure using the spacer 140 as in the present embodiment, if only one of the front surface side and the back surface side of the communication hole 146 is opened, a fluid ejecting portion having a single configuration of the inlet channel can be easily realized. be able to.
(Embodiment 5)

Next, a fluid ejecting apparatus according to the fifth embodiment will be described with reference to the drawings. The fifth embodiment is characterized in that the configuration of the inlet channel is different from the configuration described in the first to fourth embodiments. In addition, although this embodiment can be adapted to the configuration of the fluid ejecting unit described in each of the first to fourth embodiments described above, the configuration according to the first embodiment (see FIG. 2) will be described as an example.
FIG. 17: shows the fluid injection part which concerns on Embodiment 5, (a) is side sectional drawing, (b) is sectional drawing which shows CC cut surface of (a). In FIG. 17, the inlet channel 72 is configured by a groove 78 formed along the length direction in the outer peripheral portion of the upper frame 70 and the inner shell 21 of the fluid supply tube 20.

The groove 78 has a cross-sectional area required as an inlet channel. By fitting the fluid supply tube 20 to the fitting portion 13 of the housing 15, the opening of the groove 78 is sealed, and the inlet channel 72 is configured.
In addition, even if it is the structure provided with two inlet flow paths like Embodiment 4 (refer FIG. 15) mentioned above, two inlet flow paths are formed by forming two grooves and fitting the fluid supply tube 20. Can be configured.

According to such a configuration, since the inlet channel 72 is formed by the groove 78 provided on the outer periphery of the fluid ejecting unit 10 (upper frame 70), the groove 78 can be formed by cutting or the like. It can be formed more easily than forming in a shape.
In addition, the degree of freedom of the cross-sectional area of the inlet channel 72 is increased, and there is also an effect that adjustment of increase / decrease in the supply amount of liquid becomes easy.
(Embodiment 6)

  Next, Embodiment 6 will be described with reference to the drawings. In the first to third embodiments described above, the configuration of the check valve has been mainly described. In the present embodiment, the configuration of the diaphragm 40 will be described.

  18 and 19 show the configuration of the diaphragm according to the present embodiment, FIG. 18 is a plan view, and FIG. 19 is a cross-sectional view taken along the line AA of FIG. In addition, the check valve 90 illustrates the shape (refer FIG. 4) of Embodiment 1, and abbreviate | omits description.

  18 and 19, the diaphragm 40 has a wave structure 42 around the piezoelectric element 51. The corrugated structure 42 can be formed by stamping or the like on the surface of the diaphragm 40.

  The corrugated structure 42 is formed at an intermediate position between the piezoelectric element 51 and the side wall of the recess 81 constituting the fluid chamber 60. Moreover, although the corrugated structure 42 has illustrated one line | wire structure in FIG.18, 19, you may comprise by multiple lines.

  In the flat structure diaphragm 40 shown in the first to third embodiments described above, even if the initial deformation by the piezoelectric element 51 is low, the in-plane stress of the tensile force applied to the diaphragm 40 as the out-of-plane deformation increases. Will occur.

The in-plane stress increases the rigidity of the diaphragm 40. Therefore, by providing the corrugated structure 42, in-plane stress is suppressed, and displacement due to expansion and contraction of the piezoelectric element 51 can be efficiently converted into volume reduction of the fluid chamber 60 even if the plane area of the diaphragm 40 is small. To do.
Note that the corrugated structure 42 can be adapted to the diaphragms shown in the fourth and fifth embodiments.

  The fluid ejecting apparatus 100 according to the present invention can be used in various ways such as drawing using ink, washing fine objects and structures, cutting and excision of objects, and scalpels. It is suitable as a surgical instrument that is used by being installed at the tip of a catheter that is used for the purpose of removing or removing a living tissue.

  DESCRIPTION OF SYMBOLS 20 ... Fluid supply tube, 30 ... Fluid injection opening part, 31 ... Outlet channel, 40 ... Diaphragm, 60 ... Fluid chamber, 70 ... Upper frame, 72 ... Inlet channel, 80 ... Lower frame, 90 ... Check valve, 100 ... fluid ejection device.

Claims (12)

A fluid ejecting portion that reduces the volume of the fluid chamber by a diaphragm and ejects fluid in a pulse form from the fluid ejecting opening; and
An inlet channel that is disposed in the opposite direction to the fluid chamber across the diaphragm and supplies fluid to the fluid chamber;
A check valve formed in the diaphragm and disposed in a communication path communicating the inlet channel and the fluid chamber;
The check valve closes the inlet channel when the volume of the fluid chamber is reduced;
The fluid ejecting apparatus according to claim 1, wherein when the volume of the fluid chamber is expanded from a reduced state, the check valve bends to open the inlet channel. The fluid ejection device according to claim 1,
The fluid ejection device, wherein the check valve is formed by providing a slit. The fluid ejection device according to claim 1 or 2,
The check valve includes a thin portion in a thickness direction at a bent portion of the check valve. The fluid ejection device according to claim 3, wherein
The fluid ejecting apparatus according to claim 1, wherein the check valve is fixed at a position away from a formation range of the thin portion. The fluid ejection device according to any one of claims 1 to 4,
An end of the inlet passage side of the fluid chamber, the fluid ejecting apparatus, wherein the communicating passage is provided with the check valve has a size in the range that does not preclude the operation. The fluid ejection device according to any one of claims 1 to 5,
The fluid ejecting apparatus according to claim 1, wherein the communication path is provided at a position spaced apart from a peripheral edge of the fluid chamber and communicates with the fluid chamber through a connection hole. The fluid ejection device according to claim 1, wherein:
A fluid ejecting apparatus wherein the check valve, characterized in that it is projected from an end portion of the diaphragm to a position covering the communication channel. In the fluid ejection device according to any one of claims 3 to 7,
The fluid ejection device, wherein the check valve has a width of the bent portion smaller than a portion other than the bent portion. The fluid ejection device according to any one of claims 1 to 5,
The check valve has two support arms projecting from the end of the diaphragm in the direction of the communication path, and the end of the diaphragm from the tip of the two support arms between the two support arms. A blocking portion projecting in the direction,
The sum of the widths of the supporting arms is smaller than the width of the closing portion, and the closing portion opens and closes the communication path when the supporting arm is bent. The fluid ejection device according to any one of claims 1 to 9,
The fluid ejection, wherein the inlet flow path is configured by a groove provided along the outer periphery of the fluid ejection section, and an inner wall of a fluid supply tube fitted to cover the groove. apparatus. The fluid ejection device according to any one of claims 1 to 10,
The die A Fulham, piezoelectric elements are provided, the fluid ejection apparatus characterized by corrugated structure is provided having an uneven thickness direction of the diaphragm around the piezoelectric element. A surgical instrument comprising the fluid ejection device according to any one of claims 1 to 11.

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