JP2009291652A5 - - Google Patents

Claims (12)

A fluid ejecting portion that reduces the volume of the fluid chamber by a diaphragm and ejects fluid in a pulse form from the fluid ejecting opening; and
An inlet channel that is disposed in the opposite direction to the fluid chamber across the diaphragm and supplies fluid to the fluid chamber;
A check valve formed in the diaphragm and disposed in a communication path communicating the inlet channel and the fluid chamber;
The check valve closes the inlet channel when the volume of the fluid chamber is reduced;
The fluid ejecting apparatus according to claim 1, wherein when the volume of the fluid chamber is expanded from a reduced state, the check valve bends to open the inlet channel. The fluid ejection device according to claim 1,
The fluid ejection device, wherein the check valve is formed by providing a slit. The fluid ejection device according to claim 1 or 2,
The check valve includes a thin portion in a thickness direction at a bent portion of the check valve. The fluid ejection device according to claim 3, wherein
The fluid ejecting apparatus according to claim 1, wherein the check valve is fixed at a position away from a formation range of the thin portion. The fluid ejection device according to any one of claims 1 to 4,
The fluid ejecting apparatus according to claim 1, wherein a communication portion having a size that does not prevent the check valve from operating is provided at an end of the fluid chamber on the inlet flow channel side. The fluid ejection device according to any one of claims 1 to 5 ,
The fluid ejecting apparatus according to claim 1, wherein the communication path is provided at a position spaced apart from a peripheral edge of the fluid chamber and communicates with the fluid chamber through a connection hole. The fluid ejection device according to claim 1 , wherein:
The fluid ejecting apparatus according to claim 1, wherein the check valve protrudes from an end of the diaphragm to a position covering the communication portion. In the fluid ejection device according to any one of claims 3 to 7 ,
The fluid ejection device, wherein the check valve has a width of the bent portion smaller than a portion other than the bent portion. The fluid ejection device according to any one of claims 1 to 5 ,
The check valve has two support arms projecting from the end of the diaphragm in the direction of the communication path, and the end of the diaphragm from the tip of the two support arms between the two support arms. A blocking portion projecting in the direction,
The sum of the widths of the supporting arms is smaller than the width of the closing portion, and the closing portion opens and closes the communication path when the supporting arm is bent. The fluid ejection device according to any one of claims 1 to 9 ,
The fluid ejection, wherein the inlet flow path is configured by a groove provided along the outer periphery of the fluid ejection section, and an inner wall of a fluid supply tube fitted to cover the groove. apparatus. The fluid ejection device according to any one of claims 1 to 10 ,
The fluid ejection device according to claim 1 , wherein the diaphragm is provided with a piezoelectric element, and a corrugated structure having irregularities in the thickness direction of the diaphragm is provided around the piezoelectric element. A surgical instrument comprising the fluid ejection device according to any one of claims 1 to 11 .